Evaluation method of small-range ultrahigh-precision temperature sensor

Abstract

According to the evaluation method of the small-range ultra-high-precision temperature sensor, the temperature deviation between the to-be-tested temperature sensor and the standard temperature sensor is acquired in multiple ways, and the response time of the to-be-tested temperature sensor is combined, so that the comprehensive evaluation result of the to-be-tested temperature sensor is acquired. According to the method, the temperature sensor is comprehensively evaluated by integrating a plurality of evaluation indexes, so that the long-term stability and the response speed during measurement of the temperature sensor can be correspondingly guaranteed, and the high requirement of spaceflight design on the temperature sensor can be met.

Description

Technical Field

[0001] The present invention relates to the technical field of sensor evaluation, and in particular to an evaluation method for a small-range ultra-high precision temperature sensor. Background Art

[0002] Spacecraft design requires high accuracy of temperature sensors. In order to meet the requirements of its use environment, temperature sensors need to have extremely high accuracy, long-term stability and faster response time, and also need to have good anti-interference and anti-vibration capabilities. In the semiconductor field, the vast majority of domestic temperature sensors have few evaluation items and relatively simple evaluation indicators in the evaluation method of their factory accuracy. Usually only one indicator is measured or calibrated, lacking a systematic and more comprehensive evaluation method. Summary of the invention

[0003] The invention discloses an evaluation method for a small-range ultra-high-precision temperature sensor to overcome the above technical problems.

[0004] In order to achieve the above object, the technical solution of the present invention is:

[0005] An evaluation method for a small-range ultra-high precision temperature sensor comprises the following steps:

[0006] S1: Using a water triple point bottle, a precision temperature measuring bridge and a standard platinum resistance thermometer, obtain a first temperature deviation between the temperature sensor to be tested and the standard temperature sensor;

[0007] S2: Using a gallium fixed point bottle, a precision temperature measuring bridge and a standard platinum resistance thermometer, obtain a second temperature deviation between the temperature sensor to be tested and the standard temperature sensor;

[0008] S3: using a precision temperature measuring bridge to obtain a temperature curve of the temperature sensor to be tested at the gallium fixed point, so as to obtain the maximum value of the peak and the maximum value of the trough of the temperature curve, and then obtain the third temperature deviation; S4: obtaining the response time of the temperature sensor to be tested;

[0009] S5: Obtaining a fourth temperature deviation between the temperature sensor to be tested and the standard temperature sensor according to a polynomial calibration evaluation method;

[0010] S6: Obtain a comprehensive evaluation result of the temperature sensor to be tested according to the first temperature deviation, the second temperature deviation, the third temperature deviation, the fourth temperature deviation and the response time of the temperature sensor to be tested.

[0011] Further, the fourth temperature deviation is obtained as follows:

[0012] S51: Obtain the temperature t of the i-th point on the temperature sensor to be tested i, the temperature t of the jth point j , the temperature t of the kth point k and the temperature t of the mth point m ; Wherein, i, j, k, m are the numbers of the points on the temperature sensor to be tested, i, j, k, m ≤ 4 and i ≠ j ≠ k ≠ m,

[0013] S52: According to the temperature t of the i-th point on the temperature sensor to be tested i , the temperature t of the jth point on the temperature sensor to be tested j , the temperature t of the kth point on the temperature sensor to be tested k , establish four intermediate calculation determinants D, D 1 , D 2 and D 3 ;

[0014]

[0015] Where: D, D 1 , D 2 , D 3 All are intermediate calculation determinants; R i The temperature of the temperature sensor to be tested is t i The resistance corresponding to the point, R j The temperature of the temperature sensor to be tested is t j The resistance corresponding to the point, R k The temperature of the temperature sensor to be tested is t k The resistance corresponding to the point;

[0016] S53: Calculate the determinant D, D based on the four intermediate 1 , D 2 and D 3 , obtaining characteristic parameters of the temperature sensor to be tested; the characteristic parameters of the temperature sensor to be tested include the linear coefficient of the relationship between the resistance and temperature of the temperature sensor to be tested, the quadratic coefficient of the relationship between the resistance and temperature of the temperature sensor to be tested, and the resistance value of the temperature sensor to be tested when the temperature is 0°C;

[0017] S54: Obtaining the resistance of the mth point on the temperature sensor to be tested according to the characteristic parameters of the temperature sensor to be tested and based on the resistance-temperature relationship in the IEC60751 standard;

[0018] S55: Obtaining a fourth temperature deviation between the temperature sensor to be tested and the standard temperature sensor according to the resistance of the mth point on the temperature sensor to be tested.

[0019] Furthermore, the characteristic parameters of the temperature sensor to be tested are obtained as follows:

[0020]

[0021] Where: Indicates the resistance value of the temperature sensor to be tested when the temperature is 0°C; A * The linear coefficient that represents the relationship between the resistance and temperature of the temperature sensor to be tested; B * The coefficient of the quadratic term that represents the relationship between the resistance and temperature of the temperature sensor under test.

[0022] Further, the temperature of the temperature sensor to be tested is obtained as t m The formula for the resistance corresponding to the point is as follows:

[0023]

[0024] Where: Indicates that the temperature on the temperature sensor to be tested is t m The resistance corresponding to the point; Indicates the resistance value of the temperature sensor to be tested when the temperature is 0°C; A * The linear coefficient that represents the relationship between the resistance and temperature of the temperature sensor to be tested; B * The coefficient of the quadratic term that represents the relationship between the resistance and temperature of the temperature sensor under test.

[0025] Further, the fourth temperature deviation is obtained as follows:

[0026]

[0027] Where: Δt4 represents the fourth deviation; Indicates that the temperature of the standard temperature sensor and the temperature of the temperature sensor to be tested are t m The resistance corresponding to the point.

[0028] Furthermore, the temperature t of the i-th point on the temperature sensor to be tested i , the temperature t of the jth point j and the temperature t of the kth point k , the relationship satisfied is as follows:

[0029] t k =(t i +t j ) / 2

[0030] t i =t L ,t j =t U

[0031] Where: t L Indicates the lower limit of the temperature measurement range, t UIndicates the upper limit of the temperature measurement range.

[0032] Furthermore, the temperature t of the i-th point on the temperature sensor to be tested i and the temperature t of the mth point m The satisfied relationship is as follows:

[0033] t i =t L , t m =t U ;

[0034] Among them, t L Indicates the lower limit of the temperature measurement range, t U Indicates the upper limit of the temperature measurement range.

[0035] Furthermore, the temperature t of the i-th point on the temperature sensor to be tested i and the temperature t of the mth point m The satisfied relationship is as follows:

[0036] t i =t U , t m =t L ;

[0037] Among them, t L Indicates the lower limit of the temperature measurement range, t U Indicates the upper limit of the temperature measurement range.

[0038] Furthermore, the method for obtaining the comprehensive evaluation result of the temperature sensor to be tested is as follows:

[0039] When the first temperature deviation, the second temperature deviation, the third temperature deviation, and the fourth temperature deviation are all not greater than a set accuracy threshold, and the response time is not greater than a set response time threshold, the temperature sensor to be tested can meet the use requirements;

[0040] When any one of the first temperature deviation, the second temperature deviation, the third temperature deviation, and the fourth temperature deviation is greater than a set accuracy threshold, or the response time is greater than a response time threshold, the temperature sensor to be tested cannot meet the use requirements.

[0041] Furthermore, the third temperature deviation acquisition method is as follows:

[0042] If the absolute value of the peak maximum value is greater than or equal to the average value of the trough maximum value, the third temperature deviation is the absolute value of the peak maximum value;

[0043] If the absolute value of the peak maximum value is less than the average value of the trough maximum value, the third temperature deviation is the absolute value of the trough maximum value.

[0044] Beneficial effect: The evaluation method of a small-range ultra-high precision temperature sensor of the present invention obtains a comprehensive evaluation result of the temperature sensor to be tested by adopting multiple methods to obtain the temperature deviation between the temperature sensor to be tested and the standard temperature sensor, combined with the response time of the temperature sensor to be tested. The present invention comprehensively evaluates the temperature sensor by integrating multiple evaluation indicators, so that the temperature sensor can be guaranteed in terms of long-term stability and response speed during measurement, and can meet the high requirements of aerospace design for temperature sensors. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0046] Figure 1 This is a flow chart of the evaluation method of the small-range ultra-high precision temperature sensor of the present invention;

[0047] Figure 2 FIG. 4 is a schematic diagram of a temperature sensor in an embodiment of the present invention. DETAILED DESCRIPTION

[0048] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0049] This embodiment introduces a method for evaluating a small-range ultra-high-precision temperature sensor. Figure 1 As shown, the following steps are included: Among them, the small-range ultra-high precision temperature sensor of this embodiment has a range of: 20-60°C; and an accuracy greater than 2mk.

[0050] S1: using a water triple point bottle, a precision temperature measuring bridge and a standard platinum resistance thermometer, obtaining a first temperature deviation between the temperature sensor to be tested and the standard temperature sensor; specifically, a first temperature deviation Δt1 measured at a certain temperature, so as to perform deviation detection on the temperature sensor;

[0051] Specifically, this embodiment uses a water triple point bottle, a precision temperature measuring bridge and a standard platinum resistance thermometer to perform deviation detection on the temperature sensor to be tested at the water triple point (273.16K) to obtain a first temperature deviation, and the detection result is a first temperature deviation Δt1≤2mk; among them, the method of performing deviation detection on the temperature sensor to be tested using a water triple point bottle, a precision temperature measuring bridge and a standard platinum resistance thermometer is a conventional evaluation method in the field and is not described in detail here.

[0052] S2: Using a gallium fixed point bottle, a precision temperature measuring bridge and a standard platinum resistance thermometer, obtain a second temperature deviation between the temperature sensor to be tested and the standard temperature sensor;

[0053] Specifically, this embodiment uses a gallium fixed point bottle, a precision temperature measuring bridge and a standard platinum resistance thermometer to perform deviation detection on the temperature sensor to be tested, and the detection result is a second temperature deviation Δt2≤2mk; wherein, the method used to obtain the second temperature deviation between the temperature sensor to be tested and the standard temperature sensor is a conventional technology in the field and is not described in detail here.

[0054] S3: using a precision temperature measuring bridge to obtain a temperature curve of the temperature sensor to be tested at the gallium fixed point, so as to obtain a peak maximum value and a valley maximum value of the temperature curve, and then obtain a third temperature deviation;

[0055] Preferably, the third temperature deviation acquisition method is as follows:

[0056] If the absolute value of the peak maximum value is greater than or equal to the average value of the trough maximum value, the third temperature deviation is the absolute value of the peak maximum value;

[0057] If the absolute value of the peak maximum value is less than the average value of the trough maximum value, the third temperature deviation is the absolute value of the trough maximum value.

[0058] Specifically, in this embodiment, at the gallium fixed point (29.7646°C), within a specified time (optionally 10 minutes), the short-term deviation fluctuation of the temperature curve of the temperature sensor collected by the precision measurement bridge is a sine wave, and the third temperature deviation Δt3 between the peak maximum value and the trough maximum value is ≤2mk, wherein the method used to obtain the third temperature deviation between the peak maximum value and the trough maximum value is a conventional technology in the field and is not described in detail here.

[0059] S4: Obtain the response time of the temperature sensor to be tested;

[0060] Specifically, this embodiment can not only obtain the response time of the temperature sensor to be tested, but also perform response time tests on temperature sensors of the same model batch, and evaluate the production process of the temperature sensor by the consistency of the test results. If the difference between the maximum and minimum values ​​of the response time test results of multiple temperature sensors of the same batch and the average value of the response time of multiple temperature sensors is within the range of ±10% of the average value, it can be explained that the temperature sensor is produced according to the production process of multiple temperature sensors of the same batch, and the consistency of the temperature sensor is good and meets the requirements. In this embodiment, the number of temperature sensors tested is 10, and the method used to test the response time of multiple temperature sensors of this batch is as follows:

[0061] ① The temperature sensor to be tested is wired according to the wiring diagram and fixed at the position to be tested;

[0062] ②Heat the thermostatic bath on the temperature sensor to be tested to the required temperature and make it stable;

[0063] ③Open the Pt100 thermal resistance response tester test software;

[0064] ④ Calibrate the zero point and full scale according to relevant regulations;

[0065] ⑤ Test the response time according to the test procedures and save the temperature response time curve, that is, the curve of temperature changing with response time;

[0066] ⑥ Repeat steps ①-⑤ above to test the other 9 sensors;

[0067] According to the response time report of the tested temperature sensor, calculate the average response time of 10 temperature sensors and compare it with the response time of each sensor. If the difference is within 10% of the average response time, it means that the production process of this batch of temperature sensors is relatively complete, and the temperature sensors produced by this process have good consistency and meet the requirements.

[0068] S5: Obtaining a fourth temperature deviation between the temperature sensor to be tested and the standard temperature sensor according to a polynomial calibration evaluation method;

[0069] Preferably, the fourth temperature deviation is obtained as follows:

[0070] S51: Obtain the temperature t of four points on the temperature sensor to be tested i ,t j ,t k and t m , i,j,k,m≤4; where i,j,k,m all represent the numbers of the points on the temperature sensor to be tested, and i≠j≠k≠m,

[0071] S52: According to the temperature t of the i-th point on the temperature sensor to be tested i , the temperature t of the jth point on the temperature sensor to be tested j , the temperature t of the kth point on the temperature sensor to be tested k , establish four intermediate calculation determinants D, D 1 , D 2 and D 3 ;

[0072] Specifically, four determinants are established according to the temperatures of any three points:

[0073] Preferably, the four determinants are established as follows:

[0074]

[0075] Where: D, D 1 , D 2 , D 3 All are intermediate calculation determinants; R i The temperature of the temperature sensor to be tested is t i The resistance corresponding to the point, R j The temperature of the temperature sensor to be tested is t j The resistance corresponding to the point, R k The temperature of the temperature sensor to be tested is t k The resistance corresponding to the point;

[0076] S53: Calculate the determinant D, D based on the four intermediate 1 , D 2 and D 3 , obtaining characteristic parameters of the temperature sensor to be tested; the characteristic parameters of the temperature sensor to be tested include the linear coefficient of the relationship between the resistance and temperature of the temperature sensor to be tested, the quadratic coefficient of the relationship between the resistance and temperature of the temperature sensor to be tested, and the resistance value of the temperature sensor to be tested when the temperature is 0°C;

[0077] Preferably, the characteristic parameters of the temperature sensor to be tested are obtained as follows:

[0078]

[0079] Where: Indicates the resistance value of the temperature sensor to be tested when the temperature is 0°C; A * The linear coefficient that represents the relationship between the resistance and temperature of the temperature sensor to be tested; B * The coefficient of the quadratic term that represents the relationship between the resistance and temperature of the temperature sensor to be tested;

[0080] S54: Obtaining the resistance of the mth point on the temperature sensor to be tested according to the characteristic parameters of the temperature sensor to be tested and based on the resistance-temperature relationship in the IEC60751 standard;

[0081] Specifically, the resistance-temperature relationship in IEC60751 is:

[0082] Specifically, when the temperature sensor's temperature measurement range is 0°C-850°C, the following resistance-temperature relationship is used:

[0083]

[0084] Where: R t Indicates the resistance value at temperature t; R 0 It represents the resistance value when the temperature is 0℃; A is the first-order coefficient representing the relationship between resistance and temperature, A=3.9083×10 -3 ℃ -1 ; B is the quadratic coefficient representing the relationship between resistance and temperature, where B = -5.775×10 -7 ℃ -2 ; t represents temperature;

[0085] Preferably, the resistance of the mth point on the temperature sensor to be tested is obtained as follows:

[0086]

[0087] Where: Indicates that the temperature on the temperature sensor to be tested is t m The resistance corresponding to the point;

[0088] Specifically, in this embodiment, R i , R j and R k To measure and obtain Used to obtain a fourth temperature deviation.

[0089] S55: acquiring a fourth temperature deviation between the temperature sensor to be tested and the standard temperature sensor according to the resistance of the mth point on the temperature sensor to be tested;

[0090] Preferably, the fourth temperature deviation is obtained as follows:

[0091]

[0092] Where: Δt4 represents the fourth deviation; Indicates that the temperature of the standard temperature sensor and the temperature of the temperature sensor to be tested are t m The resistance corresponding to the point.

[0093] Specifically, in the embodiment of the present invention, the interpolation and extrapolation verification methods are used to compare the deviation accuracy:

[0094] When the interpolation check method is adopted, t k =(t i +t j ) / 2; where t i =t L ,t j =t U ;t L Indicates the lower limit of the temperature measurement range, t U Indicates the upper limit of the temperature measurement range.

[0095] At this time, the upper and lower limits and midpoint of the temperature range of the temperature sensor to be tested are used to calculate the characteristic parameters of the temperature sensor to be tested, t 2 (measure temperature at any point inside) for calibration.

[0096] Among them, using the upper and lower limits of the temperature measurement range of the temperature sensor to be tested and any point within the range to calculate the characteristic parameters of the temperature sensor to be tested belongs to an interpolation calibration method of this embodiment.

[0097] When using the extrapolation calibration method, there are two situations:

[0098] 1. Satisfy t i =t L , t m =t U In this case, the lower limit of the temperature measurement range of the temperature sensor to be tested and two internal points are used to calculate the characteristic parameters of the temperature sensor to be tested, and the upper limit temperature value of the temperature measurement range is used to obtain the fourth temperature deviation between the temperature sensor to be tested and the standard temperature sensor for verification.

[0099] 2. Satisfy t i =t U , t m =t L In this case, the upper limit of the temperature measurement range and two internal points of the temperature sensor to be tested are used to calculate the characteristic parameters of the temperature sensor to be tested, and the lower limit temperature value of the temperature measurement range is used to obtain the fourth temperature deviation between the temperature sensor to be tested and the standard temperature sensor for verification.

[0100] Specifically, in the extrapolation verification method, t can be selected j =(t i +t k ) / 2; the temperatures of the four points on the standard platinum resistor satisfy t 1 ,t 2 ,t 3 ,t 4∈[10℃,90℃],

[0101] Specifically, in this embodiment, the experimental data using the interpolation verification method and the extrapolation verification method are shown in the following table:

[0102]

[0103] It can be seen from the data in the table that for the same data source, when the interpolation method is adopted and the upper and lower limits and midpoint of the temperature measurement range are used to calculate the parameters, the error of the entire temperature measurement range is the smallest, the resistance-temperature relationship curve has the best fitting degree, and the error is within 2mK.

[0104] S6: Obtain a comprehensive evaluation result of the temperature sensor to be tested according to the first temperature deviation, the second temperature deviation, the third temperature deviation, the fourth temperature deviation and the response time of the temperature sensor to be tested.

[0105] Preferably, the method for obtaining the comprehensive evaluation result of the temperature sensor to be tested is as follows:

[0106] When the first temperature deviation, the second temperature deviation, the third temperature deviation, and the fourth temperature deviation are all no greater than the set accuracy threshold, and the response time is no greater than the set response time threshold, the temperature sensor to be tested can meet the use requirements. At this time, the temperature sensor to be tested is qualified.

[0107] When any one of the first temperature deviation, the second temperature deviation, the third temperature deviation, and the fourth temperature deviation is greater than the set accuracy threshold, or the response time is greater than the response time threshold, the temperature sensor to be tested cannot meet the use requirements. At this time, the temperature sensor to be tested is unqualified.

[0108] Specifically, in one embodiment of the present invention,

[0109] First, the temperature sensor is evaluated for the deviation of the triple point of water, and the evaluation result is Δt1≤2mk;

[0110] Secondly, the deviation of the gallium fixed point of the temperature sensor is evaluated, and the evaluation result Δt2≤2mk;

[0111] Secondly, the temperature sensor is evaluated for the short-term deviation fluctuation of the temperature curve of the gallium fixed point, and the maximum value of the curve deviation peak value Δt3≤2mk;

[0112] Fourth, through the evaluation of the response time of the temperature sensor, the response time of the temperature sensor is less than the set response time threshold.

[0113] Fifth, by comparing the interpolation and extrapolation calibration methods of the polynomial fitting curve of the temperature sensor, the polynomial calibration adopts the interpolation method, and the evaluation result Δt4≤2mk;

[0114] Through the evaluation results of the above five methods for temperature sensors, a comprehensive evaluation of the temperature sensors to be tested was conducted. The fitting accuracy of the resistance-temperature relationship formula curve of the tested industrial platinum resistance sensor was high and met the accuracy tolerance. The final conclusion was that within the range of 20-60℃, the accuracy could reach 2mk, and the long-term stability and response speed during measurement were guaranteed accordingly.

[0115] Specifically, the temperature sensor of this embodiment is as follows: Figure 2 As shown, the main components include threaded protection tube, temperature measuring element, polytetrafluoroethylene shielded wire and LEMO connector.

[0116] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A method for evaluating a small-range ultra-high precision temperature sensor, characterized in that: The steps include: S1: Using a water triple point bottle, a precision temperature measuring bridge and a standard platinum resistance thermometer, obtain a first temperature deviation between the temperature sensor to be tested and the standard temperature sensor; S2: Using a gallium fixed point bottle, a precision temperature measuring bridge and a standard platinum resistance thermometer, obtain a second temperature deviation between the temperature sensor to be tested and the standard temperature sensor; S3: using a precision temperature measuring bridge to obtain a temperature curve of the temperature sensor to be tested at the gallium fixed point, so as to obtain a peak maximum value and a valley maximum value of the temperature curve, and then obtain a third temperature deviation; S4: Obtain the response time of the temperature sensor to be tested; S5: Obtaining a fourth temperature deviation between the temperature sensor to be tested and the standard temperature sensor according to a polynomial calibration evaluation method; S6: Obtain a comprehensive evaluation result of the temperature sensor to be tested according to the first temperature deviation, the second temperature deviation, the third temperature deviation, the fourth temperature deviation and the response time of the temperature sensor to be tested.

2. The evaluation method of a small-range ultra-high precision temperature sensor according to claim 1, characterized in that: The fourth temperature deviation is obtained as follows: S51: Obtain the temperature t of the i-th point on the temperature sensor to be tested i , the temperature t of the jth point j , the temperature t of the kth point k and the temperature t of the mth point m ; Wherein, i, j, k, m are the numbers of the points on the temperature sensor to be tested, i, j, k, m ≤ 4 and i ≠ j ≠ k ≠ m, S52: According to the temperature t of the i-th point on the temperature sensor to be tested i , the temperature t of the jth point on the temperature sensor to be tested j , the temperature t of the kth point on the temperature sensor to be tested k , establish four intermediate calculation determinants D, D1, D2 and D3; Where: D, D1, D2, D3 are all intermediate calculation determinants; R i The temperature of the temperature sensor to be tested is t i The resistance corresponding to the point, R j The temperature of the temperature sensor to be tested is t j The resistance corresponding to the point, R k The temperature of the temperature sensor to be tested is t k The resistance corresponding to the point; S53: Obtain characteristic parameters of the temperature sensor to be tested according to the four intermediate calculation determinants D, D1, D2 and D3; the characteristic parameters of the temperature sensor to be tested include the linear coefficient of the relationship between the resistance and temperature of the temperature sensor to be tested, the quadratic coefficient of the relationship between the resistance and temperature of the temperature sensor to be tested, and the resistance value of the temperature sensor to be tested when the temperature is 0°C; S54: Obtaining the resistance of the mth point on the temperature sensor to be tested according to the characteristic parameters of the temperature sensor to be tested and based on the resistance-temperature relationship in the IEC60751 standard; S55: Obtaining a fourth temperature deviation between the temperature sensor to be tested and the standard temperature sensor according to the resistance of the mth point on the temperature sensor to be tested.

3. The evaluation method of a small-range ultra-high precision temperature sensor according to claim 2, characterized in that: The characteristic parameters of the temperature sensor to be tested are obtained as follows: Where: Indicates the resistance value of the temperature sensor to be tested when the temperature is 0°C; A * The linear coefficient that represents the relationship between the resistance and temperature of the temperature sensor to be tested; B * The coefficient of the quadratic term that represents the relationship between the resistance and temperature of the temperature sensor under test.

4. The evaluation method of a small-range ultra-high precision temperature sensor according to claim 2, characterized in that: Get the temperature of the temperature sensor to be tested as t m The formula for the resistance corresponding to the point is as follows: Where: Indicates that the temperature on the temperature sensor to be tested is t m The resistance corresponding to the point; Indicates the resistance value of the temperature sensor to be tested when the temperature is 0°C; A * It represents the linear coefficient of the relationship between the resistance and temperature of the temperature sensor to be tested; B* represents the quadratic coefficient of the relationship between the resistance and temperature of the temperature sensor to be tested.

5. The evaluation method of a small-range ultra-high precision temperature sensor according to claim 2, characterized in that: The fourth temperature deviation is obtained as follows: Where: Δt4 represents the fourth deviation; Indicates that the temperature of the standard temperature sensor and the temperature of the temperature sensor to be tested are t m The resistance corresponding to the point.

6. The evaluation method of a small-range ultra-high precision temperature sensor according to claim 2, characterized in that: The temperature t of the i-th point on the temperature sensor to be tested i , the temperature t of the jth point j and the temperature t of the kth point k , the relationship satisfied is as follows: t k =(t i +t j ) / 2 t i =t L ,t j =t U Where: t L Indicates the lower limit of the temperature measurement range, t U Indicates the upper limit of the temperature measurement range.

7. The evaluation method of a small-range ultra-high precision temperature sensor according to claim 2, characterized in that: The temperature t of the i-th point on the temperature sensor to be tested i and the temperature t of the mth point m The satisfied relationship is as follows: t i =t L ,t m =t U ; Among them, t L Indicates the lower limit of the temperature measurement range, t U Indicates the upper limit of the temperature measurement range.

8. The evaluation method of a small-range ultra-high precision temperature sensor according to claim 2, characterized in that: The temperature t of the i-th point on the temperature sensor to be tested i and the temperature t of the mth point m The satisfied relationship is as follows: t i =t U ,t m =t L ; Among them, t L Indicates the lower limit of the temperature measurement range, t U Indicates the upper limit of the temperature measurement range.

9. The evaluation method of a small-range ultra-high precision temperature sensor according to claim 1, characterized in that: The method for obtaining the comprehensive evaluation results of the temperature sensor to be tested is as follows: When the first temperature deviation, the second temperature deviation, the third temperature deviation, and the fourth temperature deviation are all not greater than a set accuracy threshold, and the response time is not greater than a set response time threshold, the temperature sensor to be tested can meet the use requirements; When any one of the first temperature deviation, the second temperature deviation, the third temperature deviation, and the fourth temperature deviation is greater than a set accuracy threshold, or the response time is greater than a response time threshold, the temperature sensor to be tested cannot meet the use requirements.

10. The evaluation method of a small-range ultra-high precision temperature sensor according to claim 1, characterized in that: The third temperature deviation acquisition method is as follows: If the absolute value of the peak maximum value is greater than or equal to the average value of the trough maximum value, the third temperature deviation is the absolute value of the peak maximum value; If the absolute value of the peak maximum value is less than the average value of the trough maximum value, the third temperature deviation is the absolute value of the trough maximum value.

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