Nano-imprinting large-area demolding device

Abstract

The nanoimprint large-area demolding device comprises a shell base, a plurality of suction cup assemblies are movably arranged on the shell base, each suction cup assembly is connected with a plurality of vacuum suction cups, and each suction cup assembly is provided with a plurality of vacuum suction cups. A moving mechanism for driving the suction cup assembly to move up and down is arranged on the shell base, the output end of the moving mechanism is in power connection with the suction cup assembly, and the vacuum suction cups are driven to move synchronously through movement of the suction cup assembly; in the whole demolding process, uniform demolding force can be provided in the whole process, large loss of a template is not prone to being generated, the uncovering angle of the soft film can be kept constant, and meanwhile, aiming at an impressing structure difficult to demold, compared with other demolding modes, the mold is easier to demold and has greater advantages.

Description

Technical Field

[0001] The invention relates to the technical field of nanoimprinting, and in particular to a nanoimprinting large-area demoulding device. Background Art

[0002] So far, the global large-scale integrated circuit production has almost completely relied on the photolithography process, which has played a key role in promoting the continued prosperity of the microelectronics and optoelectronics industries. However, the resolution improvement of photolithography is facing challenges. Although reducing the exposure wavelength can improve the resolution, the current photolithography technology has reached the bottleneck of resolution due to the wavelength of the projected imaging light wave and the lack of optical imaging systems and photoresist materials suitable for lower wavelengths.

[0003] In order to break through this bottleneck, in recent years, new generation lithography technologies such as extreme ultraviolet lithography, X-ray lithography, electron beam lithography and focused ion beam lithography have emerged one after another. They use shorter exposure wavelengths to successfully improve the structural resolution to sub-10nm level. However, the high cost of these advanced technologies limits their application in large-scale industrial production.

[0004] In this context, nanoimprint technology has emerged with its unique advantages. The technology was first proposed by Chinese scientist Stephen Y. Chou in 1995. Its principle is to press a mold with a nanoscale convex and concave structure into a deformable material to form a pattern opposite to the mold on the material. Nanoimprint technology not only has ultra-high resolution (the current minimum resolution has reached less than 2 nanometers, far exceeding the 22 nanometers of photolithography technology), but also has the advantages of easy mass production, low cost and high consistency. Since there is no diffraction phenomenon in optical exposure, the technology can work in parallel to achieve batch processing of nanostructures without the need for complex optical or electromagnetic focusing systems, thereby reducing costs.

[0005] In order to further improve the economic benefits of nanoimprint technology, the common imprint equipment on the market currently uses soft templates copied from the original template to extend the life of the template and reduce costs. With the continuous advancement of technology, the size of the imprinted wafer has gradually expanded to 8 inches and 12 inches, which greatly increases the difficulty of demolding, thereby affecting the yield rate.

[0006] The existing demoulding scheme for roller pressing is mainly to lift one side of the template and slowly withdraw the roller. The practical problem is that it requires a large space, and it is difficult to demould large-sized stamped sheets, and it is not universal. For the demoulding method of up and down movement of air pressure, the main problem is that the demoulding force is large, and the controllability of the demoulding process is poor, which has an adverse effect on the life of the template after multiple stamping.

[0007] Therefore, a device that can achieve safe and reliable demoulding of 8-inch and 12-inch molds is needed to promote the industrialization of the imprinting process. Summary of the invention

[0008] The purpose of the present invention is to provide a nanoimprint large-area demoulding device to overcome the deficiencies in the prior art.

[0009] To achieve the above object, the present invention provides the following technical solutions: The present application discloses a nanoimprinting large-area demoulding device, comprising a shell base, on which a plurality of suction cup assemblies are movably provided, each of which is connected to a plurality of vacuum suction cups, each of which is provided with a moving mechanism for driving the suction cup assembly to move up and down, the output end power of the moving mechanism is connected to the suction cup assembly, and the vacuum suction cup is driven to move synchronously through the movement of the suction cup assembly.

[0010] Preferably, a mounting seat is provided on the base of the housing, the moving mechanism is provided on the mounting seat, and the moving mechanism comprises a telescopic rod, and an output end of the telescopic rod is connected to the suction cup assembly.

[0011] Preferably, a vacuum solenoid valve is provided on the base of the shell, and a plurality of guide tubes are connected to the output end of the vacuum solenoid valve, and the guide tubes are connected to the vacuum suction cup, and the opening and closing of the corresponding vacuum suction cup are controlled by the vacuum solenoid valve.

[0012] Preferably, a plurality of guide shafts are provided on the shell base, and a matching hole is opened on the suction cup assembly. The matching hole and the guide shaft are interconnected, and when the moving mechanism drives the suction cup assembly to move, the guide shaft limits the movement direction of the suction cup assembly.

[0013] Preferably, the guide shafts are arranged in pairs, and two of the guide shafts form a group and are respectively located at two ends of the suction cup assembly. Both ends of the suction cup assembly are connected to the moving mechanism, and the two ends of the suction cup assembly move synchronously.

[0014] Preferably, a linear bearing is connected to the suction cup assembly, and the suction cup assembly and the guide shaft are slidably connected via the linear bearing, with the connection being located at the center of the linear bearing.

[0015] Preferably, the telescopic rod is an electric cylinder, and the output end of the electric cylinder is connected to the suction cup assembly.

[0016] Preferably, the bottom of the housing base is a soft template, and a substrate and a substrate suction cup are provided below the soft template.

[0017] Beneficial effects of the present invention: (1) The entire demoulding process can provide uniform demoulding force throughout the entire process, is not prone to causing large losses to the template, and the angle at which the soft film is peeled off can be kept constant. The displacement during the demoulding process is smaller, the deformation of the template is smaller, and the overall process loss is smaller. At the same time, for embossed structures that are difficult to demould, the present invention is easier to demould than other demoulding methods and has greater advantages.

[0018] The features and advantages of the present invention will be described in detail through embodiments in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a three-dimensional structural schematic diagram of an embodiment of a nanoimprint large-area demoulding device of the present invention; Figure 2 is a schematic diagram of a planar structure of an embodiment of the present invention; Figure 3 is a schematic diagram of a demoulding process flow of an embodiment of the present invention; Figure 4 It is a schematic structural diagram of the demoulding process of an embodiment of the present invention; In the figure: 11, vacuum solenoid valve; 12, electric cylinder; 13, mounting seat; 14, linear bearing; 15, guide shaft; 16, vacuum suction cup; 21, first group of vacuum suction cups; 22, second group of vacuum suction cups; 23, nth group of vacuum suction cups; 24, last group of vacuum suction cups; 41, demoulding device; 42, soft template; 43, substrate; 44, substrate suction cup. DETAILED DESCRIPTION

[0020] In order to make the purpose, technical scheme and advantages of the present invention clearer, the present invention is further described in detail below through the accompanying drawings and embodiments. However, it should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the scope of the present invention. In addition, in the following description, the description of known structures and technologies is omitted to avoid unnecessary confusion of the concept of the present invention.

[0021] The present invention describes a novel nanoimprint demoulding device. Purpose 1: To achieve controlled demoulding and increase the life of the template; Purpose 2: Reduce demoulding force and improve the yield of imprinted structure.

[0022] See also Figure 1An embodiment of the present invention provides a nanoimprint large-area demolding device, including a shell base, on which a plurality of suction cup assemblies are movably provided, each of which is connected to a plurality of vacuum suction cups 16, each of which is provided with a, and the shell base is provided with a moving mechanism for driving the suction cup assembly to move up and down, the output end power of the moving mechanism is connected to the suction cup assembly, and the vacuum suction cup 16 is driven to move synchronously through the movement of the suction cup assembly.

[0023] The shell base includes a side plate and a bottom plate, the bottom plate is provided with an output port, the suction cup assembly and the vacuum suction cup 16 are arranged in the output port, the vacuum suction cup 16 is adsorbed and released through the output port, and the suction cup assembly drives the vacuum suction cup 16 to move in the output port.

[0024] The moving position of the suction cup assembly is located at both ends, and the movement of the two ends drives the entire suction cup assembly to move, which is stable and evenly stressed, making it easier to demould and has greater advantages.

[0025] In a feasible embodiment, a plurality of receiving holes are provided on the suction cup assembly, and the vacuum suction cup 16 is connected to the receiving holes. The receiving holes are parallel to each other and face the working end of the vacuum suction cup 16 .

[0026] A mounting seat is provided on the shell base, and the moving mechanism is provided on the mounting seat. The moving mechanism comprises a telescopic rod, and an output end of the telescopic rod is connected to the suction cup assembly.

[0027] The mounting seat 13 is located on both sides of the shell base, and includes a bottom connecting piece connected to the shell base facing the side of the soft template 42, and a vertical bracket extending upward from the bottom connecting piece, and the vertical bracket is provided with the telescopic rod, and the telescopic end of the telescopic rod is movably connected to the vertical bracket and faces the side of the soft template 42.

[0028] The suction cup assembly is provided with an auxiliary positioning mechanism, which includes an auxiliary seat provided on the suction cup assembly, the auxiliary seat is located outside the vacuum suction cup 16 and is connected to the vacuum suction cup 16, and an adjustment slider is provided on the auxiliary seat, the adjustment slider is connected to the vacuum suction cup 16, and is movably connected to the auxiliary seat, and the movably connected includes a threaded rotation connection, a sliding connection, and a buckle connection; In a feasible embodiment, the adjustment slider is threadedly connected to the auxiliary seat, the adjustment slider is rotationally connected to the vacuum suction cup 16, and the auxiliary seat is provided with an auxiliary motor. The auxiliary motor is power-connected to the adjustment slider to drive the adjustment slider to rotate and move on the auxiliary seat, thereby adjusting the position of the vacuum suction cup 16. After precise adjustment, it can better meet the usage requirements.

[0029] A vacuum solenoid valve 11 is provided on the base of the housing, and a plurality of guide tubes are connected to the output end of the vacuum solenoid valve 11 . The guide tubes are connected to the vacuum suction cup 16 , and the opening and closing of the corresponding vacuum suction cup 16 are controlled by the vacuum solenoid valve 11 .

[0030] By controlling the adsorption and release of the vacuum suction cup 16 through the vacuum solenoid valve 11 , the vacuum suction cup 16 can be controlled to retract and release the soft template 42 , thereby controlling the position.

[0031] A plurality of guide shafts 15 are provided on the shell base, and a matching hole is opened on the suction cup assembly. The matching hole and the guide shaft 15 are connected to each other. When the moving mechanism drives the suction cup assembly to move, the guide shaft 15 limits the movement direction of the suction cup assembly.

[0032] The guide shafts 15 are arranged in pairs, and two guide shafts 15 form a group and are respectively located at the two ends of the suction cup assembly. Both ends of the suction cup assembly are connected to the moving mechanism, and the two ends of the suction cup assembly move synchronously.

[0033] The suction cup assembly is connected to a linear bearing 14 , and the suction cup assembly is slidably connected to the guide shaft 15 via the linear bearing 14 , and the connection is located at the center of the linear bearing 14 .

[0034] The telescopic rod is an electric cylinder 12, and the output end of the electric cylinder 12 is connected to the suction cup assembly.

[0035] The bottom of the housing base is a soft template 42 , and a substrate 43 and a substrate suction cup 44 are provided below the soft template 42 .

[0036] The device controls the adsorption of the soft template 42, thereby controlling the separation and detachment of the soft template 42 from the substrate 43. During this process, the force can be kept uniform and stable, and the angle can be kept constant.

[0037] Figure 2 A schematic diagram of the demoulding device of the present invention is shown. Figure 2 is Figure 1 Based on the detailed structure diagram of the vacuum suction cup of the demoulding device, Figure 3 It is the main flow chart of the demoulding device completing the demoulding action. Figure 4A schematic diagram of the demoulding process of the demoulding device of the present invention is shown.

[0038] Figure 1 It includes a vacuum solenoid valve 11 for controlling the air path. Each group of vacuum solenoid valves 11 can independently control the opening and closing of the group of vacuum suction cups 16. It includes an electric cylinder 12, which is fixed on the electric cylinder mounting seat. Each group of electric cylinders 12 can independently control the up and down movement of the group of vacuum suction cups 16. 13 is an electric cylinder mounting seat, which is used to fix the electric cylinder 12, including a linear bearing 14 and a guide shaft 15. Each group of linear bearings and guide shafts can independently control the movement direction of the group of vacuum suction cups. 16 is a vacuum suction cup, a total of 13 groups, a single row as a group, each group of vacuum suction cups is equipped with an independent vacuum solenoid valve 11, electric cylinder 12, linear bearing 14 and guide shaft 15.

[0039] Figure 2 , the arrangement of the vacuum suction cups is shown in FIG. 1 . In the present embodiment, there are 13 groups of vacuum suction cups, including a first group of vacuum suction cups 21 , a second group of vacuum suction cups 22 , an nth group of vacuum suction cups 23 , and a last group of vacuum suction cups 24 .

[0040] Figure 3 The demoulding device action flow chart is shown. Figure 4 The schematic diagram of the demoulding process of the demoulding device is shown. The entire demoulding device 41 is located above the soft template 42, and the substrate 43 and the substrate chuck (substrate suction cup) 44 are located below in sequence.

[0041] Usage process: After the imprinting is completed, all vacuum suction cups 16 move downward under the drive of the electric cylinder 12. After reaching the set position, the vacuum solenoid valve 11 is opened, and all vacuum suction cups 16 are vacuumed. At this time, the vacuum suction cups 16 completely suck the soft template 42. The first group of vacuum suction cups 21 are driven upward by the corresponding electric cylinder 12. After moving to the specified position, the second group of vacuum suction cups 22 are driven upward by the corresponding electric cylinder 12. After moving to the specified position, and so on, until the last group of vacuum suction cups 24 are driven upward by the corresponding electric cylinder 12. After moving to the specified position, the soft template 42 and the substrate 43 are separated and demolding is achieved. Then the vacuum solenoid valve 11 is closed, and all vacuum suction cups 16 are closed, and the unloading of the soft template 42 and the unloading of the wafer substrate 43 are completed.

[0042] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modification, equivalent substitution or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A nanoimprint large-area demoulding device, characterized in that: The invention comprises a shell base, on which a plurality of suction cup assemblies are movably arranged, each of which is connected to a plurality of vacuum suction cups (16), each of which is provided with a moving mechanism for driving the suction cup assembly to move up and down, the output end power of the moving mechanism is connected to the suction cup assembly, and the vacuum suction cup (16) is driven to move synchronously by the movement of the suction cup assembly, the bottom of the shell base is a soft template (42), and a substrate (43) and a substrate suction cup (44) are provided below the soft template (42).

2. A nanoimprint large-area demoulding device as claimed in claim 1, characterized in that: A mounting seat (13) is provided on the housing base, and the moving mechanism is provided on the mounting seat (13). The moving mechanism comprises a telescopic rod, and the output end of the telescopic rod is connected to the suction cup assembly.

3. A nanoimprint large-area demoulding device as claimed in claim 1, characterized in that: A vacuum solenoid valve (11) is provided on the base of the housing, a plurality of flow guide tubes are connected to the output end of the vacuum solenoid valve (11), and the flow guide tubes are connected to the vacuum suction cup (16), and the opening and closing of the corresponding vacuum suction cup (16) are controlled by the vacuum solenoid valve (11).

4. A nanoimprint large-area demoulding device as claimed in claim 1, characterized in that: A plurality of guide shafts (15) are provided on the housing base, a matching hole is provided on the suction cup assembly, the matching hole and the guide shaft (15) are connected to each other, and when the moving mechanism drives the suction cup assembly to move, the guide shaft (15) limits the movement direction of the suction cup assembly.

5. A nanoimprint large-area demoulding device as claimed in claim 4, characterized in that: The guide shafts (15) are arranged in pairs, and two guide shafts (15) form a group and are respectively located at two ends of the suction cup assembly. Both ends of the suction cup assembly are connected to the moving mechanism, and the two ends of the suction cup assembly move synchronously.

6. A nanoimprint large-area demoulding device as claimed in claim 4, characterized in that: A linear bearing (14) is connected to the suction cup assembly, and the suction cup assembly and the guide shaft (15) are slidably connected via the linear bearing (14), with the connection being located at the center of the linear bearing (14).

7. A nanoimprint large-area demoulding device as claimed in claim 2, characterized in that: The telescopic rod is an electric cylinder (12), and the output end of the electric cylinder (12) is connected to the suction cup assembly.

8. A nanoimprint large-area demoulding device as claimed in claim 2, characterized in that: The mounting seat (13) is located on both sides of the shell base, and comprises a bottom connecting piece connected to the side of the shell base facing the soft template (42), and a vertical bracket extending upward from the bottom connecting piece, the telescopic rod being provided on the vertical bracket, and the telescopic end of the telescopic rod being movably connected to the vertical bracket and facing the side of the soft template (42).

9. A nanoimprint large-area demoulding device as claimed in claim 1, characterized in that: The housing base comprises a side plate and a bottom plate, the bottom plate being provided with an output port, the suction cup assembly and the vacuum suction cup (16) being provided in the output port, the vacuum suction cup (16) being adsorbed and released through the output port, and the suction cup assembly driving the vacuum suction cup (16) to move in the output port.

10. A nanoimprint large-area demoulding device as claimed in claim 2, characterized in that: The mounting seat (13) is located on both sides of the shell base, and comprises a bottom connecting piece connected to the side of the shell base facing the soft template (42), and a vertical bracket extending upward from the bottom connecting piece, the telescopic rod being provided on the vertical bracket, and the telescopic end of the telescopic rod being movably connected to the vertical bracket and facing the side of the soft template (42).

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