A single particle burnt area online positioning system, irradiation terminal equipment and use method

Abstract

The present invention relates to the field of irradiation monitoring technology, and specifically provides a single-particle burnout area online positioning system, an irradiation terminal device, and a method of use. The positioning system includes: a beam detection unit for monitoring the particle beam intensity, a vacuum control unit, and a microscopic rapid positioning unit. A particle accelerator is used to generate particles to irradiate a sample to be tested. During the irradiation process, the microscopic rapid positioning unit captures the radiation excited on the surface of the sample to be tested after the particles irradiate the sample to be tested, separates the radiation into bands, and images the multi-band radiation. The temperature distribution on the surface of the sample to be tested is calculated based on the imaging data, and the single-particle burnout area is located based on the temperature distribution, thereby realizing in-situ online analysis and monitoring of power devices during the irradiation process. The above-mentioned positioning system is integrated into the irradiation terminal, which solves the problem that traditional irradiation terminals lack the function of in-situ online monitoring and analysis of the sample to be tested, and has a vacuum irradiation mode, an atmospheric irradiation mode, and a single-particle burnout positioning mode.

Description

Technical Field

[0001] The present invention relates to the technical field of irradiation monitoring, and specifically provides a single particle burnout area online positioning system, irradiation terminal equipment and a use method. Background Art

[0002] With the deepening of research and development of deep space exploration, the space environment faced by spacecraft is becoming increasingly complex. The deep space exploration environment is a strong radiation environment with high-energy particles. Electronic components are impacted by high-energy particles in this radiation environment, resulting in a variety of radiation effects, which will significantly change their electrical properties and radiation resistance characteristics, causing the spacecraft to malfunction or even fail, seriously threatening the safe and reliable operation of the spacecraft. At present, the stable operation of the power supply system on a spacecraft is directly related to its long-term stable operation. Power devices, as one of the core components of the power supply system, operate in a high voltage state. When such devices are impacted by high-energy particles in the space environment, they will be burned by single particles. The unchecked increase in high-energy particle impacts will cause the power devices to burn out, which will directly damage the spacecraft power supply system.

[0003] The design and modification of traditional irradiation terminals primarily simulate space environments, including providing ions of varying energies and vacuum systems with varying ambient temperatures. However, there is a lack of irradiation terminals capable of in-situ online monitoring and analysis of test samples. In-situ online monitoring and analysis of components during irradiation is of vital importance both in scientific research and in engineering development. The traditional solution for ion irradiation of power devices involves applying varying bias voltages to the devices and observing the extent of single-particle damage during irradiation. When the leakage current generated by a single-particle damage reaches a preset value, the test is stopped and the device is subsequently located and analyzed offline. This leads to numerous problems: First, the location of particle damage during irradiation testing cannot be determined in a timely manner, necessitating offline microscopy for location analysis. Second, the damage caused by single-particle damage can undergo different mechanistic changes as particles accumulate. This inability to determine the location of single-particle damage makes understanding the irradiation damage mechanism difficult. Finally, the inability to locate the single-particle damage area during irradiation slows down reliability research and analysis of power devices. Therefore, if the in-situ online single-particle burnout area positioning of power devices is not solved, the development of engineering reliability and scientific mechanism research of components will be very slow.

[0004] Therefore, it is necessary to establish a set of irradiation terminal equipment with an online positioning system for the single-particle burnout area of ​​power devices to simulate the deep space exploration environment of spacecraft, fundamentally solve the working status of devices and circuits in a strong radiation environment, and carry out fundamental reinforcement and adjustment, so as to solve the problem of normal operation of devices from the source. Summary of the Invention

[0005] To solve the above problems, the present invention provides an online positioning system for a single-particle burnout area, an irradiation terminal device, and a method for use. A system is designed that can perform in-situ online analysis and monitoring of the single-particle burnout area of ​​a power device, fundamentally solving the drawbacks of traditional offline positioning analysis. This is of great significance for the study of radiation effects and life assessment of electronic devices and materials.

[0006] To achieve the above object, the technical solution created by the present invention is implemented as follows:

[0007] In a first aspect, the present invention provides a single particle burnout area online positioning system, comprising: a first beam detection unit for monitoring the intensity of a particle beam irradiating a sample to be tested;

[0008] a first vacuum control unit for monitoring and regulating the vacuum degree of the system;

[0009] And, a microscopic rapid positioning unit, which includes a microscopic optical lens, a multi-frame spectroscopic unit and a multispectral thermal imaging unit. The microscopic optical lens is used to capture the radiation excited by the sample to be tested after particles irradiate the sample to be tested in an atmospheric environment; the multi-frame spectroscopic unit is used to separate the radiation into bands; the multispectral thermal imaging unit is used to image the multi-band radiation after the band separation, calculate the temperature distribution on the surface of the sample to be tested based on the imaging data, and locate the single particle burnt area based on the temperature distribution.

[0010] Preferably, a particle accelerator is used to provide particles for irradiating the sample to be tested, and the particles are input from the particle accelerator to the single particle burnout area online positioning system through a vacuum pipe.

[0011] Preferably, the microscope optical lens includes a multi-zoom lens group and a single convex lens arranged in parallel.

[0012] Preferably, the multi-band light splitting unit includes a narrowband filter and a light splitting barrier. The light splitting barrier is provided with a plurality of through holes, and a plurality of narrowband filters including different wavelength bands are mounted on the through holes.

[0013] Preferably, the multispectral thermal imaging unit includes a CCD camera, a data acquisition module, a temperature calculation module and a positioning module, wherein the CCD camera is used to detect multi-band radiation after band separation to obtain a multispectral image; the data acquisition module collects multispectral image data from the CCD camera and transmits it to the temperature calculation module; the temperature calculation module calculates the temperature distribution on the surface of the sample to be tested based on the multispectral image data through multispectral radiation temperature measurement technology; the positioning module performs online real-time positioning of the single-particle burnt area of ​​the sample to be tested according to the temperature distribution.

[0014] In a second aspect, the present invention provides an irradiation terminal device comprising: a particle accelerator, a vacuum main chamber, an atmospheric sample stage, and an online positioning system for a single particle burnout area;

[0015] The particle accelerator is connected to the vacuum main chamber through a first vacuum pipe; the vacuum main chamber is provided with a second beam detection unit for monitoring the intensity of the particle beam input into the vacuum main chamber, a second vacuum control unit for monitoring and regulating the vacuum degree of the vacuum main chamber, and a vacuum sample stage;

[0016] The vacuum main chamber is connected to the single particle burnout area online positioning system through a second vacuum pipeline, and a first beam line plug-in valve for controlling the on-off of the second vacuum pipeline is provided on the second vacuum pipeline.

[0017] Preferably, the vacuum sub-chamber is connected to the vacuum main chamber through a third vacuum pipe, and a second beam line plug-in valve for controlling the on and off of the third vacuum pipe is provided on the third vacuum pipe; a third vacuum control unit and a sample transfer table for monitoring and regulating the vacuum degree of the vacuum sub-chamber are provided in the vacuum sub-chamber.

[0018] Preferably, the first vacuum control unit, the second vacuum control unit and the second vacuum control unit each include a vacuum pump and a vacuum gauge.

[0019] Preferably, the bottoms of the vacuum sample stage and the sample transfer stage are both provided with slide rails, and the vacuum sample stage and the sample transfer stage can be driven to move between the vacuum main chamber and the vacuum sub-chamber via the slide rails.

[0020] In a third aspect, the present invention provides a method for using an irradiation terminal device, comprising:

[0021] Vacuum irradiation mode: Place the sample to be tested on the vacuum sample stage in the vacuum main chamber, close the first beam line plug-in valve and the second beam line plug-in valve; evacuate the vacuum main chamber through the second vacuum control unit; start the particle accelerator to vacuum irradiate the sample to be tested on the vacuum sample stage;

[0022] Atmospheric irradiation and single particle burnout location mode: Place the sample to be tested on the atmospheric sample stage, open the first beamline valve, and close the second beamline valve. Evacuate the single particle burnout area online location system using the first vacuum control unit. Start the particle accelerator to atmospherically irradiate the sample to be tested on the atmospheric sample stage, and analyze the single particle burnout area using the single particle burnout area online location system.

[0023] Compared with the prior art, the present invention can achieve the following beneficial effects:

[0024] The present invention proposes an irradiation terminal test device that can not only monitor the irradiation of power devices, but also perform in-situ online analysis, monitoring, and positioning of single-particle burnout areas. Through the online positioning system, single-particle burnout data of power devices can be obtained in real time without interrupting the test process, avoiding the damage caused by the single-particle burnout area causing different mechanistic changes with the continuous accumulation of particles, improving test efficiency and reliability, and solving the problem that traditional irradiation terminals only simulate the space environment and can only position and analyze power devices offline, thus filling the gap in the field of in-situ online analysis and monitoring of irradiation terminals.

[0025] The present invention expands the means of monitoring single-particle radiation exposure in power devices. Through this system, not only can online damage location be searched, but also the radiation damage mechanism of power devices can be further understood. By monitoring the devices in a simulated radiation environment for a long time, the service life of the devices can be more accurately assessed. By identifying the damage mechanism through damage analysis, improvements can be made in production materials, device structure, production process, etc., providing data support for device reliability design. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The accompanying drawings, which constitute part of the present invention, are intended to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are intended to explain the present invention and do not constitute an undue limitation of the present invention. In the accompanying drawings:

[0027] Figure 1 2. It is an architecture diagram of a single-event burnout area online positioning system provided according to an embodiment of the present invention;

[0028] Figure 2 It is a composition architecture diagram of the irradiation terminal device provided according to an embodiment of the present invention. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and do not constitute a limitation to the present invention. Similar elements in different embodiments use associated similar element numbers. In the following embodiments, many detailed descriptions are intended to enable the present invention to be better understood. However, those skilled in the art can easily recognize that some of the features can be omitted in different situations, or can be replaced by other elements, materials, or methods. In some cases, some operations related to the present invention are not shown or described in the specification. This is to avoid the core part of the present invention being overwhelmed by too much description. For those skilled in the art, it is not necessary to describe these related operations in detail. They can fully understand the related operations based on the description in the specification and the general technical knowledge in the art.

[0030] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments of the present invention can be combined with each other to form various implementation methods. At the same time, the steps or actions in the method description can also be interchanged or adjusted in a manner that is obvious to those skilled in the art. Therefore, the various orders in the description and the drawings are only for the purpose of clearly describing a certain embodiment and are not intended to be a required order, unless otherwise specified that a certain order must be followed.

[0031] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0032] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to internal connections between two components. Those skilled in the art can understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0033] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0034] See also Figure 1 In one embodiment of the present invention, a single-particle burnout area online positioning system is provided for use in an irradiation terminal, capable of performing in-situ online analysis and monitoring of power devices. The system primarily comprises a first beam detection unit, a first vacuum control unit, and a microscopic rapid positioning unit. Specifically, because the positioning system of the present invention is specifically used in atmospheric irradiation simulation, the positioning system typically requires connection to a particle accelerator via a vacuum pipe. The particle accelerator provides particles for irradiating a sample to be tested. The particles are fed into the positioning system via the vacuum pipe and then output through a transparent window provided in the positioning system to the surface of the sample to be tested in an atmospheric environment, thereby simulating irradiation conditions of the sample to be tested in an atmospheric environment. During this process, the particle beam intensity needs to be controlled to simulate a real atmospheric irradiation environment. Therefore, in the embodiment of the present invention, a first beam detection unit is designed within the positioning system to monitor the particle beam intensity input to the system. The primary functional component of the first beam detection unit is a scintillator detector, an instrument that detects flashes of light generated by ionizing radiation in certain substances and can count particles input to the system. Scintillator detectors are usually fixed with a movable support frame, which can achieve horizontal and vertical movement. In the actual design process, the movable support frame needs to be able to drive the scintillator detector to move 10 cm forward and backward and 10 cm left and right.

[0035] To ensure that particles can be smoothly transferred from the particle accelerator to the positioning system, not only is a vacuum pipe required between the particle accelerator and the positioning system, but the interior of the positioning system also needs to have an extremely high vacuum level. Typically, the vacuum level of the positioning system needs to be at least on the order of E-4. Therefore, an embodiment of the present invention designs a first vacuum control unit within the positioning system for monitoring and regulating the system's vacuum level. The first vacuum control unit needs to be able to evacuate the system positioning and detect the system's internal vacuum level in real time to prevent vacuum problems from affecting the normal operation of the system. Specifically, the first vacuum control unit includes: a vacuum gauge for real-time monitoring of the system's vacuum level, and a mechanical pump and molecular pump for evacuating and maintaining the system's vacuum state, wherein the mechanical pump is a screw pump.

[0036] Based on multi-spectral radiation temperature measurement technology, an embodiment of the present invention proposes a microscopic rapid positioning unit for in-situ online single-particle burnout analysis of the sample to be tested. The microscopic rapid positioning unit mainly includes a microscopic optical lens, a multi-frame spectroscopic unit, a multi-spectral thermal imaging unit, and an adjustable lens barrel for fixing the above optical elements. Among them, the microscopic optical lens is mainly used to capture the radiation excited by the surface of the sample to be tested after irradiation. It can be understood that the particles generated by the particle accelerator are transmitted to the positioning system through a vacuum pipe, and then irradiated onto the surface of the sample to be tested through the system window. When these high-energy particles collide with the sample to be tested, they release energy in the form of radiation. This radiation has multiple bands and carries important information such as the structure and properties of the surface of the sample to be tested.

[0037] The microscope optical lens mainly includes a multi-zoom lens group and a single convex lens. The multi-zoom lens group is installed at the front end of the adjustable lens barrel, and the single convex lens is set in the adjustable lens barrel, located at the rear side of the multi-zoom lens group, and parallel to the multi-zoom lens group. The multi-zoom lens group is used to adjust the magnification to adapt to different sizes of observation areas and levels of detail. The single convex lens is used to assist the multi-zoom lens group in focusing, ensuring that a clear image can be obtained at different magnifications. The single particle burnout area online positioning system provided by the embodiment of the present invention has a maximum positioning range of up to 1cm 2 , which can achieve single-particle burnt area positioning with a minimum spatial resolution of 5μm.

[0038] The multi-beam splitting unit is located in the optical path behind the microscope optical lens. It primarily consists of a narrowband filter, a beam splitter bar, and a convex lens assembly. The beam splitter bar and convex lens assembly are sequentially mounted within an adjustable lens barrel. The beam splitter bar is positioned directly behind the focal point of the multi-zoom lens assembly and is used to further split the beam focused by the lens. The beam splitter bar has multiple equally spaced through-holes, onto which narrowband filters of the desired wavelengths are mounted. These narrowband filters have different operating bands, allowing light within specific wavelength ranges to pass while effectively blocking or reflecting light of other wavelengths. The beam splitter bar and narrowband filters isolate specific wavelengths from the radiation emitted by the sample surface, providing precise spectral information for subsequent image capture and analysis. The convex lens assembly, positioned directly behind the beam splitter bar, further adjusts the focus of the multi-band radiation, facilitating the detection of multispectral images.

[0039] The multispectral thermal imaging unit is arranged at the rear end of the adjustable lens barrel. Through the adjustable lens barrel, microscopic optical lens and multi-frame spectroscopic unit, the multispectral thermal imaging unit can capture clear multispectral images. Specifically, the multispectral thermal imaging unit includes a high-speed CCD camera, a height data acquisition module, a temperature calculation module and a positioning module for the power device (i.e., the sample to be tested). Among them, the spectral band in which the CCD camera can work includes the inherent bands of all narrow-band filters in the multi-frame spectroscopic unit, so that the CCD camera can effectively detect the radiation signal of the specific wavelength generated by the sample to be tested due to particle irradiation, and the detector image plane of the CCD camera obtains a multispectral image. The data acquisition module then collects multispectral image data from the CCD camera in real time and transmits the data to the temperature calculation module, which is connected to the positioning module. Both the temperature calculation module and the positioning module are installed on a computer. The temperature calculation module analyzes the multispectral image data based on multispectral radiation temperature measurement technology and calculates the radiation temperature reflected by it based on the radiation information of different bands. The temperature corresponds to the temperature distribution of the surface of the sample to be tested. The positioning module will perform online real-time positioning of the single-particle burn area of ​​the sample to be tested based on these temperature data, identify the area with abnormal temperature, and thus accurately locate the single-particle burn area. Through real-time monitoring and analysis, the positioning system can respond quickly when single-particle burn occurs on the surface of the sample to be tested, providing immediate data support for performance evaluation and fault analysis of power devices. The single-particle burn area online positioning system provided by the embodiment of the present invention can obtain single-particle burn data of power devices in real time without interrupting the test process, avoiding the damage caused by the single-particle burn area causing different mechanistic changes with the continuous accumulation of particles, thereby improving test efficiency and reliability.

[0040] Based on the above-mentioned single-particle burnout area online positioning system, in one embodiment of the present invention, an irradiation terminal device is also proposed to make up for the defect that the traditional irradiation terminal only simulates the space environment and requires offline positioning analysis. For details, please refer to Figure 2 The irradiation terminal equipment includes: a particle accelerator, a vacuum main chamber, an atmospheric sample stage and a single particle burnout area online positioning system, wherein the particle accelerator is used to provide particles for simulated irradiation, and the particle accelerator is connected to the vacuum main chamber through a first vacuum pipe. The vacuum main chamber is a simulation space for vacuum irradiation. A second beam detection unit, a second vacuum control unit and a vacuum sample stage are provided in the vacuum main chamber. The main functional component of the second beam detection unit is a scintillator detector, which is used to count the number of particles input into the vacuum main chamber by the particle accelerator. The second beam detection unit is located behind the vacuum sample stage and is supported by a movable support frame, which can drive the second beam detection unit to move in both horizontal and vertical directions.

[0041] Furthermore, the inner walls of the main vacuum chamber are equipped with a vacuum pipe interface, a signal and power data transmission interface, and an exhaust interface, all connected to the particle accelerator. Particles generated by the particle accelerator are transported to the main vacuum chamber via the vacuum pipe and irradiated through the vacuum pipe interface to the sample to be tested on the vacuum sample stage located in the center of the chamber. The signal and power data transmission interface is used to output signals such as beam intensity, vacuum level, and beam intensity technology, input and output control signals, and power related components within the main vacuum chamber. There are 12 data transmission interfaces in total, forming a unified power supply system for the main vacuum chamber. Each data transmission interface is remotely controlled via software.

[0042] The second vacuum control unit is used to monitor and regulate the vacuum degree of the vacuum main chamber. It mainly includes a screw pump, a spiral pump, two molecular pumps and a vacuum gauge. Among them, the vacuum gauge is used to monitor the vacuum degree inside the vacuum main chamber in real time. The screw pump, spiral pump and molecular pump are connected to the exhaust interface to evacuate and maintain the vacuum state of the vacuum main chamber. When working, the vacuum degree of the vacuum main chamber can reach the E-5 level.

[0043] The vacuum sample stage, used to hold the sample to be tested, is located in the center of the main vacuum chamber. It is supported by a support frame mounted on slide rails, which drive the support frame and the vacuum sample stage for horizontal and vertical movement. The vacuum sample stage is also equipped with a controller, which includes interface circuits for various components. One end of the component interface circuit is connected to a flange on the inner wall of the main vacuum chamber via a DB9 connector. The outer end of the flange is connected to an external control computer. The other end of the component interface circuit is connected to the component's control and communication circuits, enabling control and adjustment of each component.

[0044] The main vacuum chamber is connected to the single-particle burnout region online positioning system of the above-mentioned embodiment via a second vacuum conduit. A first beamline gate valve is provided on the second vacuum conduit for controlling the opening and closing of the second vacuum conduit. The opening and closing of the first beamline gate valve is controlled by a controller within the single-particle burnout region online positioning system to achieve connection and isolation between the single-particle burnout region online positioning system and the main vacuum chamber. When the first beamline gate valve is open, a sample to be tested can be placed on the atmospheric sample stage. Particles generated by the particle accelerator enter the single-particle burnout region online positioning system through the first vacuum conduit, the main vacuum chamber, and the second vacuum conduit, and then illuminate the surface of the sample to be tested on the atmospheric sample stage through the window of the single-particle burnout region online positioning system, thereby achieving atmospheric irradiation of the sample to be tested and in-situ online single-particle burnout positioning. When the first beamline gate valve is closed, the sample to be tested can be placed on the vacuum sample stage within the main vacuum chamber. Particles generated by the particle accelerator enter the vacuum main chamber through the first vacuum conduit and illuminate the surface of the sample to be tested on the vacuum sample stage, thereby achieving vacuum irradiation of the sample to be tested.

[0045] As a preferred embodiment, the atmospheric sample stage includes a device supporting structure for supporting the sample to be tested and a laser calibration position positioning device for spatially positioning the device supporting structure; the device supporting structure is located outside the single particle burnout area online positioning system, and the device supporting structure is supported by a support frame installed on a slide rail, and the support frame can drive the device supporting structure to achieve horizontal and vertical movement and horizontal angle rotation; the laser calibration position positioning device is installed outside the shell of the single particle burnout area online positioning system, and can emit a cross-shaped infrared laser to guide and adjust the spatial position of the device supporting structure, so that particles emitted from the single particle burnout area online positioning system can be accurately and comprehensively irradiated on the surface of the sample to be tested.

[0046] As a preferred embodiment, a vacuum sub-chamber is also provided, which is mainly used for preparation work for vacuum irradiation. The sample to be tested can be pre-treated in the vacuum sub-chamber before entering the vacuum main chamber. The vacuum sub-chamber is connected to the vacuum main chamber through a third vacuum pipe, and a second beam line plug-in valve for controlling the on and off of the third vacuum pipe is provided on the third vacuum pipe. Since the vacuum degree in the vacuum main chamber is required to reach the E-5 level during vacuum irradiation, the second beam line plug-in valve needs to be closed during the vacuum irradiation process to cut off the connection between the vacuum main chamber and the vacuum sub-chamber to avoid affecting the vacuum degree in the vacuum main chamber and causing the vacuum irradiation simulation test to fail; the second beam line plug-in valve will only be opened to connect the vacuum main chamber and the vacuum sub-chamber at specific times such as before starting vacuum irradiation, when the sample to be tested needs to be sent into the vacuum main chamber, or when the vacuum irradiation is completed and the sample to be tested needs to be taken out. Because the vacuum level requirements of the main vacuum chamber are extremely high, the evacuation process is very lengthy, sometimes taking dozens of hours. Therefore, to prevent the vacuum level of the main vacuum chamber from being severely damaged by the momentary opening of the second beamline valve, the sub-vacuum chamber must also maintain a vacuum state. The vacuum level of the sub-vacuum chamber must reach at least E-4, otherwise it cannot be connected to the main vacuum chamber. The sub-vacuum chamber houses a third vacuum control unit and a sample transfer stage for monitoring and controlling the vacuum level. This third vacuum control unit also includes a propeller pump, a molecular pump, and a vacuum gauge. The vacuum gauge monitors the vacuum level in the sub-vacuum chamber in real time, and the propeller pump and molecular pump are used to evacuate and maintain the vacuum level. The sample transfer stage is secured by a movable support frame. Slide rails are attached to the bottom of the support frame, driving the support frame and sample transfer stage in both horizontal and vertical directions. The sample transfer stage has a maximum travel range of 1 meter. The device support structure on the sample transfer stage is a 30cm*30cm mounting plate. The slide rail under the sample transfer stage and the slide rail under the vacuum sample stage are parallel to each other, so the vacuum sample stage and the sample transfer stage can perform reciprocating exchange motion between the vacuum main chamber and the vacuum sub-chamber to switch the positions of the sample transfer stage and the vacuum sample stage.

[0047] In one embodiment of the present invention, a method for using the above-mentioned irradiation terminal device is also provided. By controlling the opening and closing of the first beam line plug-in valve, switching between the vacuum irradiation mode and the atmospheric irradiation and single particle burnout positioning mode can be achieved. Specifically, when it is necessary to simulate the irradiation state of the power device in a vacuum environment, the device starts the vacuum irradiation mode, performs preparatory work in the vacuum sub-chamber, and sends the sample to be tested onto the vacuum sample table in the vacuum main chamber. At this time, the first beam line plug-in valve and the second beam line plug-in valve are closed to cut off the connection between the vacuum main chamber and the single particle burnout area online positioning system. The vacuum main chamber is evacuated by the second vacuum control unit. When the vacuum degree reaches the test condition, the particle accelerator is started to generate particles, and the sample to be tested on the vacuum sample table is vacuum irradiated. This process only simulates the irradiation condition of the sample to be tested in a vacuum environment and cannot realize online in-situ analysis.

[0048] When it is necessary to simulate the irradiation state of a power device in an atmospheric environment and detect and analyze the single-event burnout of the power device, the equipment starts the atmospheric irradiation and single-event burnout locating mode, and places the sample to be tested on the atmospheric sample stage. At this time, the first beamline plug-in valve is opened and the second beamline plug-in valve is closed, connecting the vacuum main chamber and the single-event burnout area online locating system. The single-event burnout area online locating system is evacuated by the first vacuum control unit. When the vacuum level reaches the test condition, the particle accelerator is started to generate particles. The particles pass through the first vacuum pipe, the vacuum main chamber, and the second vacuum pipe in sequence and enter the single-event burnout area online locating system. They then illuminate the surface of the sample to be tested on the atmospheric sample stage through the window of the single-event burnout area online locating system, subjecting the sample to be tested on the vacuum sample stage to atmospheric irradiation, and the single-event burnout area is analyzed by the single-event burnout area online locating system. This invention significantly enriches the functionality of the irradiation terminal and enhances the ability to monitor power devices in simulated radiation environments. It can search and locate damaged areas in real time online after a power device is exposed to particle irradiation. This not only enables rapid identification and response to potential fault points, but also helps researchers further understand the mechanisms of radiation damage to power devices. By analyzing changes in device performance after irradiation, we can gain a deeper understanding of the causes and processes of damage. By monitoring devices over a long period of time in simulated radiation environments, the system can more accurately assess the device's service life, which is of great significance for predicting the durability of power devices in practical applications and for the production and design of power devices.

[0049] In short, the above description is only a preferred embodiment of this specification and is not intended to limit the scope of protection of this specification. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of this specification shall be included in the scope of protection of this specification.

[0050] The systems, devices, modules, or units described in one or more of the above embodiments may be implemented by a computer chip or entity, or by a product having a certain function. A typical implementation device is a computer. Specifically, the computer may be, for example, a personal computer, a laptop computer, a cellular phone, a camera phone, a smartphone, a personal digital assistant, a media player, a navigation device, an email device, a game console, a tablet computer, a wearable device, or a combination of any of these devices.

[0051] It should also be noted that the terms "comprises," "includes," or any other variations thereof are intended to encompass non-exclusive inclusion, such that a process, method, commodity, or apparatus that includes a series of elements includes not only those elements but also other elements not explicitly listed, or includes elements inherent to such process, method, commodity, or apparatus. In the absence of further limitations, an element defined by the phrase "comprises a ..." does not exclude the presence of other identical elements in the process, method, commodity, or apparatus that includes the element.

[0052] The various embodiments in this specification are described in a progressive manner. Similar parts between the various embodiments can be referred to in conjunction with each other. Each embodiment focuses on the differences between the other embodiments. In particular, the system embodiments are generally similar to the method embodiments, so the description is relatively simple. For relevant parts, refer to the description of the method embodiments.

[0053] The foregoing description of this specification describes specific embodiments. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps recited in the claims can be performed in an order different from that described in the embodiments and still achieve the desired results. Furthermore, the processes depicted in the accompanying drawings do not necessarily require the specific order shown or the sequential order to achieve the desired results. In certain embodiments, multitasking and parallel processing are also possible or may be advantageous.

Claims

1. A single-particle burnout area online positioning system, characterized in that: include: a first beam detection unit for monitoring the beam intensity of particles irradiating the sample to be tested; a first vacuum control unit for monitoring and regulating the vacuum degree of the system; and a microscopic rapid positioning unit comprising a microscopic optical lens, a multi-frame spectroscopic unit, and a multispectral thermal imaging unit, wherein the microscopic optical lens is used to capture radiation excited by the sample to be tested after particles irradiate the sample in an atmospheric environment; the multi-frame spectroscopic unit is used to perform band separation on the radiation; the multispectral thermal imaging unit is used to image the multi-band radiation after band separation, calculate the temperature distribution on the surface of the sample to be tested based on the imaging data, and locate the single particle burnout area based on the temperature distribution; The multispectral thermal imaging unit includes a CCD camera, a data acquisition module, a temperature calculation module, and a positioning module. The CCD camera is used to detect multi-band radiation after band separation to obtain a multispectral image. The data acquisition module collects multispectral image data from the CCD camera and transmits it to the temperature calculation module. The temperature calculation module calculates the temperature distribution on the surface of the sample to be tested based on the multispectral image data using multispectral radiation temperature measurement technology. The positioning module performs online real-time positioning of the single-particle burnout area of ​​the sample to be tested based on the temperature distribution.

2. The single event burnout area online positioning system according to claim 1, characterized in that: A particle accelerator is used to provide the particles for irradiating the sample to be tested, and the particles are input from the particle accelerator to the single particle burnout area online positioning system through a vacuum pipe.

3. The single event burnout area online positioning system according to claim 1, characterized in that: The microscopic optical lens comprises a multi-zoom lens group and a single convex lens arranged in parallel.

4. The single event burnout area online positioning system according to claim 1, characterized in that: The multi-band light splitting unit includes a narrowband filter and a light splitting barrier. The light splitting barrier is provided with a plurality of through holes, and a plurality of narrowband filters with different wavelength bands are installed on the through holes.

5. An irradiation terminal device, characterized in that: include: A particle accelerator, a vacuum main chamber, an atmospheric sample stage, and a single particle burnout area online positioning system according to any one of claims 1 to 4; The particle accelerator is connected to the vacuum main chamber through a first vacuum pipe; the vacuum main chamber is provided with a second beam detection unit for monitoring the intensity of the particle beam input into the vacuum main chamber, a second vacuum control unit for monitoring and regulating the vacuum degree of the vacuum main chamber, and a vacuum sample stage; The vacuum main chamber is connected to the single particle burnout area online positioning system through a second vacuum pipe, and a first beam line plug-in valve for controlling the on-off of the second vacuum pipe is provided on the second vacuum pipe.

6. The irradiation terminal device according to claim 5, characterized in that: It also includes a vacuum sub-chamber, which is connected to the vacuum main chamber through a third vacuum pipe, and a second beam line plug-in valve for controlling the on and off of the third vacuum pipe is provided on the third vacuum pipe; a third vacuum control unit and a sample transfer table for monitoring and regulating the vacuum degree of the vacuum sub-chamber are provided in the vacuum sub-chamber.

7. The irradiation terminal device according to claim 6, characterized in that: The first vacuum control unit, the second vacuum control unit, and the second vacuum control unit each include a vacuum pump and a vacuum gauge.

8. The irradiation terminal device according to claim 6, characterized in that: The bottoms of the vacuum sample stage and the sample transfer stage are both provided with slide rails, and the vacuum sample stage and the sample transfer stage can be driven to move between the vacuum main chamber and the vacuum sub-chamber via the slide rails.

9. A method for using the irradiation terminal device according to any one of claims 5 to 8, characterized in that: include: Vacuum irradiation mode: Place the sample to be tested on the vacuum sample stage in the vacuum main chamber, close the first beam line plug-in valve and the second beam line plug-in valve; evacuate the vacuum main chamber through the second vacuum control unit; start the particle accelerator to vacuum irradiate the sample to be tested on the vacuum sample stage; Atmospheric irradiation and single particle burnout location mode: Place the sample to be tested on the atmospheric sample stage, open the first beamline plug-in valve, and close the second beamline plug-in valve; evacuate the single particle burnout area online location system using the first vacuum control unit; start the particle accelerator to perform atmospheric irradiation on the sample to be tested on the atmospheric sample stage, and analyze the single particle burnout area using the single particle burnout area online location system.

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