Glass substrate testing method and testing device

Abstract

The invention discloses a glass substrate testing method and a testing device, which are used for improving the detection efficiency of a glass substrate, and the glass substrate testing device comprises a control system, a planar electrode, a coated glass electrode and a vacuum cavity, the planar electrode and the coated glass electrode are arranged in the vacuum cavity in parallel, and inert gas capable of generating glow discharge is blended in the vacuum cavity; a to-be-tested glass substrate is placed between the planar electrode and the coated glass electrode, and the to-be-tested glass substrate contact is in contact with the planar electrode; the glass substrate testing method comprises the steps that a control system controls a planar electrode and a coated glass electrode to discharge, inert gas in an ionization vacuum cavity forms glow discharge, so that glow is attached to an access circuit on a to-be-tested glass substrate, and a glow attachment state is generated; and the control system analyzes the glow adhesion state to determine the circuit connection state of the to-be-tested glass substrate.

Description

Technical Field

[0001] The present application relates to the field of circuit detection, and in particular to a glass substrate testing method and testing device. Background Art

[0002] Glass substrate is a base plate widely used in multi-chip packaging, and its quality directly affects the yield and performance of the package. In the manufacturing process of glass substrate, deep hole etching and copper deposition processes are required, which may cause some potential problems, such as irregular holes and uneven copper layer thickness, thus affecting the reliability of the product. Therefore, it is very necessary to effectively detect the glass substrate.

[0003] The existing detection method is mainly carried out through flying probe. Flying probe testing equipment is a kind of precision electronic equipment, which can obtain electrical signals by contacting the surface of the object to be tested through the probe, and then judge the yield of the object to be tested. However, flying probe testing requires that the object to be tested has a certain PAD size, and it has certain requirements on the size of the object to be tested. For small-sized glass substrates, especially those used for multi-chip packaging, due to their small PAD size, they may not meet the requirements of flying probe testing. In addition, the cost of flying probe testing is high and the operation is complicated, which is not conducive to the detection needs of large-scale production. Summary of the invention

[0004] In order to solve the above technical problems, the present application provides a glass substrate testing method and a testing device, which are used to improve the detection efficiency of the glass substrate.

[0005] The technical solution provided in this application is described below:

[0006] The present application provides a glass substrate testing method, the method is applied to a glass substrate testing device, the glass substrate testing device comprising:

[0007] Control system, planar electrode, coated glass electrode and vacuum chamber;

[0008] The planar electrode and the coated glass electrode are arranged in parallel in the vacuum chamber, an inert gas capable of generating glow discharge is integrated into the vacuum chamber, and the planar electrode is arranged at the bottom of the vacuum chamber;

[0009] A glass substrate to be tested is placed between the planar electrode and the coated glass electrode, and the contact point of the glass substrate to be tested is in contact with the planar electrode so that the glass substrate to be tested is energized;

[0010] The control system is used to control the working states of the planar electrode and the coated glass electrode;

[0011] Glass substrate testing methods include:

[0012] The control system controls the planar electrode and the coated glass electrode to discharge, ionizes the inert gas in the vacuum chamber to form a glow discharge, so that the passage circuit on the glass substrate to be tested is attached with glow, generating a glow attachment state;

[0013] The control system analyzes the glow attachment state to determine the circuit connectivity state of the glass substrate to be tested.

[0014] Optionally, the glass substrate testing device further includes:

[0015] A camera unit is used to obtain the circuit connectivity status of the glass substrate to be tested.

[0016] Optionally, before analyzing the glow adhesion state to determine the circuit connectivity state of the glass substrate to be tested, the method further includes:

[0017] The control unit captures image data of the glow attachment state through the camera unit.

[0018] Optionally, the analyzing the glow adhesion state to determine the circuit connectivity state of the glass substrate to be tested includes:

[0019] Collecting a physical image of the glow attachment state in the vacuum cavity by the camera unit;

[0020] Converting the physical image into an electronic signal image, and performing noise reduction processing on the electronic signal image to obtain a feature image;

[0021] Analyzing the glow discharge phenomenon of the characteristic points in the characteristic image one by one to obtain analysis results;

[0022] When the analysis result shows that there is a glow discharge phenomenon, the control unit determines that the circuit corresponding to the characteristic point is in a connected state;

[0023] When the analysis result shows that there is no glow discharge phenomenon, the control unit determines that the corresponding circuit of the characteristic point is in an abnormal state, and no current flows through the corresponding circuit of the characteristic point in the abnormal state.

[0024] Optionally, the coated glass electrode is suspended in the vacuum chamber, and the distance between the coated glass electrode and the plane electrode is adjustable.

[0025] Optionally, the control system is also used to set the height of the coated glass electrode in the vacuum chamber.

[0026] Optionally, before the planar electrode and the coated glass electrode discharge, the method further includes:

[0027] The control unit determines the working areas of the planar electrode and the coated glass electrode according to the physical parameters of the glass substrate to be tested. The range of the working area matches the size of the glass substrate to be tested. The planar electrode and the coated glass electrode will only discharge within the working area.

[0028] Optionally, the method further includes:

[0029] When the number of the glass substrates to be tested is not unique, the control unit obtains the position data of the glass substrates to be tested in the vacuum chamber one by one, and determines the working areas of the planar electrode and the coated glass electrode according to the position data and the physical parameters, and the number of the working areas is consistent with the number of the glass substrates to be tested.

[0030] Optionally, the planar electrode is provided with a first control module, and the coated glass electrode is provided with a second control module, and the first control module and the second control module are used to receive instructions of the control system.

[0031] Optionally, the first control module and the second control module are data-connected to a control system, so that the control system determines the electrode working areas of the planar electrode and the coated glass electrode according to the position information and size information of the glass substrate to be tested.

[0032] A second aspect of the present application provides a control system, the control system comprising:

[0033] Processor, memory, input-output unit, and bus;

[0034] The processor is connected to the memory, the input and output unit, and the bus;

[0035] The memory stores a program, and the processor calls the program to execute the first aspect and any optional method in the first aspect.

[0036] A third aspect of the present application provides a computer-readable storage medium, on which a program is stored. When the program is executed on a computer, the program executes the first aspect and any optional method in the first aspect.

[0037] It can be seen from the above technical solutions that this application has the following advantages:

[0038] The present application establishes a vacuum cavity, integrates an inert gas into the vacuum cavity, and simultaneously arranges a planar electrode and a coated glass electrode in the vacuum cavity, so that the planar electrode and the coated glass electrode ionize the inert gas during discharge, and detects the circuit connectivity on the glass substrate to be tested arranged between the planar electrode and the coated glass electrode through a glow discharge reaction, thereby improving the detection efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] In order to more clearly illustrate the technical solution in the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0040] Figure 1 This is a schematic structural diagram of an embodiment of a glass substrate testing device in the present application;

[0041] Figure 2 This is a schematic structural diagram of another embodiment of the glass substrate testing device in the present application;

[0042] Figure 3 It is a front view of a glass substrate to be tested in the glass substrate testing device of the present application;

[0043] Figure 4 It is a back view of a glass substrate to be tested in the glass substrate testing device of the present application;

[0044] Figure 5 A top view of a glass substrate to be tested in a glass substrate testing device in this application;

[0045] Figure 6 A side view of a glass substrate to be tested in the glass substrate testing device of the present application;

[0046] Figure 7 This is a schematic structural diagram of another embodiment of the glass substrate testing device in the present application;

[0047] Figure 8 This is a schematic structural diagram of another embodiment of the glass substrate testing device in the present application;

[0048] Fig. 9 This is a schematic structural diagram of another embodiment of the glass substrate testing device in the present application;

[0049] Fig.10 This is a schematic diagram of an embodiment of a glass substrate testing method in the present application;

[0050] Fig.11 This is a schematic flow chart of another embodiment of the glass substrate testing method in the present application;

[0051] Fig.12 This is a schematic diagram of the structure of an embodiment of the control system in this application. DETAILED DESCRIPTION

[0052] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0053] See also Figures 1 to 7 The present application first provides an embodiment of a glass substrate testing device, which includes:

[0054] Control system 1, planar electrode 2, coated glass electrode 3 and vacuum chamber 4;

[0055] The plane electrode 2 and the coated glass electrode 3 are arranged in parallel in the vacuum chamber 4. The vacuum chamber 4 is filled with an inert gas capable of generating glow discharge. The plane electrode 2 is arranged at the bottom of the vacuum chamber 3.

[0056] A glass substrate 5 to be tested is placed between the planar electrode 2 and the coated glass electrode 3, and a contact point of the glass substrate 5 to be tested is in contact with the planar electrode 2, so that the glass substrate 5 to be tested is energized;

[0057] The control system 1 is used to control the working states of the planar electrode 2 and the coated glass electrode 3 .

[0058] The control system 1 is arranged outside the vacuum chamber 4 so as to control the working states of other components inside the vacuum chamber 4 without destroying the vacuum environment inside the vacuum chamber 4 .

[0059] For details, please refer to Figure 2 The internal space of the vacuum chamber 4 can at least accommodate the glass substrate 5 to be tested. The material of the vacuum chamber 4 should be selected from high temperature resistant and corrosion resistant materials, such as glass or quartz glass. The internal space of the vacuum chamber 4 should be able to maintain 10 -5 The vacuum chamber is filled with an inert gas that produces a glow discharge.

[0060] The planar electrode 2 is placed at the bottom of the vacuum chamber 4 . The material of the planar electrode 2 is a metal material with good electrical conductivity, such as copper, aluminum, etc., which is not specifically limited here.

[0061] The planar electrode 2 is controlled by the control system 1 so that the energized area of ​​the planar electrode 2 is controllable. The energized size of the planar electrode 2 should be designed according to the size of the glass substrate 5 to be tested to ensure that all contacts on the bottom surface of the glass substrate 5 to be tested are energized.

[0062] Specifically, designing the energized area of ​​the planar electrode 2 according to the size of the glass substrate 5 to be tested can avoid affecting the area used for testing other glass substrates to be tested when testing multiple glass substrates to be tested at the same time.

[0063] For details, please refer to Figures 3 to 6 The glass substrate 5 to be tested is the unit to be tested in this embodiment. To ensure the accuracy of the test, the contacts of the glass substrate 5 to be tested can use physical materials including but not limited to: MEMS (Micro-Electro-Mechanical Systems), conductive rubber, etc. to improve the contact state between the glass substrate to be tested and the planar electrode.

[0064] For details, please refer to Figure 7 A coated glass electrode 3 is suspended on the top of the glass substrate 5 to be tested. The area of ​​the coated glass electrode 3 is adjusted by the control system 1 to match the size of the glass substrate 5 to be tested. The distance between the coated glass electrode 3 and the plane electrode unit 2 can also be adjusted by the control system 1 to ensure that the glass substrate 5 to be tested is not subjected to any physical contact or pressure during the detection process.

[0065] In the actual detection process, the control system 1 controls the coated glass electrode 3 to apply a high voltage. The intensity of the voltage is related to the distance between the coated glass electrode 3 and the plane electrode 2, the appropriate amount of inert gas in the vacuum chamber 4, the vacuum degree and the electrode height, so as to ensure that a long-term and reliable glow discharge can be formed.

[0066] Specifically, the selection of the inert gas includes, but is not limited to, argon, helium, and other inert gases that generate glow discharge when ionized and meet the ionization potential requirements.

[0067] In this embodiment, a vacuum chamber 4 controlled by a control system 1 is established, and an inert gas is introduced into the vacuum chamber 4. Meanwhile, a planar electrode 2 and a coated glass electrode 3 are arranged in the vacuum chamber 4, so that the planar electrode 2 and the coated glass electrode 3 ionize the inert gas during discharge. The circuit connectivity on the glass substrate 5 to be tested arranged between the planar electrode 2 and the coated glass electrode 3 is detected through a glow discharge reaction, thereby improving the detection efficiency.

[0068] See also Figures 8 to 9 The present application provides another embodiment of a glass substrate testing device, which includes:

[0069] Control system 1, planar electrode 2, coated glass electrode 3 and vacuum chamber 4;

[0070] The plane electrode 2 and the coated glass electrode 3 are arranged in parallel in the vacuum chamber 4. The vacuum chamber 4 is filled with an inert gas capable of generating glow discharge. The plane electrode 2 is arranged at the bottom of the vacuum chamber 3.

[0071] A glass substrate 5 to be tested is placed between the planar electrode 2 and the coated glass electrode 3, and a contact point of the glass substrate 5 to be tested is in contact with the planar electrode 2, so that the glass substrate 5 to be tested is energized;

[0072] The control system 1 is used to control the working states of the planar electrode 2 and the coated glass electrode 3 .

[0073] A camera unit 6, which is used to obtain the circuit connectivity status of the glass substrate 5 to be tested;

[0074] The coated glass electrode 3 is suspended in the vacuum chamber 4 , and the distance between the coated glass electrode 3 and the plane electrode 2 is adjustable.

[0075] The control system 1 is also used to set the height of the coated glass electrode 3 in the vacuum chamber 4 .

[0076] The planar electrode 2 is provided with a first control module 21 , and the coated glass electrode 3 is provided with a second control module 31 . The first control module 21 and the second control module 31 are used to receive instructions from the control system 1 .

[0077] The first control module 21 and the second control module 31 are data-connected to the control system 1 , so that the control system 1 determines the electrode working areas of the planar electrode 2 and the coated glass electrode 3 according to the position information and size information of the glass substrate 5 to be tested.

[0078] Specifically, the camera unit 6 is arranged above the vacuum chamber 4, and collects the glow discharge points in the external vacuum chamber through the camera lens, converts the physical image into an electronic signal, and the camera unit 6 has built-in analog signal processing, filtering, and performs operations such as image denoising, contrast enhancement, and brightness adjustment on the image to obtain a clearer and more accurate image, so that the control system 1 can judge whether the circuit connection between the contacts of the glass substrate 5 to be tested is connected through the image after obtaining the image fed back by the camera unit 6. The specific judgment method is: if the contacts have a glow discharge phenomenon, the connection between the contacts is in a connected state, otherwise the connection between the contacts is in a disconnected state.

[0079] The glass substrate 5 to be tested is placed on the planar electrode 2 in the vacuum chamber 4, and the control system 1 is used to send the size data of the glass substrate 5 to be tested to the first control module 21, so that the first control module 21 adjusts the energized area of ​​the planar electrode 2 according to the size data, so that the size of the energized area of ​​the planar electrode 2 matches the size of the glass substrate 5 to be tested, thereby making the contact point of the glass substrate 5 to be tested completely contact with the metal material of the planar electrode 2.

[0080] Similar to the planar electrode 2, the energized area of ​​the coated glass electrode 3 receives the size data of the glass substrate 5 to be tested sent by the control system 1 through the second control module 31 to adjust the size of the energized area of ​​the coated glass electrode 3. The size of the energized area of ​​the coated glass electrode 3 matches the energized area of ​​the planar electrode 2 and the size data of the glass substrate 5 to be tested, that is, the sizes of the planar electrode 2, the coated glass electrode 3 and the glass substrate 5 to be tested are the same.

[0081] Because the coated glass electrode 3 is suspended above the vacuum chamber 4, it is also necessary to set the distance between the coated glass electrode 3 and the planar electrode 2 when the energized area of ​​the coated glass electrode 3 is energized. This is because when a high-voltage electric field is applied between the planar electrode 2 and the coated glass electrode 3, the strength of the electric field is related to the distance between the inert gas and the unit electrode, and the high-voltage electric field is used to break down the inert gas to produce a glow discharge.

[0082] The purpose of this embodiment is to make the ionized glow adhere to the circuit of the glass substrate to be tested through the glow discharge reaction. When the circuit between two contacts on the glass substrate to be tested is connected, the two contacts and the high-voltage electric field form a loop, thereby making the glow adhere to the contacts. Therefore, the circuit connectivity state of the glass substrate to be tested can be determined by the glow discharge state.

[0083] See also Fig.10 The present application provides an embodiment of a glass substrate testing method, which includes:

[0084] S1001, the control system controls the planar electrode and the coated glass electrode to discharge, ionizes the inert gas in the vacuum chamber to form a glow discharge, so that the passage circuit on the glass substrate to be tested is attached with glow, generating a glow attachment state;

[0085] Under high voltage, the noble gas between the electrodes is ionized to produce plasma, a process called glow discharge. The glow produced by glow discharge is due to the energy released when the noble gas atoms are excited and return to the ground state.

[0086] The control system is used to adjust and control the discharge state applied between the planar electrode and the coated glass electrode. Specifically, the planar electrode is used to supply power to the glass substrate to be tested, so that the cavity between the glass substrate to be tested and the coated glass electrode generates a circuit with the contacts of the glass substrate to be tested under a high voltage environment. Under the high voltage environment, the inert gas is ionized to generate a glow, and the glow will attach to the energized circuit. Only the circuit that meets the circuit state will have the glow attached.

[0087] S1002: The control system analyzes the glow attachment state to determine a circuit connectivity state of the glass substrate to be tested.

[0088] Specifically, the circuit connectivity status of the glass substrate to be tested can be determined by observing the distribution and intensity of the glow. For example, if there is no glow in a certain area, this may indicate that the circuit in this area is broken.

[0089] It should be noted that the glass substrate testing method of this embodiment is applied to the aforementioned glass substrate testing device, and is mainly used in Figure 1 The present embodiment specifically describes the actual working sequence of the control system, that is, the control system controls the plane electrode and the coated glass electrode to discharge according to the voltage value by presetting the voltage value or determining the voltage value according to the current distance between the plane electrode and the coated glass electrode and the actual substance of the inert gas, so that a stable glow discharge effect is formed between the glass substrate to be tested and the coated glass electrode. Because the glow generated by the glow discharge effect will adhere to the path circuit, the control system can determine the circuit connectivity state of the glass substrate to be tested according to the glow adhesion state of the glass substrate to be tested.

[0090] See also Fig.11 The present application provides an embodiment of a glass substrate testing method, which includes:

[0091] S1101, the control unit determines the working area of ​​the planar electrode and the coated glass electrode according to the physical parameters of the glass substrate to be tested, the range of the working area matches the size of the glass substrate to be tested, and the planar electrode and the coated glass electrode will only discharge within the range of the working area.

[0092] Physical parameters refer to all parameters used to determine the actual size of the glass substrate to be tested, such as side length, radius, etc., which are used to calculate the parameters of the actual physical size of the glass substrate to be tested, so that the control system can determine the working area of ​​the plane electrode and the coated glass electrode according to the parameters. When the glass substrate to be tested is an irregular polygon, the control system will calculate the minimum circumscribed rectangle of the glass substrate to be tested and set the corresponding working area of ​​the glass substrate to be tested in the plane electrode and the coated glass electrode.

[0093] S1102. When the number of the glass substrates to be tested is not unique, the control unit obtains the position data of the glass substrates to be tested in the vacuum chamber one by one, and determines the working areas of the planar electrode and the coated glass electrode according to the position data and the physical parameters, and the number of the working areas is consistent with the number of the glass substrates to be tested.

[0094] In actual situations, this embodiment can test multiple glass substrates to be tested at the same time. In order to avoid the influence between the corresponding working areas of different glass substrates to be tested during the test, the control unit needs to determine the working areas of the plane electrode and the coated glass electrode for the placement position of each glass substrate to be tested.

[0095] It should be noted that the vacuum environment provides a stable space without oxygen and other active gases, which prevents oxidation of the electrode and the glass substrate surface while reducing the interference of gases on the glow discharge. In a vacuum, due to the lack of interference from other gas molecules, the ionization of inert gas molecules and the glow discharge phenomenon are more likely to occur, and because of the relative stability of the vacuum state, the products obtained by ionizing the inert gas will not escape, thereby reducing the mutual interference between each working area set in the planar electrode and the coated glass electrode.

[0096] S1103, the control system controls the planar electrode and the coated glass electrode to discharge, ionizes the inert gas in the vacuum chamber to form a glow discharge, so that the passage circuit on the glass substrate to be tested is attached with glow, generating a glow attachment state;

[0097] Specifically, the control system discharges the two electrodes at a preset voltage value according to the working areas of the planar electrode and the coated glass electrode. In actual situations, the actual height of the coated glass electrode varies, so the control system will set the voltage requirements of the coated glass electrode at different heights, and these voltage requirements are indexed by the height of the coated glass electrode and set in the control system at preset values, so that the control system can determine the voltage according to the height of the coated glass electrode. In actual situations, the inert gas in the vacuum chamber is fixed, that is, different inert gases will not be mixed in the same vacuum chamber to ensure the stability of the glow discharge effect.

[0098] S1104, the control unit captures image data of the glow attachment state through the camera unit;

[0099] After the planar electrode and the coated glass electrode are energized, the planar electrode supplies power to the glass substrate to be tested, so that the high voltage between the glass substrate to be tested and the coated glass electrode ionizes the inert gas to generate glow discharge, so that the glow adheres to the loop path of the circuit on the glass substrate to be tested.

[0100] At this time, the glow spots on the glass substrate to be tested correspond to the circuit paths on the glass substrate to be tested. The control system controls the camera unit arranged above the vacuum chamber to capture the image data of the glow state inside the vacuum chamber, so that the subsequent control system can analyze the circuit connectivity state of the glass substrate to be tested.

[0101] S1105, collecting a physical image of the glow attachment state in the vacuum cavity by the camera unit;

[0102] Specifically, after the camera unit obtains the shooting instruction from the control system, the camera unit will shoot the glow adhesion state on the glass substrate to be tested in the vacuum chamber. At this time, the image directly obtained through the lens of the camera unit is called a physical image, that is, the original image directly obtained through the lens and not processed.

[0103] S11011, converting the physical image into an electronic signal image, and performing noise reduction processing on the electronic signal image to obtain a feature image;

[0104] After the physical image is acquired through shooting, the camera unit processes and filters the image through the built-in analog signal processing, and performs operations such as denoising, contrast enhancement, and brightness adjustment to obtain a clearer, more accurate, and more feature-defined image, namely, a feature image. At this time, the feature image obtained has completed operations such as denoising, so that the glow circuit will be highlighted as a feature point, that is, the glow circuit on the feature image will include the glow attachment feature of the glass substrate to be tested, and because the glow attachment feature corresponds to the circuit path of the glass substrate to be tested, the control system can determine the circuit connectivity status on the glass substrate to be tested by analyzing the feature image.

[0105] S1107, analyzing the glow discharge phenomenon of the feature points in the feature image one by one to obtain analysis results;

[0106] Specifically, according to step S1102, the present embodiment can test a plurality of glass substrates to be tested simultaneously, so one characteristic image may include glow discharge characteristics of a plurality of glass substrates to be tested. The control system determines the characteristic area corresponding to the glass substrate to be tested in the vacuum chamber according to the position of each glass substrate to be tested obtained by dividing the working areas of the planar electrode and the coated glass electrode in step S1102, and analyzes the glow discharge characteristics on these glass substrates to be tested one by one, that is, analyzes the glow discharge phenomenon through the characteristic points in the characteristic image.

[0107] The analysis results include two types: the control system obtains the glow discharge phenomenon and the control system does not obtain the glow discharge phenomenon. Because the circuit on the glass substrate to be tested is drawn on the PCB and then printed on the glass substrate to be tested, the control system can accurately analyze each solder joint on the glass substrate to be tested when analyzing the feature points.

[0108] S1108, when the analysis result shows that there is a glow discharge phenomenon, the control unit determines that the circuit corresponding to the characteristic point is in a connected state;

[0109] The glow discharge phenomenon needs to be generated through a path circuit. Therefore, when the two pads on the glass substrate to be tested and the path circuit between them generate a loop with the high voltage electricity released by the coated glass electrode, a glow discharge phenomenon will occur. Therefore, the glow discharge phenomenon can be used to determine that the corresponding circuit is in a connected state.

[0110] S1109. When the analysis result shows that there is no glow discharge phenomenon, the control unit determines that the corresponding circuit of the characteristic point is in an abnormal state, and no current flows through the corresponding circuit of the characteristic point in the abnormal state.

[0111] In the case where no glow discharge occurs, the corresponding position of the pad and its corresponding circuit on the glass substrate to be tested cannot be obtained in the characteristic image, because the characteristic image removes the circuit data without glow attachment as image noise through denoising. In this case, the number of pads in the characteristic image is inconsistent with the number of PCBs in the control system. At this time, if the information carried by the characteristic image is sufficient, the control system can determine the circuit that has the abnormality by comparing the characteristic image with the PCB diagram.

[0112] It should be noted that this embodiment is mainly used in the corresponding Figure 2 The glass substrate testing device described in this embodiment uses a camera unit to photograph the glow discharge state of the circuit when testing the glass substrate, so that the control system can analyze the glow state of the circuit based on the photographed picture, and then determine the connectivity state of the circuit on the glass substrate to be tested.

[0113] See also Fig.12 , the present application embodiment provides an embodiment of a control system, including:

[0114] Processor 1201, memory 1202, input and output unit 1203, bus 1204;

[0115] The processor 1201 is connected to the memory 1202, the input and output unit 1203 and the bus 1204;

[0116] The processor 1201 specifically performs Figure 10 to Figure 11 The operations corresponding to the steps in the method are not described in detail here.

[0117] The present application also relates to a computer-readable storage medium on which a program is stored, wherein when the program is run on a computer, the computer is caused to execute any of the above methods.

[0118] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working processes of the systems, devices and units described above can refer to the corresponding processes in the aforementioned method embodiments and will not be repeated here.

[0119] In the several embodiments provided in the present application, it should be understood that the disclosed systems, devices and methods can be implemented in other ways. For example, the device embodiments described above are only schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be an indirect coupling or communication connection through some interfaces, devices or units, which can be electrical, mechanical or other forms.

[0120] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0121] In addition, each functional unit in each embodiment of the present application may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit. The above-mentioned integrated unit may be implemented in the form of hardware or in the form of software functional units.

[0122] If the integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present application is essentially or the part that contributes to the prior art or all or part of the technical solution can be embodied in the form of a software product, and the computer software product is stored in a storage medium, including a number of instructions to enable a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present application. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (ROM, read-only memory), random access memory (RAM, random access memory), disk or optical disk and other media that can store program code.

Claims

1. A glass substrate testing method, characterized in that: The method is applied to a glass substrate testing device, and the glass substrate testing device comprises: Control system, planar electrode, coated glass electrode and vacuum chamber; The planar electrode and the coated glass electrode are arranged in parallel in the vacuum chamber, an inert gas capable of generating glow discharge is integrated into the vacuum chamber, and the planar electrode is arranged at the bottom of the vacuum chamber; A glass substrate to be tested is placed between the planar electrode and the coated glass electrode, and the contact point of the glass substrate to be tested is in contact with the planar electrode so that the glass substrate to be tested is energized; The control system is used to control the working states of the planar electrode and the coated glass electrode; Glass substrate testing methods include: The control system controls the planar electrode and the coated glass electrode to discharge, ionizes the inert gas in the vacuum chamber to form a glow discharge, so that the passage circuit on the glass substrate to be tested is attached with glow, generating a glow attachment state; The control system analyzes the glow attachment state to determine the circuit connectivity state of the glass substrate to be tested.

2. The glass substrate testing method according to claim 1, characterized in that: The glass substrate testing device further comprises: A camera unit is disposed above the vacuum chamber and is used to obtain a circuit connectivity state of the glass substrate to be tested.

3. The glass substrate testing method according to claim 2, characterized in that: Before analyzing the glow attachment state to determine the circuit connectivity state of the glass substrate to be tested, the method further includes: The control unit captures image data of the glow attachment state through the camera unit.

4. The glass substrate testing method according to claim 3, characterized in that: The step of analyzing the glow adhesion state to determine the circuit connectivity state of the glass substrate to be tested includes: Collecting a physical image of the glow attachment state in the vacuum cavity by the camera unit; Converting the physical image into an electronic signal image, and performing noise reduction processing on the electronic signal image to obtain a feature image; Analyzing the glow discharge phenomenon of the characteristic points in the characteristic image one by one to obtain analysis results; When the analysis result shows that there is a glow discharge phenomenon, the control unit determines that the circuit corresponding to the characteristic point is in a connected state; When the analysis result shows that there is no glow discharge phenomenon, the control unit determines that the corresponding circuit of the characteristic point is in an abnormal state, and no current flows through the corresponding circuit of the characteristic point in the abnormal state.

5. The glass substrate testing method according to any one of claims 1 to 4, characterized in that: The coated glass electrode is suspended in the vacuum chamber, and the distance between the coated glass electrode and the plane electrode is adjustable.

6. The glass substrate testing method according to claim 5, characterized in that: The control system is also used to set the height of the coated glass electrode in the vacuum chamber.

7. The glass substrate testing method according to any one of claims 1 to 4, characterized in that: Before the planar electrode and the coated glass electrode discharge, the method further comprises: The control unit determines the working areas of the planar electrode and the coated glass electrode according to the physical parameters of the glass substrate to be tested. The range of the working area matches the size of the glass substrate to be tested. The planar electrode and the coated glass electrode will only discharge within the working area.

8. The glass substrate testing method according to claim 7, characterized in that: The method further comprises: When the number of the glass substrates to be tested is not unique, the control unit obtains the position data of the glass substrates to be tested in the vacuum chamber one by one, and determines the working areas of the planar electrode and the coated glass electrode according to the position data and the physical parameters, and the number of the working areas is consistent with the number of the glass substrates to be tested.

9. The glass substrate testing method according to any one of claims 1 to 4, characterized in that: The planar electrode is provided with a first control module, and the coated glass electrode is provided with a second control module. The first control module and the second control module are used to receive instructions from the control system.

10. The glass substrate testing method according to claim 9, characterized in that: The first control module and the second control module are data-connected to a control system, so that the control system determines the electrode working areas of the planar electrode and the coated glass electrode according to the position information and size information of the glass substrate to be tested.

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