Molecular pump impact resistance testing device and method

Abstract

The invention relates to the technical field of molecular pumps, and discloses a molecular pump impact resistance testing device and method.The molecular pump impact resistance testing device comprises a simulation bin, a base, a connecting rod mechanism set and a driving part, and an installation space is formed in the simulation bin and suitable for installing a molecular pump assembly; the base is arranged on the ground; the connecting rod mechanism group is arranged on the base, and the connecting rod mechanism group is suitable for being fixedly connected with the simulation bin; the driving piece is suitable for being connected with the connecting rod mechanism group; the connecting rod mechanism group is driven by the driving piece to do reciprocating motion, and the connecting rod mechanism group drives the simulation bin to shake during reciprocating motion. According to the scheme, the driving piece drives the connecting rod mechanism set to reciprocate and drives the simulation bin to shake at the same time, so that the impact resistance condition of the molecular pump on vehicle-mounted equipment or when the molecular pump is transported along with the whole equipment is simulated, and the rationality of the structural design of the molecular pump is more effectively verified.

Description

Technical Field

[0001] The invention relates to the technical field of molecular pumps, and in particular to a molecular pump anti-shock testing device and method. Background Art

[0002] A molecular pump is a commonly used vacuum obtaining device. It has a chamber formed inside and a high-speed motor installed in the chamber. When working, the high-speed rotating rotor compresses the gas molecules in the chamber and makes them obtain a directional speed and be discharged to the exhaust port. In recent years, molecular pumps have been used in large quantities in the field of scientific research.

[0003] When studying the application of molecular pumps in special vehicle-mounted analysis equipment or installing molecular pumps on equipment for transportation of the entire machine, due to the high speed of the turbine rotor and the small gap with the static air pumping unit, it is very easy to destroy the dynamic balance of the entire molecular pump when it is on-board or installed and transported with the equipment, which can lead to abnormal noise, scratches, or even pump breakage during the operation of the molecular pump, causing equipment downtime. Therefore, it is necessary to conduct an impact test on the molecular pump.

[0004] In the existing technical solution, the molecular pump can only be placed on a stationary platform by manpower, and then the molecular pump is started to simulate the working condition when the molecular pump is subjected to impact. This method cannot truly simulate and test the impact resistance of the molecular pump when the molecular pump is on a vehicle-mounted device or transported with the equipment as a whole (whether the dynamic balance of the molecular pump as a whole is destroyed, the influence of the heat generation of the bearing and the force change of the turbine on the operation of the molecular pump, etc.), and careless operation will also bring great personal safety problems to the operators.

[0005] In order to improve the safety of the experimental process, verify the impact resistance of the molecular pump structure in special vehicle-mounted equipment or equipment installed by terminal equipment manufacturers, and provide feedback on the rationality and reliability of the overall design of the molecular pump, a molecular pump impact resistance test device and method are designed to test various working conditions of simulating molecular pumps subjected to external impacts when installed at different angles. Summary of the invention

[0006] In view of this, the present invention provides a molecular pump shock resistance testing device and method to solve the problem that it is impossible to truly simulate and test the shock resistance of the molecular pump when the molecular pump is on a vehicle-mounted device or transported with the device.

[0007] In a first aspect, the present invention provides a molecular pump shock resistance testing device, comprising:

[0008] The simulation chamber has an installation space inside, and the installation space is suitable for installing a molecular pump assembly;

[0009] A base, set on the ground;

[0010] A connecting rod mechanism group is arranged on the base, and the connecting rod mechanism group is suitable for being fixedly connected with the simulation chamber;

[0011] The driving member is suitable for being connected with the connecting rod mechanism group; the connecting rod mechanism group performs reciprocating motion under the driving of the driving member, and the connecting rod mechanism group drives the simulation bin to shake during the reciprocating motion.

[0012] This solution drives the connecting rod mechanism group to reciprocate through the driving part, and at the same time drives the simulation chamber to shake, thereby simulating the impact resistance of the molecular pump when it is on-board equipment or transported with the equipment, and more effectively verifies the rationality of the molecular pump structure design.

[0013] In an optional embodiment, the connecting rod mechanism group includes:

[0014] A first transmission assembly, a first side of which is fixedly connected to the base;

[0015] a second transmission assembly, the first side of which is adapted to be rotatably connected to the second side of the first transmission assembly;

[0016] A first connecting rod, a first end of which is adapted to be rotatably connected to the second side of the second transmission assembly; the first connecting rod is adapted to be fixedly connected to the simulation chamber;

[0017] The second connecting rod, the first end is suitable for rotationally connecting with the second end of the first connecting rod; the second connecting rod is suitable for connecting with the driving member, and the second connecting rod drives the first connecting rod to reciprocate under the drive of the driving member, and the first connecting rod drives the simulation warehouse to shake when performing reciprocating motion.

[0018] In an optional implementation, it also includes:

[0019] A reduction gearbox is arranged between the second connecting rod and the driving member; the reduction gearbox comprises an input shaft and an output shaft, the input shaft of the reduction gearbox is suitable for connecting with the driving member, and the output shaft of the reduction gearbox is suitable for connecting with the second connecting rod; the output speed of the driving member is reduced by the reduction gearbox.

[0020] In this solution, by providing a reduction gear box between the second connecting rod and the driving member, the output speed of the reduction gear box can be reasonably controlled, thereby increasing the practicality of this solution.

[0021] In an optional implementation, it also includes:

[0022] A belt transmission assembly is arranged between the reduction gear box and the driving member, and the belt transmission assembly includes a first pulley, a second pulley and a belt structure. The first pulley is suitable for being fixedly connected to the output end of the driving member, and the second pulley is suitable for being fixedly connected to the input shaft of the reduction gear box. The belt structure is sleeved on the outer sides of the first pulley and the second pulley. The first pulley rotates synchronously with the second pulley under the action of the belt structure.

[0023] In this solution, the kinetic energy output by the driving member is transmitted to the reduction box by means of belt transmission. The belt drive has a simple structure, smooth transmission, buffering and vibration absorption, and can transmit power between large axle spacing and multiple axes. It is also low in cost, does not require lubrication, and is easy to maintain.

[0024] In an optional implementation, it also includes:

[0025] A connecting rod is arranged between the first connecting rod and the simulation chamber; one end of the connecting rod is fixedly connected to the middle part of the first connecting rod, and the other end of the connecting rod is fixedly connected to the bottom of the simulation chamber.

[0026] In an optional implementation, it also includes:

[0027] A reinforcement plate is arranged on both sides of the connecting rod; the sides of the reinforcement plate are fixedly connected to the connecting rod, and the bottom of the reinforcement plate is suitable for being fixedly connected to the first connecting rod.

[0028] In an optional embodiment, the first transmission assembly includes:

[0029] A first bearing seat, the bottom of which is fixed on the base; a first bearing hole is provided on the top of the first bearing seat;

[0030] The first bearing member is adapted to pass through the first bearing hole and be rotatably connected to the first bearing seat.

[0031] In an optional embodiment, the second transmission assembly includes:

[0032] A second bearing seat, the bottom of which is suitable for being fixedly connected to the first bearing member; a second bearing hole is formed on the top of the second bearing seat;

[0033] The second bearing member is adapted to pass through the second bearing hole and be rotatably connected to the second bearing seat; the second bearing member is adapted to be fixedly connected to the first end of the first connecting rod.

[0034] In an optional embodiment, the driving member is a servo motor.

[0035] In the second aspect, the present invention also provides a method for testing the impact resistance of a molecular pump, comprising the molecular pump impact resistance testing device described in any one of the above items, and also comprising the steps of: installing the molecular pump assembly in the installation space of the simulation warehouse, starting the molecular pump assembly normally to make the molecular pump work normally and monitoring the operation of the molecular pump at the same time; starting the driving member so that the driving member drives the connecting rod mechanism group to reciprocate, and drives the simulation warehouse to shake through the connecting rod mechanism group, at which time the simulation warehouse simulates the transportation situation, so as to detect the rationality of the molecular pump design. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0037] Figure 1 It is a schematic diagram of the overall structure of a molecular pump anti-shock testing device according to an embodiment of the present invention;

[0038] Figure 2 A second viewing angle diagram of a molecular pump anti-shock testing device according to an embodiment of the present invention;

[0039] Figure 3 A schematic diagram of a molecular pump assembly of a molecular pump anti-shock testing device according to an embodiment of the present invention;

[0040] Figure 4 A third viewing angle diagram of a molecular pump anti-shock testing device according to an embodiment of the present invention;

[0041] Figure 5 This is a schematic diagram of a second connecting rod of a molecular pump anti-shock testing device according to an embodiment of the present invention.

[0042] Description of reference numerals:

[0043] 1. Simulation chamber; 2. Base; 3. Linkage mechanism group; 301. First transmission assembly; 3011. First bearing seat; 3012. First bearing member; 302. Second transmission assembly; 3021. Second bearing seat; 3022. Second bearing member; 303. First connecting rod; 304. Second connecting rod; 4. Driving member; 5. Speed ​​reducer; 6. Belt drive assembly; 7. Connecting rod; 71. Reinforcement plate; 8. Molecular pump assembly; 81. Molecular pump controller; 82. Fore pump; 83. Molecular pump. DETAILED DESCRIPTION

[0044] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present invention.

[0045] like Figure 1 According to an embodiment of the present invention, on the one hand, a molecular pump 83 anti-impact testing device is provided, comprising a simulation chamber 1, a base 2, a connecting rod mechanism group 3 and a driving member 4, wherein the simulation chamber 1 has an installation space inside, and the installation space is suitable for installing the molecular pump assembly 8; the base 2 is arranged on the ground; the connecting rod mechanism group 3 is arranged on the base 2, and the connecting rod mechanism group 3 is suitable for being fixedly connected to the simulation chamber 1; the driving member 4 is suitable for being connected to the connecting rod mechanism group 3; the connecting rod mechanism group 3 performs reciprocating motion under the drive of the driving member 4, and the connecting rod mechanism group 3 drives the simulation chamber 1 to shake during the reciprocating motion.

[0046] This solution drives the connecting rod mechanism group 3 to reciprocate through the driving member 4, and at the same time drives the simulation chamber 1 to shake, thereby simulating the impact resistance of the molecular pump 83 when the molecular pump 83 is on the vehicle-mounted equipment or transported with the equipment, and more effectively verifies the rationality of the structural design of the molecular pump 83.

[0047] It should be noted that the molecular pump assembly 8 specifically includes a molecular pump 83 and other structures connected to the molecular pump 83 for detecting the working state of the molecular pump 83 .

[0048] It should be noted that, in the present embodiment, the simulation chamber 1 is welded by a base plate, a cover plate and four support columns. Specifically, the base plate and the cover plate are arranged in parallel, and then the two are welded and fixed by four support columns, wherein the cover plate is arranged on the top of the four support columns, and the base plate is arranged on the bottom of the support columns; wherein the molecular pump 83 is fixedly connected to the cover plate, the cover plate is connected to the flange cover plate of the molecular pump 83 by bolts, and the flange cover plate is fixedly connected to the outer casing of the molecular pump 83 by multiple connecting bolts.

[0049] It should be noted that in order to further increase the safety during the experiment, the simulation chamber 1 is also provided with a protective baffle, which is arranged between adjacent support columns. By installing the protective baffle, it can be prevented that the molecular pump 83 is damaged during the test and the fragments will not cause danger to the test personnel.

[0050] It should be noted that the present solution is a simulation test for a vertical installation of the molecular pump 83. As an alternative implementation, the molecular pump 83 can also be installed horizontally to simulate and verify whether the molecular pump 83 has abnormal noise or broken pump problems after the horizontal installation (due to changes in the forces of the turbine, etc., the vibration value of the molecular pump 83 (the overall dynamic balance effect) becomes larger, resulting in damage to the bearings of the molecular pump 83). The rationality and reliability of the structural design of the molecular pump 83 are verified. In the specific horizontal installation process, the upper cover is set between any two support columns, and the rest of the installation process is the same.

[0051] Furthermore, the connecting rod mechanism group 3 includes:

[0052] A first transmission assembly 301, a first side of which is fixedly connected to the base 2;

[0053] A second transmission assembly 302, a first side of which is adapted to be rotatably connected to a second side of the first transmission assembly 301;

[0054] A first connecting rod 303, a first end of which is suitable for being rotatably connected to the second side of the second transmission assembly 302; the first connecting rod 303 is suitable for being fixedly connected to the simulation chamber 1;

[0055] The second connecting rod 304 has a first end suitable for rotationally connecting to the second end of the first connecting rod 303; the second connecting rod 304 is suitable for connecting to the driving member 4, and the second connecting rod 304 drives the first connecting rod 303 to perform reciprocating motion under the drive of the driving member 4, and the first connecting rod 303 drives the simulation chamber 1 to shake when performing reciprocating motion.

[0056] It should be noted that in this solution, the first side is defined as the downward direction, and the bottom is also defined as the side close to the downward direction. Specifically, the first end of the first connecting rod 303 is Figure 1 The left end of Figure 2 As shown, the first end of the second connecting rod 304 is the end connected to the first connecting rod 303 .

[0057] Specifically, the first transmission assembly 301 includes: a first bearing seat 3011 and a first bearing member 3012, the bottom of the first bearing seat 3011 is fixed on the base 2; a first bearing hole is provided on the top of the first bearing seat 3011; the first bearing member 3012 is suitable for passing through the first bearing hole and being rotatably connected with the first bearing seat 3011.

[0058] Specifically, the second transmission assembly 302 includes: a second bearing seat 3021 and a second bearing member 3022, the bottom of the second bearing seat 3021 is suitable for being fixedly connected to the first bearing member 3012; a second bearing hole is opened on the top of the second bearing seat 3021; ​​the second bearing member 3022 is suitable for passing through the second bearing hole and being rotatably connected to the second bearing seat 3021; ​​the second bearing member 3022 is suitable for being fixedly connected to the first end of the first connecting rod 303.

[0059] It should be noted that the first bearing component 3012 includes a first bearing column and a first bearing, the first bearing column is suitable for passing through the first bearing hole, and is rotatably connected to the first bearing seat 3011 through the first bearing, the outer surface of the first bearing column is fixedly connected to the inner side of the first bearing by an interference fit, and the outer surface of the first bearing is fixedly connected to the inner surface of the first bearing hole, thereby realizing the connection between the first bearing column and the first bearing seat 3011 through the first bearing; specifically, the second bearing seat 3021 is fixedly connected to the second bearing column by an interference fit, and the second bearing component 3022 includes a second bearing and a second bearing column, and the connection method between the second bearing column and the second bearing seat 3021 is similar to the connection method between the first bearing column and the first bearing seat 3011, wherein the first end of the first connecting rod 303 is fixedly connected to the middle part of the second bearing column by welding.

[0060] like Figure 4 As shown, it should be noted that in order to ensure the stability of the overall structural operation, there are two first bearing seats 3011 and two second bearing seats 3021, each of which is provided with a first bearing, and the first bearing column passes through the two first bearings respectively; each of the second bearing seats 3021 is provided with a second bearing, and the second bearing columns pass through the two first bearings respectively; specifically, the second bearing seat 3021 and the first bearing column are directly provided with a welding plate, and the two ends of the welding plate are respectively welded to the two to achieve a fixed connection between the two.

[0061] Furthermore, it also includes a reduction box 5, which is arranged between the second connecting rod 304 and the driving member 4; the reduction box 5 includes an input shaft and an output shaft, the input shaft of the reduction box 5 is suitable for connecting with the driving member 4, and the output shaft of the reduction box 5 is suitable for connecting with the second connecting rod 304; the output speed of the driving member 4 is reduced by the reduction box 5.

[0062] It should be noted that a reduction gear set is provided in the reduction box 5, and the rotation speed is reduced by the ratio of gears with different numbers of teeth.

[0063] Furthermore, it also includes a belt transmission component 6, which is arranged between the reduction box 5 and the driving member 4. The belt transmission component 6 includes a first pulley, a second pulley and a belt structure. The first pulley is suitable for being fixedly connected to the output end of the driving member 4, and the second pulley is suitable for being fixedly connected to the input shaft of the reduction box 5. The belt structure is sleeved on the outer sides of the first pulley and the second pulley, and the first pulley rotates synchronously with the second pulley under the action of the belt structure. Belt drive is a mechanical transmission that uses a flexible belt tensioned on a pulley to transmit motion or power. According to different transmission principles, there are friction belt drives that rely on the friction between the belt and the pulley, and there are also synchronous belt drives that rely on the meshing of teeth on the belt and the pulley.

[0064] It should be noted that in the present solution, the first pulley is fixedly connected to the output end of the driving member 4 via a flat key, and the second pulley is fixedly connected to the input shaft of the reduction box 5 via a flat key.

[0065] like Figure 2 and Figure 5 As shown, specifically, in this solution, since the second end of the second connecting rod 304 is fixedly connected to the output shaft of the reduction gearbox 5, the first end of the second connecting rod 304 makes a circular motion with the second end as the center, and since the first end of the first connecting rod 303 is fixedly connected to the second bearing member 3022, and the second end is connected to one end of the second connecting rod 304, the first connecting rod 303 as a whole performs reciprocating motion in the left and right directions, as well as slight reciprocating motion in the up and down directions.

[0066] Furthermore, a connecting rod 7 is included, which is arranged between the first connecting rod 303 and the simulation chamber 1; one end of the connecting rod 7 is fixedly connected to the middle of the first connecting rod 303, and the other end is fixedly connected to the bottom of the simulation chamber 1. The connecting rod 7 is fixedly connected to the bottom of the simulation chamber 1 by welding.

[0067] Furthermore, it also includes a reinforcing plate 71, which is arranged on both sides of the connecting rod 7; the side of the reinforcing plate 71 is fixedly connected to the connecting rod 7, and the bottom of the reinforcing plate 71 is suitable for being fixedly connected to the first connecting rod 303. It should be noted that the reinforcing plate 71 is specifically a triangular plate, and the triangular reinforcing plate 71 can maximize the stability of the connection between the connecting rod 7 and the first connecting rod 303.

[0068] It should be noted that the driving component 4 is a servo motor.

[0069] According to an embodiment of the present invention, on the other hand, a method for testing the impact resistance of a molecular pump 83 is provided, comprising the device for testing the impact resistance of a molecular pump 83 as described in any one of the above items, and further comprising the steps of: installing the molecular pump assembly 8 in the installation space of the simulation warehouse 1, and starting the molecular pump assembly 8 normally through a controller to enable the molecular pump 83 to work normally and monitor the operation of the molecular pump 83 at the same time; starting the driving member 4 so that the driving member 4 drives the connecting rod mechanism group 3 to reciprocate, and drives the simulation warehouse 1 to shake through the connecting rod mechanism group 3, at which time the simulation warehouse 1 simulates the transportation condition, so as to detect the rationality of the design of the molecular pump 83.

[0070] It should be noted that if Figure 3 As shown, the molecular pump assembly 8 can also include a front-stage pump 82 and a molecular pump controller 81. The front-stage pump 82 and the molecular pump controller 81 are provided to detect the impact resistance of the molecular pump 83 during high-speed operation. Specifically, a bellows is used to connect the front-stage interface of the molecular pump 83 to the front-stage pump 82, and the molecular pump controller 81 is connected to the molecular pump 83 through a molecular pump cable and controls the molecular pump 83. Then, the front-stage pump 82 is started for rough pumping. When the vacuum degree in the molecular pump 83 reaches less than 10Pa, the molecular pump 83 is started using the controller. When the molecular pump 83 reaches the rated speed, the drive component 4 is started to simulate and test the impact resistance of the molecular pump 83 when it is on the vehicle-mounted equipment or transported with the equipment as a whole, so as to more effectively verify the rationality of the structural design of the molecular pump 83.

[0071] Although the embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations are all within the scope defined by the appended claims.

Claims

1. A molecular pump anti-shock test device, characterized in that: include: The simulation chamber (1) has an installation space inside, wherein the installation space is suitable for installing a molecular pump assembly (8); A base (2) is arranged on the ground; A connecting rod mechanism group (3) is arranged on the base (2), and the connecting rod mechanism group (3) is suitable for being fixedly connected to the simulation chamber (1); The driving member (4) is suitable for being connected to the connecting rod mechanism group (3); the connecting rod mechanism group (3) performs reciprocating motion under the drive of the driving member (4), and the connecting rod mechanism group (3) drives the simulation chamber (1) to shake during the reciprocating motion.

2. The molecular pump anti-shock testing device according to claim 1, characterized in that: The connecting rod mechanism group (3) comprises: A first transmission assembly (301), a first side of which is fixedly connected to the base (2); A second transmission assembly (302), a first side of which is adapted to be rotatably connected to a second side of the first transmission assembly (301); A first connecting rod (303), a first end of which is suitable for being rotatably connected to the second side of the second transmission assembly (302); the first connecting rod (303) is suitable for being fixedly connected to the simulation chamber (1); The second connecting rod (304) has a first end suitable for being rotatably connected to the second end of the first connecting rod (303); the second connecting rod (304) is suitable for being connected to the driving member (4), and the second connecting rod (304) drives the first connecting rod (303) to perform reciprocating motion under the drive of the driving member (4), and the first connecting rod (303) drives the simulation chamber (1) to shake when performing the reciprocating motion.

3. The molecular pump anti-shock testing device according to claim 2, characterized in that: Also includes: A reduction gearbox (5) is arranged between the second connecting rod (304) and the driving member (4); the reduction gearbox (5) comprises an input shaft and an output shaft, the input shaft of the reduction gearbox (5) is suitable for connecting to the driving member (4), and the output shaft of the reduction gearbox (5) is suitable for connecting to the second connecting rod (304); the output rotation speed of the driving member (4) is reduced by the reduction gearbox (5).

4. The molecular pump anti-shock testing device according to claim 3, characterized in that: Also includes: A belt transmission assembly (6) is arranged between the reduction box (5) and the driving member (4), and the belt transmission assembly (6) comprises a first pulley, a second pulley and a belt structure, wherein the first pulley is suitable for being fixedly connected to the output end of the driving member (4), and the second pulley is suitable for being fixedly connected to the input shaft of the reduction box (5), and the belt structure is sleeved on the outer sides of the first pulley and the second pulley, and the first pulley rotates synchronously with the second pulley under the action of the belt structure.

5. The molecular pump anti-shock testing device according to claim 2, characterized in that: Also includes: A connecting rod (7) is arranged between the first connecting rod (303) and the simulation chamber (1); one end of the connecting rod (7) is fixedly connected to the middle part of the first connecting rod (303), and the other end is fixedly connected to the bottom of the simulation chamber (1).

6. The molecular pump anti-shock testing device according to claim 5, characterized in that: Also includes: A reinforcing plate (71) is arranged on both sides of the connecting rod (7); the side edges of the reinforcing plate (71) are fixedly connected to the connecting rod (7), and the bottom of the reinforcing plate (71) is suitable for being fixedly connected to the first connecting rod (303).

7. The molecular pump anti-shock testing device according to claim 2, characterized in that: The first transmission assembly (301) comprises: A first bearing seat (3011), the bottom of which is fixed on the base (2); a first bearing hole is provided on the top of the first bearing seat (3011); The first bearing member (3012) is adapted to pass through the first bearing hole and be rotatably connected to the first bearing seat (3011).

8. The molecular pump anti-shock testing device according to claim 7, characterized in that: The second transmission assembly (302) comprises: A second bearing seat (3021), the bottom of which is suitable for being fixedly connected to the first bearing; a second bearing hole is formed on the top of the second bearing seat (3021); The second bearing member (3022) is adapted to pass through the second bearing hole and be rotatably connected to the second bearing seat (3021); the second bearing member (3022) is adapted to be fixedly connected to the first end of the first connecting rod (303).

9. The molecular pump anti-shock testing device according to claim 1, characterized in that: The driving member (4) is a servo motor.

10. A molecular pump shock resistance test method, characterized in that: The device for testing the impact resistance of a molecular pump (83) comprises the device described in any one of claims 1 to 9, and further comprises the steps of: installing the molecular pump assembly (8) in the installation space of the simulation chamber (1), starting the molecular pump assembly (8) normally to enable the molecular pump (83) to work normally and monitoring the operation of the molecular pump (83) at the same time; starting the driving member (4) to enable the driving member (4) to drive the connecting rod mechanism group (3) to reciprocate, and drive the simulation chamber (1) to shake through the connecting rod mechanism group (3), at which time the simulation chamber (1) simulates the transportation condition, thereby detecting the rationality of the design of the molecular pump (83).

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