A stage with high voltage resistance and low leakage current for a probe station

Abstract

The present invention relates to a stage with high voltage resistance and low leakage current for a probe station, comprising a support connection block connected to an air-floating motion platform and a support base fixed above the support connection block, and the present invention relates to the field of stage technology. The stage with high voltage resistance and low leakage current for a probe station is connected to a ceramic layer by vacuum adsorption of a suction cup as a signal layer, and a mica layer is connected to the ceramic layer by insulating screws under the ceramic layer, thereby eliminating leakage current, effectively overcoming the problem in the prior art that the current in the substrate of the device to be tested leaks through the probe test stage, affecting the accuracy of the test data, and can also play a role of low leakage current and anti-breakdown under a high voltage of 3 kilovolts, and the leakage current is less than 50pA. The support base is used as a shielding layer to prevent the influence of electrostatic noise on the measurement, thereby forming a three-axis structure to achieve the purpose of high voltage and low leakage current.

Description

Technical Field

[0001] The invention relates to the technical field of an object carrier, in particular to an object carrier with high voltage resistance and low leakage current function for a probe station. Background Art

[0002] A probe station is a device used to test and measure microelectronic devices. It usually consists of a fixed base and a movable stage. The stage is a platform on the probe station that is used to support and fix the silicon wafer to be tested. There are usually multiple microelectronic devices on the silicon wafer, such as transistors, integrated circuits, etc. The stage provides a stable plane so that the probe can accurately contact the devices on the silicon wafer.

[0003] The electrical grounding and shielding functions of the current stage can only operate at lower voltages. When used at ultra-high voltage, for example, at 3 kilovolts, the three-axis connected stage cannot achieve the effects of low leakage and anti-breakdown. In addition, in the prior art, the current in the substrate of the device to be tested will leak out of the stage through the probe test and exceed 50pA, resulting in the presence of electrostatic noise, making it difficult to ensure the stability of the detection, affecting the detection results, and causing certain limitations to the experimental detection. In addition, when a fault occurs and causes leakage, it is impossible to respond in time to cut off the power supply, and the safety performance is poor. Summary of the invention

[0004] In view of the deficiencies in the prior art, the present invention provides a stage for a probe station with high voltage resistance and low leakage current function, which solves the above-mentioned problems.

[0005] To achieve the above objectives, the present invention is implemented through the following technical solutions: a stage with high voltage resistance and low leakage current for a probe station, comprising a supporting connection block connected to an air-floating motion platform and a supporting base fixed above the supporting connection block, the top of the supporting base is fixedly connected to a mica layer through a peek screw sleeve combination, a heating plate is arranged above the mica layer, the top of the mica layer is fixedly connected to a ceramic layer through a ceramic fixing block, the top of the ceramic layer is fixedly connected to a suction cup, one side of the supporting base is connected to a high voltage insulating sleeve through a high voltage insulating sleeve connector, the supporting base is used as a shielding layer to prevent the influence of electrostatic noise on the measurement, so as to achieve the purpose of high voltage and low leakage current;

[0006] The inner cavity of the high-voltage insulating bushing is connected with a cable connected with an external power supply mechanism, one end of the cable is connected with a movable electric connector located in the inner cavity of the high-voltage insulating bushing connector, the inner cavity of the high-voltage insulating bushing connector is fixed with a fixed electric connector connected with the electrical unit of the stage, the movable electric connector is plugged with the fixed electric connector to form a current path, the surface of the movable electric connector is fixedly connected with a fixed ring, and the surface of the fixed electric connector is provided with an extrusion mechanism for applying thrust to the fixed ring;

[0007] The inner cavity of the high-voltage insulating sleeve connector is provided with an inner groove, the inner cavity of the inner groove is fixedly connected with an electromagnet connected in series with the stage ground wire through a wire, the inner cavity of the inner groove is slidably connected with a sliding block, the sliding block is fixedly connected with an iron block on the side facing the electromagnet, a return spring is sleeved on the surface of the electromagnet, one end of the return spring is fixedly connected to the sliding block, the side of the sliding block away from the electromagnet is fixedly connected with a limit block for limiting the fixing ring, and a guide slope is provided on one side of the limit block.

[0008] As a further solution of the present invention: the outer peripheries of the mica layer, the ceramic layer and the suction cup are all covered with a polytetrafluoroethylene sleeve for insulation to form an insulating wrapping layer.

[0009] As a further solution of the present invention: a heat insulation layer is provided between the mica layer and the support base through support columns. The provision of the heat insulation layer can prevent the temperature from affecting the support base.

[0010] As a further solution of the present invention: guide grooves are provided on both sides of the inner groove, and guide wheels rollingly connected to the inner cavity of the guide grooves are transmission-connected on both sides of the sliding block. The guide wheels move in the guide grooves, making the movement of the sliding block smoother.

[0011] As a further solution of the present invention: the extrusion mechanism includes a connecting ring fixed on the surface of the fixed electrical connector, one side of the connecting ring is slidably connected to a push rod through a sliding groove, one end of the push rod is fixedly connected to a push plate abutting the surface of the fixed ring, the surface of the push rod is sleeved with a force spring, both ends of the force spring are respectively fixedly connected to the push plate and one side of the connecting ring, when in use, the force spring always applies a thrust to the push plate, so that it always pushes the fixed ring outward with force, at this time the reset spring pushes the sliding block outward, so that the limit block always abuts against one side of the fixed ring to limit it, when leakage occurs, the ground wire current is energized through the electromagnet to generate magnetic force, when the threshold value is reached the magnetic force becomes larger, the iron block is adsorbed and drives the sliding block to compress the reset spring in the inner groove to move, and then the iron block is adsorbed by the electromagnet The movable electrical connector is pushed out and disconnected from the fixed electrical connector under the push of the extrusion mechanism, quickly cutting off the power to the loading platform, and playing an effective protective role through the mechanical structure. As long as the ground wire is conductive when there is leakage, the current can be quickly cut off. While achieving high voltage and low leakage through its own structure, even if a fault causes leakage, the power can be quickly cut off, with better safety performance. When reconnection is needed after disconnection, it is only necessary to push the cable to drive the movable electrical connector to move and squeeze the guiding inclined surface of the limit block, so that the compressing reset spring moves into the inner groove. After the movable electrical connector is plugged into the fixed electrical connector, the reset spring pushes the limit block to extend and abut against one side of the fixed ring to limit it and complete the connection.

[0012] As a further solution of the present invention: the force applying spring and the return spring are both insulating springs.

[0013] As a further solution of the present invention: the ceramic layer and the mica layer are supported by a polyfluoro screw sleeve.

[0014] Compared with the prior art, the present invention has the following beneficial effects:

[0015] 1. The present invention uses a suction cup as a signal layer to be vacuum-adsorbed and connected to a ceramic layer, and an insulating screw under the ceramic layer is connected to a mica layer, thereby eliminating leakage current, effectively overcoming the problem in the prior art that the current in the substrate of the device to be tested leaks through the probe test stage and affects the accuracy of the test data. Under a high voltage of 3 kilovolts, it can also play a role in low leakage and anti-breakdown, and the leakage current is less than 50pA. The support base is used as a shielding layer to prevent the influence of electrostatic noise on the measurement, thereby forming a three-axis structure to achieve the purpose of high voltage and low leakage.

[0016] 2. The present invention plays an effective protective role through the mechanical structure. As long as the ground wire is conductive when leakage occurs, the current can be quickly cut off. While achieving high voltage and low leakage through its own structure, even if a fault occurs and leakage occurs, the power can be quickly cut off, and the safety performance is better.

[0017] 3. In the present invention, when reconnection is needed after disconnection, it is only necessary to push the cable to drive the movable electrical connector to move and squeeze the guiding inclined surface of the limit block, so that the compressed reset spring moves into the inner groove. After the movable electrical connector is plugged into the fixed electrical connector, the reset spring pushes the limit block to extend and abut against one side of the fixed ring to limit it and complete the connection. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of the present invention;

[0019] Figure 2 It is a top view of the structure of the present invention;

[0020] Figure 3 It is a structural front view of the present invention;

[0021] Figure 4 It is a schematic diagram of a high-voltage insulating bushing connector of the present invention;

[0022] Figure 5 For the present invention Figure 4 A partial enlarged view of point A in the middle.

[0023] In the figure: 1. support connection block; 3. mica layer; 4. ceramic fixing block; 5. ceramic layer; 7. suction cup; 8. high-voltage insulating sleeve connector; 9. high-voltage insulating sleeve; 10. support base; 11. movable electrical connector; 12. fixing ring; 13. fixed electrical connector; 14. connecting ring; 15. sliding groove; 16. ejector rod; 17. force spring; 18. push plate; 19. inner groove; 20. reset spring; 21. electromagnet; 22. iron block; 23. sliding block; 24. limit block; 25. guide slope; 26. guide groove; 27. guide wheel. DETAILED DESCRIPTION

[0024] In order to further explain the technical means and effects adopted by the present invention to achieve the predetermined invention purpose, the specific implementation mode, structure, characteristics and effects of the present invention are described in detail below in combination with the accompanying drawings and preferred embodiments.

[0025] See also Figure 1-5The present invention provides a technical solution: a stage with high voltage resistance and low leakage current for a probe station, comprising a support connection block 1 connected to an air-floating motion platform and a support base 10 fixed on the support connection block 1, a mica layer 3 is fixedly connected to the top of the support base 10 through a peek screw sleeve combination, a heating plate is arranged above the mica layer 3, a ceramic layer 5 is fixedly connected to the top of the mica layer 3 through a ceramic fixing block 4, a suction cup 7 is fixedly connected to the top of the ceramic layer 5, a high voltage insulating sleeve 9 is connected to one side of the support base 10 through a high voltage insulating sleeve connector 8, and the support base 10 is used as a shielding layer to prevent the influence of electrostatic noise on the measurement, so as to achieve the purpose of high voltage and low leakage current;

[0026] The inner cavity of the high-voltage insulating bushing 9 is connected with a cable connected with an external power supply mechanism, one end of the cable is connected with a movable electric connector 11 located in the inner cavity of the high-voltage insulating bushing connector 8, the inner cavity of the high-voltage insulating bushing connector 8 is fixed with a fixed electric connector 13 connected with the electrical unit of the stage, the movable electric connector 11 and the fixed electric connector 13 are plugged together to form a current path, the surface of the movable electric connector 11 is fixedly connected with a fixed ring 12, and the surface of the fixed electric connector 13 is provided with an extrusion mechanism for applying thrust to the fixed ring 12;

[0027] An inner groove 19 is provided in the inner cavity of the high-voltage insulating sleeve connector 8, and an electromagnet 21 is fixedly connected to the inner cavity of the inner groove 19, which is connected in series with the stage ground wire through a wire 28. A sliding block 23 is slidably connected to the inner cavity of the inner groove 19, and an iron block 22 is fixedly connected to the side of the sliding block 23 facing the electromagnet 21. A reset spring 20 is sleeved on the surface of the electromagnet 21, and one end of the reset spring 20 is fixedly connected to the sliding block 23. A limit block 24 for limiting the fixing ring 12 is fixedly connected to the side of the sliding block 23 away from the electromagnet 21, and a guide slope 25 is provided on one side of the limit block 24.

[0028] The outer peripheries of the mica layer 3, the ceramic layer 5 and the suction cup 7 are all covered with a polytetrafluoroethylene sleeve for insulation to form an insulating wrapping layer.

[0029] A heat insulation layer is provided between the mica layer 3 and the support base 10 through the support columns. The heat insulation layer can prevent the temperature from affecting the support base 10 .

[0030] Guide grooves 26 are provided on both sides of the inner groove 19, and guide wheels 27 rollingly connected to the inner cavity of the guide grooves 26 are drivingly connected to both sides of the sliding block 23. The guide wheels 27 move in the guide grooves 26, making the movement of the sliding block 23 smoother.

[0031] The extrusion mechanism includes a connecting ring 14 fixed on the surface of the fixed electrical connector 13, one side of the connecting ring 14 is slidably connected with a push rod 16 through a sliding groove 15, one end of the push rod 16 is fixedly connected with a push plate 18 abutting against the surface of the fixed ring 12, and a force spring 17 is sleeved on the surface of the push rod 16, and the two ends of the force spring 17 are respectively fixedly connected to the push plate 18 and one side of the connecting ring 14. When in use, the force spring 17 always applies a thrust to the push plate 18, so that it always pushes the fixed ring 12 outward with force. At this time, the return spring 20 pushes the sliding block 23 outward, so that the limit block 24 always abuts against one side of the fixed ring 12 to limit it. When leakage occurs, the ground current is energized through the electromagnet 21 to generate magnetic force. When the threshold value is reached, the magnetic force becomes larger, and the iron block 22 is adsorbed and drives the sliding block 23 to compress the return spring 20 in the inner groove 19 to move, and then the iron block 22 and the electromagnet 2 1 is adsorbed together, at this time, the limit block 24 is retracted into the inner groove 19, and the fixed ring 12 loses its limit. Under the push of the squeezing mechanism, the movable electrical connector 11 is pushed out and disconnected from the fixed electrical connector 13, and the loading platform is quickly powered off. The mechanical structure plays an effective protective role. As long as the ground wire is conductive when there is leakage, the current can be quickly cut off. While achieving high voltage and low leakage through its own structure, even if a fault causes leakage, the power can be quickly cut off, and the safety performance is better. When reconnection is required after disconnection, it is only necessary to push the cable to drive the movable electrical connector 11 to move and squeeze the guiding inclined surface 25 of the limit block 24, so that it compresses the reset spring 20 and moves into the inner groove 19. After the movable electrical connector 11 is plugged into the fixed electrical connector 13, the reset spring 20 pushes the limit block 24 to extend and abut against one side of the fixed ring 12 to limit it and complete the connection.

[0032] Both the force applying spring 17 and the return spring 20 are insulating springs.

[0033] The ceramic layer 5 and the mica layer 3 are supported by a polytetrafluoroethylene screw sleeve.

[0034] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Although the present invention has been disclosed as a preferred embodiment as above, it is not used to limit the present invention. Any technical personnel in this field can make some changes or modify the technical contents disclosed above into equivalent embodiments without departing from the scope of the technical solution of the present invention. However, any brief modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention are still within the scope of the technical solution of the present invention.

Claims

1. A stage for a probe station with high voltage resistance and low leakage current function, comprising a support connection block (1) connected to an air-floating motion platform and a support base (10) fixed above the support connection block (1), characterized in that: The top of the support base (10) is fixedly connected to a mica layer (3) via a peek screw sleeve combination, a heating plate is arranged above the mica layer (3), the top of the mica layer (3) is fixedly connected to a ceramic layer (5) via a ceramic fixing block (4), the top of the ceramic layer (5) is fixedly connected to a suction cup (7), and one side of the support base (10) is connected to a high-voltage insulating bushing (9) via a high-voltage insulating bushing connector (8); The inner cavity of the high-voltage insulating sleeve (9) is connected to a cable connected to an external power supply mechanism, one end of the cable is connected to a movable electrical connector (11) located in the inner cavity of the high-voltage insulating sleeve connector (8), the inner cavity of the high-voltage insulating sleeve connector (8) is fixed with a fixed electrical connector (13) connected to an electrical unit for the stage, the movable electrical connector (11) and the fixed electrical connector (13) are plugged together to form a current path, the surface of the movable electrical connector (11) is fixedly connected to a fixed ring (12), and the surface of the fixed electrical connector (13) is provided with an extrusion mechanism for applying a thrust to the fixed ring (12); The inner cavity of the high-voltage insulating sleeve connector (8) is provided with an inner groove (19), the inner cavity of the inner groove (19) is fixedly connected with an electromagnet (21) connected in series with a ground wire of a loading platform through a conducting wire (28), the inner cavity of the inner groove (19) is slidably connected with a sliding block (23), the side of the sliding block (23) facing the electromagnet (21) is fixedly connected with an iron block (22), the surface of the electromagnet (21) is sleeved with a reset spring (20), one end of the reset spring (20) is fixedly connected to the sliding block (23), the side of the sliding block (23) away from the electromagnet (21) is fixedly connected with a limit block (24) for limiting the fixing ring (12), and one side of the limit block (24) is provided with a guiding inclined surface (25).

2. The stage with high voltage resistance and low leakage current for use in a probe station according to claim 1, characterized in that: The outer peripheries of the mica layer (3), the ceramic layer (5) and the suction cup (7) are all covered with a polytetrafluoroethylene sleeve for insulation, forming an insulating wrapping layer.

3. The stage with high voltage resistance and low leakage current for a probe station according to claim 1, characterized in that: A heat insulation layer is provided between the mica layer (3) and the support base (10) through support columns. The provision of the heat insulation layer can prevent the temperature from affecting the support base (10).

4. The stage with high voltage resistance and low leakage current for a probe station according to claim 1, characterized in that: Guide grooves (26) are provided on both sides of the inner groove (19), and guide wheels (27) are drivingly connected to the inner cavity of the guide groove (26) on both sides of the sliding block (23), and the guide wheels (27) are rollingly connected to the inner cavity of the guide groove (26). The movement of the sliding block (23) is smoother because the guide wheels (27) move in the guide groove (26).

5. The stage with high voltage resistance and low leakage current for a probe station according to claim 1, characterized in that: The extrusion mechanism comprises a connecting ring (14) fixed on the surface of a fixed electrical connector (13); one side of the connecting ring (14) is slidably connected to a push rod (16) via a sliding groove (15); one end of the push rod (16) is fixedly connected to a push plate (18) abutting against the surface of a fixed ring (12); a force spring (17) is sleeved on the surface of the push rod (16); two ends of the force spring (17) are respectively fixedly connected to the push plate (18) and one side of the connecting ring (14).

6. The stage with high voltage resistance and low leakage current for use in a probe station according to claim 5, characterized in that: The force applying spring (17) and the return spring (20) are both insulating springs.

7. The stage with high voltage resistance and low leakage current for a probe station according to claim 1, characterized in that: The ceramic layer (5) and the mica layer (3) are supported by a polyfluoroethylene screw sleeve.

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