Substrate conveying equipment

Abstract

The present invention discloses a substrate conveying device, including a body, an arm, a lifter and a lifting assembly, wherein the body is formed with a receiving space, the lifting assembly includes a slide rail and a slider, there are two sliders and they are slidably connected to the slide rail, and a connection area is formed between the two sliders; a driving assembly is arranged in the receiving space, the driving assembly includes M power sources stacked and placed in the height direction, the power source is used to drive the joint to rotate, and a joint shell is arranged on the outside of N power sources corresponding to the connection area in the horizontal direction among the M power sources; wherein the bottom of the joint shell is connected to the lifter, the slider is fixedly connected to the joint shell, and the joint shell is used to carry N power sources adjacent to and close to the bottom of the joint shell, and N≤M. By adopting the above technical solution, the problem of poor installation accuracy due to uneven size or combination of power sources, which in turn leads to poor overall lifting accuracy, is avoided.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor wafer fetching and placing equipment, and in particular to substrate conveying equipment. Background Art

[0002] In the semiconductor manufacturing process, wafer transportation is crucial to integrated circuit manufacturing. Etching, deposition, epitaxial growth and other processes in semiconductor wafer processing need to be carried out in a vacuum reaction chamber, and a vacuum robot is required to place the substrate from a predetermined position to the processing position. These vacuum robots are constructed with a drive system that allows the substrate to be placed repeatedly at a predetermined position.

[0003] The drive system in the prior art, when driving a robot to move, usually combines and stacks motors used to drive multiple robot joints, and then drives multiple motors to lift and lower. However, due to different motor models or improper placement, the installation accuracy of the motor group formed by multiple motors will be poor, and the poor installation accuracy will lead to poor lifting and lowering accuracy of the motor group, thereby affecting the movement accuracy of the robot. Summary of the invention

[0004] The object of the present invention is to provide a substrate conveying device to improve the installation accuracy and lifting accuracy of the driving mechanism of a vacuum robot.

[0005] To achieve the above object, the technical solution of the present invention is as follows:

[0006] A substrate conveying device comprises a body, an arm pivotally connected to the body, and a lifter for driving the arm and the body to move relative to each other in a height direction, wherein the body has a receiving space inside, and the substrate conveying device comprises:

[0007] A lifting assembly, comprising a slide rail and a slider, wherein the slide rail is arranged in the accommodation space along the height direction of the body, and the slider is two and slidably connected to the slide rail, and a connection area is formed between the two sliders;

[0008] A driving assembly is arranged in the accommodation space, the driving assembly includes M power sources stacked in the height direction, the power sources are used to drive the joints of the arm to rotate, and a joint shell is arranged outside the N power sources corresponding to the connection area in the horizontal direction among the M power sources;

[0009] The bottom of the combined shell is connected to the lifter, the slider is fixedly connected to the combined shell, and the combined shell is used to carry N adjacent power sources close to the bottom of the combined shell, and N≤M.

[0010] By adopting the above technical solution, the technical effect achieved is: using the lifter to drive the combined shell to drive the power source to move along the height direction of the main body, avoiding the problem of poor installation accuracy due to uneven power source size or combination stacking, which in turn leads to poor overall lifting accuracy. The lifter is used to drive the combined shell to move, and the movement of the combined shell drives the slider to move along the extension direction of the slide rail, thereby driving multiple power sources to perform high-precision lifting, thereby realizing the integrated lifting of the power source. In addition, N power sources are placed in the combined shell, and the number of placed power sources is less than or equal to the total number of power sources M. By driving the N power sources, the M power sources can be driven to rise and fall synchronously, which reduces the height of the combined shell, saves the size cost of the combined shell, and makes the combined shell lighter.

[0011] Furthermore, the combined shell includes a mounting cylinder and a fixing plate, wherein the fixing plates are respectively extended along two radial sides of the mounting cylinder, the fixing plates are fixedly connected to the mounting cylinder, and the fixing plates are fixedly connected to the sliding block.

[0012] Furthermore, a plurality of heat dissipation grooves are provided on the side wall of the combined shell, the plurality of heat dissipation grooves form a heat dissipation zone, a plurality of heat dissipation ports are provided along the height direction of the heat dissipation zone, and a protective cover with heat dissipation holes is also provided on the combined shell, and the protective cover is installed outside the heat dissipation zone.

[0013] Furthermore, the arm includes an upper arm body, a lower arm body, a first end effector and a second end effector, the upper arm body is hinged to the lower arm body and has an elbow joint point, the other end of the upper arm body away from the hinge point has a shoulder joint point, the lower arm body is hinged to the first end effector and has a wrist joint point, the first end effector is hinged to the second end effector, and a pulley transmission mechanism is arranged between adjacent joint points, and the pulley transmission mechanism is used to transmit kinetic energy.

[0014] Further, the pulley transmission mechanism comprises two pulley bodies and a double transmission belt, the outer circumferential surface of the pulley body is provided with a sinking groove along the tangential direction, a fixing block is arranged in the sinking groove, the fixing block is located in the radial parallel direction of the pulley body, and the length of the fixing block extending radially from the pulley body is less than the depth of the sinking groove;

[0015] Among them, when the double transmission belt is wrapped around the outer circumference of the pulley body and covers the sinking groove, the edge of the double transmission belt along the width direction maintains contact with the outer circumference of the pulley body, and the projection of the area enclosed by the outer circumference of the pulley body along the vertical direction covers the fixed block.

[0016] Further, the pulley body has an upper layer area and a lower layer area, the double transmission belt includes a first transmission belt and a second transmission belt, and the first transmission belt and the second transmission belt are fixedly connected to the upper layer area and the lower layer area respectively.

[0017] Furthermore, a transition slope is smoothly connected between the bottom wall of the sinking groove and the outer peripheral surface of the pulley body.

[0018] Furthermore, an installation window is provided on the bottom wall of the sinking groove, the fixing block is fixedly connected with a fixing piece, the fixing block is movably arranged in the installation window, an adjustment area is provided on the inner periphery of the pulley, the fixing piece is arranged in the adjustment area, and the fixing piece is used to adjust the radial position of the fixing block in the installation window.

[0019] Furthermore, the double transmission belt is provided with a fixing hole, the fixing block is inserted into the fixing hole, the fixing block includes a fixing portion and a limiting portion, the fixing portion is fixedly connected to the limiting portion, and the fixing portion is movably arranged in the adjustment area.

[0020] Furthermore, the double transmission belt includes a sinking connecting section, a transition section and a transmission body connected in sequence, the fixing hole is opened on the sinking connecting section, the width of the sinking connecting section is smaller than the width of the transmission body, the transition section is smoothly connected between the sinking connecting section and the transmission body, and the width of the transition section gradually widens along the direction from the sinking connecting section to the transmission body.

[0021] Furthermore, it also includes a driving main shaft, which includes a first shaft, a second shaft, a third shaft and a fourth shaft which are radially arranged in sequence from the outside to the inside, and the M power sources include a first driver, a second driver, a third driver and a fourth driver, and the first driver, the second driver, the third driver and the fourth driver are respectively used to drive the first shaft, the second shaft, the third shaft and the fourth shaft to rotate respectively.

[0022] Further, the boom body includes a boom shell and a boom spindle located in the boom shell, a first boom main pulley, a second boom main pulley, a third boom main pulley, a first boom elbow pulley, a second boom elbow pulley, and a third boom elbow pulley, the first shaft is connected to the boom shell, the first boom main pulley is drivingly connected to the first boom elbow pulley, the second boom main pulley is drivingly connected to the second boom elbow pulley, the third boom main pulley is drivingly connected to the third boom elbow pulley, and the fourth shaft is used to drive the third boom main pulley to rotate.

[0023] Furthermore, the forearm body includes a forearm shell and a forearm spindle located in the forearm shell, a first forearm wrist pulley, a second forearm wrist pulley, a first forearm elbow pulley and a second forearm elbow pulley, the third forearm elbow pulley is used to drive the forearm shell to rotate in a horizontal direction, the first forearm wrist pulley is connected to the first forearm elbow pulley in a transmission connection, the second forearm wrist pulley is connected to the second forearm elbow pulley in a transmission connection, and the second forearm wrist pulley is used to drive the first end effector to rotate in a horizontal direction.

[0024] Furthermore, the first forearm wrist pulley is coaxially provided with a bearing seat and an adapter plate, the second end effector is fixedly connected to one end of the adapter plate, the other end of the adapter plate is connected to the bearing seat, and the bearing seat is connected to the first forearm wrist pulley. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the overall structure of a substrate conveying device according to an embodiment of the present invention;

[0026] Figure 2 A schematic diagram of the internal structure of a substrate conveying device in an embodiment of the present invention;

[0027] Figure 3 It is a structural schematic diagram of a combined housing according to an embodiment of the present invention;

[0028] Figure 4 is a schematic diagram of a protective cover in an embodiment of the present invention;

[0029] Figure 5 is a schematic diagram of a retaining edge in an embodiment of the present invention;

[0030] Figure 6 A schematic diagram of a lifting member in an embodiment of the present invention;

[0031] Figure 7 is a schematic structural diagram of an arm in an embodiment of the present invention;

[0032] Figure 8 is a top view of an arm in an embodiment of the present invention;

[0033] Fig. 9 is a cross-sectional view of an arm in an embodiment of the present invention;

[0034] Fig.10 Schematic diagram of a pulley transmission mechanism according to an embodiment of the present invention;

[0035] Fig.11 for Fig.10 Schematic diagram of the middle pulley body;

[0036] Fig.12 is a schematic diagram of a fixed block in an embodiment of the present invention;

[0037] Fig.13 is a schematic diagram of an adjustment area in an embodiment of the present invention;

[0038] Fig.14 for Fig.13 A schematic diagram of the middle limiter;

[0039] Fig.15 It is a schematic diagram of the overall structure of the double transmission belt in an embodiment of the present invention;

[0040] Fig.16 is a schematic diagram of a fixing hole in an embodiment of the present invention;

[0041] Fig.17 Schematic diagram of the motion state of an arm in an embodiment of the present invention.

[0042] 1. main body; 2. lifter; 21. nut; 22. screw rod; 23. motor; 3. lifting assembly; 31. slide rail; 32. slider; 321. connection area; 4. drive assembly; 41. joint shell; 411. mounting cylinder; 4111. heat dissipation groove; 4112. heat dissipation port; 4113. shield; 412. fixing plate; 4121. mounting portion; 413. retaining edge; 42. first driver; 43. second driver; 44. third driver; 45. fourth driver; 5. boom main body; 51. boom shell; 52. boom spindle; 53. first boom main pulley; 54. second boom main pulley; 55. third boom main pulley; 56. first boom elbow pulley; 57. second boom elbow pulley; 58. third boom elbow pulley; 6. forearm main body; 61. forearm shell; 62. 2. Forearm spindle; 63. First forearm wrist pulley; 64. Second forearm wrist pulley; 65. First forearm elbow pulley; 66. Second forearm elbow pulley; 7. First end effector; 71. Bearing seat; 72. Adapter plate; 8. Drive main shaft; 81. First shaft; 82. Second shaft; 821. Second connecting disk; 83. Third shaft; 831. Third connecting disk; 84. Fourth shaft; 841. Fourth connecting disk; 9. Pulley body; 91. Double transmission belt; 911. Upper area; 912. Lower area; 913. Fixing hole; 914. Sinking connecting section; 915. Transition section; 916. Transmission body; 92. Sinking groove; 921. Transition slope; 93. Installation window; 94. Adjustment area; 95. Fixing piece; 951. Fixing part; 952. Limiting part; 96. Fixing block; 10. Second end effector. DETAILED DESCRIPTION

[0043] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with general skills in the field to which the present invention belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0044] The following is combined with Figure 1 - Attachment Fig.17 , the specific implementation modes of the present invention are further described in detail.

[0045] Reference Figure 1 and Figure 2 The substrate conveying device includes a main body 1, an arm pivotally connected to the main body 1, and a lifter 2 that drives the arm and the main body 1 to move relative to each other in a height direction. The main body 1 has a receiving space inside.

[0046] Reference Figure 2 The substrate conveying device further includes a lifting assembly 3, the lifting assembly 3 includes a slider 32 and a slide rail 31, and the slide rail 31 is arranged in the accommodation space along the height direction of the body 1. In the embodiment of the present invention, there are two slide rails 31, and the two slide rails 31 are arranged in parallel along the height direction of the body 1 and fixed inside the body 1. Each slide rail 31 has two sliders 32, and the sliders 32 are slidably connected to the slide rail 31, and a connection area 321 is formed between the two sliders 32 distributed in the height direction.

[0047] Reference Figure 2, a driving assembly 4 is arranged in the accommodating space, and the driving assembly 4 includes M power sources stacked in the height direction, and the power source is used to drive the joint rotation of the arm. A joint shell 41 is arranged on the outside of the N power sources corresponding to the connection area 321 in the horizontal direction among the M power sources. The bottom of the joint shell 41 is connected to the lifting end of the lifter 2, and the lifter 2 can drive the joint shell 41 to lift. The slider 32 is fixedly connected to the joint shell 41. Specifically, the joint shell 41 includes a mounting cylinder 411 and a fixing plate 412 located on the left and right sides of the mounting cylinder 411, and the fixing plate 412 is fixedly connected to the mounting cylinder 411, and the fixing plate 412 is respectively extended along the radial sides of the mounting cylinder 411. The upper and lower ends of the fixing plate 412 are provided with mounting parts 4121, and the fixing parts 4121 are fixedly installed and fixed to the slider 32. In this embodiment, a mounting hole is opened on the mounting part 4121, and the slider 32 is installed on the fixing plate 412 through the mounting hole. The combined shell 41 is used to carry N adjacent power sources close to the bottom of the combined shell 41 , and N≤M.

[0048] In some embodiments of the present invention, the M power sources are four power sources, the N power sources are three power sources, and the M power sources include a first driver 42, a second driver 43, a third driver 44, and a fourth driver 45, respectively. Among them, the second driver 43, the third driver 44, and the fourth driver 45 are arranged in the combined shell 41, and the first driver 42 is arranged on the top of the combined shell 41. N power sources are placed in the combined shell 41, and the number of placed is less than or equal to the total number of power sources M. By driving the N power sources, the M power sources can be driven to rise and fall synchronously, thereby realizing the integrated lifting of the power sources, and reducing the height of the combined shell 41, saving the size cost of the combined shell 41, and making the combined shell 41 more lightweight. In addition, the first driver 42 can be placed on the second driver 43 or on the top of the combined shell 41. It is placed on the top of the combined shell 41 and is not located inside the combined shell 41. For some drivers with large heat dissipation requirements, the combined shell 41 provided by the present invention can carry them for synchronous high-precision lifting and can meet their heat dissipation requirements.

[0049] Reference Figure 3 and Figure 4In some embodiments of the present invention, a screw groove is provided on one side of the joint housing 41 along the height direction, and the lifter 2 includes a nut 21, a screw 22 and a motor 23. The nut 21 is located on a nut connection seat, and the nut connection seat is fixedly connected to the bottom of the screw groove. The nut 21 is threadedly connected to the screw 22, and the screw 22 is located in the screw groove. The screw 22 is the core component of the lifting mechanism, and is engraved with a spiral thread and arranged along the height direction. The motor 23 is arranged on the side of the screw 22 away from the screw groove, and a motor 23 fixing seat is provided on the motor 23, and the motor 23 fixing seat is fixed to the bottom of the body 1. When the screw 22 rotates, the nut 21 performs linear motion along the axial direction of the screw 22. The precision thread matching of the screw 22 and the nut 21 can realize precise linear motion control, which is suitable for semiconductor equipment that requires precise positioning. In addition, the screw 22 lifting mechanism has a safety locking mechanism to prevent accidental descent or overload. The screw rod 22 lifting mechanism has low noise, low energy consumption, low maintenance cost and little impact on the environment during operation.

[0050] Reference Figure 5 In some embodiments of the present invention, a retaining edge 413 is provided on the circumference of the bottom end of the inner wall of the combined shell 41 to limit the driver located at the bottom layer.

[0051] The lifter 2 drives the combined housing 41 to drive the power source to move along the height direction of the body 1, thereby avoiding the problem of poor installation accuracy due to uneven power source size or combination stacking, which in turn leads to poor overall lifting accuracy. The lifter 2 drives the combined housing 41 to move, and the movement of the combined housing 41 drives the slider 32 to move along the extension direction of the slide rail 31, thereby driving multiple power sources to perform high-precision lifting.

[0052] A plurality of heat dissipation grooves 4111 are provided on the side wall of the combined shell 41, and the plurality of heat dissipation grooves 4111 form a heat dissipation zone. A plurality of heat dissipation ports 4112 are provided along the height direction of the heat dissipation zone. A shield 4113 with heat dissipation ports is also provided on the combined shell 41, and the shield 4113 is installed outside the heat dissipation zone. The grooves can increase the contact area between the combined shell 41 and the air, thereby improving the heat exchange efficiency. The plurality of heat dissipation ports 4112 provided along the height direction of the heat dissipation zone are helpful for the discharge of hot air, increase the air flow, and further improve the heat dissipation effect. The shield 4113 with heat dissipation ports is installed outside the heat dissipation zone. Such a design can protect the internal combined shell 41 from external damage, while performing effective heat exchange through the heat dissipation ports, and discharge the heat from the shield 4113, thereby optimizing the flow of hot air.

[0053] Reference Figure 1 and Figure 6The arm includes a main arm body 5, a lower arm body 6, a first end effector 7 and a second end effector 10. The main arm body 5 is hinged to the lower arm body 6 and has an elbow joint point. The other end of the main arm body 5 away from the hinge point has a shoulder joint point. The lower arm body 6 is hinged to the first end effector 7 and has a wrist joint point. The first end effector 7 is hinged to the second end effector 10. Therefore, a pulley transmission mechanism is provided between the shoulder joint point and the elbow joint point; the elbow joint point and the wrist joint, and the pulley transmission mechanism is used to transmit kinetic energy.

[0054] In the prior art, some robotic arms use a metal belt and pulley drive system to drive the rotation of the robotic arm. The metal belt is conventionally connected to the corresponding pulley by screws to transfer torque between the pulley and the belt. The conventional screw connection between the metal belt and the pulley limits the range of motion of the pulley, thereby limiting the rotation angle of the robotic arm and limiting the working range. Specifically, when the metal belt is wrapped and wound around the pulley, it will be interfered by the screw, resulting in limited movement of the metal belt, which in turn affects the rotation range of the pulley, thereby limiting the rotation angle of the robotic arm.

[0055] Reference Figure 10-15 In some embodiments of the present invention, in order to avoid affecting the motion range of the pulley, the pulley transmission mechanism includes two pulley bodies 9 and a double transmission belt 91. The outer circumference of the pulley body 9 is provided with a sinking groove 92 along the tangential direction. A fixing block 96 is arranged in the sinking groove 92. The fixing block 96 is located in the radial parallel direction of the pulley body 9. The length of the fixing block 96 extending radially from the pulley body 9 is less than the depth of the sinking groove 92. When the double transmission belt 91 is wound around the outer circumference of the pulley body 9 and covers the sinking groove 92, the edge of the double transmission belt 91 along the width direction keeps in contact with the outer circumference of the pulley body 9, and the projection of the area surrounded by the outer circumference of the pulley body 9 along the vertical direction covers the fixing block 96. The sinking groove 92 enables the double transmission belt 91 to cover the sinking groove 92 when it is wound around the outer circumference of the pulley body 9, thereby reducing the direct contact area between the transmission belt and the pulley body 9, thereby reducing the interference of the metal belt during the winding process and reducing the restriction on the motion range of the pulley. A fixing block 96 is provided in the sinking groove 92, and the length of the fixing block 96 extending radially from the pulley body 9 is less than the depth of the sinking groove 92. This design prevents the fixing block 96 from causing additional interference to the transmission belt, while the existence of the fixing block 96 can ensure the stable fixation of the transmission belt, avoiding the movement restriction caused by the direct contact between the screw and the transmission belt. The edge of the double transmission belt 91 along the width direction is in contact with the outer peripheral surface of the pulley body 9, which helps to increase the contact area between the transmission belt and the pulley body 1, thereby expanding the angle of the transmission belt wrapped around the pulley body 1, and obtaining a larger rotation angle. The sinking groove 92 is opened along the tangential direction, so that the transmission belt can be closer to the outer peripheral surface of the pulley body 9 when winding.

[0056] Reference Fig.10 In some embodiments of the present invention, the pulley body 9 has an upper layer area 911 and a lower layer area 912, and the double transmission belt 91 includes a first transmission belt and a second transmission belt, and the first transmission belt and the second transmission belt are fixedly connected to the upper layer area 911 and the lower layer area 912 respectively. The pulley body 9 is driven to rotate by the first transmission belt and the second transmission belt, and the torque is transmitted, thereby improving the transmission efficiency of the torque. In addition, since the first transmission belt and the second transmission belt act on different areas of the pulley body 9 respectively, they can jointly bear a greater torque. This way of distributing the load can improve the torque bearing capacity of the pulley body 9 and reduce the risk of damage caused by overload.

[0057] In some embodiments of the present invention, a transition slope 921 is smoothly connected between the bottom wall of the sinking groove 92 and the outer peripheral surface of the pulley body 9. The transition slope 921 is used to smoothly transition the height difference between the double transmission belt 91 and the sinking groove 92, so that the double transmission belt 91 is smoothly connected between the sinking groove 92 and the pulley body 9. The design of the transition slope 921 can reduce the wear and damage of the double transmission belt 91 when it transitions between the sinking groove 92 and the pulley body 9. The smooth transition slope 921 can avoid excessive stress concentration of the transmission belt at the height mutation point, thereby extending the service life of the transmission belt. In addition, the transition slope 921 ensures the smooth transition of the double transmission belt 91 on the pulley, avoiding the appearance of a coated area and a bulge on the coated area after the double transmission belt 91 is wound around once, which will limit the rotation range of the pulley and increase the wear of the transmission belt, thereby affecting the transmission accuracy of the pulley. Therefore, the transition slope 921 helps the double transmission belt 91 to move more smoothly on the pulley, improving the efficiency and accuracy of the transmission.

[0058] In some embodiments of the present invention, a mounting window 93 is provided on the bottom wall of the sinking trough 92, a fixing block 96 is fixedly connected to a fixing member 95, the fixing block 96 is movably arranged in the mounting window 93, an adjustment area 94 is arranged on the inner periphery of the pulley, and the adjustment area 94 has an upper opening. The fixing member 95 is arranged in the adjustment area 94, and the fixing member 95 is used to adjust the radial position of the fixing block 96 in the mounting window 93. The adjustment area 94 has an upper opening for placing the fixing member 95. Specifically, the fixing block 96 is movably arranged in the mounting window 93 through the fixing member 95, so that the fixing block 96 can change the radial position, thereby adjusting the tension of the dual transmission belt 91. Specifically, a threaded hole can be provided at the bottom of the fixing member 95, and the position of the fixing member 95 in the adjustment area 94 can be adjusted by a screw, thereby adjusting the specific position of the fixing block 96 in the mounting window 93.

[0059] The dual transmission belt 91 is provided with a fixing hole 913, a fixing block 96 is inserted in the fixing hole 913, the fixing block 96 includes a fixing portion 951 and a limiting portion 952, the fixing block 96 is arranged on the limiting portion 952, and the fixing portion 951 is movably arranged in the adjustment area 94. In other embodiments of the present invention, after the fixing block 96 is inserted in the fixing hole 913, a retaining spring is arranged on the fixing block 96, and the retaining spring is used for limiting, so that the dual transmission belt 91 can be prevented from axial displacement.

[0060] The double transmission belt 91 includes a sinking connection section 914, a transition section 915 and a transmission body 916 connected in sequence, a fixing hole 913 is provided on the sinking connection section 914, the width of the sinking connection section 914 is smaller than the width of the transmission body 916, the transition section 915 is smoothly connected between the sinking connection section 914 and the transmission body 916, and the width of the transition section 915 gradually widens from the sinking connection section 914 to the transmission body 916. The gradually widening width of the transition section 915 helps to avoid the formation of bulges or wrinkles at the sudden change of the width of the transmission belt, which may limit the rotation range of the pulley and increase the wear of the transmission belt.

[0061] Reference Figure 6-Figure 9In some embodiments of the present invention, a driving main shaft 8 is also included, and the driving main shaft 8 includes a first shaft 81, a second shaft 82, a third shaft 83 and a fourth shaft 84 which are radially sleeved in sequence from the outside to the inside. The first driver 42, the second driver 43, the third driver 44 and the fourth driver 45 are respectively used to drive the first shaft 81, the second shaft 82, the third shaft 83 and the fourth shaft 84 to rotate in sequence. The boom body 5 includes a boom shell 51 and a boom spindle 52 located in the boom shell 51, a first boom main pulley 53, a second boom main pulley 54, a third boom main pulley 55, a first boom elbow pulley 56, a second boom elbow pulley 57, and a third boom elbow pulley 58. The first shaft 81 is connected to the boom shell 51, the first boom main pulley 53 is transmission-connected with the first boom elbow pulley 56, the second boom main pulley 54 is transmission-connected with the second boom elbow pulley 57, the third boom main pulley 55 is transmission-connected with the third boom elbow pulley 58, and the fourth shaft 84 is used to drive the third boom main pulley 55 to rotate. The forearm body 6 includes a forearm housing 61 and a forearm spindle 62, a first forearm wrist pulley 63, a second forearm wrist pulley 64, a first forearm elbow pulley 65 and a second forearm elbow pulley 66 located in the forearm housing 61. The third arm elbow pulley 58 is used to drive the forearm housing 61 to rotate in the horizontal direction. The first forearm wrist pulley 63 is connected to the first forearm elbow pulley 65 by transmission. The second forearm wrist pulley 64 is connected to the second forearm elbow pulley 66 by transmission. The second forearm wrist pulley 64 is used to drive the first end effector 7 to rotate in the horizontal direction. The first forearm wrist pulley 63 is coaxially provided with a bearing seat 71 and an adapter plate 72. The second end effector 10 is fixedly connected to one end of the adapter plate 72. The other end of the adapter plate 72 is connected to the bearing seat 71, and the bearing seat 71 is connected to the first forearm wrist pulley 63. Among them, the pulley body 9 is the main pulley, wrist pulley and elbow pulley in this embodiment.

[0062] Specifically, when the arm body 5 needs to be driven to rotate: the first driver 42 drives the arm housing 51 to rotate in the horizontal direction through the first shaft 81;

[0063] When the forearm body 6 needs to be driven to rotate: the fourth driver 45 drives the fourth shaft 84 to rotate, the fourth shaft 84 is connected to the fourth connection disk 841, and the third large arm main pulley 55 is driven to rotate through the fourth connection disk 841, and the third large arm main pulley 55 drives the third large arm elbow pulley 58 to rotate through the double transmission belt 91, and the third large arm elbow pulley 58 drives the forearm housing 61 to rotate in the horizontal direction;

[0064] When it is necessary to drive the first end effector 7 to rotate: the second driver 43 drives the second shaft 82 to rotate, the second shaft 82 is connected to the second connection disk 821, and the first upper arm main pulley 53 is driven to rotate through the second connection disk 821, the first upper arm main pulley 53 drives the first upper arm elbow pulley 56 to rotate along the outer wall of the upper arm spindle 52 through the double transmission belt 91, the first upper arm elbow pulley 56 drives the second forearm elbow pulley 66 to rotate, the second forearm elbow pulley 66 drives the second forearm wrist pulley 64 to rotate through the double transmission belt 91, and the second forearm wrist pulley 64 drives the first end effector 7 to rotate in the horizontal direction;

[0065] When it is necessary to drive the second end effector 10 to rotate: the third driver 44 drives the third shaft 83 to rotate, the third shaft 83 is connected to the third connecting disk 831, and the second upper arm main pulley 54 is driven to rotate through the third connecting disk 831, the second upper arm main pulley 54 drives the second upper arm elbow pulley 57 to rotate through the double transmission belt 91, the second upper arm elbow pulley 57 drives the first forearm elbow pulley 65 to rotate, the first forearm elbow pulley 65 drives the first forearm wrist pulley 63 to rotate along the outer wall of the forearm spindle 62 through the double transmission belt 91, and the first forearm wrist pulley 63 drives the second end effector 10 to rotate through the bearing seat 71 and the adapter plate 72.

[0066] In addition, refer to Figure 1 By adding a driving main shaft 8, the upper arm, the lower arm and the two end effectors can move independently, which can be applied to a variety of working scenarios and improves the transmission accuracy.

[0067] In summary, the present invention integrates multiple power sources through the combined shell 41, and uses the lifter 2 to drive the combined shell 41 to drive the power source to move along the height direction of the main body 1, thereby avoiding the problem of poor installation accuracy due to the uneven size of the power source or the combination of stacking, which in turn leads to poor overall lifting accuracy. The lifter 2 realizes precise linear motion control through the precision thread matching of the screw rod 22 and the nut 21. The sliding connection between the slider 32 and the slide rail 31, and the connection area 321 between the sliders, ensure the synchronization of the power source during the lifting process, and improve the lifting accuracy. The independent action capabilities of each arm and actuator enable the robot arm to perform multiple tasks at the same time, improving work efficiency and versatility. The sinking groove 92 design of the pulley body 9 reduces the direct contact area between the metal belt and the pulley body 9 during the winding process, reduces the interference of the metal belt, and thus reduces the restriction on the motion range of the pulley. The design of the double transmission belt 91 includes a sinking connection section 914, a transition section 915 and a transmission body 916, so that the transmission belt can be more tightly wound on the pulley body 9, expanding the angle of the steel belt wrapping around the pulley, thereby obtaining a larger rotation angle. By expanding the rotation angle, the transmission efficiency of the pulley transmission mechanism is improved. At the same time, the smooth transition slope 921 ensures the smooth transition of the double transmission belt 91 on the pulley, improving the efficiency and accuracy of the transmission.

[0068] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. A substrate conveying device, comprising a body (1), an arm pivotally connected to the body (1), and a lifter (2) for driving the arm and the body (1) to move relative to each other in a height direction, wherein the body (1) has a receiving space inside, and is characterized in that: The substrate conveying device comprises: A lifting assembly (3), comprising a slide rail (31) and a slider (32), wherein the slide rail (31) is arranged in the accommodation space along the height direction of the body (1), the sliders (32) are two and slidably connected to the slide rail (31), a connection area (321) is formed between the two sliders (32), the slide rail (31) is fixedly connected to the inside of the body (1), and the lifter (2) is fixedly connected to the bottom of the body (1); A drive assembly (4) is arranged in the accommodating space, the drive assembly (4) comprising M power sources stacked in a height direction, the power sources being used to drive the joints of the arm to rotate, and a joint housing (41) is arranged outside N power sources corresponding to the connection area (321) in a horizontal direction among the M power sources; The bottom of the combined shell (41) is connected to the lifter (2), the slider (32) is fixedly connected to the combined shell (41), and the combined shell (41) is used to carry N adjacent power sources close to the bottom of the combined shell (41), and N≤M; The arm comprises an upper arm body (5), a lower arm body (6), a first end effector (7) and a second end effector (10); the upper arm body (5) is hinged to the lower arm body (6) and has an elbow joint point; the other end of the upper arm body (5) away from the hinge point has a shoulder joint point; the lower arm body (6) is hinged to the first end effector (7) and has a wrist joint point; the first end effector (7) is hinged to the second end effector (10); a pulley transmission mechanism is provided between adjacent joint points, and the pulley transmission mechanism is used to transmit kinetic energy; The pulley transmission mechanism comprises two pulley bodies (9) and a double transmission belt (91); the outer circumferential surface of the pulley body (9) is provided with a sinking groove (92) along a tangential direction; a fixing block (96) is arranged in the sinking groove (92); the fixing block (96) is located in a radially parallel direction of the pulley body (9); and the length of the fixing block (96) extending radially from the pulley body (9) is less than the depth of the sinking groove (92); When the double transmission belt (91) is wound around the outer peripheral surface of the pulley body (9) and covers the sinking groove (92), the edge of the double transmission belt (91) along the width direction maintains contact with the outer peripheral surface of the pulley body (9), and the projection of the area enclosed by the outer peripheral surface of the pulley body (9) along the vertical direction covers the fixed block (96).

2. The substrate conveying device according to claim 1, characterized in that: The combined housing (41) comprises a mounting cylinder (411) and a fixing plate (412), wherein the fixing plates (412) are respectively extended along two radial sides of the mounting cylinder (411), the fixing plates (412) are fixedly connected to the mounting cylinder (411), and the fixing plates (412) are fixedly connected to the sliding block (32).

3. The substrate conveying device according to claim 2, characterized in that: A plurality of heat dissipation grooves (4111) are provided on the side wall of the combined shell (41), the plurality of heat dissipation grooves (4111) forming a heat dissipation zone, a plurality of heat dissipation openings (4112) are provided along the height direction of the heat dissipation zone, and a protective cover (4113) with heat dissipation holes is also provided on the combined shell (41), the protective cover (4113) being installed outside the heat dissipation zone.

4. The substrate conveying device according to claim 1, characterized in that: The pulley body (9) comprises an upper region (911) and a lower region (912); the double transmission belt (91) comprises a first transmission belt and a second transmission belt; the first transmission belt and the second transmission belt are respectively fixedly connected to the upper region (911) and the lower region (912).

5. The substrate conveying device according to claim 4, characterized in that: A transition slope is smoothly connected between the bottom wall of the sinking groove (92) and the outer peripheral surface of the pulley body (9).

6. The substrate conveying device according to claim 4, characterized in that: The bottom wall of the sinking groove (92) is provided with an installation window (93), the fixing block (96) is fixedly connected to a fixing member (95), the fixing block (96) is movably arranged in the installation window (93), the inner periphery of the pulley body (9) is provided with an adjustment area (94), the fixing member (95) is arranged in the adjustment area (94), and the fixing member (95) is used to adjust the radial position of the fixing block (96) in the installation window (93).

7. The substrate conveying device according to claim 6, characterized in that: The double transmission belt (91) is provided with a fixing hole (913), the fixing block (96) is inserted into the fixing hole (913), the fixing block (96) comprises a fixing portion (951) and a limiting portion (952), the fixing portion (951) is fixedly connected to the limiting portion (952), and the fixing portion (951) is movably arranged in the adjustment area (94).

8. The substrate conveying device according to claim 7, characterized in that: The double transmission belt (91) comprises a sinking connection section (914), a transition section (915) and a transmission body (916) which are connected in sequence, the fixing hole (913) is provided on the sinking connection section (914), the width of the sinking connection section (914) is smaller than the width of the transmission body (916), the transition section (915) is smoothly connected between the sinking connection section (914) and the transmission body (916), and the width of the transition section (915) gradually widens along the direction from the sinking connection section (914) to the transmission body (916).

9. The substrate conveying device according to claim 1, characterized in that: The invention also comprises a driving main shaft (8), wherein the driving main shaft (8) comprises a first shaft (81), a second shaft (82), a third shaft (83) and a fourth shaft (84) which are radially sleeved in sequence from the outside to the inside, and the M power sources comprise a first driver (42), a second driver (43), a third driver (44) and a fourth driver (45), wherein the first driver (42), the second driver (43), the third driver (44) and the fourth driver (45) are respectively used to drive the first shaft (81), the second shaft (82), the third shaft (83) and the fourth shaft (84) to rotate respectively.

10. The substrate conveying device according to claim 9, characterized in that: The boom body (5) comprises a boom housing (51) and a boom spindle (52), a first boom main pulley (53), a second boom main pulley (54), a third boom main pulley (55), a first boom elbow pulley (56), a second boom elbow pulley (57), and a third boom elbow pulley (58) located in the boom housing (51); the first shaft (81) is connected to the boom housing (51); the first boom main pulley (53) is transmission-connected to the first boom elbow pulley (56); the second boom main pulley (54) is transmission-connected to the second boom elbow pulley (57); the third boom main pulley (55) is transmission-connected to the third boom elbow pulley (58); and the fourth shaft (84) is used for driving the third boom main pulley (55) to rotate.

11. The substrate conveying device according to claim 10, characterized in that: The forearm body (6) comprises a forearm housing (61) and a forearm spindle (62) located in the forearm housing (61), a first forearm wrist pulley (63), a second forearm wrist pulley (64), a first forearm elbow pulley (65) and a second forearm elbow pulley (66); the third forearm elbow pulley (58) is used to drive the forearm housing (61) to rotate in a horizontal direction; the first forearm wrist pulley (63) is transmission-connected to the first forearm elbow pulley (65); the second forearm wrist pulley (64) is transmission-connected to the second forearm elbow pulley (66); and the second forearm wrist pulley (64) is used to drive the first end effector (7) to rotate in a horizontal direction.

12. The substrate conveying device according to claim 11, characterized in that: The first forearm wrist pulley (63) is coaxially provided with a bearing seat (71) and an adapter plate (72); the second end effector (10) is fixedly connected to one end of the adapter plate (72); the other end of the adapter plate (72) is connected to the bearing seat (71); and the bearing seat (71) is connected to the first forearm wrist pulley (63).

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