A MEMS probe cleaning process
By using wet electrolytic cleaning technology, MEMS probes are treated with specific solutions and electrolytic polishing, which solves the problems of surface roughness and edge defects in traditional cleaning, and significantly improves the cleanliness and yield of the probes.
Patent Information
- Application Number
- CN202411574076.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-06
- Publication Date
- 2025-11-25
- Estimated Expiration
- 2044-11-06
AI Technical Summary
Traditional wet cleaning of MEMS probes can easily lead to changes in product surface roughness and the inability to remove edge defects, affecting the physical and chemical properties of the product and resulting in insufficient yield.
Wet electrolytic cleaning technology is used, employing a specific concentration of acetone, isopropanol, sodium hydroxide, and potassium hydroxide solution, combined with ultrasonic treatment and electrolytic polishing, to remove residual adhesive, dirt, and molten metal slag from the probe surface. Edge defects are also addressed through electrolytic degreasing and polishing.
It effectively solves the defects of traditional cleaning methods, improves the cleanliness and yield of probes, from less than 60% to nearly 100%.
Smart Images
Figure CN119456541B_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the field of semiconductor probes, and specifically relates to a MEMS probe cleaning process. Background Technology
[0002] MEMS probes are mainly used for testing high-end processor chips, GPU chips, and radio frequency chips. In recent years, with the rapid development of new application terminal chips such as the Internet of Things, artificial intelligence, and new energy vehicles, the demand for MEMS probes has also grown rapidly.
[0003] However, with the miniaturization, high performance, and high precision of electronic devices, there is an inevitable demand for more probes, finer spacing, and smaller dimensions. As a result, the internal structure of MEMS probes becomes more delicate. Even minor contamination, dust, bumps, or other defects can damage the internal circuitry, causing short circuits or open circuits and ultimately damaging the chip. This places higher demands on the precision manufacturing processes and capabilities of probe manufacturers, making wet cleaning particularly important.
[0004] Wet cleaning is an important step in the precision manufacturing of MEMS probes. Since MEMS probe materials are usually made of alloys of at least two or more materials, and the corrosion resistance of different alloy materials varies, the problem with traditional wet cleaning is that it can lead to changes in the surface roughness of the product and the difficulty in removing edge defects, which in turn can lead to changes in the physical and chemical properties of the product. Summary of the Invention
[0005] The purpose of this invention is to provide a MEMS probe cleaning process that solves the probe cleanliness problem without damaging any original characteristics of the probe product, thereby greatly improving the probe yield and performance stability.
[0006] The objective of this invention is achieved as follows: a MEMS probe cleaning process, comprising the following steps:
[0007] (1) First, heat the acetone solution with a mass concentration of 3%-5% to 80℃-90℃, and then immerse the probe product after it is removed from the machine into the acetone solution and heat it at a constant temperature for 3min-7min to separate the probe from the fixture and remove the probe.
[0008] (2) Place the probe detached from the fixture into a container, then add the first mixture into the container, heat to 40℃-60℃, soak the probe and sonicate for 30min-50min;
[0009] (3) After removing the adhesive, the probe is rinsed with pure water for 5 min-10 min to remove chemical residues on the surface. Then, the probe is placed in the second mixture. The temperature of the second mixture is heated to 50℃-70℃. The probe is immersed in the second mixture and ultrasonically cleaned for 20 min-30 min to remove dirt and particles from the probe surface.
[0010] (4) Place the cleaned probe into a potassium hydroxide solution and use the probe as the anode. Apply a cathode voltage to perform electrolytic degreasing for 10-15 minutes to remove char and oil from the probe edge.
[0011] (5) After electrolytic degreasing, the probe is placed in sodium hydroxide solution and the probe is used as the cathode. An anodic voltage is applied for electrolytic polishing for 20-30 minutes to remove the metal slag on the edge of the probe and the metal protrusions on the surface.
[0012] (6) Repeat step (3);
[0013] (7) Next, overflow the probe with pure water for 5 min-10 min to wash off the chemical residue on the surface, and then place it in an oven at 70℃-90℃ to dry for 10 min-15 min;
[0014] (8) After the probe is dried, remove it from the oven and the cleaning operation is complete.
[0015] This invention employs wet electrolytic cleaning technology. It uses acetone at a mass concentration of 3%-5% primarily for probe product delamination; a mixture of isopropanol (50%-70%), diethylene glycol (5%-10%), and carboxylic acid (4%-6%) primarily to remove residual adhesive from the product surface; a mixture of sodium hydroxide solvent (20%-40%) and amide (15%-30%) primarily to remove dirt and dust from the product surface; potassium hydroxide at a mass concentration of 45%, with the product as the anode and a cathode voltage of 3V-6V applied for electrolytic degreasing, primarily to remove coke and oil stains from the product edges; and sodium hydroxide at a mass concentration of 60%-80%, with the product as the cathode and a cathode voltage of 2V-4V applied, primarily to remove molten metal slag from the product edges and surface metal protrusions.
[0016] Compared with the prior art, the beneficial effects of the present invention are as follows: the present invention effectively solves the defects of traditional wet cleaning products such as large surface roughness, many bumps, and uneven edges, avoids changes in the physical and chemical properties of the product, and improves the product yield from less than 60% to nearly 100%.
[0017] As a further improvement of the present invention, the probe product includes a fixture, on which the probe is bonded and fixed by a pyrolytic adhesive film. The probe comprises multiple unit needles arranged in a rectangular array, with the middle of each unit needle connected by several connecting members. The unit needles are perpendicular to the fixture, and the probe is made of copper alloy. The unit needles are connected and fixed by the connecting members, and the integral probe is bonded and fixed to the fixture. The probe can be separated from the fixture and demolded using a heated acetone solution.
[0018] As a further improvement of the present invention, in step (2), the first mixture contains isopropanol at a mass concentration ratio of 50%-70%, diethylene glycol at a mass concentration ratio of 5%-10%, and carboxylic acid at a mass concentration ratio of 4%-6%, with the remainder being water. The first mixture can remove residual adhesive from the surface of the probe product.
[0019] As a further improvement of the present invention, in step (3), the mixture two contains sodium hydroxide at a mass concentration of 20%-40%, amide at a mass concentration of 15%-30%, and the remainder is water. The mixture two can remove dirt, dust, etc. from the surface of the probe product.
[0020] As a further improvement of the present invention, in step (4), the mass concentration of potassium hydroxide in the potassium hydroxide solution is 45%, and the cathode voltage is 3V-6V. Electrolytic degreasing is performed on the probe to remove coke and oil stains from the edges of the probe product.
[0021] As a further improvement of the present invention, in step (5), the mass concentration of sodium hydroxide in the sodium hydroxide solution is 60%-80%, and the anode voltage is 2V-4V. The probe is electrolytically polished to remove molten metal slag from the product edges and surface metal protrusions.
[0022] As a further improvement of the present invention, in steps (4) and (5), an electrolytic tool is used when electrolyzing the probe. The electrolytic tool includes a rectangular tank made of acrylic. Two parallel horizontal hanging rods are fixed on the tank. The hanging rods are set near the upper edge of the tank and pass through the tank. Locking nuts are fitted on both the left and right ends of the hanging rods. Two vertical columns corresponding to the left and right sides are fixed on each hanging rod. The lower ends of the columns are fixed to the bottom wall of the tank. The columns and hanging rods are all made of conductive metal. The probes, which are arranged in a rectangular array, are placed in four corresponding positions. Between the columns, the lower ends of each unit needle are supported on the bottom wall of the tank. Each column has a rotatable clamp at its lower end. The clamps of the four columns clamp the lower ends of the unit needles located at the four corners. The height of the connecting piece is higher than the height of the clamp. The tank is filled with potassium hydroxide solution or sodium hydroxide solution as electrolyte. The height of the electrolyte is 2-2.5 times the height of the probe. The probe is submerged in the electrolyte. An electrolytic power supply is provided on the outside of the tank. A wire is connected to any column and the wire is connected to the electrolytic power supply. The other end of the wire of the electrolytic power supply extends into the electrolyte. Attached Figure Description
[0023] Figure 1 This is a top view of the tank body of the present invention.
[0024] Figure 2 for Figure 1 Enlarged view of point A in the middle.
[0025] Figure 3 This is a sectional view of the tank.
[0026] Figure 4 This is a three-dimensional structural diagram of the tank.
[0027] Figure 5 This is a top view of the probe and fixture.
[0028] Figure 6 This is a front view of the probe and fixture.
[0029] Figure 7 This is a 20x magnified image of the microscope before the probe was cleaned.
[0030] Figure 8 This is a 20x magnified microscope image of the probe after the traditional cleaning method.
[0031] Figure 9 This is a 20x magnified microscope image of the probe after using the cleaning process of the present invention in Example 1.
[0032] Figure 10 This is a 20x magnified microscope image of the probe after using the cleaning process of the present invention in Example 2.
[0033] Figure 11This is a 20x magnified microscope image of the probe after using the cleaning process of the present invention in Example 3.
[0034] The components include: 1. Fixture; 2. Pyrolytic film; 3. Probe; 301. Unit needle body; 302. Connector; 4. Groove; 5. Hanging rod; 6. Locking nut; 7. Column; 8. Clamp; and 9. Electrolytic power supply. Detailed Implementation Example 1
[0035] like Figure 1-6 The MEMS probe cleaning process in this embodiment includes the following steps:
[0036] (1) First, heat an acetone solution with a mass concentration of 4% to 80°C. Then, immerse the probe 3 product after it has been removed from the machine into the acetone solution and heat it at a constant temperature for 5 minutes to separate the probe 3 from the fixture 1. Remove the probe 3. The probe 3 product includes a fixture 1, on which the probe 3 is bonded and fixed by a pyrolytic adhesive film 2. The probe 3 includes multiple unit needles 301 arranged in a rectangular array. The middle of each unit needle 301 is connected by several connectors 302. The unit needles 301 are perpendicular to the fixture 1. The probe 3 is made of copper alloy. The unit needles 301 are connected and fixed by the connectors 302. The integral probe 3 is bonded and fixed on the fixture 1. The probe 3 can be separated from the fixture 1 and demolded by heating the acetone solution.
[0037] (2) Place the probe 3, which has been removed from fixture 1, into a container, then add mixture one to the container, heat to 50°C, soak the probe 3, and ultrasonically treat for 30 minutes; mixture one contains isopropanol at a mass concentration of 70%, diethylene glycol at a mass concentration of 8%, carboxylic acid at a mass concentration of 5%, and the remainder is water. Mixture one can remove residual adhesive from the surface of the probe 3 product;
[0038] (3) After removing the adhesive, the probe 3 is rinsed with pure water for 5 minutes to remove chemical residues on the surface. Then, the probe 3 is placed in the second mixture. The temperature of the second mixture is heated to 60°C. The probe 3 is immersed in the second mixture and ultrasonically cleaned for 25 minutes to remove dirt and particles from the surface of the probe 3. The second mixture contains sodium hydroxide with a mass concentration of 30%, amide with a mass concentration of 15%, and the remainder is water. The second mixture can remove dirt, dust, etc. from the surface of the probe 3.
[0039] (4) Place the cleaned probe 3 into the potassium hydroxide solution and use the probe 3 as the anode. Apply the cathode voltage to perform electrolytic degreasing for 12 minutes to remove the char and oil stains on the edge of the probe 3. The mass concentration of potassium hydroxide in the potassium hydroxide solution is 45% and the cathode voltage is 5V.
[0040] (5) After electrolytic degreasing, the probe 3 is placed in a sodium hydroxide solution and the probe 3 is used as the cathode. An anode voltage is applied for electrolytic polishing for 25 minutes to remove the metal slag on the edge of the probe 3 and the metal protrusions on the surface. The mass concentration of sodium hydroxide in the sodium hydroxide solution is 70% and the anode voltage is 2V.
[0041] (6) Repeat step (3);
[0042] (7) Next, overflow pure water into probe 3 for 7 minutes to wash away the chemical residue on the surface, and then place it in an oven at 80°C to dry for 13 minutes.
[0043] (8) After the probe 3 is dried, remove the probe 3 from the oven and the cleaning operation is completed.
[0044] In steps (4) and (5), an electrolytic tool is used when electrolyzing the probe 3. The electrolytic tool includes a rectangular tank 4 made of acrylic. Two parallel horizontal hanging rods 5 are fixed on the tank 4. The hanging rods 5 are set near the upper edge of the tank 4 and pass through the tank 4. Locking nuts 6 are fitted on both the left and right ends of the hanging rods 5. Two vertical columns 7 are fixed on each hanging rod 5. The lower end of the column 7 is fixed to the bottom wall of the tank 4. The columns 7 and the hanging rods 5 are all made of conductive metal. The unit needles 301 of the probe 3, which are arranged in a rectangular array, are placed between the four columns 7. Each unit needle 301 is supported at its lower end on the bottom wall of the tank 4. Each column 7 has a rotatable clamp 8 at its lower end. The clamps 8 of the four columns 7 clamp the lower ends of the unit needles 301 located at the four corners. The height of the connector 302 is higher than the height of the clamp 8. The tank 4 is filled with potassium hydroxide solution or sodium hydroxide solution as electrolyte. The height of the electrolyte is 2.5 times the height of the probe 3. The probe 3 is submerged in the electrolyte. An electrolytic power supply 9 is provided on the outside of the tank 4. A wire is connected to any column 7 and the wire is connected to the electrolytic power supply 9. The wire at the other end of the electrolytic power supply 9 extends into the electrolyte.
[0045] like Figure 9 This is a magnified microscope image of probe 3 after the cleaning process of this embodiment; and... Figure 7 Microscopic magnification of probe 3 before cleaning. Figure 8 By comparing the traditional cleaning method with the magnified image of probe 3 under a microscope, it was found that the cleaning process in this embodiment is cleaner and has almost no flaws. Example 2
[0046] like Figure 1-6 The MEMS probe cleaning process in this embodiment includes the following steps:
[0047] (1) First, heat an acetone solution with a mass concentration of 3% to 90°C. Then, immerse the probe 3 product after it has been removed from the machine into the acetone solution and heat it at a constant temperature for 3 minutes to separate the probe 3 from the fixture 1. Remove the probe 3. The probe 3 product includes a fixture 1, on which the probe 3 is bonded and fixed by a pyrolytic adhesive film 2. The probe 3 includes multiple unit needles 301 arranged in a rectangular array. The middle of each unit needle 301 is connected by several connectors 302. The unit needles 301 are perpendicular to the fixture 1. The probe 3 is made of copper alloy. The unit needles 301 are connected and fixed by the connectors 302. The integral probe 3 is bonded and fixed on the fixture 1. The probe 3 can be separated from the fixture 1 and demolded by heating the acetone solution.
[0048] (2) Place the probe 3, which has been removed from fixture 1, into a container, then add mixture one to the container, heat to 40°C, soak the probe 3, and ultrasonically treat for 50 minutes; mixture one contains isopropanol at a mass concentration of 60%, diethylene glycol at a mass concentration of 5%, carboxylic acid at a mass concentration of 6%, and the remainder is water. Mixture one can remove residual adhesive from the surface of the probe 3 product;
[0049] (3) After removing the adhesive, the probe 3 is rinsed with pure water for 10 minutes to remove chemical residues on the surface. Then, the probe 3 is placed in the second mixture. The temperature of the second mixture is heated to 50°C. The probe 3 is immersed in the second mixture and ultrasonically cleaned for 30 minutes to remove dirt and particles from the surface of the probe 3. The second mixture contains sodium hydroxide with a mass concentration of 40%, amide with a mass concentration of 22%, and the remainder is water. The second mixture can remove dirt, dust, etc. from the surface of the probe 3.
[0050] (4) Place the cleaned probe 3 into the potassium hydroxide solution and use the probe 3 as the anode. Apply the cathode voltage to perform electrolytic degreasing for 15 minutes to remove the char and oil stains on the edge of the probe 3. The mass concentration of potassium hydroxide in the potassium hydroxide solution is 45% and the cathode voltage is 6V.
[0051] (5) After electrolytic degreasing, the probe 3 is placed in a sodium hydroxide solution and the probe 3 is used as the cathode. An anode voltage is applied for electrolytic polishing for 20 minutes to remove the metal slag on the edge of the probe 3 and the metal protrusions on the surface. The mass concentration of sodium hydroxide in the sodium hydroxide solution is 60% and the anode voltage is 3V.
[0052] (6) Repeat step (3);
[0053] (7) Next, overflow pure water into probe 3 for 5 minutes to wash away the chemical residue on the surface, and then place it in an oven at 70°C to dry for 15 minutes.
[0054] (8) After the probe 3 is dried, remove the probe 3 from the oven and the cleaning operation is completed.
[0055] In steps (4) and (5), an electrolytic tool is used when electrolyzing the probe 3. The electrolytic tool includes a rectangular tank 4 made of acrylic. Two parallel horizontal hanging rods 5 are fixed on the tank 4. The hanging rods 5 are set near the upper edge of the tank 4 and pass through the tank 4. Locking nuts 6 are fitted on both the left and right ends of the hanging rods 5. Two vertical columns 7 are fixed on each hanging rod 5. The lower end of the column 7 is fixed to the bottom wall of the tank 4. The columns 7 and the hanging rods 5 are all made of conductive metal. The unit needles 301 of the probe 3, which are arranged in a rectangular array, are placed on the four columns 7. In this configuration, the lower ends of each unit needle 301 are supported on the bottom wall of the tank 4. Each column 7 has a rotatable clamp 8 at its lower end. The clamps 8 of the four columns 7 clamp the lower ends of the unit needles 301 located at the four corners. The height of the connecting piece 302 is higher than the height of the clamp 8. The tank 4 is filled with potassium hydroxide solution or sodium hydroxide solution as electrolyte. The height of the electrolyte is twice the height of the probe 3. The probe 3 is submerged in the electrolyte. An electrolytic power supply 9 is provided on the outside of the tank 4. A wire is connected to any column 7 and the wire is connected to the electrolytic power supply 9. The wire at the other end of the electrolytic power supply 9 extends into the electrolyte.
[0056] like Figure 10 This is a magnified microscope image of probe 3 after the cleaning process of this embodiment; and... Figure 7 Microscopic magnification of probe 3 before cleaning. Figure 8 By comparing the traditional cleaning method with the magnified image of probe 3 under a microscope, it was found that the cleaning process in this embodiment is cleaner and has almost no flaws. Example 3
[0057] like Figure 1-6 The MEMS probe cleaning process in this embodiment includes the following steps:
[0058] (1) First, heat an acetone solution with a mass concentration of 5% to 85°C. Then, immerse the probe 3 product after it has been removed from the machine into the acetone solution and heat it at a constant temperature for 7 minutes to separate the probe 3 from the fixture 1. Remove the probe 3. The probe 3 product includes a fixture 1, on which the probe 3 is bonded and fixed by a pyrolytic adhesive film 2. The probe 3 includes multiple unit needles 301 arranged in a rectangular array. The middle of each unit needle 301 is connected by several connectors 302. The unit needles 301 are perpendicular to the fixture 1. The probe 3 is made of copper alloy. The unit needles 301 are connected and fixed by the connectors 302. The integral probe 3 is bonded and fixed on the fixture 1. The probe 3 can be separated from the fixture 1 and demolded by heating the acetone solution.
[0059] (2) Place the probe 3, which has been removed from fixture 1, into a container, then add mixture one to the container, heat to 60°C, soak the probe 3, and ultrasonically treat for 40 minutes; mixture one contains isopropanol at a mass concentration of 50%, diethylene glycol at a mass concentration of 10%, carboxylic acid at a mass concentration of 4%, and the remainder is water. Mixture one can remove residual adhesive from the surface of the probe 3 product;
[0060] (3) After removing the adhesive, the probe 3 is rinsed with pure water for 7 minutes to remove chemical residues on the surface. Then, the probe 3 is placed in the second mixture. The temperature of the second mixture is heated to 70°C. The probe 3 is immersed in the second mixture and ultrasonically cleaned for 20 minutes to remove dirt and particles from the surface of the probe 3. The second mixture contains sodium hydroxide with a mass concentration of 20%, amide with a mass concentration of 30%, and the remainder is water. The second mixture can remove dirt, dust, etc. from the surface of the probe 3.
[0061] (4) Place the cleaned probe 3 into the potassium hydroxide solution and use the probe 3 as the anode. Apply the cathode voltage to perform electrolytic degreasing for 10 minutes to remove the char and oil stains on the edge of the probe 3. The mass concentration of potassium hydroxide in the potassium hydroxide solution is 45% and the cathode voltage is 3V.
[0062] (5) After electrolytic degreasing, the probe 3 is placed in a sodium hydroxide solution and the probe 3 is used as the cathode. An anode voltage is applied for electrolytic polishing for 30 minutes to remove the metal slag on the edge of the probe 3 and the metal protrusions on the surface. The mass concentration of sodium hydroxide in the sodium hydroxide solution is 80% and the anode voltage is 4V.
[0063] (6) Repeat step (3);
[0064] (7) Next, overflow pure water into probe 3 for 10 minutes to wash away the chemical residue on the surface, and then place it in an oven at 90°C to dry for 10 minutes.
[0065] (8) After the probe 3 is dried, remove the probe 3 from the oven and the cleaning operation is completed.
[0066] In steps (4) and (5), an electrolytic tool is used when electrolyzing the probe 3. The electrolytic tool includes a rectangular tank 4 made of acrylic. Two parallel horizontal hanging rods 5 are fixed on the tank 4. The hanging rods 5 are set near the upper edge of the tank 4 and pass through the tank 4. Locking nuts 6 are fitted on both the left and right ends of the hanging rods 5. Two vertical columns 7 are fixed on each hanging rod 5. The lower end of the column 7 is fixed to the bottom wall of the tank 4. The columns 7 and the hanging rods 5 are all made of conductive metal. The unit needles 301 of the probe 3, which are arranged in a rectangular array, are placed between the four columns 7. Each unit needle 301 is supported at its lower end on the bottom wall of the tank 4. Each column 7 has a rotatable clamp 8 at its lower end. The clamps 8 of the four columns 7 clamp the lower ends of the unit needles 301 located at the four corners. The height of the connecting piece 302 is higher than the height of the clamp 8. The tank 4 is filled with potassium hydroxide solution or sodium hydroxide solution as electrolyte. The height of the electrolyte is 2.3 times the height of the probe 3. The probe 3 is submerged in the electrolyte. An electrolytic power supply 9 is provided on the outside of the tank 4. A wire is connected to any column 7 and the wire is connected to the electrolytic power supply 9. The wire at the other end of the electrolytic power supply 9 extends into the electrolyte.
[0067] like Figure 11 This is a magnified microscope image of probe 3 after the cleaning process of this embodiment; and... Figure 7 Microscopic magnification of probe 3 before cleaning. Figure 8 By comparing the traditional cleaning method with the magnified image of probe 3 under a microscope, it was found that the cleaning process in this embodiment is cleaner and has almost no flaws.
[0068] In summary, this invention employs wet electrolytic cleaning technology to address the persistent cleaning problem of MEMS probes. Through extensive testing, analysis, and validation, it breaks through the traditional simple chemical immersion process, inventing a novel, multi-technology-integrated wet electrolytic cleaning technique. This technique primarily includes thermal demolding, chemical degreasing, electrolytic polishing, electrolytic degreasing, and ultrasonic cleaning. This technology effectively solves the problem of changes in the physical and chemical properties of products caused by abnormal surface roughness, which is a common issue with traditional cleaning techniques. Without damaging any of the original characteristics of the product, it solves the cleanliness problem of probes, significantly improving product yield and performance stability.
[0069] This invention effectively solves the defects of traditional wet cleaning products, such as large surface roughness, many bumps, and uneven edges, avoids changes in the physical and chemical properties of the products, and improves the product yield from less than 60% to nearly 100%.
[0070] This invention is not limited to the above embodiments. Based on the technical solutions disclosed in this invention, those skilled in the art can make some substitutions and modifications to some of the technical features without creative effort, and all such substitutions and modifications are within the protection scope of this invention.
Claims
1. A MEMS probe cleaning process, characterized by, It comprises the following steps: (1) first, the mass concentration ratio of 3%-5% acetone solution is heated to 80-90 ℃, then the probe product after the machine is immersed in the acetone solution constant temperature heating 3-7 min, so that the probe and fixture is separated, the probe is taken out; (2) the probe is separated from the fixture and put into the container, then the mixed solution one is added to the container, heated to 40-60 ℃, soak the probe and ultrasonic treatment for 30-50 min; The mixed solution one contains 50%-70% isopropyl alcohol, 5%-10% diethylene glycol, 4%-6% carboxylic acid, and the rest is water; The mixed solution one can remove the residue on the surface of the probe product; (3) after the glue is removed, the probe is overflowed with pure water for 5-10 min, and the surface chemical residue is washed, then the probe is put into the mixed solution two, the temperature of the mixed solution two is heated to 50-70 ℃, the mixed solution two soaks the probe and ultrasonic cleaning for 20-30 min, and the surface dirt and particles of the probe are washed; The mixed solution two contains 20%-40% sodium hydroxide and 15%-30% amide, and the rest is water; (4) the probe after surface cleaning is put into potassium hydroxide solution, and the probe is used as anode, and cathode voltage is applied for electrolytic degreasing, the degreasing time is 10-15 min, and the coke and oil stain on the edge of the probe are removed; (5) the probe after electrolytic degreasing is put into sodium hydroxide solution, and the probe is used as cathode, and anode voltage is applied for electrolytic polishing, the polishing time is 20-30 min, and the metal slag and surface metal protrusions on the edge of the probe are removed; (6) repeat step (3); (7) then the probe is overflowed with pure water for 5-10 min, and the surface chemical residue is washed, and then placed in the oven for 70-90 ℃ drying for 10-15 min; (8) finally, the probe is taken out from the oven after drying, and the cleaning operation is completed.
2. The MEMS probe cleaning process of claim 1, wherein, The probe product comprises a jig, the jig is fixed with a probe by pyrolytic adhesive film, the probe comprises a plurality of unit needle bodies arranged in a rectangular array, the middle part of each unit needle body is connected by a plurality of connecting pieces, the unit needle body is perpendicular to the jig, and the material of the probe is copper alloy.
3. The MEMS probe cleaning process of claim 1 or 2, wherein, In step (4), the mass concentration of potassium hydroxide in the potassium hydroxide solution is 45%, and the cathode voltage is 3-6 V.
4. The MEMS probe cleaning process of claim 1 or 2, wherein, In step (5), the mass concentration of sodium hydroxide in the sodium hydroxide solution is 60%-80%, and the anode voltage is 2-4 V.
5. The MEMS probe cleaning process of claim 2, wherein, The electrolysis tools are used in the steps (4) and (5), the electrolysis tools comprise a rectangular tank body, the material of the tank body is acrylic, two parallel transverse hanging rods are fixed on the tank body, the hanging rods are arranged close to the upper edge of the tank body, the hanging rods pass through the tank body and lock nuts are sleeved on the left and right ends of the hanging rods, two corresponding vertical columns are fixed on each hanging rod, the lower ends of the vertical columns are fixed on the bottom wall of the tank body, the vertical columns and the hanging rods are conductive metals, the unit needle bodies of the probe are arranged in a rectangular array and are arranged between the four vertical columns, the lower ends of the unit needle bodies are supported on the bottom wall of the tank body, a rotatable clamp is arranged at the lower end of each vertical column, the clamps of the four vertical columns clamp the lower ends of the unit needle bodies at four corners respectively, the height of the connecting piece is higher than the height of the clamp, the tank body contains potassium hydroxide solution or sodium hydroxide solution as the electrolyte, the height of the electrolyte is 2-2.5 times of the height of the probe, the probe is submerged in the electrolyte, an electrolysis power supply is arranged outside the tank body, wires are connected to any vertical column and are connected with the electrolysis power supply, and the wire at the other end of the electrolysis power supply extends into the electrolyte.
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