Cleaning equipment and method based on CVD (Chemical Vapor Deposition) Shower Head part

Abstract

The invention discloses a cleaning device and method based on a CVD (chemical vapor deposition) Shower Head component, and relates to the technical field of CVD Shower Head component cleaning. According to the cleaning equipment and method based on the CVD Shower Head part, when the CVD Shower Head part is cleaned, the CVD Shower Head part is connected to the outer side of each clamping air bag in a sleeving mode, the lower portion of the CVD Shower Head part makes contact with each rotary contact roller, then a third hydraulic cylinder is adjusted to drive a pushing pressing plate to conduct pushing, the clamping air bags make contact with the CVD Shower Head part and are preliminarily extruded, and the CVD Shower Head part is cleaned. When the clamping air bags deform to a certain degree, mutual extrusion exists between the CVD Shower Head component and the clamping air bags, but the extrusion force is not large, it is ensured that the CVD Shower Head component cannot be damaged due to excessive extrusion after being clamped, meanwhile, friction damage to the CVD Shower Head component is reduced through clamping of the clamping air bags, and the effect of protecting the CVD Shower Head component is achieved.

Description

Technical Field

[0001] The invention relates to the technical field of CVD Shower Head component cleaning, and in particular to a cleaning device and method based on a CVD Shower Head component. Background Art

[0002] CVD is a key link in the front-end process of semiconductor chip manufacturing. There is a precision component called Shower Head in the CVD machine. CVD Shower Head is a precision component that will accumulate impurities during use, affecting subsequent production and use. Therefore, it needs to be cleaned regularly to increase its service life.

[0003] During the cleaning process, the existing CVD Shower Head components need to be soaked for multiple times and then rinsed for multiple times. During each soaking and cleaning, they need to be clamped by a clamping mechanism. Since the CVD Shower Head components are precision components, they are easily damaged due to friction when clamped by the existing clamping mechanism. This poses a certain safety hazard and reduces the use value of the cleaning equipment. Summary of the invention

[0004] The invention discloses a cleaning device based on a CVD Shower Head component, aiming to solve the technical problem that the existing CVD Shower Head component needs to be soaked for multiple times and then rinsed for multiple times during the cleaning process, and needs to be clamped by a clamping mechanism during each soaking and cleaning. Since the CVD Shower Head component is a precision component, it is easy to be damaged due to friction when being clamped by the existing clamping mechanism, which has certain safety hazards.

[0005] In order to achieve the above object, the present invention adopts the following technical solutions:

[0006] A cleaning device based on a CVD Shower Head component comprises a cleaning box and a hanger, an auxiliary component is provided at the bottom of the hanger, and a placement component is provided in the auxiliary component, the placement component comprises an intermediate placement frame, and the inner side wall of the intermediate placement frame is fixedly connected with an annular limiting rail, and the inside of the annular limiting rail is equidistantly slidably connected with a follower slide bar, one side of each follower slide bar is fixedly connected with a hydraulic cylinder three, and the output end of each hydraulic cylinder three is fixedly connected with a pushing plate, the side of the pushing plate away from the intermediate placement frame is fixedly connected with a clamping airbag, and an air hole is opened on the top of the clamping airbag, the inside of the air hole is fixedly connected with an air pipe, and the outer side wall of the air pipe is connected with an air valve through a flange, one side of the pushing plate is fixedly connected with a fixing ring rod, and both ends of the fixing ring rod facing the clamping airbag are fixedly connected with electric telescopic rods, and the output ends of the two electric telescopic rods are fixedly connected with clamping pressure rods.

[0007] By providing a placement assembly, when cleaning the CVD Shower Head component, it is sleeved on the outside of each clamping airbag, and its lower side is in contact with each rotating contact roller. Then, the hydraulic cylinder is adjusted to drive the push plate to push, so that the clamping airbag contacts and initially squeezes the CVD Shower Head component. When the clamping airbag is deformed to a certain extent, there is mutual squeezing between the CVD Shower Head component and each clamping airbag, but the squeezing force is not large, ensuring that the CVDShower Head component will not be damaged due to excessive squeezing after being clamped. At the same time, the clamping airbag is used to clamp the CVD Shower Head component to reduce friction damage and protect the CVD Shower Head component.

[0008] In a preferred embodiment, the auxiliary component includes an annular frame, and the annular frame is fixedly connected to the bottom end of the hanger, the outer wall of the annular frame is annularly distributed with connecting frames, the intermediate placement frame is fixedly connected to one end of multiple connecting frames, and the outer wall of the intermediate placement frame is equidistantly connected to rotating contact rollers through bearings.

[0009] In a preferred solution, an annular slide groove is formed on the top of the annular frame, and the annular slide groove is slidably connected to a limiting slide rod near the inside of each rotating contact roller, the top of the limiting slide rod is fixedly connected to a driving frame, the annular frame is fixedly connected to a mounting block on the inner side wall near the rotating contact roller, one end of the mounting block is fixedly connected to an end ring rail, the inner side wall of the end ring rail located below is fixedly connected to a fixed block, one side of the fixed block is fixedly connected to a return spring rod, one end of the return spring rod is fixedly connected to a moving slider, the moving slider is slidably connected to the inside of the end ring rail, and the return spring rod is located inside the end ring rail.

[0010] By providing the auxiliary components, when the CVD Shower Head components are soaked and rinsed, the hydraulic cylinder is adjusted to drive the driving frame to push the matching rod, so that the movable slider rotates in the end ring rail, thereby driving the rotating contact roller to rotate, and the various rotating contact rollers cooperate with each other to drive the CVD Shower Head components to rotate. After the CVD Shower Head components rotate, the previously blocked position thereof is exposed to the soaking liquid and the rinsing liquid, thereby ensuring that the CVD Shower Head components are soaked and rinsed in all directions, thereby improving the cleaning effect of the CVD Shower Head components.

[0011] In a preferred solution, the annular frame is fixedly connected to a vertical pole near the top of the limiting slide rod, and the side of the vertical pole facing the limiting slide rod is connected to a hydraulic cylinder four through a hinge, the output end of the hydraulic cylinder four is connected to one side of the limiting slide rod through a hinge, the outer side wall of the movable slide rod is fixedly connected to a matching rod, the matching rod is in contact with the driving frame, the end of the rotating contact roller is fixedly connected to a rotating column, the outer side wall of the rotating column is fixedly connected to a connecting rod, and one end of the connecting rod is fixedly connected to the outer side wall of the movable slide rod.

[0012] In a preferred embodiment, a forward and reverse motor is fixedly connected to the top inner wall of the cleaning box, and the output shaft of the forward and reverse motor is fixedly connected to a rotating shaft via a coupling, an outer side wall of the rotating shaft is fixedly connected to an adjustment rail, and an end frame is fixedly connected to the end of the adjustment rail away from the rotating shaft.

[0013] In a preferred solution, hydraulic cylinder 1 is fixedly connected to one side of the end frame, and the output end of hydraulic cylinder 1 is fixedly connected to an adjusting slide, the adjusting slide is slidably connected to the inside of the adjusting rail, hydraulic cylinder 2 is fixedly connected to the bottom of the adjusting slide, and the output end of hydraulic cylinder 2 is fixedly connected to the outer wall of the hanger.

[0014] In a preferred embodiment, a partition is fixedly connected to the inside of the cleaning box, and the outer wall of the cleaning box located below the partition is connected to a box door through a hinge, a liquid storage cylinder and a waste liquid collecting cylinder are placed on the bottom inner wall of the cleaning box, and a mounting frame is fixedly connected to the top of the partition, and soaking pools are annularly distributed on the bottom inner wall of the mounting frame, three of which are placed with fixed covers, and an adjusting cover is placed on the top of another soaking pool, and the tops of the three fixed covers are fixedly connected to the same integration rod, and a cylinder is fixedly connected to the side of the integration rod facing the adjusting cover, and the output end of the cylinder is fixedly connected to the top of the adjusting cover, and the outer wall of the rotating shaft is fixedly connected to an external frame, and the bottom end of the external frame is fixedly connected to the top of one of the fixed covers, and liquid holes are opened on the partition and the mounting frame, and the bottom of the partition located below the liquid hole is fixedly connected to a flow guide cover, and a mounting hole is opened at the bottom of the flow guide cover, and a waste liquid conduit is fixedly connected to the inside of the mounting hole, and one end of the waste liquid conduit is plugged into the inside of the waste liquid collecting tube.

[0015] In a preferred solution, a flushing assembly is provided at the bottom end of the rotating shaft, and the flushing assembly includes two flushing racks, the facing sides of the two flushing racks are fixedly connected to the same fixed rack, the opposite sides of the two flushing racks are provided with flushing holes, the top of the upper flushing rack is fixedly connected to a suspension rod, the suspension rod is fixedly connected to the bottom of the rotating shaft, hydraulic cylinders five are distributed in an annular manner on the bottom outer wall of the flushing rack located below, the output ends of the multiple hydraulic cylinders five are fixedly connected to the same extrusion ring rack, extrusion balls are fixedly connected to the arc surface of the extrusion ring rack at equal distances, and an elastic cover is fixedly connected to the bottom inner wall of the flushing rack located below.

[0016] By providing a flushing assembly, when the CVD Shower Head component is flushed after a single soaking, the hydraulic cylinder five is adjusted to drive the squeezing ball on the squeezing ring frame to squeeze the elastic cover, thereby compressing the internal space of the flushing frame, thereby pressurizing the liquid inside the flushing frame, increasing the kinetic energy of the liquid rushing out, so that the CVD Shower Head component is in a floating state, and the CVD Shower Head component is separated from each rotating contact roller. During the repeated adjustment of the hydraulic cylinder five, the CVD Shower Head component is in a lifting state, which gradually changes the water impact force applied to the upper and lower surfaces of the CVD Shower Head component, accelerates the separation of impurities on the surface of the CVD Shower Head component, and improves the flushing effect of the CVD Shower Head component.

[0017] In a preferred solution, the outer walls of the two flushing racks are each provided with a connecting hole, and the interior of the two connecting holes is fixedly connected with the same connecting tube, one side of the external rack is fixedly connected with a pump ring rack, the interior of the pump ring rack is fixedly connected with an infusion pump, the liquid extraction end of the infusion pump is fixedly connected with a liquid extraction tube, the liquid extraction tube is inserted into the interior of the liquid storage cylinder, the delivery end of the infusion pump is fixedly connected with an infusion tube, and one end of the infusion tube is inserted into the interior of the connecting tube.

[0018] A cleaning method based on a CVD Shower Head component, using a cleaning device based on a CVD Shower Head component as described above, comprises the following steps:

[0019] Step 1: When cleaning the CVD Shower Head, sleeve it on the outside of each clamping airbag, and make its bottom contact with each rotating contact roller. Then adjust the hydraulic cylinder to drive the pressing plate to push, so that the clamping airbag contacts and squeezes the CVD Shower Head component preliminarily.

[0020] Step 2: After clamping is completed, adjust the hydraulic cylinder 2 to drive the CVD Shower Head component to move to the soaking tank to start soaking. During the soaking process, adjust the hydraulic cylinder 4 to drive the driving frame to push the matching rod, so that the moving slider rotates in the end ring rail, thereby driving the rotating contact roller to rotate. The rotating contact rollers cooperate with each other to drive the CVD Shower Head component to rotate, realizing all-round soaking;

[0021] Step 3: After the soaking is completed, before lifting it, adjust the electric telescopic rod to drive the clamping pressure rod to squeeze the clamping airbag, so that the contact pressure between the clamping airbag and the CVD Shower Head component increases, and then adjust the hydraulic cylinder to drive the CVD Shower Head component to move between the upper and lower washing racks to start washing;

[0022] Step 4: After a single rinse, start the forward and reverse motors to rotate by 360°, so as to rotate the CVD Shower Head component to the top of another soaking pool. Repeat the above operation until the soaking and rinsing is completed. When the soaking and rinsing of the CVD Shower Head component is completed, the CVD Shower Head component has rotated 360°. After the CVD Shower Head component is taken out, the forward and reverse motors are reversed by 360° to reset it to prevent the liquid extraction tube from getting tangled due to rotation.

[0023] As can be seen from the above, the cleaning equipment based on the CVD Shower Head component provided by the present invention has the following characteristics: when cleaning the CVD Shower Head component, it is sleeved on the outside of each clamping airbag, and its lower part is in contact with each rotating contact roller, and then the hydraulic cylinder is adjusted to drive the push plate to push, so that the clamping airbag and the CVD Shower Head component are in contact and initially squeezed, and when the clamping airbag is deformed to a certain extent, there is mutual squeezing between the CVD Shower Head component and each clamping airbag, but the squeezing force is not large, ensuring that the CVD Shower Head component will not be damaged due to excessive squeezing after being clamped. At the same time, the clamping airbag is used to clamp the CVD Shower Head component to reduce the friction damage to the CVD Shower Head component, thereby protecting the CVD Shower Head component. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 This is a schematic diagram of the overall structure of a cleaning device based on a CVD Shower Head component proposed by the present invention.

[0025] Figure 2 This is a schematic diagram of the internal structure of a cleaning box of a cleaning device based on a CVD Shower Head component proposed by the present invention.

[0026] Figure 3 for Figure 2 The overall structure top view.

[0027] Figure 4 This is a schematic diagram of the combined structure of a hanger and auxiliary components of a cleaning device based on a CVD Shower Head component proposed by the present invention.

[0028] Figure 5 The present invention provides a schematic diagram of the combined structure of auxiliary components and placement components of a cleaning device based on a CVD Shower Head component.

[0029] Figure 6 The present invention is a schematic diagram of the structure of the placement components of a cleaning device based on a CVD Shower Head component.

[0030] Figure 7 This is a schematic diagram of the structure of an auxiliary component of a cleaning device based on a CVD Shower Head component proposed by the present invention.

[0031] Figure 8 This is a schematic diagram of the structure of a flushing component of a cleaning device based on a CVD Shower Head component proposed by the present invention.

[0032] Fig. 9 A cross-sectional view of the structure of a rinse rack of a cleaning device based on a CVD Shower Head component proposed by the present invention.

[0033] Fig.10 This is a schematic diagram of the combined structure of a soaking tank and a mounting frame of a cleaning device based on a CVD Shower Head component proposed by the present invention.

[0034] In the figure: 1, cleaning box; 2, forward and reverse motor; 3, adjustment rail; 4, soaking tank; 5, installation frame; 6, partition; 7, box door; 8, liquid storage cylinder; 9, waste liquid collection cylinder; 10, waste liquid conduit; 11, deflector; 12, rotating shaft; 13, external frame; 14, liquid hole; 15, fixed cover; 16, integration rod; 17, end frame; 18, hydraulic cylinder 1; 19, adjustment slide; 20, hydraulic cylinder 2. 21. Hanger; 22. Connecting frame; 23. Placement assembly; 2301. Intermediate placement frame; 2302. Clamping airbag; 2303. Annular limiting rail; 2304. Clamping pressure rod; 2305. Air pipe; 2306. Air valve; 2307. Pushing plate; 2308. Hydraulic cylinder three; 2309. Electric telescopic rod; 2310. Fixed ring rod; 2311. Follow-up slide rod; 24. Auxiliary assembly; 2401, annular frame; 2402, rotating contact roller; 2403, end ring rail; 2404, annular slide; 2405, vertical rod; 2406, matching rod; 2407, reset spring rod; 2408, driving frame; 2409, rotating column; 2410, limit slide rod; 2411, mounting block; 2412, fixed block; 2413, hydraulic cylinder four; 2414, connecting rod; 2415, moving slide block; 25. Flushing assembly; 2501. Flushing rack; 2502. Flushing hole; 2503. Fixing rack; 2504. Hanging rod; 2505. Infusion tube; 2506. Infusion pump; 2507. Pump ring rack; 2508. Connecting tube; 2509. Extraction tube; 2510. Elastic cover; 2511. Extrusion ball; 2512. Hydraulic cylinder five; 2513. Extrusion ring rack; 26. Cylinder; 27. Adjustment cover. DETAILED DESCRIPTION

[0035] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0036] The cleaning device based on the CVD Shower Head component disclosed in the present invention is mainly applied to the existing CVD Shower Head component. During the cleaning process, the CVD Shower Head component needs to be soaked for multiple times and then rinsed for multiple times. During each soaking and cleaning, it needs to be clamped by a clamping mechanism. Since the CVD Shower Head component is a precision component, it is easy to be damaged due to friction when clamped by the existing clamping mechanism, and there is a certain safety hazard scenario.

[0037] Reference Figure 1-Figure 10A cleaning device based on a CVD Shower Head component comprises a cleaning box 1 and a hanger 21, an auxiliary component 24 is provided at the bottom of the hanger 21, and a placement component 23 is provided in the auxiliary component 24, the placement component 23 comprises an intermediate placement frame 2301, and an annular limiting rail 2303 is fixedly connected to the inner side wall of the intermediate placement frame 2301, and a follow-up slide bar 2311 is equidistantly slidably connected inside the annular limiting rail 2303, one side of each follow-up slide bar 2311 is fixedly connected to a hydraulic cylinder 3 2308, and the output end of each hydraulic cylinder 3 2308 is fixedly connected to a push plate 2307 A clamping airbag 2302 is fixedly connected to one side of the pushing plate 2307 away from the middle mounting frame 2301, and an air hole is opened on the top of the clamping airbag 2302, an air pipe 2305 is fixedly connected inside the air hole, and an air valve 2306 is connected to the outer wall of the air pipe 2305 through a flange, a fixing ring rod 2310 is fixedly connected to one side of the pushing plate 2307, and electric telescopic rods 2309 are fixedly connected to both ends of the fixing ring rod 2310 facing the clamping airbag 2302, and the output ends of the two electric telescopic rods 2309 are fixedly connected to the clamping pressure rod 2304.

[0038] In a specific application scenario, when cleaning the CVD Shower Head component, it is sleeved on the outside of each clamping airbag 2302, and its bottom is in contact with each rotating contact roller 2402. Then, the hydraulic cylinder three 2308 is adjusted to drive the pushing plate 2307 to push, so that the clamping airbag 2302 and the CVD Shower Head component are in contact and initially squeezed. When the clamping airbag 2302 is deformed to a certain extent, there is mutual squeezing between the CVD Shower Head component and each clamping airbag 2302, but the squeezing force is not large, ensuring that the CVD Shower Head component will not be damaged due to excessive squeezing after being clamped. At the same time, the clamping airbag 2302 is used to clamp the CVD Shower Head component to reduce friction damage and protect the CVDShower Head component.

[0039] Specifically, when the CVD Shower Head component is cleaned, the clamping airbag 2302 and the CVD Shower Head component are in a preliminary restricted state. When the rotating contact roller 2402 rotates, the CVD Shower Head component will rotate under the drive of each rotating contact roller 2402. During the rotation, since the squeezing force of the clamping airbag 2302 and its contact point is not large, the clamping airbag 2302 only plays the role of internal support and restriction, and the clamping airbag 2302 will not rotate therewith, so that the CVDShower Head component can be immersed in all directions in the immersion tank 4, thereby improving the immersion cleaning effect.

[0040] It should be noted that, when the CVD Shower Head component is taken out of an immersion tank 4 to be moved, the electric telescopic rod 2309 is adjusted to drive the clamping pressure rod 2304 to squeeze the clamping airbag 2302, so that the contact pressure between the clamping airbag 2302 and the CVD Shower Head component is increased, thereby improving the firmness of the clamping of the CVD Shower Head component and preventing the CVD Shower Head component from falling off during the lifting and moving process.

[0041] Reference Figure 1 , Figure 2 , Figure 4 , Figure 5 and Figure 7 In a preferred embodiment, the auxiliary component 24 includes an annular frame 2401, and the annular frame 2401 is fixedly connected to the bottom end of the hanger 21, the outer wall of the annular frame 2401 is annularly distributed with connecting frames 22, the intermediate placement frame 2301 is fixedly connected to one end of multiple connecting frames 22, the outer wall of the intermediate placement frame 2301 is equidistantly connected with rotating contact rollers 2402 through bearings, the top of the annular frame 2401 is opened with an annular slide groove 2404, and the annular slide groove 2404 is slidably connected to the inside of each rotating contact roller 2402, the top of the limiting slide rod 2410 is fixedly connected to a driving frame 2408, the inner side wall of the annular frame 2401 close to the rotating contact roller 2402 is fixedly connected to a mounting block 2411, one end of the mounting block 2411 is fixedly connected to an end ring rail 2403, the inner side wall of the end ring rail 2403 located below is fixedly connected to a fixed block 2412, and the fixed block 241 2 is fixedly connected to a return spring rod 2407, one end of the return spring rod 2407 is fixedly connected to a movable slider 2415, the movable slider 2415 is slidably connected to the inside of the end ring rail 2403, the return spring rod 2407 is located inside the end ring rail 2403, the annular frame 2401 is fixedly connected to a vertical rod 2405 near the top of the limiting slide bar 2410, and the vertical rod 2405 is connected to a hydraulic cylinder through a hinge on the side facing the limiting slide bar 2410. Four 2413, the output end of the hydraulic cylinder four 2413 is connected to one side of the limiting slide 2410 through a hinge, the outer side wall of the movable slider 2415 is fixedly connected with the matching rod 2406, the matching rod 2406 is in contact with the driving frame 2408, the end of the rotating contact roller 2402 is fixedly connected with the rotating column 2409, the outer side wall of the rotating column 2409 is fixedly connected with the connecting rod 2414, and one end of the connecting rod 2414 is fixedly connected to the outer side wall of the movable slider 2415.

[0042] Specifically, when the CVD Shower Head component is soaked and rinsed, the hydraulic cylinder 2413 is adjusted to drive the driving frame 2408 to push the matching rod 2406, so that the movable slider 2415 rotates in the end ring rail 2403, thereby driving the rotating contact roller 2402 to rotate. The rotating contact rollers 2402 cooperate with each other to drive the CVD Shower Head component to rotate. After the CVD Shower Head component rotates, its originally blocked position is exposed to the soaking liquid and the rinsing liquid, thereby ensuring that the CVD Shower Head component is soaked and rinsed in all directions, thereby improving the cleaning effect of the CVD Shower Head component.

[0043] It should be noted that, when the hydraulic cylinder 2413 drives the driving frame 2408 to reset, the reset spring rod 2407 drives the rotating contact roller 2402 to rotate in the opposite direction and reset, and then drives the CVD Shower Head component to rotate in the opposite direction. The rotating contact roller 2402 is in a reciprocating rotation state to drive the soaking liquid in the soaking tank 4 to flow rapidly. The flowing soaking liquid will carry away the impurities retained in the CVDShower Head component after the reaction, so as to avoid secondary contamination of the CVD Shower Head component by these impurities, thereby further improving the cleaning effect of the CVD Shower Head component.

[0044] Reference Figure 1 , Figure 2 and Figure 4 In a preferred embodiment, the top inner wall of the cleaning box 1 is fixedly connected to a forward and reverse motor 2, and the output shaft of the forward and reverse motor 2 is fixedly connected to a rotating shaft 12 through a coupling, and the outer side wall of the rotating shaft 12 is fixedly connected to an adjusting rail 3, and the end of the adjusting rail 3 away from the rotating shaft 12 is fixedly connected to an end frame 17, and one side of the end frame 17 is fixedly connected to a hydraulic cylinder 18, and the output end of the hydraulic cylinder 18 is fixedly connected to an adjusting slide 19, and the adjusting slide 19 is slidably connected to the inside of the adjusting rail 3, and the bottom of the adjusting slide 19 is fixedly connected to a hydraulic cylinder 20, and the output end of the hydraulic cylinder 20 is fixedly connected to the outer side wall of the hanger 21.

[0045] Reference Figure 1 , Figure 2 , Figure 4 and Fig.10In a preferred embodiment, a partition 6 is fixedly connected to the inside of the cleaning box 1, and the outer wall of the cleaning box 1 located below the partition 6 is connected to a box door 7 through a hinge, a liquid storage cylinder 8 and a waste liquid collection cylinder 9 are placed on the bottom inner wall of the cleaning box 1, a mounting frame 5 is fixedly connected to the top of the partition 6, and soaking pools 4 are distributed in an annular manner on the bottom inner wall of the mounting frame 5, three of which are placed on fixed covers 15, and an adjustable cover 27 is placed on the top of another soaking pool 4, and the tops of the three fixed covers 15 are fixedly connected to the same integration rod 16, and the integration rod 16 faces the adjustment A cylinder 26 is fixedly connected to one side of the adjustment cover 27, and the output end of the cylinder 26 is fixedly connected to the top of the adjustment cover 27. The outer wall of the rotating shaft 12 is fixedly connected to the external frame 13, and the bottom end of the external frame 13 is fixedly connected to the top of one of the fixed covers 15. Both the partition 6 and the mounting frame 5 have liquid holes 14, and the bottom of the partition 6 located below the liquid hole 14 is fixedly connected to the guide cover 11, and the bottom of the guide cover 11 has a mounting hole, and the inside of the mounting hole is fixedly connected to the waste liquid conduit 10, and one end of the waste liquid conduit 10 is inserted into the inside of the waste liquid collecting tube 9.

[0046] Reference Figure 1 , Figure 2 , Figure 8 and Fig. 9 In a preferred embodiment, a flushing assembly 25 is provided at the bottom end of the rotating shaft 12, and the flushing assembly 25 includes two flushing racks 2501, and the two flushing racks 2501 are fixedly connected to the same fixed rack 2503 on the opposite sides, and the two flushing racks 2501 are opened with flushing holes 2502 on the opposite sides. The top of the flushing rack 2501 located above is fixedly connected to a suspension rod 2504, and the suspension rod 2504 is fixedly connected to the bottom of the rotating shaft 12. The outer wall of the bottom of the flushing rack 2501 located below is annularly distributed with hydraulic cylinders 5 2512, and the output ends of the multiple hydraulic cylinders 5 2512 are fixedly connected to the same extrusion ring rack 2513, and the arc surface of the extrusion ring rack 2513 A squeezing ball 2511 is fixedly connected at an equal distance above, an elastic cover 2510 is fixedly connected to the bottom inner wall of the flushing rack 2501 located below, and connecting holes are opened on the outer walls of the two flushing racks 2501, and the inside of the two connecting holes is fixedly connected to the same connecting pipe 2508, a pump ring rack 2507 is fixedly connected to one side of the external rack 13, and the inside of the pump ring rack 2507 is fixedly connected to an infusion pump 2506, and the liquid extraction end of the infusion pump 2506 is fixedly connected to a liquid extraction tube 2509, and the liquid extraction tube 2509 is inserted into the inside of the liquid storage cylinder 8, and the delivery end of the infusion pump 2506 is fixedly connected to an infusion tube 2505, and one end of the infusion tube 2505 is inserted into the inside of the connecting tube 2508.

[0047] Specifically, when the CVD Shower Head component is rinsed after a single soaking, the hydraulic cylinder five 2512 is adjusted to drive the squeezing ball 2511 on the squeezing ring frame 2513 to squeeze the elastic cover 2510, thereby compressing the internal space of the rinsing frame 2501, thereby pressurizing the liquid inside the rinsing frame 2501, increasing the kinetic energy of the liquid rushing out, making the CVD Shower Head component in a floating state, and the CVD Shower Head component is separated from each rotating contact roller 2402. During the repeated adjustment of the hydraulic cylinder five 2512, the CVD Shower Head component is in a lifting state, which gradually changes the water impact force applied to the upper and lower surfaces of the CVD Shower Head component, accelerates the separation of impurities on the surface of the CVD Shower Head component, and improves the rinsing effect of the CVD Shower Head component.

[0048] A cleaning method based on a CVD Shower Head component, using a cleaning device based on a CVD Shower Head component as described above, comprises the following steps:

[0049] Step 1: When cleaning the CVD Shower Head component, it is sleeved on the outside of each clamping airbag 2302, and its lower part is in contact with each rotating contact roller 2402. Then, the hydraulic cylinder 3 2308 is adjusted to drive the push plate 2307 to push, so that the clamping airbag 2302 and the CVD Shower Head component are in contact and initially squeezed;

[0050] Step 2: After the clamping is completed, the hydraulic cylinder 2413 is adjusted to drive the CVD Shower Head component to move to the soaking tank 4 to start soaking. During the soaking process, the hydraulic cylinder 2413 is adjusted to drive the driving frame 2408 to push the matching rod 2406, so that the movable slider 2415 rotates in the end ring rail 2403, thereby driving the rotating contact roller 2402 to rotate. The rotating contact rollers 2402 cooperate with each other to drive the CVD Shower Head component to rotate, so as to achieve all-round soaking;

[0051] Step 3: After the soaking is completed, before lifting it, adjust the electric telescopic rod 2309 to drive the clamping pressure rod 2304 to squeeze the clamping airbag 2302, so that the contact pressure between the clamping airbag 2302 and the CVD Shower Head component increases, and then adjust the hydraulic cylinder 18 to drive the CVD Shower Head component to move between the upper and lower washing racks 2501 to start washing;

[0052] Step 4: After a single rinse is completed, the forward and reverse motor 2 is started to rotate by degrees, so as to rotate the CVD Shower Head component to the top of another soaking tank 4, and the above operation is repeated until the soaking and rinsing is completed.

[0053] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A cleaning device based on a CVD Shower Head component, comprising a cleaning box (1) and a hanger (21), characterized in that: The bottom of the hanger (21) is provided with an auxiliary component (24), and the auxiliary component (24) is provided with a placement component (23), the placement component (23) comprises an intermediate placement frame (2301), and the inner side wall of the intermediate placement frame (2301) is fixedly connected with an annular limit rail (2303), the inner side of the annular limit rail (2303) is equidistantly slidably connected with a follower slide bar (2311), one side of each follower slide bar (2311) is fixedly connected with a hydraulic cylinder three (2308), the output end of each hydraulic cylinder three (2308) is fixedly connected with a push plate (2307), and the push plate (2307) ) is fixedly connected to a clamping airbag (2302) on one side away from the middle mounting frame (2301), and an air hole is opened on the top of the clamping airbag (2302), an air pipe (2305) is fixedly connected inside the air hole, and an air valve (2306) is connected to the outer wall of the air pipe (2305) via a flange, and a fixed ring rod (2310) is fixedly connected to one side of the pushing pressure plate (2307), and electric telescopic rods (2309) are fixedly connected to both ends of the fixed ring rod (2310) facing the clamping airbag (2302), and the output ends of the two electric telescopic rods (2309) are fixedly connected to clamping pressure rods (2304).

2. A cleaning device based on a CVD Shower Head component according to claim 1, characterized in that: The auxiliary component (24) comprises an annular frame (2401), and the annular frame (2401) is fixedly connected to the bottom end of the hanger (21), the outer wall of the annular frame (2401) is provided with connecting frames (22) in an annular manner, the intermediate placement frame (2301) is fixedly connected to one end of a plurality of connecting frames (22), and the outer wall of the intermediate placement frame (2301) is equidistantly connected to rotating contact rollers (2402) via bearings.

3. A cleaning device based on a CVD Shower Head component according to claim 2, characterized in that: The top of the annular frame (2401) is provided with an annular groove (2404), and the annular groove (2404) is slidably connected to a limit slide bar (2410) near the inside of each rotating contact roller (2402), and the top of the limit slide bar (2410) is fixedly connected to a driving frame (2408), and the inner side wall of the annular frame (2401) near the rotating contact roller (2402) is fixedly connected to a mounting block (2411), and one end of the mounting block (2411) is fixedly connected to the inner side wall of the rotating contact roller (2402). The end ring rail (2403) is connected, and the inner side wall of the end ring rail (2403) located below is fixedly connected with a fixed block (2412), one side of the fixed block (2412) is fixedly connected with a return spring rod (2407), one end of the return spring rod (2407) is fixedly connected with a movable slider (2415), the movable slider (2415) is slidably connected to the inside of the end ring rail (2403), and the return spring rod (2407) is located inside the end ring rail (2403).

4. A cleaning device based on a CVD Shower Head component according to claim 3, characterized in that: The annular frame (2401) is fixedly connected to a vertical rod (2405) near the top of the limiting slide bar (2410), and the vertical rod (2405) is hingedly connected to a hydraulic cylinder four (2413) on the side facing the limiting slide bar (2410), and the output end of the hydraulic cylinder four (2413) is hingedly connected to one side of the limiting slide bar (2410), and the outer wall of the movable slide bar (2415) is fixedly connected to a matching rod (2406), and the matching rod (2406) is in contact with the driving frame (2408), and the end of the rotating contact roller (2402) is fixedly connected to a rotating column (2409), and the outer wall of the rotating column (2409) is fixedly connected to a connecting rod (2414), and one end of the connecting rod (2414) is fixedly connected to the outer wall of the movable slide bar (2415).

5. A cleaning device based on a CVD Shower Head component according to claim 4, characterized in that: The top inner wall of the cleaning box (1) is fixedly connected to a forward and reverse motor (2), and the output shaft of the forward and reverse motor (2) is fixedly connected to a rotating shaft (12) via a coupling, the outer side wall of the rotating shaft (12) is fixedly connected to an adjustment rail (3), and the end of the adjustment rail (3) away from the rotating shaft (12) is fixedly connected to an end frame (17).

6. A cleaning device based on a CVD Shower Head component according to claim 5, characterized in that: One side of the end frame (17) is fixedly connected to a hydraulic cylinder 1 (18), and the output end of the hydraulic cylinder 1 (18) is fixedly connected to an adjusting slide (19), the adjusting slide (19) is slidably connected to the inside of the adjusting rail (3), the bottom of the adjusting slide (19) is fixedly connected to a hydraulic cylinder 2 (20), and the output end of the hydraulic cylinder 2 (20) is fixedly connected to the outer wall of the hanger (21).

7. A cleaning device based on a CVD Shower Head component according to claim 6, characterized in that: The cleaning box (1) is fixedly connected to a partition (6) inside, and the outer wall of the cleaning box (1) located below the partition (6) is connected to a box door (7) through a hinge, and a liquid storage cylinder (8) and a waste liquid collection cylinder (9) are placed on the bottom inner wall of the cleaning box (1), and the top of the partition (6) is fixedly connected to a mounting frame (5), and the bottom inner wall of the mounting frame (5) is annularly distributed with soaking pools (4), wherein three soaking pools (4) are placed with fixed covers (15), and the top of another soaking pool (4) is placed with an adjustable cover (27), and the tops of the three fixed covers (15) are fixedly connected to the same integration rod (16), and the integration rod (16) faces the adjustable cover ( A cylinder (26) is fixedly connected to one side of the adjusting cover (27), the output end of the cylinder (26) is fixedly connected to the top of the adjusting cover (27), the outer side wall of the rotating shaft (12) is fixedly connected to an external frame (13), the bottom end of the external frame (13) is fixedly connected to the top of one of the fixed covers (15), the partition (6) and the mounting frame (5) are both provided with a liquid through hole (14), the bottom of the partition (6) located below the liquid through hole (14) is fixedly connected to a guide cover (11), the bottom of the guide cover (11) is provided with a mounting hole, the interior of the mounting hole is fixedly connected to a waste liquid conduit (10), one end of the waste liquid conduit (10) is plugged into the interior of the waste liquid collecting cylinder (9).

8. The cleaning device based on the CVD Shower Head component according to claim 7, characterized in that: A flushing assembly (25) is provided at the bottom end of the rotating shaft (12), and the flushing assembly (25) comprises two flushing racks (2501), the two flushing racks (2501) are fixedly connected to the same fixed rack (2503) on the opposite sides thereof, and flushing holes (2502) are provided on the opposite sides of the two flushing racks (2501), the top of the flushing rack (2501) located at the top is fixedly connected to a suspension rod (2504), and the suspension rod (2504) is fixedly connected to the bottom of the rotating shaft (12), and hydraulic cylinders (2512) are distributed in an annular manner on the bottom outer wall of the flushing rack (2501) located at the bottom, and the output ends of the plurality of hydraulic cylinders (2512) are fixedly connected to the same extrusion ring rack (2513), and extrusion balls (2511) are fixedly connected to the arc surface of the extrusion ring rack (2513) at equal distances, and an elastic cover (2510) is fixedly connected to the bottom inner wall of the flushing rack (2501) located at the bottom.

9. A cleaning device based on a CVD Shower Head component according to claim 8, characterized in that: The outer walls of the two flushing racks (2501) are both provided with connecting holes, and the same connecting pipe (2508) is fixedly connected to the inside of the two connecting holes; a pump ring rack (2507) is fixedly connected to one side of the external rack (13); an infusion pump (2506) is fixedly connected to the inside of the pump ring rack (2507); a liquid extraction end of the infusion pump (2506) is fixedly connected to a liquid extraction pipe (2509); the liquid extraction pipe (2509) is plugged into the inside of the liquid storage cylinder (8); a delivery end of the infusion pump (2506) is fixedly connected to an infusion pipe (2505); one end of the infusion pipe (2505) is plugged into the inside of the connecting pipe (2508).

10. A cleaning method based on a CVD Shower Head component, using a cleaning device based on a CVD Shower Head component as claimed in claim 9, characterized in that: The following steps are involved: Step 1: When cleaning the CVD Shower Head component, sleeve it on the outside of each clamping airbag (2302), and make its bottom contact with each rotating contact roller (2402), then adjust the hydraulic cylinder 3 (2308) to drive the push plate (2307) to push, so that the clamping airbag (2302) and the CVD Shower Head component are in contact and initially squeezed; Step 2: After the clamping is completed, the hydraulic cylinder 2 (20) is adjusted to drive the CVD Shower Head component to move to the soaking tank (4) to start soaking. During the soaking process, the hydraulic cylinder 4 (2413) is adjusted to drive the driving frame (2408) to push the matching rod (2406), so that the movable slider (2415) rotates in the end ring rail (2403), thereby driving the rotating contact roller (2402) to rotate. The rotating contact rollers (2402) cooperate with each other to drive the CVD Shower Head component to rotate, thereby achieving all-round soaking; Step 3: After the soaking is completed, before lifting it, adjust the electric telescopic rod (2309) to drive the clamping pressure rod (2304) to squeeze the clamping airbag (2302), so that the contact pressure between the clamping airbag (2302) and the CVD Shower Head component increases, and then adjust the hydraulic cylinder 1 (18) to drive the CVD Shower Head component to move between the upper and lower washing racks (2501) to start washing; Step 4: After a single rinse is completed, the forward and reverse motor (2) is started to rotate 90 degrees, thereby rotating the CVD Shower Head component to the top of another soaking tank (4), and the above operation is repeated until the soaking and rinsing is completed.

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