A graphite boat support
By designing a graphite boat holder with air supply assembly and movable cavity, the problems of jitter and looseness during transmission are solved, and the stability and processing efficiency of the graphite boat are improved.
Patent Information
- Application Number
- CN202510033667.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-09
- Publication Date
- 2025-05-27
- Estimated Expiration
- 2045-01-09
AI Technical Summary
The existing graphite boat holders are prone to jitter, the silicon wafer card is not tight or loose during the transmission process, resulting in dropping or skewing.
A graphite boat holder is designed, including a pair of side plates, end plates of two side plates, bottom plates and air supply assembly. The first and second movable chambers are provided in the bottom plate, and a limiting ring, a limiting plate, a piston plate and a spring are installed in the second movable chamber to form a pressure chamber. The air supply assembly sends air into the pressure chamber through the air pump and air pipe, increasing the pressure to adsorb the electrode plate and preventing jitter.
By adsorbing the electrode plate, the stability of the graphite boat is significantly improved, jitter phenomenon is avoided, and the processing of semiconductors and photovoltaic materials is ensured to be stable and efficient.
Smart Images

Figure CN119447010B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of photovoltaic solar cells, and particularly to a graphite boat support. Background Art
[0002] Semiconductor or photovoltaic devices are widely used in industries such as electronics and new energy. For the processing of semiconductor and photovoltaic materials, graphite boats are usually used to load or move semiconductor and photovoltaic materials, and the device for loading multiple graphite boats is usually called a boat support.
[0003] At present, graphite boats generally adopt a structure with both ends supported on the boat support, leaving about 2 mm of moving space both longitudinally and laterally. Therefore, it is impossible to avoid or alleviate the jitter phenomenon of graphite boats during transmission, and problems such as silicon wafers not being tightly clamped or loosening often occur, resulting in wafer dropping or warping. Therefore, in order to solve the above technical problems, the present invention provides a graphite boat support. Summary of the Invention
[0004] Aiming at the deficiencies of the prior art, the present invention provides a graphite boat support, which can significantly improve the stability of carrying graphite boats.
[0005] To achieve the above object, the present invention provides the following technical solution: A graphite boat support includes a pair of side plates, and end plates are fixedly installed at both ends in the length direction of the two side plates. It further includes:
[0006] Bottom plates, there are a pair of the bottom plates, and both bottom plates are fixedly installed between the two side plates. A first moving cavity and a second moving cavity are formed in the bottom plates.
[0007] Among them, a limiting ring is fixedly installed in the second moving cavity, a limiting plate is fixedly installed at the bottom end of the second moving cavity, a second piston plate is slidably arranged between the limiting plate and the limiting ring in the second moving cavity, a spring is fixedly installed between the second piston plate and the limiting plate, a first piston plate is slidably installed in the first moving cavity, the first piston plate and the second piston plate are fixedly connected by a U-shaped connecting rod, a pressure cavity is formed between the upper surface of the second piston plate and the top end of the second moving cavity, a pressure relief head is fixedly installed on the bottom plate, one end of the pressure relief head is communicated with the pressure cavity, and a one-way electric control valve is fixedly installed on the pressure relief head.
[0008] An air supply component, which is fixedly installed on the side plate, and the air supply end of the air supply component is communicated with the pressure cavity.
[0009] Preferably, the air supply assembly includes an air pump, a main pipe, a first air pipe, and an intake pipe. The air pump is fixedly installed on the side plate. The bottom end of the intake pipe is fixedly connected to the intake end of the air pump. One end of the main pipe is fixedly connected to the air outlet end of the air pump. One end of the first air pipe is fixedly connected to the main pipe, and the other end of the first air pipe is fixedly connected to the bottom plate, and the first air pipe is communicated with the pressure chamber.
[0010] Preferably, a U-shaped pipe rack is further installed on the side plate, and a plurality of air outlet heads are fixedly installed at equal intervals in the length direction of the U-shaped pipe rack; a second air pipe is fixedly installed on the main pipe, and a first electric control valve is fixedly installed on the main pipe between the first air pipe and the second air pipe. A second electric control valve is fixedly installed on one end of the first air pipe. A pipe assembly is arranged between one end of the second air pipe and the U-shaped pipe rack; a reciprocating motion assembly is installed on the side plate, and the reciprocating motion assembly is fixedly connected to the other end of the U-shaped pipe rack.
[0011] Preferably, the pipe assembly includes a plurality of rigid straight pipes and a flexible pipe. Adjacent two rigid straight pipes are connected by the flexible pipe. One end of the rigid straight pipe at one end is rotatably connected to the second air pipe, and one end of the rigid straight pipe at the other end is rotatably connected to one end of the U-shaped pipe rack; a first sliding rod is fixedly installed on the side plate, and a plurality of sliding sleeves are slidably installed on the first sliding rod. A fixed sleeve is fixedly installed in the middle of the rigid straight pipe, and the fixed sleeve is rotatably connected to the sliding sleeve through a connecting rod, and the plurality of fixed sleeves and the plurality of sliding sleeves are arranged in one-to-one correspondence.
[0012] Preferably, the reciprocating motion assembly includes a reciprocating screw, a movable sleeve, and a second sliding rod; the reciprocating screw is rotatably installed on the side plate, the movable sleeve is sleeved on the outer surface of the reciprocating screw, a track block is fixedly installed on the inner surface of the movable sleeve, and the track block is slidably connected to the spiral track on the reciprocating screw. The other end of the U-shaped pipe rack is fixedly connected to the movable sleeve, the second sliding rod is fixedly installed on the side plate, and one end of the second sliding rod penetrates through the inside of the movable sleeve and is slidably connected to the movable sleeve;
[0013] A connecting ring is fixedly installed on the reciprocating screw, and a plurality of blades are fixedly installed at equal intervals in the circumferential direction of the connecting ring. A closed cover is fixedly installed on the side plate, and the closed cover is sleeved outside the connecting ring and the blades. A third air pipe is fixedly installed on the main pipe, one end of the third air pipe is fixedly connected to the closed cover, and the third air pipe is communicated with the inside of the closed cover. A notch is opened on the closed cover.
[0014] Preferably, a communicating pipe is fixedly installed between the two bottom plates, and both ends of the communicating pipe are communicated with the pressure chambers in the two bottom plates respectively.
[0015] Preferably, a plurality of rib plates are fixedly installed between the two side plates.
[0016] Compared with the prior art, the present invention provides a graphite boat support, which has the following beneficial effects:
[0017] 1. A first moving cavity and a second moving cavity are formed in the bottom plate. A second piston plate is slidably installed in the second moving cavity. A spring is fixedly installed between the second piston plate and the limiting plate. A pressure cavity is formed between the upper surface of the second piston plate and the top end of the second moving cavity. A first piston plate is slidably installed in the first moving cavity. The first piston plate and the second piston plate are fixedly connected by a U-shaped connecting rod. The air supply end of the air supply component is communicated with the pressure cavity. The air supply component can make the first piston plate and the second piston plate move downward, and a negative pressure cavity can be formed between the first piston plate and the electrode plate, so that the electrode plate can be firmly adsorbed on the bottom plate, and the graphite boat will not shake, making the processing of semiconductor and photovoltaic materials more stable and efficient;
[0018] 2. A reciprocating motion component and a U-shaped pipe support are installed on the side plate. The reciprocating motion component can make the U-shaped pipe support reciprocate in the length direction of the side plate. A second air pipe is fixedly installed on the main pipe. The second air pipe is connected to one end of the U-shaped pipe support through a pipe component. The U-shaped pipe support can spray air on the graphite boat, accelerate the liquid to separate from the graphite boat, reduce the draining time of the graphite boat, and enable the graphite boat to enter the next process faster, so as to improve the processing efficiency of semiconductor and photovoltaic materials.
[0019] The above description is only an overview of the technical solution of the present invention. In order to be able to understand the technical means of the present invention more clearly and implement it according to the content of the specification, the following takes the preferred embodiments of the present invention and combines the accompanying drawings to describe in detail as follows. The specific implementation manners of the present invention are given in detail by the following embodiments and their accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] The accompanying drawings described herein are used to provide a further understanding of the present invention, and constitute a part of this application. The schematic embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation to the present invention. In the drawings:
[0021] Figure 1 is a schematic structural diagram of the graphite boat carried in the present invention;
[0022] Figure 2 is a schematic structural diagram of the present invention;
[0023] Figure 3 is a schematic structural diagram of the bottom plate, the reciprocating motion component, the air supply component, the pipe component and the U-shaped pipe support in the present invention;
[0024] Figure 4 is a schematic structural diagram of the bottom of the bottom plate in the present invention;
[0025] Figure 5Schematic cross-sectional structure diagram of the bottom plate in the present invention;
[0026] Figure 6 Schematic structure diagram of the reciprocating motion assembly, pipeline assembly, air pump and U-shaped pipe rack in the present invention;
[0027] Figure 7 Schematic structure diagram of the air supply assembly and the pipeline assembly in the present invention;
[0028] Figure 8 Schematic structure diagram of the pipeline assembly, hose and fixing sleeve in the present invention;
[0029] Figure 9 Schematic structure diagram of the reciprocating screw, movable sleeve, second sliding rod, closed cover, connecting ring and blade in the present invention.
[0030] In the figure: 10, side plate; 101, first fixing block; 102, second fixing block; 11, end plate; 12, rib plate;
[0031] 20, bottom plate; 201, first movable cavity; 202, second movable cavity; 203, limiting plate; 204, limiting ring; 21, first piston plate; 22, second piston plate; 23, spring; 24, U-shaped connecting rod; 25, communicating pipe; 26, pressure relief head; 261, one-way electric control valve;
[0032] 30, air pump; 31, main pipe; 311, first electric control valve; 32, first air pipe; 321, second electric control valve; 33, intake pipe; 34, second air pipe; 35, third air pipe;
[0033] 40, U-shaped pipe rack; 401, air outlet head;
[0034] 50, hard straight pipe; 51, hose; 52, fixing sleeve; 53, sliding sleeve; 54, first sliding rod;
[0035] 60, reciprocating screw; 61, movable sleeve; 611, track block; 62, second sliding rod; 63, closed cover; 631, notch; 632, mounting block; 64, connecting ring; 65, blade;
[0036] 70, graphite boat; 71, electrode plate. Detailed implementation manners
[0037] The principles and features of the present invention will be described below in conjunction with the attached Figures 1 to 9 The principles and features of the present invention will be described below. The examples given are only used to explain the present invention and are not intended to limit the scope of the present invention. In the following paragraphs, the present invention will be described more specifically by way of example with reference to the accompanying drawings. It should be noted that the drawings are all in a very simplified form and use non-precise scales, and are only used to facilitate and clearly assist in explaining the purpose of the embodiments of the present invention.
[0038] It should be noted that when a component is referred to as "fixed to" another component, it can be directly on the other component or there may be an intermediate component. When a component is considered to be "connected" to another component, it can be directly connected to the other component or there may be an intermediate component at the same time. When a component is considered to be "disposed on" another component, it can be directly disposed on the other component or there may be an intermediate component at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.
[0039] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field to which this invention belongs. The terms used herein in the specification of the present invention are for the purpose of describing specific embodiments only and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.
[0040] Embodiment 1:
[0041] Please refer to Figures 1 to 9 As shown, the present invention provides a graphite boat support, which includes a pair of side plates 10. End plates 11 are fixedly installed at both ends of the two side plates 10 in the length direction. The graphite boat support further includes:
[0042] Bottom plates 20. There are a pair of the bottom plates 20, and both of the two bottom plates 20 are fixedly installed between the two side plates 10. The two bottom plates 20 are symmetrically distributed in the length direction of the side plates 10. A first movable cavity 201 and a second movable cavity 202 are formed in the bottom plates 20;
[0043] Among them, a limiting ring 204 is fixedly installed in the second movable cavity 202, a limiting plate 203 is fixedly installed at the bottom end of the second movable cavity 202, a second piston plate 22 is slidably disposed between the limiting plate 203 and the limiting ring 204 in the second movable cavity 202. A spring 23 is fixedly installed between the second piston plate 22 and the limiting plate 203. A first piston plate 21 is slidably installed in the first movable cavity 201. The first piston plate 21 and the second piston plate 22 are fixedly connected by a U-shaped connecting rod 24. A pressure cavity is formed between the upper surface of the second piston plate 22 and the top end of the second movable cavity 202. A pressure relief head 26 is fixedly installed on the bottom plate 20. One end of the pressure relief head 26 is communicated with the pressure cavity, and a one-way electric control valve 261 is fixedly installed on the pressure relief head 26;
[0044] The air supply assembly includes an air pump 30, a main pipe 31, a first air pipe 32, and an air inlet pipe 33. The air pump 30 is fixedly installed on the side plate 10. The bottom end of the air inlet pipe 33 is fixedly connected to the air inlet end of the air pump 30. One end of the main pipe 31 is fixedly connected to the air outlet end of the air pump 30. One end of the first air pipe 32 is fixedly connected to the main pipe 31. The other end of the first air pipe 32 is fixedly connected to the bottom plate 20, and the first air pipe 32 is communicated with the pressure chamber;
[0045] When carrying the graphite boat 70, two electrode plates 71 at both ends in the length direction of the graphite boat 70 are respectively supported on the two bottom plates 20, and the electrode plates 71 completely cover the first piston plate 21. After that, the air pump 30 is started, and air is sent into the pressure chamber through the first air pipe 32. The pressure in the pressure chamber increases, and the second piston plate 22 moves towards the bottom end of the second moving chamber 202. The first piston plate 21 will synchronously descend with the second piston plate 22. A negative pressure chamber is formed between the upper surface of the first piston plate 21 and the electrode plate 71, and the negative pressure chamber gradually increases, thereby firmly adsorbing the electrode plate 71 on the bottom plate 20. Furthermore, when transporting or processing semiconductor and photovoltaic materials, the graphite boat 70 will not shake, and the processing of semiconductor and photovoltaic materials is more stable and efficient; when the graphite boat 70 needs to be removed, the one-way electric control valve 261 is opened, and the air in the pressure chamber is discharged through the pressure relief head 26. The second piston plate 22 moves upward under the elastic force of the spring 23, and the first piston plate 21 also moves upward together. After the negative pressure chamber disappears, the adsorption force on the electrode plate 71 is lost, and the graphite boat 70 can be successfully removed;
[0046] It should be noted that a communication pipe 25 is fixedly installed between the two bottom plates 20. The two ends of the communication pipe 25 are respectively communicated with the pressure chambers in the two bottom plates 20. Thus, the pressure chambers in the two bottom plates 20 can be pressurized simultaneously, adsorbing and fixing the two electrode plates 71 on the two bottom plates 20 respectively, making the carried graphite boat 70 more stable;
[0047] A plurality of rib plates 12 are fixedly installed between the two side plates 10. The bottom plate 20 serves as the main load-bearing part, and the plurality of rib plates 12 serve as the risk-bearing part to prevent the bottom plate 20 from breaking. When the bottom plate 20 breaks, the plurality of rib plates 12 serve as auxiliary supports.
[0048] Embodiment 2:
[0049] When processing the graphite boat 70 in some processes and it needs to be in contact with liquid, such as in wet coating and cleaning, after the graphite boat 70 is processed, it needs to be drained before being moved to the next process, which takes a long time and is not conducive to improving the processing efficiency of the graphite boat 70. To solve this problem, a U-shaped pipe rack 40 is also installed on the side plate 10. A plurality of air outlet heads 401 are fixedly installed at equal intervals in the length direction of the U-shaped pipe rack 40, and the bottom ends of the plurality of air outlet heads 401 are located above the top end of the graphite boat 70;
[0050] A second air pipe 34 is fixedly installed on the main pipe 31. A first electric control valve 311 is fixedly installed on the main pipe 31 and located between the first air pipe 32 and the second air pipe 34. A second electric control valve 321 is fixedly installed at one end of the first air pipe 32. A pipeline assembly is provided between the second air pipe 34 and one end of the U-shaped pipe rack 40, and the overall length of the pipeline assembly can be changed;
[0051] A reciprocating motion assembly is installed on the side plate 10, and the reciprocating motion assembly is fixedly connected to the other end of the U-shaped pipe rack 40; the reciprocating motion assembly can make the U-shaped pipe rack 40 reciprocate in the length direction of the side plate 10;
[0052] During the process of the U-shaped pipe rack 40 reciprocating in the length direction of the side plate 10, the first electric control valve 311 is opened, air is sent into the U-shaped pipe rack 40 through the pipeline assembly, and is sprayed on the graphite boat 70 by a plurality of air outlets 401, which can accelerate the liquid to separate from the graphite boat 70, reduce the draining time of the graphite boat 70, and enable the graphite boat 70 to enter the next process faster, so as to achieve the effect of improving the processing efficiency of semiconductor and photovoltaic materials;
[0053] Now, the specific structures of the pipeline assembly and the reciprocating motion assembly will be introduced;
[0054] For the pipeline assembly, it includes a plurality of rigid straight pipes 50 and a flexible hose 51. Adjacent two rigid straight pipes 50 are connected by the flexible hose 51. One end of the rigid straight pipe 50 at one end is rotatably connected to the second air pipe 34, and one end of the rigid straight pipe 50 at the other end is rotatably connected to one end of the U-shaped pipe rack 40;
[0055] A pair of first fixing blocks 101 are fixedly installed on the side plate 10. A first sliding rod 54 is fixedly installed between the two first fixing blocks 101. A plurality of sliding sleeves 53 are slidably installed on the first sliding rod 54. A fixing sleeve 52 is fixedly installed in the middle of the rigid straight pipe 50. The fixing sleeve 52 is rotatably connected to the sliding sleeve 53 through a connecting rod. A plurality of fixing sleeves 52 and a plurality of sliding sleeves 53 are arranged in one-to-one correspondence. The length of the rigid straight pipe 50 at the end is half of the length of the rigid straight pipe 50 in the middle, and the rotation axes of the two rigid straight pipes 50 at both ends are parallel and at the same height as the rotation axis of the connecting rod;
[0056] During the movement of the U-shaped pipe rack 40, it can make the plurality of rigid straight pipes 50 continuously switch between the vertical state and the horizontal state, so that the overall length of the pipeline assembly can be continuously changed;
[0057] For a reciprocating motion component, it includes a reciprocating screw 60, a movable sleeve 61 and a second slide bar 62; a pair of second fixing blocks 102 are fixedly installed on the first fixing block 101, the reciprocating screw 60 is rotatably installed on the two second fixing blocks 102, the movable sleeve 61 is sleeved on the outer surface of the reciprocating screw 60, a track block 611 is fixedly installed on the inner surface of the movable sleeve 61, the track block 611 is slidably connected with the spiral track on the reciprocating screw 60, the other end of the U-shaped pipe support 40 is fixedly connected with the movable sleeve 61, the second slide bar 62 is fixedly installed on the two second fixing blocks 102, and one end of the second slide bar 62 penetrates through the inside of the movable sleeve 61 and is slidably connected with the movable sleeve 61;
[0058] A connecting ring 64 is fixedly installed on the reciprocating screw 60, a plurality of blades 65 are fixedly installed at equal intervals in the circumferential direction of the connecting ring 64, a closed cover 63 is sleeved outside the connecting ring 64 and the blades 65, the closed cover 63 is fixedly installed on the side plate 10 through a mounting block 632, a third air pipe 35 is fixedly installed on the main pipe 31, one end of the third air pipe 35 is fixedly connected with the closed cover 63, the third air pipe 35 is communicated with the inside of the closed cover 63, and a notch 631 is formed on the closed cover 63;
[0059] After the first electromagnetic valve 311 is opened, air can be delivered to the closed cover 63 through the third air pipe 35. The air discharged from one end of the third air pipe 35 impacts on the blades 65, which can push the connecting ring 64 to rotate. Then, during the rotation of the reciprocating screw 60, the track block 611 slides along the spiral track, so that the movable sleeve 61 reciprocates in the axial direction of the reciprocating screw 60, and the U-shaped pipe support 40 can reciprocate in the length direction of the side plate 10;
[0060] Finally, it should be noted that the side plate 10 is made of carbon fiber composite material, and the rest of the parts are made of graphite material. Since the graphite boat support needs to enter below the liquid level together with the graphite boat 70 in some processes, the top end of the air inlet pipe 33 is located above the liquid level, and a sealing cover is fixedly installed on the side plate 10, and the air pump 30 is arranged in the sealing cover to prevent the liquid from affecting the service life of the air pump 30. The sealing cover is not shown in the figure.
[0061] The above is only a preferred embodiment of the present invention, and does not impose any form of limitation on the present invention; any ordinary technical personnel in the industry can smoothly implement the present invention according to the shown in the specification drawings and the above description; however, any slight changes, modifications and evolutions made by those skilled in the art within the scope of the technical solution of the present invention by using the above-disclosed technical content are equivalent embodiments of the present invention; at the same time, any equivalent changes, modifications and evolutions made to the above embodiments based on the essential technology of the present invention still fall within the protection scope of the technical solution of the present invention.
Claims
1. A graphite boat support, comprising a pair of side plates (10), with end plates (11) fixedly mounted at both ends of the two side plates (10) in the length direction, characterized in that: Also includes: A bottom plate (20), wherein a pair of the bottom plates (20) are provided, and the two bottom plates (20) are fixedly mounted between the two side plates (10), and a first active cavity (201) and a second active cavity (202) are formed in the bottom plates (20); wherein a limit ring (204) is fixedly installed in the second active chamber (202), a limit plate (203) is fixedly installed at the bottom end of the second active chamber (202), a second piston plate (22) is slidably installed in the second active chamber (202) and between the limit plate (203) and the limit ring (204), a spring (23) is fixedly installed between the second piston plate (22) and the limit plate (203), a first piston plate (21) is slidably installed in the first active chamber (201), the first piston plate (21) and the second piston plate (22) are fixedly connected via a U-shaped connecting rod (24), a pressure chamber is formed between the upper surface of the second piston plate (22) and the top end of the second active chamber (202), a pressure relief head (26) is fixedly installed on the bottom plate (20), one end of the pressure relief head (26) is connected to the pressure chamber, and a one-way electric control valve (261) is fixedly installed on the pressure relief head (26); An air supply assembly is fixedly mounted on the side plate (10), and an air supply end of the air supply assembly is in communication with the pressure chamber.
2. The graphite boat support according to claim 1, characterized in that: The air delivery assembly comprises an air pump (30), a main pipe (31), a first air pipe (32) and an air inlet pipe (33); the air pump (30) is fixedly mounted on the side plate (10); the bottom end of the air inlet pipe (33) is fixedly connected to the air inlet end of the air pump (30); one end of the main pipe (31) is fixedly connected to the air outlet end of the air pump (30); one end of the first air pipe (32) is fixedly connected to the main pipe (31); the other end of the first air pipe (32) is fixedly connected to the bottom plate (20); and the first air pipe (32) is communicated with the pressure chamber.
3. The graphite boat support according to claim 2, characterized in that: A U-shaped pipe rack (40) is also installed on the side plate (10), and a plurality of gas outlets (401) are fixedly installed at equal intervals in the length direction of the U-shaped pipe rack (40); A second air pipe (34) is fixedly mounted on the main pipe (31), a first electric-controlled valve (311) is fixedly mounted on the main pipe (31) and located between the first air pipe (32) and the second air pipe (34), a second electric-controlled valve (321) is fixedly mounted on one end of the first air pipe (32), and a pipeline assembly is provided between the second air pipe (34) and one end of the U-shaped pipe rack (40); A reciprocating motion component is mounted on the side plate (10), and the reciprocating motion component is fixedly connected to the other end of the U-shaped pipe rack (40).
4. The graphite boat support according to claim 3, characterized in that: The pipeline assembly comprises a plurality of rigid straight tubes (50) and a hose (51), two adjacent rigid straight tubes (50) are connected via the hose (51), one end of the rigid straight tube (50) located on one side is rotatably connected to the second air pipe (34), and one end of the rigid straight tube (50) located on the other side is rotatably connected to one end of the U-shaped tube rack (40); A first sliding rod (54) is fixedly mounted on the side plate (10), and a plurality of sliding sleeves (53) are slidably mounted on the first sliding rod (54). A fixed sleeve (52) is fixedly mounted on the middle of the rigid straight tube (50), and the fixed sleeve (52) is rotatably connected to the sliding sleeve (53) via a connecting rod. The plurality of fixed sleeves (52) and the plurality of sliding sleeves (53) are arranged in a one-to-one correspondence.
5. The graphite boat support according to claim 3, characterized in that: The reciprocating motion assembly comprises a reciprocating screw (60), a movable sleeve (61) and a second sliding rod (62); The reciprocating screw (60) is rotatably mounted on the side plate (10); the movable sleeve (61) is sleeved on the outer surface of the reciprocating screw (60); a track block (611) is fixedly mounted on the inner surface of the movable sleeve (61); the track block (611) is slidably connected to the spiral track on the reciprocating screw (60); the other end of the U-shaped pipe frame (40) is fixedly connected to the movable sleeve (61); the second sliding rod (62) is fixedly mounted on the side plate (10); one end of the second sliding rod (62) passes through the interior of the movable sleeve (61) and is slidably connected to the movable sleeve (61); A connecting ring (64) is fixedly mounted on the reciprocating screw (60), and a plurality of blades (65) are fixedly mounted on the connecting ring (64) at equal intervals in a circumferential direction. A closing cover (63) is fixedly mounted on the side plate (10), and the closing cover (63) is sleeved on the outside of the connecting ring (64) and the blades (65). A third air pipe (35) is fixedly mounted on the main pipe (31), and one end of the third air pipe (35) is fixedly connected to the closing cover (63), and the third air pipe (35) is communicated with the interior of the closing cover (63). A notch (631) is provided on the closing cover (63).
6. The graphite boat support according to claim 1, characterized in that: A connecting pipe (25) is fixedly installed between the two bottom plates (20), and two ends of the connecting pipe (25) are respectively connected to the pressure chambers in the two bottom plates (20).
7. The graphite boat support according to claim 1, characterized in that: A plurality of rib plates (12) are fixedly mounted between the two side plates (10).
Citation Information
Patent Citations
Novel graphite boat positioning device for manually taking and placing graphite boat
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