Adjuster using a torsionally rigid coupling and actuator using such

Abstract

An apparatus is disclosed for adjusting the position and orientation of internal components across a pressurized wall in a system sealed to contain a controlled internal environment in which a through-wall adjuster extending from the system through the pressurized wall includes a folding connector. Also disclosed is a lithographic apparatus including a through-wall adjuster. Also disclosed is an apparatus for adjusting the position and orientation of an internal component across a pressurized wall in a system sealed to contain a controlled internal environment, wherein rotation of a first axis about a portion of a wall-through adjuster protruding from the system through the pressurized wall results in rotation about a different axis inside the sealing system by using a folding coupling element.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims priority to U.S. Application No. 63 / 410,025 filed on September 26, 2022 and U.S. Application No. 63 / 426,985 filed on November 21, 2022, each of which is incorporated herein by reference in its entirety. Technical Field

[0003] The disclosed subject matter relates to systems in which the position or orientation of elements in a housing is adjusted, for example for alignment or other maintenance purposes, as in some modules of laser-generated light sources used to perform photolithographic integrated circuit manufacturing processes. Background Art

[0004] Components in some systems are maintained in a sealed environment. For example, the environment can be sealed to maintain desired conditions inside the sealed environment, such as gas pressure or purity. The sealed environment can also be used to maintain a desired gas composition, such as an inert gas or a purge gas.

[0005] In these systems, it is sometimes necessary to maintain components located in a sealed environment, such as alignment. One way to achieve this is to open the housing containing the sealed environment, perform the desired maintenance activities, then reseal the housing and restore the desired conditions inside the housing. Depending on the specific procedures and arrangements, this process can cause a lot of system downtime and contaminate the system. The system can also generate harmful radiation, and therefore it is highly desirable to have a sealed housing when the system must operate during alignment and maintenance adjustments. The entire process of servicing components in a sealed environment can be accelerated to the extent that it can be performed in the system, i.e., there is no need to first unseal, then reseal and restore the internal environment in the housing. In this context, a need for the disclosed subject matter will arise. Summary of the invention

[0006] A concise summary of one or more embodiments is presented below in order to provide a basic understanding of the presently disclosed subject matter. This summary is not an extensive overview of all contemplated embodiments, and is neither intended to identify key or important elements of all embodiments, nor to describe the scope of any or all embodiments. Its sole purpose is to present some concepts of one or more embodiments in a streamlined form as a guide to the more detailed description presented later.

[0007] According to one aspect of the embodiments, an optical element alignment mechanism is disclosed, comprising: a guide having an arcuate channel, the arcuate channel having a first channel end and a second channel end; a torsionally rigid slender member, at least partially positioned in the arcuate channel to bend into an arc that conforms to the interior of the arcuate channel, the torsionally rigid slender member having a first end and a second end, wherein the first end can rotate in a first plane and the second end can rotate in a second plane that is substantially orthogonal to the first plane; a first mechanical coupling member, coupled to the first end; and a second mechanical coupling member, coupled to the second end, such that rotation of the first mechanical coupling member in the first plane causes rotation of the second coupling member in the second plane.

[0008] The first mechanical coupling member may include a socket member for torsional actuation. The second mechanical coupling member may include a protrusion for torsional actuation. The torsionally rigid elongated member may include an electroformed bellows, wherein the bellows is flexible in degrees of freedom other than axial rotation. The torsionally rigid elongated member may include a high strength nickel alloy. The nickel alloy may include copper.

[0009] The surface of the torsionally rigid elongated member may be plated. The guide may include leaded brass. The guide may include leaded bronze. The guide may include an alloy that is substantially free of lead. The guide may include a first material, wherein the first material comprises a pure metal or a metal alloy, and the first mechanical coupling member and the second mechanical coupling member may include a second material that is substantially different from the first material.

[0010] The torsionally rigid elongated member may have a substantially circular cross-section, and the arcuate passage may have a substantially semicircular cross-section. The torsionally rigid elongated member may have a length ranging from about 15 mm to about 40 mm. The torsionally rigid elongated member may have a diameter ranging from about 5 mm to about 100. The torsionally rigid elongated member may have a radius of curvature ranging from about 10 mm to about 25 mm. The arcuate passage may be open along at least a portion of the arc length of the arcuate passage.

[0011] According to another aspect of the embodiment, a lithography device is disclosed, comprising: a light pulse stretcher, comprising a housing, the housing being suitable for containing a sealed and pressurized environment and comprising a wall having a through-wall adjuster; an optical component, positioned in the housing, at least one of the position or orientation of the optical component being adjustable by applying torque to the optical component in a first plane; an elongated torsionally rigid torque transfer element, at least partially positioned in the housing and having a first end and a second end, wherein the first end is mechanically coupled to the optical component and the second end is mechanically coupled to the through-wall adjuster, wherein the elongated torsionally rigid torque transfer element is arranged so that torque is applied to the optical component in the first plane by manipulating the rotation of the through-wall adjuster in the second plane, and the first plane and the second plane are substantially orthogonal.

[0012] The elongated torsionally rigid torque transfer element may include an electroformed bellows. The electrodeposited bellows may include a high strength nickel alloy. The lithographic apparatus may further include a guide having an arcuate channel arranged to support and laterally stabilize the elongated torsionally rigid torque transfer element. The elongated torsionally rigid torque transfer element may include a nickel alloy, and the guide may include leaded brass or leaded bronze.

[0013] The lithographic apparatus may further include an arcuate channel disposed along at least a portion of the length of the elongated torsionally rigid torque transfer element to limit lateral movement or buckling of the elongated torsionally rigid torque transfer element. The arcuate channel may have an open portion along at least a portion of the length of the arcuate channel. The arcuate channel and the torsionally rigid torque transfer element may be sized and arranged such that the arcuate channel does not mechanically contact the torsionally rigid torque transfer element along a folded portion of the torsionally rigid torque transfer element.

[0014] The elongated torsionally rigid torque transfer element may have a substantially circular cross section, and the arcuate passage may have a substantially semicircular cross section with a nominal clearance from the circular cross section of the torsionally rigid torque transfer element. The elongated torsionally rigid torque transfer element may have a length ranging from about 15 mm to about 40 mm. The elongated torsionally rigid torque transfer element may have a diameter ranging from about 5 mm to about 10 mm. The elongated torsionally rigid torque transfer element may have a radius of curvature ranging from 10 mm to about 25 mm.

[0015] The elongated torsionally rigid torque transfer element may include: a guide having an arcuate channel; and a torsionally rigid elongated member partially positioned in the arcuate channel to bend to conform to the arc inside the arcuate channel, the torsionally rigid elongated member having a first end and a second end, the first end being rotatable in a first plane, the second end being rotatable in a second plane, the arcuate channel and the torsionally rigid elongated member being separated by a gap. The torsionally rigid torque transfer element may be substantially free of any lubricant.

[0016] The elongated torsionally rigid torque transmitting element may comprise only metal or ceramic materials which do not contaminate the housing when the elongated torsionally rigid torque transmitting element is exposed to diffuse or direct deep ultraviolet radiation. The elongated torsionally rigid torque transmitting element may comprise a first material and the guide may comprise a second material different from the first material.

[0017] According to another aspect of the embodiment, a device for adjusting an optical component in an optical module is disclosed, the device comprising: a through-wall adjuster (TWA) comprising a folded connection element having a first end and a second end; a first coupling element mechanically coupled to the first end, the first coupling element being adapted to apply a rotational force to adjust the optical component; a second coupling element mechanically coupled to the second end, the second coupling element having an external portion sized and configured to extend outside the optical module, and the second coupling element being accessible from the outside and rotatable to apply a rotational force to the folded connection element. The folded connection element may include an electroformed bellows, wherein the bellows is flexible in degrees of freedom other than axial rotation.

[0018] The device may also include a spherical bearing arranged in the second coupling element to allow rotation of the second coupling element when sealing the interior of the optical module. The spherical bearing may include a convex inner ring having a first profile and a concave outer ring having a second profile complementary to the first profile. The outer ring may have a concave inner surface having a second profile complementary to the first profile. The inner ring may include a carbon alloy bearing steel. The ring may include a ceramic material. The inner ring may include stainless steel. The inner ring may include a silicon nitride-aluminum oxide composite material. The outer ring may include a phosphor bronze alloy material.

[0019] The apparatus may also include an actuator mechanically coupled to the TWA and the optical component to convert a rotational force from the TWA about a first axis into a rotational force about a second axis and couple the rotational force about the second axis to the optical component, the second axis being angled relative to the first axis, the actuator comprising a flexure-folded coupling element having a first end and a second end, the first end being adapted to rotate about the first axis and the second end being adapted to rotate about the second axis. The flexure-folded coupling element may include an electroformed bellows, wherein the bellows is flexible in degrees of freedom other than axial rotation.

[0020] The device may also include an actuator that is mechanically coupled to the TWA and the optical component to convert a rotational force from the TWA about a first axis into a rotational force about a second axis, and couple the rotational force about the second axis to the optical component, the second axis being angled with the first axis, the actuator may include a curved torsionally rigid elongated member positioned in an arcuate channel in the guide, the torsionally rigid elongated member having a first end and a second end, the first end being rotatable about the first axis, the second end being rotatable about the second axis, the interior of the arcuate channel and the torsionally rigid elongated member being separated by a gap.

[0021] According to another aspect of the embodiment, a lithography apparatus is disclosed, comprising: a light pulse stretcher comprising a housing adapted to contain a sealed and pressurized environment and comprising a wall; an optical component positioned in the housing, at least one of a position or an orientation of the optical component being adjustable by applying a torque to the optical component in a first plane; and a through-wall adjuster (TWA) comprising a folded connection element having a first end and a second end; a first coupling element mechanically coupled to the first end, the first coupling element being adapted to apply a rotational force to adjust the optical component; and a second coupling element mechanically coupled to the second end, the second coupling element having an external portion sized and configured to extend outside the optical module, and the second coupling element being accessible from the outside and rotatable to apply a rotational force to the folded connection element.

[0022] The photolithographic folded connection element may include an electroformed bellows, wherein the bellows is flexible in degrees of freedom other than axial rotation. The TWA may also include a spherical bearing arranged in the second coupling element to allow rotation of the second coupling element while limiting the escape of gas and radiation from the interior of the optical module. The spherical bearing may include a convex inner ring having a first profile and a concave outer ring having a second profile complementary to the first profile. The outer ring may have a concave inner surface having a second profile complementary to the first profile. The inner ring may include a carbon alloy bearing steel. The inner ring may include a ceramic material. The inner ring may include stainless steel. The inner ring may include a silicon nitride-aluminum oxide composite material. The outer ring may include a phosphor bronze alloy material.

[0023] The lithographic apparatus may further include an actuator mechanically coupled to the TWA and the optical component to convert a rotational force from the TWA about a first axis into a rotational force about a second axis and couple the rotational force about the second axis to the optical component, the second axis being angled with the first axis, the actuator including a curved folded coupling element having a first end and a second end, wherein the first end is adapted to rotate about the first axis and the second end is adapted to rotate about the second axis. The actuator may include a curved torsionally rigid elongated member positioned in an arcuate channel in the guide, the torsionally rigid elongated member having a first end and a second end, wherein the first end can rotate about the first axis and the second end can rotate about the second axis, the interior of the arcuate channel and the torsionally rigid elongated member being separated by a gap.

[0024] Further embodiments, features, and advantages of the disclosed subject matter, as well as the structure and operation of the various embodiments, are described in detail below with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The accompanying drawings, which are incorporated herein and form a part of the specification, illustrate the presently disclosed subject matter and together with the description further serve to explain the principles of the presently disclosed subject matter and to enable a person skilled in the relevant art to make and use the presently disclosed subject matter.

[0026] Figure 1 is a schematic diagram of a lithography system such as an implementation that may benefit from certain aspects of the embodiments.

[0027] Figure 2 is a schematic diagram of a light source for a lithography system such as an implementation that may benefit from certain aspects of the embodiments.

[0028] Figure 3 is a schematic diagram of an arrangement for in-system adjustment of optical components in a module of a lithography system, such as may benefit from implementations of certain aspects of the embodiments.

[0029] Figure 4A is an isometric view of a coupling system according to aspects of the embodiments.

[0030] Figure 4B yes Figure 4A Front view of the coupled system.

[0031] Figure 4C is a front view of a guide component of a coupling system according to aspects of an embodiment.

[0032] Figure 4D is a front view of a torsionally rigid coupler component for a coupling system according to aspects of an embodiment.

[0033] Figure 4E yes Figure 4A Cross-section of the coupled system.

[0034] Figure 4F is a side view of a guide component for a coupling system according to aspects of the embodiment.

[0035] Figure 4G is a side view of a torsionally rigid coupler component for a coupling system according to aspects of an embodiment.

[0036] Figure 5 is an isometric view of a through-wall adjuster (TWA) according to aspects of the embodiments.

[0037] Figure 6 yes Figure 5 Cross-sectional view of the TWA.

[0038] Fig. 7A , Figure 7B and Figure 7C are schematic diagrams showing various states of misalignment of a folding connector.

[0039] Figure 8 is a cross-sectional view of a TWA according to aspects of an embodiment.

[0040] Fig. 9 is a cross-sectional view of an actuator system including a TWA and a flex connector according to aspects of an embodiment.

[0041] Other features and advantages of the present invention and the structure and operation of various embodiments of the present invention are described in detail below with reference to the accompanying drawings. It should be noted that the scope of the present disclosure is not limited to the specific embodiments clearly described herein. Such embodiments are included herein for illustrative purposes only. Based on the teachings presented herein, additional embodiments will be apparent to those skilled in the art. DETAILED DESCRIPTION

[0042] Various embodiments are now described with reference to the accompanying drawings, in which like reference numerals are used throughout to refer to like elements. In the following description, for the purpose of illustration, many specific details are set forth to facilitate a thorough understanding of one or more embodiments. However, it may be apparent in some or all cases that any of the embodiments described below may be practiced without adopting the specific design details described below. In other cases, well-known structures and devices are shown in block diagram form to facilitate the description of one or more embodiments. This summary is not an extensive overview of all contemplated embodiments, and is neither intended to identify any element that is key or important to any embodiment, nor to describe the scope of any embodiment or all embodiments.

[0043] Systems such as those described herein can provide benefits in a wide range of applications and implementations. To facilitate the description with a specific non-limiting example, one such application is in semiconductor lithography.

[0044] refer to Figure 1 , an optical system 100 including a system controller 104 and an output device controller 102 is configured with an illumination system 110 that produces a pulsed laser beam 106. The illumination system 110 is configured with a module including an optical pulse stretcher ("OPuS") 120. As described in more detail below, the OPoS 120 includes a housing 125 that contains a controlled ambient gas environment. The OPoS housing also contains optical components, one of which is shown as optical component 130, which can be adjusted using through-wall adjusters ("TWAs") such as TWA 135, which allow adjustment of internal optical components without breaking the constraints of the housing 125.

[0045] The beam 106 may be directed to an output device such as a stepper / scanner 105. The stepper / scanner 105 is a lithography exposure device that uses the beam 106 to pattern microelectronic features on a wafer 108. In a lithography system, components configured within an illumination system 110 (such as a laser beam) are arranged to form a pattern of microelectronic features on a wafer 108. Figure 2 ) includes an OPus 120 having an optical component 130 that determines the parameters of the beam 106 and, therefore, the parameters of the microelectronic features patterned on the wafer 108 by the stepper / scanner 105.

[0046] Figure 2 is a functional block diagram of an example configuration of an illumination system 110 module including an OPoS 120. The light beam 106 generated by the illumination system may be in the deep ultraviolet (DUV) range (eg, a wavelength of 248 nanometers (nm) or 193 nm).

[0047] like Figure 2 As shown, the irradiation system 110 includes a gas discharge seed laser system 260. The seed laser system 260 is configured to generate seed laser output pulses from a master oscillator ("MO") 263. The MO 263 can be configured as a chamber having a pair of electrodes (not shown) such that there is an electron discharge between the electrodes, which induces a laser gas discharge in a laser gas (e.g., ArF, KrF, F2, and / or XeF) to generate relatively broadband radiation.

[0048] The resulting broadband radiation can be modified by a line narrowing module ("LNM") 262 so that a relatively very narrow bandwidth and center wavelength can be selected. LNM 262 can include a grating (not shown). A master oscillator output coupler ("MO OC") 264 receives radiation from MO 263. The output of MO OC 264 can be directed to a line center analysis module ("LAM") 266 which produces an output 269.

[0049] The output 269 propagates to the relay optical system 265. The relay optical system 265 includes a MO wavefront engineering box ("WEB") 268 and may include a multi-prism beam expander (not shown) and an optical delay path (not shown). The WEB 268 may be used to redirect the output 269 of the seed laser system 260 to a power ring amplification ("PRA") stage 270.

[0050] The PRA stage 270 includes a beam reverser 272, a PRA laser chamber 273, and a PRA WEB 278. The PRA WEB 278 is arranged to receive the redirected output 269 of the seed laser system 260 from the relay optical system 265M0 WEB 268. The PRA WEB 278 may include a partially reflecting input / output coupler (not shown), a maximum reflector of the nominal operating wavelength, and one or more prisms. The PRA WEB 278 may be provided with seed beam injection and output coupling optics (not shown) such that the beam is redirected by the beam reverser 272 through the gain medium within the PRA laser chamber 273.

[0051] The PRA laser chamber 273 includes a chamber (not shown) having a pair of electrodes. The PRA laser chamber 273 can generate electron discharge between the electrodes and generate broadband radiation.

[0052] The output of the laser beam pulses from the PRA stage 270 is directed by the PRA WEB 278 to the output subsystem 275, which measures and modifies the parameters of the laser beam before generating the final beam 106 of the illumination system 110. The output subsystem 275 includes a bandwidth analysis module ("BAM") 274, which receives the PRA stage 270 output and extracts a portion of the laser beam pulse for measurement purposes, such as to measure the bandwidth or pulse energy. The laser beam pulse then passes through the OPus 120 within the output subsystem 275 to modify the beam pulse.

[0053] Components within OPuS 120 can be configured to convert a single output pulse into a pulse train. The secondary pulses created by the initial single output pulse are delayed relative to each other, extending the effective pulse length of the laser and reducing the peak pulse intensity. Before the beam 106 is emitted from the illumination system 110, the resulting beam from OPuS 120 passes through a combined automatic shutter measurement module ("CASMM") 277 or pulse energy meter within the output subsystem 275.

[0054] The light beam propagating through the illumination system 110 is typically at a wavelength that is absorbed by some gaseous components of the air. To this end, the air is purged from the path of the radiation through the modules in the illumination system 110 and replaced with a gas that is more transparent to DUV radiation, such as nitrogen. Nitrogen provides much lower beam attenuation than air and does not absorb short wavelength beams like other elements within the air, such as oxygen.

[0055] Additionally, the light beam can be adversely affected by contaminants in its path, such as may be introduced, for example, by outgassing of organic lubricants in the module. For this reason, it is desirable to avoid the use of such lubricants to reduce friction between two surfaces that occurs when one surface moves relative to another, such as may occur during mechanical manipulation of components within a module.

[0056] As described above, optical components located within the module's housing (wherein a controlled ambient gas environment is maintained) may need to be aligned or otherwise adjusted from time to time. The controlled ambient gas environment of the module's housing may be at a pressure different from the atmospheric pressure of the ambient environment outside the housing. For example, the pressure of the gas within the housing may be 5 pounds per square inch greater than the atmospheric pressure of the ambient environment.

[0057] Again, as described above, it is advantageous to be able to make such adjustments without having to unseal and seal the housing (i.e., in-system). To allow such in-system adjustments, a coupling system having an external portion (such as a TWA) is used. The external portion of the TWA is accessible by a field service engineer ("FSE") and is mechanically coupled across the pressurized wall of the housing to an internal portion located in a controlled environment.

[0058] The FSE manipulates the outer portion of the TWA to cause movement (e.g., translation, axial, rotation) of the inner portion. The inner portion is in turn mechanically coupled to the component being adjusted. The net effect is that the FSE can adjust the inner component simply by manipulating the outer component without disturbing the environment in the module.

[0059] For some arrangements, the motion produced may be axial, i.e. outward or inward relative to the housing along the axis of rotation of the outer portion of the TWA. However, for other arrangements, it may be necessary to transfer the torque applied to the outer portion of the TWA to the inner component in a plane that is at an angle to the plane of the externally applied torque. Such arrangements require the use of a subsystem that can turn the direction of the torque accordingly.

[0060] For example, Figure 3 As shown, OPus 120 includes a torque angle converter 350 coupled to the optical component 130 via a shaft 332 within the interior 326 of the housing 125. It should be understood that the reference to OPus 120 herein is only to facilitate the description with a specific example, and the underlying principles are equally applicable to other modules in the illumination system 110 and enclosed modules in other systems.

[0061] exist Figure 3, the housing 125 includes a housing wall 323 and a housing frame 322. OPus 120 components including the torque angle converter 350 and the optical component 130 can be mounted and secured to the housing frame 322 in the interior 326. The housing 125 is sealed to allow the interior 326 and the components located within the housing, such as the torque angle converter 350 and the optical component 130, to be maintained within a controlled environment. It should be understood that during use, the interior 320 will generally be penetrated by DUV radiation.

[0062] Figure 3 The arrangement also includes a TWA 335. The TWA 335 includes an inner end 335A and an outer protruding end 335B. The outer end 335B may include a structure 338 defining a socket that is sized and arranged to receive a mating portion of a tool inserted by the FSE. The inner end 335A of the TWA 335 may be mechanically coupled to a torque angle converter 350 within the sealed housing 125.

[0063] The rotation of the TWA 335 causes the shaft 332 to rotate through the torque angle converter 350, so that the optical component 130 coupled to the shaft 332 is also adjusted. The torque angle converter 350 converts the torque applied in one plane to a different plane at a different angle. For example, if Figure 3 is taken in the XY plane, then if the TWA 335 applies a torque (rotation) in the XZ plane (i.e. about the Y axis), the torque angle converter 350 may need to convert that torque into a torque in the YZ plane (i.e. about the X axis) to adjust the optical component 130. Figure 3 In the example of FIG. 3 , the plane of rotation of TWA 335 is orthogonal to the plane of rotation of shaft 332, but a given application may require redirecting torque at an angle other than 90 degrees. Here and elsewhere, torque is used in its conventional sense, that is, a force that tends to cause a change in the rotational motion of a body. Because the direction of torque is generally consistent with the direction of rotation, these directions are used interchangeably herein.

[0064] One possible embodiment of the torque angle converter 350 may include a gear box that operates in a known manner to generate rotational power in one direction in response to the application of a rotational force in another direction. However, gear boxes can be mechanically complex and require high precision manufacturing tolerances and custom parts, which can increase manufacturing costs. Gear boxes can also experience mechanical failure modes, such as wear (adhesive wear), particularly in the absence of lubrication. Lubricants are generally not employed in environments, such as those involved herein, to mitigate such mechanical failure modes. This is because lubricants can outgas when exposed to DUV radiation and contaminate the sealed environment in which the gear box is located. It would be advantageous to have a mechanism that is able to redirect direct torque without these disadvantages.

[0065] Therefore, according to aspects of the embodiment, possible implementations of the torque angle converter 450 are as follows: FIG. 4A to FIG. 4G As shown. The design of the torque angle converter 450 enables high precision adjustment when mechanically coupled to a TWA (such as the TWA 335). The manufacturing cost of the torque angle converter 450 is low because some components used for the torque angle converter 450 do not need to be customized and can have lower precision manufacturing tolerances than the gear box without adversely affecting performance. The torque angle converter 450 can also be designed with contact surfaces made of dissimilar materials, between which mechanical bonding / wear is less likely to occur. The torque angle converter 450 can be implemented so that it is easy to retrofit into an optical system that has been deployed in the field (such as a deployed OPuS 120) and can be installed in place of the gear, or can be installed in addition to the gear box. The torque angle converter 450 can be simply installed within such a deployed optical system without requiring any excessive modifications to the optical system.

[0066] refer to Figure 4A , the torque angle converter 450 includes a guide 440 and a torsionally rigid coupling element ("TSCE") 480. The guide 440 includes a first end 441A and a second end 441B. The guide 440 also includes structure defining a channel 445 and a guide extension 446 that is positioned to define an extension of the channel 445. The first end 441A of the guide 440 has an externally threaded mechanical coupling member 448 that mates with an internally threaded mechanical coupling element 449 in a known manner. The coupling member 448 extends from the first end 441A and has a central opening that is aligned with the channel 445.

[0067] TSCE 480 is composed of a portion of a folded element 485 having a first end 481A and a second end 481B. The first end 481A may be provided with an end fitting 447 and the second end 481A may be provided with an extension member 487. The end fitting 447 of TSCE 480 has a socket that is accessible through a central opening in a coupling member 448. When coupling member 448 is attached to coupling member 449, the position of fitting 447 is fixed relative to guide 440. At the same time, end fitting 447 may be rotated by a TWA inserted into a socket in end fitting 447, which in turn results in rotation of TSCE 480. This results in rotation of extension member 487, which may be coupled to, for example, a component of an optical system to adjust certain properties of the component, such as the position or degree of rotation.

[0068] The guide 440 may also include one or more mounting flanges 444 that may be used to secure the guide 440 to a support within a housing or assembly (such as the housing 125). Figure 3 ).

[0069] Figure 4B and Figure 4C is a front view of the guide 440 with the TSCE 480 ( Figure 4B ) and a front view of the guide member 440 without the TSCE 480 ( Figure 4C ) guide. The first end 441A extends along the Y axis to the second end 441B. The first end 441A and the second end 441B of the guide 440 define a channel 445 having a guide inner surface 443 including a first end 442A and a second end 442B.

[0070] The guide member interior surface 443 of the channel 445 is configured and dimensioned so that the channel 445 has an overall arcuate shape (eg, Figure 4E and Figure 4F 440 and 441, and the guide member 480 is configured such that the channel 445 is configured to have an opening portion along at least a portion of the arc length of the channel. A person of ordinary skill in the art will appreciate that the channel 445 may be configured without an opening portion, as long as there is an appropriate gap between the TSCE 480 and the guide member interior surface 443 in the area of ​​the opening edge shown in the figure.

[0071] The arcuate shape of the channel 445 can be selected so that the first end 442A of the channel 445 is oriented to extend parallel to the Y axis, wherein the second end 442B is oriented to extend parallel to the Z axis. The channel 445 can extend between the first end 442A and the second end 442B. In the embodiment shown, the angle θ between the first end 442A and the second end 442B is approximately 90°, thereby allowing for the accommodation of a TSCE that is capable of applying a torque at one end in a plane that is orthogonal to the torque applied to the TSCE at its other end.

[0072] It will be understood that references to an XYZ coordinate reference system here and throughout this specification are only used to describe relative positioning and orientation, and not necessarily positioning and orientation relative to a specific or absolute reference system, unless the context indicates otherwise. Similarly, the use of terms such as upper, lower, top, bottom, etc. does not necessarily refer to a specific reference system, unless the context indicates otherwise.

[0073] A coupling member 448 at the first end 441A of the guide 440 protrudes from the first end 441A in the Y direction. The coupling member 449 may be a nut formed to receive an external threaded member such as the coupling member 448, which may be in the form of a fine pitch threaded screw.

[0074] As described above, the folded element 485 may be formed as a bellows that is bent to have a curved cylindrical form (eg, Figure 4E and Figure 4G 481B). In addition, the first end 481A of the TSCE 480 may be oriented primarily to extend parallel to the Y axis, and the second end 481B of the TSCE 480 may be oriented primarily to extend parallel to the Z axis. The TSCE 480 may be arranged to extend from the first end 481A to the second end 481B. As disclosed below, the folded element may be a bellows formed by electrodeposition.

[0075] The electrodeposition process can use a machined mandrel, such as a mandrel machined from aluminum. The mandrel is then electroplated and the aluminum mandrel is then dissolved, leaving a component made of electrodeposited nickel. The resulting component can therefore be described as an electroformed coating. The resulting component can tolerate lateral and axial movement (i.e., has various degrees of freedom) but still maintains torsional rigidity. The degrees of freedom enable the bellows to tolerate a greater degree of misalignment, such as for components oriented orthogonally to each other. Such bellows transmit torque with negligible springs when bent, compressed, and extended. Conventionally, such bellows are used for misaligned couplings, i.e., when one end of the bellows is bent at an angle to the other end of the bellows, but only at an angle less than 90°. However, in the applications considered herein, the number of manipulations during the expected service life of the component is small enough that the bellows can be operated with a 90° bend during that life. Such bellows can also be manufactured by hydroforming techniques, which use specialized types of mold forming and high-pressure fluids to form metals.

[0076] The disclosed TSCE 480 is torsionally rigid. One of ordinary skill in the art will appreciate that the term "torsionally rigid" is intended to have its conventional meaning, i.e., minimal spring, reaction, and hysteresis, such that rotating one end of the TSCE 480 will cause the other end of the TSCE 480 to rotate by substantially the same amount. This rotational fidelity also enables the mechanism to provide tactile feedback to the FSE or other operator, thereby enabling the FSE to qualitatively sense the amount of resistance to rotation.

[0077] The interior of the guide channel 445 is dimensioned relative to the folded element 485 so that adjacent portions of the interior of the guide channel 445 and the exterior of the folded element 485 do not contact during normal operation. For portions of the TSCE 480 and guide 440 that are in sliding contact, it may be advantageous for some applications to make at least the portions in contact from dissimilar metals to prevent galling and adhesive wear, particularly in the absence of oxygen. For example, the TSCE 480 described above may be made of a nickel alloy, and the guide 400 may be made of leaded brass.

[0078] As described above, the environment in which the coupling subsystem is located is generally blanketed with radiation, such as DUV radiation. Such radiation can cause some materials to outgas, thereby contaminating the controlled environment within the housing in which they are contained. This can interfere with the propagation of the radiation beam along the path through the housing. The optical components may also be damaged if such contaminants come into contact with the surfaces of the optical components. In such circumstances, the ability to manufacture the coupling subsystem entirely from materials, such as metals and ceramics, that do not outgas when exposed to DUV radiation can provide significant advantages.

[0079] FIG. 4E to FIG. 4G is a cross-sectional view of the guide 440 and the TSCE 480 . Figure 4E It is from Figure 4B A cross-sectional side view of the guide 440 and the TSCE 480 as seen in the direction indicated by the line 4E-4E' in FIG. Figure 4F In, from Figure 4C As can be seen in the direction indicated by line 4F-4F' in FIG. 4A , guide 440 is shown without TSCE 480 and Figure 4F In, from Figure 4D As seen in the direction indicated by line 4G-4G′ in FIG. 4 , TSCE 480 is shown separated from guide 440 .

[0080] FIG. 4E to FIG. 4G The curvature of the channel 445 and the folded element 485 according to an embodiment is shown. Both the channel 445 and the folded element 485 can extend in a curved shape so that the curvature angle θ is about 90°. The length of the channel 445 from the first end 442A to the second end 442B can be less than the length of the folded element 485 extending from the first end 481A to the second end 481B, which can be, for example, in the range of about 15 mm to about 40 mm. A portion of the second end 481B of the TSCE 480 can extend beyond the second end 442B of the channel 445 primarily in the Z direction and can be contained within a guide extension 446 that extends primarily in the Z direction from the second end 442B of the channel 445.

[0081] According to another aspect of the embodiment, the channel 445 is formed such that its diameter and corresponding radius are larger than the diameter (which may be, for example, in a range of about 5 mm to about 10 mm) and the radius of curvature (which may be, for example, in a range of about 10 mm to about 25 mm) of the folded element 485. In normal operation, the TSCE 480 can rotate without the folded element 485 in contact with the channel 445. Additionally, the channel 445 is configured so as to avoid lateral movement or buckling of the folded element 485. For example, the channel 445 can have a length of 20 mm, wherein the 5 mm guide extension 446 includes a diameter of 10 mm, so that a folded element 485 having a length of 25 mm and a diameter of 7 mm can be accommodated within the channel 445.

[0082] The end fitting 447 of the TSCE 480 is held within a first mechanical member 448 within the channel 445, wherein the first mechanical member 448 is received within a second member 449 outside the channel 445. The end fitting 447 includes a hexagonal socket that can be connected by a TWA (such as Figure 3 335 (shown), the TWA includes a hexagonal wrench member for allowing rotation of the TSCE 480. Thus, the TSCE 480 can be configured to be mechanically engaged by, for example, the TWA 335 ( Figure 3 ) The torque applied in one plane is converted to a different plane so that a component (such as optical component 130) can be aligned or adjusted ( Figures 1 to 3 ).

[0083] Conventional TWAs use mating threaded elements that form a labyrinth seal that adequately isolates the environments inside and outside the component housing from each other during the alignment process. The small gap between the unlubricated mating threads is sufficient to prevent significant evacuation of purge gas and laser radiation, and to prevent the ingress of excessive oxygen.

[0084] Such conventional TWAs are designed to actuate internal threaded adjusters, and the threads on each device translate similarly along their axis when rotated clockwise or counterclockwise. However, as described above, using a threaded TWA in conjunction with an unthreaded bending bellows actuator can result in several technical challenges. For example, the adjustment range of a threaded TWA is limited to the range of travel that can be accommodated by the threads in the mechanism. Careful positioning of the threaded TWA shaft is necessary to achieve even marginal ranges of adjustment.

[0085] Additionally, the tip of the threaded TWA shaft is typically spring loaded and applies an axial force to the bellows end fitting. Although the spring force is relatively small (approximately 2 lb-f), in reality, during relative motion, and without lubrication, this load is applied across a metal interface with a small contact area. This generates particles and unnecessary wear, and has the potential to cause premature failure.

[0086] Furthermore, existing TWAs have axial torsional rigidity to transmit actuation torque, but do not have the degrees of freedom (DOF) required to provide flexibility to minimize loads resulting from any lack of fit due to part and assembly tolerances. In conventional practice, this flexibility is provided by large gaps between parts and a single (1DOF) pin joint. Therefore, the degree of flexibility in these DOFs is primarily a function of the unpredictable and variable manufacturing tolerances of the parts.

[0087] According to aspects of the embodiments, the design of the TWA eliminates the need for threaded elements and reduces axial loads on the coupling. It provides five degrees of freedom to accommodate assembly alignment tolerances.

[0088] A consequence of avoiding the use of threaded elements is that there is no axial translation of the actuator shaft as the actuator turns. This means that the design of the TWA does not need to accommodate any axial translation of the shaft. In other words, there is no imposed range of axial movement that must be accommodated.

[0089] Figure 5 5 is an isometric view of a TWA 500 according to aspects of an embodiment. TWA 500 includes a folded or corrugated coupler 510 having coupler end pieces 520 and 525. Coupler end piece 520 is provided with a protrusion 530, which may, for example, have a hexagonal cross-section to mate with a corresponding receptacle in the curved coupler described above. TWA 500 also includes a shaft portion 550 extending through a wall of an optical module. Retaining nut 540 secures TWA 500 to the wall of the optical module. TWA 500 also includes an external coupler 560, including structure 580 ( Figure 6 ), a person outside the optical module (such as a field service engineer) can use the external coupler 560 to rotate the coupler 510 disposed inside the optical module. The arrangement also includes a gasket 570 for sealing the TWA 500 to the outer wall of the optical module so that the wall is contained between the gasket 570 and the retaining nut 540 (see Figure 8 ).

[0090] Figure 6 yes Figure 5 5. A cross-sectional view of the TWA 500 when it is installed in a system. Again, the TWA 500 includes a coupler 510 having coupler end pieces 520 and 525. The coupler end piece 520 is provided with a protrusion 530. The TWA 500 also includes a shaft portion 550, shown as part of the coupler end piece 525 extending through the wall 590 of the optical module. A retaining nut 540 secures the TWA 500 to the wall of the optical module. Figure 6Also shown is a structure 580 which can be rotated by a field service engineer to in turn rotate the coupler 510. The arrangement also includes a spacer 570 for securing the TWA to the outer wall of the optical module.

[0091] One advantage of the TWA 500 described herein is that it provides all the DOFs needed to accommodate any type of assembly misalignment between the TWA and the components being adjusted within the optical module. Various types of misalignment are possible. For example, Fig. 7A A misaligned axial condition is depicted, wherein the axis of rotation of the entire coupler 510 is displaced vertically in the figure. Figure 7B A parallel misalignment is depicted wherein the rotational axis of a portion of coupler 510 is vertically displaced relative to the rotational axis of other portions of coupler 510 . Figure 7C Angular misalignments are depicted, where the rotational axis of a portion of the coupler 510 is angled relative to the rotational axis of other portions of the coupler 510. Conventional TWAs generally have difficulty accommodating these types of misalignments. However, the TWA 500 and TSCE 480 described above include a bellows coupling that is angularly aligned along its rotational axis DOF ​​(R X ) is torsionally rigid and has five other DOFs (three translational degrees of freedom (X, Y, Z) and two rotational degrees of freedom (R Y , R Z ). Therefore, the TWA 500 and TSCE 480 can accommodate a certain amount of axial, parallel and angular misalignment, while being torsionally rigid so they can transmit torque.

[0092] One challenge in the design of TWA is gas and radiation leakage during optical alignment. The internal pressure in an optical module (such as an optical pulse stretcher) can be about 4 to 5 PSI above atmospheric pressure. Therefore, there is a pressure differential across the walls of the optical module that tends to cause the purge gas (e.g., clean dry nitrogen) inside the optical module to escape from the optical module. Another technical challenge in the design of TWA is scattered radiation (DUV) leakage beyond any gaps between components.

[0093] To avoid these problems, according to aspects of the embodiments, the TWA is designed using a spherical bearing. The spherical bearing consists of an outer ring and an inner ring and a locking feature that captures the inner ring within the outer ring only in the axial direction. The outer surface of the inner ring and the inner surface of the outer ring together form a raceway when sliding over each other. The inner and outer rings are precision fit to each other. Additionally, the spherical bearing is fixed to its position in the TWA using an interference fit. Therefore, nitrogen and radiation leakage and oxygen ingress are minimized due to the precision and interference fit between the components.

[0094] Figure 8is a cross section of a TWA 600 including a spherical bearing according to aspects of an embodiment. Figure 8 The TWA 600 includes many Figure 5 and Figure 6 The components of TWA 600 are identical to those of TWA 500 and have the same reference numerals, except that the portion of TWA 600 that extends beyond the wall of the optical module includes a spherical bearing consisting of an inner ring 620 and an outer ring 630. The inner ring 620 is convex, having a profile that curves like the outside of a circle or sphere, and the outer ring 630 is concave, having a complementary profile that curves inwardly like the inside of a circle or sphere. As described above, the two components are precisely matched to limit the amount of gas and / or radiation that escapes from the optical module through the outer protrusion of TWA 600. In some embodiments, the inner ring 620 is made of a carbon alloy bearing steel (e.g., AISI 52100). In some embodiments, the outer ring is made of a phosphor bronze alloy (e.g., C52100). The use of these different and dissimilar alloys reduces the torque required to cause relative rotation of these components. This eliminates or minimizes actuation loads, and therefore eliminates or minimizes the need for lubrication. A ceramic inner ring made of a silicon nitride-aluminum oxide composite material (Si3N4 / Al2O3) or stainless steel (such as AISI 420) may also be used.

[0095] The embodiments disclosed herein may be used in combination with various types of actuators within an optical module, and in particular may be used with actuators that include bending wave couplers, since such TWAs do not require or generate any axial translation in order to operate. Fig. 9 Yes Figure 8 A cross section of an arrangement of a coupler 600 used in combination with an actuator comprising the bending corrugation coupler described above. Fig. 9 As shown, the overall arrangement includes a folded coupling element 510 having an end piece 520 and an end piece 525. The arrangement also includes an end cap 600, which includes a spherical bearing composed of an inner ring 620 and an outer ring 630. A seal 570 is also shown. The end cap 660 allows access to the shaft 525, which extends through the wall 700 of the optical module. The protrusion 530 mates with the coupling member 449 of the actuator. The actuator includes a folded element 485 and an end fitting 487, which is coupled to a portion of the optical module where adjustment is desired. The folded element 485 is disposed in the guide 440, as described above.

[0096] The above description includes examples of multiple embodiments. Of course, in order to describe these embodiments, it is impossible to describe every conceivable combination of parts or methods, but it will be appreciated by those of ordinary skill in the art that many additional combinations and arrangements of various embodiments are possible. Therefore, the described embodiments are intended to encompass all such changes, modifications and variations within the spirit and scope of the appended claims. In addition, to the extent that the term "comprising" is used in the detailed description or claims, such term is intended to be inclusive in a manner similar to the term "comprising" because "comprising" is interpreted when used as a transitional word in the claims. In addition, although the elements of the described aspects and / or embodiments may be described or claimed in the singular, the plural form is considered unless the limitation to the singular form is explicitly stated. Additionally, unless otherwise stated, all or part of any aspect and / or embodiment may be used together with all or part of any other aspect and / or embodiment.

[0097] The embodiments may also be described using the following terms.

[0098] 1. An optical element alignment mechanism, comprising:

[0099] a guide having an arcuate channel having a first channel end and a second channel end;

[0100] a torsionally rigid elongated member at least partially positioned in the arcuate channel and having an arcuate configuration conforming to the interior of the arcuate channel, the torsionally rigid elongated member having a first end rotatable in a first plane and a second end rotatable in a second plane substantially orthogonal to the first plane;

[0101] a first mechanical coupling member coupled to the first end; and

[0102] a second mechanical coupling member coupled to the second end;

[0103] Thus, rotation of the first mechanical coupling member in a first plane causes rotation of the second coupling member in a second plane.

[0104] 2. An optical element alignment mechanism according to clause 1, wherein the first mechanical coupling member comprises a socket member for torsional actuation.

[0105] 3. An optical element alignment mechanism according to clause 1, wherein the second mechanical coupling member comprises a protrusion for torsional actuation.

[0106] 4. An optical alignment mechanism according to clause 1, wherein the torsionally rigid elongated member comprises an electroformed bellows, wherein the bellows is flexible in degrees of freedom other than axial rotation.

[0107] 5. An optical alignment mechanism according to claim 1, wherein the torsionally rigid slender member comprises a high strength nickel alloy.

[0108] 6. An optical alignment mechanism according to claim 5, wherein the nickel alloy includes copper.

[0109] 7. An optical alignment mechanism according to clause 5, wherein the torsionally rigid elongated member comprises an electroformed coating.

[0110] 8. An optical alignment mechanism as described in claim 1, wherein the guide comprises leaded brass.

[0111] 9. An optical alignment mechanism according to claim 1, wherein the guide comprises leaded bronze.

[0112] 10. The optical alignment mechanism of clause 1, wherein the guide comprises an alloy that is substantially free of lead.

[0113] 11. The optical alignment mechanism of clause 1, wherein the guide comprises a first material comprising a pure metal or a metal alloy, and the first mechanical coupling member and the second mechanical coupling member comprise a second material substantially different from the first material.

[0114] 12. An optical element alignment mechanism according to clause 1, wherein the torsionally rigid elongated member has a substantially circular cross-section and the arcuate channel has a substantially semicircular cross-section.

[0115] 13. An optical element alignment mechanism according to clause 1, wherein the torsionally rigid elongated member has a length ranging from about 15 mm to about 40 mm.

[0116] 14. An optical element alignment mechanism according to clause 1, wherein the torsionally rigid elongated member has a diameter ranging from about 5 mm to about 10 mm.

[0117] 15. An optical element alignment mechanism according to clause 1, wherein the torsionally rigid elongated member has a radius of curvature ranging from about 10 mm to about 25 mm.

[0118] 16. An optical element alignment mechanism according to clause 1, wherein the arcuate channel is open along at least a portion of the arc length of the arcuate channel.

[0119] 17. A lithographic apparatus comprising:

[0120] An optical pulse stretcher including a housing adapted to contain a sealed and pressurized environment and including a wall having a through-wall adjuster;

[0121] an optical component positioned in the housing, at least one of a position and an orientation of the optical component being adjustable by applying a torque to the optical component in a first plane;

[0122] An elongated torsionally rigid torque transfer element is at least partially positioned in the housing and has a first end mechanically coupled to the optical component and a second end mechanically coupled to the through-wall adjuster, wherein the elongated torsionally rigid torque transfer element is arranged so that torque is applied to the optical component in a first plane by manipulating rotation of the through-wall adjuster in a second plane, the first plane and the second plane being substantially orthogonal.

[0123] 18. The lithographic apparatus of clause 17, wherein the elongated torsionally rigid torque transfer element comprises an electroformed bellows.

[0124] 19. The lithographic apparatus of clause 17, wherein the elongated torsionally rigid torque transfer element comprises a bellows comprising a high strength nickel alloy.

[0125] 20. A lithographic apparatus according to clause 17, further comprising a guide having an arcuate channel arranged to support and laterally stabilize the elongated torsionally rigid torque transfer element, and wherein the elongated torsionally rigid torque transfer element comprises a nickel alloy and the guide comprises leaded brass or leaded bronze.

[0126] 21. The lithographic apparatus of clause 17, further comprising an arcuate channel disposed along at least a portion of the length of the elongated torsionally rigid torque transfer element to limit lateral movement or buckling of the elongated torsionally rigid torque transfer element.

[0127] 22. The lithographic apparatus of clause 21, wherein the arcuate channel has an open portion along at least part of an arc length of the arcuate channel.

[0128] 23. The lithographic apparatus of clause 21, wherein the arcuate channel and the torsionally rigid torque transfer element are sized and arranged such that the arcuate channel is not in mechanical contact with the torsionally rigid torque transfer element along a folded portion of the torsionally rigid torque transfer element.

[0129] 24. The lithographic apparatus of clause 21, wherein the elongated torsionally rigid torque transfer element has a substantially circular cross-section and the arcuate channel has a substantially semicircular cross-section with a nominal gap from the circular cross-section of the torsionally rigid torque transfer element.

[0130] 25. The lithographic apparatus of clause 17, wherein the elongated torsionally rigid torque transfer element has a length ranging from about 15 mm to about 40 mm.

[0131] 26. The lithographic apparatus of clause 17, wherein the elongated torsionally rigid torque transfer element has a length in the range of about 5 mm to about 10 mm in diameter.

[0132] 27. The lithographic apparatus of clause 17, wherein the elongated torsionally rigid torque transfer element has a radius of curvature ranging from about 10 mm to about 25 mm.

[0133] 28. A lithographic device according to claim 17, wherein the slender torsionally rigid torque transfer element includes a torsionally rigid slender member, which is partially positioned in a guide having an arcuate channel, the torsionally rigid slender member is positioned to conform to the interior of the arcuate channel, the torsionally rigid slender member has a first end capable of rotating in a first plane and a second end capable of rotating in a second plane, and the arcuate channel and the torsionally rigid slender member are separated by a gap.

[0134] 29. The lithographic apparatus of clause 17, wherein the elongated torsionally rigid torque transfer element is substantially free of any lubricant.

[0135] 30. The lithographic apparatus of clause 17, wherein the elongated torsionally rigid torque transfer element comprises only metal or ceramic materials which do not contaminate the housing when the elongated torsionally rigid torque transfer element is exposed to diffuse or direct deep ultraviolet radiation.

[0136] 31. The lithographic apparatus of clause 20, wherein the elongated torsionally rigid torque transfer element comprises a first material and the guide comprises a second material different from the first material.

[0137] 32. An apparatus for adjusting an optical component in an optical module, the apparatus comprising a through-wall adjuster (TWA), comprising:

[0138] a foldable connecting element having a first end and a second end;

[0139] a first coupling element mechanically coupled to the first end, the first coupling element being adapted to apply a rotational force to adjust the optical element; and

[0140] A second coupling element is mechanically coupled to the second end, the second coupling element having an outer portion sized and configured to extend outside the optical module, and the second coupling element is externally accessible and rotatable to apply a rotational force to the folded connection element.

[0141] 33. The device according to clause 32, wherein the folding connection element comprises an electroformed bellows, wherein the bellows is flexible in degrees of freedom other than axial rotation.

[0142] 34. The apparatus of clause 32, further comprising a spherical bearing disposed in the second coupling element to allow rotation of the second coupling element while sealing the interior of the optical module.

[0143] 35. The device according to clause 34, wherein the spherical bearing comprises: a convex inner ring having a first profile; and an outer ring having a concave inner surface having a second profile complementary to the first profile.

[0144] 36. The device of clause 35, wherein the inner ring comprises a carbon alloy bearing steel.

[0145] 37. The device of clause 35, wherein the inner ring comprises a ceramic material.

[0146] 38. The device of clause 35, wherein the inner ring comprises stainless steel.

[0147] 39. The apparatus of clause 35, wherein the inner ring comprises a silicon nitride-aluminum oxide composite material.

[0148] 40. The device of clause 35, wherein the outer ring comprises a phosphor bronze alloy material.

[0149] 41. The device according to clause 32 further includes an actuator which is mechanically coupled to the TWA and the optical component to convert a rotational force from the TWA about a first axis into a rotational force about a second axis, and couple the rotational force about the second axis to the optical component, the second axis being angled with the first axis, the actuator including a bent folded coupling element having a first end adapted to rotate about the first axis and a second end adapted to rotate about the second axis.

[0150] 42. The device of clause 41, wherein the bend-fold coupling element comprises an electroformed bellows, wherein the bellows is flexible in degrees of freedom other than axial rotation.

[0151] 43. The device according to claim 32 further includes an actuator that is mechanically coupled to the TWA and the optical component to convert a rotational force from the TWA about a first axis into a rotational force about a second axis, and couple the rotational force about the second axis to the optical component, the second axis being angled with the first axis, the actuator comprising a curved torsionally rigid elongated member positioned in an arcuate channel in the guide, the torsionally rigid elongated member having a first end capable of rotating about the first axis and a second end capable of rotating about the second axis, the interior of the arcuate channel and the torsionally rigid elongated member being separated by a gap.

[0152] 44. A lithographic apparatus comprising:

[0153] An optical pulse stretcher, comprising a housing adapted to contain a sealed and pressurized environment and comprising a wall;

[0154] an optical component positioned in the housing, at least one of a position and an orientation of the optical component being adjustable by applying a torque to the optical component in a first plane; and

[0155] Through Wall Adjuster (TWA), including

[0156] a foldable connecting element having a first end and a second end,

[0157] a first coupling element mechanically coupled to the first end, the first coupling element being adapted to apply a rotational force to adjust the optical element, and

[0158] A second coupling element is mechanically coupled to the second end, the second coupling element having an outer portion sized and configured to extend outside the optical module, and the second coupling element is externally accessible and rotatable to apply a rotational force to the folded connection element.

[0159] 45. The lithographic apparatus of clause 44, wherein the folded connection element comprises an electroformed bellows, wherein the bellows is flexible in degrees of freedom other than axial rotation.

[0160] 46. ​​The lithographic apparatus of clause 44, wherein the TWA further comprises a spherical bearing arranged in the second coupling element to allow rotation of the second coupling element while limiting escape of gas and radiation from the interior of the optical module.

[0161] 47. A lithographic apparatus according to clause 46, wherein the spherical bearing comprises: a convex inner ring having a first profile; and an outer ring having a concave inner surface, the concave inner surface having a second profile complementary to the first profile.

[0162] 48. The lithographic apparatus of clause 47, wherein the inner ring comprises carbon alloy bearing steel.

[0163] 49. The lithographic apparatus of clause 47, wherein the inner ring comprises a ceramic material.

[0164] 50. The lithographic apparatus of clause 47, wherein the inner ring comprises stainless steel.

[0165] 51. The lithographic apparatus of clause 47, wherein the inner ring comprises a silicon nitride-aluminum oxide composite material.

[0166] 52. The lithographic apparatus of clause 47, wherein the outer ring comprises a phosphor bronze alloy material.

[0167] 53. The lithographic apparatus of clause 44, further comprising an actuator mechanically coupled to the TWA and the optical component to convert a rotational force from the TWA about a first axis into a rotational force about a second axis, and to couple the rotational force about the second axis to the optical component, the second axis being angled with the first axis, the actuator comprising a curved folded coupling element having a first end adapted to rotate about the first axis and a second end adapted to rotate about the second axis.

[0168] 54. A lithographic device according to claim 53, wherein the actuator includes a curved torsionally rigid slender member positioned in an arcuate channel in the guide, the torsionally rigid slender member having a first end capable of rotating about a first axis and a second end capable of rotating about a second axis, the interior of the arcuate channel and the torsionally rigid slender member being separated by a gap.

[0169] The implementations described above and other implementations are within the scope of the following claims.

Claims

1. An optical element alignment mechanism, comprising: A guide having an arcuate channel, wherein the arcuate channel has a first channel end and a second channel end; a torsionally rigid elongated member at least partially positioned in the arcuate passage and having an arcuate configuration conforming to an interior of the arcuate passage, the torsionally rigid elongated member having a first end rotatable in a first plane and a second end rotatable in a second plane substantially orthogonal to the first plane; a first mechanical coupling member coupled to the first end; as well as a second mechanical coupling member coupled to the second end; Thereby, a rotation of the first mechanical coupling member in the first plane causes a rotation of the second coupling member in the second plane.

2. The optical element alignment mechanism of claim 1, wherein the first mechanical coupling member comprises a socket member for torsional actuation.

3. The optical element alignment mechanism of claim 1, wherein the second mechanical coupling member comprises a protrusion for torsional actuation.

4. The optical alignment mechanism of claim 1, wherein the torsionally rigid elongated member comprises an electroformed bellows, wherein the bellows is flexible in degrees of freedom other than axial rotation.

5. The optical alignment mechanism of claim 1, wherein the torsionally rigid elongated member comprises a high strength nickel alloy.

6. The optical alignment mechanism of claim 5, wherein the nickel alloy comprises copper.

7. The optical alignment mechanism of claim 5, wherein the torsionally rigid elongated member comprises an electroformed coating.

8. The optical alignment mechanism of claim 1, wherein the guide comprises leaded brass.

9. The optical alignment mechanism of claim 1, wherein the guide comprises leaded bronze.

10. The optical alignment mechanism of claim 1, wherein the guide comprises an alloy that is substantially free of lead.

11. The optical alignment mechanism of claim 1 , wherein the guide comprises a first material comprising a pure metal or a metal alloy, and the first and second mechanical coupling members comprise a second material substantially different from the first material.

12. The optical element alignment mechanism of claim 1, wherein the torsionally rigid elongated member has a substantially circular cross-section and the arcuate channel has a substantially semicircular cross-section.

13. The optical element alignment mechanism of claim 1, wherein the torsionally rigid elongated member has a length ranging from about 15 mm to about 40 mm.

14. The optical element alignment mechanism of claim 1, wherein the torsionally rigid elongated member has a diameter ranging from about 5 mm to about 10 mm.

15. The optical element alignment mechanism of claim 1, wherein the torsionally rigid elongated member has a radius of curvature ranging from about 10 mm to about 25 mm.

16. The optical element alignment mechanism of claim 1, wherein the arcuate channel is open along at least a portion of an arc length of the arcuate channel.

17. A lithographic apparatus comprising: An optical pulse stretcher, comprising a housing adapted to contain a sealed and pressurized environment and comprising a wall having a through-wall adjuster; an optical component positioned in the housing, at least one of a position and an orientation of the optical component being adjustable by applying a torque to the optical component in a first plane; an elongated torsionally rigid torque transfer element at least partially positioned in the housing and having a first end mechanically coupled to the optical component and a second end mechanically coupled to the through-wall adjuster, wherein the elongated torsionally rigid torque transfer element is arranged so that the torque is applied to the optical component in the first plane by manipulating rotation of the through-wall adjuster in a second plane, the first plane and the second plane being substantially orthogonal.

18. The lithographic apparatus of claim 17, wherein the elongated torsionally rigid torque transfer element comprises an electroformed bellows.

19. The lithographic apparatus of claim 17, wherein the elongated torsionally rigid torque transfer element comprises a bellows comprising a high strength nickel alloy.

20. The lithographic apparatus of claim 17, further comprising a guide having an arcuate channel arranged to support and laterally stabilize the elongated torsionally rigid torque transfer element, and wherein the elongated torsionally rigid torque transfer element comprises a nickel alloy and the guide comprises leaded brass or leaded bronze.

21. The lithographic apparatus of claim 17, further comprising an arcuate channel disposed along at least a portion of the length of the elongated torsionally rigid torque transfer element to limit lateral movement or buckling of the elongated torsionally rigid torque transfer element.

22. The lithographic apparatus of claim 21, wherein the arcuate channel has an open portion along at least part of the length of the arcuate channel.

23. The lithographic apparatus of claim 21, wherein the arcuate channel and the torsionally rigid torque transfer element are sized and arranged such that the arcuate channel does not mechanically contact the torsionally rigid torque transfer element along a folded portion of the torsionally rigid torque transfer element.

24. The lithographic apparatus of claim 21, wherein the elongated torsionally rigid torque transfer element has a substantially circular cross-section and the arcuate channel has a substantially semicircular cross-section with a nominal gap from the circular cross-section of the torsionally rigid torque transfer element.

25. The lithographic apparatus of claim 17, wherein the elongated torsionally rigid torque transfer element has a length ranging from about 15 mm to about 40 mm.

26. The lithographic apparatus of claim 17, wherein the elongated torsionally rigid torque transfer element has a length of from about 5 mm to about 10 mm in diameter.

27. The lithographic apparatus of claim 17, wherein the elongated torsionally rigid torque transmitting element has a radius of curvature ranging from about 10 mm to about 25 mm.

28. A lithographic device according to claim 17, wherein the slender torsionally rigid torque transfer element includes a torsionally rigid slender member, which is partially positioned in a guide having an arcuate channel, the torsionally rigid slender member is positioned to conform to the interior of the arcuate channel, the torsionally rigid slender member has a first end capable of rotating in the first plane and a second end capable of rotating in the second plane, and the arcuate channel is separated from the torsionally rigid slender member by a gap.

29. The lithographic apparatus of claim 17, wherein the elongated torsionally rigid torque transfer element is substantially free of any lubricant.

30. The lithographic apparatus of claim 17, wherein the elongated torsionally rigid torque transfer element comprises only metal or ceramic material that does not contaminate the housing when the elongated torsionally rigid torque transfer element is exposed to diffuse or direct deep ultraviolet radiation.

31. The lithographic apparatus of claim 20, wherein the elongated torsionally rigid torque transfer element comprises a first material and the guide comprises a second material, the second material being different from the first material.

32. An apparatus for adjusting an optical component in an optical module, the apparatus comprising a through-wall adjuster (TWA), the through-wall adjuster comprising: a foldable connecting element having a first end and a second end; a first coupling element mechanically coupled to the first end, the first coupling element being adapted to apply a rotational force to adjust the optical component; as well as A second coupling element is mechanically coupled to the second end, the second coupling element having an outer portion that is dimensioned and configured to extend outside of the optical module, and the second coupling element is externally accessible and rotatable to apply a rotational force to the folded connection element.

33. The apparatus of claim 32, wherein the folded connection element comprises an electroformed bellows, wherein the bellows is flexible in degrees of freedom other than axial rotation.

34. The apparatus of claim 32, further comprising a spherical bearing disposed in the second coupling element to allow rotation of the second coupling element while sealing the interior of the optical module.

35. The apparatus of claim 34, wherein the spherical bearing comprises: a convex inner ring having a first profile; and an outer ring having a concave inner surface with a second profile complementary to the first profile.

36. The apparatus of claim 35, wherein the inner ring comprises carbon alloy bearing steel.

37. The device of claim 35, wherein the inner ring comprises a ceramic material.

38. The device of claim 35, wherein the inner ring comprises stainless steel.

39. The apparatus of claim 35, wherein the inner ring comprises a silicon nitride-aluminum oxide composite material.

40. The apparatus of claim 35, wherein the outer ring comprises a phosphor bronze alloy material.

41. The apparatus of claim 32, further comprising an actuator mechanically coupled to the TWA and the optical component to convert a rotational force from the TWA about a first axis into a rotational force about a second axis and couple the rotational force about the second axis to the optical component, the second axis being angled with respect to the first axis, the actuator comprising a curved folded coupling element having a first end adapted to rotate about the first axis and a second end adapted to rotate about the second axis.

42. The apparatus of claim 41 wherein the bend-fold coupling element comprises an electroformed bellows, wherein the bellows is flexible in degrees of freedom other than axial rotation.

43. The apparatus of claim 32, further comprising an actuator mechanically coupled to the TWA and the optical component to convert a rotational force from the TWA about a first axis into a rotational force about a second axis and couple the rotational force about the second axis to the optical component, the second axis being angled relative to the first axis, the actuator comprising a curved torsionally rigid elongated member positioned in an arcuate channel in a guide, the torsionally rigid elongated member having a first end rotatable about the first axis and a second end rotatable about the second axis, the interior of the arcuate channel being separated from the torsionally rigid elongated member by a gap.

44. A lithographic apparatus comprising: An optical pulse stretcher comprising a housing adapted to contain a sealed and pressurized environment and comprising a wall; an optical component positioned in the housing, at least one of a position and an orientation of the optical component being adjustable by applying a torque to the optical component in a first plane; as well as Through Wall Adjuster (TWA), including a foldable connecting element having a first end and a second end, a first coupling element mechanically coupled to the first end, the first coupling element being adapted to apply a rotational force to adjust the optical element, and A second coupling element is mechanically coupled to the second end, the second coupling element having an outer portion that is dimensioned and configured to extend outside of the optical module, and the second coupling element is externally accessible and rotatable to apply a rotational force to the folded connection element.

45. The lithographic apparatus of claim 44, wherein the folded connection element comprises an electroformed bellows, wherein the bellows is flexible in degrees of freedom other than axial rotation.

46. ​​The lithographic apparatus of claim 44, wherein the TWA further comprises a spherical bearing arranged in the second coupling element to allow rotation of the second coupling element while restricting escape of gas and radiation from the interior of the optical module.

47. The lithographic apparatus of claim 46, wherein the spherical bearing comprises: a convex inner ring having a first profile; and an outer ring having a concave inner surface with a second profile complementary to the first profile.

48. The lithographic apparatus of claim 47, wherein the inner ring comprises carbon alloy bearing steel.

49. The lithographic apparatus of claim 47, wherein the inner ring comprises a ceramic material.

50. The lithographic apparatus of claim 47, wherein the inner ring comprises stainless steel.

51. The lithographic apparatus of claim 47, wherein the inner ring comprises a silicon nitride-aluminum oxide composite material.

52. The lithographic apparatus of claim 47, wherein the outer ring comprises a phosphor bronze alloy material.

53. The lithographic apparatus of claim 44, further comprising an actuator mechanically coupled to the TWA and the optical component to convert a rotational force from the TWA about a first axis into a rotational force about a second axis, and to couple the rotational force about the second axis to the optical component, the second axis being angled with respect to the first axis, the actuator comprising a curved folded coupling element having a first end adapted to rotate about the first axis and a second end adapted to rotate about the second axis.

54. A lithography device according to claim 53, wherein the actuator includes a curved torsionally rigid slender member positioned in an arcuate channel in the guide, the torsionally rigid slender member having a first end capable of rotating around the first axis and a second end capable of rotating around the second axis, the interior of the arcuate channel being separated from the torsionally rigid slender member by a gap.

Images