Probe card assembly process

Abstract

The embodiment of the invention discloses a probe card assembly process. The probe card assembly process comprises the following steps: S1, bending a plurality of equilong probe bodies into a Z shape according to set parameters; s2, all the probe bodies are arranged in limiting holes in a fixed seat in a penetrating mode; s3, the fixing base is installed on the jig; s4, adjusting all probe bodies; and S5, the pure copper support and the circuit board are connected with the fixing base, and assembling is completed. Through the probe card assembly process, the positions and postures of all the probe bodies can be ensured to be more accurate, the connection efficiency of all the probe bodies and the circuit board can be improved through the arrangement of the fixed seat, the interference of an ultralow temperature environment can be effectively reduced through the fitting support of the pure copper support to the circuit board, and the reliability of the probe card is improved. The deformation of the circuit board in an ultralow temperature environment is reduced, the flatness of the whole probe card is improved, and the test efficiency is improved; and the time consistency of signal receiving of all test points can be ensured, and the test accuracy of the probe card is ensured.

Description

Technical Field

[0001] The present application relates to the field of wafer testing technology, and in particular to a probe card assembly process. Background Art

[0002] The cantilever probe card is a precision interface adapter between the automatic test system and the wafer, used to test the functional parameters of semiconductor chips before packaging; in the product chip functional test, it can be used to test the performance of the chip to evaluate its reliability and stability in its environment. This test can help understand the working life and performance changes of the chip at ultra-low temperatures, thereby providing valuable information for chip design and optimization. The cantilever probe card currently used is difficult to accurately test the function, performance and reliability of the chip in an ultra-low temperature environment of 4K (minus 263℃). Summary of the invention

[0003] The present application aims to solve at least one of the technical problems existing in the prior art. To this end, the present application proposes a probe card assembly process to improve the test effect of the probe card in an ultra-low temperature environment.

[0004] The present application provides a probe card assembly process, comprising the following steps:

[0005] S1, bending multiple probe bodies of equal length into a Z shape according to set parameters;

[0006] S2. Insert all probe bodies into the limiting holes on the fixing seat;

[0007] S3. The fixing seat is installed on the fixture;

[0008] S4, adjust all probe bodies;

[0009] S5. Connect the pure copper bracket and the circuit board to the fixing seat, and connect the tail ends of all probe bodies to the corresponding test points on the upper surface of the circuit board in sequence to complete the assembly.

[0010] Based on the probe card assembly process, the position and posture of all probe bodies can be more accurately guaranteed. At the same time, the connection efficiency between all probe bodies and circuit boards can be improved by setting the fixing seat. The pure copper bracket supports the circuit board, which can effectively reduce the interference of the ultra-low temperature environment, reduce the deformation of the circuit board in the ultra-low temperature environment, improve the flatness of the entire probe card, and improve the test efficiency. It should be noted that the test points are set on the upper surface of the circuit board, which can also improve the stability of the test points in the ultra-low temperature environment; at the same time, all probe bodies have the same length, so that the distance from the needle tip to the tail end of all probe bodies is the same, that is, the length of the signal transmission path is the same, thereby ensuring the time consistency of all test points receiving signals, further providing a reliable basis for analyzing data and ensuring the test accuracy of the probe card.

[0011] Optionally, the step S3 and the step S4 include:

[0012] The fixing seat is mounted on the fixture support arm of the fixture, the needle tips of all probe bodies are adjusted to abut against the abutment part, and the needle tips of all probe bodies are rotated to the set position by rotating the needle tail section.

[0013] Furthermore, based on the above steps, the fixture arm of the fixture is used to fix the fixing seat to a position with a certain distance from the needle tip, and then the needle tip is adjusted by using the space formed by the length of the fixture arm, which is more convenient for adjustment and more efficient. It should be noted that when adjusting the position and posture of the probe body, in order to facilitate the adjustment of the probe body, it is necessary to first fix the fixing seat to a set height position, which is specifically determined by the length of the fixture arm, which can be 60mm, 50mm, 70mm, 80mm, 85mm, etc., to leave a larger space near the needle tip of the probe body to adjust the probe body.

[0014] Optionally, step S4 further includes: after all probe bodies are adjusted, sliding the fixing seat along the needle tail sections of all probe bodies to a set position, and then adding insulating adhesive into the first arc groove on the top surface of the fixing seat.

[0015] Furthermore, based on the above steps, after the adjustment of the probe body is completed, the fixing seat can be quickly moved to the final position, and through the setting of the first arc groove, the probe bodies in all the limiting holes in the same group can be fixed by the insulating adhesive located in the first arc groove.

[0016] Optionally, step S4 further includes: the jig arm is arranged parallel to the needle tail sections of all probe bodies, and after all probe bodies are adjusted, the fixed connection points between the jig arm and the fixing seat are disconnected, and the fixing seat is made to slide along the jig arm.

[0017] Furthermore, based on the above steps, after adjusting the positions and postures of all probe bodies, the fixing seat and / or the bracket can be smoothly slid to the set position on the probe body.

[0018] Optionally, step S4 further includes: the fixing seat slides toward the needle tip until at least a portion of the middle section is located in the clearance groove of the fixing seat.

[0019] Furthermore, based on the above-mentioned yield groove, the size of the entire probe card in the first direction can be further reduced, so that the entire middle section and part of the needle section overlap with the fixing seat in the first direction, which is more convenient for the arrangement of the probe card. At the same time, the fixing seat also has a better supporting effect on the probe body.

[0020] Optionally, the step S4 further comprises: after adding insulating adhesive into the first arc-shaped groove, placing the fixing seat and all the probe bodies into an oven for baking.

[0021] Furthermore, based on the above steps, the fixing effect between the probe body and the fixing seat can be improved, and the accuracy of the posture and position of all probe bodies can be further guaranteed.

[0022] Optionally, the step S5 further includes: placing the circuit board into the bracket slot of the bracket, and fixing the two together, and then aligning the fixing seat so that the fixing seat is connected to the bottom surface of the bracket.

[0023] Furthermore, based on the above steps, the connection between the fixing seat, the probe body, the bracket and the circuit board is finally completed to form a completed probe card.

[0024] Optionally, the step S5 further includes: after the fixing seat is connected to the bracket, bending the needle tail sections of all probe bodies at a height position relative to the upper surface of the circuit board, and connecting the tail ends to corresponding test points.

[0025] Furthermore, based on the above steps, the needle tail sections of all probe bodies are bent at the same height so that the extension distances of all needle tail sections on the upper surface of the circuit board are close, thereby improving the surface regularity of the probe card. At the same time, the test points on the upper surface of the circuit board can be arranged in a more reasonable manner.

[0026] Optionally, the step S5 further includes: arranging all the needle tail segments located above the upper surface of the circuit board in a fan shape, and connecting all the tail ends to the test points arranged along the arc shape in sequence.

[0027] Furthermore, based on the arrangement of the above-mentioned test points, all test points and limit holes are made to correspond one to one, and the needle tail sections of each group of probe bodies are evenly arranged in a fan shape on the upper surface of the circuit board, making the arrangement of all probe bodies more reasonable, further facilitating the connection of the tail end with the test point, and at the same time further reducing the probability of short circuit between the two probe bodies.

[0028] Optionally, the step S5 further includes: sleeve an insulating sleeve on a portion of the needle tail section of the probe body that is higher than the limiting hole.

[0029] Furthermore, based on the above-mentioned insulating sleeve, it is possible to avoid short circuit between two needle tail sections 231 with a small distance between them.

[0030] One or more of the above embodiments of the present application have at least one or more of the following beneficial effects:

[0031] It can ensure that the position and posture of all probe bodies are more accurate, and at the same time, it can improve the connection efficiency between all probe bodies and circuit boards through the setting of fixed seats. The pure copper bracket supports the circuit board, which can effectively reduce the interference of ultra-low temperature environment, reduce the deformation of the circuit board in the ultra-low temperature environment, improve the flatness of the entire probe card, and improve the test efficiency. It should be noted that the test points are set on the upper surface of the circuit board, which can also improve the stability of the test points in the ultra-low temperature environment; at the same time, all probe bodies have the same length, so that the distance from the needle tip to the tail end of all probe bodies is the same, that is, the length of the signal transmission path is the same, thereby ensuring the time consistency of receiving signals at all test points, further providing a reliable basis for analyzing data and ensuring the test accuracy of the probe card.

[0032] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] The disclosure of the present application will become more easily understood with reference to the accompanying drawings. It is easy for those skilled in the art to understand that these drawings are only for illustrative purposes and are not intended to limit the scope of protection of the present application. In addition, similar numbers in the drawings are used to represent similar components, among which:

[0034] Figure 1 This is a schematic diagram of the structure of the probe card described in the embodiment of the present application;

[0035] Figure 2 This is a schematic diagram of the structure of the top surface of the probe card described in an embodiment of the present application;

[0036] Figure 3 This is a schematic structural diagram of the bottom surface of the probe card described in an embodiment of the present application;

[0037] Figure 4 for Figure 3 A partial enlarged view of the middle A;

[0038] Figure 5 A top view of the probe card described in an embodiment of the present application;

[0039] Figure 6 for Figure 5 Sectional view at AA in the middle;

[0040] Figure 7 for Figure 6 A partial enlarged view of point B in the middle;

[0041] Figure 8 This is a schematic diagram of the structure of the bracket and the fixing seat described in the embodiment of the present application;

[0042] Fig. 9This is a schematic diagram of the structure of the fixing base described in the embodiment of the present application;

[0043] Fig.10 This is a schematic diagram of the structure of the fixing seat and the fixture according to the embodiment of the present application;

[0044] Fig.11 This is a schematic structural diagram of the fixing seat and the fixture according to an embodiment of the present application from another angle;

[0045] Fig.12 for Fig.10 A partial enlarged view of point C in the middle;

[0046] Fig.13 This is a flow chart of the probe card assembly process described in an embodiment of the present application.

[0047] Description of Reference Numerals

[0048] 1. Fixing seat; 11. Limiting hole; 12. First arc-shaped groove; 13. Second arc-shaped groove; 2. Probe body; 21. Needle tip; 211. Needle head section; 22. Middle section; 23. Tail end; 231. Needle tail section; 3. Bracket; 31. Bracket groove; 4. Circuit board; 41. Test point; 51. Fixture base; 52. Fixture support arm; 53. Film. DETAILED DESCRIPTION

[0049] Some embodiments of the present application are described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are only used to explain the technical principles of the present application and are not intended to limit the protection scope of the present application.

[0050] The cantilever probe card is a precision interface adapter between the automatic test system and the wafer, used to test the functional parameters of semiconductor chips before packaging; in the product chip functional test, it can be used to test the performance of the chip to evaluate its reliability and stability in its environment. This test can help understand the working life and performance changes of the chip at ultra-low temperatures, thereby providing valuable information for chip design and optimization. The cantilever probe card currently used is difficult to accurately test the function, performance and reliability of the chip in an ultra-low temperature environment of 4K (minus 263℃).

[0051] Based on this, the present application provides a probe card assembly process, which can ensure that the position and posture of all probe bodies are more accurate, and at the same time, it can improve the connection efficiency between all probe bodies and circuit boards through the setting of fixed seats. The fitting support of the circuit board by the pure copper bracket can effectively reduce the interference of the ultra-low temperature environment, reduce the deformation of the circuit board in the ultra-low temperature environment, improve the flatness of the entire probe card, and improve the testing efficiency. It should be noted that the test points are set on the upper surface of the circuit board, which can also improve the stability of the test points in the ultra-low temperature environment; at the same time, all probe bodies have the same length, so that the distance from the needle tip to the tail end of all probe bodies is the same, that is, the length of the signal transmission path is the same, thereby ensuring the time consistency of receiving signals at all test points, further providing a reliable basis for analyzing data, and ensuring the testing accuracy of the probe card.

[0052] The present application will be described in detail below through specific embodiments.

[0053] Reference Figures 1 to 13 As shown, this embodiment provides a probe card assembly process, including the following steps:

[0054] S1, bending a plurality of probe bodies 2 of equal length into a Z shape according to set parameters;

[0055] S2, inserting all probe bodies 2 into the limiting holes 11 on the fixing seat 1;

[0056] S3, the fixing seat 1 is installed on the fixture;

[0057] S4, adjust all probe bodies 2;

[0058] S5, connecting the pure copper bracket 3 and the circuit board 4 to the fixing base 1, and connecting the tail ends 23 of all probe bodies 2 to the corresponding test points 41 on the upper surface of the circuit board 4 in sequence to complete the assembly.

[0059] Based on the probe card assembly process, the position and posture of all probe bodies 2 can be more accurately guaranteed. At the same time, the connection efficiency of all probe bodies 2 and circuit boards 4 can be improved by setting the fixing seat 1. The pure copper bracket 3 supports the circuit board 4, which can effectively reduce the interference of the ultra-low temperature environment, reduce the deformation of the circuit board 4 in the ultra-low temperature environment, improve the flatness of the entire probe card, and improve the test efficiency. It should be noted that the test point 41 is set on the upper surface of the circuit board 4, which can also improve the stability of the test point 41 in the ultra-low temperature environment; at the same time, all probe bodies 2 have the same length, so that the distance from the needle tip 21 to the tail end 23 of all probe bodies 2 is the same, that is, the length of the signal transmission path is the same, thereby ensuring the time consistency of all test points 41 receiving signals, further providing a reliable basis for analyzing data, and ensuring the test accuracy of the probe card.

[0060] Continue to refer to Figure 1 and Fig. 9 As shown, the number of the limiting holes 11 is at least two groups, and at least two groups of limiting holes 11 are evenly arranged along the circumference of the fixing seat 1, and each group of limiting holes 11 is evenly arranged in an arc shape along the concave side toward the axis of the fixing seat 1; the test points 41 and the limiting holes 11 are arranged one by one, and the spacing between any test point 41 and the corresponding limiting hole 11 is equal to the spacing between another test point 41 and the corresponding limiting hole 11, wherein the diameter of the limiting hole 11 is larger than the diameter of the needle tail section 231, thereby facilitating the adjustment of the probe body 2.

[0061] Furthermore, based on the arrangement of the above-mentioned limiting holes 11, the arrangement of all probe bodies 2 is made more reasonable, which facilitates the connection between the tail end 23 and the test point 41, while reducing the probability of short circuit between the two probe bodies 2. At the same time, it can also ensure that the positions of all test points 41 are reasonable, thereby improving the test stability of the probe card.

[0062] It should be understood that the jig is a structure used to provide a fixed position for the fixing seat 1 and facilitate adjustment of the position and posture of all probe bodies 2 before the fixing seat 1 is installed on the bracket 3 and the circuit board 4 to form a complete probe card. The jig includes a jig base 51 and a jig arm 52; the jig base 51 and the fixing seat 1 are arranged opposite to each other in a first direction, and the abutment portion is formed on the top surface of the jig base 51; the jig arm 52 extends a set distance along the first direction, and one end of the jig arm 52 is connected to the jig base 51, and the other end is detachably connected to the fixing seat 1.

[0063] Optionally, step S3 and step S4 include: installing the fixing seat 1 on the fixture support arm 52 of the fixture, adjusting the needle tips 21 of all probe bodies 2 to abut against the abutment portion, and rotating the needle tips 21 of all probe bodies 2 to a set position by rotating the needle tail section 231, wherein the abutment portion is a planar structure located on the top surface of the fixture base 51 of the fixture.

[0064] Furthermore, based on the above steps, the fixture arm 52 of the fixture is used to fix the fixing seat 1 to a position with a certain distance from the needle tip 21, and then the fixture arm 52 uses the space formed by its own length to adjust the needle tip 21, which is more convenient and more efficient. It should be noted that when adjusting the position and posture of the probe body 2, in order to facilitate the adjustment of the probe body 2, it is necessary to first fix the fixing seat 1 to a set height position, which is specifically determined by the length of the fixture arm 52, which can be 60mm, or 50mm, 70mm, 80mm, 85mm, etc., to leave a larger space near the needle tip 21 of the probe body 2 to adjust the probe body 2.

[0065] Continue to refer to Fig.12As shown, a film 53 is provided at the abutment position on the fixture base 51, and the film 53 can provide a certain resistance to the needle tips 21 of all probe bodies 2, so that after the position and posture of the probe body 2 are adjusted, the probe body 2 is not easy to move spontaneously; further, holes can be opened on the film 53, which is more convenient for positioning and fixing the needle tips 21 of all probe bodies 2. It should be noted that the bottoms of all the holes can be set at a plane at the same height to ensure that all the needle tips 21 are located on the same plane.

[0066] Continue to refer to Fig.10 and Fig.11 As shown, there are at least two jig arms 52 arranged along the circumference of the jig base 51. The jig arms 52 can specifically be a rod-shaped structure or a C-shaped or L-shaped bracket structure, as long as it can connect the jig base 51 and the fixed base 1, and ensure the relative fixation between the fixed base 1 and the jig base 51.

[0067] Furthermore, based on the above-mentioned jig, the support stability of the jig arm 52 on the fixing seat 1 can be further improved, so that the adjustment of all probe bodies 2 can be more conveniently achieved, thereby improving efficiency and accuracy.

[0068] Optionally, the fixed seat 1 and the jig arm 52 are slidably matched along the first direction, and / or the bracket 3 and the jig arm 52 are slidably matched along the first direction; the jig arm 52 is provided with a first limiting structure that cooperates with the fixed seat 1 in the circumferential upper limit position, and / or the jig arm 52 is provided with a second limiting structure that cooperates with the bracket 3 in the circumferential upper limit position; specifically, the slider slot or the jig arm 52 itself can be used as a telescopic structure to achieve relative sliding of the fixed seat 1 and / or the bracket 3, and the first limiting structure and the second limiting structure are used to prevent the fixed seat 1 and the bracket 3 from relative rotation during sliding, thereby avoiding bending and twisting of the probe body 2.

[0069] Optionally, step S4 further includes: after all probe bodies 2 are adjusted, sliding the fixing seat 1 along the needle tail sections 231 of all probe bodies 2 to a set position, and then adding insulating adhesive into the first arc groove 12 on the top surface of the fixing seat 1 .

[0070] Furthermore, based on the above steps, after the adjustment of the probe body 2 is completed, the fixing base 1 can be quickly moved to the final position, and through the setting of the first arc groove 12, the probe bodies 2 in all the limiting holes 11 of the same group can be fixed by the insulating adhesive located in the first arc groove 12.

[0071] Optionally, step S4 also includes: the jig support arm 52 is arranged in parallel with the needle tail section 231 of all probe bodies 2, and after all probe bodies 2 are adjusted, the jig support arm 52 is disconnected from the fixed connection point of the fixed seat 1, and the fixed seat 1 is made to slide along the jig support arm 52; the jig support arm 52 may also be arranged not in parallel with the needle tail section 231. When the adjustment of the probe body 2 is completed, the jig support arm 52 is disconnected from the fixed seat 1 and / or the jig base 51, so that the fixed seat 1 can slide along the extension direction of the needle tail section 231.

[0072] Furthermore, based on the above steps, after adjusting the positions and postures of all probe bodies 2 , the fixing base 1 and / or the bracket 3 can be smoothly slid to the set positions on the probe body 2 .

[0073] Optionally, at least two groups of first arc-shaped grooves 12 are provided on the top surface of the fixing seat 1, and the top opening of each group of limiting holes 11 is located in the same first arc-shaped groove 12; and / or, at least two groups of second arc-shaped grooves 13 are provided on the bottom surface of the fixing seat 1, and the bottom opening of each group of limiting holes 11 is located in the same second arc-shaped groove 13; the first arc-shaped groove 12 and / or the second arc-shaped groove 13 are filled with insulating adhesive.

[0074] Furthermore, based on the first arc groove 12 and the second arc groove 13, it is possible to provide a holding space for the insulating adhesive, so that the probe body 2 in the limiting hole 11 can be fixed in a controllable space. Specifically, after the position and posture of the probe body 2 are adjusted, the fixing seat 1 can be slid downward to the set position. At this time, the insulating adhesive is first filled into the first arc groove 12. After baking and forming, it can be turned over and the insulating adhesive can be filled into the second arc groove 13 and baked again.

[0075] Optionally, the second arc groove 13 extends toward the axial direction of the fixing seat 1 , and the radial length of the second arc groove 13 in the fixing seat 1 is greater than the length of the middle section 22 to form a clearance groove for accommodating at least part of the middle section 22 and at least part of the needle section 211 .

[0076] Wherein, step S4 further includes: the fixing seat 1 slides toward the needle tip 21 until at least a portion of the middle section 22 is located in the clearance groove of the fixing seat 1 .

[0077] Furthermore, based on the above-mentioned yield groove, the size of the entire probe card in the first direction can be further reduced, so that the entire middle section 22 and part of the needle section 211 overlap with the fixing seat 1 in the first direction, which is more convenient for the arrangement of the probe card. At the same time, the fixing seat 1 also has a better supporting effect on the probe body 2.

[0078] Optionally, step S4 also includes: after adding insulating adhesive into the first arc groove 12, placing the fixing base 1 and all probe bodies 2 in an oven for baking, then flipping the fixing base 1 180 degrees so that the second arc groove 13 faces upward, adding insulating adhesive, and then placing it in the oven again for baking.

[0079] Furthermore, based on the above steps, the fixing effect between the probe body 2 and the fixing seat 1 can be improved, and the accuracy of the posture and position of all probe bodies 2 can be further guaranteed.

[0080] Optionally, step S5 also includes: placing the circuit board 4 into the bracket groove 31 of the bracket 3, and fixing the two together. It should be noted that the bracket 3 can be connected to the circuit board 4 by bolts, and then aligned with the fixing seat 1 so that the fixing seat 1 is connected to the bottom surface of the bracket 3, and the fixing seat 1 can be connected to the bracket 3 by bolts; wherein, the bottom surface of the circuit board 4 is in contact with the top surface of the bracket groove 31, and the peripheral side of the bracket groove 31 is in contact with the peripheral side surface of the circuit board 4; in some embodiments, the upper surface of the circuit board 4 is fully copper-plated and grounded, so as to better reduce the ground impedance, improve the anti-interference ability, reduce the voltage drop, and improve the power supply efficiency; further, the bracket 3 is connected to the circuit board 4 by bolts, and the surface of the bracket 3 can be plated with hard gold and anti-oxidation treated, so as to further reduce the deformation degree of the bracket 3 in an ultra-low temperature environment.

[0081] Furthermore, based on the above steps, the connection between the fixing base 1, the probe body 2, the bracket 3 and the circuit board 4 is finally completed to form a completed probe card.

[0082] Optionally, step S5 further includes: after the fixing seat 1 is connected to the bracket 3 , bending the needle tail sections 231 of all probe bodies 2 at a height position equal to the upper surface of the circuit board 4 , and connecting the tail ends 23 to corresponding test points 41 .

[0083] Furthermore, based on the above steps, the needle tail sections 231 of all probe bodies 2 are bent at the same height so that the extension distances of all needle tail sections 231 on the upper surface of the circuit board 4 are close, thereby improving the surface regularity of the probe card. At the same time, the test points 41 on the upper surface of the circuit board 4 can be arranged in a more reasonable manner.

[0084] Optionally, step S5 further includes: arranging all the needle tail segments 231 located above the upper surface of the circuit board 4 along a fan shape, and connecting all the tail ends 23 with the test points 41 arranged along an arc shape in sequence; continue to refer to Figure 1As shown, each group of test points 41 is arranged on the circuit board 4 along an arc that matches the arc formed by the limiting holes 11. Specifically, the arc formed by the test points 41 can be concentric with the arc formed by the limiting holes 11, and the two only have different radii, or the concave sides of the two arcs face the same side, and the line connecting the centers of the two arcs is the symmetry axis of the two arcs.

[0085] Furthermore, based on the arrangement of the above-mentioned test points 41, all test points 41 and the limiting holes 11 are made to correspond one to one, and the needle tail sections 231 of each group of probe bodies 2 are evenly arranged in a fan shape on the upper surface of the circuit board 4, so that the arrangement of all probe bodies 2 is more reasonable, further facilitating the connection between the tail end 23 and the test point 41, and at the same time further reducing the probability of short circuit between the two probe bodies 2.

[0086] Optionally, step S5 also includes: sleeve an insulating sleeve on the portion of the needle tail section 231 of the probe body 2 that is higher than the limiting hole 11; it should be noted that the needle tail section 231 located above the limiting hole 11 needs to be bent again at an angle of approximately 90 degrees to achieve the connection between the tail end 23 and the test point 41.

[0087] Furthermore, based on the above-mentioned insulating sleeve, it is possible to avoid short circuit between two needle tail sections 231 with a small distance between them.

[0088] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0089] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0090] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the present application.

Claims

1. A probe card assembly process, characterized in that: The steps include: S1, bending a plurality of probe bodies (2) of equal length into a Z-shape according to set parameters; S2, inserting all probe bodies (2) into the limiting holes (11) on the fixing seat (1); S3, the fixing base (1) is installed on the fixture; S4, adjust all probe bodies (2); S5. Connect the pure copper bracket (3) and the circuit board (4) to the fixing base (1), and connect the tail ends (23) of all probe bodies (2) to the corresponding test points (41) on the upper surface of the circuit board (4) in sequence to complete the assembly.

2. The probe card assembly process according to claim 1, characterized in that: The step S3 and the step S4 include: The fixing seat (1) is mounted on the fixture support arm (52) of the fixture, the needle tips (21) of all probe bodies (2) are adjusted to abut against the abutment portion, and the needle tips (21) of all probe bodies (2) are rotated to a set position by rotating the needle tail section (231).

3. The probe card assembly process according to claim 2, characterized in that: The step S4 also includes: after all probe bodies (2) are adjusted, the fixing seat (1) is slid along the needle tail sections (231) of all probe bodies (2) to a set position, and then insulating adhesive is added into the first arc groove (12) on the top surface of the fixing seat (1).

4. The probe card assembly process according to claim 3, characterized in that: The step S4 further comprises: the jig support arm (52) is arranged in parallel with the needle tail sections (231) of all probe bodies (2); after all probe bodies (2) are adjusted, the fixed connection points of the jig support arm (52) and the fixing seat (1) are disconnected, and the fixing seat (1) is made to slide along the jig support arm (52).

5. The probe card assembly process according to claim 3, characterized in that: The step S4 further comprises: the fixing seat (1) slides in the direction of the needle tip (21) until at least a portion of the middle section (22) is located in the clearance groove of the fixing seat (1).

6. The probe card assembly process according to claim 3, characterized in that: The step S4 further comprises: after adding insulating adhesive into the first arc-shaped groove (12), placing the fixing seat (1) and all the probe bodies (2) into an oven for baking.

7. The probe card assembly process according to claim 1, characterized in that: The step S5 also includes: placing the circuit board (4) into the bracket groove (31) of the bracket (3), and fixing the two together, and then aligning the fixing seat (1) so that the fixing seat (1) is connected to the bottom surface of the bracket (3).

8. The probe card assembly process according to claim 7, characterized in that: The step S5 further comprises: after the fixing seat (1) is connected to the bracket (3), the needle tail sections (231) of all the probe bodies (2) are bent at a height position relative to the upper surface of the circuit board (4), and the tail ends (23) are connected to corresponding test points (41).

9. The probe card assembly process according to claim 8, characterized in that: The step S5 also includes: arranging all the needle tail sections (231) located above the upper surface of the circuit board (4) in a fan shape, and connecting all the tail ends (23) to the test points (41) arranged along the arc shape in sequence.

10. The probe card assembly process according to claim 8, characterized in that: The step S5 further comprises: sleeve an insulating sleeve on the portion of the needle tail section (231) of the probe body (2) that is higher than the limiting hole (11).

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