A silane wet dust treatment system

Abstract

The present invention provides a silane wet dust treatment system. A silane wet dust separation device is provided between the exhaust gas output end of a processing device and a combustion treatment device. The silane wet dust separation device is used for gas-solid separation of the output exhaust gas. The silane wet dust separation device includes a primary screening packing area, a separation area, and a first compressed air pump. The exhaust gas output end of the processing device is connected to the bottom of the primary screening packing area. A plurality of first compressed air pumps are obliquely arranged at equal intervals on the side of the primary screening packing area. Adjacent first compressed air pumps are arranged in parallel. A separation area is provided above the primary screening packing area. An air outlet is provided above the separation area, and the air outlet is connected to the output end of the combustion treatment device. A partition plate is provided in the middle of the separation area near the primary screening packing area. The side of the partition plate away from the primary screening packing area is a deposition area, and a dry dust discharge port is provided on the side of the deposition area. It can effectively perform gas-solid separation on silane wet dust with a moisture content of 70%, greatly reduce the blockage rate of the combustion treatment device, and improve the treatment efficiency.

Description

Technical Field

[0001] The present invention relates to the technical field of tail gas emissions, and more specifically, to a silane wet dust treatment system. Background Art

[0002] In the PECVD (Plasma Enhanced Chemical Vapor Deposition) process of cell production in the photovoltaic industry, tail gas containing silane is generated. Silane is a colorless gas that reacts with air and can cause asphyxiation. When this gas usually comes into contact with air, it will cause combustion and emit a thick white amorphous silica smoke. Therefore, it must be treated before being discharged into the atmosphere.

[0003] The closest prior art is disclosed in Publication No.: CN215637221U, a silane tail gas emission treatment system, which includes that the output end of a vacuum pump group is connected to the input end of a combustion barrel group, the output end of the combustion barrel group is connected to the input end of an exhaust gas tower group, the output end of the exhaust gas tower group is connected to the input end of a fan group, and the output end of the fan group is connected to a chimney. The treated silane tail gas is discharged to the outside through the chimney. A pressure sensor is provided at the output end of the vacuum pump group, and the pressure sensor is connected to the fan group.

[0004] This silane emission treatment system uses the connection between the output end of the vacuum pump group and the input end of the combustion barrel group for treatment. The wet dust particles in the silane tail gas output from the machine are likely to block the conveying pipeline, and it is often necessary to stop the machine for cleaning, which greatly reduces the production efficiency.

[0005] In view of this, the present invention provides a silane wet dust treatment system that can effectively separate dust and is not easily blocked. Summary of the Invention

[0006] The object of the present invention is to provide a silane wet dust treatment system that can effectively separate dust and is not easily blocked.

[0007] A silane wet dust treatment system, comprising a silane wet dust separation device 1 and a combustion treatment device 2, is characterized in that: a silane wet dust separation device 1 is provided between the tail gas output end of the processing equipment 6 and the combustion treatment device 2. The silane wet dust separation device 1 is used for gas-solid separation of the output tail gas. The silane wet dust separation device 1 includes a primary sieve packing area 3, a separation area 4, and a first compressed air pump 5. The tail gas output end of the processing equipment 6 is connected to the bottom of the primary sieve packing area 3. A plurality of first compressed air pumps 5 are obliquely arranged at equal intervals on the side of the primary sieve packing area 3. Adjacent first compressed air pumps 5 are arranged in parallel. A separation area 4 is provided above the primary sieve packing area 3. An air outlet 7 is provided above the separation area 4. The air outlet 7 is connected to the output end of the combustion treatment device 2. A partition plate 8 is provided near the primary sieve packing area 3 in the middle of the separation area 4. The side of the partition plate 8 away from the primary sieve packing area 3 is a deposition area 12. A dry dust discharge port 121 is provided on the side of the deposition area 12.

[0008] Further, a second compressed air pump 9 is further provided at the bottom of the partition plate 8. The output end of the second compressed air pump 9 corresponds to the deposition area 12. The second compressed air pump 9 outputs high-temperature compressed air at 80°C - 90°C for drying the silane wet dust received in the deposition area 12 into dry dust.

[0009] Further, the partition plate 8 is perpendicularly connected to the primary sieve packing area 3, facilitating gas-solid separation of the tail gas.

[0010] In some embodiments, an initial velocity detection component 10 is further provided at the output end of the primary sieve packing area 3. The initial velocity detection component 10 is composed of a plurality of first sensors 101. Each first sensor 101 corresponds to and matches a first compressed air pump 5. The first sensor 101 is used to detect the initial parameters of the tail gas after passing through the primary sieve packing area 3. The initial parameters include initial velocity, initial time, and initial position.

[0011] Further, a final velocity detection component 11 is provided between the air outlet 7 and the top of the partition plate 8. The final velocity detection component 11 is composed of a plurality of second sensors 111. Each second sensor 111 corresponds to and matches a first sensor 101. The first sensor 101 is used to detect the final parameters of the tail gas when it reaches the air outlet 7 after being impacted by the air output from the first compressed air pump 5. The final parameters include final velocity, final time, and final position.

[0012] Further, the initial velocity detected by the first sensor 101 is v0, and the terminal velocity detected by the second sensor 111 is v1, where v1 = √{(gd(ρs - ρ) / 18μ)² + (L / t²)}, where u is the particle sedimentation velocity (cm / s); ρs and ρ are the densities of the particles and air respectively (g / cm); g is the acceleration due to gravity (cm / s); μ is the adhesion coefficient of air (Pa·s); d is the particle diameter (cm), and the distance between the initial position and the end of the initial sieving packing area 3 close to the partition plate 8 is L.

[0013] Further, θ = arccos(L / t / v1).

[0014] Further, the inclination angles of the side of the separation area 4 close to the initial sieving packing area 3 and the side of the separation area 4 far from the initial sieving packing area 3 are both θ. The side of the separation area 4 close to the initial sieving packing area 3 serves to guide the movement of the tail gas, and the side of the separation area 4 far from the initial sieving packing area 3 serves to receive the solid dust and guide it to fall into the deposition area.

[0015] Further, the first sensor 101, the second sensor 111 are electrically connected to the first compressed air pump 5, and the pressure of the first compressed air pump 5 is P = 1 / 8V1² + 4, where the unit of P is bar.

[0016] In some embodiments, the initial sieving packing area 3 is in an inverted pyramid shape, the packing in the initial sieving packing area 3 is antistatic molecular sieve, and the filling rate is 70% - 75%. The initial sieving packing area 3 is used to absorb substances with a particle size less than 2 mm output from the tail gas of the processing equipment 6.

[0017] In some embodiments, the distance between adjacent first compressed air pumps 5 is 20 cm - 30 cm.

[0018] In some embodiments, the length of the partition plate 8 is 2 - 2.3 m, and more preferably 2.15 m.

[0019] In some embodiments, the combustion treatment device 2 includes a combustion barrel group 21, a dust collection unit 22, a first fan group 23, an exhaust gas tower group 24, and a second fan group 25. The air outlet 7 is connected to the input end of the combustion barrel group 21, the output end of the combustion barrel group 21 is connected to the input end of the dust collection unit 22, the output end of the dust collection unit 22 is connected to the input end of the exhaust gas tower group 24 through the first fan group 23, and the output end of the dust collection unit 22 is connected to the external discharge port through the second fan group 25.

[0020] Advantages of the present invention: The present invention provides a silane wet dust treatment system. A silane wet dust separation device 1 is provided between the tail gas output end of the processing equipment 6 and the combustion treatment device 2. The silane wet dust separation device 1 is used for gas-solid separation of the output tail gas. The silane wet dust separation device 1 includes a primary sieve packing area 3, a separation area 4, and a first compressed air pump 5. The tail gas output end of the processing equipment 6 is connected to the bottom of the primary sieve packing area 3. A plurality of first compressed air pumps 5 are obliquely arranged at equal intervals on the side of the primary sieve packing area 3, and adjacent first compressed air pumps 5 are arranged in parallel. A separation area 4 is provided above the primary sieve packing area 3, and an air outlet 7 is provided above the separation area 4. The air outlet 7 is connected to the output end of the combustion treatment device 2. A partition plate 8 is provided in the middle of the separation area 4 near the primary sieve packing area 3. The side of the partition plate 8 away from the primary sieve packing area 3 is a deposition area 12, and a dry dust discharge port 121 is provided on the side of the deposition area 12. It can effectively separate the silane wet dust with a moisture content of 70% into gas and solid, greatly reducing the blockage rate of the combustion treatment device 2 and improving the treatment efficiency. Brief Description of the Drawings

[0021] Figure 1 FIG. is a schematic structural diagram of a silane wet dust treatment system of the present application.

[0022] Figure 2 FIG. is a schematic structural diagram of the silane wet dust separation device of a silane wet dust treatment system of the present application.

[0023] Figure 3 FIG. is a schematic diagram of the range when separating the tail gas of the silane wet dust separation device of a silane wet dust treatment system of the present application.

[0024] Main Component Symbol Description

[0025] Silane wet dust separation device 1, combustion treatment device 2, combustion barrel group 21, dust collection unit 22, first fan group 23, waste gas tower group 24, second fan group 25, primary sieve packing area 3, separation area 4, first compressed air pump 5, processing equipment 6, air outlet 7, partition plate 8, second compressed air pump 9, initial velocity detection component 10, first sensor 101, end velocity detection component 11, second sensor 111, deposition area 12, dry dust discharge port 121.

[0026] The following specific embodiments will further illustrate the present invention in conjunction with the above drawings. Specific Embodiments

[0027] The following embodiments are described to assist in understanding the present application. The embodiments are not and should not be construed in any way as limiting the protection scope of the present application.

[0028] In the following description, those skilled in the art will recognize that throughout this discussion, components may be described as separate functional units (which may include sub-units), but those skilled in the art will recognize that various components or portions thereof may be divided into separate components or integrated together (including being integrated within a single system or component).

[0029] At the same time, the connections between components or systems are not intended to be limited to direct connections. Instead, the data between these components can be modified, reformatted, or otherwise changed by intermediate components. Additionally, additional or fewer connections may be used. It should also be noted that the terms "coupled", "connected", or "input" should be understood to include direct connections, indirect connections through one or more intermediate devices, and wireless connections. Embodiment

[0030] As Figure 1 shown, it is a schematic structural diagram of a silane wet dust treatment system of the present application; as Figure 2 shown, it is a schematic structural diagram of a silane wet dust separation device of a silane wet dust treatment system of the present application; as Figure 3 shown, it is a schematic diagram of the range when separating the tail gas of a silane wet dust separation device of a silane wet dust treatment system of the present application.

[0031] A silane wet dust treatment system includes a silane wet dust separation device 1 and a combustion treatment device 2, and is characterized in that: a silane wet dust separation device 1 is provided between the tail gas output end of the processing equipment 6 and the combustion treatment device 2. The silane wet dust separation device 1 is used for gas-solid separation of the output tail gas. The silane wet dust separation device 1 includes a primary screening packing area 3, a separation area 4, and a first compressed air pump 5. The tail gas output end of the processing equipment 6 is connected to the bottom of the primary screening packing area 3. A plurality of first compressed air pumps 5 are obliquely arranged at equal intervals on the side of the primary screening packing area 3. Adjacent first compressed air pumps 5 are arranged in parallel. A separation area 4 is provided above the primary screening packing area 3. An air outlet 7 is provided above the separation area 4. The air outlet 7 is connected to the output end of the combustion treatment device 2. A partition plate 8 is provided in the middle of the separation area 4 near the primary screening packing area 3. The side of the partition plate 8 away from the primary screening packing area 3 is a deposition area 12. A dry dust discharge port 121 is provided on the side of the deposition area 12.

[0032] A second compressed air pump 9 is further provided at the bottom of the partition plate 8. The output end of the second compressed air pump 9 corresponds to the deposition area 12. The second compressed air pump 9 outputs high-temperature compressed air at 80°C - 90°C for drying the silane wet dust received in the deposition area 12 into dry dust.

[0033] The partition plate 8 is vertically connected to the primary screening packing area 3, facilitating gas-solid separation of the tail gas.

[0034] An initial speed detection component 10 is also provided at the output end of the primary screening filling area 3. The initial speed detection component 10 is composed of a plurality of first sensors 101. Each first sensor 101 corresponds to a first compressed air pump 5. The first sensor 101 is used to detect the initial parameters of the exhaust gas after it is output through the primary screening filling area 3. The initial parameters include initial speed, initial time, and initial position.

[0035] A terminal speed detection component 11 is provided between the air outlet 7 and the top of the partition plate 8. The terminal speed detection component 11 is composed of a plurality of second sensors 111. Each second sensor 111 corresponds to a first sensor 101. The first sensor 101 is used to detect the terminal parameters of the exhaust gas arriving at the air outlet 7 after being impacted by the air output by the first compressed air pump 5. The terminal parameters include terminal speed, terminal time, and terminal position.

[0036] The initial velocity detected by the first sensor 101 is v0, and the terminal velocity detected by the second sensor 111 is v1, wherein v1=√{(gd(ρs-ρ) / 18μ)²+(L / t²}, wherein u is the particle settling velocity (cm / s); ρs and ρ are the densities of particles and air respectively (g / cm); g is the gravitational acceleration (cm / s); μ is the adhesion coefficient of air (Pa·s); d is the particle diameter (cm), and the distance between the initial position and the end of the primary screening filler area 3 close to the partition plate 8 is L.

[0037] The θ=arccos(L / t / v1).

[0038] The inclination angles of the separation zone 4 close to the primary sieve filling area 3 and the separation zone 4 far from the primary sieve filling area 3 are both θ. The separation zone 4 close to the primary sieve filling area 3 plays a role in guiding the movement of exhaust gas, and the separation zone 4 far from the primary sieve filling area 3 plays a role in receiving solid dust and guiding it to fall into the sedimentation area.

[0039] The first sensor 101 and the second sensor 111 are electrically connected to the first compressed air pump 5, and the pressure of the first compressed air pump 5 is P=1 / 8V1²+4, where P is in bar.

[0040] The primary sieve filler area 3 is an inverted pyramid shape. The filler in the primary sieve filler area 3 is an antistatic molecular sieve with a filling rate of 70%-75%. The primary sieve filler area 3 is used to absorb substances with a particle size less than 2 mm output by the tail gas of the processing equipment 6.

[0041] The distance between adjacent first compressed air pumps 5 is 20 cm-30 cm.

[0042] The length of the partition plate 8 is 2-2.3 m, preferably 2.15 m.

[0043] The combustion treatment device 2 includes a combustion barrel group 21, a dust collection unit 22, a first fan group 23, an exhaust gas tower group 24, and a second fan group 25. The air outlet 7 is connected to the input end of the combustion barrel group 21. The output end of the combustion barrel group 21 is connected to the input end of the dust collection unit 22. The output end of the dust collection unit 22 is connected to the input end of the exhaust gas tower group 24 through the first fan group 23. The output end of the dust collection unit 22 is connected to an external discharge port through the second fan group 25.

[0044] The working principle of the present invention:

[0045] First, the silane wet dust tail gas with a water content of 70% (the particle size is mostly above 2 mm - 3 mm, and the silane wet dust tail gas includes PH3 and CH4) enters the primary screening packing area 3. The particles below 2 mm are absorbed by the packing in the primary screening packing area 3 and then output to the separation area 4. At this time, the initial velocity v0 is generally 5 m / s. The first compressed air pump 5 outputs compressed air to drive the tail gas after primary screening to move. When it moves to the top of the partition plate, gas-solid separation is carried out, and the end parameters are detected by the end velocity detection component 11. When the end parameter detection does not meet the set value, the pressure of the first compressed air pump 5 is adjusted immediately according to P = 1 / 8V1² + 4. When the end parameter detection meets the set value, the dust particles continue to move to the deposition area 12. The second compressed air pump 9 at the deposition area 12 outputs high-temperature compressed air at 80°C - 90°C to dry the received silane wet dust into dry dust. At the same time, the gas particles are output through the air outlet 7, and the temperature of the gas particles at this time is 20°C.

[0046] The beneficial effects of the present invention: The present invention provides a silane wet dust treatment system. A silane wet dust separation device 1 is provided between the tail gas output end of the processing equipment 6 and the combustion treatment device 2. The silane wet dust separation device 1 is used for gas-solid separation of the output tail gas. The silane wet dust separation device 1 includes a primary screening packing area 3, a separation area 4, and a first compressed air pump 5. The tail gas output end of the processing equipment 6 is connected to the bottom of the primary screening packing area 3. A plurality of first compressed air pumps 5 are obliquely arranged at equal intervals on the side of the primary screening packing area 3. The adjacent first compressed air pumps 5 are arranged in parallel. A separation area 4 is provided above the primary screening packing area 3. An air outlet 7 is provided above the separation area 4. The air outlet 7 is connected to the output end of the combustion treatment device 2. A partition plate 8 is provided in the middle of the separation area 4 near the primary screening packing area 3. The side of the partition plate 8 away from the primary screening packing area 3 is the deposition area 12. A dry dust discharge port 121 is provided on the side of the deposition area 12, which effectively separates the silane wet dust with a water content of 70% into gas and solid, greatly reducing the blockage rate of the combustion treatment device 2 and improving the treatment efficiency.

[0047] Although the present application has disclosed multiple aspects and embodiments, other aspects and embodiments will be obvious to those skilled in the art. Without departing from the concept of the present application, several modifications and improvements can still be made, and these all fall within the protection scope of the present application. The multiple aspects and embodiments disclosed in the present application are only for illustrative purposes and are not intended to limit the present application. The actual protection scope of the present application is subject to the claims.

Claims

1. A silane wet dust treatment system, comprising a silane wet dust separation device (1), a combustion treatment device (2), and a processing device (6), characterized in that: A silane wet dust separation device (1) is provided between the tail gas output end of the processing equipment (6) and the combustion treatment device (2). The silane wet dust separation device (1) is used for gas-solid separation of the output tail gas. The silane wet dust separation device (1) includes a primary sieve packing area (3), a separation area (4), and a first compressed air pump (5). The tail gas output end of the processing equipment (6) is connected to the bottom of the primary sieve packing area (3). A plurality of first compressed air pumps (5) are obliquely arranged at equal intervals on the side of the primary sieve packing area (3). Adjacent first compressed air pumps (5) are arranged in parallel. A separation area (4) is provided above the primary sieve packing area (3). An air outlet (7) is provided above the separation area (4). The air outlet (7) is connected to the output end of the combustion treatment device (2). A partition plate (8) is provided in the middle of the separation area (4) near the primary sieve packing area (3). The side of the partition plate (8) away from the primary sieve packing area (3) is a deposition area (12). A dry dust discharge port (121) is provided on the side of the deposition area (12). A second compressed air pump (9) is further provided at the bottom of the partition plate (8). The output end of the second compressed air pump (9) corresponds to the deposition area (12). The second compressed air pump (9) outputs high-temperature compressed air at 80°C - 90°C for drying the silane wet dust received in the deposition area (12) into dry dust. An initial velocity detection component (10) is further provided at the output end of the primary sieve packing area (3). The initial velocity detection component (10) is composed of a plurality of first sensors (101). Each first sensor (101) corresponds to and matches a first compressed air pump (5). The first sensor (101) is used to detect the initial parameters of the tail gas after passing through the primary sieve packing area (3). The initial parameters include initial velocity, initial time, and initial position. A final velocity detection component (11) is provided between the air outlet (7) and the top of the partition plate (8). The final velocity detection component (11) is composed of a plurality of second sensors (111). Each second sensor (111) corresponds to and matches a first sensor (101). The first sensor (101) is used to detect the final parameters of the tail gas when it reaches the air outlet (7) after being impacted by the air output by the first compressed air pump (5). The final parameters include final velocity, final time, and final position. The initial velocity detected by the first sensor (101) is v0, and the final velocity detected by the second sensor (111) is v1. The v1 = √{((gd(ρs - ρ) / 18μ)² + (L / t²)}, where ρs and ρ are the densities of the particles and air respectively; g is the acceleration due to gravity; μ is the adhesion coefficient of air; d is the particle diameter. The distance between the initial position and the end of the primary sieve packing area (3) near the partition plate (8) is L. The inclination angles of the side of the separation area near the primary sieve packing area and the side of the separation area away from the primary sieve packing area are both θ, and θ = arccos(L / t / v1).

2. The silane wet dust treatment system according to claim 1, characterized in that: The partition plate (8) is perpendicularly connected to the primary sieve packing area (3), facilitating gas-solid separation of the tail gas.

3. The silane wet dust treatment system according to claim 1, characterized in that: The first sensor (101) and the second sensor (111) are electrically connected to the first compressed air pump (5), and the pressure of the first compressed air pump (5) is P = 1 / 8V1² + 4, where the unit of P is bar.

4. The silane wet dust treatment system according to claim 1, wherein: The initial screening packing area (3) is in an inverted pyramid shape. The packing in the initial screening packing area (3) is antistatic molecular sieve, and the filling rate is 70% - 75%. The initial screening packing area (3) is used to absorb substances with a particle size less than 2 mm output from the tail gas of the processing equipment (6).

5. The silane wet dust treatment system according to claim 1, wherein: The distance between adjacent first compressed air pumps (5) is 20 cm - 30 cm, and the length of the partition plate (8) is 2 - 2.3 m.

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