A force, temperature and displacement sensor and a method of manufacturing the same

Abstract

The application provides a force, temperature and displacement sensor and a manufacturing method thereof, relates to the technical field of sensors, and comprises a shell which is a drum-shaped cylinder with elasticity; an inner cylinder and an outer cylinder, one end of the inner cylinder is sealingly connected with one end of the shell, one end of the outer cylinder is sealingly connected with the other end of the shell, the other end of the inner cylinder is movably arranged in the inner part of the other end of the outer cylinder and forms a gap, the outer side of the other end of the inner cylinder and the inner side of the other end of the outer cylinder are provided with capacitor plates, and the inner side of the other end of the inner cylinder and the outer side of the other end of the outer cylinder are provided with temperature measuring devices; two elastic bodies are sealingly connected with the inner part of one end of the inner cylinder and the inner part of one end of the outer cylinder respectively, the side close to the inner part of the shell of a bottom plate is provided with a strain resistance, and the side close to the outer part of the shell of the bottom plate is provided with an external connecting part; the problems that the sensor structure for measuring force, temperature and displacement is complex, the volume and weight are large, the integration degree is low, and the sensor is not suitable for small-sized electric servo working conditions in the prior art are solved.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of sensor, more particularly, relates to a force, temperature and displacement sensor and a manufacturing method thereof. BACKGROUND

[0002] Force, temperature and displacement are three physical quantities that must be obtained in order to realize closed-loop control and ensure safety in certain electric servo control fields. Traditional sensors of this kind usually need to connect force and spring in series, install a displacement sensor for measuring the displacement of the spring, and additionally set a temperature sensor to complete the measurement of multiple physical quantities. Such a force, temperature and displacement sensor has a complex structure, and is relatively large in size and weight, which is not suitable for application in small-sized electric servo. Therefore, there is a need in the industry for a highly integrated and small-sized multi-physical-quantity measurement sensor. SUMMARY

[0003] The present application aims at solving the problems in the prior art, such as complex structure, large size and weight, low integration, and unsuitability for small-sized electric servo, of the sensor for measuring force, temperature and displacement.

[0004] In order to achieve the above-mentioned purpose, the present application provides a force, temperature and displacement sensor, comprising:

[0005] a housing, which is a drum-shaped cylinder with elasticity;

[0006] an inner cylinder and an outer cylinder, one end of the inner cylinder is sealingly connected to one end of the housing, one end of the outer cylinder is sealingly connected to the other end of the housing, the other end of the inner cylinder is movably arranged inside the other end of the outer cylinder and forms a gap, a capacitor plate is arranged on the outer side of the other end of the inner cylinder and the inner side of the other end of the outer cylinder, and a temperature measuring device is arranged on the inner side of the other end of the inner cylinder and the outer side of the other end of the outer cylinder;

[0007] two elastic bodies, the two elastic bodies are respectively sealingly connected to the inside of one end of the inner cylinder and the inside of one end of the outer cylinder, the elastic body is a cylinder with a bottom plate, a strain resistance is arranged on the side of the bottom plate close to the inside of the housing, and an external connection part is arranged on the side of the bottom plate close to the outside of the housing;

[0008] a processor, which is electrically connected to the capacitor plate, the temperature measuring device and the strain resistance.

[0009] Optionally, the processor comprises a temperature measuring module, a Wheatstone bridge circuit and a capacitor bridge circuit, the temperature measuring module is electrically connected to the temperature measuring device, the Wheatstone bridge circuit is electrically connected to the strain resistance, and the capacitor bridge circuit is electrically connected to the capacitor plate.

[0010] Optionally, a closed space is formed in the shell, and the closed space is in a vacuum state or filled with inert gas or placed with a moisture absorption component.

[0011] Optionally, an annular groove is arranged on the inner circumferential surface of the shell.

[0012] Optionally, the capacitor plate, the temperature measuring device and the strain resistance are connected with wires, the shell and the outer cylinder are coaxially provided with through holes capable of accommodating the wires to pass through so that the wires can be led out, and a sealing part is arranged in the through hole.

[0013] Optionally, the through holes are uniformly distributed along the circumference of the shell.

[0014] Optionally, the inner cylinder comprises a first cylindrical part and a second cylindrical part, the first cylindrical part and the second cylindrical part are integrally connected through a first step part, the diameter of the first cylindrical part is greater than that of the second cylindrical part, the first cylindrical part and the second cylindrical part form one end of the inner cylinder and the other end of the inner cylinder respectively, the outer cylinder comprises a third cylindrical part and a fourth cylindrical part, the third cylindrical part and the fourth cylindrical part are integrally connected through a second step part, the diameter of the third cylindrical part is greater than that of the fourth cylindrical part, the third cylindrical part and the fourth cylindrical part form one end of the outer cylinder and the other end of the outer cylinder respectively, and the second cylindrical part is partially arranged in the interior of the fourth cylindrical part and forms the gap.

[0015] Optionally, the outer connecting part comprises a circular truncated cone structure arranged at the center of one side of the bottom plate close to the outside of the shell, a mounting hole is arranged at the center of the circular truncated cone structure, a part of the strain resistances are arranged close to the inner wall of the cylinder, and the other part of the strain resistances are arranged close to the hole wall of the mounting hole.

[0016] The application further provides a manufacturing method of a force, temperature and displacement sensor, which is used for manufacturing the force, temperature and displacement sensor.

[0017] The strain resistances are arranged on the elastic body.

[0018] The capacitor plates are arranged outside the other end of the inner cylinder and inside the other end of the outer cylinder, and the temperature measuring devices are arranged inside the other end of the inner cylinder and outside the other end of the outer cylinder.

[0019] One end of the inner cylinder is sealingly connected with one end of the shell, and one end of the outer cylinder is sealingly connected with the other end of the shell, so that the other end of the inner cylinder is movably arranged in the interior of the other end of the outer cylinder, and the capacitor plates outside the inner cylinder and inside the outer cylinder correspond to each other.

[0020] The capacitor plate, the temperature measuring device and the strain resistance are electrically connected with the processor, so that the processor processes signals of the capacitor plate, the temperature measuring device and the strain resistance, and outputs displacement, temperature and force signals.

[0021] Optionally, the processor comprises a temperature measuring module, a Wheatstone bridge circuit and a capacitor bridge circuit, the temperature measuring module is electrically connected with the temperature measuring device, the Wheatstone bridge circuit is electrically connected with the strain resistance, and the capacitor bridge circuit is electrically connected with the capacitor plate.

[0022] The temperature measuring module processes signals of the temperature measuring device and outputs temperature signals.

[0023] The Wheatstone bridge circuit processes signals of the strain resistance and outputs force signals.

[0024] The capacitor bridge circuit processes signals of the capacitor plate and outputs displacement signals.

[0025] The force, temperature and displacement sensor and the manufacturing method thereof have the beneficial effects that the force, temperature and displacement sensor can obtain load force value, temperature value and displacement amount simultaneously, when external force acts on the elastic body in the form of tension or pressure, the surface of the elastic body provided with the strain resistance generates tensile strain or compressive strain, the processor can form a Wheatstone bridge by using the strain resistances for sensing tensile strain and compressive strain, so that the measurement of force value is realized, meanwhile, the curvature of the drum-shaped surface of the shell changes under the action of tension or pressure, the change amount of the curvature of the drum-shaped surface under the same action force can be adjusted by reducing the wall thickness of the shell, adjusting the curvature of the shell and the like, the change of the curvature can realize the change of the length of the axial insertion area of the inner cylinder and the outer cylinder, and the change is converted into the change of the capacitance value of the capacitor composed of the corresponding capacitor plates of the inner cylinder and the outer cylinder, the processor can realize the output of electric signals by using the capacitor bridge circuit, so as to represent the displacement amount of the inner cylinder and the outer cylinder along the axis, and the change is close to linear change, meanwhile, the temperature measuring device is electrically connected with the processor, so that the measurement of temperature value is realized.

[0026] Other features and advantages of the present application will be described in detail in the following specific embodiments. BRIEF DESCRIPTION OF DRAWINGS

[0027] The above and other objects, features and advantages of the present application will become more apparent from the following detailed description when taken in conjunction with the accompanying drawings in which like reference characters refer to like parts throughout the several views.

[0028] Figure 1 A cross-sectional structure diagram of a force, temperature and displacement sensor according to an embodiment of the present application is shown.

[0029] Figure 2 A three-dimensional cross-sectional structure diagram of a force, temperature and displacement sensor according to an embodiment of the present application is shown.

[0030] Figure 3 A structure diagram of a force, temperature and displacement sensor under tension according to an embodiment of the present application is shown.

[0031] Figure 4 A structure diagram of a force, temperature and displacement sensor under compression according to an embodiment of the present application is shown.

[0032] Figure 5 A flow chart of a manufacturing method of a force, temperature and displacement sensor according to an embodiment of the present application is shown.

[0033] BRIEF DESCRIPTION OF DRAWINGS

[0034] 1, housing; 2, inner cylinder; 3, outer cylinder; 4, elastic body; 5, temperature measuring device; 6, capacitor plate; 101, housing through hole; 102, annular groove; 103, lead wire; 301, outer cylinder through hole; 401, strain resistance. DETAILED DESCRIPTION

[0035] Preferred embodiments of the present application will be described in more detail below. Although the following describes preferred embodiments of the present application, it should be understood that the present application can be implemented in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided so that the present application is more thoroughly and completely conveyed to those skilled in the art, and so that the scope of the present application is fully conveyed to those skilled in the art.

[0036] As shown in the drawings, the present application provides a force, temperature and displacement sensor, comprising: Figures 1 to 4

[0037] a housing 1, the housing 1 being a drum-shaped cylinder with elasticity;

[0038] an inner cylinder 2 and an outer cylinder 3, one end of the inner cylinder 2 being sealingly connected to one end of the housing 1, one end of the outer cylinder 3 being sealingly connected to the other end of the housing 1, the other end of the inner cylinder 2 being movably arranged inside the other end of the outer cylinder 3 and forming a gap, the other end of the inner cylinder 2 and the other end of the outer cylinder 3 being provided with a capacitor plate 6, the other end of the inner cylinder 2 and the other end of the outer cylinder 3 being provided with a temperature measuring device 5;

[0039] ​Two elastic bodies 4 are respectively sealedly connected to the inside of one end of the inner cylinder 2 and the inside of one end of the outer cylinder 3, and the elastic body 4 is a cylinder with a bottom plate, the bottom plate is provided with a strain resistance 401 on the side close to the inside of the shell 1, and the bottom plate is provided with an external connection part on the side close to the outside of the shell 1.

[0040] A processor is electrically connected with the capacitor plate 6, the temperature measuring device 5 and the strain resistance 401.

[0041] Specifically, to solve the problems of complex structure, large volume and weight, and low integration of the sensor for measuring force, temperature and displacement in the prior art, which is not suitable for small-sized electric servo working conditions, the force, temperature and displacement sensor provided by the application can simultaneously obtain the load force value, the temperature value and the displacement amount, when external force acts on the elastic body 4 in the form of tension or pressure, the surface of the elastic body 4 provided with the strain resistance 401 will generate tensile strain or compressive strain, the processor can form a Wheatstone bridge by using the strain resistances 401 for sensing tensile strain and compressive strain, so as to realize the measurement of the force value, at the same time, the curvature of the drum-shaped surface of the shell 1 will change under the action of tension or pressure, the change amount of the curvature of the drum-shaped surface under the same action force can be adjusted by reducing the wall thickness of the shell 1, adjusting the curvature of the shell 1 and the like, the change of the curvature can realize the change of the length of the axial insertion area of the inner cylinder 2 and the outer cylinder 3, and the change will be converted into the change of the capacitance value of the capacitor formed by the corresponding capacitor plates 6 of the inner cylinder 2 and the outer cylinder 3, the processor can realize the output of electric signal through a capacitor bridge circuit, so as to represent the displacement amount of the inner cylinder 2 and the outer cylinder 3 along the axis, the change is close to linear change, at the same time, the temperature measuring device 5 is electrically connected with the processor, so as to realize the measurement of the temperature value; the force, temperature and displacement sensor has simple structure, small volume and weight, and high integration, which can not only be suitable for small-sized electric servo working conditions, but also has simple manufacturing process, low cost, high reliability and excellent performance, and can adapt to various harsh working conditions, so as to obviously improve the reliability and environmental adaptability of the equipment.

[0042] In the embodiment, the insulating layers are arranged between the capacitor plates 6 and the inner cylinder 2 and between the capacitor plates 6 and the outer cylinder 3.

[0043] Optionally, the processor comprises a temperature measuring module, a Wheatstone bridge circuit and a capacitor bridge circuit, the temperature measuring module is electrically connected with the temperature measuring device 5, the Wheatstone bridge circuit is electrically connected with the strain resistance 401, and the capacitor bridge circuit is electrically connected with the capacitor plate 6.

[0044] Specifically, the temperature measuring module processes the signal of the temperature measuring device 5 and outputs a temperature signal, the Wheatstone bridge circuit processes the signal of the strain resistance 401 and outputs a force signal, and the capacitor bridge circuit processes the signal of the capacitor plate 6 and outputs a displacement signal.

[0045] Optionally, a closed space is formed in the shell 1, and the closed space is in a vacuum state or filled with inert gas or placed with a moisture absorbing component.

[0046] Specifically, in order to reduce the influence of non-displacement amount change on the capacitance change amount, a humidity stable sealed environment is formed in the shell 1, such as forming a vacuum state or an inert gas filling state or placing a moisture absorber to absorb moisture, thereby improving the measurement accuracy of the displacement amount.

[0047] Further, the temperature value measured by the temperature measuring device 5 can be used for compensation or correction of the temperature error of the displacement amount and the force value caused by the temperature influence.

[0048] Optionally, an annular groove 102 is arranged on the inner circumferential surface of the shell 1.

[0049] Specifically, by arranging the annular groove 102, the curvature change amount of the drum-shaped surface under the same force can be adjusted; the force, temperature and displacement sensors are arranged with the capacitor plates 6 on the inner cylinder 2 and the outer cylinder 3, and when the inner cylinder 2 and the outer cylinder 3 produce relative displacement, the change of such displacement is converted into the capacitance value change of the capacitor, and in the case of a processor, the electrical signal output can be realized through the capacitor bridge circuit, which represents the displacement amount of the inner cylinder 2 and the outer cylinder 3 along the axial direction.

[0050] Optionally, the outer side of the inner cylinder 2 and the inner side of the outer cylinder 3 are respectively provided with 1-3 capacitor plates 6.

[0051] In the embodiment, four strain resistors 401 are arranged on the bottom plate of each elastic body 4.

[0052] Optionally, the capacitor plates 6, the temperature measuring device 5 and the strain resistors 401 are connected with wires 103, the shell 1 and the outer cylinder 3 are coaxially provided with through holes, the through holes can accommodate the wires 103 to pass through, so that the wires 103 can be led out, and the through holes are provided with sealing parts.

[0053] Specifically, the capacitor plates 6, the temperature measuring device 5 and the strain resistors 401 can be electrically connected with the processor through the wires 103, and the processor can be arranged outside the shell 1; the through holes can be provided for the wires 103 to pass through, so as to realize the leading out of the wires 103, and the sealing parts can seal the through holes leading out the wires 103, so as to ensure that a closed space is formed in the shell 1, and the sealing parts can adopt sealing glue.

[0054] Optionally, the through holes are uniformly distributed along the circumference of the shell 1.

[0055] Specifically, the through holes need to be uniformly arranged along the circumference of the shell 1, so as to ensure the symmetry of the force deformation of the shell 1 and ensure the measurement accuracy.

[0056] In the embodiment, the shell 1 is provided with two through holes which are symmetrically arranged; the through hole on the shell 1 is a shell through hole 101, and the through hole on the outer cylinder 3 is an outer cylinder 3 through hole 301.

[0057] Optionally, the inner cylinder 2 comprises a first cylindrical portion and a second cylindrical portion which are integrally connected by a first step portion, the diameter of the first cylindrical portion is greater than that of the second cylindrical portion, the first cylindrical portion and the second cylindrical portion form one end of the inner cylinder 2 and the other end of the inner cylinder 2 respectively, the outer cylinder 3 comprises a third cylindrical portion and a fourth cylindrical portion which are integrally connected by a second step portion, the diameter of the third cylindrical portion is greater than that of the fourth cylindrical portion, the third cylindrical portion and the fourth cylindrical portion form one end of the outer cylinder 3 and the other end of the outer cylinder 3 respectively, and the second cylindrical portion is partially arranged inside the fourth cylindrical portion and forms the gap.

[0058] Specifically, the outer periphery of the first cylindrical portion is sealingly connected with the inner periphery of one end of the shell 1, the outer periphery of the third cylindrical portion is sealingly connected with the inner periphery of the other end of the shell 1, the outer periphery of the cylinder of the two elastic bodies 4 is sealingly connected with the inner periphery of the first cylindrical portion and the third cylindrical portion respectively, and the bottom plate of the two elastic bodies 4 can also be sealingly connected with the first step portion and the second step portion.

[0059] In the embodiment, the sealing connection adopts sealing bonding.

[0060] Optionally, the outer connecting portion comprises a circular truncated cone structure which is arranged at the center position of one side of the bottom plate close to the outside of the shell 1, a mounting hole is arranged at the center position of the circular truncated cone structure, a part of the strain resistance 401 is arranged at a position close to the inner wall of the cylinder, and another part of the strain resistance 401 is arranged at a position close to the hole wall of the mounting hole.

[0061] Specifically, the mounting hole at the center position of the circular truncated cone structure is used for connecting the force, temperature and displacement sensor with an external load device, as shown in Figure 3 and Figure 4 When the force, temperature and displacement sensor is in tension, a first column with a hole connected in the mounting hole can be used to facilitate the connection with the external load device, and when the force, temperature and displacement sensor is in compression, a second column with a round head can be used to embed the round head end into the mounting hole to realize the guiding connection.

[0062] In the embodiment, four strain resistances 401 are arranged at positions close to the projection circle of the inner cylindrical surface of the cylinder in the bottom plate plane and positions close to the outline circle of the mounting hole.

[0063] AsFigure 5 The application also provides a manufacturing method of the force, temperature and displacement sensor, for manufacturing the force, temperature and displacement sensor, comprising:

[0064] The strain resistance 401 is arranged on the elastic body 4;

[0065] The capacitor plate 6 is arranged on the other end outside of the inner cylinder 2 and the other end inside of the outer cylinder 3, and the temperature measuring device 5 is arranged on the other end inside of the inner cylinder 2 and the other end outside of the outer cylinder 3;

[0066] The one end of the inner cylinder 2 is sealingly connected with the one end of the shell 1, and the one end of the outer cylinder 3 is sealingly connected with the other end of the shell 1, so that the other end of the inner cylinder 2 movably passes through the inside of the other end of the outer cylinder 3, and the capacitor plates 6 on the outer side of the inner cylinder 2 and the inner side of the outer cylinder 3 correspond to each other;

[0067] The capacitor plate 6, the temperature measuring device 5 and the strain resistance 401 are electrically connected with the processor, so that the signals of the capacitor plate 6, the temperature measuring device 5 and the strain resistance 401 are processed by the processor, and the displacement, temperature and force signals are outputted.

[0068] Specifically, the resistance strain gauge can be pasted on the bottom plate of the elastic body 4, so that the elastic body 4 becomes the force sensitive element, and the temperature measuring resistance can be pasted on the elastic body 4 to increase the temperature measuring function; the capacitor plate 6 can be made of copper foil, the copper foil is pasted on the insulating film to form the soft capacitor plate 6, and then is pasted on the inner cylinder 2 and the outer cylinder 3; the temperature measuring device 5 can be made of platinum resistance; coaxial through holes can be formed on the shell 1 and the outer cylinder 3 for passing the lead wire 103; the lead wire 103 connected on the inner cylinder 2 and the outer cylinder 3 is led out from the inside of the shell 1 to the outside of the shell 1, the lead wire 103 of the capacitor plate 6 of the inner cylinder 2 and the lead wire 103 of the temperature measuring device 5 should have a margin to ensure that they are not pulled when the shell 1 is deformed, the lead wire 103 of the strain resistance 401 is led out to the outside of the shell 1, and the lead wire 103 should have a margin to ensure that it is not pulled when the shell 1 is deformed; the through hole through which the lead wire 103 passes can be sealed to ensure that a closed space is formed in the shell 1, and a vacuum state or inert gas or a moisture absorbing component can be formed in the sealed space, and the inert gas can be nitrogen.

[0069] Optionally, the processor comprises a temperature measuring module, a Wheatstone bridge circuit and a capacitor bridge circuit, the temperature measuring module is electrically connected with the temperature measuring device 5, the Wheatstone bridge circuit is electrically connected with the strain resistance 401, and the capacitor bridge circuit is electrically connected with the capacitor plate 6;

[0070] The signal of the temperature measuring device 5 is processed by the temperature measuring module, and the temperature signal is outputted;

[0071] The signal of the strain resistance 401 is processed by a Wheatstone bridge circuit and a force signal is outputted;

[0072] The signal of the capacitor plate 6 is processed by a capacitor bridge circuit and a displacement signal is outputted.

[0073] Specifically, the capacitor plate 6 inside the shell 1 is changed into a bridge by a mature adapter circuit provided in a processor outside the shell 1, and an electrical signal is outputted after signal processing, representing the initial displacement amount of the outer cylinder 3 and the inner cylinder 2 along the axial direction, and the electrical signals outputted by the strain resistance 401 bridge and the temperature measuring device 5 represent the force value and the current temperature value of the initial state sensor.

[0074] In the embodiment, the measured force, temperature and displacement are calibrated respectively according to the calibration method of the general force sensor, temperature sensor and displacement sensor, and the standard working curve is obtained.

[0075] Specifically, the calibration methods required by the force, displacement and temperature are different, and each needs to be calibrated, but for mass production, the products can be grouped and calibrated respectively in a pipeline mode, which can greatly improve the production efficiency and reduce the time cost.

[0076] In summary, all the processing and manufacturing methods used by the force, temperature and displacement sensor are mature and easy, the outer cylinder 3, the inner cylinder 2, the shell 1 and the elastic body 4 can all be realized by traditional mechanical processing technology, and the raw materials used can be selected according to the specific functional requirements such as rust prevention, elastic modulus, maximum hardness and yield strength, and the corresponding metal materials with good mechanical properties can be used; the elastic body 4 made into a force sensing element can use sputtering film for machine production in a pipeline mode, or can be manufactured by traditional pasting resistance strain gauge technology; the capacitor plate 6 can also be manufactured by sputtering film technology or plate manufacturing technology, and can be fixed on the cylindrical surface of the outer cylinder 3 and the inner cylinder 2 by adhesive method.

[0077] The above has described the embodiments of the present application, and the above description is exemplary, not exhaustive, and is not limited to the disclosed embodiments. Many modifications and changes are obvious to those skilled in the art without departing from the scope and spirit of the described embodiments.

Claims

1. A force, temperature, and displacement sensor, characterized in that, include: The outer casing is a flexible drum-shaped cylinder; The inner cylinder and the outer cylinder are provided. One end of the inner cylinder is sealed to one end of the outer shell, and one end of the outer cylinder is sealed to the other end of the outer shell. The other end of the inner cylinder is movably inserted into the other end of the outer cylinder and forms a gap. Capacitor plates are provided on the outer side of the other end of the inner cylinder and the inner side of the other end of the outer cylinder. Temperature measuring devices are provided on the inner side of the other end of the inner cylinder and the outer side of the other end of the outer cylinder. Two elastomers are respectively sealed and connected to the inside of one end of the inner cylinder and the inside of one end of the outer cylinder. Each elastomer is a cylinder with a bottom plate. A strain resistor is provided on the side of the bottom plate near the inside of the outer shell, and an external connection is provided on the side of the bottom plate near the outside of the outer shell. The processor is electrically connected to the capacitor plate, the temperature measuring device, and the strain resistor; The processor includes a temperature measurement module, a Wheatstone bridge circuit, and a capacitor bridge circuit. The temperature measurement module is electrically connected to the temperature measuring device, the Wheatstone bridge circuit is electrically connected to the strain gauge, and the capacitor bridge circuit is electrically connected to the capacitor plates. The temperature measurement module processes the signal from the temperature measuring device and outputs a temperature signal; the Wheatstone bridge circuit processes the signal from the strain gauge and outputs a force signal; and the capacitor bridge circuit processes the signal from the capacitor plates and outputs a displacement signal.

2. The force, temperature, and displacement sensor according to claim 1, characterized in that, The outer shell forms a sealed space, which is either in a vacuum state, filled with inert gas, or contains a moisture-absorbing component.

3. The force, temperature, and displacement sensor according to claim 1, characterized in that, The inner circumferential surface of the outer shell is provided with an annular groove.

4. The force, temperature, and displacement sensor according to claim 1, characterized in that, The capacitor plates, the temperature measuring device, and the strain resistor are all connected to wires. The outer shell and the outer cylinder are coaxially provided with a through hole, which can accommodate the wires to pass through so that the wires can be led out. A sealing part is provided in the through hole.

5. The force, temperature, and displacement sensor according to claim 4, characterized in that, The through holes are evenly distributed along the circumference of the outer shell.

6. The force, temperature, and displacement sensor according to claim 1, characterized in that, The inner cylinder includes a first cylindrical portion and a second cylindrical portion, which are integrally connected by a first stepped portion. The diameter of the first cylindrical portion is larger than the diameter of the second cylindrical portion. The first cylindrical portion and the second cylindrical portion respectively form one end and the other end of the inner cylinder. The outer cylinder includes a third cylindrical portion and a fourth cylindrical portion, which are integrally connected by a second stepped portion. The diameter of the third cylindrical portion is larger than the diameter of the fourth cylindrical portion. The third cylindrical portion and the fourth cylindrical portion respectively form one end and the other end of the outer cylinder. The second cylindrical portion partially passes through the interior of the fourth cylindrical portion and forms the gap.

7. The force, temperature, and displacement sensor according to claim 1, characterized in that, The external part includes a frustum structure located at the center of the side of the base plate near the outside of the outer shell. The frustum structure has a mounting hole at its center. A portion of the strain resistors is located near the inner wall of the cylinder, and another portion of the strain resistors is located near the wall of the mounting hole.

8. A method for manufacturing a force, temperature, and displacement sensor, used to manufacture the force, temperature, and displacement sensor according to any one of claims 1-7, characterized in that, include: Strain resistors are placed on the elastomer; Capacitor plates are installed on the outer side of the other end of the inner cylinder and the inner side of the other end of the outer cylinder, and temperature measuring devices are installed on the inner side of the other end of the inner cylinder and the outer side of the other end of the outer cylinder. One end of the inner cylinder is sealed to one end of the outer shell, and one end of the outer cylinder is sealed to the other end of the outer shell, so that the other end of the inner cylinder is movably inserted into the other end of the outer cylinder, and the capacitor plates on the outer side of the inner cylinder and the inner side of the outer cylinder correspond one-to-one. The capacitor plates, temperature sensing device, and strain gauge are electrically connected to the processor so that the processor can process the signals from the capacitor plates, temperature sensing device, and strain gauge and output displacement, temperature, and force signals.

9. The method for manufacturing a force, temperature, and displacement sensor according to claim 8, characterized in that, The processor includes a temperature measurement module, a Wheatstone bridge circuit, and a capacitor bridge circuit. The temperature measurement module is electrically connected to the temperature measuring device, the Wheatstone bridge circuit is electrically connected to the strain gauge, and the capacitor bridge circuit is electrically connected to the capacitor plates. The temperature sensing module processes the signals from the temperature sensing device and outputs the temperature signal. The strain gauge signal is processed by a Wheatstone bridge circuit and a force signal is output. The capacitor plate signal is processed by a capacitor bridge circuit, and a displacement signal is output.

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