Cavity lifting system and semiconductor process equipment

Abstract

The invention provides a cavity lifting system and semiconductor process equipment. The cavity lifting system comprises a cavity, an upper cover, an upper frame and a lifting driving system. The lifting driving system comprises a driving mechanism, a plurality of guide columns, at least two driving lifting mechanisms and at least two driven lifting guide shafts. And the lifting driving system is used for lifting the upper cover, so that the upper cover and the cavity are separated or closed. Each driving lifting mechanism and each driven lifting guide shaft are coaxially connected with the corresponding guide column; the driving mechanism is mounted on the lower surface of the upper frame; the driving mechanism distributes the force of a power source to a plurality of transmission routes through the transmission mechanism, and the equipment constitution of all the transmission routes is the same, so that the same speed and the equal force energy of a plurality of lifting mechanisms are realized, and the synchronous lifting motion of each active lifting mechanism is ensured.

Description

Technical Field

[0001] The invention relates to semiconductor process equipment, in particular to a cavity lifting system. Background Art

[0002] In the prior art, the reaction chamber cover components in high-capacity semiconductor process equipment such as CVD equipment are lifted and lowered by four independent lifting systems due to their heavy weight, center of gravity offset caused by many components, and hexagonal geometry.

[0003] However, a common problem in the above-mentioned lifting devices is that the four lifting systems have high manufacturing precision, but the accuracy of the installation process is difficult to control, so jamming, creeping, and overloading are very likely to occur during actual lifting and use; at the same time, the four servo drive systems are independently controlled from each other, and the execution terminal has no process detection device, resulting in synchronization deviation, which causes wear of the lifting system and reduces the service life of the equipment. Summary of the invention

[0004] In order to overcome the problem of synchronization deviation caused by multiple servo drive systems independently controlling lifting devices, the present invention provides a cavity lifting system and semiconductor process equipment.

[0005] The present invention provides a cavity lifting system, comprising: a cavity, an upper cover, an upper frame and a lifting drive system.

[0006] The lifting drive system includes a driving mechanism, a plurality of guide pillars, at least two active lifting mechanisms and at least two driven lifting guide shafts. The lifting drive system is used to lift the upper cover to separate or close the upper cover from the cavity.

[0007] Each of the active lifting mechanisms and each of the driven lifting guide shafts are coaxially connected to the corresponding guide column; the driving mechanism is installed on the lower surface of the upper frame; the driving mechanism distributes a power source to multiple transmission routes with equal force energy to ensure that the at least two active lifting mechanisms perform lifting movements synchronously, wherein each transmission route drives a corresponding active lifting mechanism to perform lifting movements, and the at least two driven lifting guide shafts perform synchronous lifting movements together with the at least two active lifting mechanisms under the drive of the at least two active lifting mechanisms.

[0008] In one embodiment, the upper cover has a plurality of outer guide structures, and the positions of the plurality of outer guide structures correspond one by one to the positions of a plurality of fixed blocks on the outer side surface of the cavity; the lower end of the guide column is fixed in the fixed block, and the guide column is coaxially connected with the active lifting mechanism and the driven lifting guide shaft after passing through the outer guide structure; a limiting mechanism is provided at the upper end of the guide column connected to the active lifting mechanism; the upper cover is movable up and down along the guide column; the position of the limiting mechanism limits the stroke of the upper cover; and the upper frame also performs lifting and lowering actions under the limitation of the limiting mechanism.

[0009] In one embodiment, each of the active lifting mechanisms includes a screw rod and a nut; the upper end of the screw rod is connected to the driving mechanism installed below the upper frame, and the lower end of the screw rod is arranged in the guide column; the nut is fixed on the limiting structure.

[0010] In one embodiment, the upper end of each driven lifting guide shaft has a flexible connection portion flexibly connected to the upper frame, and the lower end of each driven lifting guide shaft is arranged on the guide column; the bearing of the lifting guide shaft is fixed on the upper end of the guide column.

[0011] In one embodiment, the flexible connection portion includes: a plurality of springs, a plurality of bolts and a flange.

[0012] The flange is provided with a bolt installation hole corresponding to the bolt, and there is a gap between the bolt and the bolt installation hole.

[0013] The spring is mounted between the flange and a frame mounting plate of the upper frame.

[0014] The bolts correspond to the springs one by one, and the bolts pass through the corresponding springs to connect the flange and the frame mounting plate, and pre-compress the springs.

[0015] The deflection of the driven lifting guide shaft in the radial direction is responded to by the compression of the spring, and the movement in the horizontal direction is offset by the gap between the bolt and the bolt mounting hole.

[0016] In one embodiment, the plurality of springs are evenly distributed around the circumference.

[0017] In one embodiment, the lifting drive system also includes a fixed plate and a plurality of columns; the fixed plate is located between the upper cover and the upper frame, and serves as a lower mounting base for the driving motor in the driving mechanism; the column passes through the fixed plate, the upper end of the column is fixed to the upper frame, and the lower end of the column is fixed to the upper cover.

[0018] In one embodiment, the driving mechanism includes a driving motor, a torque protector, a transfer case, and at least two transmission paths.

[0019] The torque protector is connected between the drive motor and the transfer case.

[0020] The transfer case divides the power source output by the drive motor into at least two output paths, and each output path is transmitted to one of the at least two transmission paths.

[0021] In one embodiment, each of the transmission paths comprises a transmission shaft, a coupling, a right-angle transmission and a worm gear elevator connected in sequence.

[0022] The worm gear elevator is connected to the upper end of the lead screw of the active lifting mechanism to drive the active lifting mechanism to perform lifting motion. The worm gear elevator is also equipped with an encoder to realize real-time detection of the active lifting mechanism.

[0023] In one embodiment, the transfer case is a T-type transfer case; the number of the at least two transmission paths is two, and the number of the at least two active lifting mechanisms is two.

[0024] In one embodiment, the driving motor is mounted on a vertical mounting plate, the lower portion of the vertical mounting plate is fixed on a fixing plate, and the upper portion of the vertical mounting plate is fixedly connected to the upper frame.

[0025] The present invention also provides a semiconductor process equipment, comprising the cavity lifting system as described above.

[0026] The cavity lifting system and semiconductor process equipment of the present invention have the following technical effects:

[0027] Firstly, each transmission path of the driving mechanism of the present invention is composed of exactly the same components, so that the speed and force they transmit are completely synchronous and symmetrical. At the same time, the present invention adopts a single power input design (including only one driving motor) to ensure the synchronization and stability of the lifting drive system, and avoid the occurrence of jamming, deflection, and even jamming caused by the difference in lifting speed during the lifting process; at the same time, high synchronization will not cause additional unbalanced loads on the lifting parts and deteriorate the stress conditions, thereby greatly extending the service life and maintenance cycle of the lifting system.

[0028] Secondly, the present invention adopts a combination of two active lifts (active lifting mechanism) and two auxiliary guides (driven lifting guide shafts), which can ensure high synchronization during the lifting process while stabilizing the posture of the upper cover plate to achieve a smooth lifting process; at the same time, the fixed end (upper end) of the guide shaft adopts a flexible connection to avoid installation difficulties caused by multiple rigid connection positioning; and timely adjust the offset and inclination of the lifting process.

[0029] Thirdly, the worm gear elevator of the present invention adds an encoder, thereby realizing real-time detection of the lifting mechanism, forming an effective closed-loop control, and avoiding loss of control and jamming of the lifting mechanism caused by open-loop control or no detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] The above invention content and the following specific embodiments of the present invention will be better understood when read in conjunction with the accompanying drawings. It should be noted that the accompanying drawings are only examples of the claimed invention. In the accompanying drawings, the same reference numerals represent the same or similar elements.

[0031] Figure 1 A schematic diagram of a cavity lifting system according to an embodiment of the present invention is shown;

[0032] Figure 2 A schematic diagram showing a driving mechanism according to an embodiment of the present invention;

[0033] Figure 3 A schematic structural diagram of a worm gear lift according to an embodiment of the present invention is shown;

[0034] Figure 4 A schematic diagram of a flexible connection between the upper end of a driven lifting guide shaft and an upper frame according to an embodiment of the present invention is shown. DETAILED DESCRIPTION

[0035] The detailed features and advantages of the present invention are described in detail in the specific embodiments below, and the content is sufficient to enable any person skilled in the art to understand the technical content of the present invention and implement it accordingly, and according to the description, claims and drawings disclosed in this specification, those skilled in the art can easily understand the relevant purposes and advantages of the present invention. Although the description of the present invention will be introduced in conjunction with the preferred embodiment, this does not mean that the features of this invention are limited to this embodiment. On the contrary, the purpose of introducing the invention in conjunction with the embodiment is to cover other options or modifications that may be extended based on the claims of the present invention. In order to provide a deep understanding of the present invention, many specific details will be included in the following description. The present invention can also be implemented without using these details. In addition, in order to avoid confusion or blurring the focus of the present invention, some specific details will be omitted in the description.

[0036] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0037] In addition, the terms "upper", "lower", "left", "right", "top", "bottom", "horizontal" and "vertical" used in the following description should be understood as the directions shown in the paragraph and the related drawings. Such relative terms are only used for the convenience of description and do not mean that the device described therein must be manufactured or operated in a specific direction, and therefore should not be understood as limiting the present invention.

[0038] It is understood that although the terms "first", "second", "third", etc. may be used herein to describe various components, channels, components, regions, layers and / or parts, these components, channels, components, regions, layers and / or parts should not be limited by these terms, and these terms are only used to distinguish different components, channels, components, regions, layers and / or parts. In addition, the terms "first", "second", "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0039] As shown in this application and claims, unless the context clearly indicates an exception, the words "a", "an", "an" and / or "the" do not refer to the singular and may also include the plural. Generally speaking, the terms "include" and "comprise" only indicate the inclusion of the steps and elements that have been clearly identified, and these steps and elements do not constitute an exclusive list. The method or device may also include other steps or elements.

[0040] In some embodiments, numbers describing the number of components and attributes are used. It should be understood that such numbers used in the description of the embodiments are modified by the modifiers "about", "approximately" or "substantially" in some examples. Unless otherwise specified, "about", "approximately" or "substantially" indicate that the numbers are allowed to vary by ±20%. Accordingly, in some embodiments, the numerical parameters used in the specification and claims are approximate values, which may change according to the required features of individual embodiments. In some embodiments, the numerical parameters should take into account the specified significant digits and adopt the general method of retaining digits. Although the numerical domains and parameters used to confirm the breadth of their range in some embodiments of the present application are approximate values, in specific embodiments, the setting of such numerical values ​​is as accurate as possible within the feasible range.

[0041] At the same time, the present application uses specific words to describe the embodiments of the present application. For example, "one embodiment", "an embodiment", and / or "some embodiments" refer to a certain feature, structure or characteristic related to at least one embodiment of the present application. Therefore, it should be emphasized and noted that "one embodiment" or "an embodiment" or "an alternative embodiment" mentioned twice or more in different positions in this specification does not necessarily refer to the same embodiment. In addition, some features, structures or characteristics in one or more embodiments of the present application can be appropriately combined.

[0042] Figure 1 A schematic diagram of a cavity lifting system according to an embodiment of the present invention is shown. The cavity lifting system comprises: a cavity 103, an upper cover 101, an upper frame 102, and a lifting drive system.

[0043] The lifting drive system is used to lift the upper cover 101, so that the upper cover 101 is separated from or closed with the cavity 103. After the cavity 103 and the upper cover 101 are sealed and evacuated, the wafer completes the thin film deposition process inside the cavity.

[0044] The lifting drive system includes a driving mechanism, a plurality of guide posts 106, at least two symmetrically distributed active lifting mechanisms, and at least two symmetrically distributed driven lifting guide shafts 105. Each active lifting mechanism is coaxially connected to the corresponding guide post 106, and each driven lifting guide shaft 105 is coaxially connected to the corresponding guide post 106. The driving mechanism is installed on the lower surface of the upper frame 102. The driving mechanism distributes the force energy of a power source to multiple transmission routes through the transmission mechanism. The equipment structure of all transmission routes is the same, so that the speed of multiple lifting mechanisms is the same, the force energy is equal, and each active lifting mechanism is ensured to perform lifting and lowering motion synchronously. .

[0045] The outer side surface of the cavity 103 has a plurality of fixed blocks 110. The upper cover 101 has a plurality of outer guide structures 111. The position of each outer guide structure 111 corresponds to the position of each fixed block 110. The lower end of the guide column 106 is fixed in the fixed block 110 outside the cavity, and the guide column 106 passes through the outer guide structure 111 of the upper cover 101 and is coaxially connected to the active lifting mechanism or the driven lifting guide shaft 105. A limiting mechanism 108 is provided at the upper end of the guide column 106 corresponding to the active lifting mechanism. The upper cover 101 can move up and down along the guide column 106, and the position of the limiting mechanism 108 determines the maximum stroke that the upper cover 101 can rise. In addition, the upper frame 102 also performs lifting and lowering actions under the restriction of the limiting mechanism 108 of the guide column 106.

[0046] In one embodiment, each active lifting mechanism includes a screw rod 104 and a nut 109. The upper end of the screw rod 104 is connected to a worm gear lifter (e.g., a worm gear lifter) of a driving mechanism installed below the upper frame 102, and the lower end of the screw rod 104 is arranged in a guide column 106. Specifically, the diameter of the screw rod 104 is smaller than the diameter of the guide column 106, and the screw rod 104 and the guide column 106 are concentrically installed. The nut 109 is fixed on the limiting structure 108, so that the motor drives the screw to rotate to realize the lifting and lowering of the upper cover and the upper frame.

[0047] In one embodiment, the upper end of each driven lifting guide shaft 105 has a flexible connection portion 114, which is flexibly connected to the upper frame 102, and the lower end is arranged in the guide column 106. Specifically, the diameter of the driven lifting guide shaft 105 is smaller than the diameter of the guide column 106, and the driven lifting guide shaft 105 and the guide column 106 are concentrically installed. The self-lubricating bearing 112 of the lifting guide shaft 105 is fixed to the upper end of the guide column 106.

[0048] In one embodiment, the lifting drive system further includes a fixing plate 107 and a plurality of columns 113. The fixing plate 107 is located between the upper cover 101 and the upper frame 102, and serves as a lower mounting base for the driving motor in the driving mechanism. The columns 113 pass through the fixing plate 107, the upper ends of the columns 113 are fixed to the upper frame 102, and the lower ends of the columns 113 are fixed to the upper cover 101.

[0049] In the scenario of ascending movement, the driving motor drives the screw 106 to rotate and move upward, pushing the upper frame 102 to move upward, driving the driven lifting guide shaft 105 to move upward, and the upward movement of the upper frame 102 drives the column 113 to move upward. The upward movement of the column 113 pulls the upper cover 101 to move upward, thereby realizing the separation of the upper cover 101 and the cavity 103.

[0050] In the scenario of descending movement, the driving motor drives the screw 106 to rotate and move downward, pulling the upper frame 102 downward, driving the driven lifting guide shaft 105 to move downward as well, and the downward movement of the upper frame 102 drives the column 113 to move downward, and the downward movement of the column 113 pushes the upper cover 101 to move downward, thereby achieving the closure of the upper cover 101 and the cavity 103.

[0051] Figure 2 A schematic diagram of a driving mechanism according to an embodiment of the present invention is shown. The driving mechanism includes a driving motor 201, a torque protector 202, a transfer case 203, and at least two transmission paths. Each transmission path is composed of exactly the same components, so that the speed and force they transmit are exactly the same. At the same time, the present invention adopts a single power input design (including only one driving motor 201), which ensures the synchronization and stability of the lifting drive system, and avoids the occurrence of jamming, deflection, or even jamming caused by the difference in lifting speed during the lifting process; at the same time, high synchronization will not cause additional unbalanced loads and deterioration of stress conditions on the lifting parts, greatly extending the service life and maintenance cycle of the lifting system.

[0052] In one embodiment, each transmission path includes a transmission shaft 204 , a coupling 205 , a right-angle transmission 206 , and a worm gear elevator 207 .

[0053] In one embodiment, the driving motor 201 is mounted on a vertical mounting plate 208 , the lower portion of the vertical mounting plate 208 is fixed on the fixing plate 107 , and the upper portion is fixedly connected to the upper frame 102 .

[0054] In one embodiment, the driving motor 201 is a reduction motor.

[0055] The output end of the drive motor 201 is connected to the torque protector 202. The torque protector 202 is connected between the drive motor 201 and the transfer case 203, and can cut off the power transmission after the torque exceeds the preset value, fully protecting the drive motor and drive parts from overload damage. That is, the torque protector 202 can prevent the occurrence of situations such as the burnout of the reduction motor and the damage of the transmission parts after being stuck due to unexpected situations, and can effectively reduce maintenance time and improve equipment utilization.

[0056] The transfer case 203 divides the power source output by the driving motor into multiple outputs to achieve power transfer.

[0057] In one embodiment, the transfer case 203 is a T-type transfer case, that is, a one-to-two type, which divides the power source into two paths and outputs them to two transmission paths respectively, and transmits them to the worm gear elevator 207 through mechanical structures such as couplings.

[0058] It should be understood that the present invention can also divide the power source into more than two paths for transmission as needed, that is, the driving mechanism can have more than two transmission paths.

[0059] In one embodiment, the worm gear elevator 207 is connected to the upper end of the screw rod 104 to drive the screw rod 104 to perform lifting motion.

[0060] Figure 3 A schematic structural diagram of a worm gear lift according to an embodiment of the present invention is shown.

[0061] The end of the worm gear lift 207 is a double-shaft type, with a transmission coupling 205 installed on one side and an encoder 301 installed on the other side, thereby realizing real-time detection of the active lifting mechanism, for example, the rotation speed, forming an effective closed-loop control, and avoiding lifting loss of control and jamming caused by open-loop control or no detection.

[0062] In addition, since the worm gear lift and the screw nut both have self-locking functions, when the motor brake fails or the coupling and other components slip, the dual self-locking functions of the worm gear and the screw nut can ensure that the cover machine frame is stably fixed in the existing position without sliding or falling, effectively ensuring the safety of construction operations after opening the cavity.

[0063] Figure 4A schematic diagram of a flexible connection between the upper end of a driven lifting guide shaft and an upper frame according to an embodiment of the present invention is shown. The upper end of the driven lifting guide shaft has a flexible connection portion. The flexible connection portion includes a plurality of springs 401, a plurality of bolts 402 and a flange 403.

[0064] The flange 403 has bolt mounting holes corresponding to the bolts 402 , and there is a gap between the bolts 402 and the bolt mounting holes.

[0065] The spring 401 is installed between the flange 403 and the frame mounting plate 404. The flexible response of the driven lifting guide shaft is mainly achieved by the spring 401.

[0066] In one embodiment, the plurality of springs 401 are evenly distributed around the circumference.

[0067] The bolts 402 correspond to the springs 401 one by one. The bolts 402 pass through the corresponding springs 401, connect the flange 403 of the driven lifting guide shaft and the frame mounting plate 404, and pre-tighten the springs 401.

[0068] According to the above structure, the deflection of the driven lifting guide shaft in the radial direction (that is, there is a deflection between the guide shaft and the guide column) can be responded to by the compression of the spring, and the horizontal movement can be offset by the gap between the bolt and the bolt mounting hole, thereby realizing a flexible adaptive function.

[0069] The present invention also provides a semiconductor process equipment, comprising the cavity lifting system as described above.

[0070] The cavity lifting system and semiconductor process equipment of the present invention have the following technical effects:

[0071] Firstly, each transmission path of the driving mechanism of the present invention is composed of exactly the same components, so that the speeds and forces they transmit are exactly the same. At the same time, the present invention adopts a single power input design (including only one driving motor), which ensures the synchronization and stability of the lifting drive system and avoids jamming, deflection, and even jamming caused by differences in lifting speeds during the lifting process. At the same time, high synchronization will not cause additional unbalanced loads on the lifting parts and deteriorate the stress conditions, thereby greatly extending the service life and maintenance cycle of the lifting system.

[0072] Secondly, the present invention adopts a combination of two active lifts (active lifting mechanism) and two auxiliary guides (driven lifting guide shafts), which can ensure high synchronization during the lifting process while stabilizing the posture of the upper cover plate to achieve a smooth lifting process; at the same time, the fixed end (upper end) of the guide shaft adopts a flexible connection to avoid installation difficulties caused by multiple rigid connection positioning; and timely adjust the offset and inclination of the lifting process.

[0073] Thirdly, the worm gear elevator of the present invention adds an encoder, thereby realizing real-time detection of the lifting mechanism, forming an effective closed-loop control, and avoiding loss of control and jamming of the lifting caused by open-loop control or no detection.

[0074] The terms and expressions used above are for descriptive purposes only, and the present invention should not be limited to these terms and expressions. The use of these terms and expressions does not mean to exclude any equivalent features of the illustrations and descriptions (or parts thereof), and it should be recognized that various modifications that may exist should also be included in the scope of the claims. Other modifications, changes and substitutions may also exist. Accordingly, the claims should be deemed to cover all such equivalents.

[0075] Similarly, it should be noted that in order to simplify the description of the disclosure of this application and thus facilitate the understanding of one or more embodiments of the invention, in the foregoing description of the embodiments of this application, multiple features are sometimes combined into one embodiment, drawing or description thereof. However, this disclosure method does not mean that the features required by the object of this application are more than the features mentioned in the claims.

[0076] Similarly, it should be pointed out that although the present invention has been described with reference to the current specific embodiments, ordinary technicians in this technical field should realize that the above embodiments are only used to illustrate the present invention, and various equivalent changes or substitutions may be made without departing from the spirit of the present invention. Therefore, as long as the changes and modifications to the above embodiments are within the scope of the essential spirit of the present invention, they will fall within the scope of the claims of this application.

Claims

1. A cavity lifting system, characterized in that: include: Cavity, upper cover, upper frame and lifting drive system; The lifting drive system includes a driving mechanism, a plurality of guide pillars, at least two active lifting mechanisms and at least two driven lifting guide shafts; the lifting drive system is used to lift the upper cover to separate or close the upper cover from the cavity; Each of the active lifting mechanisms and each of the driven lifting guide shafts are coaxially connected to the corresponding guide column; the driving mechanism is installed on the lower surface of the upper frame; the driving mechanism distributes a power source to multiple transmission routes with equal force energy to ensure that the at least two active lifting mechanisms perform lifting movements synchronously, wherein each transmission route drives a corresponding active lifting mechanism to perform lifting movements, and the at least two driven lifting guide shafts perform synchronous lifting movements together with the at least two active lifting mechanisms under the drive of the at least two active lifting mechanisms.

2. The cavity lifting system according to claim 1, characterized in that: The upper cover has a plurality of outer guide structures, and the positions of the plurality of outer guide structures correspond one by one to the positions of the plurality of fixed blocks on the outer side surface of the cavity; the lower end of the guide column is fixed in the fixed block, and the guide column is coaxially connected with the active lifting mechanism and the driven lifting guide shaft after passing through the outer guide structure; a limiting mechanism is provided at the upper end of the guide column connected to the active lifting mechanism; the upper cover is movable up and down along the guide column; the position of the limiting mechanism limits the stroke of the upper cover; and the upper frame also performs lifting and lowering actions under the limitation of the limiting mechanism.

3. The cavity lifting system according to claim 2, characterized in that: Each active lifting mechanism includes a screw rod and a nut; the upper end of the screw rod is connected to the driving mechanism installed below the upper frame, and the lower end of the screw rod is arranged in the guide column; the nut is fixed on the limiting structure.

4. The cavity lifting system according to claim 1, characterized in that: The upper end of each driven lifting guide shaft has a flexible connection portion flexibly connected to the upper frame, and the lower end of each driven lifting guide shaft is arranged on the guide column; the bearing of the lifting guide shaft is fixed on the upper end of the guide column.

5. The cavity lifting system according to claim 4, characterized in that: The flexible connection portion comprises: Multiple springs, multiple bolts and flanges; The flange is provided with a bolt mounting hole corresponding to the bolt, and there is a gap between the bolt and the bolt mounting hole; The spring is mounted between the flange and a frame mounting plate of the upper frame; The bolts correspond to the springs one by one, and the bolts pass through the corresponding springs to connect the flange and the frame mounting plate, and pre-tighten the springs; The deflection of the driven lifting guide shaft in the radial direction is responded to by the compression of the spring, and the movement in the horizontal direction is offset by the gap between the bolt and the bolt mounting hole.

6. The cavity lifting system according to claim 5, characterized in that: The multiple springs are evenly distributed around the circumference.

7. The cavity lifting system according to claim 1, characterized in that: The lifting drive system also includes a fixed plate and a plurality of columns; the fixed plate is located between the upper cover and the upper frame, and serves as a lower mounting base for the driving motor in the driving mechanism; the column passes through the fixed plate, the upper end of the column is fixed to the upper frame, and the lower end of the column is fixed to the upper cover.

8. The cavity lifting system according to claim 1, characterized in that: The driving mechanism includes a driving motor, a torque protector, a transfer case, and at least two transmission paths; The torque protector is connected between the drive motor and the transfer case; The transfer case divides the power source output by the drive motor into at least two output paths, and each output path is transmitted to one of the at least two transmission paths.

9. The cavity lifting system according to claim 8, characterized in that: Each of the transmission paths includes a transmission shaft, a coupling, a right-angle transmission and a worm gear elevator connected in sequence; The worm gear elevator is connected to the upper end of the lead screw of the active lifting mechanism to drive the active lifting mechanism to perform lifting motion. The worm gear elevator is also equipped with an encoder to achieve real-time detection of the active lifting mechanism.

10. The cavity lifting system according to claim 8, characterized in that: The transfer case is a T-type transfer case; the number of the at least two transmission paths is two, and the number of the at least two active lifting mechanisms is two.

11. The cavity lifting system according to claim 8, characterized in that: The driving motor is mounted on a vertical mounting plate, the lower portion of the vertical mounting plate is fixed on a fixing plate, and the upper portion of the vertical mounting plate is fixedly connected to the upper frame.

12. A semiconductor process equipment, characterized in that: include: A cavity lifting system as claimed in any one of claims 1 to 11.

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