Rotary caching mechanism

Abstract

The invention relates to a rotary caching mechanism which comprises a transverse frame, a lifting electric cylinder is arranged on the lower side of the transverse frame, the movable end of the lifting electric cylinder is connected with a sliding table, a rotating mechanism is arranged on the sliding table, a caching box is arranged on the rotating mechanism, and a correcting component and a blocking piece component are arranged on the caching box. The servo motor drives the first bevel gear to rotate, the second bevel gear is driven by the first bevel gear to rotate, the second bevel gear rotates through the driving shaft, the rotating table and the rotating disc, the rotating disc rotates the temporary storage mechanism full of the silicon wafers by 90 degrees through the supporting plate, and therefore the silicon wafers are converted into the vertical state from the horizontal state, and the silicon wafers in the vertical state are more convenient to clamp. The wafer breaking rate in the wafer taking process of the manipulator is greatly reduced, the silicon wafer production efficiency is greatly improved, the structure is simple, the cost is reduced, and subsequent manual operation is facilitated.

Description

Technical Field

[0001] The invention belongs to the field of rotary cache mechanisms, in particular to a rotary cache mechanism. Background Art

[0002] The existing silicon wafer buffer mechanism is composed of a lift and a buffer mechanism. The silicon wafer is conveyed to the buffer mechanism by a conveyor and flows into the buffer mechanism. Each time a silicon wafer is stored, the electric cylinder is lifted by a spacing until the buffer mechanism is full. Since the electric cylinder and the buffer mechanism are always kept in a vertical state waiting for the robot to take the wafer, the efficiency of taking the wafer is low, which greatly affects the production efficiency. Therefore, a rotating buffer mechanism is proposed. Summary of the invention

[0003] The purpose of this section is to summarize some aspects of embodiments of the present invention and briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section and the specification abstract and the invention title of this application to avoid blurring the purpose of this section, the specification abstract and the invention title, and such simplifications or omissions cannot be used to limit the scope of the present invention.

[0004] In view of the following technical problems in the prior art: since the electric cylinder and the cache mechanism always remain in a vertical state waiting for the robot to take the film, the film taking efficiency is low, which greatly affects the production efficiency.

[0005] In order to solve the above technical problems, the present invention provides the following technical solutions: a rotary cache mechanism, comprising a horizontal frame, a lifting electric cylinder is arranged on the lower side of the horizontal frame, a movable end of the lifting electric cylinder is connected to a sliding table, a rotary mechanism is arranged on the sliding table, a cache box is arranged on the rotary mechanism, and a correction component and a baffle component are arranged on the cache box;

[0006] Two groups of support members are arranged on two opposite vertical surfaces inside the cache box, and each group of support members is composed of a plurality of support rods, and the material of the support rods is ceramic, and the support rods of each group are arranged in a single row, and the support rods are parallel to each other;

[0007] The correction component includes a cylinder 1, a movable frame 1 and a correction tooth plate. The cache box is provided with a cylinder 1, and a movable frame 1 is provided at the movable end of the cylinder 1. Two correction tooth plates are provided on the movable frame 1. The teeth on the correction tooth plates are perpendicular to the central axis of the support rod, and the teeth of the correction tooth plates extend into the inner side of the cache box.

[0008] As a preferred technical solution of a rotary cache mechanism, the cache box is provided with ribs, the ribs are distributed on the outside of the cache box, and the ribs correspond to the support rods;

[0009] The ribs increase the structural strength of the cache box.

[0010] As a preferred technical solution of a rotary cache mechanism, the baffle component includes a second movable frame, a second cylinder and a baffle, the middle of the cache box is provided with a second cylinder, the movable end of the second cylinder is provided with a second movable frame, the middle of the second movable frame is provided with a baffle, and the baffle extends into the inner side of the cache box;

[0011] The baffle can divide the inner cavity of the cache box into two parts.

[0012] As a preferred technical solution of a rotating cache mechanism, the rotating mechanism includes a rotating platform, a rotating disk and a supporting plate, the inner side of the sliding platform is rotatably connected to the rotating platform, one end of the rotating platform extends out of the sliding platform and is connected to the rotating disk, two supporting plates are arranged on the rotating disk, and the supporting plates are fixedly connected to the cache box;

[0013] The servo motor drives bevel gear one to rotate, bevel gear one drives bevel gear two to rotate, bevel gear two drives the rotating table, turntable and support plate to rotate through the driving shaft, and the support plate drives the cache box to rotate, thereby rotating the cache box by a certain angle.

[0014] As a preferred technical solution of a rotating cache mechanism, the rotating mechanism further comprises a servo motor, a frame, a bevel gear 1, a bevel gear 2 and a driving shaft. The frame is arranged on the side of the sliding table away from the support plate, the driving shaft is arranged on the rotating table, the driving shaft extends into the inner side of the frame, the driving shaft is arranged with a bevel gear 2, the servo motor is arranged on the end of the frame away from the sliding table, the power output end of the servo motor is arranged with a bevel gear 1, the bevel gear 1 is rotatably connected with the inner side of the frame, and the bevel gear 1 is meshed with the bevel gear 2;

[0015] The servo motor drives the bevel gear 1 to rotate, the bevel gear 1 drives the bevel gear 2 to rotate, and the bevel gear 2 drives the rotating table, the turntable and the supporting plate to rotate through the driving shaft.

[0016] The beneficial effects of a rotating cache mechanism of the present invention are as follows: a servo motor drives bevel gear one to rotate, which in turn drives bevel gear two to rotate, and bevel gear two rotates through a drive shaft, a rotating table and a turntable. The turntable rotates the cache mechanism full of silicon wafers 90 degrees through a support plate, which allows the silicon wafer to be converted from a horizontal state to a vertical state. Silicon wafers in a vertical state are easier to clamp, which greatly reduces the fragmentation rate during the robot's wafer picking process, greatly improves silicon wafer production efficiency, has a simple structure, reduces costs, and is convenient for subsequent manual operations. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative labor. Among them:

[0018] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0019] Figure 2 It is a front structural schematic diagram of the present invention;

[0020] Figure 3 It is a structural schematic diagram of the rotating mechanism of the present invention;

[0021] Figure 4 For the present invention Figure 1 A schematic diagram of the local enlarged structure of part B;

[0022] Figure 5 For the present invention Figure 2 Schematic diagram of the local enlarged structure of part A.

[0023] Figure numerals: horizontal frame 1, lifting electric cylinder 2, support plate 3, cache box 4, sliding table 5, cylinder one 6, movable frame one 7, movable frame two 8, cylinder two 9, baffle 10, support rod 11, correction gear plate 12, rib 13, servo motor 14, frame 15, bevel gear one 16, bevel gear two 17, drive shaft 18, rotating table 19, turntable 20. DETAILED DESCRIPTION

[0024] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are described in detail below in conjunction with the accompanying drawings.

[0025] In the following description, many specific details are set forth to facilitate a full understanding of the present invention, but the present invention may also be implemented in other ways different from those described herein, and those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0026] Secondly, the term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The term "in one embodiment" that appears in different places in this specification does not necessarily refer to the same embodiment, nor does it refer to a separate or selective embodiment that is mutually exclusive with other embodiments.

[0027] Secondly, the present invention is described in detail with reference to the schematic diagram. When describing the embodiments of the present invention in detail, for the sake of convenience, the cross-sectional diagrams showing the device structure will not be partially enlarged according to the general scale, and the schematic diagrams are only examples, which should not limit the scope of protection of the present invention. In addition, in actual production, the three-dimensional dimensions of length, width and depth should be included.

[0028] like Figure 1-5 As shown, the present invention proposes a rotary cache mechanism, comprising a horizontal frame 1, a lifting electric cylinder 2 is arranged at the lower side of the horizontal frame 1, a movable end of the lifting electric cylinder 2 is connected to a sliding table 5, a rotating mechanism is arranged on the sliding table 5, a cache box 4 is arranged on the rotating mechanism, and a correction component and a baffle component are arranged on the cache box 4;

[0029] Two groups of support members are arranged on two opposite vertical surfaces inside the cache box 4, and each group of support members is composed of a plurality of support rods 11, and the material of the support rods 11 is ceramic. The support rods 11 of each group are arranged in a single row, and the support rods 11 are parallel to each other;

[0030] The correction component includes a cylinder 6, a movable frame 7 and a correction tooth plate 12. The cache box 4 is provided with a cylinder 6, and a movable frame 7 is provided at the movable end of the cylinder 6. Two correction tooth plates 12 are provided on the movable frame 7. The teeth on the correction tooth plate 12 are perpendicular to the central axis of the support rod 11, and the teeth of the correction tooth plate 12 extend into the inner side of the cache box 4.

[0031] The cache box 4 is provided with ribs 13, the ribs 13 are distributed on the outside of the cache box 4, and the ribs 13 correspond to the support rods 11;

[0032] The ribs 13 can enhance the structural strength of the cache box 4 .

[0033] The baffle component includes a movable frame 2 8, a cylinder 2 9 and a baffle 10. The cylinder 2 9 is arranged in the middle of the cache box 4. The movable end of the cylinder 2 9 is arranged with a movable frame 2 8. The baffle 10 is arranged in the middle of the movable frame 2 8. The baffle 10 extends into the inner side of the cache box 4.

[0034] The baffle 10 can divide the inner cavity of the cache box 4 into two parts.

[0035] The rotating mechanism includes a rotating platform 19, a rotating disk 20 and a supporting plate 3. The inner side of the sliding platform 5 is rotatably connected to the rotating platform 19. One end of the rotating platform 19 extends out of the sliding platform 5 and is connected to the rotating disk 20. Two supporting plates 3 are arranged on the rotating disk 20. Both supporting plates 3 are fixedly connected to the buffer box 4.

[0036] The servo motor 14 drives the bevel gear 1 16 to rotate, the bevel gear 1 16 drives the bevel gear 2 17 to rotate, the bevel gear 2 17 drives the rotating table 19, the turntable 20 and the support plate 3 to rotate through the driving shaft 18, and the support plate 3 drives the cache box 4 to rotate, thereby rotating the cache box 4 to a certain angle.

[0037] The rotating mechanism also includes a servo motor 14, a frame 15, a bevel gear 16, a bevel gear 2 17 and a drive shaft 18. The frame 15 is provided on the side of the sliding table 5 away from the support plate 3. The drive shaft 18 is provided on the rotating table 19. The drive shaft 18 extends into the inner side of the frame 15. The drive shaft 18 is provided with a bevel gear 2 17. The servo motor 14 is provided at one end of the frame 15 away from the sliding table 5. The power output end of the servo motor 14 is provided with a bevel gear 16. The bevel gear 16 is rotatably connected to the inner side of the frame 15, and the bevel gear 16 is meshed with the bevel gear 2 17.

[0038] The servo motor 14 drives the bevel gear 1 16 to rotate, the bevel gear 1 16 drives the bevel gear 2 17 to rotate, and the bevel gear 2 17 drives the rotating table 19, the turntable 20 and the support plate 3 to rotate through the driving shaft 18.

[0039] The implementation method is specifically as follows: loading action: the silicon wafer is transported from the conveyor to the buffer station, and the buffer box 4 is lifted upward by a spacing distance through the lifting electric cylinder 2. Whenever the silicon wafer is loaded into the inner side of the buffer box 4, the buffer box 4 is lifted upward by a spacing distance again to achieve the silicon wafer stacking and caching effect. When the silicon wafer on the buffer mechanism is full, the buffer mechanism rotates 90 degrees to make the silicon wafer fall onto the correction mechanism. The correction mechanism pushes the silicon wafer to prepare for the robot to absorb the silicon wafer, wherein: the distance of a spacing is the distance between two adjacent support rods 11;

[0040] The servo motor 14 drives the bevel gear 16 to rotate, and the bevel gear 16 drives the bevel gear 2 17 to rotate. The bevel gear 2 17 rotates through the drive shaft 18, the rotating table 19 and the turntable 20. The turntable 20 rotates the cache mechanism of the full silicon wafer by 90 degrees through the support plate 3, which allows the silicon wafer to be converted from a horizontal state to a vertical state. The silicon wafer in the vertical state is easier to clamp, which greatly reduces the fragmentation rate during the robot arm's wafer picking process, greatly improves the silicon wafer production efficiency, has a simple structure, reduces costs, and is convenient for subsequent manual operations.

[0041] It will be appreciated that in the development of any actual implementation, as in any engineering or design project, numerous implementation-specific decisions may be made. Such a development effort may be complex and time-consuming, but will be a routine task of design, fabrication, and production for those of ordinary skill having the benefit of this disclosure without undue experimentation.

[0042] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present invention may be modified or replaced by equivalents without departing from the spirit and scope of the technical solutions of the present invention, which should all be included in the scope of the claims of the present invention.

Claims

1. A rotary cache mechanism, characterized in that: The invention comprises a horizontal frame (1), a lifting electric cylinder (2) is arranged on the lower side of the horizontal frame (1), a movable end of the lifting electric cylinder (2) is connected to a sliding platform (5), a rotating mechanism is arranged on the sliding platform (5), a buffer box (4) is arranged on the rotating mechanism, and a correction component and a baffle component are arranged on the buffer box (4); Two groups of support members are arranged on two opposite vertical surfaces inside the cache box (4), and each group of support members is composed of a plurality of support rods (11). The support rods (11) of each group are arranged in a single row, and the support rods (11) are parallel to each other. The correction component comprises a cylinder (6), the cylinder (6) is arranged on the cache box (4), the movable end of the cylinder (6) is arranged with a movable frame (7), the movable frame (7) is arranged with two correction tooth plates (12), the teeth on the correction tooth plates (12) are perpendicular to the central axis of the support rod (11), and the teeth of the correction tooth plates (12) extend into the inner side of the cache box (4).

2. A rotary cache mechanism according to claim 1, characterized in that: The cache box (4) is provided with ribs (13), the ribs (13) are distributed on the outside of the cache box (4), and the ribs (13) correspond to the support rods (11).

3. A rotary cache mechanism according to claim 1, characterized in that: The baffle component comprises a movable frame 2 (8), a cylinder 2 (9) and a baffle (10); the cylinder 2 (9) is arranged in the middle of the cache box (4); the movable frame 2 (8) is arranged at the movable end of the cylinder 2 (9); the baffle (10) is arranged in the middle of the movable frame 2 (8); and the baffle (10) extends into the inner side of the cache box (4).

4. A rotary cache mechanism according to claim 1, characterized in that: The rotating mechanism comprises a rotating table (19), a turntable (20) and a support plate (3); the inner side of the sliding table (5) is rotatably connected to the rotating table (19); one end of the rotating table (19) extends out of the sliding table (5) and is connected to the turntable (20); two support plates (3) are arranged on the turntable (20); and the support plates (3) are fixedly connected to the cache box (4).

5. A rotary cache mechanism according to claim 4, characterized in that: The rotating mechanism further comprises a servo motor (14), a frame (15), a bevel gear 1 (16), a bevel gear 2 (17) and a drive shaft (18); the frame (15) is arranged on a side of the sliding platform (5) away from the support plate (3); the drive shaft (18) is arranged on the rotating platform (19); the drive shaft (18) extends into the inner side of the frame (15); the drive shaft (18) is arranged on the bevel gear 2 (17); the servo motor (14) is arranged on one end of the frame (15) away from the sliding platform (5); the power output end of the servo motor (14) is arranged with a bevel gear 1 (16); the bevel gear 1 (16) is rotatably connected to the inner side of the frame (15); the bevel gear 1 (16) and the bevel gear 2 (17) are meshed.

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