Contour backlight switching device and detection apparatus

Abstract

The present application belongs to the technical field of semiconductor, and discloses a profile backlight switching device and a detection equipment.The profile backlight switching device comprises a base plate, blades and a driving assembly, the base plate is provided with a plurality of positioning columns, the plurality of positioning columns are uniformly distributed along the circumference of the base plate, and the scattering rate of the base plate is greater than that of a to-be-detected piece; the blades are arranged on the base plate, the plurality of blades and the plurality of positioning columns are one-to-one corresponding, the blades are provided with positioning holes matched with the positioning columns, and the reflectivity of the blades is greater than that of the to-be-detected piece; the driving assembly comprises a rotating disc and a driving piece capable of driving the rotating disc to rotate, the rotating disc is located above the blades, the blades and the rotating disc are slidingly connected, and when the driving piece drives the rotating disc to rotate forward or reversely, the blades slide along the rotating disc and rotate forward or reversely around the corresponding positioning columns, so that the blades rotate out or retract.The profile backlight switching device has a compact structure, and the continuity and integrity of profile imaging during detection are improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor, in particular to a profile backlight switching device and detection equipment. BACKGROUND

[0002] In the field of silicon wafer or mask visual detection, the detection surface is divided into a detection area and a non-detection area, and the non-detection area is usually near the edge. When full-surface detection is performed, the edge needs to be photographed, and the image contains the silicon wafer or mask and the background. The profile needs to be clearly imaged to filter the background part, that is, the complete profile needs to be clearly imaged at the detection station. When the edge gray scale information is obtained, the point with a sharp change in gray scale value needs to be found. This point is considered to be the position of the edge where the background and the silicon wafer or mask meet.

[0003] In the field of defect visual detection, the silicon wafer or mask is adsorbed or clamped on a stage. When profile detection is performed, due to the difference in roughness or the difference in surface topography, the stage cannot be brightly illuminated by the bright field illumination or the dark field illumination, that is, the edge cannot form a high-contrast image with the background, which is not conducive to the positioning of the silicon wafer or mask, and the complete edge and gap cannot be imaged. If different reflectivity materials are distributed at intervals under the silicon wafer or mask, the local edge imaging of the bright field and the dark field can be realized, but the complete edge and gap cannot be imaged.

[0004] Therefore, there is an urgent need for a profile backlight switching device and detection equipment to solve the above technical problems. SUMMARY

[0005] The present application aims to provide a profile backlight switching device and detection equipment, which can solve the problem that the edge profile cannot form a high-contrast image with the background and cannot image the complete edge and gap when edge defect detection is performed in the prior art. The profile backlight switching device and detection equipment have a compact structure and can provide a continuous and high-contrast background for bright field and dark field detection at the detection station, thereby improving the continuity and integrity of profile imaging during detection and realizing the detection of the edge area.

[0006] To achieve this purpose, the present application adopts the following technical solutions:

[0007] A profile backlight switching device, comprising:

[0008] A base plate, a plurality of positioning columns are arranged on the base plate, the plurality of positioning columns are uniformly distributed along the circumference of the base plate, and the scattering rate of the base plate is greater than that of the measured member;

[0009] A plurality of blades are arranged on the base plate, the plurality of blades and the plurality of positioning columns are one-to-one correspondingly arranged, a positioning hole matched with the positioning column is arranged on the blade, and the reflectivity of the blade is greater than that of the measured member;

[0010] The driving assembly comprises a rotating disc and a driving member capable of driving the rotating disc to rotate, the driving member is installed on an external workbench, the rotating disc is located above the blades, the outer diameter of the rotating disc is smaller than the outer diameter of the bottom disc, the blades and the rotating disc are in sliding connection, when the driving member drives the rotating disc to rotate forward or reversely, the blades slide along the rotating disc and rotate forward or reversely around the corresponding positioning columns, so that the blades are rotated out or retracted, when the blades are rotated out, the outer edges of the plurality of blades protrude to the outside of the rotating disc and form a circular structure, when the blades are retracted, the outer edges of the plurality of blades retreat to the inside of the rotating disc.

[0011] Preferably, a guide column is arranged on the blade, a long strip-shaped guide groove matched with the guide column is arranged on the rotating disc, the guide column can slide along the guide groove when the rotating disc rotates, and the extension direction of the guide groove is arranged at an angle with the radial direction of the rotating disc.

[0012] Preferably, the adjacent blades are arranged in a lapping manner.

[0013] Preferably, the guide column is arranged as a pin, and / or the positioning column is arranged as a pin.

[0014] Preferably, the driving member and the rotating disc are connected through a gear ring.

[0015] Preferably, the gear ring is arranged as a circular arc plate structure, one circular arc part of the circular arc plate structure is connected with the rotating disc, and the other circular arc part of the circular arc plate structure is connected with the output shaft of the driving member.

[0016] Preferably, the bottom disc is arranged as a circular ring structure, the circular ring structure comprises a circular ring body and a guide member arranged on the inner wall of the circular ring body, a plurality of the positioning columns are uniformly distributed along the circumferential direction of the circular ring body, and the rotating disc is rotatably sleeved on the guide member.

[0017] Preferably, the guide member is arranged as an L-shaped structure, the L-shaped structure comprises a first ring body and a second ring body which are perpendicular to each other, the first ring body is perpendicular to the circular ring body and connected with the circular ring body, the rotating disc is rotatably sleeved on the first ring body, and the second ring body extends to the inside of the circular ring body.

[0018] Preferably, the driving member is arranged as a motor.

[0019] The application further provides a detection device comprising a detector, a lens and the profile backlight switching device according to any one of the above-mentioned schemes, the lens is arranged above the edge of the bottom disc, the detector is arranged above the lens, and the detector and the lens are arranged in a front-to-front manner.

[0020] The application has the following beneficial effects:

[0021] The profile backlight switching device provided by the present application, when the driving member drives the rotating disc to rotate forward or reversely, the blades slide along the rotating disc and rotate forward or reversely around the corresponding positioning column, so that the blades rotate out or retract, when rotating out, the outer edges of the plurality of blades protrude to the outside of the rotating disc and form a circular structure, because the reflectivity of the blades is greater than that of the measured member, the bright field light source hits the blades, the reflectivity of the blades is higher than that of the measured member, and then the brightness of the blades is higher than that of the measured member, when retracting, the outer edges of the plurality of blades retreat to the inside of the rotating disc, because the outer diameter of the rotating disc is smaller than that of the base disc, and the scattering rate of the base disc is greater than that of the measured member, the dark field light source hits the base disc, the scattering rate of the base disc is higher than that of the measured member, and then the brightness of the base disc is higher than that of the measured member. That is, in the bright field and dark field illumination states, a high-contrast profile background can be obtained, and the edge area detection is realized. The profile backlight switching device has a compact structure, can provide continuous and high-contrast background for bright and dark fields in the detection station, improves the continuity and integrity of profile imaging during detection, and realizes edge area detection.

[0022] The present application also provides a detection device, comprising a detector, a lens and the profile backlight switching device described above, which can simultaneously image the profile background in bright field and dark field states, and improves the continuity and integrity of profile background imaging. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 FIG. 1 is a three-dimensional view of the profile backlight switching device provided by the present application;

[0024] Figure 2 FIG. 3 is a structural schematic view of the base disc provided by the present application;

[0025] Figure 3 FIG. 5 is a structural schematic view of the blade provided by the present application;

[0026] Figure 4 FIG. 7 is an assembly schematic view of the base disc and the blade provided by the present application;

[0027] Figure 5 FIG. 9 is an assembly schematic view of the driving assembly and the blade provided by the present application;

[0028] Figure 6 FIG. 11 is a top view of the profile backlight switching device provided by the present application;

[0029] Figure 7 FIG. 13 is a partial sectional view of the profile backlight switching device provided by the present application;

[0030] Figure 8 FIG. 15 is a light beam route map of the detection device under the bright field light source provided by the present application;

[0031] Figure 9is the light beam route map of the detection equipment under the dark field light source provided by the application;

[0032] Figure 10 is the profile map of the silicon wafer under the dark field light source provided by the application.

[0033] Figure 11 is the profile map of the silicon wafer under the dark field light source provided by the application.

[0034] in the figure:

[0035] 10, profile backlight switching device; 20, detector; 30, lens; 40, bright field light source; 50, dark field light source; 60, silicon wafer;

[0036] 100, chassis; 110, circular ring body; 120, guide; 121, first ring body; 122, second ring body; 130, positioning column;

[0037] 200, blade; 210, first step surface; 211, positioning hole; 220, second step surface; 230, guide column;

[0038] 310, rotating disc; 311, guide groove; 320, driving member; 330, gear ring. DETAILED DESCRIPTION

[0039] The application will be further described in detail below in conjunction with the drawings and examples. It can be understood that the specific examples described herein are only used to explain the application, and not to limit the application. In addition, it should be noted that, for the convenience of description, only the parts related to the application are shown in the drawings, not all the structures.

[0040] In the description of the application, unless otherwise explicitly specified and limited, the terms "connected", "connected", "fixed" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the application can be understood according to the specific circumstances.

[0041] In the present application, unless otherwise explicitly specified and limited, the first feature is "on" or "under" the second feature can include that the first and second features are in direct contact, or can include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, the first feature "on", "above" and "over" the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the first feature is higher than the second feature in horizontal height. The first feature "under", "below" and "under" the second feature includes that the first feature is directly below and obliquely below the second feature, or only indicates that the first feature is lower than the second feature in horizontal height.

[0042] In the description of the present embodiment, the terms "upper", "lower", "right", "left", and other orientation or position relationships are based on the orientation or position relationships shown in the drawings, and are only for the convenience of description and simplification of operation, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first" and "second" are only used to distinguish in description and have no special meaning.

[0043] The present embodiment provides a profile backlight switching device, which is designed to solve the problem that the profile at the edge cannot form a high-contrast image with the background when edge defect detection is performed in the prior art, and the complete edge and gap cannot be imaged. The profile backlight switching device is compact in structure and can provide a continuous and high-contrast background for bright-dark field detection at the detection station, thereby improving the continuity and integrity of profile imaging during detection and realizing the detection of the edge area. Specifically, the present embodiment takes the profile detection of a silicon wafer as an example to illustrate the profile backlight switching device.

[0044] Referring to Figures 1 to 7The profile backlight switching device 10 comprises a base plate 100, blades 200 and a driving assembly. The base plate 100 is provided with a plurality of positioning columns 130 which are uniformly distributed along the circumference of the base plate 100. The scattering rate of the base plate 100 is greater than that of the measured object. The blades 200 are arranged on the base plate 100. The blades 200 are provided in plurality. The blades 200 and the positioning columns 130 are arranged one by one in correspondence. The blades 200 are provided with positioning holes 211 which cooperate with the positioning columns 130. The reflectivity of the blades 200 is greater than that of the measured object. The driving assembly comprises a rotating disc 310 and a driving member 320 which can drive the rotating disc 310 to rotate. The driving member 320 is installed on an external workbench. The rotating disc 310 is located above the blades 200. The outer diameter of the rotating disc 310 is smaller than that of the base plate 100. The blades 200 and the rotating disc 310 are in sliding connection. When the driving member 320 drives the rotating disc 310 to rotate forward or reversely, the blades 200 slide along the rotating disc 310 and rotate forward or reversely around the corresponding positioning columns 130, so that the blades 200 are extended or retracted. When the blades 200 are extended, the outer edges of the blades 200 protrude to the outside of the rotating disc 310 and form a circular structure. When the blades 200 are retracted, the outer edges of the blades 200 retreat to the inside of the rotating disc 310. Exemplarily, the driving member 320 can be an electric motor.

[0045] When the driving member 320 drives the rotating disc 310 to rotate forward or reversely, the blades 200 slide along the rotating disc 310 and rotate forward or reversely around the corresponding positioning columns 130, so that the blades 200 are extended or retracted. When the blades 200 are extended, the outer edges of the blades 200 protrude to the outside of the rotating disc 310 and form a circular structure. Because the reflectivity of the blades 200 is greater than that of the measured object, the bright field light source 40 hits the blades 200. The reflectivity of the blades 200 is higher than that of the measured object. Therefore, the brightness of the blades 200 is higher than that of the measured object. When the blades 200 are retracted, the outer edges of the blades 200 retreat to the inside of the rotating disc 310. Because the outer diameter of the rotating disc 310 is smaller than that of the base plate 100, and the scattering rate of the base plate 100 is greater than that of the measured object, the dark field light source 50 hits the base plate 100. The scattering rate of the base plate 100 is higher than that of the measured object. Therefore, the brightness of the base plate 100 is higher than that of the measured object. That is, in the bright field and dark field illumination states, a high-contrast profile background can be obtained, and the edge area can be detected. The profile backlight switching device 10 has a compact structure and can provide a continuous and high-contrast background for bright-dark field detection in the detection station. The continuity and integrity of the profile imaging during detection are improved, and the edge area can be detected.

[0046] It is easy to understand that when the to-be-tested piece is the silicon wafer 60, the silicon wafer 60 is arranged above the rotating disc 310 through a support structure (such as a suction accessory), the outer diameter of the rotating disc 310 is arranged to be smaller than the diameter of the silicon wafer 60, the outer diameter of the base disc 100 is arranged to be greater than the diameter of the silicon wafer 60, when the rotating disc 310 rotates, the outer edges of the plurality of blades 200 protrude to the outside of the rotating disc 310 and form a circular structure, and the outer diameter of the circular structure is greater than the diameter of the silicon wafer 60. When the profile of the silicon wafer 60 is detected, the plurality of blades 200 are rotated out, the outer edges of the plurality of blades 200 protrude to the outside of the silicon wafer 60, the bright-field light source 40 is incident on the blades 200, the reflectivity of the blades 200 is higher than the reflectivity of the silicon wafer 60, and thus the brightness of the blades 200 is higher than the brightness of the silicon wafer 60, and when the rotating disc 310 rotates, the outer edges of the plurality of blades 200 retreat to the inside of the rotating disc 310, the dark-field light source 50 is incident on the base disc 100, the scattering rate of the base disc 100 is higher than the scattering rate of the silicon wafer 60, and thus the brightness of the base disc 100 is higher than the brightness of the silicon wafer 60. In other embodiments, the type and size of the to-be-tested piece can be set as required.

[0047] Preferably, the guide column 230 is arranged on the blade 200, and the long-strip-shaped guide groove 311 that cooperates with the guide column 230 is arranged on the rotating disc 310. When the rotating disc 310 rotates, the guide column 230 can slide along the guide groove 311, and the extension direction of the guide groove 311 is arranged at an angle with the radial direction of the rotating disc 310. When the rotating disc 310 rotates, the guide column 230 slides along the long-strip-shaped guide groove 311, and the extension direction of the guide groove 311 is arranged at an angle with the radial direction of the rotating disc 310, so that the blade 200 rotates around the corresponding positioning column 130 at the same time. The guide column 230 and the guide groove 311 cooperate with each other, and the structure is simple and easy to process and manufacture.

[0048] Optionally, the adjacent blades 200 are arranged in a lapping manner. The lapping arrangement makes the adjacent blades 200 in close contact, improves the coincidence rate of the adjacent blades 200, and further ensures that the outer edges of the plurality of blades 200 protrude to the outside of the rotating disc 310 and form a circular structure. For example, the blade 200 can be arranged in a stepped structure, the positioning hole 211 is arranged on the first step surface 210 of the stepped structure, and the guide column 230 is arranged on the second step surface 220 of the stepped structure. Alternatively, the blade 200 can also be arranged in a sheet structure, which can be set as required.

[0049] In this embodiment, the guide column 230 is arranged as a pin, and / or the positioning column 130 is arranged as a pin. The structure of the pin is simple, reliable to use, and easy to assemble.

[0050] Optionally, the driving member 320 and the rotating disc 310 are connected through the gear ring 330. This kind of arrangement improves the assembly convenience of the driving member 320 and the rotating disc 310. Further, the gear ring 330 is arranged in a circular arc plate structure, one circular arc part of the circular arc plate structure is connected with the rotating disc 310, and the other circular arc part of the circular arc plate structure is connected with the output shaft of the driving member 320. The circular arc plate structure matches the structure of the rotating disc 310, so that the overall structure of the profile backlight switching device 10 is more beautiful.

[0051] In order to improve the installation reliability of the rotating disc 310, the base plate 100 is arranged in a circular ring structure, the circular ring structure includes a circular ring body 110 and a guide member 120 arranged on the inner wall of the circular ring body 110, a plurality of positioning columns 130 are uniformly distributed along the circumference of the circular ring body 110, and the rotating disc 310 is rotationally sleeved on the guide member 120. In this way, the base plate 100 can position the rotating disc 310, so as to prevent the rotating disc 310 from deviating.

[0052] Optionally, the guide member 120 is arranged in an L-shaped structure, the L-shaped structure includes a first ring body 121 and a second ring body 122 which are perpendicular to each other, the first ring body 121 is perpendicular to the circular ring body 110 and connected with the circular ring body 110, the rotating disc 310 is rotationally sleeved on the first ring body 121, and the second ring body 122 extends to the inner side of the circular ring body 110. The arrangement of the first ring body 121 makes the guide member 120 and the rotating disc 310 have a larger contact area, thereby being conducive to improving the rotation stability of the rotating disc 310; the second ring body 122 extends to the inner side of the circular ring body 110, and the second ring body 122 can assist in being connected with external components, for example, the second ring body 122 can be fixedly sleeved on an external component, so as to facilitate the connection between the profile backlight switching device 10 and the external component.

[0053] Referring to Figures 8 to 11 , the embodiment also provides a detection device including the probe 20, the lens 30 and the profile backlight switching device 10 described above, the lens 30 is arranged above the edge of the base plate 100, the probe 20 is arranged above the lens 30, and the probe 20 and the lens 30 are arranged opposite to each other. The detection device can simultaneously image the profile background under bright field and dark field states, and improves the continuity and integrity of profile background imaging acquisition.

[0054] It is easy to understand that when the to-be-detected member is the silicon wafer 60, under the bright field state, referring to Figure 8 and Figure 10 , the lens 30 is moved to be directly above the edge of the silicon wafer 60 outside the edge, and the edge of the silicon wafer 60 is in the field of view of the lens 30, the light beam emitted by the bright field light source 40 is incident on the vane 200 through the lens 30, the light beam is incident on the probe 20 through the lens 30 after being reflected by the vane 200, and imaging is performed; under the dark field state, referring to Figure 9 and Figure 11The dark field light source 50 is directed to the base 100, and the light beam is scattered by the base 100 and then enters the detector 20 via the lens 30 to form an image.

[0055] Obviously, the above embodiments of the present application are merely exemplary for clearly illustrating the present application, and are not intended to limit the embodiments of the present application. Various obvious changes, re-adjustments and substitutions can be made by those skilled in the art without departing from the scope of the present application. Here, it is not necessary and also impossible to enumerate all the embodiments. Any modification, equivalent substitution and improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the claims of the present application.

Claims

1. A contour backlight switching device, characterized in that, include: A chassis (100) is provided with a plurality of positioning posts (130), which are evenly distributed along the circumference of the chassis (100). The scattering rate of the chassis (100) is greater than that of the test piece. A blade (200) is placed on the chassis (100). Multiple blades (200) are provided, and multiple blades (200) and multiple positioning posts (130) are provided in a one-to-one correspondence. The blade (200) is provided with a positioning hole (211) that cooperates with the positioning post (130). The reflectivity of the blade (200) is greater than the reflectivity of the test piece. The drive assembly includes a turntable (310) and a drive member (320) capable of driving the turntable (310) to rotate. The drive member (320) is mounted on an external worktable. The turntable (310) is located above the blade (200). The outer diameter of the turntable (310) is smaller than the outer diameter of the chassis (100). The blade (200) and the turntable (310) are slidably connected. When the drive member (320) drives the turntable (310) to rotate clockwise or counterclockwise, the blade (200) slides along the turntable (310) and rotates clockwise or counterclockwise around the corresponding positioning post (130), causing the blade (200) to rotate out or retract. When rotating out, the outer edges of multiple blades (200) protrude to the outside of the turntable (310) and form a circular structure. When retracting, the outer edges of multiple blades (200) retreat to the inside of the turntable (310).

2. The contour backlight switching device according to claim 1, characterized in that, The blade (200) is provided with a guide post (230), and the turntable (310) is provided with an elongated guide groove (311) that cooperates with the guide post (230). When the turntable (310) rotates, the guide post (230) can slide along the guide groove (311). The extension direction of the guide groove (311) and the radial direction of the turntable (310) are set at an angle.

3. The contour backlight switching device according to claim 2, characterized in that, The adjacent blades (200) are arranged to overlap each other.

4. The contour backlight switching device according to claim 2, characterized in that, The guide post (230) is configured as a pin, and / or the positioning post (130) is configured as a pin.

5. The contour backlight switching device according to claim 1, characterized in that, The drive unit (320) and the turntable (310) are connected by a gear ring (330).

6. The contour backlight switching device according to claim 5, characterized in that, The gear ring (330) is configured as an arc plate structure, one arc portion of which is connected to the turntable (310), and the other arc portion of which is connected to the output shaft of the drive unit (320).

7. The contour backlight switching device according to claim 1, characterized in that, The chassis (100) is configured as a ring-shaped structure, which includes a ring body (110) and a guide member (120) disposed on the inner wall of the ring body (110). A plurality of positioning posts (130) are evenly distributed along the circumference of the ring body (110), and the turntable (310) is rotatably sleeved on the guide member (120).

8. The contour backlight switching device according to claim 7, characterized in that, The guide (120) is configured as an L-shaped structure, which includes a first ring (121) and a second ring (122) that are perpendicular to each other. The first ring (121) is perpendicular to the circular ring (110) and connected to the circular ring (110). The turntable (310) is rotatably sleeved on the first ring (121), and the second ring (122) extends toward the inner side of the circular ring (110).

9. The contour backlight switching device according to claim 1, characterized in that, The drive unit (320) is a motor.

10. A testing device, characterized in that, The device includes a detector (20), a lens (30), and a contour backlight switching device as described in any one of claims 1-9, wherein the lens (30) is disposed above the edge of the chassis (100), the detector (20) is disposed above the lens (30), and the detector (20) and the lens (30) are positioned opposite each other.

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