An energy-saving jet plasma-based high-efficiency gas laser pumping system

Abstract

The application discloses a kind of based on energy-saving jet plasma high-efficiency gas laser pumping system, including optical resonator unit, double excitation unit, energy supply unit, circulation voltage stabilizing unit and laser detection unit;Optical resonator unit includes airtight chamber and the laser resonator supported in airtight chamber;Double excitation unit includes plasma jet device and semiconductor laser device, plasma jet device is used to form jet zone in the middle part of laser resonator;Energy supply unit is used to provide working medium to plasma jet device and is used to provide the electric field condition satisfying plasma discharge;Circulation voltage stabilizing unit is communicated with airtight chamber, so that the environment in airtight chamber is always in stable voltage state;Laser detection unit is arranged outside optical resonator unit.The application relates to the technical field of plasma laser pumping, by the above setting, to realize the function of energy-saving, efficient, self-cooling and prolonging service life.

Description

Technical Field

[0001] This invention belongs to the field of lasers and relates to plasma laser pumping technology, specifically a high-efficiency gas laser pumping system based on energy-saving jet plasma. Background Technology

[0002] Inert gas laser devices are laser pumping devices that use an inert gas as the working medium. They generate characteristic spectral lines by exciting gas atoms to high energy levels, and the transitions of these atoms from high to low energy levels produce characteristic spectral lines. Inert gas laser pumping devices are chemically stable and harmless, and avoid the thermal effects of solid working media, making them a promising new type of high-power laser pumping device with high overall conversion efficiency and high beam quality. However, traditional inert gas laser pumping devices suffer from low efficiency, high energy consumption, and difficult thermal management. At high power, their energy conversion efficiency is low, and the large amount of heat generated is difficult to dissipate effectively, leading to a shortened device lifespan. Furthermore, due to the inherent structural limitations of the laser and the self-absorption effect of gas atoms, the output photon count of gas lasers is insufficient, and gas discharge sputtering onto the transparent window reduces the window's transmittance.

[0003] Therefore, a high-efficiency gas laser pumping system based on energy-saving jet plasma is needed to solve the above problems. Summary of the Invention

[0004] This invention aims to solve at least one of the technical problems existing in the prior art. To this end, this invention proposes a high-efficiency gas laser pumping system based on energy-saving jet plasma to achieve energy saving, high efficiency, self-cooling, and extended service life. This invention, through the inclusion of an optical resonant cavity unit comprising a sealed cavity and a laser resonant cavity, a dual excitation unit comprising a plasma jet device and a semiconductor laser device, and a circulating voltage stabilization unit that pumps gas from the sealed cavity according to the amount of gas ejected from the plasma jet device, significantly improves energy conversion efficiency and beam quality by using the dual excitation unit to dual excite the working medium. It also enables the laser system to stably output high-density plasma at a lower start-up voltage, improving the overall performance of the system. Furthermore, by using the circulating voltage stabilization unit to achieve stable control of the gas pressure within the sealed cavity, ensuring the system operates under ideal conditions, this design effectively reduces the laser system's sensitivity to gas pressure fluctuations compared to traditional gas lasers, providing more reliable laser output. In this process, the heat generated by the laser system operating within the sealed cavity is dissipated through the circulating voltage stabilization unit, which also acts as a gas circulation mechanism, effectively dissipating a large amount of heat and extending the service life of the laser system.

[0005] To achieve the above objectives, a first aspect of the present invention provides a high-efficiency gas laser pumping system based on energy-saving jet plasma, comprising an optical resonant cavity unit, a dual excitation unit, an energy supply unit, a cyclic voltage regulation unit, and a laser detection unit;

[0006] The optical resonant cavity unit includes a sealed cavity and a laser resonant cavity supported within the sealed cavity;

[0007] The dual excitation unit includes a plasma jet device and a semiconductor laser device that are sealed and connected to the sealed cavity. The plasma jet device is used to form a jet region in the middle of the laser resonant cavity, and the semiconductor laser device is used to pump the laser gain medium in the jet region.

[0008] The energy supply unit is used to provide the working medium for the plasma jet device and to provide the electric field conditions that satisfy the plasma discharge.

[0009] The circulating pressure stabilizing unit is connected to the sealed cavity and is used to evacuate the sealed cavity according to the amount of gas ejected by the plasma jet device, so that the environment inside the sealed cavity is always in a stable pressure state.

[0010] The laser detection unit is located outside the optical resonant cavity unit and is used to measure the output power of the laser output by the laser resonant cavity.

[0011] Furthermore, the laser resonant cavity includes a cavity body fixedly connected to the sealed cavity on one side via a connector, a Brewster window, a total reflection concave lens, and a total reflection convex lens;

[0012] The cavity is connected to the sealed cavity;

[0013] The Brewster window is disposed inside the cavity and located on the side away from the connector;

[0014] The total reflection concave lens and the total reflection convex lens are placed on both sides of the inner cavity of the cavity;

[0015] The total internal reflection convex lens is positioned in the middle of the Brewster window.

[0016] Furthermore, the area of ​​the total internal reflection convex lens facing the Brewster window is between one-fifth and one-third of the light-transmitting area of ​​the Brewster window.

[0017] Furthermore, the Brewster window is made of fused silica, and the Brewster angle of the Brewster window is set to 40°-50°.

[0018] Furthermore, a protective lens is provided on the side of the sealed cavity near the Brewster window.

[0019] The laser detection unit is used to detect laser light that passes sequentially through the Brewster window and the protective lens.

[0020] Furthermore, the working medium of the plasma jet device is argon, helium, and a mixture of the above gases;

[0021] The working pressure of the plasma jet device is 1 atm;

[0022] The jet velocity of the plasma jet device is 1 L / min. –1 ;

[0023] The peak pulse voltage and pulse frequency of the plasma jet device are 1.8 kV and 10 kHz, respectively.

[0024] The center wavelength of the semiconductor laser device is set to 811.5 nm, and the pump light intensity of the semiconductor laser device is 20 kWcm². –2 .

[0025] Furthermore, the working medium is a mixture of argon and helium;

[0026] Argon accounts for 1%-3% of the total gas, while helium accounts for 97%-99%.

[0027] Furthermore, the energy supply unit includes a gas supply system and a power supply system based on green electricity;

[0028] The gas supply system and the power supply system are both connected to the plasma jet device, and are used to provide the working medium and the electric field conditions that meet the plasma discharge requirements, respectively.

[0029] Furthermore, the circulating voltage stabilizing unit is configured as a vacuum pump.

[0030] Furthermore, the laser detection unit includes an attenuator and a laser power meter arranged sequentially;

[0031] The attenuation factor of the attenuator is 90 to 110 times.

[0032] Compared with the prior art, the beneficial effects of the present invention are:

[0033] By setting up an optical resonant cavity unit including a sealed cavity and a laser resonant cavity, a dual excitation unit including a plasma jet device and a semiconductor laser device, and a circulating voltage stabilizing unit that pumps gas from the sealed cavity according to the amount of gas ejected by the plasma jet device, the working medium is dually excited by the dual excitation unit, which significantly improves the energy conversion efficiency and beam quality, and enables the laser system to stably output high-density plasma with a low start-up voltage, thereby improving the overall performance of the system.

[0034] Furthermore, by utilizing a cyclic pressure stabilization unit, stable control of the gas pressure within the sealed cavity is achieved, ensuring that the system operates under ideal working conditions. Therefore, compared to traditional gas lasers, this design effectively reduces the laser system's sensitivity to gas pressure fluctuations and provides more reliable laser output.

[0035] In addition, the circulating voltage regulator unit can dissipate the heat generated by the laser system operating in the sealed cavity during the extraction process. In other words, the circulating voltage regulator unit also plays the role of gas circulation, thus effectively dissipating a large amount of heat, reducing the risk of overheating during system operation, and effectively extending the service life of the laser system.

[0036] Furthermore, by setting up an energy supply unit that includes a gas supply system and a power supply system based on green electricity, the plasma jet device can promote the local consumption of renewable energy, save electricity consumption, and contribute to the carbon neutrality goal when it is in operation. Attached Figure Description

[0037] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0038] Figure 1 This is a schematic diagram of the structure of a high-efficiency gas laser pumping system based on energy-saving jet plasma in one embodiment of the present invention;

[0039] Figure 2 This is a schematic diagram of the structure of the laser resonator in a high-efficiency gas laser pumping system based on energy-saving jet plasma according to an embodiment of the present invention.

[0040] Icon labels:

[0041] 1. Sealed cavity; 11. Protective lens; 2. Laser resonant cavity; 21. Cavity body; 22. Brewster window; 23. Total internal reflection concave lens; 24. Total internal reflection convex lens; 3. Plasma jet device; 4. Semiconductor laser device; 5. Jet region; 6. Gas supply system; 7. Power supply system; 8. Vacuum pump; 9. Attenuator; 10. Laser power meter. Detailed Implementation

[0042] The technical solution of the present invention will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0043] Please see Figure 1 and Figure 2 The first aspect of the present invention provides a high-efficiency gas laser pumping system based on energy-saving jet plasma, including an optical resonant cavity unit, a dual excitation unit, an energy supply unit, a cyclic voltage regulation unit, and a laser detection unit.

[0044] The optical resonant cavity unit includes a sealed cavity 1 and a laser resonant cavity 2 supported within the sealed cavity 1.

[0045] The dual-excitation unit includes a plasma jet device 3 and a semiconductor laser device 4, which are sealed and connected to the sealed cavity 1. The plasma jet device 3 forms a jet region 5 in the middle of the laser resonant cavity 2, and the semiconductor laser device 4 pumps the laser gain medium within the jet region 5. By using the plasma jet device 3 and the semiconductor laser device 4 to dual-excite the working medium, the energy conversion efficiency and beam quality are significantly improved, and the laser system can stably output high-density plasma at a low start-up voltage, thus enhancing the overall performance of the system.

[0046] The energy supply unit is used to provide the working medium for the plasma jet device 3 and to provide the electric field conditions that satisfy the plasma discharge.

[0047] In one example, the energy supply unit includes a green electricity-driven gas supply system 6 and a power supply system 7.

[0048] The gas supply system 6 and the power supply system 7 are both connected to the plasma jet device 3, and are used to provide the working medium and the electric field conditions required for plasma discharge, respectively. Since both the gas supply system 6 and the power supply system 7 are driven by green electricity, the operation of the plasma jet device 3 can promote the local consumption of renewable energy, save electricity consumption, and contribute to the goal of carbon neutrality.

[0049] Furthermore, the circulating pressure stabilizing unit is connected to the sealed cavity 1 and is used to evacuate the sealed cavity 1 according to the amount of gas ejected by the plasma jet device 3, so that the environment inside the sealed cavity 1 is always in a stable pressure state. It should be noted that the output end of the plasma jet device 3 and the semiconductor laser device 4 are both located in the sealed cavity 1. Therefore, by keeping the sealed cavity 1 in a stable pressure state, the laser system can be ensured to operate under ideal working conditions. Compared with traditional gas lasers, this effectively avoids the technical defects of unstable laser output in the subsequent process caused by pressure fluctuations in the plasma jet device 3 and the semiconductor laser device 4, thus enabling the laser system to output a more stable laser.

[0050] It should also be noted that, during the extraction process, the circulating voltage regulator unit can dissipate the heat generated by the laser system operating in the sealed cavity 1 (such as the heat generated by the semiconductor laser device 4 and the plasma jet device 3), which means that the circulating voltage regulator unit also plays the role of gas circulation. Therefore, it can effectively dissipate a large amount of heat, reduce the risk of overheating during system operation, and effectively extend the service life of the laser system.

[0051] The laser detection unit is located outside the optical resonant cavity unit and is used to measure the output power of the laser output by the laser resonant cavity 2. The output power can be used as a feedback parameter to optimize and debug the operation of the system.

[0052] like Figure 2 As shown, in this embodiment, the specific structure of the laser resonant cavity 2 is further described so that the laser can be better output to the laser detection unit.

[0053] Specifically, the laser resonant cavity 2 includes a cavity 21 fixedly connected to the sealed cavity 1 on one side via a connector, a Brewster window 22, a total reflection concave lens 23, and a total reflection convex lens 24.

[0054] The cavity 21 is connected to the sealed cavity 1, and the gas circulation function is achieved by evacuating the sealed cavity 1 through the circulating pressure stabilizing unit, thereby achieving the purpose of cooling and heat dissipation.

[0055] The Brewster window 22 is disposed inside the cavity 21 and located on the side away from the connector.

[0056] Furthermore, the total reflection concave lens 23 and the total reflection convex lens 24 are placed on both sides of the inner cavity of the cavity 21.

[0057] It should be noted that in this embodiment, the connector can be set as multiple fixed connecting strips arranged in a ring shape, that is, it only serves to support the cavity 21. Its specific structure can also be set as other shapes, as long as it can support the cavity 21 and ensure that the cavity 21 and the sealed cavity 1 are in a connected state, so it will not be described in detail here.

[0058] It should also be noted that the total internal reflection convex lens 24 is placed in the middle of the Brewster window 22 to ensure that the light beam is concentrated in the central area of ​​the Brewster window 22, reduce the risk of uneven heating of the Brewster window 22, improve the long-term stability of the system, and avoid optical distortion caused by thermal expansion.

[0059] In a further embodiment, the area of ​​the total internal reflection convex lens 24 facing the Brewster window 22 is between one-fifth and one-third of the light-transmitting area of ​​the Brewster window 22. Preferably, the area of ​​the total internal reflection convex lens 24 facing the Brewster window 22 is one-quarter of the light-transmitting area of ​​the Brewster window 22.

[0060] In other embodiments, the Brewster window 22 is made of fused silica, and the Brewster angle of the Brewster window 22 is set to 40°-50°. By limiting the Brewster angle, the refractive index of the fused silica material can be matched, reducing reflection loss and significantly improving light transmission efficiency. Preferably, the Brewster angle of the Brewster window 22 is set to 45°.

[0061] In a further embodiment, a protective lens 11 is provided on the side of the sealed cavity 1 near the Brewster window 22, and the laser detection unit is used to detect the laser light that passes through the Brewster window 22 and the protective lens 11 in sequence. That is, by providing the protective lens 11, dust, debris, or other contaminants from the external environment are prevented from directly entering the laser's optical path system, while also avoiding damage to the laser detection unit, thus protecting the laser detection unit.

[0062] In this embodiment, the working medium of the plasma jet device 3 is argon, helium, and a mixture of the above gases; the working pressure of the plasma jet device 3 is 1 atm; and the jet velocity of the plasma jet device 3 is 1 L / min. –1， The peak pulse voltage and pulse frequency of the plasma jet device 3 are 1.8 kV and 10 kHz, respectively. The center wavelength of the semiconductor laser device 4 is set to 811.5 nm, and the pump light intensity of the semiconductor laser device 4 is 20 kWcm². –2 .

[0063] In one example, the working medium is a mixture of argon and helium, with argon accounting for 1%-3% and helium accounting for 97%-99%.

[0064] In this embodiment, the circulating voltage stabilizing unit is configured as a vacuum pump 8, which is connected to the sealed cavity 1 through an interface to pump gas according to the amount of gas output by the plasma jet device 3, so that the sealed cavity 1 is always in a stable voltage state, ensuring the stability of the overall laser system operation.

[0065] In a further embodiment, the laser detection unit includes an attenuator 9 and a laser power meter 10 arranged sequentially. It should be noted that the attenuation factor of the attenuator 9 is 90-110 times. In this embodiment, the attenuator 9 is used to reduce the beam intensity and prevent overload of the measuring equipment, while the laser power meter 10 is used to accurately measure the power of the output laser, ensuring measurement accuracy.

[0066] In one example, the performance of the aforementioned high-efficiency gas laser pumping system based on energy-saving jet plasma was further investigated through experiments, as shown in Table 1:

[0067]

[0068]

[0069] Table 1

[0070] As shown in Table 1, with pump power and discharge power of 3.8kW and 0.78kW respectively, the high-efficiency gas laser pumping system based on energy-saving jet plasma achieved a laser output of 1.9kW. At this point, the discharge power accounts for 21% of the pump power, the optical conversion efficiency is 50%, and the total conversion efficiency is 41%. Compared to traditional gas lasers with total conversion efficiencies between 10% and 30%, the high-efficiency gas laser pumping system based on energy-saving jet plasma exhibits low discharge power, high optical conversion efficiency, and energy-saving and clean characteristics.

[0071] In another example, under the same pump power of 4.58kW, we measured the operating temperatures of the high-efficiency gas laser pumping system based on energy-saving jet plasma, the conventional gas laser device, and the conventional solid-state laser device, as shown in Table 2:

[0072]

[0073] As shown in Table 2, the high-efficiency gas laser pumping system based on energy-saving jet plasma uses a circulating voltage regulator unit to circulate gas in the sealed cavity 1. Its heat dissipation performance is significantly better than the other two traditional laser pumping devices, thus achieving the goal of good heat dissipation performance and effectively extending the service life of the device.

[0074] In summary, the high-efficiency gas laser pumping system based on energy-saving jet plasma proposed in this invention has the following characteristics:

[0075] (1) By adopting green electricity-driven plasma jets, we can promote the local consumption of renewable energy, save electricity consumption, and contribute to the goal of carbon neutrality.

[0076] (2) The two-stage excitation method of synergistic plasma jet device 3 and semiconductor laser device 4 significantly improves energy conversion efficiency and beam quality compared with traditional gas lasers. This dual excitation mechanism not only optimizes the excitation process, but also enables the laser to stably output high-density plasma at a lower start-up voltage, thereby improving the overall performance of the system.

[0077] (3) The circulating pressure stabilization unit achieves stable control of gas pressure by simultaneously regulating the operation of plasma jet device 3 and vacuum pump 8, ensuring that the system operates under ideal working conditions. Compared with traditional gas lasers, this design effectively reduces the sensitivity of the laser to gas pressure fluctuations and provides more reliable laser output.

[0078] (4) By working with the vacuum pump 8, heat can be effectively extracted from the sealed cavity 1, thereby effectively reducing the risk of overheating during system operation and extending the lifespan of the laser. Compared with traditional gas lasers, this superior heat dissipation performance ensures stable operation of the laser in high-power applications, demonstrating excellent thermal management capabilities.

[0079] The above embodiments are only used to illustrate the technical methods of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical methods of the present invention without departing from the spirit and scope of the technical methods of the present invention.

Claims

1. A high-efficiency gas laser pumping system based on energy-saving jet plasma, characterized in that, It includes an optical resonant cavity unit, a dual excitation unit, an energy supply unit, a cyclic voltage regulation unit, and a laser detection unit; The optical resonant cavity unit includes a sealed cavity (1) and a laser resonant cavity (2) supported in the sealed cavity (1). The dual excitation unit includes a plasma jet device (3) and a semiconductor laser device (4) that are sealed and connected to the sealed cavity (1). The plasma jet device (3) is used to form a jet region (5) in the middle of the laser resonant cavity (2), and the semiconductor laser device (4) is used to pump the laser gain medium in the jet region (5). The energy supply unit is used to provide the working medium to the plasma jet device (3) and to provide the electric field conditions that satisfy the plasma discharge. The circulating pressure stabilizing unit is connected to the sealed cavity (1) and is used to evacuate the sealed cavity (1) according to the amount of gas ejected by the plasma jet device (3) so that the environment inside the sealed cavity (1) is always in a stable pressure state. The laser detection unit is located outside the optical resonant cavity unit and is used to measure the output power of the laser output by the laser resonant cavity (2).

2. The high-efficiency gas laser pumping system based on energy-saving jet plasma according to claim 1, characterized in that, The laser resonant cavity (2) includes a cavity (21) fixedly connected to the sealed cavity (1) on one side by a connector, a Brewster window (22), a total reflection concave lens (23), and a total reflection convex lens (24). The cavity (21) is connected to the sealed cavity (1); The Brewster window (22) is disposed inside the cavity (21) and located on the side away from the connector; The total reflection concave lens (23) and the total reflection convex lens (24) are placed on both sides of the inner cavity of the cavity (21); The total reflection convex lens (24) is positioned in the middle of the Brewster window (22).

3. The high-efficiency gas laser pumping system based on energy-saving jet plasma according to claim 2, characterized in that, The area of ​​the total reflection convex lens (24) facing the Brewster window (22) is between one-fifth and one-third of the light-transmitting area of ​​the Brewster window (22).

4. The high-efficiency gas laser pumping system based on energy-saving jet plasma according to claim 2, characterized in that, The Brewster window (22) is made of fused silica, and the Brewster angle of the Brewster window (22) is set to 40°-50°.

5. A high-efficiency gas laser pumping system based on energy-saving jet plasma according to claim 2, characterized in that, The sealed cavity (1) is provided with a protective lens (11) on the side near the Brewster window (22). The laser detection unit is used to detect lasers that pass sequentially through the Brewster window (22) and the protective lens (11).

6. The high-efficiency gas laser pumping system based on energy-saving jet plasma according to claim 1, characterized in that, The working medium of the plasma jet device (3) is argon, helium or a mixture of the above gases; The working pressure of the plasma jet device (3) is 1 atm; The jet velocity of the plasma jet device (3) is 1 Lmin–1; The peak pulse voltage and pulse frequency of the plasma jet device (3) are 1.8kV and 10kHz, respectively; The center wavelength of the semiconductor laser device (4) is set to 811.5 nm, and the pump light intensity of the semiconductor laser device (4) is 20 kW cm–2.

7. A high-efficiency gas laser pumping system based on energy-saving jet plasma according to claim 6, characterized in that, The working medium is a mixture of argon and helium; Argon accounts for 1%-3% of the total gas, while helium accounts for 97%-99%.

8. The high-efficiency gas laser pumping system based on energy-saving jet plasma according to claim 1, characterized in that, The energy supply unit includes a gas supply system (6) and a power supply system (7) based on green electricity. The gas supply system (6) and the power supply system (7) are both connected to the plasma jet device (3) and are used to provide the working medium and the electric field conditions that meet the plasma discharge requirements, respectively.

9. A high-efficiency gas laser pumping system based on energy-saving jet plasma according to claim 1, characterized in that, The circulating voltage stabilizing unit is configured as a vacuum pump (8).

10. A high-efficiency gas laser pumping system based on energy-saving jet plasma according to claim 1, characterized in that, The laser detection unit includes an attenuator (9) and a laser power meter (10) arranged sequentially. The attenuation factor of the attenuator (9) is 90-110 times.

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