Method for manufacturing micro-mold and micro-mold

Abstract

The application provides a micro-mold preparation method and a micro-mold, relates to the technical field of micro-molds, and the micro-mold preparation method comprises the following steps: preparing a nanobulk with a required grain size; cutting a template piece on the nanobulk; grinding the thickness of the template piece to a preset thickness; cutting a type hole on the template piece; and stacking and fixing at least two template pieces in sequence to form a micro-mold, and making the at least two type holes communicate with each other to form a type cavity. The micro-mold preparation method provided by the application can reduce the preparation difficulty of the micro-mold, the micro-mold is not prone to deformation in the preparation process, the preparation precision of the micro-mold can be improved, the grain size of the micro-mold is easy to control, the structural strength and toughness of the micro-mold are enhanced, and the service life of the micro-mold is prolonged.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of micro-mold, and more particularly relates to a micro-mold preparation method and a micro-mold. BACKGROUND

[0002] A micro-mold is a mold with micro-features of sub-millimeter or micrometer level in at least two dimensions, which is widely used in microelectronics, micromechanics, biomedical engineering, optics and chemical engineering, and can realize high-precision processing and manufacturing, providing important support for the development of micro-nano technology.

[0003] In the design and manufacturing process of a micro-mold, precision and stability are crucial factors. The preparation of a micro-mold not only requires the mold itself to have extremely high dimensional accuracy and surface quality, but also needs to consider the selection of the material, the optimization of the preparation method, and the durability of the mold, etc.

[0004] At present, when a micro-mold is machined by a traditional cutting process, the traditional cutting preparation method will generate a large machining stress and heat during the machining process, which is easy to cause the shape of the micro-mold to change and affect the dimensional accuracy of the micro-mold. SUMMARY

[0005] The purpose of the embodiments of the present application is to provide a micro-mold preparation method and a micro-mold, so as to solve the problem that the traditional cutting process in the prior art cannot guarantee the dimensional accuracy of the micro-mold.

[0006] To achieve the above-mentioned purpose, in a first aspect, the present application provides a micro-mold preparation method, comprising:

[0007] Preparation of a nanobulk with a required grain size;

[0008] Cutting a template piece on the nanobulk;

[0009] Grinding the thickness of at least two template pieces to a respective preset thickness;

[0010] Cutting a type hole on the template piece;

[0011] Stacking and arranging the at least two template pieces in sequence, and making the type holes on all the template pieces communicate with each other to form a type cavity;

[0012] Fixing and connecting each two adjacent template pieces to form the micro-mold.

[0013] In some embodiments of the first aspect, grinding the thickness of the template piece to a respective preset thickness comprises:

[0014] Fixing the template piece on a grinding jig;

[0015] The template piece is ground multiple times in sequence using multiple grinding pieces with increasing mesh numbers until the thickness of the template piece reaches the preset thickness.

[0016] In some embodiments of the first aspect, the template piece is fixed to the grinding jig using an adhesive.

[0017] In some embodiments of the first aspect, the type hole is cut on the template piece using a femtosecond laser.

[0018] In some embodiments of the first aspect, the preset thickness is not greater than 50 μm.

[0019] In some embodiments of the first aspect, the thickness of the template piece before grinding is 5-20 times the preset thickness.

[0020] In some embodiments of the first aspect, after cutting the type hole on the template piece, the method further comprises:

[0021] The template piece and the grinding jig are immersed in a cleaning solution to separate the template piece from the grinding jig and remove residual adhesive on the surface of the template piece.

[0022] In some embodiments of the first aspect, before grinding the template piece to a preset thickness, the method further comprises surface treatment of the template piece.

[0023] In some embodiments of the first aspect, the method for preparing a nanobulk with a desired grain size comprises:

[0024] The raw material is extruded through an extrusion channel formed on the extrusion die by a rated pressure; the extrusion channel comprises a first straight section, a corner section and a second straight section connected in sequence, and the first straight section and the second straight section are arranged at an angle;

[0025] The above steps are repeated to obtain a nanobulk with a grain size corresponding to the number of repetitions.

[0026] In a second aspect, the application also provides a micro-mold prepared by the method for preparing a micro-mold according to any one of the first aspect and any optional embodiment thereof, the micro-mold comprising at least two template pieces stacked, the template pieces being provided with type holes, the type holes on all the template pieces being connected to each other and forming a type cavity.

[0027] The micro-mold preparation method and the beneficial effects of the micro-mold provided by the application are as follows: after a template piece is cut on a nanobulk with a required grain size, the template piece is sequentially ground and cut to form template pieces corresponding to different positions of the micro-mold, and finally, the micro-mold is formed by stacking and fixing a plurality of template pieces. Compared with the prior art, the template piece is relatively simple to cut and grind, and the shape of the hole cut on the template piece is also more stable. The structure stability of the micro-mold formed by stacking and fixing a plurality of template pieces is good, and the cavity is not easy to deform, thereby reducing the preparation difficulty of the micro-mold. Not only the grain size of each part of the micro-mold can be controlled, the structural strength of the micro-mold is improved, but also the shape and precision of the cavity in the micro-mold can be ensured. BRIEF DESCRIPTION OF DRAWINGS

[0028] In order to more clearly illustrate the technical solutions in the embodiments of the application, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description are only some embodiments of the application, and other drawings can be obtained by those skilled in the art without creative labor.

[0029] Figure 1 The structure schematic diagram of the micro-mold in an exemplary embodiment of the application;

[0030] Figure 2 The flow chart of the micro-mold preparation method in an exemplary embodiment of the application;

[0031] Figure 3 The structure schematic diagram of the extrusion mold in an exemplary embodiment of the application;

[0032] Figure 4 The structure schematic diagram of the template piece cut from the raw material in an exemplary embodiment of the application;

[0033] Figure 5 The structure schematic diagram of the template piece cut from the raw material in another exemplary embodiment of the application;

[0034] Figure 6 The structure schematic diagram of the template piece fixed to the grinding jig in an exemplary embodiment of the application;

[0035] Figure 7 The structure schematic diagram of the femtosecond laser ablation device in an exemplary embodiment of the application;

[0036] Figure 8 The exploded view of the micro-mold formed by stacking a plurality of layer workpieces in an exemplary embodiment of the application.

[0037] In the drawings, various reference signs represent:

[0038] 100 - micro-mold; 101 - cavity;

[0039] 200 - extrusion mold; 210 - mold body; 211 - extrusion channel; 220 - pressure head;

[0040] 300 - raw material;

[0041] 400 - nanoblocks;

[0042] 500 - template piece; 501 - hole;

[0043] 600 - polishing jig;

[0044] 700 - femtosecond laser ablation device; 710 - femtosecond laser; 720 - attenuator; 730 - shutter; 740 - total reflection mirror; 750 - focusing objective; 760 - motion platform; 761 - driving mechanism; 770 - controller; 780 - charge coupled device. DETAILED DESCRIPTION

[0045] In order to make the technical problems to be solved, technical solutions and beneficial effects of the present application clearer, the present application will be further described in detail below in combination with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and not intended to limit the present application.

[0046] It should be noted that when an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or indirectly connected to the other element.

[0047] It should be understood that the terms "length", "width", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only used to facilitate the description of the present application and simplify the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0048] In addition, the terms "first", "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise specifically limited.

[0049] In a first aspect, the embodiments of the present application provide a method for manufacturing a micro-mold 100. As shown in Figure 1 The manufactured micro-mold 100 is provided with a cavity 101, which can be through or non-through, and is used to form a part with a corresponding shape inside the cavity 101. It can be understood that the shape of the micro-mold 100 and the shape of the cavity 101 can be arbitrary.

[0050] As shown in Figure 2 The method for manufacturing the micro-mold includes steps 101 to 106.

[0051] In step 101, a nanobulk with a required grain size is manufactured.

[0052] The nanobulk is a nanoscale material that can be manufactured by changing the grain size of the metal material. The raw material for manufacturing the nanobulk can be pure copper, pure aluminum, pure nickel, or an alloy of at least two of the above materials, and can also be other metal materials with good plasticity and processing performance. In addition, according to the specific performance requirements of the micro-mold, the raw material 300 material added with trace alloy elements or subjected to specific heat treatment can be used to further optimize the performance of the micro-mold.

[0053] The grain size refers to the average size of a single grain inside the material. Smaller grain size can improve the hardness and wear resistance of the micro-mold, thereby prolonging the service life of the micro-mold. The nanobulk with a suitable grain size can be manufactured according to the use requirements of the micro-mold.

[0054] In some embodiments, the method for manufacturing the nanobulk with the required grain size can include:

[0055] Extruding the raw material through the extrusion channel of the extrusion die under a rated pressure;

[0056] Repeating the extrusion of the raw material multiple times to obtain a nanobulk with a grain size corresponding to the number of extrusions.

[0057] Specifically, as shown in Figure 3As shown, the extrusion die 200 includes a die body 210 and a pressure head 220, the die body 210 is provided with an extrusion channel 211, the extrusion channel 211 includes a first straight section 211a, a corner section 211b and a second straight section 211c, the first straight section 211a and the second straight section 211c are respectively communicated with both ends of the corner section 211b, the first straight section 211a is open at one end away from the corner section 211b as the inlet of the extrusion channel 211, and the second straight section 211c is open at one end away from the corner section 211b as the outlet of the extrusion channel 211. Wherein, the central angle corresponding to the corner section 211b can be arbitrary, in this embodiment, the central angle corresponding to the corner section is 90°, that is, the first straight section 211a and the second straight section 211c are perpendicular to each other.

[0058] The shape of the raw material 300 can be cylindrical or other shapes. The cross-sectional shape of the extrusion channel 211 is the same as the cross-sectional shape of the raw material 300, so that the raw material 300 can enter the extrusion channel 211. The pressure head 220 is movably arranged at the inlet of the extrusion channel 211, and can push the raw material 300 from the inlet into the extrusion channel 211 at a rated pressure, so that the raw material 300 passes through the first straight section 211a, the corner section 211b and the second straight section 211c in turn. When the raw material 300 passes through the corner section 211b, shear deformation will occur, so that the coarse grains inside the raw material 300 are crushed and become smaller. After the raw material 300 is deformed through the corner section 211b, it enters the second straight section 211c and is limited by the shape of the second straight section 211c, so that the shape of the raw material 300 after being extruded is basically the same as the shape before being extruded, thereby enabling the raw material 300 to be extruded repeatedly. Wherein, the pressure source of the pressure head 220 can be hydraulic or pneumatic.

[0059] By repeatedly extruding the raw material 300, the cumulative strain of each deformation of the raw material 300 can obtain a larger total strain, so as to crush the coarse grains in the raw material 300 into smaller ultra-fine grain level grains. It can be understood that the grain size of the nanobulk finally obtained by repeatedly extruding the raw material 300 different number of times is also different, and different grain size nanobulk can be prepared by changing the number of extrusion of the raw material 300.

[0060] For example, when pure copper is used as the raw material 300, the raw material 300 can be repeatedly extruded 4 times to make the grain size inside the raw material 300 reach the ultra-fine grain level, and with the increase of the number of extrusion, the grain size of the raw material 300 is continuously refined and homogenized, and when the raw material 300 is repeatedly extruded 8 times, the grain size of the raw material 300 reaches the minimum, and when the number of extrusion continues to increase, the grain size of the raw material 300 changes little. Therefore, the nanoblocks with different grain sizes can be prepared by repeatedly extruding the raw material 4 times, 6 times or 8 times.

[0061] In addition, it can be understood that when a cylindrical raw material is used, the nanoblock obtained after repeatedly extruding the raw material is also cylindrical.

[0062] In step 102, a template piece is cut on the nanoblock.

[0063] Specifically, a wire cutting device can be used to cut the template piece on the nanoblock. As shown in Figure 4 When the nanoblock 400 is cylindrical, a rectangular or other shaped template piece 500 can be cut along the axial direction of the nanoblock 400, so that the maximum length of the template piece 500 obtained is the axial length of the nanoblock 400, and the maximum width can be approximately the diameter of the nanoblock, so that a template piece 500 with a larger area is obtained. As shown in Figure 5 When cutting the template piece 500, the nanoblock 400 can also be cut along the radial direction to cut a circular template piece 500, which can save the material of the nanoblock 400, and when multiple template pieces 500 with the same grain size are needed, multiple template pieces 500 can also be cut on the same nanoblock 400.

[0064] The shape of the template piece 500 should be the same as the cross-sectional outer contour shape of the micro-mold 100, and the template piece 500 can be used as part of the micro-mold 100, so that the micro-mold 100 can be formed by stacking multiple template pieces 500.

[0065] In step 103, at least two template pieces are ground to a respective predetermined thickness.

[0066] The at least two template pieces can be cut on the same nanoblock, or can be cut on nanoblocks with different grain sizes respectively, and can be determined according to the grain size required by each template piece.

[0067] Grinding the template pieces can reduce their thickness and improve their surface quality, facilitating subsequent stacking and fixing. The preset thickness of different template pieces can be the same or different. The preset thickness can be adjusted based on the subsequent processing requirements for the template pieces, the height of the micromold, and the number of template pieces that make up the micromold, ensuring that the base height formed by stacking multiple template pieces meets the design requirements.

[0068] In some embodiments, the method of grinding the template members to their respective predetermined thicknesses may include:

[0069] Fix the template to the grinding jig;

[0070] The template piece is ground multiple times in sequence using a plurality of grinding pieces with increasing mesh sizes until the thickness of the template piece reaches the corresponding preset thickness.

[0071] like Figure 6 As shown, the lapping jig 600 can be a platform of any shape. The upper surface of the lapping jig 600 is required to be flat so that the template 500 can be evenly attached to the upper surface of the lapping jig 600 to prevent bending or deformation of the template 500 during the lapping process. In some embodiments, an adhesive can be used to secure the template 500 to the lapping jig 600. For example, the template 500 is bonded to the lapping jig 600 using glue 502 to maintain its position during lapping.

[0072] The grinding member can be sandpaper. When grinding the template 500, 1500#, 2000#, and 3000# sandpaper can be used sequentially to grind the template 500. The higher the grit of the sandpaper, the finer the grinding effect, and the lower the surface roughness of the template 500 after grinding. Alternatively, the grinding member can be a grinding wheel or oilstone.

[0073] Specifically, you can first use 1500# sandpaper to coarsely grind the template to quickly remove large uneven parts on the template surface, then use 2000# sandpaper to perform medium grinding on the template, and finally use 3000# sandpaper to finely grind the template to obtain a template with high precision and a smooth surface. This step-by-step grinding method not only improves grinding efficiency, but also ensures that the thickness and surface quality of the template meet the design requirements, facilitating subsequent processing of the template.

[0074] During the grinding process, ensure uniform contact between the grinding piece and the template to avoid excessive local pressure that may cause scratches or uneven wear on the template. Furthermore, the grinding piece should be kept clean during grinding to prevent sand particles from falling off and contaminating the surface of the template. Before and after each replacement of the grinding piece, the template surface can be cleaned with a dust-free cloth or a special cleaning agent to ensure uniformity and consistency in the grinding effect. The grinding process can be performed manually or automatically using grinding equipment, which is not limited in this embodiment.

[0075] In some embodiments, the template member may be surface treated before being ground to a predetermined thickness.

[0076] Specifically, after cutting the template part out on the nano block, the surface of the template part can be repeatedly polished with 1500# sandpaper to remove the oxide layer on the surface of the template part. The template part can then be soaked in anhydrous ethanol and cleaned with an ultrasonic cleaner for 10 to 15 minutes until the surface of the template part is clean and bright, so that the surface of the template part is free of impurities in subsequent grinding, avoiding interference with grinding and reducing the occurrence of defects during grinding.

[0077] In step 104 , a mold hole is cut into each template piece.

[0078] The shape of the mold hole is the same as the cross-sectional shape of the mold cavity at the micro-mold position corresponding to the template piece, so that after the multiple template pieces are stacked in sequence, the multiple mold holes are connected to form the mold cavity.

[0079] In some embodiments, a femtosecond laser may be used to cut the holes in the template piece.

[0080] Specifically, a femtosecond laser ablation device can be used to perform femtosecond laser cutting on the template. Figure 7 As shown, the femtosecond laser ablation device 700 includes a femtosecond laser 710 , an attenuation plate 720 , a shutter 730 , a total reflection mirror 740 , a focusing objective lens 750 and a motion platform 760 .

[0081] The femtosecond laser 710 has a central wavelength of 800 nm, a pulse width of 35 fs, a maximum average power of 4 W, and a maximum repetition rate of 1 kHz. The output of the femtosecond laser 710 is connected to the input of the attenuation plate 720, which is connected to the input of the shutter 730. The output of the shutter 730 is connected to the reflective surface of the total reflection mirror 740 and is reflected by the total reflection mirror 740 to the input of the focusing lens 750. The output of the focusing lens 750 is positioned downward, and the motion platform 760 is located below the focusing lens 750. The motion platform 760 is provided with a drive mechanism 761 that can drive the motion platform 760 to move in the X-axis, Y-axis, or Z-axis directions.

[0082] The femtosecond laser 710 further comprises a controller 770, which can be a computer, and a charge-coupled device 780, the controller 770 being connected with the shutter 730 and the driving mechanism 761 of the motion platform 760, on one hand, the controller 770 can control the opening and closing of the shutter 730, and on the other hand, the driving mechanism 761 can control the movement of the motion platform 760.

[0083] In operation, the template piece 500 is placed on the upper surface of the motion platform 760 together with the grinding jig 600, so that the template piece 500 is below the focusing objective 750. The femtosecond laser emitted by the femtosecond laser 710 is irradiated to the side of the template piece 500 after passing through the attenuator 720, the shutter 730, the total reflection mirror 740 and the focusing objective 750 in sequence. First, the movement of the motion platform 760 in the Z-axis is adjusted so that the light spot of the femtosecond laser is accurately on the surface of the template piece 500, and then the motion platform 760 is controlled by the controller 770 to drive the template piece 500 to move according to the preset trajectory, so that the femtosecond laser cuts the corresponding contour shape on the template piece 500, thereby forming a hole with the corresponding shape on the template piece 500.

[0084] In the embodiment, the controller 770 is further connected with the other side of the total reflection mirror 740 through the charge-coupled device 780, so that the position and energy distribution of the light spot in the laser ablation process can be monitored in real time through the charge-coupled device 780, thereby realizing accurate monitoring and adjustment of the ablation process. The charge-coupled device 780 can capture image information in the laser ablation process and transmit the information to the controller 770, and the controller 770 can adjust the parameters of the laser in real time according to the image information, so as to ensure that the ablation effect reaches the expected target.

[0085] In some embodiments, when the femtosecond laser is used to cut a hole on the template piece, the preset thickness is not greater than 50 μm, so as to ensure that the femtosecond laser can penetrate the template piece to cut the hole. In the embodiment, the preset thickness is 30-50 μm.

[0086] In some embodiments, the initial thickness of the template piece is 5-20 times the thickness of the template piece.

[0087] The initial thickness of the template piece is the thickness of the template piece after being cut from the nanometer block and before being ground. By making the initial thickness of the template piece larger, on one hand, the difficulty of cutting the template piece from the nanometer block can be reduced, and on the other hand, the template piece has sufficient thickness for multiple grinding, so that the template piece can be accurately ground to the preset thickness, thereby ensuring the grinding accuracy and surface quality of each template piece.

[0088] In some embodiments, after the hole is cut on the template piece, the template piece and the grinding jig can be soaked in a cleaning liquid together, so as to separate the template piece from the grinding jig and clean the adhesive remaining on the surface of the template piece.

[0089] The cleaning liquid can be an alcohol solution, which can melt the adhesive between the template pieces and the grinding tool by soaking, so as to realize non-damage separation of the template pieces, clean the adhesive residues on the surface of the template pieces, and make the surface of the layer workpiece clean and neat.

[0090] In step 105, the at least two template pieces are sequentially stacked and arranged, and the mold holes on all the template pieces are connected to form a mold cavity.

[0091] The base forming the micro-mold is fixed, and the at least two mold holes are connected to form a mold cavity.

[0092] Specifically, as shown in Figure 7 Each template piece 500 can have the same or different grain size, and the outer contour shape of each template piece 500 corresponds to the cross-sectional outer contour shape of the micro-mold 100 at different heights. The contour of each mold hole 501 corresponds to the contour shape of the mold cavity 101 at different heights. According to the position of each template piece 500 corresponding to the micro-mold 100, the plurality of template pieces 500 are sequentially stacked and arranged, and the plurality of mold holes 501 are connected to form the mold cavity 101 of the micro-mold 100.

[0093] In step 106, the adjacent two template pieces are fixedly connected to form the micro-mold.

[0094] The laser welding technology can be used between the adjacent two template pieces 500, and by accurately controlling the intensity and position of the laser beam, micron-level welding precision can be achieved between the template pieces 500. The laser welding can not only ensure the close combination between the layers, but also will not cause thermal damage to the internal structure of the micro-mold 100, thereby maintaining the high precision and high stability of the micro-mold 100.

[0095] In summary, the preparation method of the micro-mold provided by the present application can obtain a nanoblock with a required grain size by repeatedly extruding the raw material multiple times, and then cut the template pieces on the nanoblock. The template pieces corresponding to different positions of the micro-mold are obtained by sequentially grinding and femtosecond laser cutting the template pieces. Finally, the plurality of template pieces are stacked and fixed to form the micro-mold. The grain size of the micro-mold can be easily controlled, the structural strength of the micro-mold can be ensured, and the shape and precision of the mold cavity in the micro-mold can be ensured. The process is simple, convenient to operate, and effectively reduces the difficulty of preparing the micro-mold.

[0096] In a second aspect, the embodiments of the present application provide a micro-mold prepared by the preparation method of the micro-mold in the first aspect.

[0097] Specifically, as shown in Figure 1 and Figure 7As shown, the micro-mold 100 provided by the present application comprises at least two template pieces 500 stacked together, and the template pieces 500 are provided with a type hole 501, and the at least two type holes 501 are communicated with each other and form a type cavity 101.

[0098] Wherein, the grain size of each template piece 500 is controlled by extruding the raw material 300 for different times, and the grain size of the template pieces 500 at different positions can be the same or different. In the embodiment, the grain size of each template piece 500 from left to right is 7 μm, 0.79 μm, 0.51 μm and 0.51 μm respectively. Figure 7 As shown, the grain size of each template piece 500 from left to right is 7 μm, 0.79 μm, 0.51 μm and 0.51 μm respectively. And the type hole 501 on the template piece 500 is formed by femtosecond laser cutting, and has high precision. The micro-mold 100 composed of the plurality of template pieces 500 has the advantages of easy processing, high precision, high surface quality and high mechanical properties.

[0099] The above only describes the preferred embodiments of the present application and is not intended to limit the present application, and any modifications, equivalent replacements and improvements made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A method for producing a micro mold, characterized by, include: Preparation of a nano-block having a desired grain size, comprising: extruding a raw material through an extrusion channel provided on an extrusion die at a rated pressure; the extrusion channel comprising a first straight segment, a corner segment, and a second straight segment connected in sequence, the first straight segment and the second straight segment being arranged at an angle; repeating the above steps to obtain a nano-block having a grain size corresponding to the number of repetitions; cutting a template piece on the nano block; Grinding the thickness of at least two of the template members to respective corresponding preset thicknesses; cutting a mold hole on the template; stacking at least two of the template members in sequence, and making the mold holes on all the template members communicate with each other to form a mold cavity; Each adjacent two template members are fixedly connected to form the micro mold.

2. The method for producing a micro mold according to claim 1, wherein Grinding the template members to respective corresponding preset thicknesses, comprising: Fixing the template to a grinding jig; The template member is ground multiple times in sequence using a plurality of grinding pieces with increasing mesh sizes until the thickness of the template member reaches the corresponding preset thickness.

3. The method of claim 2, wherein the micro-mold is prepared by a method comprising: The template is fixed to the grinding tool using an adhesive.

4. The method of claim 2, wherein the micro-mold is prepared by a method comprising: The mold hole is cut on the template member using a femtosecond laser.

5. The method of claim 4, wherein the micro-mold is prepared by a method comprising: The preset thickness is no greater than 50 μm.

6. The method of claim 5, wherein the micro-mold is prepared by a method comprising: The thickness of the template member before grinding is 5 to 20 times the preset thickness.

7. The method of claim 4, wherein the micro-mold is prepared by a method comprising: After the die hole is cut on the template, the method further comprises: The template part and the grinding jig are immersed in a cleaning liquid together to separate the template part from the grinding jig and remove residual adhesive on the surface of the template part.

8. The method of claim 1-7, wherein, Before grinding the template member to a preset thickness, the method further includes: performing surface treatment on the template member.

9. A micro-mold characterized by, The micro mold is prepared by the preparation method of any one of claims 1-8, wherein the micro mold comprises at least two stacked template members, the template members are provided with mold holes, and the mold holes on all the template members are interconnected to form a mold cavity.

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