Carrying table switching device

Abstract

The invention relates to a carrier switching device, and relates to the technical field of chip testing equipment. The platform comprises a test chamber and a preparation chamber which are partitioned by a partition plate, the carrier switching device is arranged in the adjacent area of the two chambers and comprises a tunnel shell, a track set, a first carrier, a moving mechanism, a door piece, a second carrier and a lifting mechanism, the tunnel shell is arranged on the platform, and the inner space of the tunnel shell is communicated with the test chamber through a first opening and communicated with the preparation chamber through a second opening; the track set is arranged on the platform and located in the space of the tunnel shell and the testing chamber, the second carrying table is arranged on the track set, and the door piece is arranged on the second carrying table and driven by the lifting mechanism to ascend to close the second opening. And the moving mechanism drives the first carrying platform arranged on the track group to push away the second carrying platform to enable the second carrying platform to be positioned below the second opening, so that the purposes of switching positions and reducing the outflow of dry air are achieved.

Description

Technical Field

[0001] The present application relates to the field of chip testing devices, and in particular to a stage switching device. Background Art

[0002] Chips must pass various electrical tests before leaving the factory. With different test purposes, there are different requirements for the test environment provided by the test machine. For example, some chips are expected to operate normally under extremely low temperature and extremely dry conditions. Therefore, the test machine must provide an independent and closed test room with relevant refrigeration and dehumidification equipment to maintain the required test environment for a long time for the chip to undergo various electrical tests in the test room.

[0003] In order to maintain the stability of the test environment in the related art, a preparation room is often set up next to the test room. The preparation room is at room temperature and in a dust-free environment, and is used to place and collect chips to be tested or tested chips. Since the operating environment requirements of the test environment and the preparation room are different, the chips to be tested or tested must be transferred between the two rooms. Therefore, a large-area gate is often used to isolate the test room and the preparation room. The gate can be opened and closed automatically, and is only opened briefly when the chip needs to be transferred between the two rooms, and is immediately closed after the transfer is completed.

[0004] With respect to the above-mentioned related technologies, the inventors believe that the following defects exist: the automatic opening and closing method of the large-area gate can easily cause a large amount of dry air or cold air in the test room to flow into the preparation room during the opening / closing process. After the above-mentioned gate is closed, the refrigeration and dehumidification equipment in the test room needs a long operating time to restore the original set conditions and temperature, which easily wastes too much waiting time, so it needs to be improved. Summary of the invention

[0005] In order to reduce the air circulation between the test room and the preparation room during the chip transfer process, the present application provides a carrier switching device.

[0006] The present application provides a stage switching device that adopts the following technical solution: A carrier switching device for reducing the outflow of dry air or cold air, a partition is provided on a platform in a machine body to separate a test room and a preparation room with independent spaces, the carrier switching device is arranged in the adjacent area of ​​the test room and the preparation room, and comprises a tunnel shell, a track group, a first carrier, a moving mechanism, a door, a second carrier and a lifting mechanism, the tunnel shell is arranged on the platform and is located in the preparation room, the tunnel shell is hollow and has a first opening and a second opening, the space in the tunnel shell is connected to the test room through the first opening, and is connected to the preparation room through the second opening, the track group The moving mechanism is arranged on the platform and located in the space of the tunnel shell and the test room, and can drive the first carrier arranged on the track group to move linearly. In the normal state, the second carrier is arranged on the track group and located at the starting position below the second opening. The door member is arranged on the second carrier and can be raised and lowered by the lifting mechanism. When the door member rises to the highest position, the second opening is closed. When switching is desired, after the door member is lowered, the first carrier can be moved to the original position and the second carrier is pushed away from here, so that the first carrier is switched to be located directly below the second opening.

[0007] Through the above-mentioned scheme, the present invention usually closes the second opening because the door member closes the second opening, so that the two chambers are not connected. The door member is lowered only when switching, and the first platform is pulled by the moving mechanism to move on the track group. During the movement, the first platform is pushed away from the second platform, and then the first platform is directly under the second opening. In this way, the gap can be reduced during the movement, and the outflow of dry air or cold air to the preparation room can be effectively reduced.

[0008] As one of the preferred embodiments, the tunnel housing is connected to the test chamber through the first opening distributed vertically, and is connected to the preparation chamber through the second opening distributed horizontally. Through the above solution, the vertically distributed first opening facilitates the first carrier to be moved from the test chamber into the tunnel housing, and the horizontally distributed second opening facilitates the mechanism to take and place the chip from above.

[0009] As one of the better preferred embodiments, the lifting mechanism is fixed to the bottom of the platform, and the lifting mechanism controls the rise of a top column. There is a top hole in the platform, and the top column extends through the top hole to contact the bottom of the door member to drive the door member to rise and close the second opening.

[0010] Through the above solution, the lifting mechanism installed at the bottom of the platform can conveniently control the lifting of the door, making the operation of the mechanism simpler.

[0011] As one of the preferred embodiments, it also includes an elastic member, one end of which is connected to the second carrier, and the other end is fixed to the platform, so that the second carrier can be restored to the original position by the elastic member after moving.

[0012] Through the above solution, when the first carrier is retracted into the test chamber, the second carrier can be automatically moved back to the original position by the elastic member.

[0013] As one of the preferred embodiments, a protrusion is provided at the bottom of the second carrier, and a stopper is provided at a corresponding position of the platform. When the stopper contacts the protrusion, the second carrier is located at the original position.

[0014] Through the above solution, it can be ensured that the second carrier returns to the original position, and when the lifting mechanism subsequently raises the top column, the top column or the second carrier will not be damaged due to position error.

[0015] As one of the preferred embodiments, the second carrier is provided with at least one buffer member on the side wall facing the first carrier.

[0016] Through the above solution, the first carrier and the second carrier are in contact with each other by using a buffer to reduce the impact force, thereby avoiding excessive vibration when the two are in contact.

[0017] As one of the better preferred embodiments, the moving mechanism includes a power part, a belt and two pulleys. One of the pulleys is arranged on the platform in the test chamber, and the other pulley is combined with the power part located in the preparation chamber. The two pulleys drive the belt to move. The power part provides the power required for the pulley rotation and accurately controls the distance the belt moves. In addition, a connecting part is provided at the bottom of the first carrier that can be combined with the belt.

[0018] Through the above-mentioned solution, the moving mechanism can be used to accurately drive the first carrier to move along the track group.

[0019] As one of the preferred embodiments, the track assembly is provided with two parallel guide rails, the guide rails are arranged on the platform, and the pulley and the belt are located in a space formed by the two guide rails.

[0020] The above-mentioned solution can prevent foreign objects from interfering with or winding around the belt, and ensure that the belt can be linked with the first carrier.

[0021] As one of the better preferred embodiments, a first sensing element is further provided at the bottom of the first carrier, and the first sensor and the second sensor are respectively provided at different positions between the two guide rails on the platform. When the first sensor or the second sensor senses that the first sensing element has moved there, the moving mechanism stops driving the first carrier to move.

[0022] Through the above-mentioned solution, the position of the first carrier after movement can be correctly controlled.

[0023] In summary, the present invention is a carrier switching device for reducing the outflow of dry air or cold air. In normal state, the second opening is closed by the door member, so that the test chamber and the preparation chamber are not connected, which is conducive to the two chambers being in different working environments. When the chip in the preparation chamber must be transferred, the first carrier is replaced and moved below the second opening. Because the gap between the two is very small, the flow of dry air or cold air to the preparation chamber is greatly reduced during the transfer process, so it will not affect the test conditions originally set for the test chamber, and meet the needs of this equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 This is a schematic diagram of the structure of an embodiment of the present application; Figure 2 This is a structural schematic diagram for reflecting the connection relationship between the tunnel shell and the platform in the embodiment of the present application; Figure 3 This is a disassembly schematic diagram for illustrating the connection relationship between the first carrier and the second carrier in the embodiment of the present application; Figure 4 It is a structural diagram used to illustrate the connection relationship between the second carrier and the platform in the embodiment of the present application.

[0025] In the figure: 1. Machine body; 13. Platform; 131. First sensor; 132. Second sensor; 133. Stopper; 134. Third sensor; 14. Partition; 15. Test room; 16. Preparation room; 21. Tunnel shell; 211. First opening; 212. Second opening; 22. Track set; 221. Guide rail; 23. First carrier; 231. Connector; 232. First sensing member; 241. Power member; 242. Belt; 243. Pulley; 25. Door member; 251. Protrusion; 252. Guide column; 253. Return spring; 26. Second carrier; 261. Top hole; 262. Guide hole; 263. Buffer member; 264. Protrusion; 265. Second sensing member; 27. Lifting mechanism; 271. Top column; 28. Elastic member. DETAILED DESCRIPTION

[0026] The following is combined with Figure 1-4 This application is described in further detail.

[0027] The technical solution of the present invention will be clearly and completely described below in conjunction with specific embodiments and accompanying drawings. It should be noted that when an element is referred to as being "mounted on or fixed to" another element, it means that it can be directly on the other element or there can also be a central element. When an element is considered to be "connected" to another element, it means that it can be directly connected to the other element or there can be a central element at the same time. In the illustrated embodiments, the directions indicating up, down, left, right, front and back are relative, and are used to explain that the structures and movements of different components in this case are relative. These representations are appropriate when the components are in the positions shown in the figures. However, if the description of the component positions changes, it is believed that these representations will also change accordingly.

[0028] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which the present invention pertains. The terms used herein are for the purpose of describing specific embodiments only and are not intended to limit the present invention. The term "and / or" as used herein includes any and all combinations of one or more of the related listed items.

[0029] like Figure 1 As shown, a carrier switching device for reducing the outflow of dry air or cold air of the present invention is arranged inside the machine body 1, and a platform 13 is arranged inside the machine body 1 and cooperates with a partition 14 to separate a test chamber 15 and a preparation chamber 16 with independent spaces. In this embodiment, the test chamber 15 must provide an extremely low temperature and extremely dry environment to ensure that the chip can still operate normally under this condition. This independent closed space will cooperate with relevant refrigeration and dehumidification equipment to maintain the test chamber 15 in the required test environment for a long time, so that the chip can perform various electrical tests in the test chamber. The preparation chamber 16 is a centralized area for placing chips, which is usually at room temperature and in a dust-free environment, and is used to place and collect chips to be tested or tested chips. In fact, the test chamber 15 and the preparation chamber 16 are also equipped with relevant equipment to meet specific needs, but because they are not the focus of the present invention, they are not drawn. From the above, it can be seen that the working environment required by the test chamber 15 and the preparation chamber 16 is different, but the chip must be transferred between the two spaces. The carrier switching device of the present invention is a special structure designed to meet this demand.

[0030] like Figure 1 , Figure 2 and Figure 3 As shown, a platform switching device for reducing the outflow of dry air or cold air of the present invention includes a tunnel shell 21, a track group 22, a first platform 23, a moving mechanism, a door member 25, a second platform 26 and a lifting mechanism 27.

[0031] like Figure 2As shown, the tunnel housing 21 is arranged on the platform 13 and is located in the preparation room 16. The tunnel housing 21 is hollow and has a first opening 211 and a second opening 212. The present invention uses the tunnel housing 21 as a passage connecting the test room 15 and the preparation room 16, wherein the first opening 211 is arranged horizontally and communicates with the test room 15, and the second opening 212 is arranged vertically and communicates with the preparation room 16. Part of the partition 14 is also fixed on the tunnel housing 21 to separate the test room 15 and the preparation room 16 on the platform 13.

[0032] The track set 22, the first carrier 23, and the moving mechanism can be regarded as a set of horizontal moving mechanism components, which are used to move the first carrier 23 between the test chamber 15 and the position below the second opening 212 in the tunnel shell 21. The first carrier 23 can be provided with a tray or a fixture (not shown in the figure) for carrying chips, so that the pick-up and placement mechanisms in different chambers can pick up and place the chips on the first carrier 23.

[0033] like Figure 3 As shown, the door 25, the second carrier 26 and the lifting mechanism 27 can be regarded as a lifting and horizontal movement mechanism. In the normal state, the door 25 closes the second opening 212 to maintain the two chambers not connected. At the switching time, the door 25 must be lowered and driven by the second carrier 26 to leave this original position, so as to facilitate the subsequent switching to the first carrier 23 to move to the position below the second opening 212 to carry out the chip transfer operation in the preparation chamber 16. In this way, in the normal state of the structure of the present invention, the second opening 212 is closed by the door 25, so that the test chamber 15 and the preparation chamber 16 are not connected, which is conducive to the two chambers being in different working environments. When the chip in the preparation chamber 16 needs to be transferred, the first carrier 23 is replaced to move below the second opening 212, and because the gap between the two is very small, the dry air or cold air flowing into the preparation chamber 16 is greatly reduced during the transfer process, so it will not affect the test conditions originally set in the test chamber 15, meeting the needs of this equipment.

[0034] Next, the specific structure of each component is described in detail: like Figure 2 and Figure 3 As shown, the tunnel housing 21 is a hollow and narrow shell, which is arranged on the platform 13 so that the internal space forms a tunnel. In this embodiment, the tunnel housing 21 is a two-piece structure, but it is not limited to this, and can also be a single-piece structure. The tunnel housing 21 is connected to the test chamber 15 through a first opening 211, and is connected to the preparation chamber 16 through a horizontal second opening 212. The track group 22 is arranged on the platform 13 and is located in the space inside the tunnel housing 21 and the test chamber 15. In this embodiment, the track group 22 is provided with two parallel guide rails 221.

[0035] The first carrier 23 is disposed on the track set 22 and can slide on the track set 22 so as to move in the space within the test chamber 15 and the tunnel housing 21. A tray or a fixture can be installed on the first carrier 23 according to the designer's needs for placing chips.

[0036] The moving mechanism is responsible for driving the first carrier 23 to move linearly along the track set 22, and includes a power member 241, a belt 242 and two pulleys 243. One pulley 243 is set on the platform 13 in the test chamber 15, and the other pulley 243 is connected to the power member 241 located in the preparation room 16. The two pulleys 243 drive the belt 242 to move. In this embodiment, the power member 241 is a servo motor, which provides the power required for the pulley 243 to rotate and accurately controls the moving distance of the belt 242. In addition, a connecting member 231 is provided at the bottom of the first carrier 23, which can be connected to the belt 242, so that the moving mechanism can drive the first carrier 23 to move in the tunnel shell 21 and the test chamber 15.

[0037] In order to correctly control the position of the first carrier 23 after movement, a first sensor 232 is further provided at the bottom of the first carrier 23, and a first sensor 131 and a second sensor 132 are respectively provided at different positions between the two guide rails 221 on the platform 13. In this embodiment, the first sensor 131 and the second sensor 132 are optical sensors. When the first sensor 232 moves to the first sensor 131 or the second sensor 132 and blocks the optical signal, the system notifies the power element 241 to stop operating, thereby ensuring that the first carrier 23 is located at the correct position. In addition, the pulley 243 and the belt 242 are located in the space formed between the two guide rails 221 to prevent foreign objects from interfering with or entangled with the belt 242, and to ensure that the belt 242 can be linked with the first carrier 23.

[0038] The second platform 26 is arranged on the track set 22 and can slide on the track set 22. The main moving area can only be in the tunnel shell 21 in the preparation room 16. The second platform 26 moves by using the first platform 23 to contact it, thereby driving the second platform 26 to leave the initial original position, which is directly below the second opening 212. The door member 25 is arranged on the second platform 26 and can be raised and lowered by the lifting mechanism 27. The top of the door member 25 has a convex portion 251 with a shape and size corresponding to the second opening 212. When it is to be closed, the convex portion 251 is located in the second opening 212, and the rest of the door member 25 contacts the inner wall of the tunnel shell 21, so as to achieve the purpose of closing the second opening 212. In addition, the door member 25 is provided with a plurality of guide posts 252 extending downward. The guide posts 252 pass through the second platform 26 and can slide, so that the door member 25 can be raised and lowered smoothly.

[0039] The second carrier 26 has a top hole 261 in the center and a plurality of guide holes 262 around it. The position of the guide hole 262 corresponds to the guide column 252, so that the guide column 252 can slide in the guide hole 262. The lifting mechanism 27 is fixed to the bottom of the platform 13. In this embodiment, the lifting mechanism 27 is a pneumatic cylinder that can control a top column 271 to extend or retract. When the second carrier 26 is in the original position, the position of the top hole 261 corresponds to the extension path of the top column 271. Therefore, when the lifting mechanism 27 is actuated, the top column 271 can extend through the top hole 261 and contact the bottom surface of the door member 25 to drive the door member 25 to rise and finally close the second opening 212. When the top column 271 retracts, the door member 25 naturally descends under the influence of gravity and leaves the second opening 212. The top column 271 will finally completely leave the top hole 261 to avoid interfering with the lateral movement of the second carrier 26. In addition, in the present embodiment, a plurality of return springs 253 are provided around the door member 25 and between the second carrier 26. The top end of the return spring 253 is coupled to the door member 25, and the bottom end is coupled to the second carrier 26, so as to ensure that after the top column 271 descends, the door member 25 will also descend under the action of the return spring 253 and be located on the second carrier 26.

[0040] As can be seen from the above description, the second stage 26 is driven to move by contacting the first stage 23. In order to avoid excessive vibration when the two are in contact, the second stage 26 is provided with at least one buffer 263 on the side wall facing the first stage 23. The protruding end of the buffer 263 is provided with a contact portion composed of soft rubber, and the contact portion is used to reduce the impact force generated during contact. In addition, in order to enable the second stage 26 to automatically move to the original position after leaving the first stage 23, the present invention also includes an elastic member 28. The elastic member 28 is a tension spring, one end of which is connected to the bottom of the second stage 26 and the other end is fixed to the platform 13, so that when the first stage 23 is retracted to the test chamber 15, the second stage 26 can be restored to the original position by the elastic force of the elastic member 28.

[0041] like Figure 4As shown, to ensure that the second carrier 26 can smoothly return to the original position, a stopper 133 is fixed on the platform 13 at a relative position, and a protrusion 264 is provided at the bottom of the second carrier 26. When the elastic member 28 pulls the second carrier 26 to move, the stopper 133 cannot move when it contacts the protrusion 264, which means that the second carrier 26 has reached the original position. In this state, the lifting mechanism 27 can raise the top column 271 to make the door member 25 close the second opening 212. In addition, the present invention also has a safety mechanism, that is, a second sensor 265 is also installed on the second carrier 26, and the second sensor 265 is in the shape of a "ㄈ", and a third sensor 134 is provided at the vertical side wall of the guide rail 221, and the third sensor 134 is also a light sensor. When the second sensor 265 is located at the third sensor 134 , a signal is generated to confirm that the second stage 26 is moved back to the original position, so as to prevent the lifting mechanism 27 from starting to operate when the second stage 26 is not moved back to the original position.

[0042] In summary, the operation mode of the present invention is as follows: under normal conditions, the top column 271 of the lifting mechanism 27 is lifted to drive the door 25 to lift and close the second opening 212, so that the test chamber 15 and the preparation chamber 16 are not connected, and the two chambers maintain the required working environment. When the chip that has been tested in the test chamber 15 needs to be moved out or the chip to be tested in the preparation chamber 16 needs to be moved in, the lifting mechanism 27 drives the top column 271 to descend, so that the door 25 leaves the second opening 212. After the top column 271 completely leaves the top hole 261 of the second carrier 26, the first carrier 23 is also driven by the moving mechanism to gradually move toward the direction of the second carrier 26. Then, after the first carrier 23 contacts the second carrier 26, the two start to move synchronously, and finally switch to the position where the first carrier 23 is located below the second opening 212. Then, the pick-and-place mechanism (not shown) of the preparation room enters the tunnel shell 21 through the second opening 212 to pick up and place the chip on the tray or fixture (not shown) on the first carrier 23. Since the height of the tray or fixture is close to but not in contact with the inner wall of the tunnel shell 21, the residual gap between the two is small, so a large amount of dry air or cold air will not flow into the preparation room 16, so it will not affect the test conditions originally set in the test room 15. After that, the first carrier 23 is moved back to the test process, and the second carrier 26 is also synchronously moved back to the original position below the second opening 212. After the lifting mechanism 27 is operated, the second opening 212 can be closed again.

[0043] The above is only a preferred embodiment of the present invention and is not intended to limit the scope of the embodiments of the present invention. That is, all equivalent changes and modifications made according to the scope of the patent application of the present invention are covered by the patent scope of the present invention.

[0044] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A stage switching device, arranged on a platform (13) inside a machine body (1), wherein the platform (13) is provided with a partition (14) and the partition (14) divides the inside of the machine body (1) into a test room (15) and a preparation room (16), characterized in that: The platform (13) is provided with a tunnel shell (21), the tunnel shell (21) is located in the preparation room (16), the tunnel shell (21) has a first opening (211) and a second opening (212), the first opening (211) is connected to the test room (15), and the second opening (212) is connected to the preparation room (16); the platform (13) is also provided with a track group (22), and the track group (22) is slidably connected with a first carrier (23) and a second carrier (26), the platform (13) is provided with a moving mechanism for driving the first carrier (23) to slide along the track group (22) and a lifting mechanism (27) for driving the second carrier (26) up and down; the second carrier (26) is provided with a door member (25) for blocking the second opening (212).

2. A stage switching device according to claim 1, characterized in that: The opening direction of the first opening (211) is arranged horizontally, and the opening direction of the second opening (212) is arranged vertically.

3. A stage switching device according to claim 1, characterized in that: The door member (25) is provided with a plurality of guide posts (252), and the second carrier (26) is provided with a plurality of guide holes (262) for the guide posts (252) to pass through and slide relatively thereto.

4. A stage switching device according to claim 1, characterized in that: The lifting mechanism (27) is arranged at the bottom of the platform (13), and the platform (13) is penetrated by a top hole (261) for a top column (271) of the lifting mechanism (27) to extend out, and the top column (271) abuts against the bottom of the door member (25) to drive the door member (25) to rise to close the second opening (212).

5. The stage switching device according to claim 1, characterized in that: An elastic member (28) is provided between the second carrier (26) and the platform (13).

6. A stage switching device according to claim 5, characterized in that: A protrusion (264) is provided at the bottom of the second carrier (26), and a stopper (133) is provided at a corresponding position of the platform (13). When the stopper (133) contacts the protrusion (264), the second carrier (26) is located at the original position.

7. The stage switching device according to claim 1, characterized in that: A buffer member (263) is provided on the side wall (11) of the second carrier (26) facing the first carrier (23).

8. The stage switching device according to claim 1, characterized in that: The moving mechanism comprises a power member (241), a belt (242) and two belt (242) wheels, one of the belt (242) wheels is rotationally linked to the platform (13), the other belt (242) wheel is connected to the output end of the power member (241), the power member (241) is connected to the platform (13), the belt (242) is wound around the outside of the two belt (242) wheels, and the first carrier (23) is connected to a connecting member (231) connected to the belt (242).

9. A stage switching device according to claim 8, characterized in that: The track set (22) comprises two guide rails (221) which are distributed in parallel on the platform (13), and the belt (242) wheel and the belt (242) are located between the two guide rails (221).

10. The stage switching device according to claim 8, characterized in that: A first sensing element (232) is also provided at the bottom of the first carrier (23), and a first sensor (131) and a second sensor (132) are respectively provided at different positions of the platform (13) between the two guide rails (221). When the first sensor (131) or the second sensor (132) senses that the first sensing element (232) has moved there, the moving mechanism stops driving the first carrier (23) to move.

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