A method for preventing oxidation after sand blasting cleaning of a target material

Abstract

The application provides a method for preventing oxidation of a target material after sand blasting cleaning, which comprises the following steps: (1) after the target material after sand blasting is cleaned, a sealing layer is first arranged on the surface of the target material after sand blasting, the sealing layer is provided with switchable air exhaust holes and air holes, and a sealed target material is obtained; (2) the air exhaust holes and the air holes are opened, hot gas is introduced into the air holes, and the hot gas is exhausted from the air exhaust holes, so that the sealed target material is subjected to first drying; and (3) the air holes are closed, vacuum is continuously exhausted from the air exhaust holes, and heating is performed, so that second drying is performed, and an anti-oxidation target material is obtained. The application discards the conventional drying method of blowing, but establishes a closed space on the surface of the target material after sand blasting, and then performs blowing, so that the water removal effect is better, and the method can be applied to surfaces with smaller roughness after sand blasting, and the anti-oxidation performance is better.

Description

Technical Field

[0001] This invention relates to the field of target material technology, and in particular to a method for preventing oxidation of target materials after sandblasting and cleaning. Background Technology

[0002] As an important coating material, target materials have wide applications in fields such as integrated circuits, solar energy, and optical devices. They mainly include sputtering coating, vacuum evaporation, and plasma coating, among which sputtering coating is the most commonly used.

[0003] Target assemblies are typically constructed by welding a target and a backplate. To improve welding strength, the surfaces of the target and backplate to be welded need to be pre-treated. A common method is sandblasting to improve surface roughness. However, due to the characteristics of sandblasted surfaces, cleaning fluid often remains on the sandblasted surface after cleaning, and it is prone to oxidation during the drying process, affecting the appearance and subsequent use of the target and increasing the defect rate of the target products.

[0004] CN114714257A discloses a sandblasting method for a target material, specifically disclosing the following steps: (1) performing a first sandblasting treatment on the non-sputtering surface of the target material to obtain a first sandblasted surface; (2) covering the surface of the first sandblasted surface with a protective layer and performing a second sandblasting treatment to obtain a second sandblasted surface; (3) heating to remove the protective layer on the surface of the second sandblasted surface, maintaining the temperature while purging with compressed gas to obtain a target material with a dry sandblasted surface; the material of the protective layer in step (2) includes indium and / or tin. However, this method does not address the problem of how to prevent surface oxidation after sandblasting.

[0005] CN112959224A discloses a method for preventing oxidation after sandblasting a target material, specifically including the following steps: (1) sandblasting the non-sputtering surface of the target material to obtain a sandblasted target material; (2) cleaning the sandblasted target material obtained in step (1), and then purging and drying it with compressed gas to obtain a target material with a dry sandblasted surface. However, this method is difficult to fully remove the moisture hidden between the pores of the surface with low roughness.

[0006] Therefore, there is a need to develop a new method to prevent oxidation of the target surface after sandblasting. Summary of the Invention

[0007] To address the aforementioned technical problems, this invention provides a method for preventing oxidation of target materials after sandblasting and cleaning. This method can effectively remove trace amounts of residual moisture from the target surface, especially for copper targets, and can effectively prevent oxidation of the target material after sandblasting. It has broad application prospects.

[0008] To achieve this objective, the present invention adopts the following technical solution:

[0009] This invention provides a method for preventing oxidation of a target material after sandblasting and cleaning, the method comprising the following steps:

[0010] (1) After the sandblasted target is cleaned, a sealing layer is first set on the surface of the sandblasted target. The sealing layer has an openable air extraction hole and an air vent, thus obtaining a sealed target.

[0011] (2) Open the air extraction hole and the air vent, introduce hot gas into the air vent, and discharge the hot gas from the air extraction hole to perform the first drying of the sealed target material;

[0012] (3) Close the vent hole, continuously evacuate and heat from the vent hole to perform a second drying process, and obtain the anti-oxidation target material.

[0013] Compared to existing technologies, the core concept of this invention is as follows:

[0014] A. Firstly, by setting a sealing layer on the surface of the target material after sandblasting, the heat dissipation area of ​​the surface fluid is reduced, ensuring that the introduced hot gas can more fully transfer heat to the target surface, and ensuring that the hot gas flows from one side of the target material to the other side, which significantly improves the removal rate of moisture on the target surface.

[0015] B. Based on the hot gas flow purging, the vent is closed, the extraction hole is evacuated, and heat treatment is carried out at the same time. This allows the liquid phase between the surface pores of the target material with small roughness to overcome the capillary force under continuous vacuum conditions and vaporize under high temperature conditions, achieving the purpose of deep moisture removal. This can greatly reduce the subsequent oxidation of pure copper target material and has broad application prospects.

[0016] Preferably, the surface roughness of the target material after sandblasting in step (1) is 2 to 5 μm, for example, it can be 2 μm, 2.4 μm, 2.7 μm, 3 μm, 3.4 μm, 3.7 μm, 4 μm, 4.4 μm, 4.7 μm or 5 μm.

[0017] The method provided by this invention is preferably applicable to target materials with a surface roughness of 2 to 5 μm. Target materials with this roughness have a higher capacity to hold moisture and are more difficult to remove. The method provided by this invention can better remove this moisture and improve the antioxidant capacity of the target material.

[0018] Preferably, the surface abrasive material of the target material after sandblasting in step (1) includes white alumina.

[0019] Preferably, the particle size range of the white alumina is 70-80 mesh, for example, it can be 70 mesh, 72 mesh, 73 mesh, 74 mesh, 75 mesh, 76 mesh, 77 mesh, 78 mesh, 79 mesh or 80 mesh, etc.

[0020] Preferably, the cleaning agent used in step (1) includes isopropanol, water, and ethanol.

[0021] Preferably, the isopropanol content in the cleaning agent is 10-15 wt%, for example, it can be 10 wt%, 10.6 wt%, 11.2 wt%, 11.7 wt%, 12.3 wt%, 12.8 wt%, 13.4 wt%, 13.9 wt%, 14.5 wt%, or 15 wt%.

[0022] Preferably, the ethanol content in the cleaning agent is 5-15 wt%, for example, it can be 5 wt%, 7 wt%, 8 wt%, 9 wt%, 10 wt%, 11 wt%, 12 wt%, 13 wt%, 14 wt%, or 15 wt%.

[0023] Preferably, the air extraction hole and the air vent in step (1) are located on both sides of the sandblasted target.

[0024] The present invention preferably places the air extraction hole and the air vent on both sides of the target material after sandblasting, so as to more effectively ensure the full flow of air on the surface of the target material in step (2).

[0025] Preferably, at least two vent holes are provided, and they are provided at both ends on one side.

[0026] The present invention further optimizes the placement of vents in different positions, thereby creating different airflows on the surface of the target material, avoiding dead zones of drying, and improving the anti-oxidation effect.

[0027] Preferably, the sealing layer is disposed in close contact with the surface of the sandblasted target.

[0028] The term "closely attached" in this invention refers to the lower surface of the sealing layer being in contact with the sandblasted surface of the sandblasted target material.

[0029] Preferably, in order to prevent the sealing layer from damaging the surface of the target material after sandblasting, the sealing layer is a soft layer, which can also better achieve the sealing effect.

[0030] Preferably, in step (1), the sealing layer, except for the air extraction hole and the air vent, forms a sealed space with the sandblasting area of ​​the sandblasted target.

[0031] Preferably, the hot gas in step (2) includes any one or a combination of at least two of nitrogen, argon or helium, wherein typical but non-limiting combinations are combinations of nitrogen and argon, combinations of helium and argon, and combinations of nitrogen and helium.

[0032] Preferably, the temperature of the hot gas in step (2) is 80 to 95°C, for example, it can be 80°C, 82°C, 84°C, 85°C, 87°C, 89°C, 90°C, 92°C, 94°C or 95°C.

[0033] Preferably, the inlet pressure of the hot gas is 0.1 to 0.3 MPa, for example, it can be 0.1 MPa, 0.13 MPa, 0.15 MPa, 0.17 MPa, 0.19 MPa, 0.22 MPa, 0.24 MPa, 0.26 MPa, 0.28 MPa or 0.3 MPa.

[0034] The present invention further preferably controls the inlet pressure of the hot gas within the above-mentioned range, resulting in a better drying effect.

[0035] Preferably, the drying time in step (2) is 2 to 5 minutes, for example, it can be 2 minutes, 2.4 minutes, 2.7 minutes, 3 minutes, 3.4 minutes, 3.7 minutes, 4 minutes, 4.4 minutes, 4.7 minutes or 5 minutes.

[0036] Preferably, the duration of vacuuming in step (3) is 10 to 15 minutes, for example, it can be 10 minutes, 10.6 minutes, 11.2 minutes, 11.7 minutes, 12.3 minutes, 12.8 minutes, 13.4 minutes, 13.9 minutes, 14.5 minutes or 15 minutes.

[0037] Preferably, the heating temperature is 100-120°C, for example, it can be 100°C, 103°C, 105°C, 107°C, 109°C, 112°C, 114°C, 116°C, 118°C or 120°C.

[0038] The duration of vacuuming (under a vacuum level of 1.5–3 kPa) and the heating temperature described in this invention are crucial, as they can achieve the effect of vaporizing the liquid phase in the capillary and have the advantage of deep moisture removal.

[0039] Preferably, the vacuum gauge reading for evacuation is 1.5 to 3 kPa, for example, it can be 1.5 kPa, 1.6 kPa, 1.7 kPa, 1.8 kPa, 1.9 kPa, 2.0 kPa, 2.2 kPa, 2.3 kPa, 2.4 kPa, 2.5 kPa or 3 kPa, etc.

[0040] Preferably, the target material is a matrix-integrated target material.

[0041] Since the matrix-integrated target material has a large surface area, it is difficult to remove residual moisture from the surface. The method provided by this invention can fully remove moisture from the pores of the large surface, which is crucial for preventing subsequent oxidation of the target material.

[0042] As a preferred technical solution of the present invention, the method includes the following steps:

[0043] (1) After cleaning the sandblasted target material with a surface roughness of 2-5 μm, the cleaning agent contains 10-15 wt% isopropanol, 5-15 wt% ethanol, and the remainder is water. First, a sealing layer is set on the surface of the sandblasted target material. The sealing layer has an openable air extraction hole and a ventilation hole. The air extraction hole and the ventilation hole are located on both sides of the sandblasted target material. The sealing layer is set tightly against the surface of the sandblasted target material. Except for the air extraction hole and the ventilation hole, the sealing layer forms a closed space with the sandblasting area of ​​the sandblasted target material to obtain a sealed target material.

[0044] (2) Open the extraction hole and the ventilation hole, introduce hot gas at a temperature of 80-95°C and a pressure of 0.1-0.3MPa into the ventilation hole, and discharge the hot gas from the extraction hole to perform the first drying of the sealed target material for 2-5 minutes;

[0045] (3) Close the vent hole, continuously evacuate through the vent hole until the vacuum gauge shows 1.5-3 kPa and heat to 100-120°C, maintain for 10-15 min for the second drying, and obtain the anti-oxidation target material.

[0046] The present invention does not impose any special restrictions on the target material in the above process. Any material known to those skilled in the art that can be used as a target material can be used, such as aluminum, copper, titanium, molybdenum or their alloys.

[0047] Compared with the prior art, the present invention has at least the following beneficial effects:

[0048] (1) The method for preventing oxidation after sandblasting and cleaning of target material provided by the present invention abandons the conventional blowing method for drying. Instead, a sealed space is first established on the surface of the target material after sandblasting, and then blowing is performed. The effect of moisture removal is better, and it can be applied to surfaces with smaller surface roughness after sandblasting, and the anti-oxidation performance is better.

[0049] (2) The method for preventing oxidation of the target material after sandblasting and cleaning provided by the present invention involves a second drying and vacuum treatment after the first drying, which can fully extract the liquid phase in the capillary and further improve the anti-oxidation effect. The target material treated by the method of the present invention will not oxidize to the point of being unqualified after being placed for more than 50 days, and the number of days after which it begins to change color reaches more than 42 days. It has excellent rust prevention ability and broad application prospects. Detailed Implementation

[0050] To facilitate understanding of the present invention, the following embodiments are provided. Those skilled in the art should understand that these embodiments are merely illustrative and should not be construed as limiting the scope of the invention.

[0051] It should be understood that in the description of this invention, terms such as "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," indicating orientation or positional relationships, are used only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, terms such as "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0052] It should be noted that, in the description of this invention, unless otherwise explicitly specified and limited, the terms "set," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0053] Those skilled in the art should understand that the present invention necessarily includes the necessary pipelines, conventional valves and general pump equipment for achieving complete process, but the above content is not the main inventive point of the present invention. Those skilled in the art can add layouts based on the process flow and equipment structure selection, and the present invention does not make any special requirements or specific limitations in this regard.

[0054] For ease of comparison, pure copper targets are used in the following examples and comparative examples. However, the present invention can also be applied to other metal or metal alloy targets, and has a better rust prevention effect on pure copper targets.

[0055] Example 1

[0056] This embodiment provides a method for preventing oxidation of a target material after sandblasting and cleaning, the method comprising the following steps:

[0057] (1) After cleaning the sandblasted target material with a surface roughness of 2.5 μm, the cleaning agent contains 15 wt% isopropanol, 10 wt% ethanol, and the remainder is water. First, a sealing layer (with a soft layer, the soft layer is placed close to the sandblasted target material, the soft layer is made of Wacker R750 silicone rubber) is set on the surface of the sandblasted target material. The sealing layer has an on / off air extraction hole and a ventilation hole. The air extraction hole and the ventilation hole are located on both sides of the sandblasted target material, and there are two ventilation holes. The two ventilation holes are located at both ends of one side of the sandblasted target material. The sealing layer is placed close to the surface of the sandblasted target material. Except for the air extraction hole and the ventilation hole, the sealing layer forms a closed space with the sandblasting area of ​​the sandblasted target material to obtain a sealed target material.

[0058] (2) Open the extraction hole and the ventilation hole, introduce nitrogen gas at a temperature of 85°C and a pressure of 0.25MPa into the ventilation hole, and discharge the nitrogen gas from the extraction hole to perform the first drying of the sealed target material for 3.5 minutes;

[0059] (3) Close the vent hole, continuously evacuate through the vent hole until the vacuum gauge shows 2.5 kPa and heat to 110°C, maintain for 12 min for the second drying, and obtain the anti-oxidation target material.

[0060] Example 2

[0061] This embodiment provides a method for preventing oxidation of a target material after sandblasting and cleaning, the method comprising the following steps:

[0062] (1) After cleaning the sandblasted target material with a surface roughness of 2μm, the cleaning agent contains 10wt% isopropanol, 15wt% ethanol, and the remainder is water. First, a sealing layer (with a soft layer, the soft layer is placed close to the sandblasted target material, the soft layer is made of Wacker R750 silicone rubber) is set on the surface of the sandblasted target material. The sealing layer has an on / off air extraction hole and a ventilation hole. The air extraction hole and the ventilation hole are located on both sides of the sandblasted target material, and there are two ventilation holes. The two ventilation holes are located at both ends of one side of the sandblasted target material. The sealing layer is placed close to the surface of the sandblasted target material. Except for the air extraction hole and the ventilation hole, the sealing layer forms a closed space with the sandblasting area of ​​the sandblasted target material to obtain a sealed target material.

[0063] (2) Open the extraction hole and the ventilation hole, introduce nitrogen gas at a temperature of 95°C and a pressure of 0.3MPa into the ventilation hole, and discharge the nitrogen gas from the extraction hole to perform the first drying of the sealed target material for 2 minutes.

[0064] (3) Close the vent hole, continuously evacuate through the vent hole until the vacuum gauge shows 3 kPa and heat to 120°C, maintain for 10 min for the second drying, and obtain the anti-oxidation target material.

[0065] Example 3

[0066] This embodiment provides a method for preventing oxidation of a target material after sandblasting and cleaning, the method comprising the following steps:

[0067] (1) After cleaning the sandblasted target material with a surface roughness of 5 μm, the cleaning agent contains 15 wt% isopropanol, 5 wt% ethanol, and the remainder is water. First, a sealing layer (with a soft layer, the soft layer is placed close to the sandblasted target material, the soft layer is made of Wacker R750 silicone rubber) is set on the surface of the sandblasted target material. The sealing layer has an on / off air extraction hole and a ventilation hole. The air extraction hole and the ventilation hole are located on both sides of the sandblasted target material, and there are two ventilation holes. The two ventilation holes are located at both ends of one side of the sandblasted target material. The sealing layer is placed close to the surface of the sandblasted target material. Except for the air extraction hole and the ventilation hole, the sealing layer forms a closed space with the sandblasting area of ​​the sandblasted target material to obtain a sealed target material.

[0068] (2) Open the extraction hole and the ventilation hole, introduce nitrogen gas at a temperature of 80°C and a pressure of 0.1MPa into the ventilation hole, and discharge the nitrogen gas from the extraction hole to perform the first drying of the sealed target material for 5 minutes;

[0069] (3) Close the vent hole, continuously evacuate through the vent hole until the vacuum gauge shows 1.5 kPa and heat to 100°C, maintain for 15 min for the second drying, and obtain the anti-oxidation target material.

[0070] Example 4

[0071] This embodiment provides a method for preventing oxidation of a target material after sandblasting and cleaning. Except for maintaining the second drying for 5 minutes in step (3), the method is the same as that in embodiment 1, and will not be repeated here.

[0072] Example 5

[0073] This embodiment provides a method for preventing oxidation of a target material after sandblasting and cleaning. Except for maintaining the second drying for 20 minutes in step (3), the method is the same as that in embodiment 1, and will not be repeated here.

[0074] Example 6

[0075] This embodiment provides a method for preventing oxidation of a target material after sandblasting and cleaning. Except for the heating temperature of 90°C in step (3), the method is the same as that in embodiment 1, and will not be repeated here.

[0076] Example 7

[0077] This embodiment provides a method for preventing oxidation of a target material after sandblasting and cleaning. Except for the heating temperature of 130°C in step (3), the method is the same as that in embodiment 1, and will not be repeated here.

[0078] Example 8

[0079] This embodiment provides a method for preventing oxidation of a target material after sandblasting and cleaning. Except for step (1), in which the sealing layer has a 1mm gap with the surface of the sandblasted target material, the method is the same as in embodiment 1, and will not be repeated here.

[0080] Example 9

[0081] This embodiment provides a method for preventing oxidation of a target material after sandblasting and cleaning. Except for step (2) in which hot gas with a pressure of 0.05 MPa is introduced, the method is the same as that in Embodiment 1, and will not be repeated here.

[0082] Example 10

[0083] This embodiment provides a method for preventing oxidation of a target material after sandblasting and cleaning. Except for the introduction of hot gas at a pressure of 0.4 MPa in step (2), the method is the same as that in Embodiment 1, and will not be repeated here.

[0084] Comparative Example 1

[0085] This comparative example provides a method for preventing oxidation of a target material after sandblasting and cleaning. Except for the absence of a sealing layer and the placement of the sandblasted target material in a vacuum drying oven for a second drying in step (3) (the temperature and the vacuum level displayed by the vacuum gauge are the same), the method is the same as in Example 1 and will not be repeated here.

[0086] Comparative Example 2

[0087] This comparative example provides a method for preventing oxidation of a target material after sandblasting and cleaning. The method is the same as in Example 1 except that step (2) is omitted and the second drying time is extended to 15.5 min. It will not be described again here.

[0088] Comparative Example 3

[0089] This comparative example provides a method for preventing oxidation of a target material after sandblasting and cleaning. The method is the same as in Example 1 except that step (3) is omitted and the first drying time is extended to 15.5 min. It will not be repeated here.

[0090] Test method: Place the dried target material under conditions of 25% RH and 25℃, observe the rusting on the surface, and record the number of days after the discoloration begins to occur to evaluate the anti-oxidation ability of the target material after sandblasting, as well as the number of days after the rust spots reach the point where the target material is unqualified. The statistical time is 50 days.

[0091] The test results of the above embodiments and comparative examples are shown in Table 1.

[0092] Table 1

[0093]

[0094]

[0095] In Table 1, “ / ” indicates that the target material remained in a qualified state throughout the test period.

[0096] As can be seen from Table 1:

[0097] (1) As can be seen from the comprehensive examples 1 to 3, the method for preventing oxidation after sandblasting and cleaning of the target material provided by the present invention has the advantage of improving the rust prevention ability of the target material after sandblasting. The target material treated by the method of the present invention will not oxidize to the point of being unqualified after being placed for more than 50 days, and the number of days after which discoloration begins to occur reaches more than 42 days, demonstrating excellent rust prevention ability.

[0098] (2) It can be seen from the combined examples 1 and 4-5 that the second drying in example 1 was maintained for 12 minutes, compared with the 5 minutes and 20 minutes used in examples 4-5 respectively. In example 1, the target material started to change color after 45 days and was still qualified after 50 days. In example 4, the target material started to change color after only 35 days and rusted to an unqualified state on the 48th day. In example 5, the extended drying time did not significantly improve the performance and damaged the life of the sealing layer. This shows that by using a suitable second drying time, the present invention can further improve the rust prevention performance of the target material after sandblasting and extend the service life of the sealing layer.

[0099] (3) It can be seen from the combined examples 1 and 6-7 that the heating temperature in step (3) of example 1 is 110°C, compared with 90°C and 130°C in examples 6-7 respectively. In example 1, the target material starts to change color after 45 days and is still qualified after 50 days. In example 6, the target material starts to change color after only 38 days and rusts to an unqualified state on the 49th day. In example 7, increasing the drying temperature did not significantly improve the performance and damaged the life of the sealing layer. This shows that by using a suitable second drying temperature, the present invention can further improve the rust prevention performance of the target material after sandblasting and extend the service life of the sealing layer.

[0100] (4) It can be seen from the combined examples 1 and 9-10 that, in step (2) of example 1, the hot gas with a pressure of 0.25 MPa is introduced, compared with the 0.05 MPa and 0.4 MPa used in examples 9-10 respectively. In example 1, the target material starts to change color after 45 days and is still qualified after 50 days. In example 9, the target material starts to change color after only 32 days and rusts to an unqualified state on the 45th day. In example 10, increasing the gas pressure did not significantly improve the performance and damaged the life of the sealing layer. This shows that by using a suitable gas pressure, the present invention can further improve the rust prevention performance of the target material after sandblasting and extend the service life of the sealing layer.

[0101] (5) As can be seen from the combined examples 1 and 8, the sealing layer in Example 1 is in close contact with the surface of the sandblasted target. Compared with Example 8, where the sealing layer has a 1mm gap with the surface of the sandblasted target, the target in Example 1 starts to change color after 45 days and remains qualified after 50 days. In contrast, the target in Example 8 starts to change color after only 28 days and rusts to an unqualified state on the 34th day. This shows that the present invention, by preferably having the sealing layer in close contact with the surface of the sandblasted target, has a better drying effect and can further improve the rust prevention performance of the sandblasted target.

[0102] (3) As can be seen from the combined examples 1 and 1 to 3, the setting of the sealing layer and the steps of the first drying and the second drying have a significant impact on the overall drying process. By setting the sealing layer and simultaneously setting the first drying and the second drying steps, the present invention can significantly improve the anti-oxidation performance of the target material after sandblasting.

[0103] The present invention has been illustrated with the above embodiments to illustrate its detailed features, but the present invention is not limited to the above detailed features, that is, it does not mean that the present invention must rely on the above detailed features to be implemented. Those skilled in the art should understand that any improvements to the present invention, equivalent substitutions for the selected technical features, additions of auxiliary technical features, and selection of specific methods, etc., all fall within the protection scope and disclosure scope of the present invention.

Claims

1. A method for preventing oxidation of a target material after sandblasting and cleaning, characterized in that, The method includes the following steps: (1) After the sandblasted target is cleaned, a sealing layer is first set on the surface of the sandblasted target. The sealing layer has an openable air extraction hole and an air vent, thus obtaining a sealed target. (2) Open the extraction hole and the ventilation hole, introduce hot gas into the ventilation hole, and discharge the hot gas from the extraction hole to perform the first drying of the sealed target material; (3) Close the vent hole, continuously evacuate and heat from the vent hole to perform a second drying process, and obtain the anti-oxidation target material.

2. The method for preventing oxidation of the target material after sandblasting and cleaning according to claim 1, characterized in that, The surface roughness of the target material after sandblasting in step (1) is 2~5μm.

3. The method for preventing oxidation of the target material after sandblasting and cleaning according to claim 1 or 2, characterized in that, The surface abrasive material of the target material after sandblasting in step (1) includes white alumina.

4. The method for preventing oxidation after sandblasting and cleaning of the target material according to claim 3, characterized in that, The particle size range of the white alumina is 70-80 mesh.

5. The method for preventing oxidation after sandblasting and cleaning of the target material according to claim 1, characterized in that, The cleaning agents used in step (1) include isopropanol, water, and ethanol.

6. The method for preventing oxidation of the target material after sandblasting and cleaning according to claim 5, characterized in that, The cleaning agent contains 10-15 wt% isopropanol.

7. The method for preventing oxidation after sandblasting and cleaning of the target material according to claim 5, characterized in that, The cleaning agent contains 5-15 wt% ethanol.

8. The method for preventing oxidation after sandblasting and cleaning of the target material according to claim 1, characterized in that, The air extraction hole and the air vent in step (1) are located on both sides of the sandblasted target.

9. The method for preventing oxidation of the target material after sandblasting and cleaning according to claim 1 or 2, characterized in that, The sealing layer is positioned in close contact with the surface of the sandblasted target.

10. The method for preventing oxidation of the target material after sandblasting and cleaning according to claim 1, characterized in that, In step (1), the sealing layer, except for the air extraction hole and the air vent, forms a sealed space with the sandblasting area of ​​the sandblasted target.

11. The method for preventing oxidation of the target material after sandblasting and cleaning according to claim 1, characterized in that, The hot gas mentioned in step (2) includes any one or a combination of at least two of nitrogen, argon or helium.

12. The method for preventing oxidation of the target material after sandblasting and cleaning according to claim 1, characterized in that, The temperature of the hot gas in step (2) is 80~95℃.

13. The method for preventing oxidation of the target material after sandblasting and cleaning according to claim 1, characterized in that, The inlet pressure of the hot gas is 0.1~0.3MPa.

14. The method for preventing oxidation after sandblasting and cleaning of the target material according to claim 1, characterized in that, In step (2), the first drying time is 2 to 5 minutes.

15. The method for preventing oxidation of the target material after sandblasting and cleaning according to claim 1, characterized in that, The duration of vacuuming in step (3) is 10-15 minutes.

16. The method for preventing oxidation of the target material after sandblasting and cleaning according to claim 1 or 2, characterized in that, The heating temperature is 100~120℃.

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