Method and device for detecting whether remelting is completed or not

Abstract

The invention belongs to the technical field of Czochralski single crystal manufacturing, and relates to a method for detecting whether remelting is completed, which comprises the following steps: starting a judgment model while starting a remelting step of a single crystal furnace; controlling image acquisition equipment to continuously acquire liquid level image information in the single crystal furnace according to a preset period, and feeding back the liquid level image information to the judgment model; and continuously comparing the image information with the target image in the judgment model until the similarity between the image information and the target image meets a set threshold value, and completing remelting. The method has the beneficial effects that the re-melting judgment model is additionally arranged, the image acquisition equipment is started and controlled to continuously acquire the liquid level image information in the single crystal furnace according to the preset period after entering the re-melting working step, and the liquid level image information is continuously compared with the target image until the similarity of the liquid level image information and the target image meets the set threshold value, so that the re-melting working step is completed; and then prompt information is sent to the coil base to prompt personnel to carry out the next step of operation, rapid welding is achieved, the defects of an existing mode can be effectively overcome, and meanwhile the working hour utilization rate can be increased.

Description

Technical Field

[0001] The invention belongs to the technical field of Czochralski single crystal manufacturing, and relates to a method and a device for detecting whether melting back is completed. Background Art

[0002] When using the Czochralski method to pull single crystal silicon, after the buds are broken to a certain length of equal diameter, the broken single crystals will be melted into liquid again and the single crystal will continue to be pulled to avoid waste of raw materials. At this time, the power needs to be increased to reach the remelting temperature, and the crystals need to be continuously lowered into the solution for remelting. At the same time, during the remelting process, personnel need to continue to pay attention to the progress to prevent abnormalities caused by excessively high solution temperatures during the remelting process, and damage to the quartz crucible caused by continued high temperatures, which would affect subsequent crystallization.

[0003] At present, the liquid level changes in the single crystal furnace are mainly monitored manually through an observation window, and this is used as a criterion for judging whether the remelting step is completed. However, due to differences in thermal fields and welding powers, the temperature in the furnace is inconsistent within the same heating time. Some furnaces are remelted prematurely, and personnel do not pay enough attention, resulting in continuous high temperatures in the furnace, which leads to boiling of the solution. The efficiency is low and the accuracy is low. Therefore, a method and equipment for detecting whether the remelting is completed are needed to solve the above technical problems. Summary of the invention

[0004] In order to solve the above-mentioned technical problems, the present invention provides a method and a device for detecting whether the remelting is completed, which improves the recognition accuracy and the automation efficiency of the furnace by replacing the manual perspective with the machine perspective.

[0005] The technical solution adopted by the present invention is: a method for detecting whether remelting is completed, characterized in that it includes the following steps:

[0006] When the single crystal furnace starts the remelting process, the judgment model is started;

[0007] Controlling the image acquisition device to continuously acquire the liquid level image information in the single crystal furnace according to a preset period, and feeding back the information to the judgment model;

[0008] The image information is continuously compared with the target image in the judgment model until the similarity between the two meets the set threshold and the remelting is completed.

[0009] Furthermore, if the similarity between the image information and the target image is less than the set threshold, a new group of image information is continuously collected.

[0010] Furthermore, if the similarity between the image information and the target image is greater than or equal to the set threshold, the remelting is completed.

[0011] Furthermore, the set threshold is 98% to 99%.

[0012] Furthermore, the image acquisition device is a CCD camera, and within the same preset period, 8 to 10 pieces of image information are grouped together.

[0013] Furthermore, the preset period is 10 to 15 seconds.

[0014] Furthermore, in a group of the image information, at least 5 images have a similarity with the target image ≥ the set threshold, and the remelting is completed.

[0015] Furthermore, after the remelting is completed, the judgment model outputs a prompt message to the furnace to proceed to the next step.

[0016] Furthermore, the judgment model is provided with a monitoring alarm system, which sends out an alarm signal when the parameters are abnormal.

[0017] A detection device, characterized in that it includes a processor and a communication interface, the communication interface is coupled to the processor, and the processor is used to run a computer program or instruction to implement the detection method for whether the remelting is completed as described above.

[0018] The present invention relates to a method and device for detecting whether remelting is completed. In the method, a remelting judgment model is added and turned on after entering the remelting step, and an image acquisition device is controlled to continuously collect liquid surface image information in a single crystal furnace according to a preset period. During this process, the image is continuously compared with the target image until the similarity between the two meets the set threshold. At this time, the remelting step is completed, and then the judgment model outputs prompt information to the furnace table, prompting the personnel to perform the next operation to achieve rapid welding. This method can effectively avoid the shortcomings of the existing mode and improve the utilization rate of working hours.

[0019] 1. The machine perspective is used instead of the manual perspective to judge whether the remelting is completed, which not only improves the accuracy of recognition, but also improves the automation efficiency of the furnace;

[0020] 2. Accurate judgment of remelting time can effectively save remelting time, improve the utilization rate of working hours, reduce the constant inspection of on-site operators, reduce unnecessary movement waste of personnel, improve personnel work efficiency, and unify the implementation standards;

[0021] 3. This method can accurately determine the time when the remelting is completed and handle it in time to prevent abnormal remelting temperature from affecting crystal formation. It can effectively avoid the occurrence of abnormalities caused by excessively high solution temperature and the risk of continuous solution boiling damaging the quartz crucible. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a flow chart of an embodiment provided by the present invention. DETAILED DESCRIPTION

[0023] The present invention is further described below in conjunction with the accompanying drawings and specific embodiments.

[0024] In a first aspect, the present invention provides a method for detecting whether remelting is completed, characterized in that it comprises the following steps:

[0025] When the single crystal furnace starts the remelting process, the judgment model is started;

[0026] Control the image acquisition device to continuously acquire the liquid level image information in the single crystal furnace according to a preset period, and feed it back to the judgment model;

[0027] Continuously compare the image information with the target image in the judgment model until the similarity between the two meets the set threshold and the remelting is completed. In the existing mode, a remelting judgment model is added, in which multiple parameters are set, and the liquid level image information in the single crystal furnace continuously collected by the image acquisition device according to the preset period can be received. The image information can also be continuously compared with the target image in the judgment model and the information can be fed back to the furnace in time, and multiple furnaces can be monitored at the same time. When the single crystal furnace enters the remelting step, the above-mentioned judgment model is immediately started, and the liquid level image information in the single crystal furnace continuously collected by the image acquisition device according to the preset period is received. The image information is continuously compared with the target image in the judgment model until the similarity between the two meets the set threshold, and the remelting is completed. Manual observation through the observation window is no longer required, the accuracy is higher, the labor intensity of the personnel is reduced, and the automation degree of the overall system is improved. After the remelting step is completed, the judgment model also outputs prompt information to the furnace, prompting the personnel to perform the next operation to achieve rapid welding. This method can effectively avoid the shortcomings of the existing mode and improve the utilization rate of working hours.

[0028] Preferably, if the similarity between the image information and the target image is less than a set threshold, a new set of image information is continuously collected. In this embodiment, multiple target images are preferentially stored in the judgment model, and after the new image information is collected, it is quickly compared with the target image.

[0029] Preferably, the similarity between the image information and the target image is ≥ the set threshold, and the remelting is completed.

[0030] Preferably, the threshold is set at 98% to 99%.

[0031] Preferably, the image acquisition device is a CCD camera, and within the same preset period, 8 to 10 pieces of image information are grouped together.

[0032] Preferably, the preset period is 10 to 15 seconds.

[0033] Preferably, in a group of the image information, at least 5 images have a similarity with the target image ≥ the set threshold, and the remelting is completed.

[0034] Preferably, the judgment model is connected to the furnace system. The user can know the progress of remelting at any time with high accuracy, and reduce the time of continuous inspection of on-site operators, improve the work efficiency of personnel, and facilitate the unified implementation of standards.

[0035] Preferably, after remelting is completed, the judgment model outputs a prompt message to the furnace to proceed to the next step.

[0036] Preferably, the judgment model is provided with a monitoring alarm system, which sends out an alarm signal when the parameters are abnormal. In this embodiment, the judgment model is provided with parameters related to monitoring alarm, and the parameters involve image acquisition equipment, comparison results between image information and target image, output prompt information and other links. The monitoring alarm system can obtain relevant information and judge whether the operation is abnormal based on the parameter information, and send out an alarm signal when the parameters are abnormal, thereby improving the safety of the equipment when in use. Of course, it is also possible to connect the monitoring alarm system to some links, and the user can make flexible adjustments, which are not specifically limited here.

[0037] A detection device, characterized in that it includes a processor and a communication interface, the communication interface is coupled to the processor, and the processor is used to run a computer program or instruction to implement the detection method for whether the remelting is completed as described above.

[0038] In a second aspect, the present invention provides a detection device, using the above-mentioned method for detecting whether the remelting is completed, which includes a processor and a communication interface, the communication interface and the processor are coupled, and the processor is used to run a computer program or instruction to implement the above-mentioned method for detecting whether the remelting is completed. In this embodiment, the above-mentioned processor is a central processing unit or an integrated circuit for controlling the execution of the program of the technical solution, and the communication interface can be a transceiver device capable of communicating with other devices or communication networks so that the signal can transmit information between the detection devices.

[0039] Preferably, the device further comprises a memory for executing the computer instructions of the technical solution, and the execution is controlled by a processor. The processor is used to execute the computer instructions stored in the memory.

[0040] In a third aspect, the present invention provides a computer storage medium, characterized in that the computer storage medium stores instructions, and when the instructions are executed, the above-mentioned method for detecting whether the remelting is completed is implemented. The computer readable storage medium stores instructions, and when the instructions are executed, the functions performed by the detection device in the above-mentioned embodiment are implemented.

[0041] The beneficial effects of the second aspect, the third aspect and various implementations thereof in the present invention are the same as the beneficial effects of the first aspect or any possible implementation of the first aspect, and are not described in detail herein. In the above embodiments, they can be implemented in whole or in part by software, hardware, firmware or any combination thereof. When implemented by software, they can be implemented in whole or in part in the form of a computer program product.

[0042] The present invention relates to a method and device for detecting whether remelting is completed. In the method, a remelting judgment model is added and turned on after entering the remelting step, and an image acquisition device is controlled to continuously collect liquid surface image information in a single crystal furnace according to a preset period. During this process, the image is continuously compared with the target image until the similarity between the two meets the set threshold. At this time, the remelting step is completed, and then the judgment model outputs prompt information to the furnace table, prompting the personnel to perform the next operation to achieve rapid welding. This method can effectively avoid the shortcomings of the existing mode and improve the utilization rate of working hours.

[0043] 1. The machine perspective is used instead of the manual perspective to judge whether the remelting is completed, which not only improves the accuracy of recognition, but also improves the automation efficiency of the furnace;

[0044] 2. Accurate judgment of remelting time can effectively save remelting time, improve the utilization rate of working hours, reduce the constant inspection of on-site operators, reduce unnecessary movement waste of personnel, improve personnel work efficiency, and unify the implementation standards;

[0045] 3. This method can accurately determine the time when the remelting is completed and handle it in time to prevent abnormal remelting temperature from affecting crystal formation. It can effectively avoid the occurrence of abnormalities caused by excessively high solution temperature and the risk of continuous solution boiling damaging the quartz crucible.

[0046] The embodiments of the present invention are described in detail above, but the contents described are only preferred embodiments of the present invention and cannot be considered to limit the scope of implementation of the present invention. All equivalent changes and improvements made within the scope of the present invention should still fall within the scope of the patent coverage of the present invention.

Claims

1. A method for detecting whether remelting is completed, characterized in that: The steps include: When the single crystal furnace starts the remelting process, the judgment model is started; Controlling the image acquisition device to continuously acquire the liquid level image information in the single crystal furnace according to a preset period, and feeding back the information to the judgment model; The image information is continuously compared with the target image in the judgment model until the similarity between the two meets the set threshold and the remelting is completed.

2. The method for detecting whether remelting is completed according to claim 1, characterized in that: If the similarity between the image information and the target image is less than the set threshold, a new group of image information is continuously collected.

3. The method for detecting whether remelting is completed according to claim 2, characterized in that: If the similarity between the image information and the target image is greater than or equal to the set threshold, remelting is completed.

4. The method for detecting whether remelting is completed according to claim 3, characterized in that: The set threshold is 98% to 99%.

5. The method for detecting whether remelting is completed according to claim 4, characterized in that: The image acquisition device is a CCD camera, and within the same preset period, 8 to 10 pieces of image information are grouped as one.

6. The method for detecting whether remelting is completed according to claim 5, characterized in that: The preset period is 10 to 15 seconds.

7. The method for detecting whether remelting is completed according to claim 6, characterized in that: In a group of the image information, if at least 5 images have a similarity with the target image ≥ the set threshold, the remelting is completed.

8. The method for detecting whether remelting is completed according to any one of claims 1 to 7, characterized in that: After the remelting is completed, the judgment model outputs a prompt message to the furnace to proceed to the next step.

9. The method for detecting whether remelting is completed according to claim 8, characterized in that: The judgment model is provided with a monitoring alarm system, which sends out an alarm signal when the parameters are abnormal.

10. A detection device, characterized in that: It comprises a processor and a communication interface, wherein the communication interface is coupled to the processor, and the processor is used to run a computer program or instruction to implement the method for detecting whether the remelting is completed as described in any one of claims 1 to 8.

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