A gas pipeline structure and batch gallium nitride production system

Abstract

The present invention relates to the technical field of gas circuit pipe fittings, and in particular to a gas circuit pipe fitting structure and a batch gallium nitride production system. The gas circuit pipe fitting structure includes a main body, a branch pipe, a partition, a first sliding member, a second sliding member and a driving rod. The branch pipe is connected to the main body. The partition separates the branch pipe into a first tube cavity and a second tube cavity. The driving rod is slidably matched with the branch pipe. The first sliding member is slidably matched with the second tube cavity and slidably sealed, the driving rod passes through the first sliding member and slidably matches with it, and the second sliding member is fixedly connected to the end of the driving rod. An air outlet is provided on the side wall of the second tube cavity. When the first sliding member is in contact with the partition, the edge of the air outlet away from the main body is flush with the surface of the side of the first sliding member close to the main body. The driving rod is driven by a first driver and can drive the second sliding member into the main body. It can help determine the health of the entire gas circuit and help improve the accuracy of raw gas transportation.

Description

Technical Field

[0001] The present invention relates to the technical field of gas line pipe fittings, and in particular to a gas line pipe fitting structure and a batch gallium nitride production system. Background Art

[0002] In the raw gas supply work, it is necessary to monitor the supply of raw gas in real time. Usually, the raw gas is mainly tested at the raw gas supply device, and when the test is qualified, it is directly transported to the corresponding production unit.

[0003] However, in the actual production process, there may still be situations where the supplied raw gas is unqualified, resulting in production losses.

[0004] In view of this, this application is hereby filed. Summary of the invention

[0005] The first object of the present invention is to provide a gas line pipe structure, which can further improve the monitoring function of the gas line pipe, help determine the health of the entire gas line, help improve the accuracy of raw gas transportation, and have positive significance for reducing production losses.

[0006] The second object of the present invention is to provide a batch gallium nitride production system, which can further improve the monitoring function of gas line pipes, help determine the health of the entire gas line, help improve the accuracy of raw gas transportation, and have positive significance for reducing production losses in batch production of gallium nitride.

[0007] The embodiment of the present invention is achieved as follows:

[0008] A gas path pipe structure comprises a main pipe body, a branch pipe, a partition, a first sliding piece, a second sliding piece and a driving rod.

[0009] The branch pipe is connected to the side wall of the main pipe and communicates with the main pipe.

[0010] The partition is arranged in the branch pipe and is arranged perpendicular to the central axis of the branch pipe. The partition divides the internal space of the branch pipe into a first tube cavity and a second tube cavity which are independent of each other. The first tube cavity is located at one end of the second tube cavity away from the main tube body. A vent hole connected to the external atmosphere is provided on the side wall of the first tube cavity. A slide groove is provided on the inner side wall of the second tube cavity. The slide groove extends along the length direction of the second tube cavity. The slide groove extends from the partition to the main tube body and passes through the inner side wall of the main tube body.

[0011] The driving rod passes through the end of the branch pipe away from the main pipe body and extends along the axial direction of the branch pipe. The driving rod slides in the branch pipe along the axial direction of the branch pipe. The partition plate is provided with an opening for the driving rod to pass through, and the aperture of the opening is larger than the outer diameter of the driving rod.

[0012] The first sliding member is slidably matched with the second tube cavity and is slidably sealed with the inner side wall of the second tube cavity. The side wall of the first sliding member is fixedly connected with a first slider for matching with the slide groove. The first slider and the slide groove are slidably sealed. The first slider is located on a side of the first sliding member close to the partition. The driving rod passes through the first sliding member and is slidably matched with the first sliding member. The driving rod and the first sliding member are slidably sealed.

[0013] The second sliding member is slidably matched with the second tube cavity and is slidably sealed with the inner side wall of the second tube cavity. The second sliding member is located on the side of the first sliding member away from the partition. The second sliding member is fixedly connected to the end of the driving rod. The side wall of the second sliding member is fixedly connected with a second slider for matching with the slide groove, and the second slider is slidably sealed with the slide groove.

[0014] The side wall of the second tube cavity is provided with an air outlet. When the first sliding member is in contact with the partition plate, an edge of the air outlet away from the main tube body is flush with a surface of the first sliding member close to the main tube body.

[0015] The driving rod is driven by the first driver and is capable of driving the second sliding member into the main tube body.

[0016] Furthermore, a receiving groove is provided on one side of the partition close to the first sliding member, and an elastic member is received in the receiving groove, one end of the elastic member is connected to the receiving groove, and the other end extends toward the mouth of the receiving groove. In a natural state, the elastic member extends out of the receiving groove.

[0017] Furthermore, the gas path pipe structure also includes: a collecting pipe.

[0018] The collecting pipe is fixedly connected to the side wall of the branch pipe, the air outlet is communicated with the collecting pipe, and one end of the collecting pipe away from the branch pipe is closed by a sealing plate.

[0019] A third sliding member is provided in the collecting tube. Along the axial direction of the collecting tube, the third sliding member is slidably matched with the collecting tube. The third sliding member is provided with a through hole penetrating the third sliding member, a one-way valve is provided in the through hole, and the opening direction of the one-way valve is the direction where the sealing plate is located.

[0020] The sealing plate is provided with an output pipe for conducting gas out, and the output pipe has a switch mechanism.

[0021] Furthermore, a pressure sensor is installed on the inner side of the sealing plate, and when the third sliding member is in contact with the pressure sensor, a gap is left between the third sliding member and the sealing plate.

[0022] Furthermore, the gas path pipe structure also includes: a push rod.

[0023] The sealing plate is provided with a matching through hole which penetrates the sealing plate, and the push rod is slidably matched in the matching through hole and a sliding seal is formed between the two.

[0024] The push rod is driven by the second driver and can push the third sliding member to fit the side wall of the branch pipe.

[0025] A batch gallium nitride production system comprises: a gallium nitride production reactor, a raw gas supply pipeline, a raw gas supply device and the above-mentioned gas path pipe structure.

[0026] A plurality of gallium nitride production reactors are arranged in parallel, and a raw gas supply pipeline connects the gallium nitride production reactors and the raw gas supply device.

[0027] The raw gas supply pipeline of each gallium nitride production reactor is equipped with a gas pipeline pipe structure, the main pipe body of the gas pipeline pipe structure is connected to the raw gas supply pipeline, and the gas pipeline pipe structure is located at one end of the raw gas supply pipeline close to the gallium nitride production reactor.

[0028] The beneficial effects of the technical solution of the embodiment of the present invention include:

[0029] The gas path pipe structure provided in the embodiment of the present invention can realize the raw gas transportation and sample the raw gas according to actual needs. During the sampling process, the first sliding part and the second sliding part are used to isolate the sample, which is not only conducive to controlling the amount of a single sample, but also can avoid the sampling process from causing excessive interference to the normal raw gas transmission in the main pipe. In addition, it can ensure that the sample gas is completely discharged, reduce residue, and reduce interference with subsequent sampling.

[0030] On the other hand, when the next sampling is to be carried out, the driving rod drives the second sliding member into the main body again. At this time, since there is still a small amount of gas remaining between the first sliding member and the second sliding member from the last sampling, this part of the gas has been compressed in the process of the second sliding member approaching the first sliding member, which can promote the smooth separation of the first sliding member and the second sliding member. When the second sliding member re-enters the main body, it can ensure that there is a gap between the first sliding member and the second sliding member, so as to ensure that the gas in the main body can smoothly enter between the first sliding member and the second sliding member, and smoothly push the first sliding member back to the partition.

[0031] In general, the gas line pipe structure provided in the embodiment of the present invention can further improve the monitoring function of the gas line pipe, help determine the health of the entire gas line, help improve the accuracy of raw gas transportation, and have positive significance for reducing production losses.

[0032] The batch gallium nitride production system provided by the embodiment of the present invention can further improve the monitoring function of gas line pipes, help determine the health of the entire gas line, help improve the accuracy of raw gas transportation, and has positive significance for reducing production losses in batch production of gallium nitride. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0034] Figure 1 A schematic diagram of the structure of the gas circuit pipe fitting structure provided by an embodiment of the present invention (when the second sliding member enters the main pipe body);

[0035] Figure 2 This is a schematic diagram of the coordination between the branch pipe and the collecting pipe;

[0036] Figure 3 A schematic diagram of the structure of the gas path pipe fitting structure provided by an embodiment of the present invention (when the second sliding member has just entered the branch pipe);

[0037] Figure 4 A schematic diagram of the structure of the gas path pipe structure provided by an embodiment of the present invention (when the second sliding member and the first sliding member are just in contact with each other);

[0038] Figure 5 A schematic structural diagram of the gas path pipe structure provided in an embodiment of the present invention (after the second sliding member is fitted with the first sliding member and the third sliding member is reset).

[0039] Description of reference numerals:

[0040] Main body 100; branch pipe 200; partition 210; first tube cavity 220; second tube cavity 230; vent 240; slide groove 250; opening 260; air outlet 270; accommodating groove 280; elastic member 290; first sliding member 300; first slider 310; second sliding member 400; second slider 410; driving rod 500; collecting tube 600; sealing plate 610; output tube 620; pressure sensor 630; third sliding member 700; one-way valve 710; matching block 720; push rod 800. DETAILED DESCRIPTION

[0041] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0042] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0043] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0044] The terms “first”, “second”, “third”, etc. are only used for distinguishing descriptions and should not be understood as indicating or implying relative importance.

[0045] In addition, the terms "parallel", "vertical", etc. do not mean that the components must be absolutely parallel or vertical, but can be slightly tilted. For example, "parallel" only means that its direction is more parallel than "vertical", and does not mean that the structure must be completely parallel, but can be slightly tilted.

[0046] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "setting", "installation" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be a communication between the two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0047] The inventors of the present application have found through research that, in the prior art, even after raw gas testing has been carried out at the raw gas supply device, the problem of unqualified raw gas supply still occurs. The main reason for this is that there is a problem with the pipeline for transporting the raw gas, that is, the health problem of the transportation pipeline leads to changes in the flow rate, purity, etc. of the raw gas transportation.

[0048] In order to overcome the shortcomings of the prior art, please refer to Figure 1-Figure 2 The present embodiment provides a gas circuit pipe structure, which includes: a main pipe body 100, a branch pipe 200, a partition plate 210, a first sliding member 300, a second sliding member 400 and a driving rod 500.

[0049] The branch pipe 200 is connected to the side wall of the main body 100 and communicates with the main body 100, and the branch pipe 200 is arranged along the radial direction of the main body 100. The main body 100 is used for raw gas transportation, that is, the main body 100 is used to access the transportation channel of the raw gas.

[0050] The partition 210 is disposed in the branch pipe 200 and is perpendicular to the central axis of the branch pipe 200. The partition 210 divides the internal space of the branch pipe 200 into a first lumen 220 and a second lumen 230 that are independent of each other. The first lumen 220 is located at one end of the second lumen 230 away from the main body 100.

[0051] A vent hole 240 communicating with the external atmosphere is formed on the side wall of the first tube cavity 220 .

[0052] A slide groove 250 is provided on the inner wall of the second tube cavity 230, and the slide groove 250 extends along the length direction of the second tube cavity 230. The slide groove 250 extends from the partition 210 to the main tube body 100 and passes through the inner wall of the main tube body 100 close to the branch tube 200, that is, the slide groove 250 extends to the inner wall of the main tube body 100.

[0053] The driving rod 500 passes through the end of the branch pipe 200 away from the main body 100 and extends into the driving rod 500. The driving rod 500 extends along the axial direction of the branch pipe 200 and is coaxially arranged with the branch pipe 200. Along the axial direction of the branch pipe 200, the driving rod 500 is slidably matched with the branch pipe 200. The partition plate 210 is provided with an opening 260 for the driving rod 500 to pass through. The aperture of the opening 260 is larger than the outer diameter of the driving rod 500, and the opening 260 is coaxially arranged with the driving rod 500.

[0054] The first sliding member 300 is slidably matched with the second tube cavity 230 , the outer wall of the first sliding member 300 is in contact with the inner wall of the second tube cavity 230 , and the first sliding member 300 and the inner wall of the second tube cavity 230 are slidably sealed.

[0055] A first sliding block 310 for cooperating with the sliding groove 250 is fixedly connected to the side wall of the first sliding member 300 . The first sliding block 310 and the sliding groove 250 are slidingly sealed. The first sliding block 310 is located on a side of the first sliding member 300 close to the partition 210 .

[0056] The driving rod 500 passes through the first sliding member 300 and is slidably matched with the first sliding member 300 , and a sliding seal is formed between the driving rod 500 and the first sliding member 300 .

[0057] The second sliding member 400 is slidably matched with the second tube cavity 230 , the outer wall of the second sliding member 400 is in contact with the inner wall of the second tube cavity 230 , and the second sliding member 400 and the inner wall of the second tube cavity 230 are slidably sealed.

[0058] The second sliding member 400 is located on a side of the first sliding member 300 away from the partition 210, and the second sliding member 400 is fixedly connected to the inner end of the driving rod 500. A second sliding block 410 for cooperating with the slide groove 250 is fixedly connected to the side wall of the second sliding member 400, and the second sliding block 410 and the slide groove 250 are slidably sealed.

[0059] The side wall of the second tube cavity 230 is provided with an air outlet 270 which is arranged along the radial direction of the branch pipe 200 . When the first sliding member 300 is in contact with the partition plate 210 , the edge of the air outlet 270 away from the main body 100 is flush with the surface of the first sliding member 300 close to the main body 100 .

[0060] The driving rod 500 is driven by a first driver (not shown in the figure) and can drive the second sliding member 400 into the main tube 100 .

[0061] When the second sliding member 400 is just driven into the main body 100 by the driving rod 500 and the second sliding member 400 just completely enters the main body 100, the gas in the main body 100 can enter the branch pipe 200 and push the first sliding member 300 to fit with the partition plate 210. Figure 1 At this time, the air outlet 270 is located on a side of the first sliding member 300 close to the second sliding member 400 , and an edge of the air outlet 270 away from the main body 100 is flush with a surface of the first sliding member 300 close to the main body 100 .

[0062] Subsequently, the driving rod 500 can be used to drive the second sliding member 400 to move into the branch pipe 200. When the second sliding member 400 begins to enter the branch pipe 200, as shown in FIG. Figure 3 As shown, the second sliding member 400 and the second slider 410 together close the branch pipe 200 , and the gas in the main body 100 can no longer flow into the branch pipe 200 . More specifically, the gas in the main body 100 can no longer flow into the area between the first sliding member 300 and the second sliding member 400 .

[0063] At this time, the air outlet 270 can be controlled to open, and the driving rod 500 can be used to continue to drive the second sliding member 400 to move toward the first sliding member 300. In this way, the second sliding member 400 gradually moves closer to the first sliding member 300, and the gas between the first sliding member 300 and the second sliding member 400 can be squeezed out from the air outlet 270. When the second sliding member 400 and the first sliding member 300 are in contact with each other, as shown in FIG. Figure 4 As shown, the gas between the first sliding member 300 and the second sliding member 400 can be completely squeezed out, so that the sampling of the gas in the main tube 100 can be completed.

[0064] The gas line pipe structure is arranged at the tail end of the raw gas supply pipeline (i.e., the end close to the production equipment), so that it is convenient to sample and analyze the gas at the tail end of the raw gas supply pipeline, and judge the health of the raw gas supply pipeline based on the comparison of the components of the tail end gas and the raw gas supply device. For example, if the gas concentration or impurity content at the tail end of the raw gas supply pipeline increases, it means that there is a problem with the health of the raw gas supply pipeline.

[0065] Among them, while the gas path pipe structure is used to realize the raw gas transportation, the raw gas can be sampled according to actual needs. During the sampling process, the first sliding member 300 and the second sliding member 400 are used to isolate the sample, which is not only conducive to controlling the amount of a single sample, but also can avoid the sampling process from causing excessive interference to the normal raw gas transmission in the main pipe 100. In addition, it can ensure that the sample gas is completely discharged, reduce residue, and reduce interference with subsequent sampling.

[0066] On the other hand, when the next sampling is to be carried out, the driving rod 500 drives the second sliding member 400 toward the main body 100 again. At this time, since there is still a small amount of gas remaining between the first slider 310 and the second slider 410 from the last sampling, this part of the gas has been compressed in the process of the second sliding member 400 approaching the first sliding member 300, which can promote the smooth separation of the first sliding member 300 and the second sliding member 400. When the second sliding member 400 re-enters the main body 100, it can ensure that there is a gap between the first sliding member 300 and the second sliding member 400, so that the gas in the main body 100 can smoothly enter between the first sliding member 300 and the second sliding member 400, and smoothly push the first sliding member 300 back to the partition 210.

[0067] In general, the gas line pipe structure provided in this embodiment can further improve the monitoring function of the gas line pipe, help determine the health of the entire gas line, help improve the accuracy of raw gas transportation, and have positive significance for reducing production losses.

[0068] In this embodiment, a receiving groove 280 is provided on one side of the partition plate 210 close to the first sliding member 300, the opening 260 is located in the receiving groove 280, an elastic member 290 is accommodated in the receiving groove 280, the elastic member 290 extends along the axial direction of the branch pipe 200, one end of the elastic member 290 is connected to the receiving groove 280, and the other end extends toward the mouth of the receiving groove 280. In a natural state, the elastic member 290 extends outside the receiving groove 280, that is, the natural length of the elastic member 290 is greater than the depth of the receiving groove 280.

[0069] The elastic coefficient of the elastic member 290 needs to be controlled so that when the first sliding member 300 is pushed toward the partition 210 by the gas in the main body 100, the first sliding member 300 can compress the elastic member 290 and fit with the partition 210, that is, the first sliding member 300 can completely press the elastic member 290 into the receiving groove 280. The specific elastic coefficient of the elastic member 290 can be determined according to the gas pressure of the raw material gas transported in the main body 100.

[0070] This design can effectively reduce the impact strength of the first sliding member 300 when it impacts the partition plate 210 , thereby playing a buffering role and reducing the mechanical damage to the partition plate 210 and the first sliding member 300 .

[0071] On the other hand, when sampling again, it is also convenient for the first sliding member 300 to be separated from the partition 210 smoothly, so that when the gas in the main body 100 enters the branch pipe 200 again, the first sliding member 300 and the elastic member 290 can work together to buffer the airflow to reduce the impact intensity of the airflow.

[0072] Furthermore, the gas line pipe structure also includes: a collecting pipe 600.

[0073] The collecting pipe 600 is fixedly connected to the side wall of the branch pipe 200 and is arranged along the radial direction of the branch pipe 200 . The air outlet 270 is communicated with the collecting pipe 600 . One end of the collecting pipe 600 away from the branch pipe 200 is closed by a sealing plate 610 .

[0074] A third sliding member 700 is provided in the collecting tube 600. The third sliding member 700 is slidably fitted in the collecting tube 600 along the axial direction of the collecting tube 600. The third sliding member 700 is provided with a through hole running through it, and a one-way valve 710 is provided in the through hole. The opening direction of the one-way valve 710 is the direction where the sealing plate 610 is located, that is, the gas can flow from the side of the third sliding member 700 close to the air outlet 270 to the side of the third sliding member 700 close to the sealing plate 610 by pushing open the one-way valve 710, but cannot flow from the side of the third sliding member 700 close to the sealing plate 610 to the side of the third sliding member 700 close to the air outlet 270.

[0075] The sealing plate 610 is provided with an output tube 620 for conducting gas out. The output tube 620 has a switch mechanism. The switch mechanism may be a valve, but is not limited thereto. The switch mechanism is used to control the opening and closing of the output tube 620 to conduct sample gas out.

[0076] Through the above design, the third sliding member 700 is initially attached to the side wall of the branch pipe 200, that is, the third sliding member 700 is located at one end of the collecting pipe 600 close to the branch pipe 200. When the second sliding member 400 and the first sliding member 300 squeeze the gas into the gas outlet 270, the output pipe 620 is controlled to open, and the gas entering the collecting pipe 600 from the gas outlet 270 pushes the third sliding member 700 toward the end where the sealing plate 610 is located, until the third sliding member 700 is attached to the sealing plate 610, as shown in FIG. Figure 4 shown.

[0077] After the second sliding member 400 and the first sliding member 300 squeeze all the gas into the collecting tube 600, the third sliding member 700 fits with the sealing plate 610, and the air pressure on the side of the third sliding member 700 close to the air outlet 270 is used as the reference air pressure. Subsequently, the third sliding member 700 is pushed back to its original position (i.e., the third sliding member 700 is pushed back to fit with the side wall of the branch pipe 200). During this process, the output pipe 620 is controlled to be closed, so that the gas on the side of the third sliding member 700 close to the air outlet 270 passes smoothly through the one-way valve 710 and enters the side of the third sliding member 700 close to the sealing plate 610. When the third sliding member 700 fits with the side wall of the branch pipe 200 again, the gas on the side of the third sliding member 700 close to the air outlet 270 passes through the one-way valve 710 and enters the side of the third sliding member 700 close to the sealing plate 610. Figure 5 shown.

[0078] During the next sampling, when the second sliding member 400 and the first sliding member 300 squeeze the gas into the air outlet 270, the output tube 620 is controlled to open, and the gas entering the collection tube 600 from the air outlet 270 pushes the third sliding member 700 toward the end where the sealing plate 610 is located. In this process, the third sliding member 700 smoothly pushes the gas sample extracted last time (the gas located on the side of the third sliding member 700 close to the sealing plate 610) from the output tube 620, thereby facilitating the full collection of the sample gas and avoiding mutual interference between sample gases of different batches.

[0079] The minimum pressure required to open the one-way valve 710 may be set to be slightly greater than the reference air pressure.

[0080] In this embodiment, a matching block 720 adapted to the air outlet 270 is fixedly connected to one side of the third sliding member 700 close to the air outlet 270, and the through hole is located at the matching block 720. When the third sliding member 700 fits against the side wall of the branch pipe 200, the matching block 720 can fill the air outlet 270, thereby facilitating the full discharge of the gas in the air outlet 270.

[0081] Furthermore, a pressure sensor 630 is installed on the inner side of the sealing plate 610, and when the third sliding member 700 is fitted with the pressure sensor 630, a gap is left between the third sliding member 700 and the sealing plate 610. With this design, after the second sliding member 400 and the first sliding member 300 squeeze all the gas into the collecting tube 600, since the third sliding member 700 can fit with the pressure sensor 630, the gas pressure in the main body 100 can be inferred through the data of the pressure sensor 630 and the compression ratio of the gas after entering the collecting tube 600, thereby realizing the detection and monitoring of the gas pressure in the main body 100.

[0082] Optionally, the gas circuit pipe structure further includes: a push rod 800 .

[0083] The sealing plate 610 is provided with a matching through hole which penetrates the sealing plate 610, and the push rod 800 is slidably matched in the matching through hole and a sliding seal is formed between the two. The matching through hole and the push rod 800 are both arranged along the axial direction of the collecting tube 600.

[0084] The push rod 800 is driven by a second driver (not shown in the figure) and can push the third sliding member 700 to fit the side wall of the branch pipe 200 , that is, the push rod 800 is used to reset the third sliding member 700 .

[0085] The present embodiment also provides a batch gallium nitride production system, which includes: a gallium nitride production reactor (not shown in the figure), a raw gas supply pipeline (not shown in the figure), a raw gas supply device (not shown in the figure) and the above-mentioned gas path pipe structure.

[0086] A plurality of gallium nitride production reactors are arranged in parallel, and a raw gas supply pipeline connects the gallium nitride production reactors and the raw gas supply device.

[0087] The raw gas supply pipeline of each gallium nitride production reactor is equipped with a gas pipeline pipe structure, the main pipe body 100 of the gas pipeline pipe structure is connected to the raw gas supply pipeline, and the gas pipeline pipe structure is located at one end of the raw gas supply pipeline close to the gallium nitride production reactor.

[0088] The batch gallium nitride production system can monitor and track the health of its raw gas supply pipeline through the gas pipeline structure, thereby ensuring the accuracy of the raw gas supply.

[0089] In summary, the gas circuit pipe structure provided by the embodiment of the present invention can further improve the monitoring function of the gas circuit pipe, help determine the health of the entire gas circuit, help improve the accuracy of raw gas delivery, and have positive significance for reducing production losses. The batch gallium nitride production system provided by the embodiment of the present invention can further improve the monitoring function of the gas circuit pipe, help determine the health of the entire gas circuit, help improve the accuracy of raw gas delivery, and have positive significance for reducing production losses in batch production of gallium nitride.

[0090] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A gas pipe structure, characterized in that: include: A main body, a branch pipe, a partition, a first sliding member, a second sliding member and a driving rod; The branch pipe is connected to the side wall of the main pipe and communicates with the main pipe; The partition is arranged in the branch pipe and is arranged perpendicular to the central axis of the branch pipe. The partition divides the internal space of the branch pipe into a first tube cavity and a second tube cavity which are independent of each other. The first tube cavity is located at an end of the second tube cavity away from the main tube body. A vent hole communicating with the external atmosphere is opened on the side wall of the first tube cavity. The inner wall of the second tube cavity is provided with a slide groove, the slide groove extends along the length direction of the second tube cavity, the slide groove extends from the partition to the middle of the main tube body and passes through the inner wall of the main tube body; The driving rod passes through the end of the branch pipe away from the main pipe body and extends along the axial direction of the branch pipe; along the axial direction of the branch pipe, the driving rod is slidably matched with the branch pipe; the partition plate is provided with an opening for the driving rod to pass through, and the aperture of the opening is larger than the outer diameter of the driving rod; The first sliding member is slidably matched with the second tube cavity and is slidably sealed with the inner side wall of the second tube cavity. The side wall of the first sliding member is fixedly connected with a first slider for matching with the slide groove. The first slider and the slide groove are slidably sealed. The first slider is located on a side of the first sliding member close to the partition. The driving rod passes through the first sliding member and is slidably matched with the first sliding member. The driving rod and the first sliding member are slidably sealed. The second sliding member is slidably matched with the second tube cavity and is slidably sealed with the inner side wall of the second tube cavity. The second sliding member is located on the side of the first sliding member away from the partition. The second sliding member is fixedly connected to the end of the driving rod; the side wall of the second sliding member is fixedly connected with a second sliding block for matching with the sliding groove, and the second sliding block is slidably sealed with the sliding groove; The side wall of the second tube cavity is provided with an air outlet, and when the first sliding member is in contact with the partition, the edge of the air outlet away from the main tube body is flush with the surface of the first sliding member close to the main tube body; The driving rod is driven by the first driver and is capable of driving the second sliding member into the main tube; The gas path pipe structure also includes: a collecting pipe; The collecting pipe is fixedly connected to the side wall of the branch pipe, the air outlet is communicated with the collecting pipe, and one end of the collecting pipe away from the branch pipe is closed by a sealing plate; A third sliding member is provided in the collecting tube; along the axial direction of the collecting tube, the third sliding member is slidably matched with the collecting tube; the third sliding member is provided with a through hole passing through it, a one-way valve is provided in the through hole, and the opening direction of the one-way valve is the direction where the sealing plate is located; The sealing plate is provided with an output pipe for conducting gas out, and the output pipe has a switch mechanism; After the second sliding member and the first sliding member squeeze all the gas into the collecting tube, the third sliding member fits against the sealing plate, and the gas pressure on the side of the third sliding member close to the gas outlet is used as the reference gas pressure; The minimum pressure required to open the one-way valve is set to be greater than the reference air pressure.

2. The gas line pipe structure according to claim 1, characterized in that: A receiving groove is provided on one side of the partition close to the first sliding member, and an elastic member is accommodated in the receiving groove. One end of the elastic member is connected to the receiving groove, and the other end extends toward the mouth of the receiving groove; in a natural state, the elastic member extends out of the receiving groove.

3. The gas line pipe structure according to claim 1, characterized in that: A pressure sensor is installed on the inner side of the sealing plate. When the third sliding member is in contact with the pressure sensor, a gap is left between the third sliding member and the sealing plate.

4. The gas line pipe structure according to claim 1, characterized in that: The gas circuit pipe structure also includes: a push rod; The sealing plate is provided with a matching through hole penetrating therethrough, and the push rod is slidably matched with the matching through hole and a sliding seal is formed between the two; The push rod is driven by the second driver and can push the third sliding member to fit the side wall of the branch pipe.

5. A batch gallium nitride production system, characterized in that: include: A gallium nitride production reactor, a raw gas supply pipeline, a raw gas supply device, and a gas pipeline structure as claimed in any one of claims 1 to 4; A plurality of the gallium nitride production reactors are arranged in parallel, and the raw gas supply pipeline connects the gallium nitride production reactors and the raw gas supply device; The raw gas supply pipeline of each gallium nitride production reactor is equipped with the gas pipeline pipe structure, the main pipe body of the gas pipeline pipe structure is connected to the raw gas supply pipeline, and the gas pipeline pipe structure is located at one end of the raw gas supply pipeline close to the gallium nitride production reactor.

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