Wafer carrier loading and unloading mechanism

Abstract

The present invention discloses a chip carrier loading and unloading mechanism, which relates to the technical field of chip carrier loading and unloading, including an anti-slip mechanism, which is composed of an adjustment component and a detection component, the adjustment component including: a rotating base plate, which is arranged on the upper surface of the positioning mounting plate and can rotate, and two driven support rods are arranged on the upper surface of the rotating base plate, and a lifting motor is arranged on the upper surface of the rotating base plate, and a bottom force plate is fixedly installed at the end of the upper surface output shaft of the lifting motor, and the bottom force plate is located on the bottom surface of the unlocking rod mounting plate, and a detection component, which includes: an anti-slip ring, which is sleeved on the ends of several vacuum rods at the center of the unlocking rod mounting plate, a sliding protrusion is arranged on the side close to the one side surface of the anti-slip ring, and a liftable limiting ring is arranged on the one side surface of the anti-slip ring. In this scheme, the stability and safety of the chip carrier during the loading and unloading process are ensured by providing the anti-slip mechanism.

Description

Technical Field

[0001] The present invention relates to the technical field of wafer carrier loading and unloading, and in particular to a wafer carrier loading and unloading mechanism. Background Art

[0002] In the field of semiconductor manufacturing, chip carriers are key auxiliary equipment, and their design and application are directly related to the efficiency and quality of chip manufacturing. With the rapid development of semiconductor technology, chip processing procedures are becoming increasingly complex, and the technical requirements for chip carrier loading and unloading mechanisms are also correspondingly improved.

[0003] In the field of semiconductor manufacturing, the efficient and stable operation of the wafer carrier loading and unloading mechanism is crucial to ensuring the continuity of the production line and product quality. However, the opening mechanism in the existing technology, especially the design using vacuum suction cups for adsorption, faces the problem of decreased adsorption force due to fatigue of the suction cup material. As the number of uses increases, the suction cup gradually loses its original elasticity and sealing effect, making it easy to leak during the adsorption process, thereby reducing the stability and reliability of adsorption. This not only affects the precise positioning and stable grasping of the wafer carrier, but may also cause the wafer carrier to fall off during transportation or handling due to insufficient adsorption force, causing equipment damage or even production accidents. Summary of the Invention

[0004] The object of the present invention is to provide a wafer carrier loading and unloading mechanism to solve the problems raised in the above background technology.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a wafer carrier loading and unloading mechanism, comprising:

[0006] The anti-slip mechanism includes an adjustment component, which includes: a rotating base plate, which is arranged on the upper surface of the positioning mounting plate and can rotate, and two driven support rods are provided on the upper surface of the rotating base plate. A lifting motor is provided on the upper surface of the rotating base plate, and a bottom force plate is fixedly installed on the end of the output shaft on the upper surface of the lifting motor. A plurality of connecting columns are fixedly installed on the upper surface of the bottom force plate, and a horizontal lifting plate is provided on the end of the connecting column. The horizontal lifting plate is composed of a plurality of sub-plates, and each sub-plate is connected by a spring;

[0007] The cam-shaped member is provided with an upper end portion of the upper cover guide frame, and the lower end portion of the upper cover guide frame is provided with an upper cover guide frame.

[0008] The bearing mechanism includes: a bearing installation frame, which is located on the upper surface of the platform base plate and can be raised and lowered. A plurality of bearing columns are fixedly installed on the upper surface of the bearing installation frame. The bottom surfaces on both sides of the bearing installation frame are provided with bearing lifting cylinders. A lifting cylinder and a clamping cylinder are also fixedly installed on the upper surface of the platform base plate. A clamping L seat is also provided at the end of the output shaft on the upper surface of the lifting cylinder.

[0009] Furthermore, the adjustment assembly also includes: an engaging gear ring, one side surface of the engaging gear ring is engaged with an engaging disk, the upper surface of the rotating base plate is provided with a brake motor for driving the engaging disk, the bottom surface of the engaging gear ring is provided with a deflection ring, the engaging gear ring is attached to the upper surface of the deflection ring for rotation, the bottom surface of the engaging gear ring is fixedly connected to an adjusting gear cylinder, both side surfaces of the adjusting gear cylinder are provided with fixed gear disks engaged therewith, one side surface of the fixed gear disk is provided with a fixing frame, the top surface of the fixing frame is fixedly connected to the bottom surface of the positioning mounting plate, and the bottom surface of the adjusting gear cylinder is provided with an engaging rod engaged therewith.

[0010] Furthermore, a lifting mechanism includes: two lifting frames, a platform base plate is provided between the two lifting frames, a conveying motor is provided on the bottom surface of the platform base plate, lifting platform baffles are fixedly installed on the front and rear surfaces of the platform base plate, mounting vertical plates are fixedly installed on the left and right surfaces of the platform base plate, a slider is provided on one side surface of the mounting vertical plate, a screw rod cooperating with the slider is provided on the adjacent side of the two lifting frames, and a lifting motor for driving the lifting mechanism to move is provided on the bottom surface of the platform base plate.

[0011] Furthermore, the conveying mechanism includes: a carrier positioning block, the carrier positioning block is fixedly mounted on the upper surface of the platform base plate, and conveying guard plates are respectively provided on both sides of the upper surface of the platform base plate, and a fixed side guide plate and an active side guide plate are respectively provided on the side surfaces adjacent to the two conveying guard plates, an active side cylinder and an active side guide shaft are respectively provided at the center of the active side guide plate, a plurality of roller shafts are provided between the two conveying guard plates, a plurality of wheel blades are provided on the surface of the roller shaft, and a carrier body is placed on the upper surface of the wheel blades.

[0012] Furthermore, the unlocking mechanism includes: an unlocking rod mounting plate, a plurality of guide telescopic rods are provided on the upper surface of the unlocking rod mounting plate, a positioning mounting plate is provided below the unlocking rod mounting plate, a plurality of positioning linear bearings are provided on the upper surface of the positioning mounting plate, a large bottom plate is provided below the positioning mounting plate, a positioning electric cylinder and an unlocking electric cylinder are provided on the bottom surface of the bottom large plate, the upper surface of the positioning electric cylinder is fixedly connected to the bottom surface of the positioning mounting plate, a plurality of vacuum rods are provided on the upper surface of the positioning mounting plate, an exhaust port is provided on one side surface of the vacuum rod, a product positioning suction cup is provided on the end of the vacuum rod, an unlocking guide shaft is also provided on the upper surface of the positioning mounting plate, and the surface of the unlocking guide shaft is sleeved with an unlocking linear bearing.

[0013] Furthermore, the detection component and the anti-slip mechanism also include a detection component, and the detection component includes: an anti-slip ring, the anti-slip ring is sleeved on the ends of several vacuum rods at the center of the unlocking rod mounting plate, a sliding protrusion is provided on one side of the anti-slip ring, and a liftable limiting ring is provided on one side of the anti-slip ring.

[0014] Furthermore, the detection component also includes: a bottom spring, the bottom spring is arranged on the bottom surface of the vacuum rod, a top pressure pile is provided at the center of the bottom spring, the upper surface of the top pressure pile is fixedly installed on the bottom surface of the vacuum rod, a trigger switch is provided below the top pressure pile, and a prompt alarm is provided on the bottom surface of the trigger switch.

[0015] Furthermore, the adjustment component also includes: a horizontal detector, which is located on the bottom surface of the horizontal lifting plate, a signal broadcaster is provided on one side surface of the horizontal detector, and a plurality of positioning pins are provided on the side surface at the center of the horizontal lifting plate.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] 1. In this solution, an anti-slip mechanism is provided. Through the coordinated work of the lifting motor, brake motor and small motor, the position of the horizontal lifting plate can be accurately adjusted, thereby correcting the deformation of the product positioning suction cup caused by long-term use. This ensures a close fit between the product positioning suction cup and the bottom surface of the carrier body, improves the vacuum sealing effect and adsorption force, prevents air leakage caused by deformation, and ensures the stability and safety of the wafer carrier during loading and unloading. In addition, the anti-slip ring, limit ring and bottom spring in the detection component cooperate with the trigger switch to achieve real-time monitoring of the status of the product positioning suction cup. Once it is detected that the product positioning suction cup has fallen off due to insufficient adsorption force due to deformation, the system will immediately trigger a warning alarm, issuing visual and audible alarms to remind the operator to intervene in time to inspect and replace the deformed suction cup, shortening the troubleshooting time and reducing the risk of production interruption.

[0018] 2. In this solution, by providing a cover opening mechanism, the cooperation of components such as the cover opening electric cylinder, the cover opening air cylinder, and the cover opening suction cup is used to achieve efficient opening of the wafer carrier cover. During the cover opening process, the cover opening finger can accurately clamp the two sides of the cover, and the multiple cover opening suction cups provide stable adsorption force to ensure the smooth opening action. This significantly shortens the time for loading and unloading wafer carriers and improves the overall efficiency of the production line. Operators do not need to manually open the carrier cover, reducing labor costs and operational risks.

[0019] 3. In this solution, a bearing mechanism is provided, and through the cooperation of components such as the bearing mounting frame, the bearing column and the roller shaft, a stable bearing and transmission platform is provided for the chip carrier. Components such as the bearing lifting cylinder and the clamping cylinder in the bearing mechanism can realize the flexible lifting and lowering of the bearing mounting frame and the adjustment of the clamping force, so that the bearing mechanism can adapt to chip carriers of different sizes and weights, thereby improving the versatility and flexibility of the equipment. At the same time, by adjusting the clamping force, the stability of the chip carrier during the transmission and positioning process can be ensured, avoiding the risk of the carrier slipping or damage due to insufficient clamping force. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0021] Figure 2 It is a schematic structural diagram of the lifting mechanism of the present invention;

[0022] Figure 3 This is a schematic structural diagram of the cover opening mechanism of the present invention;

[0023] Figure 4 It is a schematic structural diagram of the conveying mechanism of the present invention;

[0024] Figure 5 It is a structural schematic diagram of the carrying mechanism of the present invention;

[0025] Figure 6 This is a schematic structural diagram of the unlocking mechanism of the present invention;

[0026] Figure 7 It is a schematic structural diagram of the anti-slip mechanism of the present invention;

[0027] Figure 8 This is a schematic diagram of the structure of the adjustment component of the present invention;

[0028] Figure 9 Schematic diagram of the detection component structure of the present invention;

[0029] Figure 10 For the present invention Figure 9 Enlarged view of point A in the middle.

[0030] Figure: 1. Lifting frame; 2. Connecting column; 3. Carrier body; 4. Bottom bearing plate; 5. Lifting motor; 6. Driven support rod; 7. Exhaust port; 8. Level detector; 9. Signal broadcaster; 10. Lifting platform baffle; 11. Lifting motor; 12. Lid opening electric cylinder; 13. Lid opening guide shaft; 14. Lid opening mounting plate; 15. Lid opening mounting frame; 16. Press block; 17. Lid opening column; 18. Lid opening cylinder. 19. Cylinder seat; 20. Cover opening connection buckle; 21. Cover opening shaft; 22. Cover opening finger buckle; 23. Limit bolt; 24. Buffer; 25. Cover opening suction cup; 26. Limiting ring; 27. Anti-slip ring; 28. Horizontal lifting plate; 29. ​​Rotating base plate; 30. Positioning pin; 31. Transport guard plate; 32. Wheel; 33. Roller shaft; 34. Active side guide plate; 35. Active side guide shaft; 36. Active side air filter Cylinder; 37. Fixed side guide plate; 38. Bottom spring; 39. Carrier positioning block; 40. Platform base plate; 41. Conveying motor; 42. Load-bearing column; 43. Load-bearing mounting frame; 44. Clamping L seat; 45. Lifting cylinder; 46. Clamping cylinder; 47. Load-bearing lifting cylinder; 48. Prompt alarm; 49. Vacuum rod; 50. Product positioning suction cup; 51. Unlocking guide shaft; 52. Unlocking rod mounting plate; 53. Positioning mounting plate; 54. Bottom large flat plate; 55. Positioning electric cylinder; 56. Guide telescopic rod; 57. Unlocking linear bearing; 58. Positioning linear bearing; 59. Unlocking electric cylinder; 60. Slider; 61. Mounting vertical plate; 62. Jacking pile; 63. Trigger switch; 64. Deflection ring; 65. Engaging gear ring; 66. Adjusting gear cylinder; 67. Fixed gear disc; 68. Engaging rod; 69. Engaging disc; 70. Fixed bracket. DETAILED DESCRIPTION

[0031] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0032] Example 1: Please refer to Figures 1 to 10 , a wafer carrier loading and unloading mechanism, comprising:

[0033] The lifting mechanism includes: two lifting frames 1, a platform base plate 40 is provided between the two lifting frames 1, a conveying motor 41 is provided on the bottom surface of the platform base plate 40, lifting platform baffles 10 are fixedly installed on the front and rear surfaces of the platform base plate 40, and mounting vertical plates 61 are fixedly installed on the left and right surfaces of the platform base plate 40. A slider 60 is provided on one side of the mounting vertical plates 61. A screw rod that cooperates with the slider 60 is provided on the adjacent side of the two lifting frames 1. A lifting motor 11 for driving the lifting mechanism to move is provided on the bottom surface of the platform base plate 40;

[0034] The lifting mechanism supports the platform base plate 40 through two lifting frames 1 to achieve vertical movement. The conveying motor 41 is installed on the bottom surface of the platform base plate 40 to provide initial power. The lifting motor 11 drives the screw to rotate and cooperates with the slider 60 on the mounting vertical plate 61 to ensure smooth lifting of the platform base plate 40 and all the mechanisms thereon. The lifting platform baffle 10 ensures stability during the lifting process and prevents the platform base plate 40 from shifting.

[0035] The cover opening mechanism includes: a cover opening electric cylinder 12, an open cover mounting plate 14 is provided at the end of the output shaft of the cover opening electric cylinder 12, a cover opening column 17 is provided on the bottom surface of the cover opening mounting plate 14, the bottom surface of the cover opening column 17 is fixedly connected to the upper surface of the platform base plate 40, a cover opening guide shaft 13 is fixedly installed on the upper surface of the cover opening mounting plate 14, a cover opening mounting frame 15 is provided on the bottom surface of the cover opening mounting plate 14, a plurality of cover opening suction cups 25 are provided on the bottom surface of the cover opening mounting frame 15, and a buffer 2 is also provided on the bottom surface of the cover opening mounting frame 15. 4. A limit bolt 23 is provided on the side surface of the cover opening mounting frame 15, and a plurality of pressure blocks 16 are provided on the side surface of the cover opening mounting plate 14. A cylinder seat 19 is provided on one side surface of the cylinder seat 19, and a cover opening cylinder 18 is provided on one side surface of the cylinder seat 19. A cover opening connecting buckle 20 is provided on the bottom surface of the cylinder seat 19. One end of the cover opening connecting buckle 20 is connected to the end of the output shaft of the cylinder seat 19. A cover opening rotating shaft 21 is provided on one side surface of the cover opening connecting buckle 20. The cover opening rotating shaft 21 is provided between the cover opening connecting buckle 20 and the cover opening finger buckle 22.

[0036] When it is necessary to open the cover, the cover-opening electric cylinder 12 of the cover-opening mechanism is started, driving the cover-opening mounting frame 15 and all internal components to move in the vertical direction, so that the cover-opening finger buckle 22 approaches the upper cover of the carrier body 3. When the cover-opening finger buckle 22 reaches the preset position, the cover-opening cylinder 18 starts to work, and its output shaft is extended and retracted, driving the cover-opening finger buckle 22 to rotate around a certain axis through the cover-opening connecting buckle 20 and the cover-opening rotating shaft 21, clamping the two sides of the upper cover of the carrier body 3, and then using multiple cover-opening suction cups 25 to suck the upper cover of the carrier body 3, and as the cover-opening mechanism rises, the upper and lower covers of the carrier body 3 are separated, and the buffer 24 provides cushioning when the cover-opening finger buckle 22 contacts the upper cover to reduce impact and vibration.

[0037] The conveying mechanism includes: a carrier positioning block 39, which is fixedly mounted on the upper surface of the platform base plate 40. Conveying guard plates 31 are respectively provided on both sides of the upper surface of the platform base plate 40. A fixed side guide plate 37 and an active side guide plate 34 are respectively provided on the adjacent side surfaces of the two conveying guard plates 31. An active side cylinder 36 and an active side guide shaft 35 are respectively provided at the center of the active side guide plate 34. A plurality of roller shafts 33 are provided between the two conveying guard plates 31. A plurality of wheel blades 32 are provided on the surface of the roller shafts 33. The carrier body 3 is placed on the upper surface of the wheel blades 32.

[0038] After the carrier body 3 is placed at one end of the conveying mechanism, the conveying mechanism supports and transports the carrier body 3 through the roller shaft 33 and the wheel 32, and uses the fixed side guide plate 37 to cooperate with the active side guide plate 34 to ensure the stability and directionality of the carrier body 3 during the transmission process. After moving to a certain position, the carrier body 3 is blocked by the carrier positioning block 39, ensuring the safety and accuracy of the carrier during the transmission process.

[0039] The bearing mechanism includes: a bearing mounting frame 43, which is located on the upper surface of the platform base plate 40 and can be raised and lowered. A plurality of bearing columns 42 are fixedly mounted on the upper surface of the bearing mounting frame 43. The bottom surfaces of both sides of the bearing mounting frame 43 are provided with bearing lifting cylinders 47. A lifting cylinder 45 and a clamping cylinder 46 are also fixedly mounted on the upper surface of the platform base plate 40. A clamping L seat 44 is also provided at the end of the output shaft on the upper surface of the lifting cylinder 45.

[0040] After the carrier body 3 reaches the designated working position, the active side cylinder 36 and the active side guide shaft 35 work together. According to the characteristics of the active side guide plate 34 and the active side guide shaft 35 connected to the active side cylinder 36, the active side cylinder 36 drives the active side guide plate 34 to extend and retract, thereby clamping or loosening the combined carrier 3.

[0041] Unlocking mechanism, the unlocking mechanism includes: an unlocking rod mounting plate 52, a plurality of guide telescopic rods 56 are provided on the upper surface of the unlocking rod mounting plate 52, a positioning mounting plate 53 is provided below the unlocking rod mounting plate 52, a plurality of positioning linear bearings 58 are provided on the upper surface of the positioning mounting plate 53, a large bottom plate 54 is provided below the positioning mounting plate 53, a positioning electric cylinder 55 and an unlocking electric cylinder 59 are provided on the bottom surface of the bottom large plate 54, the upper surface of the positioning electric cylinder 55 is fixedly connected to the bottom surface of the positioning mounting plate 53, a plurality of vacuum rods 49 are provided on the upper surface of the positioning mounting plate 53, an exhaust port 7 is provided on one side surface of the vacuum rod 49, a product positioning suction cup 50 is provided at the end of the vacuum rod 49, an unlocking guide shaft 51 is further provided on the upper surface of the positioning mounting plate 53, and an unlocking guide shaft 51 is sleeved with an unlocking linear bearing 57;

[0042] When unlocking is required, the unlocking electric cylinder 59 is started, and its output shaft pushes the telescopic rod 48 to rise vertically along the unlocking guide shaft 51, and the movement of the telescopic rod 48 drives the unlocking rod mounting plate 52 to move synchronously. After unlocking is completed, the positioning electric cylinder 55 is started, and drives the positioning mounting plate 53 to rise and fall vertically along the unlocking guide shaft 51. The movement of the positioning mounting plate 53 drives the vacuum rod 49 and the product positioning suction cup 50 to move synchronously until the product positioning suction cup 50 accurately contacts the bottom surface of the carrier body 3. The vacuum rod 49 is then started, and negative pressure is generated by the suction cup to firmly adsorb the product in the specified position to complete product positioning.

[0043] The above is the basic process of using this device.

[0044] However, during the actual use of the device, the cover opening mechanism uses the suction cup to generate adsorption force by forming a vacuum seal. However, as the number of uses increases, the shape of the suction cup will gradually change. The suction cup is usually made of elastic material. These materials will experience material fatigue after multiple deformations, that is, their elasticity gradually weakens, which means that the suction cup can no longer quickly and fully restore its original shape when under pressure, and thus cannot fit tightly on the adsorption surface. The reduction in elasticity directly affects the sealing effect and adsorption force of the suction cup, making it difficult to maintain a stable adsorption state, especially the center area may no longer be flat or slightly concave, and the edges may also become curled or uneven. These deformations destroy the originally designed sealing structure, making it impossible for the suction cup to form a tight fit when contacting the surface, resulting in air leakage, reducing the vacuum sealing effect, and thus weakening the adsorption force.

[0045] Therefore, based on the above problem, we designed an anti-slip mechanism, which consists of an adjustment component and a detection component. The adjustment component includes: a rotating base plate 29, which is arranged on the upper surface of the positioning mounting plate 53 and can rotate. Two driven support rods 6 are provided on the upper surface of the rotating base plate 29, and a lifting motor 5 is provided on the upper surface of the rotating base plate 29. The end of the upper surface output shaft of the lifting motor 5 is fixedly installed with a bottom force plate 4, which is located on the bottom surface of the unlocking rod mounting plate 52. A plurality of connecting columns 2 are fixedly installed on the upper surface of the bottom force plate 4, and a horizontal lifting plate 28 is provided at the end of the connecting column 2. The horizontal lifting plate 28 is located on the upper surface of the platform large bottom plate 40 and below the wheel 32. The horizontal lifting plate 28 is composed of a plurality of sub-plates, each sub-plate is connected by a spring, and a horizontal detector 8 is provided on the bottom surface of the horizontal lifting plate 28, and one side surface of the horizontal detector 8 is provided with The signal broadcaster 9 and the horizontal lifting plate 28 are provided with a plurality of positioning pins 30 on the side surface at the center thereof. The adjustment assembly also includes: an engaging gear ring 65, a meshing disc 69 is meshed on one side surface of the engaging gear ring 65, a brake motor for driving the meshing disc 69 is provided on the upper surface of the rotating base plate 29, a deflection ring 64 is provided on the bottom surface of the engaging gear ring 65, the engaging gear ring 65 is attached to the upper surface of the deflection ring 64 for rotation, the bottom surface of the engaging gear ring 65 is fixedly connected with an adjusting gear cylinder 66, and fixed gear disks 67 meshing with the adjusting gear cylinder 66 are provided on both side surfaces thereof, a fixing frame 70 is provided on one side surface of the fixed gear disk 67, the top surface of the fixing frame 70 is fixedly connected to the bottom surface of the positioning mounting plate 53, the bottom surface of the adjusting gear cylinder 66 is provided with an engaging rod 68 meshing with the adjusting gear cylinder 66, and a small motor for driving the engaging rod 68 is provided on one side surface thereof, which is fixedly mounted on one side surface of the fixed gear disk 67;

[0046] When it is necessary to adjust the position of the product positioning suction cup 50 or correct its deformation, the lifting motor 5 is started by the staff signal, and its output shaft rotates, driving the bottom force plate 4 and the connecting column 2 and the horizontal lifting plate 28 connected thereto to rise. When the horizontal lifting plate 28 is not in the rising state, it is located below the wheel 32, and the spring is in the contracted state. At this time, the horizontal lifting plate 28 does not contact the bottom surface of the wheel 32 and does not interfere with the wheel 32. The horizontal detector 8 monitors the flatness of the horizontal lifting plate 28 in real time to ensure that it remains level during the rising process to avoid adjustments caused by tilting. Error, if unevenness is detected, the signal broadcaster 9 will sound an alarm, prompting the operator to make adjustments, and the operator controls the brake motor to drive the meshing disc 69 to rotate, and through the meshing action of the meshing gear ring 65, the deflection ring 64 and the entire adjustment structure above it are driven to rotate, completing the adjustment of the lateral position, and through the meshing action of the adjusting gear cylinder 66 and the fixed gear disc 67, the meshing rod 68 is driven by a small motor to rotate, and the meshing effect with the adjusting gear cylinder 66 drives the equipment to adjust the vertical position, thereby completing the position adjustment of the horizontal lifting plate 28 until it is horizontal. The lifting plate 28 is in a horizontal state. As the horizontal lifting plate 28 rises, the sub-plate below the horizontal lifting plate 28 fits against the bottom surface of the wheel 32 and stops rising, while the upper sub-plate continues to rise, stretching the spring, and finally fits against the bottom surface of the carrier body 3, driving the carrier body 3 to rise slightly. At this time, the distance between the vacuum rod 49 and the product positioning suction cup 50 and the bottom surface of the carrier body 3 will also change slightly. In this process, the deformed product positioning suction cup 50 has changed in shape, and the reduction in elasticity directly affects the sealing effect and adsorption force of the suction cup. , making it difficult to maintain a stable adsorption state, and unable to fit tightly on the adsorption surface like the intact product positioning suction cup 50. As the horizontal lifting plate 28 rises, the deformed product positioning suction cup 50 will fall off, thereby detecting which specific product positioning suction cup 50 has been deformed. Subsequently, the lifting motor 5 drives the horizontal lifting plate 28 to descend slightly, so that the detached product positioning suction cup 50 is re-adsorbed with the bottom surface of the carrier body 3, and the work is completed. After the work is completed, the staff can replace the deformed carrier body 3 according to the detection results.

[0047] Detection component, the detection component includes: an anti-slip ring 27, the anti-slip ring 27 is sleeved on the ends of several vacuum rods 49 at the center of the unlocking rod mounting plate 52, a sliding protrusion is provided on the side close to the surface of one side of the anti-slip ring 27, and a liftable limiting ring 26 is provided on one side surface of the anti-slip ring 27. Both side surfaces of the limiting ring 26 are provided with sliding channels that cooperate with the sliding protrusions. The limiting ring 26 cooperates with the positioning pin 30 to limit the distance between the horizontal lifting plate 28 and the product positioning suction cup 50. The detection component also includes: a bottom spring 38, the bottom spring 38 is provided on the bottom surface of the vacuum rod 49, a top pressure pile 62 is provided at the center of the bottom spring 38, the upper surface of the top pressure pile 62 is fixedly mounted on the bottom surface of the vacuum rod 49, and a trigger switch 63 is provided below the top pressure pile 62. The bottom surface of the trigger switch 63 is provided with a prompt alarm 48, the bottom surface of the prompt alarm 48 is provided with a prompt light, and the side surface of the prompt alarm 48 is provided with a speaker;

[0048] The anti-slip ring 27 is sleeved on the end of the vacuum rod 49, and its sliding protrusion cooperates with the sliding path of the limiting ring 26. When the horizontal lifting plate 28 rises, the positioning pin 30 on the side of the horizontal lifting plate 28 contacts it from the bottom of the limiting ring 26 and rises with the limiting ring 26. After the limiting ring 26 reaches the limit distance, the horizontal lifting plate 28 is also restricted, which prevents the horizontal lifting plate 28 from driving the carrier body 3 to rise too high, causing the product positioning suction cup 50 with intact bottom surface to be subjected to excessive pulling effect and fall off. When the deformed product positioning suction cup 50 falls off due to insufficient adsorption force, the compression amount of the bottom spring 38 will change. When the compression amount reaches a certain level, the jacking pile 62 will trigger the trigger switch 63, and the trigger switch 63 will immediately activate the warning alarm 48, issuing a visual (warning light) and auditory (speaker) alarm to remind the operator to check and adjust the status of the product positioning suction cup 50 in time.

[0049] The working principle of the present invention is:

[0050] When the equipment is in use, the staff uses the lifting mechanism to support the platform base plate 40 through the two lifting frames 1 to achieve vertical movement. The conveying motor 41 is installed on the bottom surface of the platform base plate 40 to provide initial power. The lifting motor 11 drives the screw to rotate and cooperates with the slider 60 on the mounting riser 61 to make the platform base plate 40 and all the mechanisms thereon rise and fall smoothly. The lifting platform baffle 10 ensures stability during the lifting process and prevents the platform base plate 40 from deflecting.

[0051] Subsequently, after the robotic arm places the carrier body 3 at one end of the conveying mechanism, the conveying mechanism supports and transports the carrier body 3 through the roller shaft 33 and the wheel 32, and uses the fixed side guide plate 37 to cooperate with the active side guide plate 34 to ensure the stability and directionality of the carrier body 3 during the transportation process. After the carrier body 3 moves to a certain position, it is blocked by the carrier positioning block 39, ensuring the safety and accuracy of the carrier during the transportation process.

[0052] After the carrier body 3 reaches the designated working position, the active side cylinder 36 and the active side guide shaft 35 work together. According to the characteristics of the active side guide plate 34 and the active side guide shaft 35 connected to the active side cylinder 36, the active side cylinder 36 drives the active side guide plate 34 to extend or retract, thereby clamping or releasing the combined carrier 3;

[0053] When unlocking is required, the unlocking electric cylinder 59 is activated, and its output shaft pushes the telescopic rod 48 to rise vertically along the unlocking guide shaft 51. The movement of the telescopic rod 48 drives the unlocking rod mounting plate 52 to move synchronously. After unlocking is completed, the positioning electric cylinder 55 is activated and drives the positioning mounting plate 53 to rise and fall vertically along the unlocking guide shaft 51. The movement of the positioning mounting plate 53 drives the vacuum rod 49 and the product positioning suction cup 50 to move synchronously until the product positioning suction cup 50 accurately contacts the bottom surface of the carrier body 3. The vacuum rod 49 is then activated to generate negative pressure through the suction cup, firmly adsorbing the product in the specified position, completing product positioning.

[0054] When the cover needs to be opened, the cover-opening electric cylinder 12 of the cover-opening mechanism is activated, driving the cover-opening mounting frame 15 and all internal components to move in the vertical direction, so that the cover-opening finger buckle 22 approaches the upper cover of the carrier body 3. When the cover-opening finger buckle 22 reaches the preset position, the cover-opening cylinder 18 starts to work, and its output shaft is extended and retracted, driving the cover-opening finger buckle 22 to rotate around a certain axis through the cover-opening connecting buckle 20 and the cover-opening rotating shaft 21, clamping the upper cover of the carrier body 3 on both sides, and then using multiple cover-opening suction cups 25 to suck the upper cover of the carrier body 3. As the cover-opening mechanism rises, the upper and lower covers of the carrier body 3 are separated. The buffer 24 provides cushioning when the cover-opening finger buckle 22 contacts the upper cover to reduce impact and vibration.

[0055] When it is necessary to adjust the position of the product positioning suction cup 50 or correct its deformation, the lifting motor 5 is started by the staff signal, and its output shaft rotates, driving the bottom force plate 4 and the connecting column 2 and horizontal lifting plate 28 connected thereto to rise. The horizontal detector 8 monitors the flatness of the horizontal lifting plate 28 in real time to ensure that it remains horizontal during the rising process to avoid adjustment errors caused by tilting. If unevenness is detected, the signal broadcaster 9 will sound an alarm to prompt the operator to make adjustments. The operator controls the brake motor to drive the meshing disk 69 to rotate, and through the meshing action of the meshing gear ring 65, the deflection ring 64 and the entire adjustment structure above it are driven to rotate to complete the lateral position adjustment, and through the meshing action of the adjusting gear cylinder 66 and the fixed gear disk 67, the small motor is used to drive the meshing rod 68 to rotate, and the meshing effect with the adjusting gear cylinder 66 drives the equipment to adjust the vertical position, thereby completing the horizontal adjustment. The position of the lifting plate 28 is adjusted until the horizontal lifting plate 28 is horizontal. As the horizontal lifting plate 28 rises, it drives the carrier body 3 to rise slightly. At this time, the distance between the vacuum rod 49 and the product positioning suction cup 50 and the bottom surface of the carrier body 3 will also change slightly. In this process, the deformed product positioning suction cup 50 cannot fit tightly on the adsorption surface like the intact product positioning suction cup 50 because of its changed shape. As the horizontal lifting plate 28 rises, the deformed product positioning suction cup 50 will fall off, so as to detect which specific product positioning suction cup 50 has been deformed. Subsequently, the lifting motor 5 drives the horizontal lifting plate 28 to fall slightly, so that the detached product positioning suction cup 50 is adsorbed again with the bottom surface of the carrier body 3, and the work is completed. After the work is completed, the staff can replace the deformed carrier body 3 according to the detection results.

[0056] The anti-slip ring 27 is sleeved on the end of the vacuum rod 49, and its sliding protrusion cooperates with the sliding path of the limiting ring 26. When the horizontal lifting plate 28 rises, the positioning pin 30 on the side of the horizontal lifting plate 28 contacts it from the bottom of the limiting ring 26 and rises with the limiting ring 26. After the limiting ring 26 reaches the limit distance, the horizontal lifting plate 28 is also restricted. When the deformed product positioning suction cup 50 falls off due to insufficient adsorption force, the compression amount of the bottom spring 38 will change. When the compression amount reaches a certain level, the jacking pile 62 will trigger the trigger switch 63, and the trigger switch 63 will immediately activate the warning alarm 48, issuing a visual (prompt light) and auditory (speaker) alarm to remind the operator to check and adjust the status of the product positioning suction cup 50 in time.

[0057] The above description is only a preferred specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any technician familiar with the technical field, within the technical scope disclosed by the present invention, who makes equivalent replacements or changes based on the technical solution and inventive concept of the present invention, should be covered by the scope of protection of the present invention.

Claims

1. A wafer carrier loading and unloading mechanism, characterized in that: include: The anti-slip mechanism includes an adjustment component, the adjustment component includes: a rotating base plate (29), the rotating base plate (29) is arranged on the upper surface of the positioning mounting plate (53) and can be rotated, the upper surface of the rotating base plate (29) is provided with two driven support rods (6), the upper surface of the rotating base plate (29) is provided with a lifting motor (5), the upper surface of the lifting motor (5) is fixedly installed with a bottom force plate (4) at the end of the output shaft, the upper surface of the bottom force plate (4) is fixedly installed with a plurality of connecting columns (2), the end of the connecting column (2) is provided with a horizontal lifting plate (28), the horizontal lifting plate (28) is composed of a plurality of sub-plates, and each sub-plate is connected by a connecting spring; The cover opening mechanism comprises: a cover opening electric cylinder (12); an open cover mounting plate (14) is provided at the end of the output shaft of the cover opening electric cylinder (12); an open cover mounting column (17) is provided on the bottom surface of the cover opening mounting plate (14); an open cover guide shaft (13) is fixedly installed on the upper surface of the cover opening mounting plate (14); an open cover mounting frame (15) is provided on the bottom surface of the cover opening mounting plate (14); a plurality of open cover suction cups (25) are provided on the bottom surface of the cover opening mounting frame (15); a buffer (24) is further provided on the bottom surface of the cover opening mounting frame (15); and a side surface of the cover opening mounting frame (15) is provided. A limiting bolt (23) is provided, a plurality of pressure blocks (16) are provided on the side surface of the cover opening mounting frame (15), a cylinder seat (19) is provided on one side surface of the cover opening mounting plate (14), a cover opening cylinder (18) is provided on one side surface of the cylinder seat (19), a cover opening connecting buckle (20) is provided on the bottom surface of the cylinder seat (19), one end of the cover opening connecting buckle (20) is connected to the end of the output shaft of the cylinder seat (19), a cover opening rotating shaft (21) is provided on one side surface of the cover opening connecting buckle (20), and a cover opening rotating shaft (21) is provided between the cover opening connecting buckle (20) and the cover opening finger buckle (22); A bearing mechanism, the bearing mechanism comprising: a bearing mounting frame (43), the bearing mounting frame (43) being located on the upper surface of the platform base plate (40) and being capable of being raised and lowered, a plurality of bearing columns (42) being fixedly mounted on the upper surface of the bearing mounting frame (43), bearing lifting cylinders (47) being provided on both sides of the bottom surface of the bearing mounting frame (43), a lifting cylinder (45) and a clamping cylinder (46) being fixedly mounted on the upper surface of the platform base plate (40), and a clamping L seat (44) being provided at the end of the output shaft on the upper surface of the lifting cylinder (45); The adjustment assembly further comprises: an engaging toothed ring (65), one side surface of the engaging toothed ring (65) is engaged with an engaging disk (69), the upper surface of the rotating base plate (29) is provided with a brake motor for driving the engaging disk (69), the bottom surface of the engaging toothed ring (65) is provided with a deflection ring (64), the engaging toothed ring (65) is attached to the upper surface of the deflection ring (64) for rotation, the bottom surface of the engaging toothed ring (65) is fixedly connected with an adjusting toothed cylinder (66), the adjusting toothed cylinder (66) is fixedly connected to the adjusting toothed cylinder (66), and the adjusting toothed cylinder (66) is fixedly connected to the adjusting toothed cylinder (66). 6) are provided with fixed toothed discs (67) that mesh with them on both side surfaces, a fixing frame (70) is provided on one side surface of the fixed toothed disc (67), the top surface of the fixing frame (70) is fixedly connected to the bottom surface of the positioning mounting plate (53), the bottom surface of the adjusting gear cylinder (66) is provided with an engaging rod (68) that meshes with it, a small motor for driving the engaging rod (68) is provided on one side surface, and the small motor is fixedly mounted on one side surface of the fixed toothed disc (67).

2. The wafer carrier loading and unloading mechanism according to claim 1, characterized in that: A lifting mechanism, the lifting mechanism comprising: two lifting frames (1), a platform base plate (40) is provided between the two lifting frames (1), a conveying motor (41) is provided on the bottom surface of the platform base plate (40), lifting platform baffles (10) are fixedly installed on the front and rear surfaces of the platform base plate (40), mounting vertical plates (61) are fixedly installed on the left and right surfaces of the platform base plate (40), a slider (60) is provided on one side surface of the mounting vertical plate (61), a screw rod matched with the slider (60) is provided on the adjacent side of the two lifting frames (1), and a lifting motor (11) for driving the lifting mechanism to move is provided on the bottom surface of the platform base plate (40).

3. The wafer carrier loading and unloading mechanism according to claim 1, characterized in that: A conveying mechanism, the conveying mechanism includes: a carrier positioning block (39), the carrier positioning block (39) is fixedly mounted on the upper surface of the platform base plate (40), both sides of the upper surface of the platform base plate (40) are provided with conveying guard plates (31), the adjacent side surfaces of the two conveying guard plates (31) are provided with a fixed side guide plate (37) and an active side guide plate (34), the center of the active side guide plate (34) is provided with an active side cylinder (36) and an active side guide shaft (35), a plurality of roller shafts (33) are provided between the two conveying guard plates (31), the surface of the roller shaft (33) is provided with a plurality of wheel pieces (32), and the upper surface of the wheel pieces (32) is provided with a carrier body (3).

4. The wafer carrier loading and unloading mechanism according to claim 1, wherein: An unlocking mechanism, comprising: an unlocking rod mounting plate (52), a plurality of guide telescopic rods (56) being provided on the upper surface of the unlocking rod mounting plate (52), a positioning mounting plate (53) being provided below the unlocking rod mounting plate (52), a plurality of positioning linear bearings (58) being provided on the upper surface of the positioning mounting plate (53), a bottom large flat plate (54) being provided below the positioning mounting plate (53), a positioning electric cylinder (55) and an unlocking electric cylinder being provided on the bottom surface of the bottom large flat plate (54), (59), the upper surface of the positioning electric cylinder (55) is fixedly connected to the bottom surface of the positioning mounting plate (53), a plurality of vacuum rods (49) are provided on the upper surface of the positioning mounting plate (53), an exhaust port (7) is provided on one side surface of the vacuum rod (49), a product positioning suction cup (50) is provided at the end of the vacuum rod (49), an unlocking guide shaft (51) is also provided on the upper surface of the positioning mounting plate (53), and an unlocking linear bearing (57) is provided on the surface of the unlocking guide shaft (51).

5. The wafer carrier loading and unloading mechanism according to claim 1, characterized in that: The detection component, the anti-slip mechanism also includes a detection component, the detection component includes: an anti-slip ring (27), the anti-slip ring (27) is sleeved on the ends of several vacuum rods (49) at the center of the unlocking rod mounting plate (52), a sliding protrusion is provided on one side of the anti-slip ring (27), and a lifting and lowering limiting ring (26) is provided on one side of the anti-slip ring (27).

6. The wafer carrier loading and unloading mechanism according to claim 5, characterized in that: The detection component further includes: a bottom spring (38), the bottom spring (38) is arranged on the bottom surface of the vacuum rod (49), a top pressure pile (62) is arranged at the center of the bottom spring (38), the upper surface of the top pressure pile (62) is fixedly mounted on the bottom surface of the vacuum rod (49), a trigger switch (63) is arranged below the top pressure pile (62), and a prompt alarm (48) is arranged on the bottom surface of the trigger switch (63).

7. The wafer carrier loading and unloading mechanism according to claim 1, characterized in that: The adjustment assembly further includes: a level detector (8), the level detector (8) is located on the bottom surface of the horizontal lifting plate (28), a signal broadcaster (9) is provided on one side surface of the level detector (8), and a plurality of positioning pins (30) are provided on the side surface at the center of the horizontal lifting plate (28).

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