Material transportation system structure

Abstract

A material transportation system structure comprises a plurality of lower-layer rails, a plurality of lower-layer rails and a plurality of lower-layer rails, the lower-layer rails are used for a transportation trolley to pass through, each lower-layer rail comprises a first main rail and a plurality of first branch rails, and a first rail notch is formed in each first branch rail; the high-layer rails are located above the low-layer rails, the high-layer rails are used for passing of the conveying trolley, each high-layer rail comprises a second main rail and a plurality of second branch rails, and each second branch rail is internally provided with a second rail notch; and the movable rails are used for passing or storing transport trolleys, the movable rails are located at the first rail notches or the second rail notches and communicated with the low-layer rails or the high-layer rails, and the movable rails can move between the first rail notches and the second rail notches. According to the material transportation system structure, the transportation efficiency of the transportation track is improved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a material transportation system structure. Background Art

[0002] With the continuous development of semiconductor technology, the process flow required for advanced semiconductor manufacturing processes is becoming more and more complex, and the demand for equipment and personnel is gradually increasing. At present, wafer manufacturers widely use the automated material handling system AMHS (Automated Material Handling System) to assist in material handling in semiconductor manufacturing processes.

[0003] The hardware facilities of the automated material transfer system mainly include tracks, transfer carts, etc. As the scope of automatic transfer expands, the number of tracks that need to be laid by AMHS increases, and the demand for plane space increases. However, the unit cost of the clean room plant for integrated circuit manufacturing is extremely high. In order to effectively utilize the clean room area, the AMHS double-layer track layout is now commonly used.

[0004] However, under the existing layout of transportation tracks, the transportation efficiency of double-decker tracks still needs to be improved. Summary of the invention

[0005] The technical problem solved by the present invention is to provide a material transportation system structure, which improves the transportation efficiency of the transportation track and increases the layout flexibility and compatibility of the transportation track.

[0006] In order to solve the above technical problems, the technical solution of the present invention provides a material transportation system structure, including: a plurality of low-level rails, the low-level rails are used for the passage of transport trolleys, each of the low-level rails includes a first main rail and a plurality of first branch rails, each of the first branch rails has a first rail gap; a plurality of high-level rails located above the low-level rails, the high-level rails are used for the passage of transport trolleys, each of the high-level rails includes a second main rail and a plurality of second branch rails, each of the second branch rails has a second rail gap; a plurality of movable rails, the movable rails are used for the passage or storage of transport trolleys, each movable rail is located at the first rail gap or the second rail gap and is connected to the low-level rail or the high-level rail, and the movable rail is movable between the first rail gap and the second rail gap.

[0007] Optionally, the first branch rail further includes: two separate first connecting rails, each first connecting rail is connected to the first main rail respectively, and the first rail gap is located between the two first connecting rails.

[0008] Optionally, a surface of the first connecting rail exposed by the first rail notch has a first fixing member; when the movable rail is located at the first rail notch, the first fixing member is used to fix the movable rail to the first connecting rail.

[0009] Optionally, the first main track includes a plurality of first transport areas, each first transport area corresponds to a first branch track, and the difference between the length of the first transport area and the length of the first track gap included in the corresponding first branch track ranges from 2 meters to 6 meters.

[0010] Optionally, the second branch rail further includes: two separate second connecting rails, each second connecting rail is connected to the second main rail respectively, and the second rail gap is located between the two second connecting rails.

[0011] Optionally, a second fixing member is provided on the surface of the second connecting rail exposed by the second rail notch; when the movable rail is located at the second rail notch, the second fixing member is used to fix the movable rail to the second connecting rail.

[0012] Optionally, the second main track includes a plurality of second transport areas, each second transport area corresponds to a second branch track, and the difference between the length of the second transport area and the length of the second track gap included in the corresponding second branch track is in the range of 2 meters to 6 meters.

[0013] Optionally, the surface of the movable track has a third fixing member; when the transport trolley is located on the movable track, the third fixing member is used to fix the transport trolley to the movable track.

[0014] Optionally, each low-level track includes one or more first branch tracks; each high-level track includes one or more second branch tracks.

[0015] Optionally, a projection pattern of the second track gap on the surface of the first track coincides with the first track gap.

[0016] Optionally, the material transportation system structure also includes: a top plate located above the high-level rail; a lifting rope is fixed on the top plate, the other end of the lifting rope is fixed to the movable rail, and the lifting rope is used to move the movable rail between the first rail gap or the second rail gap.

[0017] Compared with the prior art, the technical solution of the embodiment of the present invention has the following beneficial effects:

[0018] The material transport system structure provided by the technical solution of the present invention includes a movable track, and the movable track can move between the first track gap and the second track gap, so that the movable track can smoothly transfer the transport trolley between the high-level track and the low-level track after the transport trolley passes or is stored. The method of transferring the transport trolley by the movable track can realize the simultaneous up and down transmission of multiple transport trolleys without affecting the transport capacity of the first main track of the high-level track and the transport capacity of the second main track of the low-level track, thereby improving the transmission efficiency. In addition, the length of the movable track can be designed according to the actual situation, with greater flexibility and controllable cost, and can be compatible with any high-level track or low-level track with up and down transmission requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figures 1 to 5 is a structural schematic diagram of a material transportation system structure according to an embodiment of the present invention;

[0020] Figures 6 to 8 yes Figures 1 to 5 Schematic diagram of the material transportation system structure during operation. DETAILED DESCRIPTION

[0021] As described in the background technology, the hardware facilities of the automated material transfer system mainly include tracks, transfer carts, etc. As the scope of automatic transfer expands, the number of tracks that need to be laid by AMHS increases, and the demand for plane space area increases. However, the unit area cost of the clean room plant for integrated circuit manufacturing is extremely high. In order to effectively utilize the clean room area, the layout of the AMHS double-layer track is now commonly used.

[0022] However, under the existing layout of transport tracks, the transport efficiency of double-decker tracks still needs to be improved. Setting up transport tracks between high and low tracks is costly and has poor flexibility.

[0023] In order to solve the above technical problems, the technical solution of the present invention provides a material transportation system structure, which includes a plurality of movable rails, and each movable rail can move between the first rail gap and the second rail gap, so that the movable rail can smoothly transfer the transport trolley between the high-level rail and the low-level rail after the transport trolley passes or is stored. The method of transferring the transport trolley by the movable rail can realize the simultaneous up and down transmission of multiple transport trolleys without affecting the transportation capacity of the first main rail of the high-level rail and the transportation capacity of the second main rail of the low-level rail, thereby improving the transmission efficiency. In addition, the length of the movable rail can be designed according to the actual situation, with greater flexibility and controllable cost, and can be compatible with any high-level rail or low-level rail with up and down transmission requirements.

[0024] In order to make the above-mentioned objects, features and beneficial effects of the present invention more obvious and easy to understand, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0025] Figures 1 to 5 It is a structural schematic diagram of the material transportation system structure of an embodiment of the present invention.

[0026] Please refer to Figures 1 to 5 ,in, Figure 1 A top view of the lower track 101 of the material transportation system structure is shown. Figure 2 for Figure 1 Enlarged view of the middle X area; Figure 3 A top view of the high-level track 102 of the material transportation system structure is shown. Figure 4 for Figure 3 Enlarged view of the middle Y region; Figure 5 The overall top view of the material transportation system structure

[0027] The material transportation system structure includes: a plurality of low-level rails 101, wherein the low-level rails 101 are used for passing the transport trolley 120, each of the low-level rails 101 includes a first main rail A and a plurality of first branch rails B, each of the first branch rails B having a first rail gap b2; a plurality of high-level rails 102 located above the low-level rails 101, wherein the high-level rails 102 are used for passing the transport trolley 120, each of the high-level rails 102 includes a second main rail C and a plurality of second branch rails D, each of the second branch rails D having a second rail gap d2; a plurality of movable rails 110, wherein the movable rails 110 are used for passing or storing the transport trolley 120, each of the movable rails 110 is located at the first rail gap b2 or the second rail gap d2 and is connected to the low-level rail 101 or the high-level rail 102, and the movable rail 110 is movable between the first rail gap b2 and the second rail gap d2.

[0028] The transport cart 120 is used to transport materials required in the semiconductor manufacturing process, and the materials include wafers.

[0029] In this embodiment, the material transportation system structure includes a movable rail 110, and the movable rail 110 can move between the first rail gap b2 and the second rail gap d2, so that after the movable rail 110 passes or stores the transport trolley 120, multiple transport trolleys 120 can be smoothly transferred between the high-level rail 102 and the low-level rail 101 at the same time. Since the movable rail 110 moves between the first branch rail B and the second branch rail D, the method of transferring the transport trolley 120 through the movable rail 110 can realize the simultaneous up and down transmission of multiple transport trolleys 120 without affecting the transportation capacity of the first main rail A of the high-level rail 102 and the transportation capacity of the second main rail C of the low-level rail 101, thereby improving the transmission efficiency. In addition, the length of the movable rail 110 can be designed according to actual conditions, the applicable scene is more flexible, the cost is controllable, and it can be compatible with any high-level rail 102 or low-level rail 101 with up and down transmission requirements.

[0030] Please refer to Figure 2 The first branch track B also includes: two separate first connecting rails b1, each first connecting rail b1 is connected to the first main track A respectively, and the first track gap b2 is located between the two first connecting rails b1.

[0031] It should be noted that, for ease of understanding, Figure 2 FIG. 4 shows a schematic structural diagram of the first main track A and the first branch track B when the movable track 110 is located at the first track gap b2.

[0032] The first main track A includes a plurality of first transport areas a1, each of which corresponds to a first branch track B. In this embodiment, the difference between the length D1 of the first transport area a1 and the length D2 of the first track gap b2 of the corresponding first branch track B is in the range of 2 meters to 6 meters.

[0033] In this embodiment, the first connecting rail b1 is an arc-shaped rail. The surface of the first connecting rail b1 exposed by the first rail notch b2 has a first fixing member (not shown); when the movable rail 110 is located at the first rail notch b2, the first fixing member is used to fix the movable rail 110 to the first connecting rail b1.

[0034] Please refer to Figure 4 The second branch track D also includes: two separate second connecting rails d1, each second connecting rail d1 is connected to the second main track C respectively, and the second track gap d2 is located between the two second connecting rails d1.

[0035] It should be noted that, for ease of understanding, Figure 4FIG. 4 shows a schematic structural diagram of the second main track C and the second branch track D when the movable track 110 is located in the second track gap d2.

[0036] The second main track C includes a plurality of second transport areas c1, each second transport area c1 corresponds to a second branch track D, and the difference between the length of the second transport area c1 and the length of the second track gap d2 included in the corresponding second branch track D ranges from 2 meters to 6 meters.

[0037] In this embodiment, the projection pattern of the second track gap d2 on the surface of the first track B coincides with the first track gap b2, so that the movable track 110 can move up and down between the first track gap b2 and the second track gap d2, thereby realizing efficient transportation of the transport trolley 120 between the low-level track 101 and the high-level track 102.

[0038] In this embodiment, the surface of the second connecting rail d1 exposed by the second rail notch d2 has a second fixing member (not shown); when the movable rail 110 is located at the second rail notch d2, the second fixing member is used to fix the movable rail 110 to the second connecting rail d1.

[0039] In this embodiment, the surface of the movable rail 110 has a third fixing member (not shown); when the transport trolley 120 is located on the movable rail 110, the third fixing member is used to fix the transport trolley 120 to the movable rail 110, so that when the movable rail 110 moves up and down, the transport trolley 120 can be stable on the movable rail 110, avoiding the transport trolleys 120 from colliding with each other or falling off the track.

[0040] In this embodiment, each lower track 101 includes one first branch track B; each upper track 102 includes one second branch track D.

[0041] In other embodiments, each lower track may include a plurality of first branch tracks; and each upper track may include a plurality of second branch tracks.

[0042] In this embodiment, the material transportation system structure further includes: a top plate (not shown) located above the high-level track 102; a suspension rope 130 (such as Figure 7 As shown), the other end of the hanging rope 130 is fixed to the movable rail 110, and the hanging rope 130 is used to move the movable rail 110 between the first rail gap b2 or the second rail gap d2.

[0043] In other embodiments, the material transportation system structure further includes an elevator, and the elevator is used to move the movable rail between the first rail gap or the second rail gap.

[0044] In this embodiment, the length of the movable track 110 is between 800 mm and 1200 mm. The lengths of the first main track A and the second main track C are respectively greater than 3000 mm.

[0045] In other embodiments, the length of the movable track, the length of the first main track, and the length of the second main track can be changed according to actual needs to adapt to the needs of the material transportation system structure.

[0046] Figures 6 to 8 yes Figures 1 to 5 The schematic diagram of the material transportation system structure during operation. Figure 6 is a schematic diagram of the structure when the movable track 110 is located on the lower track 101, Figure 7 It is a schematic diagram of the structure when the movable track 110 moves between the low-level track 101 and the high-level track 102. Figure 8 It is a schematic diagram of the structure when the movable track 110 is located on the high-level track 102. Figure 6 still Figure 5 Schematic diagram of the cross-sectional structure along the EE' direction.

[0047] Please refer to Figure 6 When the material transportation system structure is in the process of transporting materials, it is necessary to transport the transport trolley 120 from the lower track 101 to the upper track 102. The movable track 110 is first located in the first track gap b2 and is connected to the lower track 101. At this time, a number of transport trolleys 120 on the first main track A on the lower track 101 first enter the first branch track B, and enter the movable track 110 via the first connecting track b1; the movable track 110 fixes the transport trolley 120 through a third fixing member (not shown).

[0048] Please refer to Figure 7 When the transport trolley 120 is fixed on the movable rail 110, the movable rail 110 is lifted upward by the suspension rope 130 fixed to the top plate, so that the movable rail 110 moves from the lower rail 101 to the second rail gap d2 of the upper rail 102. In this process, each transport trolley 120 is always stably fixed on the movable rail 110.

[0049] Please refer to Figure 8, the movable rail 110 enters the second rail gap d2 of the upper rail 102 and communicates with the upper rail 102, and the movable rail 110 is fixed to the second connecting rail d1 through a second fixing member (not shown). At this time, the third fixing member on the movable rail 110 is opened, so that the transport trolley 120 enters the second main rail C through the second connecting rail d1, thereby completing the transportation of the transport trolley 120 from the lower rail 101 to the upper rail 102.

[0050] Similarly, when the transport trolley 120 needs to be transported from the high-level track 102 to the low-level track 101, the track operation mode is the same as Figures 6 to 8 The method is similar to .

[0051] In this embodiment, the method of transferring the transport trolley 120 through the movable track 110 can realize the simultaneous transmission of multiple transport trolleys 120 between the high-level track 102 and the low-level track 101 without affecting the transport capacity of the first main track A of the high-level track 102 and the transport capacity of the second main track C of the low-level track 101, thereby improving the transmission efficiency. In addition, the length of the movable track 110 can be designed according to actual conditions, the applicable scene is more flexible, the cost is controllable, and it can be compatible with any high-level track 102 or low-level track 101 with up and down transmission requirements.

[0052] Although the present invention is disclosed as above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the scope defined by the claims.

Claims

1. A material transportation system structure, characterized in that: include: A plurality of low-level rails, the low-level rails are used for passing the transport trolley, each of the low-level rails includes a first main rail and a plurality of first branch rails, each of the first branch rails has a first rail gap; a plurality of high-level rails located above the low-level rails, the high-level rails are used for passing the transport trolley, each of the high-level rails includes a second main rail and a plurality of second branch rails, each of the second branch rails has a second rail gap; A plurality of movable rails are provided, wherein the movable rails are used for passing or storing transport trolleys, each movable rail is located at the first rail gap or the second rail gap and is connected to the lower rail or the upper rail, and the movable rail is movable between the first rail gap and the second rail gap.

2. The material transport system structure according to claim 1, characterized in that: The first branch track also includes: two separate first connecting rails, each of which is connected to the first main track respectively, and the first track gap is located between the two first connecting rails.

3. The material transport system structure according to claim 2, characterized in that: The surface of the first connecting rail exposed by the first rail notch has a first fixing member; when the movable rail is located at the first rail notch, the first fixing member is used to fix the movable rail to the first connecting rail.

4. The material transport system structure according to claim 2, characterized in that: The first main track includes a plurality of first transport areas, each first transport area corresponds to a first branch track, and the difference between the length of the first transport area and the length of the first track gap included in the corresponding first branch track ranges from 2 meters to 6 meters.

5. The material transport system structure according to claim 1, characterized in that: The second branch track also includes: two separate second connecting rails, each second connecting rail is connected to the second main track respectively, and the second track gap is located between the two second connecting rails.

6. The material transport system structure according to claim 5, characterized in that: The surface of the second connecting rail exposed by the second rail notch has a second fixing member; when the movable rail is located at the second rail notch, the second fixing member is used to fix the movable rail to the second connecting rail.

7. The material transport system structure according to claim 5, characterized in that: The second main track includes a plurality of second transport areas, each second transport area corresponds to a second branch track, and the difference between the length of the second transport area and the length of the second track gap included in the corresponding second branch track ranges from 2 meters to 6 meters.

8. The material transport system structure according to claim 1, characterized in that: The surface of the movable track is provided with a third fixing member; when the transport trolley is located on the movable track, the third fixing member is used to fix the transport trolley to the movable track.

9. The material transport system structure according to claim 1, characterized in that: Each low-level track includes one or more first branch tracks; each high-level track includes one or more second branch tracks.

10. The material transport system structure according to claim 1, characterized in that: The projection pattern of the second track gap on the surface of the first track coincides with the first track gap.

11. The material transport system structure according to claim 1, characterized in that: The material transportation system structure also includes: a top plate located above the high-level track; a suspension rope is fixed to the top plate, the other end of the suspension rope is fixed to the movable track, and the suspension rope is used to move the movable track between the first track gap or the second track gap.

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