Optical element vacuum environment transfer device and method

Abstract

The application provides an optical element vacuum environment transfer device and method, wherein the optical element vacuum environment transfer device comprises an optical element protection box, a front end module, a load locking module, a controlled environment module and a process cavity module, the optical element protection box comprises an outer box and an inner box, the outer box comprises an outer box cover and an outer box bottom plate, and the inner box comprises an inner box cover and an inner box bottom plate; the front end module is used for separating or fastening the outer box cover and the outer box bottom plate; the load locking module is used for separating or fastening the inner box cover and the inner box bottom plate; the front end module and the load locking module are respectively connected with the controlled environment module in an interfacial mode, the controlled environment module is used for realizing the transfer of the inner box between the front end module and the load locking module through a controlled environment mechanical arm; and the process cavity module is connected with the load locking module in an interfacial mode and is used for realizing the transfer of the inner box bottom plate between the process cavity module and the load locking module through a process cavity mechanical arm. The application can provide full-process protection for the transfer process of the optical element.

Description

Technical Field

[0001] This invention relates to the field of integrated circuit and semiconductor equipment manufacturing technology, and in particular to a vacuum environment transfer device and method for optical components. Background Technology

[0002] With the development of semiconductor manufacturing technology, the manufacturing precision of semiconductor equipment such as optical component inspection and chip manufacturing needs to reach the nanometer level, and the internal working environment of the equipment also needs to be an ultra-clean vacuum space. Optical components to be inspected or to enter etching, exposure and other processes face the risk of particulate matter deposition during transportation, especially when passing through the load locking chamber of vacuum equipment, where they are easily contaminated by particles carried by airflow during turbulence or rapid changes in air pressure, affecting inspection accuracy, processing accuracy and product yield.

[0003] Existing designs for optical component protection boxes and transfer devices are insufficient in protecting optical components, and particle contamination remains a problem during transport or when air pressure changes. For example, US Patent Publication No. US20150323862A1 proposes using plasma to remove particles within the optical component box, but it does not provide adequate protection when air pressure changes. Chinese Patent Publication No. CN201480078013.9 proposes providing a particle trap in a load-locking chamber, but particles still have a significant chance of escaping onto the sample during trapping. Summary of the Invention

[0004] The primary objective of this invention is to provide a vacuum environment transfer device for optical components, which can provide full-process protection for the transfer of optical components.

[0005] A second objective of this invention is to provide a method for transmitting optical components in a vacuum environment.

[0006] This invention provides a vacuum environment transfer device for optical components, comprising:

[0007] An optical component protective case includes an outer box and an inner box disposed inside the outer box. The outer box includes a detachable outer box cover and an outer box bottom plate. The inner box includes a detachable inner box cover and an inner box bottom plate. The inner box cover is a breathable cover structure that can shield particles. The optical components are mounted on the inner box bottom plate.

[0008] The front-end module is used to separate or fasten the outer box cover and the outer box bottom plate;

[0009] A load locking module is used to separate or engage the inner box cover and the inner box bottom plate;

[0010] The controlled environment module is connected to the front-end module and the load locking module respectively. The controlled environment module is used to transfer the inner box between the front-end module and the load locking module through a controlled environment robot arm.

[0011] The process cavity module is connected to the load locking module. The process cavity module is used to transfer the inner box bottom plate between the process cavity module and the load locking module through the process cavity robot.

[0012] According to the present invention, a vacuum environment transfer device for optical components is provided, wherein the front-end module includes a front-end module chamber, and the top of the front-end module chamber is provided with an outer cover limiting port. The size of the outer cover limiting port is larger than the size of the outer box bottom plate and smaller than the size of the outer box cover. The outer box bottom plate can enter the front-end module chamber through the outer cover limiting port.

[0013] According to the present invention, a vacuum environment transfer device for optical components is provided, wherein an inner box inlet and outlet are provided on the side wall of the front-end module chamber, and the front-end module chamber is connected to the controlled environment module through the inner box inlet and outlet.

[0014] According to the present invention, the front-end module further includes a lifting rod, which can drive the outer box bottom plate to move up and down between the outer box cover limiting port and the inner box inlet and outlet positions.

[0015] According to the present invention, a vacuum environment transfer device for optical components is provided, wherein the load locking module includes a load locking chamber, and a support base and a gripping mechanism are respectively provided in the load locking chamber. The support base is used to support the bottom plate of the inner box, and the gripping mechanism is used to grip the inner box cover so that the inner box cover is separated or fastened to the bottom plate of the inner box.

[0016] According to the present invention, a vacuum environment transfer device for optical components is provided, wherein the controlled environment module includes a controlled environment chamber and a controlled environment manipulator disposed inside the controlled environment chamber, and the controlled environment manipulator is capable of transferring the inner box between the front-end module chamber, the controlled environment chamber and the load locking chamber.

[0017] According to the present invention, a vacuum environment transfer device for optical components is provided, wherein the controlled environment module is further provided with a first positive pressure device, which is used to fill the controlled environment chamber with clean gas to maintain the airflow in the controlled environment chamber towards the front-end module chamber.

[0018] According to the present invention, a vacuum environment transfer device for optical components is provided, wherein the load locking module is further provided with a negative pressure device. When the inner box bottom plate, carrying the optical component, remains in the load locking chamber in a locked state with the inner box cover before entering the process cavity module, the negative pressure device is used to evacuate and exhaust the interior of the load locking chamber.

[0019] According to the present invention, a vacuum environment transfer device for optical components is provided, wherein the load locking module is further provided with a second positive pressure device. When the inner box bottom plate carries the optical component from the process cavity module to the load locking chamber and is fastened to the inner box cover, the second positive pressure device is used to fill the load locking chamber with clean gas.

[0020] The present invention also provides a method for transferring optical components in a vacuum environment, using the above-mentioned optical component vacuum environment transfer device, specifically including the following steps:

[0021] The front-end module separates the outer box cover and the outer box bottom plate;

[0022] A controlled-environment robotic arm separates the inner box from the bottom plate of the outer box.

[0023] The controlled environment robot arm transfers the inner box from the front-end module into the controlled environment module, and then from the controlled environment module into the load locking module;

[0024] Vacuum the load lockout module.

[0025] The gripping mechanism of the load locking module grips the inner box cover and separates the inner box cover from the inner box bottom plate;

[0026] The process chamber robot transfers the inner box bottom plate from the load locking module into the process chamber module;

[0027] The process cavity module separates the inner box base plate from the optical components, and then performs process processing on the optical components;

[0028] The optical components, after being processed, are then placed back onto the bottom plate of the inner box.

[0029] The process chamber robot transfers the inner box bottom plate from the process chamber module into the load locking module;

[0030] The gripping mechanism of the load locking module re-locks the inner box cover with the inner box bottom plate;

[0031] Clean gas is introduced into the load locking module;

[0032] The controlled environment robot transfers the inner box from the load locking module into the controlled environment module, and then from the controlled environment module into the front-end module;

[0033] A controlled-environment robotic arm places the inner box back onto the bottom plate of the outer box;

[0034] The front-end module snaps the outer box cover and the outer box bottom plate together.

[0035] The optical component vacuum environment transfer device provided by this invention, through the cooperation of the optical component protection box, front-end module, load locking module, controlled environment module, and process chamber module, can provide effective protection for the entire process of transferring optical components into and out of the vacuum environment. The optical component protection box includes an outer box and an inner box. The outer box includes a detachable outer cover and an outer box base plate, and the inner box includes a detachable inner cover and an inner box base plate. The inner box cover adopts a breathable and particle-shielding structure. The optical component is mounted on the inner box base plate. By setting up an optical component protection box with an inner and outer double-box structure, the optical component can be protected during the transfer process. This invention provides effective protection, with the inner box shielding particles throughout the entire process while allowing gas molecules to pass through, enabling the inner box to achieve a vacuum or return to ambient pressure. The front-end module separates or latches the outer box cover and bottom plate, while the load-locking module separates or latches the inner box cover and bottom plate. By connecting the front-end and load-locking modules to a controlled environment module, a robotic arm in the controlled environment can transfer the inner box between these modules. Similarly, by connecting the process chamber module to the load-locking module, a robotic arm in the process chamber can transfer the inner box bottom plate between these modules. Therefore, this invention, through the combined use of optical elements and their protective casing, significantly reduces the risk of particle contamination during the transfer process between the front-end module, controlled environment module, load-locking module, and process chamber module. This reduces the risk of particle contamination when optical elements enter and exit the outer box, load-locking module, process chamber module, and inner box, and during robotic arm handling. This improves the lifespan of optical elements, reduces cleaning frequency, enhances inspection and processing accuracy, and increases product yield. Attached Figure Description

[0036] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0037] Figure 1 This is a schematic diagram of the structure of the vacuum environment transfer device for optical elements of the present invention;

[0038] Figure 2 This is an exploded view of the optical element protective box in the vacuum environment transfer device for optical elements of the present invention;

[0039] Figure 3 This is a cross-sectional view of the optical element protective box in the optical element vacuum environment transfer device of the present invention;

[0040] Figure 4 This is a schematic diagram of the lifting rod of the front-end module in the vacuum environment transmission device for optical elements of the present invention in the raised state.

[0041] Figure 5 This is a schematic diagram of the falling state of the lifting rod of the front-end module in the vacuum environment transmission device for optical elements of the present invention.

[0042] Figure 6 This is a schematic diagram showing the cooperation state between the front-end module and the optical element protective box in the vacuum environment transfer device for optical elements of the present invention.

[0043] Figure 7 This is a schematic diagram showing the separation of the outer cover and the outer bottom plate in the front-end module of the optical element vacuum environment transfer device of the present invention.

[0044] Figure 8 This is a schematic diagram of the load locking module in the vacuum environment transfer device for optical elements of the present invention;

[0045] Figure 9 This is a partial cross-sectional view of the load locking module in the vacuum environment transfer device for optical elements of the present invention.

[0046] Figure 10 This is a schematic diagram showing the state in which the gripping mechanism of the load locking module in the vacuum environment transfer device for optical components of the present invention separates the inner box cover and the inner box bottom plate.

[0047] Figure 11 This is a schematic diagram showing the docking status of the front-end module, load locking module, and controlled environment module in the vacuum environment transfer device for optical elements of the present invention.

[0048] Figure 12 This is a flowchart of the vacuum environment transmission method for optical elements according to the present invention.

[0049] Explanation of reference numerals in the attached figures:

[0050] 100. Optical component protective box; 101. Outer box cover; 102. Inner box cover; 103. Optical component; 104. Inner box bottom plate; 105. Outer box bottom plate; 106. Inner box sealing gasket; 107. Outer box sealing gasket;

[0051] 200. Front-end module; 201. Front-end module chamber; 202. Lifting rod;

[0052] 300. Load locking module; 301. Load locking chamber; 302. Gripping mechanism; 303. Support base;

[0053] 400. Controlled environment module; 401. Controlled environment chamber; 402. Controlled environment robot arm;

[0054] 500. Process cavity module; 501. Process cavity chamber; 502. Process cavity robot. Detailed Implementation

[0055] The technical solution of the present invention will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0056] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting this invention.

[0057] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the stated features. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified. Furthermore, the terms "installed," "connected," and "linked" should be interpreted broadly; for example, they may refer to a fixed connection, a detachable connection, or an integral connection; they may refer to a mechanical connection or an electrical connection; they may refer to a direct connection or an indirect connection through an intermediate medium; and they may refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0058] The following is combined Figures 1 to 12 Specific embodiments of the vacuum environment transmission device and method for optical elements of the present invention are described.

[0059] like Figures 1 to 11 As shown, the optical element vacuum environment transfer device of this embodiment includes an optical element protection box 100, a front-end module 200, a load locking module 300, a controlled environment module 400, and a process cavity module 500.

[0060] The optical component protection box 100 includes an outer box and an inner box disposed inside the outer box. The outer box includes a detachable outer box cover 101 and an outer box base plate 105, and the inner box includes a detachable inner box cover 102 and an inner box base plate 104. The inner box is used to hold the optical component 103, and the optical component 103 is mounted on the inner box base plate 104. By setting up an optical component protection box with an inner and outer double box structure, the optical component 103 can be effectively protected during transportation. The inner box cover 102 has the properties of being breathable and able to shield particles, so that the inner box can shield particles throughout the entire process while allowing gas molecules to pass through, allowing the inner box to achieve a vacuum or return to ambient pressure.

[0061] The front-end module 200 is used to separate or engage the outer box cover 101 and the outer box base 105. The load locking module 300 is used to separate or engage the inner box cover 102 and the inner box base 104. The front-end module 200 and the load locking module 300 are respectively connected to the controlled environment module 400, which uses a controlled environment robot 402 to transfer the inner box between the front-end module 200 and the load locking module 300. That is, the controlled environment robot 402 can transfer the inner box sequentially from the front-end module 200 to the controlled environment module 400 to the load locking module 300, or sequentially from the load locking module 300 to the controlled environment module 400 and back to the front-end module 200.

[0062] The process cavity module 500 is connected to the load locking module 300. The process cavity module 500 is used to transfer the inner box bottom plate 104 between the process cavity module 500 and the load locking module 300 through the process cavity robot 502.

[0063] That is, before the optical element 103 enters the process cavity module 500, it is always protected by the inner box cover 102 and the inner box base plate 104. Only when the inner box cover 102 and the inner box base plate 104 are separated in the load locking module 300 will the optical element 103 be exposed to the environment inside the load locking module 300. Then, the process cavity robot 502 will send the optical element 103 together with the inner box base plate 104 into the process cavity module 500.

[0064] After the optical element 103 completes its processing in the process cavity module 500, the process cavity robot 502 sends the optical element 103 and the inner box bottom plate 104 together to the load locking module 300. Then, in the load locking module 300, the inner box cover 102 and the inner box bottom plate 104 are re-fastened, completing the loading of the optical element in the inner box and the closing of the inner box.

[0065] During the above-mentioned transfer process, both the controlled environment robot 402 and the process cavity robot 502 support the optical element 103 on the inner box bottom plate 104. Neither the controlled environment robot 402 nor the process cavity robot 502 makes direct contact with the optical element 103, which greatly reduces the chance of particle generation and release due to direct contact.

[0066] Therefore, the vacuum environment transfer device for optical components in this embodiment of the invention, through the cooperative use of the optical component 103 and the optical component protective box 100, can greatly reduce the risk of particulate contamination of the optical component 103 during the transfer process between the front-end module 200, the controlled environment module 400, the load locking module 300, and the process cavity module 500. This is beneficial for improving the lifespan of the optical component, reducing the number of cleaning cycles, improving the accuracy of detection and processing, and increasing the product yield.

[0067] Specifically, an inner box sealing gasket 106 is provided on the inner box bottom plate 104 to seal with the inner box cover 102. When the inner box cover 102 and the inner box bottom plate 104 are fastened together, the inner box can be closed and sealed. An outer box sealing gasket 107 is provided on the outer box bottom plate 105 to seal with the outer box cover 101. When the outer box cover 101 and the outer box bottom plate 105 are fastened together, the outer box can be closed and sealed.

[0068] The outer box cover 101 has a larger outer ring cross-sectional dimension than the outer box base 105, which facilitates direct engagement or disengagement between the outer box cover 101 and the outer box base 105. The inner box cover 102 has a larger outer ring cross-sectional dimension than the inner box base 104, which also facilitates direct engagement or disengagement between the inner box cover 102 and the inner box base 104.

[0069] Specifically, the process chamber module 500 includes a process chamber 501 and a process chamber robot 502 disposed within the process chamber 501. A target chuck (not shown) is also provided within the process chamber module 500. Both the process chamber robot 502 and the target chuck are existing structural forms within the process chamber module 500. The process chamber robot 502 feeds the optical element along with the inner box base plate 104 into the process chamber module 500. Upon reaching the vicinity of the target chuck, a tool on the target chuck detaches the optical element 103 from the inner box base plate 104 and loads and positions the optical element 103 onto the target chuck. Subsequently, the process chamber robot 502 delivers the inner box base plate 104 to the load locking module 300, awaiting the optical element to complete processes such as detection and exposure.

[0070] After the optical element 103 completes the process, the tool on the target chuck will detach the optical element 103 from the chuck. At the same time, the process cavity robot 502 will bring the inner box base plate 104 to the vicinity of the chuck. After the tool on the chuck loads the optical element 103 onto the inner box base plate 104, the process cavity robot 502 will then send the optical element 103 and the inner box base plate 104 together to the load locking module 300.

[0071] That is, during the above-mentioned transfer process, the tool on the target chuck only makes direct contact with the optical element 103 twice, when loading and unloading the optical element 103. The process cavity robot 502 supports the inner box bottom plate 104 when transferring the optical element 103. The process cavity robot 502 does not make direct contact with the optical element 103, which greatly reduces the chance of particle generation and release due to direct contact.

[0072] Specifically, the front-end module 200 includes a front-end module chamber 201. The top of the front-end module chamber 201 is provided with an outer box cover limiting port. The size of the outer box cover limiting port is larger than the size of the outer box bottom plate 105 but smaller than the size of the outer box cover 101. That is, the outer box bottom plate 105 can enter the front-end module chamber 201 through the outer box cover limiting port, while the outer box cover 101 will be stuck at the upper end of the outer box cover limiting port, thereby facilitating the separation between the outer box cover 101 and the outer box bottom plate 105.

[0073] The front-end module chamber 201 has an inner box inlet / outlet on its side wall, and the front-end module chamber 201 is connected to the controlled environment module 400 through the inner box inlet / outlet. That is, when the outer box bottom plate 105 descends to the position of the inner box inlet / outlet, the controlled environment robot 402 can pass through the inner box inlet / outlet to clamp and separate the inner box from the outer box bottom plate 105 and remove it.

[0074] The front-end module 200 also includes a lifting rod 202. The lifting rod 202 extends into the front-end module chamber 201 through the bottom port of the front-end module chamber 201 and drives the outer box base plate 105 to move up and down between the outer box cover limiting port and the inner box inlet / outlet position within the front-end module chamber 201. That is, when the upper end of the lifting rod 202 rises to a position flush with the outer box cover limiting port, the optical component protection box 100 is placed on the outer box cover limiting port, and the outer box base plate 105 rests on the upper end of the lifting rod 202 within the outer box cover limiting port. Then, the lifting rod 202 is controlled to fall, and the outer box base plate 105 and the inner box placed on the outer box base plate 105 will fall synchronously with the lifting rod 202 under their own gravity. The outer box cover 101 will then be stuck on the outer box cover limiting port, thereby separating the outer box base plate 105 from the outer box cover 101.

[0075] Depending on the actual usage requirements, the lifting mast 202 can be selected from existing structural forms such as electric lifting masts and pneumatic lifting masts, as long as reliable lifting drive operation can be achieved.

[0076] Of course, in order to prevent the outer box bottom plate 105 from sticking to the outer box cover 101 and making it difficult to separate, a vacuum suction cup can be installed on the end face of the lifting rod 202 to adsorb the outer box bottom plate 105.

[0077] When the lifting rod 202 drives the outer box base plate 105 to fall to the position of the inner box inlet and outlet, the lifting rod 202 stops moving and waits for the controlled environment robot arm 402 to clamp and separate the inner box from the outer box base plate 105 and take it out. At this time, the lifting rod 202 supports the outer box base plate 105 to remain stationary.

[0078] Similarly, when the optical component 103 completes the process and is reinstalled into the inner box for transfer, the controlled environment robot 402 places the inner box back onto the outer box bottom plate 105, and then controls the lifting rod 202 to rise until the lifting rod 202 pushes the outer box bottom plate 105 out of the outer box cover limiting port. During the process of the outer box bottom plate 105 being pushed out, the outer box bottom plate 105 can be re-fastened to the outer box cover 101.

[0079] Specifically, the load locking module 300 includes a load locking chamber 301, in which a gripping mechanism 302 and a support base 303 are respectively provided. The gripping mechanism 302 is located above the support base 303. The support base 303 is used to support the inner box bottom plate 104. The gripping mechanism 302 is used to grip the inner box cover 102 and separate or fasten the inner box cover 102 from the inner box bottom plate 104.

[0080] When it is necessary to separate the inner box cover 102 from the inner box bottom plate 104, the gripping mechanism 302 is controlled to move downward from the initial position to the predetermined position and then grip the inner box cover 102. Then, the gripping mechanism 302 is controlled to move the inner box cover 102 upward together.

[0081] When it is necessary to re-fasten the inner box cover 102 and the inner box bottom plate 104, the gripping mechanism 302 is controlled to move the inner box cover 102 downward to a predetermined position so that the inner box cover 102 and the inner box bottom plate 104 are in close contact before being released, so that the inner box cover 102 and the inner box bottom plate 104 are re-fastened. Then the gripping mechanism 302 moves upward to the initial position.

[0082] Of course, in order to prevent the inner box cover 102 from sticking to the inner box bottom plate 104 and making it difficult to separate, a vacuum suction cup can be installed on the support base 303 to adsorb the inner box bottom plate 104.

[0083] Depending on the actual usage requirements, the gripping mechanism 302 can be selected from existing structural forms such as mechanical claw gripping mechanisms or suction cup gripping mechanisms, as long as it can effectively grip the inner box cover 102. The vertical movement of the gripping mechanism 302 can be achieved through existing electric lifting mechanisms or pneumatic lifting mechanisms.

[0084] Specifically, the controlled environment module 400 includes a controlled environment chamber 401 and a controlled environment robot 402 disposed inside the controlled environment chamber 401. The controlled environment robot 402 can sequentially transfer the inner box between the front-end module chamber 201, the controlled environment chamber 401 and the load locking chamber 301.

[0085] Based on actual usage requirements, the controlled environment robot 402 can be selected from existing multi-degree-of-freedom robots, which offer flexible operation.

[0086] The controlled environment module 400 is further equipped with a first positive pressure device (not shown in the figure). This device is used to fill the controlled environment chamber 401 with clean gas, ensuring that the internal pressure of the controlled environment chamber 401 is slightly higher than that of the front-end module chamber 201. This maintains airflow within the controlled environment chamber 401 towards the front-end module chamber 201, preventing any particles from flowing into the front-end module chamber 201 or entering the controlled environment chamber 401 with the inner casing. Corresponding air vents may be provided on the side wall of the front-end module chamber 201.

[0087] Among them, sealed doors that can be opened and closed are provided at the interface between the load locking module 300 and the controlled environment module 400, and at the interface between the load locking module 300 and the process chamber module 500, to ensure the internal air pressure status of the load locking chamber 301.

[0088] The load locking module 300 is also equipped with a negative pressure device (not shown in the figure). When the inner box bottom plate 104, which carries the optical element 103, is locked to the inner box cover 102 before entering the process chamber 501, the negative pressure device is controlled to evacuate and exhaust the contents of the load locking chamber 301 so that the pressure inside the load locking chamber 301 is the same as that in the process chamber 501.

[0089] The load locking module 300 is also equipped with a second positive pressure device (not shown in the figure). When the inner box bottom plate 104 carries the optical element 103 from the process chamber 501 to the load locking chamber 301 and is fastened to the inner box cover 102, the second positive pressure device is controlled to fill the load locking chamber 301 with clean gas so that the internal pressure of the load locking chamber 301 transitions to the same as that of the controlled environment chamber 401.

[0090] like Figure 12As shown, this embodiment of the invention also provides a method for transferring optical components in a vacuum environment, using the optical component vacuum environment transfer device described above, specifically including the following steps:

[0091] The front-end module separates the outer box cover and the outer box bottom plate;

[0092] A controlled-environment robotic arm separates the inner box from the bottom plate of the outer box.

[0093] The controlled environment robot arm transfers the inner box from the front-end module into the controlled environment module, and then from the controlled environment module into the load locking module;

[0094] Vacuum the load lockout module.

[0095] The gripping mechanism of the load locking module grips the inner box cover and separates the inner box cover from the inner box bottom plate;

[0096] The process chamber robot transfers the inner box base plate carrying the optical components from the load locking module into the process chamber module;

[0097] The process cavity module separates the inner box base plate from the optical components, and then performs process processing on the optical components;

[0098] The optical components, after being processed, are then placed back onto the bottom plate of the inner box.

[0099] The process cavity robot transfers the inner box base plate carrying the optical components from the process cavity module into the load locking module;

[0100] The gripping mechanism of the load locking module re-locks the inner box cover with the inner box bottom plate;

[0101] Clean gas is introduced into the load locking module;

[0102] The controlled environment robot transfers the inner box from the load locking module into the controlled environment module, and then from the controlled environment module into the front-end module;

[0103] A controlled-environment robotic arm places the inner box back onto the bottom plate of the outer box;

[0104] The front-end module snaps the outer box cover and the outer box bottom plate together.

[0105] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A vacuum environment transfer device for optical components, characterized in that, include: An optical component protective case includes an outer box and an inner box disposed inside the outer box. The outer box includes a detachable outer box cover and an outer box bottom plate. The inner box includes a detachable inner box cover and an inner box bottom plate. The inner box cover is a breathable cover structure that can shield particles. The optical components are mounted on the inner box bottom plate. The front-end module is used to separate or fasten the outer box cover and the outer box bottom plate; A load locking module is used to separate or engage the inner box cover and the inner box bottom plate; The controlled environment module is connected to the front-end module and the load locking module respectively. The controlled environment module is used to transfer the inner box between the front-end module and the load locking module through a controlled environment robot arm. The process cavity module is connected to the load locking module. The process cavity module is used to transfer the inner box bottom plate between the process cavity module and the load locking module through the process cavity robot. The front-end module includes a front-end module chamber. The top of the front-end module chamber is provided with an outer box cover limiting port. The size of the outer box cover limiting port is larger than the size of the outer box bottom plate and smaller than the size of the outer box cover. The outer box bottom plate can enter the front-end module chamber through the outer box cover limiting port. An inner box inlet / outlet is provided on the side wall of the front-end module chamber, and the front-end module chamber is connected to the controlled environment module through the inner box inlet / outlet; The front-end module also includes a lifting rod, which can drive the outer box bottom plate to move up and down between the outer box cover limiting port and the inner box inlet and outlet positions.

2. The vacuum environment transfer device for optical components according to claim 1, characterized in that, The load locking module includes a load locking chamber, in which a support base and a gripping mechanism are respectively provided. The support base is used to support the bottom plate of the inner box, and the gripping mechanism is used to grip the inner box cover so that the inner box cover is separated or fastened to the bottom plate of the inner box.

3. The vacuum environment transfer device for optical components according to claim 2, characterized in that, The controlled environment module includes a controlled environment chamber and a controlled environment manipulator disposed inside the controlled environment chamber. The controlled environment manipulator is capable of transferring the inner box between the front-end module chamber, the controlled environment chamber, and the load locking chamber.

4. The vacuum environment transfer device for optical components according to claim 3, characterized in that, The controlled environment module is also equipped with a first positive pressure device, which is used to fill the controlled environment chamber with clean gas to maintain the airflow in the controlled environment chamber towards the front-end module chamber.

5. The vacuum environment transfer device for optical components according to claim 3, characterized in that, The load locking module is also equipped with a negative pressure device. When the inner box bottom plate, carrying the optical element, is in a locked state with the inner box cover and remains in the load locking chamber before entering the process cavity module, the negative pressure device is used to evacuate and exhaust the interior of the load locking chamber.

6. The vacuum environment transfer device for optical components according to claim 3, characterized in that, The load locking module is also equipped with a second positive pressure device. When the inner box bottom plate carries the optical element from the process cavity module to the load locking chamber and is fastened to the inner box cover, the second positive pressure device is used to fill the load locking chamber with clean gas.

7. A method for transferring optical components in a vacuum environment, characterized in that, The vacuum environment transfer device for optical elements as described in any one of claims 1 to 6 specifically includes the following steps: The front-end module separates the outer box cover and the outer box bottom plate; A controlled-environment robotic arm separates the inner box from the bottom plate of the outer box. The controlled environment robot arm transfers the inner box from the front-end module into the controlled environment module, and then from the controlled environment module into the load locking module; Vacuum the load lockout module. The gripping mechanism of the load locking module grips the inner box cover and separates the inner box cover from the inner box bottom plate; The process chamber robot transfers the inner box bottom plate from the load locking module into the process chamber module; The process cavity module separates the inner box base plate from the optical components, and then performs process processing on the optical components; The optical components, after being processed, are then placed back onto the bottom plate of the inner box. The process chamber robot transfers the inner box bottom plate from the process chamber module into the load locking module; The gripping mechanism of the load locking module re-locks the inner box cover with the inner box bottom plate; Clean gas is introduced into the load locking module; The controlled environment robot transfers the inner box from the load locking module into the controlled environment module, and then from the controlled environment module into the front-end module; A controlled-environment robotic arm places the inner box back onto the bottom plate of the outer box; The front-end module snaps the outer box cover and the outer box bottom plate together.

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