Deposition apparatus

Abstract

A deposition apparatus includes: a mask frame; a mask disposed on the mask frame; the crucible is arranged below the mask frame; and a nozzle coupled to the crucible and disposed between the crucible and the mask frame. The nozzle includes: a body portion including a coupling opening; and an ejection portion disposed in the coupling opening and including a hole overlapping the coupling opening. And the thermal expansion coefficient of the spraying part is greater than that of the main body part.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims priority to and the benefit of Korean Patent Application No. 10-2023-0100351, filed on August 1, 2023, which is incorporated herein by reference in its entirety. Technical Field

[0003] Embodiments relate to deposition apparatus. Background Art

[0004] Organic light emitting diode display (OLED) devices are gaining attention as next generation flat panel display devices, which have excellent brightness characteristics and wide viewing angle characteristics, and unlike liquid crystal display (LCD) devices, do not require a separate light source. OLED devices do not require a separate light source, and thus can be manufactured to have a lightweight and slim design. In addition, OLED devices have the characteristics of low power consumption, high brightness, and fast response speed.

[0005] OLED devices include organic light emitting elements, each of which includes an anode, an organic light emitting layer and a cathode. Holes and electrons are injected from the anode and cathode into the organic light emitting layer to generate excitons, and the organic light emitting element emits light as the excitons transition to a ground state.

[0006] In the case of manufacturing an organic light emitting element, a mask is placed on a substrate, and an organic material for forming an organic light emitting layer passes through an opening portion of the mask from a nozzle and is provided on the substrate. Summary of the invention

[0007] An embodiment provides a deposition apparatus including a nozzle having an ejection portion, a body portion formed of a material different from that of the ejection portion, and a coupling member that is detachable from and replaceable from the body portion.

[0008] However, the embodiments are not limited to those set forth herein.The above and other embodiments will become more apparent to those of ordinary skill in the art to which the present disclosure pertains by referring to the detailed description of the present disclosure given below.

[0009] In one embodiment, a deposition device may include: a mask frame; a mask disposed on the mask frame; a crucible disposed below the mask frame; and a nozzle disposed between the crucible and the mask frame and connected to the crucible, wherein the nozzle includes: a main body portion including a connecting opening; and an injection portion disposed in the connecting opening and including a hole overlapping the connecting opening, and the thermal expansion coefficient of the injection portion may be greater than the thermal expansion coefficient of the main body portion.

[0010] The crucible and the body portion may include the same material, and the injection portion may include a material different from that of the crucible and the body portion.

[0011] The main body portion may further include a main body protrusion, which is arranged in the connecting opening and on the inner surface of the main body portion, and the injection portion may further include a connecting protrusion, which is arranged on the outer surface of the injection portion, and the main body protrusion and the connecting protrusion can be connected to each other in an engaging manner, and the main body portion and the injection portion can be connected to each other through the main body protrusion and the connecting protrusion.

[0012] The nozzle may further include a coupling member provided in the coupling opening and including a spray hole, and the body part and the spray part may be coupled to each other through the coupling member.

[0013] The thermal expansion coefficient of the coupling member may be smaller than the thermal expansion coefficient of the injection portion.

[0014] The coupling opening of the body part may include: a first coupling opening adjacent to an upper surface of the body part; and a second coupling opening disposed below the first coupling opening and having a diameter greater than that of the first coupling opening.

[0015] The connecting member may include a first injection protrusion, which is arranged on the inner surface of the connecting member and in the injection hole, the injection part may include a coupling protrusion, which is arranged on the outer surface of the injection part, the connecting member may be arranged in the second coupling opening of the main body part, and the coupling protrusion may be coupled to the first injection protrusion in an engaging manner, so that the injection part and the connecting member are coupled to each other.

[0016] The coupling member may further include a second injection protrusion disposed on an outer surface of the coupling member.

[0017] The main body portion may include a main body protrusion, which is disposed on an inner surface of the main body portion and is disposed in the second connecting opening, and the main body protrusion can be coupled to the second injection protrusion of the connecting member in an engaging manner so that the main body portion and the connecting member are coupled to each other.

[0018] The connecting opening of the main body may include: a first connecting opening adjacent to an upper surface of the main body; a second connecting opening disposed below the first connecting opening; and a third connecting opening disposed below the second connecting opening, the first connecting opening having a diameter larger than that of the second connecting opening, and the third connecting opening having a diameter larger than that of the second connecting opening.

[0019] The connecting member may include: a first part having a cylindrical shape; a second part arranged on the first part and having a cylindrical shape in a plan view, having a diameter smaller than that of the first part; and an injection protrusion arranged on an outer surface of the second part, the first part being arranged in the third connecting opening of the main body, and the second part being arranged in the second connecting opening of the main body.

[0020] The injection portion may include: a first injection portion having a cylindrical shape; a second injection portion disposed on the first injection portion and having a cylindrical shape in a plan view, having a diameter smaller than that of the first injection portion; and a coupling protrusion disposed on an inner surface of the first injection portion and disposed in the hole of the injection portion, and the coupling protrusion may be coupled to the injection protrusion of the coupling member in an engaging manner within the second coupling opening, so that the injection portion and the coupling member are coupled to each other.

[0021] The injection portion may further include a support portion disposed between the first injection portion and the second injection portion and having a ring shape, and the support portion may be disposed in the first coupling opening of the body portion.

[0022] An upper surface of the injection portion may have a ring shape in a plan view, and a plurality of fastening grooves may be formed in an outer surface of the injection portion.

[0023] An upper surface of the injection portion may have a polygonal shape in a plan view, and an outer surface of the injection portion may include a plurality of flat surfaces.

[0024] In one embodiment, a deposition device may include: a mask frame; a mask disposed on the mask frame; a crucible disposed below the mask frame; and a nozzle disposed between the crucible and the mask frame, wherein the nozzle includes: a main body portion including a connecting opening; an injection portion disposed in the connecting opening and including a hole overlapping the connecting opening; and a connecting member disposed between the main body portion and the injection portion and including an injection hole, and the main body portion and the injection portion can be connected to each other through the connecting member.

[0025] The injection portion may include a coupling protrusion disposed on an outer surface of the injection portion, the coupling member may include a first injection protrusion disposed on an inner surface of the coupling member and disposed in the injection hole, and the first injection protrusion and the coupling protrusion may be coupled to each other in an engaging manner.

[0026] The main body portion may include a main body protrusion, which is arranged on the inner surface of the main body portion and in the connecting opening, and the connecting member may further include a second injection protrusion, which is arranged on the outer surface of the connecting member, and the second injection protrusion and the main body protrusion can be connected to each other in an engaging manner.

[0027] The coupling member may include: a first portion having a cylindrical shape; a second portion provided on the first portion; and an ejection protrusion provided on an outer surface of the second portion.

[0028] The injection portion may include a coupling protrusion provided on an inner surface of the injection portion and disposed in the hole of the injection portion, and the coupling protrusion and the injection protrusion may be coupled to each other in an engaging manner. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The accompanying drawings are included to provide a further understanding of the present invention and are incorporated in and constitute a part of this disclosure. The accompanying drawings illustrate embodiments and together with the description serve to explain the principles of the present invention. In the drawings:

[0030] Figure 1 is a schematic perspective view of a deposition apparatus according to an embodiment;

[0031] Figure 2 for Figure 1 An exploded schematic perspective view of the nozzle illustrated in FIG.

[0032] Figure 3A and Figure 3B As an example Figure 2 A schematic diagram of the connection between the injection part and the main body part illustrated in FIG.

[0033] Figure 4A and Figure 4B is a schematic diagram illustrating a nozzle according to another embodiment;

[0034] Figure 5A and Figure 5B is a schematic diagram illustrating a nozzle according to another embodiment;

[0035] Fig. 6A and Figure 6B is a schematic diagram illustrating a nozzle according to another embodiment;

[0036] Fig. 7A and Figure 7B A schematic diagram illustrating a spraying portion according to another embodiment;

[0037] Figure 8 For use Figure 1 A schematic plan view of a display panel manufactured by the deposition apparatus illustrated in FIG.

[0038] Fig. 9 As an example Figure 8 A schematic diagram of a cross section of a pixel illustrated in FIG. 1 ; and

[0039] Fig.10 As an example for Fig. 9 Schematic diagram of the deposition process of the light-emitting element illustrated in FIG. DETAILED DESCRIPTION

[0040] In the following description, for the purpose of explanation, many specific details are stated in order to provide a thorough understanding of various embodiments or implementations of the present invention. As used herein, "embodiment" and "implementation" are interchangeable words, which are non-limiting examples of the devices or methods disclosed herein. However, it is apparent that various embodiments may be practiced without these specific details or with one or more equivalent arrangements. Here, various embodiments are not necessarily exclusive and do not limit the present disclosure. For example, the specific shape, configuration and characteristics of an embodiment may be used or implemented in another embodiment.

[0041] Unless otherwise specified, the illustrated embodiments should be understood to provide features of the present invention. Therefore, unless otherwise specified, the features, components, modules, layers, films, panels, regions and / or aspects of various embodiments, etc. (hereinafter individually or collectively referred to as "elements") can be combined, separated, interchanged and / or rearranged in other ways without departing from the scope of the present invention.

[0042] The use of cross hatching and / or shading in the drawings is generally provided to clarify the boundaries between adjacent elements. As such, the presence or absence of cross hatching or shading does not convey or indicate any preference or requirement for the specific material, material properties, size, ratio, commonality between the illustrated elements and / or any other characteristics, attributes, performance, etc. of the element, unless otherwise specified. Further, in the drawings, the size and relative size of the elements may be exaggerated for the purpose of clarity and / or description. When the embodiment can be implemented differently, a specific process sequence can be performed differently from the described sequence. For example, two processes described in succession can be performed substantially simultaneously, or in an order opposite to the described sequence. In addition, the same reference numerals represent the same elements.

[0043] When an element or layer is referred to as being "on", "connected to" or "coupled to" another element or layer, it may be directly on, connected to or coupled to another element or layer, or there may be intervening elements or layers. However, when an element or layer is referred to as being "directly on", "directly connected to" or "directly coupled to" another element or layer, there are no intervening elements or layers. For this purpose, the term "connected" may refer to a physical connection, an electrical connection and / or a fluid connection with or without intervening elements. Further, the axis of the first direction DR1, the axis of the second direction DR2 and the axis of the third direction DR3 are not limited to the three axes of a rectangular coordinate system, such as the X-axis, the Y-axis and the Z-axis, and may be interpreted in a broader sense. For example, the axis of the first direction DR1, the axis of the second direction DR2 and the axis of the third direction DR3 may be perpendicular to each other, or may represent different directions that are not perpendicular to each other. For the purpose of this disclosure, "at least one of A and B" may be understood to mean only A, only B or any combination of A and B. Furthermore, “at least one of X, Y, and Z” and “at least one selected from the group consisting of X, Y, and Z” may be understood as any combination of only X, only Y, only Z, or two or more of X, Y, and Z. As used herein, the term “and / or” includes any and all combinations of one or more of the associated listed items.

[0044] Although the terms "first", "second", etc. may be used herein to describe various types of elements, these elements should not be limited by these terms. These terms are used to distinguish one element from another element. Therefore, the first element discussed below may be referred to as the second element without departing from the teachings of the present disclosure.

[0045] Spatially relative terms such as "below," "below," "below," "above," "up," "above," "higher," and "side" (e.g., as in "sidewall") may be used herein for descriptive purposes, and are thus used to describe the relationship of one element to another element as illustrated in the accompanying drawings. In addition to the orientations depicted in the accompanying drawings, spatially relative terms are intended to cover different orientations of the device in use, operation, and / or manufacture. For example, if the device in the accompanying drawings is flipped, an element described as being "below" or "below" other elements or features will then be oriented as being "above" the other elements or features. Thus, the term "below" may cover both above and below orientations. In addition, the device may be oriented in other ways (e.g., rotated 90 degrees or in other orientations), and, as such, the spatially relative descriptors used herein should be interpreted accordingly.

[0046] The embodiments described herein will be illustrated with reference to plan views and cross-sectional views as ideal schematic diagrams of the embodiments. Therefore, the illustrated shapes may be deformed due to manufacturing techniques and / or tolerances. Accordingly, the embodiments are not limited to the specific forms illustrated, but include formal changes resulting from manufacturing processes. Therefore, the regions in the drawings have schematic characteristics, and the shapes of the regions in the drawings illustrate the specific forms of the regions of the elements and do not limit the category of the invention.

[0047] Hereinafter, embodiments will be described in detail with reference to the accompanying drawings.

[0048] Figure 1 is a schematic perspective view of a deposition apparatus according to an embodiment. Figure 2 for Figure 1 Schematic perspective view of an exploded view of the nozzle illustrated in FIG.

[0049] refer to Figure 1 , the deposition apparatus PDA may include a mask frame MFS, a mask MM, a nozzle NZ and a crucible CRB.

[0050] The mask frame MFS may have a side surface extending in the first direction DR1 and a side surface extending in the second direction DR2 crossing the first direction DR1. The mask frame MFS may have a rectangular frame shape, but the shape of the mask frame MFS is not limited thereto.

[0051] Hereinafter, a direction passing through a plane defined by the first direction DR1 and the second direction DR2 is defined as a third direction DR3. The third direction DR3 may be substantially orthogonal to the plane defined by the first direction DR1 and the second direction DR2. In the present disclosure, "in a plan view" may mean a state observed in the third direction DR3.

[0052] In a plan view, the mask frame MFS may have a quadrilateral shape having long sides extending in the first direction DR1 and short sides extending in the second direction DR2 .

[0053] The mask opening MK-OP may be defined (or formed) in the mask frame MFS. The mask opening MK-OP may have a quadrangular shape, but the shape of the mask opening MK-OP is not limited thereto.

[0054] The mask frame MFS may include a metal material. For example, the mask frame MFS may include Invar or stainless steel.

[0055] The mask MM may be disposed on the mask frame MFS. Sides of the mask MM that are opposite to each other in the first direction DR1 (eg, opposite sides) may be connected to the mask frame MFS. For example, the mask MM may be connected to the mask frame MFS by laser welding.

[0056] The mask MM may extend in the first direction DR1 and be arranged along the second direction DR2. The mask MM may have a rectangular shape having a long side extending in the first direction DR1 and a short side extending in the second direction DR2. For example, two masks MM may be disposed on the mask frame MFS, but the number of masks MM is not limited thereto.

[0057] The mask MM may include metal. For example, the mask MM may be defined as a fine metal mask.

[0058] The unit area CEA may be defined on the upper surface of each mask MM, although Figure 1 It is shown that two unit areas CEA are defined on the upper surface of each mask MM, but the number of the unit areas CEA is not limited thereto.

[0059] The unit areas CEA may be arranged in a specific direction. The unit areas CEA may be arranged in a first direction DR1. In a plan view, the unit areas CEA may overlap with the mask opening MK-OP. In a plan view, the unit areas CEA may not overlap with the mask frame MFS.

[0060] The unit areas CEA may have a polygonal shape. For example, each unit area CEA may have a rectangular shape having long sides extending in the first direction DR1 and short sides extending in the second direction DR2.

[0061] The unit opening MOP may be defined (or formed) in the unit area CEA. The unit opening MOP may be arranged along the first direction DR1 or the second direction DR2. In a plan view, the unit opening MOP may overlap with the mask opening MK-OP.

[0062] For example, twenty unit openings MOP may be defined (or formed) in each unit area CEA, but the number of unit openings MOP may not be limited thereto.

[0063] The substrate SUB may be disposed on the unit area CEA. In the case where the deposition material is ejected from a nozzle to be described later, the deposition material may be deposited in a region of the substrate SUB overlapping the unit opening MOP. The deposition of the deposition material will be referred to as Figure 8 , Fig. 9 and Fig.10 Detailed description.

[0064] refer to Figure 1 and Figure 2 , the crucible CRB may be disposed under the mask frame MFS. The crucible CRB may have a rectangular parallelepiped shape. The crucible CRB may include a surface extending in the first direction DR1 and a surface extending in the second direction DR2. In a plan view, the crucible CRB may have a rectangular shape having a long side extending in the first direction DR1 and a short side extending in the second direction DR2.

[0065] The receiving groove ACG may be defined (or formed) in the crucible CRB. The receiving groove ACG may extend from the top to the bottom. In a plan view, the receiving groove ACG may have a rectangular shape.

[0066] The crucible CRB may contain a deposition material therein. The deposition material may be contained in a containing groove ACG of the crucible CRB. For example, a heating line capable of heating the deposition material may be included. Accordingly, when the deposition material is provided to the containing groove ACG, the deposition material may be evaporated (or vaporized) by the heating line of the crucible CRB.

[0067] The crucible CRB may contain metal or non-metal materials. For example, the crucible CRB may contain molybdenum (Mo), tungsten, molybdenum and lanthanum oxide (La 2 O 3 ) of an alloy of Mo-La, tantalum (Ta), a carbon composite material, and titanium-zirconium-molybdenum (TZM) in which titanium, carbon, and zirconium are added to molybdenum. However, the embodiment is not limited thereto, and the crucible CRB may include another material having a melting point higher than a boiling point of the deposition material.

[0068] The nozzle NZ may be disposed between the crucible CRB and the mask frame MFS. The nozzle NZ may be coupled to the crucible CRB. The nozzle NZ may be disposed on the crucible CRB. The nozzle NZ may overlap with the receiving groove ACG defined (or formed) in the crucible CRB.

[0069] In a plan view, the nozzle NZ may have a rectangular shape having long sides extending in the first direction DR1 and short sides extending in the second direction DR2 .

[0070] The nozzle NZ may include a body portion BDP and an ejection portion EXP, and the ejection portion EXP may be disposed on the body portion BDP.

[0071] The body portion BDP may include a first body portion BDP1 and a second body portion BDP2. The first body portion BDP1 may be disposed on an upper surface of the crucible CRB. The second body portion BDP2 may be disposed on an upper surface of the first body portion BDP1. The second body portion BDP2 may extend from the first body portion BDP1 in a third direction DR3. For example, the first body portion BDP1 and the second body portion BDP2 may be integral with each other.

[0072] The length of the first body portion BDP1 in the first direction DR1 and the length of the second body portion BDP2 in the first direction DR1 may be substantially equal to each other. The length (or width) of the first body portion BDP1 in the second direction DR2 may be greater than the length (or width) of the second body portion BDP2 in the second direction DR2. Accordingly, the first body portion BDP1 and the second body portion BDP2 may have a stepped portion in the second direction DR2.

[0073] The body portion BDP and the crucible CRB may include the same material. The body portion BDP may include a metal material or a non-metal material. For example, the body portion BDP may include molybdenum (Mo), tungsten, molybdenum and lanthanum oxide (La 2 O 3 ) of an alloy of Mo-La, tantalum (Ta), a carbon composite material, and titanium-zirconium-molybdenum (TZM), in which titanium, carbon, and zirconium are added to molybdenum. However, the embodiment is not limited thereto, and the main body BDP may include another material having a melting point higher than the boiling point of the deposition material. Since the main body BDP and the crucible CRB include the same material, when the deposition material is heated to vaporization (or evaporation), the thermal expansion coefficient of the main body BDP and the thermal expansion coefficient of the crucible CRB may be the same. The thermal expansion amount of the main body BDP and the thermal expansion amount of the crucible CRB may be the same. Accordingly, no gap may appear between the main body BDP and the crucible CRB. Therefore, when heat is applied, the space between the main body BDP and the crucible CRB may be sealed, and the deposition material may not leak between the main body BDP and the crucible CRB.

[0074] The coupling openings SOP may be defined (or formed) in the upper surface of the second body portion BDP2. The coupling openings SOP may be arranged along the first direction DR1. The coupling openings SOP may be spaced apart from each other at certain intervals in the first direction DR1. In a plan view, each coupling opening SOP may have a circular shape.

[0075] The ejection portion EXP may be detachably coupled to the body portion BDP. The ejection portion EXP may be disposed (or inserted) in a coupling opening SOP defined (or formed) in the second body portion BDP2. This will refer to Figure 3A , Figure 3B , Figure 4A , Figure 4B , Figure 5A , Figure 5B , Fig. 6A and Figure 6B Detailed description.

[0076] The ejection part EXP may include a metal material or a non-metal material. Under the condition that the thermal expansion coefficient of the ejection part EXP is greater than the thermal expansion coefficient of the body part BDP, the ejection part EXP and the body part BDP may include different materials. Accordingly, when the deposition material is heated, the ejection part EXP may expand within the coupling opening SOP. Therefore, the space between the ejection part EXP and the body part BDP may be sealed.

[0077] For example, the ejection portion EXP may have a cylindrical shape. However, the embodiment is not limited thereto, and a flat surface may be provided on the outer surface of the ejection portion EXP. This will refer to Fig. 7A and Figure 7B Detailed description.

[0078] The hole HL may be defined (or formed) in the upper space of the ejection portion EXP. The hole HL may extend in the third direction DR3. The hole HL may overlap the coupling opening SOP and the receiving groove ACG. Therefore, the deposition material disposed in the receiving groove ACG may be vaporized (or evaporated) and ejected to the mask MM through the hole HL.

[0079] The ejection portion EXP may further include a coupling protrusion EPP. The coupling protrusion EPP may be disposed on an outer surface of the ejection portion EXP. The coupling protrusion EPP may be disposed adjacent to a lower portion of the ejection portion EXP. The ejection portion EXP may be coupled to the body portion BDP via the coupling protrusion EPP. This will refer to Figure 3A and Figure 3B Detailed description.

[0080] For example, the deposition apparatus PDA may further include a cooling plate and a magnetic plate on the mask frame MFS. The cooling plate may prevent the display panel DP (see FIG. 2 ) disposed on the mask MM from being damaged. Figure 8 ) due to thermal deformation. The magnetic plate can prevent the mask MM and the display panel DP (see Figure 8 ) droops downward due to gravity.

[0081] Figure 3A and Figure 3B As an example Figure 2 Schematic diagram of the connection between the injection part and the main body shown in FIG.

[0082] For example, Figure 3A The state where the ejection portion EXP and the body portion BDP are separated is illustrated. Figure 3B The state where the ejection portion EXP and the body portion BDP are coupled is illustrated.

[0083] For example, Figure 3A and Figure 3B For along Figure 2 A cross-sectional view taken along line II' in FIG.

[0084] For ease of explanation, the crucible CRB (see Figure 1 ), mask frame MFS (see Figure 1 ) and mask MM (see Figure 1 )exist Figure 3A and Figure 3B is omitted.

[0085] Figure 3A and Figure 3B The injection part EXP and the main body BDP in Figure 1 and Figure 2 The ejection portion EXP and the body portion BDP are the same, and therefore, for the sake of convenience of description, the description thereof will be omitted or simplified.

[0086] refer to Figure 3A , the coupling protrusion EPP may be provided on the outer surface of the ejection portion EXP. The hole HL may be defined (or formed) in the ejection portion EXP. The hole HL may extend from the upper surface to the lower surface of the ejection portion EXP in the third direction DR3.

[0087] A connection groove HAL may be defined (or formed) in the first body portion BDP1. Figure 2 The receiving grooves ACG of the crucible CRB illustrated in the example overlap.

[0088] The coupling opening SOP may be defined (or formed) in the body portion BDP. The coupling opening SOP may extend from the upper surface of the second body portion BDP2 in the third direction DR3. The coupling opening SOP may be connected to the connection groove HAL.

[0089] The body portion BDP may further include a body protrusion BPP. The body protrusion BPP may be disposed in the coupling opening SOP. The body protrusion BPP may be disposed on an inner surface of the second body portion BDP2 defining the coupling opening SOP. When viewed from the first direction DR1, the body protrusion BPP may be arranged along the third direction DR3. However, the embodiment is not limited thereto, and the body protrusion BPP may be omitted.

[0090] refer to Figure 3A and Figure 3B , the ejection part EXP may be coupled to the body part BDP. The ejection part EXP may be coupled to the second body part BDP2. The ejection part EXP may be disposed (or inserted) in the coupling opening SOP.

[0091] The coupling protrusion EPP of the ejection part EXP may have a shape corresponding to the shape of the main body protrusion BPP of the main body part BDP. When the ejection part EXP is disposed in the coupling opening SOP, the coupling protrusion EPP may be engaged with the main body protrusion BPP. The coupling protrusion EPP and the main body protrusion BPP may be coupled to each other in an engaged manner. Accordingly, the ejection part EXP may be coupled to the main body part BDP.

[0092] The thermal expansion coefficient of the ejection part EXP may be greater than the thermal expansion coefficient of the main body part BDP. When the deposition material is heated, the thermal expansion amount of the ejection part EXP may be greater than the thermal expansion amount of the main body part BDP. Accordingly, the ejection part EXP may expand within the connection opening SOP so that the space between the outer surface of the ejection part EXP and the inner surface of the main body part BDP may be sealed. Therefore, the evaporated deposition material may be ejected from the hole HL to the outside after passing through the connection groove HAL, and thus the deposition material can be prevented from leaking to the space between the outer surface of the ejection part EXP and the inner surface of the main body part BDP.

[0093] The ejection portion EXP may include a metal material or a non-metal material. For example, the ejection portion EXP may include molybdenum (Mo), tungsten, molybdenum and lanthanum oxide (La 2 O 3 ) of an alloy of Mo-La, tantalum (Ta), a carbon composite material, and titanium-zirconium-molybdenum (TZM), in which titanium, carbon, and zirconium are added to molybdenum. However, the embodiment is not limited thereto, and the ejection part EXP may include another material with a melting point higher than a boiling point of the deposition material.

[0094] Under the condition that the thermal expansion coefficient of the ejection part EXP is greater than the thermal expansion coefficient of the body part BDP, the ejection part EXP and the body part BDP may include different materials. For example, the ejection part EXP may include a metal, and the body part BDP may include a non-metal. However, the embodiment is not limited thereto, and the ejection part EXP and the body part BDP may each include any metal as long as the thermal expansion coefficient of the ejection part EXP is greater than the thermal expansion coefficient of the body part BDP.

[0095] Figure 4A and Figure 4B FIG. 1 is a schematic diagram illustrating a nozzle according to another embodiment.

[0096] For ease of explanation, Figure 4A , the body portion BDPa is illustrated in a cross-sectional view taken along line II′, and the ejection portion EXPa and the coupling member CTPa are illustrated in a perspective view.

[0097] Figure 4A is a schematic diagram illustrating the body portion BDPa, the ejection portion EXPa, and the coupling member CTPa separated from each other, and Figure 4B 2 is a schematic diagram illustrating the body portion BDPa, the ejection portion EXPa, and the coupling member CTPa coupled to each other.

[0098] because Figure 4A and Figure 4B The connection protrusion EPPa of the injection part EXPa shown in the example is connected to the Figure 3A The coupling protrusion EPP of the injection portion EXP illustrated in FIG. 1 is substantially the same, so for the convenience of description, the description thereof may be omitted or simplified.

[0099] refer to Figure 4A, the body portion BDPa may include a first body portion BDP1a and a second body portion BDP2a. The upper surface of the second body portion BDP2a may include a step portion. A first surface PL1 of the upper surface of the second body portion BDP2a adjacent to the coupling opening SOPa and a second surface PL2 of the upper surface of the second body portion BDP2a spaced apart from the coupling opening SOPa may be connected to form a step portion. The height of the first surface PL1 of the upper surface of the second body portion BDP2a adjacent to the coupling opening SOPa may be lower than the height of the second surface PL2 of the upper surface of the second body portion BDP2a spaced apart from the coupling opening SOPa.

[0100] The connection opening SOPa may include a first connection opening SOP1a and a second connection opening SOP2a. The first connection opening SOP1a may be adjacent to the upper surface of the second body portion BDP2a. The second connection opening SOP2a may be defined below the first connection opening SOP1a. The second connection opening SOP2a may be adjacent to a boundary between the first body portion BDP1a and the second body portion BDP2.

[0101] The maximum diameter (or diameter) of the first coupling opening SOP1a in the second direction DR2 may be smaller than the maximum diameter (or diameter) of the second coupling opening SOP2a in the second direction DR2. Accordingly, the inner surface of the second body portion BDP2a defining the coupling opening SOPa may have a stepped shape.

[0102] For example, in Figure 4A In the embodiment, the first coupling opening SOP1a may have a semicircular shape, but may also have a substantially circular shape. Figure 4A In the embodiment, the second coupling opening SOP2a may have a portion of a polygonal shape, but may have a substantially polygonal shape. The inner surface of the second body portion BDP2a defining the second coupling opening SOP2a may include a flat surface. The flat plane may be arranged at a specific angle.

[0103] The nozzle NZa may further include a coupling member CTPa. The upper surface of the coupling member CTPa may have a polygonal shape. The coupling member CTPa may have a polygonal column shape. For example, Figure 4A In the embodiment of the present invention, the coupling member CTPa may have a hexagonal column shape. This is exemplified, and the shape of the coupling member CTPa may be changed to correspond to the shape of the inner surface of the second body part BDP2a defining the second coupling opening SOP2a.

[0104] The ejection portion EXPa may further include a support portion SPPa. The support portion SPPa may be disposed on the coupling protrusion EPPa. For example, the support portion SPPa may have a ring shape. The support portion SPPa may surround an outer surface of the ejection portion EXPa.

[0105] The spray hole FSH may be defined (or formed) in the upper surface of the coupling member CTPa. The spray hole FSH may extend in the third direction DR3 and pass through the coupling member CTPa.

[0106] refer to Figure 4A and Figure 4B , the coupling member CTPa, the ejection part EXPa and the main body BDPa may be coupled to each other. For example, the coupling member CTPa may be disposed (or inserted) in the second coupling opening SOP2a. The ejection hole FSH may overlap with the connection groove HAL. The ejection hole FSH may overlap with the coupling opening SOPa. In one embodiment, the coupling member CTPa may be disposed between the main body BDPa and the ejection part EXPa.

[0107] The coupling member CTPa may include a first injection protrusion BSP1a. The first injection protrusion BSP1a may be disposed on an inner surface of the coupling member CTPa defining the injection hole FSH. The first injection protrusion BSP1a may be disposed to correspond to the coupling protrusion EPPa of the injection portion EXPa.

[0108] The injection portion EXPa may be disposed (or inserted) in the coupling opening SOPa of the body portion BDPa. The injection portion EXPa may be disposed (or inserted) in the injection hole FSH of the coupling member CTPa. The coupling protrusion EPPa may be coupled to the first injection protrusion BSP1a in an engaging manner. The injection portion EXPa and the coupling member CTPa may be coupled to each other through the coupling protrusion EPPa and the first injection protrusion BSP1a.

[0109] The support portion SPPa of the ejection portion EXPa may be disposed on the upper surface of the second body portion BDP2a. The support portion SPPa may be disposed on the upper surface of the second body portion BDP2a adjacent to the connection opening SOPa. Since the support portion SPPa is disposed on the upper surface of the second body portion BDP2a, only a portion of the ejection portion EXPa may be disposed (or inserted) in the connection opening SOPa.

[0110] In the case where the ejection part EXPa and the main body part BDPa are directly connected, wear may occur between the outer surface of the ejection part EXPa and the inner surface of the main body part BDPa. Accordingly, a gap may be formed between the outer surface of the ejection part EXPa and the inner surface of the main body part BDPa, and the evaporated deposition material may be caused to leak out through the gap. For example, the service life of the main body part BDPa may be shortened.

[0111] However, in the case where the ejection part EXPa is coupled to the main body part BDPa through the coupling member CTPa, wear may not occur on the inner surface of the main body part BDPa. Therefore, the service life of the main body part BDPa can be extended. In the case where the ejection part EXPa is coupled to the coupling member CTPa, the coupling member CTPa can be coupled to be detachable from the main body part BDPa, so that in the case where wear occurs on the inner surface of the coupling member CTPa, the coupling member CTPa can be easily replaced. Accordingly, maintenance of the nozzle NZa can be easily performed.

[0112] The thermal expansion coefficient of the injection part EXPa may be greater than the thermal expansion coefficient of the coupling member CTPa. When the deposition material is heated to be evaporated (or vaporized), the thermal expansion amount of the injection part EXPa may be greater than the thermal expansion amount of the coupling member CTPa. The injection part EXPa may expand in the injection hole FSH. Therefore, the deposition material may not leak to the space between the outer surface of the injection part EXPa and the inner surface of the coupling member CTPa, and the deposition material may be ejected to the outside through the hole HL, thereby reducing unnecessary loss of the deposition material.

[0113] Figure 5A and Figure 5B FIG. 1 is a schematic diagram illustrating a nozzle according to another embodiment.

[0114] For ease of explanation, Figure 5A , the body portion BDPb is illustrated in a cross-sectional view taken along line II′, and the ejection portion EXPb and the coupling member CTPb are illustrated in a perspective view.

[0115] Figure 5A illustrates a state in which the body portion BDPb, the ejection portion EXPb, and the coupling member CTPb are separated from each other, and Figure 5B A state in which the body portion BDPb, the ejection portion EXPb, and the coupling member CTPb are coupled to each other is illustrated.

[0116] because Figure 5A and Figure 5B The injection part EXPb in Figure 3A and Figure 3B The injection part EXP is the same as that in the above description, so for the convenience of description, its description will be omitted or simplified.

[0117] refer to Figure 5A , the coupling opening SOPb may include a first coupling opening SOP1b and a second coupling opening SOP2b. The first coupling opening SOP1b may be adjacent to an upper surface of the second body portion BDP2b. The second coupling opening SOP2b may be defined below the first coupling opening SOP1b. The second coupling opening SOP2b may be adjacent to a boundary between the first body portion BDP1b and the second body portion BDP2b.

[0118] The maximum diameter (or diameter) of the first coupling opening SOP1b in the second direction DR2 may be smaller than the maximum diameter (or diameter) of the second coupling opening SOP2b in the second direction DR2. Accordingly, the inner surface of the second body part BDP2b defining the coupling opening SOPb may have a stepped shape.

[0119] The body portion BDPb may further include a body protrusion BPPa. The body protrusion BPPa may be disposed in the second coupling opening SOP2b.

[0120] The nozzle NZb may further include a coupling member CTPb. The coupling member CTPb may have a cylindrical shape. The spray hole FSH may be defined on an upper surface of the coupling member CTPb. The spray hole FSH may extend in the third direction DR3 and pass through the coupling member CTPb.

[0121] The coupling member CTPb may include a first ejection protrusion BSP1b and a second ejection protrusion BSP2b. The first ejection protrusion BSP1b may be disposed on an inner surface of the coupling member CTPb defining the ejection hole FSH. The first ejection protrusion BSP1b may be disposed to correspond to the coupling protrusion EPPb of the ejection portion EXPb. The second ejection protrusion BSP2b may be disposed on an outer surface of the coupling member CTPb. The second ejection protrusion BSP2b may be disposed to correspond to the body protrusion BPPa.

[0122] refer to Figure 5A and Figure 5B , the main body BDPb, the ejection part EXPb and the coupling member CTPb may be coupled to each other. The coupling member CTPb may be disposed in the second coupling opening SOP2b. The second ejection protrusion BSP2b of the coupling member CTPb may be coupled to the main body protrusion BPPa disposed in the second coupling opening SOP2b in an engaging manner. The coupling member CTPb and the main body BDPb may be coupled to each other via the second ejection protrusion BSP2b and the main body protrusion BPPa. In one embodiment, the coupling member CTPb may be disposed between the main body BDPb and the ejection part EXPb.

[0123] The ejection portion EXPb may be disposed (or inserted) in the coupling opening SOPb. The ejection portion EXPb may be disposed (or inserted) in the ejection hole FSH. The coupling protrusion EPPb of the ejection portion EXPb may be coupled to the first coupling protrusion BSP1b of the coupling member CTPb in an engaging manner. The coupling protrusion EPPb and the first ejection protrusion BSP1b may be coupled to each other in an engaging manner. Accordingly, the ejection portion EXPb and the coupling member CTPb may be coupled to each other through the coupling protrusion EPPb and the first ejection protrusion BSP1b. The ejection portion EXPb may be coupled to the main body portion BDPb through the coupling member CTPb.

[0124] Compared with the case where the ejection part EXPb and the body part BDPb are directly coupled to each other, when the ejection part EXPb is coupled to the body part BDPb through the coupling member CTPb, the possibility of abrasion on the inner surface of the body part BDPb can be reduced. Accordingly, the service life of the body part BDPb can be extended.

[0125] For example, since the coupling member CTPb is coupled to be detachable from the body portion BDPb, the coupling member CTPb can be easily replaced. Accordingly, maintenance of the nozzle NZb can be easily performed.

[0126] The thermal expansion coefficient of the injection part EXPb may be greater than the thermal expansion coefficient of the main body BDPb and the connecting member CTPb. When the deposition material is heated to be evaporated (or vaporized), the thermal expansion amount of the injection part EXPb may be greater than the thermal expansion amount of the main body BDPb and the thermal expansion amount of the connecting member CTPb. The injection part EXPb may expand in the injection hole FSH. Accordingly, the space between the outer surface of the injection part EXPb and the inner surface of the connecting member CTPb may be sealed. Therefore, the deposition material may not leak into the space between the outer surface of the injection part EXPb and the inner surface of the connecting member CTPb, and may be ejected to the outside through the hole HL, thereby reducing unnecessary losses.

[0127] Fig. 6A and Figure 6B FIG. 1 is a schematic diagram illustrating a nozzle according to another embodiment.

[0128] For ease of explanation, Fig. 6A , the body portion BDPc is illustrated in a cross-sectional view taken along line II′, and the ejection portion EXPc and the coupling member CTPc are illustrated in a perspective view.

[0129] Fig. 6A illustrates a state in which the body portion BDPc, the ejection portion EXPc, and the coupling member CTPc are separated from each other, and Figure 6B A state in which the body portion BDPc, the injection portion EXPc, and the coupling member CTPc are coupled to each other is illustrated.

[0130] refer to Fig. 6A , the upper surfaces PL1 and PL2 of the body portion BDPc may include a first surface PL1 and a second surface PL2. The first surface PL1 may be adjacent to the coupling opening SOPc. The second surface PL2 may be spaced apart from the coupling opening SOPc. The first surface PL1 and the second surface PL2 may be connected to form a step portion. The height of the first surface PL1 may be lower than the height of the second surface PL2.

[0131] The connection opening SOPc may include a first connection opening SOP1c, a second connection opening SOP2c, and a third connection opening SOP3c. The first connection opening SOP1c may be defined by the second surface PL2. The second connection opening SOP2c may be defined by the inner surface of the second body portion BDP2c. The third connection opening SOP3c may be defined by the first body portion BDP1c. For example, the first connection opening SOP1c, the second connection opening SOP2c, and the third connection opening SOP3c may be integrated with each other.

[0132] For example, the maximum diameter (or diameter) of the first connection opening SOP1c may be greater than the maximum diameter (or diameter) of the second connection opening SOP2c. For example, the third connection opening SOP3c may have a polygonal shape, for example, in a plan view. The inner surface of the first body portion BDP1c that defines the third connection opening SOP3c may include a flat surface arranged at a specific angle. In one embodiment, the third connection opening SOP3c may have a circular shape in a plan view and may have a diameter larger than the diameter of the second connection opening SOP2c.

[0133] The coupling member CTPc may include a first portion PT1, a second portion PT2, and an ejection protrusion BSPa. The second portion PT2 may be disposed on the first portion PT1. The second portion PT2 may extend from the first portion PT1 in the third direction DR3. For example, the first portion PT1 and the second portion PT2 may be integral with each other.

[0134] In a plan view, the upper surface of the first portion PT1 may have a polygonal shape. The first portion PT1 may have a polygonal column shape. Fig. 6A , the first portion PT1 is illustrated as having a hexagonal column shape. The second portion PT2 may have a cylindrical shape. The maximum length of the first portion PT1 in the first direction DR1 may be greater than the diameter of the second portion PT2. In a plan view, the thickness of the first portion PT1 in the third direction DR3 may be less than the thickness of the second portion PT2 in the third direction DR3. In an embodiment, the first portion PT1 may have a cylindrical shape and may have a diameter larger than the diameter of the second portion PT2.

[0135] The ejection protrusion BSPa may be disposed on an outer surface of the second portion PT2. The ejection protrusion BSPa may have a shape surrounding the second portion PT2.

[0136] The injection part EXPc may include a first injection part EXP1, a second injection part EXP2, and a support part SPPb. The second injection part EXP2 may be disposed on the first injection part EXP1. The support part SPPb may be disposed between the first injection part EXP1 and the second injection part EXP2. For example, the first injection part EXP1, the second injection part EXP2, and the support part SPPb may be integrated with each other.

[0137] For example, the first ejection part EXP1 and the second ejection part EXP2 may have a cylindrical shape. The support part SPPb may have a ring shape. The diameter of the first ejection part EXP1 may be greater than the diameter of the second ejection part EXP2. The diameter of the support part SPPb may be greater than the diameter of the first ejection part EXP1.

[0138] refer to Fig. 6A and Figure 6B , the hole HLa may be defined (or formed) in the ejection portion EXPc. The hole HLa may extend in the third direction DR3. The hole HLa may include a first hole HL1 and a second hole HL2. The first hole HL1 may be defined by the first ejection portion EXP1 (or formed in the first ejection portion EXP1). The second hole HL2 may be defined by the second ejection portion EXP2 (or formed in the second ejection portion EXP2). When viewed from the first direction DR1, the diameter of the first hole HL1 in the second direction DR2 may be greater than the diameter of the second hole HL2 in the second direction DR2.

[0139] The injection portion EXPc may include a coupling protrusion EPPc. The coupling protrusion EPPc may be provided on an inner surface of the first injection portion EXP1 defining the first hole HL1. The coupling protrusion EPPc may be provided to correspond to the injection protrusion BSPa of the coupling member CTPc.

[0140] The ejection part EXPc, the main body BDPc and the coupling member CTPc may be coupled to each other. For example, the coupling member CTPc may be disposed in the coupling opening SOPc of the main body BDPc. The first portion PT1 of the coupling member CTPc may be disposed in the third coupling opening SOP3c. The second portion PT2 may be disposed in the second coupling opening SOP2c. In one embodiment, the coupling member CTPc may be disposed between the main body BDPc and the ejection part EXPc.

[0141] The injection portion EXPc may be disposed (or inserted) in the coupling opening SOPc. The first injection portion EXP1 may be disposed (or inserted) in the second coupling opening SOP2c. The first injection portion EXP1 may be disposed on the first portion PT1 of the coupling member CTPc.

[0142] The first ejection portion EXP1 may be coupled to the second portion PT2 of the coupling member CTPc. The coupling protrusion EPPc provided on the inner surface of the first ejection portion EXP1 may be coupled to the ejection protrusion BSPa provided on the outer surface of the second portion PT2 in an engaging manner. Accordingly, the ejection portion EXPc may be coupled to the coupling member CTPc. The ejection portion EXPc may be coupled to the body portion BDPc through the coupling member CTPc.

[0143] The support portion SPPb may be disposed in the first coupling opening SOP1c. The second injection portion EXP2 may be exposed to the outside from the body portion BDPc. The second hole HL2 may overlap with the injection hole FSHa. The second hole HL2 may be received in the crucible CRB (see Figure 1 ) may be evaporated (or vaporized) and ejected to the outside from the second hole HL2 after passing through the connection groove HAL and the ejection hole FSHa.

[0144] When the injection portion EXPc is coupled to the body portion BDPc through the coupling member CTPc, the possibility of wear occurring on the inner surface of the body portion BDPc can be reduced compared to a case where the injection portion EXPc and the body portion BDPc are directly coupled to each other.

[0145] For example, the coupling member CTPc is coupled to be detachable from the body portion BDPc, so that the coupling member CTPc can be easily replaced. Accordingly, maintenance of the nozzle NZc can be easily performed.

[0146] The thermal expansion coefficient of the injection part EXPc may be greater than the thermal expansion coefficient of the main body part BDPc and the thermal expansion coefficient of the connecting member CTPc. When the deposition material is heated to be evaporated (or vaporized), the thermal expansion amount of the injection part EXPc may be greater than the thermal expansion amount of the main body part BDPc and the thermal expansion amount of the connecting member CTPc. The injection part EXPc may expand within the connecting opening SOPc. Accordingly, the space between the inner surface of the main body part BDPc and the outer surface of the injection part EXPc may be sealed. Therefore, the deposition material may not leak into the space between the outer surface of the injection part EXPc and the inner surface of the connecting member CTPc, and may be ejected to the outside through the hole HLa, thereby reducing unnecessary losses.

[0147] Fig. 7A and Figure 7B FIG. 1 is a schematic diagram illustrating an injection portion according to another embodiment.

[0148] For example, Fig. 7A and Figure 7B Illustrated in perspective.

[0149] because Fig. 7A and Figure 7B The connection protrusion EPP and hole HL are Figure 3A and Figure 3B The coupling protrusion EPP and the hole HL are the same, so for the convenience of description, their description will be omitted or simplified.

[0150] refer to Fig. 7A, the fastening groove FLG may be defined (or formed) in the outer surface of the ejection portion EXPd. As the fastening groove FLG is defined, the flat surface FLA may be provided on the outer surface of the ejection portion EXPd. In an embodiment, the upper surface of the ejection portion EXPd may have a ring shape in a plan view.

[0151] For example, the ejection portion EXPd is connected to the body portion BDP (see Figure 2 ), the fastening groove FLG is defined (or formed) in the outer surface of the ejection portion EXPd, so the ejection portion EXPd can be easily used by a tool. Accordingly, in the case where the ejection portion EXPd is coupled to the body portion BDP (see Figure 2 ), the connection process can be easily carried out.

[0152] refer to Figure 7B , the ejection portion EXPe may have a hexagonal column shape. In a plan view, the upper surface of the ejection portion EXPe may have a hexagonal shape. However, this is illustrated as an example, and the shape of the ejection portion EXPe may have a different polygonal shape.

[0153] The flat surface FLAa may be provided on the outer surface of the ejection portion EXPe. For example, since the flat surface FLAa is provided on the outer surface of the ejection portion EXPe, when the ejection portion EXPe is coupled to the body portion BDP (see FIG. Figure 2 ) can easily facilitate the use of tools during the process. Accordingly, in the case where the ejection portion EXPe is connected to the body portion BDP (see Figure 2 ), the joining process can be easily carried out.

[0154] Figure 8 For use Figure 1 Schematic plan view of a display panel manufactured using the deposition apparatus illustrated in FIG.

[0155] refer to Figure 8 The display panel DP may have a rectangular shape having short sides extending in the first direction DR1 and long sides extending in the second direction DR2, but the shape of the display panel DP is not limited thereto. The display panel DP may include a display unit DA and a non-display unit NDA surrounding the display unit DA.

[0156] The display panel DP may be a light-emitting display panel. The display panel DP may be an organic light-emitting display panel or a quantum dot light-emitting display panel. The light-emitting layer of the organic light-emitting display panel may include an organic light-emitting material. The light-emitting layer of the quantum dot light-emitting display panel may include materials such as quantum dots and quantum rods. Hereinafter, the display panel DP will be described as an organic light-emitting display panel.

[0157] The display panel DP may include pixels PX, scan lines SL1-SLm, data lines DL1-DLn, emission lines EL1-ELm, first and second control lines CSL1 and CSL2, first and second power lines P1 and P2, connection lines CNL, and pads PD. Here, m and n may be natural numbers greater than zero.

[0158] The pixel PX may be disposed in the display unit DA, and the scanning driving unit SDV and the light emitting driving unit EDV may be disposed in the non-display unit NDA adjacent to the long side of the display panel DP. The data driving unit DDV may be disposed in the non-display unit NDA adjacent to one of the short sides of the display panel DP. In a plan view, the data driving unit DDV may be adjacent to the lower end portion of the display panel DP.

[0159] The scan lines SL1-SLm may extend in the first direction DR1 to be connected to the pixels PX and the scan driving unit SDV. The data lines DL1-DLn may extend in the second direction DR2 to be connected to the pixels PX and the data driving unit DDV. The emission lines EL1-ELm may extend in the first direction DR1 to be connected to the pixels PX and the emission driving unit EDV.

[0160] The first power line P1 may extend in the second direction DR2 and may be disposed in the non-display unit NDA. The first power line P1 may be disposed between the display unit DA and the light emitting driving unit EDV. However, the embodiment is not limited thereto, and the first power line P1 may be disposed between the display unit DA and the scanning driving unit SDV.

[0161] The connection line CNL may extend in the first direction DR1 and may be arranged along the second direction DR2. The connection line CNL may be connected to the first power line P1 and the pixel PX. The first voltage may be applied to the pixel PX through the first power line P1 and the connection line CNL connected to each other.

[0162] The second power line P2 may be disposed in the non-display unit NDA. The second power line P2 may extend along one of the long sides of the display panel DP and the short sides of the display panel DP where the data driving unit DDV is not disposed. The second power line P2 may be disposed outside the scan driving unit SDV and the light emitting driving unit EDV.

[0163] For example, the second power line P2 may extend toward the display unit DA and may be connected to the pixel PX. A second voltage having a voltage level lower than that of the first voltage may be applied to the pixel PX through the second power line P2.

[0164] The first control line CSL1 may be connected to the scan driving unit SDV and may extend toward a lower end portion of the display panel DP in a plan view. The second control line CSL2 may be connected to the light emitting driving unit EDV and may extend toward a lower end portion of the display panel DP in a plan view. The data driving unit DDV may be disposed between the first control line CSL1 and the second control line CSL2.

[0165] The pad PD may be disposed on the display panel DP. The pad PD may be closer to the lower end portion of the display panel DP than the data driving unit DDV. The data driving unit DDV, the first power line P1, the second power line P2, the first control line CSL1, and the second control line CSL2 may be connected to the pad PD. The data lines DL1-DLn may be connected to the data driving unit DDV, and the data driving unit DDV may be connected to the pad PD corresponding to the data lines DL1-DLn.

[0166] Figure 1 The unit area CEA illustrated in the example may correspond to Figure 8 The display panel DP illustrated in FIG. 4 may be disposed on one unit area CEA, and the light emitting elements of a single display panel DP may be formed by a unit opening MOP defined (or formed) in the unit area CEA.

[0167] The unit area corresponding to the display panel DP may be defined (or formed) on the substrate SUB (see Figure 1 After the light emitting element is formed in the unit area, the unit area can be cut. Accordingly, the following can be manufactured: Figure 8 The display panel DP shown in FIG.

[0168] For example, a timing controller for controlling the operation of the scan driving unit SDV, the data driving unit DDV and the light emitting driving unit EDV and a voltage generator for generating the first voltage and the second voltage may be provided on the printed circuit board. The timing controller and the voltage generator may be connected to the corresponding pads PD through the printed circuit board.

[0169] The scan driving unit SDV may generate a scan signal, and the scan signal may be applied to the pixel PX through the scan lines SL1-SLm. The data driving unit DDV may generate a data voltage, and the data voltage may be applied to the pixel PX through the data lines DL1-DLn. The light emitting driving unit EDV may generate a light emitting signal, and the light emitting signal may be applied to the pixel PX through the light emitting lines EL1-ELm.

[0170] The pixel PX may receive a data voltage in response to a scan signal. The pixel PX may display an image by emitting light having brightness corresponding to the data voltage in response to a light emission signal. The light emission time of the pixel PX may be controlled by the light emission signal.

[0171] The display panel DP in which the light emitting layer of the pixel PX is not formed may be defined as the above-mentioned substrate SUB.

[0172] In the following, Fig.10 , wherein a cross-sectional structure of a substrate SUB in which a light emitting layer is not formed is described. A pad PD may be formed on the substrate SUB, and the substrate SUB may be defined (or formed) to be in a state where a printed circuit board is not connected. The pad PD may be connected to a ground terminal, and thus the pad PD and the data lines DL1-DLn may be grounded.

[0173] Fig. 9 As an example Figure 8 Schematic diagram of a cross section of a pixel illustrated in FIG.

[0174] refer to Figure 8 and Fig. 9 The pixel PX may be disposed on the base substrate BS and may include a transistor TR and a light emitting element OLED. The transistor TR and the light emitting element OLED of the pixel PX may be connected to the data lines DL1-DLn and the first and second power lines P1 and P2.

[0175] The transistor TR and the light emitting element OLED of the pixel PX can be connected through the data lines DL1-DLn (see Figure 8 ) and the first power line P1 and the second power line P2 (see Figure 8 )Connect to Figure 8 The transistor TR of the pixel PX can be connected to the pad PD through the data lines DL1-DLn (see Figure 8 )Connect to Figure 8 The pad PD.

[0176] The light emitting element OLED may include a first electrode AE, a second electrode CE, a hole control layer HCL, an electron control layer ECL, and an emission layer EML. The first electrode AE ​​may be an anode electrode, and the second electrode CE may be a cathode electrode.

[0177] The transistor TR and the light emitting element OLED may be disposed on the base substrate BS. For example, a single transistor TR is exemplified, but basically the pixel PX may include a plurality of transistors and at least one capacitor for driving the light emitting element OLED.

[0178] The display unit DA may include a light emitting cell PA corresponding to the pixel PX and a non-light emitting cell NPA surrounding the light emitting cell PA. The light emitting element OLED may be provided in the light emitting cell PA.

[0179] The base substrate BS may include a flexible plastic substrate. For example, the base substrate BS may include transparent polyimide (PI). The buffer layer BFL may be disposed on the base substrate BS, and the buffer layer BFL may be an inorganic layer.

[0180] The semiconductor pattern may be disposed on the buffer layer BFL. The semiconductor pattern may include polycrystalline silicon. However, the embodiment is not limited thereto, and the semiconductor pattern may include amorphous silicon or metal oxide.

[0181] The semiconductor pattern may be doped with an N-type dopant or a P-type dopant. The semiconductor pattern may include a heavily doped region and a lightly doped region. The heavily doped region may have a conductivity greater than that of the lightly doped region and may substantially function as a source electrode and a drain electrode of the transistor TR. The lightly doped region may substantially correspond to an active region (or channel region) of the transistor.

[0182] The source region S, the active region A, and the drain region D may be formed of a semiconductor pattern. A first insulating layer INS1 may be disposed on the semiconductor pattern. A gate electrode G of the transistor TR may be disposed on the first insulating layer INS1. A second insulating layer INS2 may be disposed on the gate electrode G. A third insulating layer INS3 may be disposed on the second insulating layer INS2.

[0183] The connection electrode CNE may be disposed between the transistor TR and the light emitting element OLED to connect the transistor TR and the light emitting element OLED. The connection electrode CNE may include a first connection electrode CNE1 and a second connection electrode CNE2.

[0184] The first connection electrode CNE1 may be disposed on the third insulating layer INS3 and connected to the drain region D through a first contact hole CH1 defined (or formed) in the first to third insulating layers INS1 to INS3. The fourth insulating layer INS4 may be disposed on the first connection electrode CNE1. The fifth insulating layer INS5 may be disposed on the fourth insulating layer INS4.

[0185] The second connection electrode CNE2 may be disposed on the fifth insulating layer INS5. The second connection electrode CNE2 may be connected to the first connection electrode CNE1 through a second contact hole CH2 defined (or formed) in the fourth insulating layer INS4 and the fifth insulating layer INS5. The sixth insulating layer INS6 may be disposed on the second connection electrode CNE2. The first to sixth insulating layers INS1 to INS6 may be inorganic layers or organic layers.

[0186] The first electrode AE ​​may be disposed on the sixth insulating layer INS6. The first electrode AE ​​may be connected to the second connection electrode CNE2 through a third contact hole CH3 defined (or formed) in the sixth insulating layer INS6. A pixel defining film PDL exposing a specific portion of the first electrode AE ​​may be disposed on the first electrode AE ​​and the sixth insulating layer INS6. An opening PX_OP for exposing a specific portion of the first electrode AE ​​may be defined (or formed) in the pixel defining film PDL.

[0187] The hole control layer HCL may be disposed on the first electrode AE ​​and the pixel definition layer PDL. The hole control layer HCL may be disposed on the light emitting unit PA and the non-light emitting unit NPA. The hole control layer HCL may include a hole transport layer and a hole injection layer.

[0188] The emission layer EML may be disposed on the hole control layer HCL. The emission layer EML may be disposed in a region corresponding to the opening PX_OP. The emission layer EML may include an organic material and / or an inorganic material. The emission layer EML may generate any one of red light, green light, and blue light.

[0189] The electron control layer ECL may be disposed on the emission layer EML and the hole control layer HCL. The electron control layer ECL may be disposed on the light emitting unit PA and the non-light emitting unit NPA together. The electron control layer ECL may include an electron transport layer and an electron injection layer.

[0190] The second electrode CE may be disposed on the electronic control layer ECL. The second electrode CE may be disposed collectively on the pixel PX. A layer from the buffer layer BFL to the light emitting element OLED may be defined as a pixel layer.

[0191] The thin film encapsulation layer TFE may be disposed on the light emitting element OLED. The thin film encapsulation layer TFE may be disposed on the second electrode CE to cover the pixel PX. The thin film encapsulation layer TFE may include at least two inorganic layers and an organic layer between the at least two inorganic layers. The inorganic layer may protect the pixel PX from moisture / oxygen. The organic layer may protect the pixel PX from foreign substances such as dust particles.

[0192] A first voltage may be applied to the first electrode AE ​​through the transistor TR, and a second voltage having a voltage level lower than that of the first voltage may be applied to the second electrode CE. Holes and electrons injected into the emission layer EML may combine to generate excitons, and the light emitting element OLED may emit light when the excitons transition to a ground state.

[0193] Fig.10 As an example for Fig. 9 Schematic diagram of the deposition process of the light-emitting element illustrated in FIG.

[0194] For ease of description, Figure 1 The substrate SUB and the mask MM shown in the example are Fig.10 Vertical inversion.

[0195] refer to Figure 1 and Fig.10 , a layer from the base substrate BS to the hole control layer HCL disposed on the first electrode AE ​​may be defined as a substrate SUB. A mask MM may be disposed on the substrate SUB.

[0196] As described above, the transistor TR may be connected to the pad PD through the data lines DL1 -DLn. For example, the substrate SUB may include the data lines DL1 -DLn and the pad PD connected to the data lines DL1 -DLn.

[0197] The mask MM may be disposed to face the substrate SUB. The mask MM may be disposed close to the substrate SUB. The deposition material DPM may be provided (or sprayed) onto the substrate SUB through the unit opening MOP defined (or formed) in the upper surface of the mask MM. The emission layer EML may be formed on the substrate SUB by the deposition material DPM.

[0198] According to an embodiment, the ejection part EXP including a material different from that of the main body part BPD of the nozzle NZ may be separated and replaced. The main body part BPD and the crucible CRB may include the same material. Accordingly, in the case where the nozzle NZ is heated at a high temperature, a difference in the amount of thermal expansion may occur in the main body part BPD and the ejection part EXP. The ejection part EXP having a high coefficient of thermal expansion may expand to seal the space between the main body part BPD and the ejection part EXP.

[0199] According to an embodiment, the main body portion BPD and the ejection portion EXP may be coupled to each other by a coupling member CTPa, a coupling member CTPb, or a coupling member CTPc. The coupling member CTPa, the coupling member CTPb, or the coupling member CTPc may be coupled to the main body portion BPD, and the ejection portion EXP may be coupled to the coupling member CTPa, the coupling member CTPb, or the coupling member CTPc. Accordingly, wear generated in the case where the ejection portion EXP is directly coupled to the main body portion BPD may not occur in the main body portion BPD, so that maintenance and repair of the nozzle NZ may be easily performed.

[0200] For example, a flat surface may be provided on the outer surface of the ejection portion EXP. Accordingly, in a case where the ejection portion EXP is coupled to the body portion BPD, the fastening strength between the ejection portion EXP and the body portion BPD may be precisely adjusted using a tool.

[0201] In summarizing the detailed description, those skilled in the art will recognize that many changes and modifications may be made to the embodiments without departing substantially from the principles, spirit and scope of the present disclosure. Therefore, the disclosed embodiments are used in a general and descriptive sense only and not for the purpose of limitation.

Claims

1. A deposition device, comprising: Mask frame; A mask, arranged on the mask frame; A crucible, disposed below the mask frame; as well as a nozzle disposed between the crucible and the mask frame and coupled to the crucible, wherein The nozzle comprises: A main body portion including a coupling opening; and an injection portion disposed in the coupling opening and comprising a hole overlapping the coupling opening, and The thermal expansion coefficient of the injection portion is greater than the thermal expansion coefficient of the main body portion.

2. The deposition apparatus according to claim 1, wherein The crucible and the body portion comprise the same material, and The injection portion includes a material different from that of the crucible and the body portion.

3. The deposition apparatus according to claim 1, wherein The main body portion further includes a main body protrusion disposed in the coupling opening and disposed on an inner surface of the main body portion, The injection portion further includes a coupling protrusion, and the coupling protrusion is disposed on an outer surface of the injection portion. The main body protrusion and the coupling protrusion are coupled to each other in an engaging manner, and The body portion and the injection portion are coupled to each other through the body protrusion and the coupling protrusion.

4. The deposition apparatus according to claim 1, wherein The nozzle further includes a coupling member disposed in the coupling opening and including a spray hole, and The body part and the injection part are coupled to each other by the coupling member. 5 . The deposition apparatus according to claim 4 , wherein a thermal expansion coefficient of the coupling member is smaller than a thermal expansion coefficient of the ejection portion.

6. The deposition apparatus according to claim 4, wherein the coupling opening of the main body portion comprises: a first coupling opening adjacent to the upper surface of the main body; and A second coupling opening is disposed below the first coupling opening and has a diameter greater than that of the first coupling opening.

7. The deposition apparatus according to claim 6, wherein The coupling member includes a first injection protrusion disposed on an inner surface of the coupling member and disposed in the injection hole, The injection portion includes a coupling protrusion, and the coupling protrusion is provided on an outer surface of the injection portion, The coupling member is disposed in the second coupling opening of the main body, and The coupling protrusion is coupled to the first injection protrusion in an engaging manner so that the injection portion and the coupling member are coupled to each other. 8 . The deposition apparatus of claim 7 , wherein the coupling member further comprises a second spraying protrusion disposed on an outer surface of the coupling member.

9. The deposition apparatus according to claim 8, wherein the body portion includes a body protrusion disposed on an inner surface of the body portion and disposed in the second coupling opening, and The body protrusion is coupled to the second injection protrusion of the coupling member in an engaging manner so that the body portion and the coupling member are coupled to each other.

10. The deposition apparatus according to claim 4, wherein The coupling opening of the main body portion includes: a first coupling opening adjacent to the upper surface of the main body; a second coupling opening, disposed below the first coupling opening; and A third connection opening is arranged below the second connection opening, The first coupling opening has a diameter greater than a diameter of the second coupling opening, and The third coupling opening has a diameter greater than a diameter of the second coupling opening.

11. The deposition apparatus according to claim 10, wherein The connecting member comprises: The first part has a cylindrical shape; a second portion, disposed on the first portion and having a cylindrical shape in plan view, having a diameter smaller than that of the first portion; and an injection protrusion, disposed on an outer surface of the second portion, The first portion is disposed in the third coupling opening of the main body, and The second portion is disposed in the second coupling opening of the body portion.

12. The deposition apparatus according to claim 11, wherein The injection unit comprises: a first injection portion having a cylindrical shape; a second injection portion disposed on the first injection portion and having a cylindrical shape in a plan view, having a diameter smaller than that of the first injection portion; and a coupling protrusion disposed on an inner surface of the first injection portion and disposed in the hole of the injection portion, and The coupling protrusion is engagedly coupled to the injection protrusion of the coupling member within the second coupling opening so that the injection portion and the coupling member are coupled to each other.

13. The deposition apparatus according to claim 12, wherein The injection portion further includes a support portion disposed between the first injection portion and the second injection portion and having a ring shape, and The support portion is disposed in the first coupling opening of the body portion.

14. The deposition apparatus according to claim 1, wherein The upper surface of the injection portion has a ring shape in a plan view, and A plurality of fastening grooves are formed in an outer surface of the ejection portion.

15. The deposition apparatus according to claim 1, wherein The upper surface of the injection portion has a polygonal shape in a plan view, and The outer surface of the injection portion includes a plurality of flat surfaces.

16. A deposition apparatus comprising: Mask frame; A mask, arranged on the mask frame; A crucible, disposed below the mask frame; as well as a nozzle disposed between the crucible and the mask frame; and The nozzle comprises: A main body portion including a coupling opening; an injection portion disposed in the coupling opening and including a hole overlapping the coupling opening; and a coupling member disposed between the main body and the injection portion and including an injection hole, and The body part and the injection part are coupled to each other by the coupling member.

17. The deposition apparatus according to claim 16, wherein The injection portion includes a coupling protrusion, and the coupling protrusion is provided on an outer surface of the injection portion, The coupling member includes a first injection protrusion disposed on an inner surface of the coupling member and disposed in the injection hole, and The first ejection protrusion and the coupling protrusion are coupled to each other in an engaged manner.

18. The deposition apparatus according to claim 17, wherein The main body portion includes a main body protrusion, which is disposed on an inner surface of the main body portion and is disposed in the coupling opening. The coupling member further includes a second injection protrusion disposed on an outer surface of the coupling member, and The second ejection protrusion and the body protrusion are coupled to each other in an engaging manner.

19. The deposition apparatus according to claim 16, wherein the coupling member comprises: The first part has a cylindrical shape; a second part, arranged on the first part; and The injection protrusion is arranged on the outer surface of the second part.

20. The deposition apparatus of claim 19, wherein The injection portion includes a coupling protrusion disposed on an inner surface of the injection portion and disposed in the hole of the injection portion, and The coupling protrusion and the ejection protrusion are coupled to each other in an engaging manner.

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