Interlocking circuit of process equipment, control method and control equipment

Abstract

The invention relates to the technical field of semiconductor equipment power supply, in particular to an interlocking circuit of process equipment, a control method and control equipment, and aims to solve the problems that the process equipment switches different power supplies and the interlocking circuit is low in safety. The interlocking circuit comprises a direct current power supply module used for providing direct current for the process equipment; the medium-frequency power supply module is used for providing medium-frequency power for the process equipment; the direct-current power supply or the intermediate-frequency power supply is selected to be connected with the process equipment in a plugging mode, power supply selection of multiple power supplies on the same hardware is achieved, meanwhile, the purpose of power supply interlocking control is achieved by checking whether the plugging condition is correct or not, and therefore the process equipment can achieve switching of the direct-current power supply and the intermediate-frequency power supply through the hardware; and the interlocking control safety is improved in a hardware plugging mode.

Description

Technical Field

[0001] The present application relates to the technical field of power supply equipment for semiconductor processes, and in particular to an interlocking circuit, a control method and a control device for process equipment. Background Art

[0002] Semiconductor and photovoltaic materials usually need to undergo chemical or physical treatment before they can be applied to products. PVD technology is physical vapor deposition, which refers to the use of physical methods under vacuum conditions to vaporize the surface of the material source into gaseous atoms or molecules, or partially ionize them into ions, and through a low-pressure gas process, deposit a thin film with certain special functions on the surface of the semiconductor and photovoltaic material matrix. It mainly includes vacuum evaporation coating, vacuum sputtering coating and vacuum ion plating.

[0003] The power supply for magnetron sputtering equipment to generate electric fields is the core of PVD equipment. Different processes require the selection of appropriate power supplies to match them. For conductive targets, DC power supplies are generally configured, and for insulating targets or targets with poor conductivity, medium-frequency power supplies are generally configured.

[0004] However, existing PVD equipment is only equipped with DC power supply or medium frequency power supply, and cannot support hardware support for arbitrary selection of two power supplies. In addition, the power supply corresponding to the existing PVD has no hardware interlock, or the interlock is implemented through communication and software, which makes the interlock control security low. Summary of the invention

[0005] In view of this, an embodiment of the present application provides an interlocking circuit, a control method and a control device for a process equipment to solve the problem that the PVD equipment cannot realize hardware switching between the DC power supply and the medium frequency power supply, and the problem that the interlocking control safety is low.

[0006] In a first aspect, an embodiment of the present application provides an interlock circuit of a process device, which is applied to power switching of the process device, including:

[0007] A DC power supply module, comprising a first plug port and a second plug port, wherein the first plug port and the second plug port are pluggably connected to a first connection port and a second connection port of the process equipment, respectively, and is used to provide DC power to the process equipment when the first connection port is only connected to the first plug port and the second connection port is only connected to the second plug port;

[0008] An intermediate frequency power supply module, comprising a third plug port and a fourth plug port, wherein the third plug port and the fourth plug port are pluggably connected to the first connection port and the second connection port of the process equipment, respectively, and is used to provide intermediate frequency power to the process equipment when the first connection port is only connected to the third plug port and the second connection port is only connected to the fourth plug port;

[0009] The DC power supply module is also connected to the signal connection port of the process equipment, and is used to receive an initial DC enable signal only when the first connection port and the second connection port of the process equipment are connected to the first plug port and the second plug port respectively;

[0010] The intermediate frequency power supply module is also connected to the signal connection port of the process equipment, and is used to receive an initial intermediate frequency enable signal only when the first connection port and the second connection port of the process equipment are respectively connected to the third plug port and the fourth plug port.

[0011] In combination with the first aspect, in some implementations of the first aspect, the interlock circuit further includes:

[0012] An interlock control module, comprising a fifth plug-in port, a first signal connection port, a second signal connection port and a third signal connection port, wherein the fifth plug-in port of the interlock control module is pluggable and connected to the signal connection port of the process equipment, and is used to receive an initial enable signal provided by the process equipment, the first signal connection port and the second signal connection port are respectively connected to the DC power supply module, and when a first interlock condition is met, a target DC enable signal is output through the first signal connection port and the second signal connection port;

[0013] The third signal connection port of the interlock control module is connected to the intermediate frequency power supply module, and when the second interlock condition is met, the target intermediate frequency enable signal is output through the third signal connection port, wherein the first interlock condition includes the first signal connection port and the second signal connection port being electrically connected to the inside of the DC power supply module, and the second interlock condition includes the third signal connection port being electrically connected to the inside of the intermediate frequency power supply module.

[0014] In combination with the first aspect, in certain implementations of the first aspect, the first interlock condition also includes at least one of the emergency stop signal of the process equipment not being triggered and the cathode preparation of the process equipment being continued, and the second interlock condition also includes at least one of the emergency stop signal of the process equipment not being triggered and the cathode preparation of the process equipment being continued.

[0015] In combination with the first aspect, in some implementations of the first aspect, the DC power supply module includes:

[0016] A first DC cable, a second DC cable, a first DC power connector, a second DC power connector, a first DC signal connector, a second DC signal connector, a first relay, and a second relay;

[0017] The first output end of the first DC cable is pluggably connected to the first connection port of the process equipment as the first plug-in port of the DC power module, the input end of the first DC cable is connected to the first DC power connector, and the second output end of the first DC cable is connected to one end of the coil in the first relay, so as to connect the process equipment to the first DC power connector;

[0018] The other end of the coil in the first relay is connected to the power output end of the equipment power cabinet where the DC power module is located, one end of the contact in the first relay is connected to the signal connection port of the process equipment, and the other end of the contact in the first relay is connected to the first DC signal connector, for providing a first DC enable signal to the first DC signal connector;

[0019] The first output end of the second DC cable is pluggably connected to the second connection port of the process equipment as the second plug-in port of the DC power module, the input end of the second DC cable is connected to the second DC power connector, and the second output end of the second DC cable is connected to one end of the coil in the second relay, so as to connect the process equipment to the second DC power connector;

[0020] The other end of the coil in the second relay is connected to the power output end of the equipment power cabinet where the DC power module is located, one end of the contact in the second relay is connected to the signal connection port of the process equipment, and the other end of the contact in the second relay is connected to the second DC signal connector, which is used to provide a second DC enable signal to the second DC signal connector.

[0021] In combination with the first aspect, in some implementations of the first aspect, the intermediate frequency power supply module includes:

[0022] A first intermediate frequency cable, a second intermediate frequency cable, an intermediate frequency power supply and a third relay;

[0023] Wherein, the intermediate frequency power supply is provided with an intermediate frequency power connector and an intermediate frequency signal connector;

[0024] The output end of the first intermediate frequency cable is pluggably connected to the first connection port of the process equipment as the third plug-in port of the intermediate frequency power supply module, and the input end of the first intermediate frequency cable is connected to the negative output end of the intermediate frequency power supply connector, so as to connect the process equipment and the intermediate frequency power supply connector;

[0025] The first output end of the second intermediate frequency cable is pluggably connected to the second connection port of the process equipment as the fourth plug-in port of the intermediate frequency power module, the input end of the second intermediate frequency cable is connected to the positive output end of the intermediate frequency power connector, and the second output end of the second intermediate frequency cable is connected to one end of the coil in the third relay, so as to connect the process equipment and the intermediate frequency power connector;

[0026] The other end of the coil in the third relay is connected to the power output end of the equipment power cabinet where the intermediate frequency power supply module is located, one end of the contact in the third relay is connected to the signal connection port of the process equipment, and the other end of the contact in the third relay is connected to the intermediate frequency signal connector, for providing an intermediate frequency enable signal to the intermediate frequency signal connector.

[0027] In combination with the first aspect, in some implementations of the first aspect, the interlocking control module further includes:

[0028] Emergency stop button, fourth relay, fifth relay and reset button;

[0029] One end of the emergency stop button is connected to the power output end of the equipment power cabinet where the interlock control module is located, and the other end of the emergency stop button is connected to the first coil control end in the fourth relay and one end of the reset button, and the emergency stop button is used to trigger the emergency stop operation of the interlock circuit;

[0030] The second coil control end of the fourth relay is connected to the power output end of the equipment power cabinet where the interlock control module is located, the third coil control end of the fourth relay is connected to the other end of the reset button, one end of the contact in the fourth relay is connected to the power output end of the equipment power cabinet, and the other end of the contact in the fourth relay is connected to one end of the coil in the fifth relay. The fourth relay is used to protect the interlock control module when an emergency stop is triggered;

[0031] The other end of the coil in the fifth relay is connected to the power output end of the equipment power cabinet where the interlocking control module is located, one end of the first contact and one end of the second contact in the fifth relay are both connected to the fifth plug-in port, the other end of the first contact in the fifth relay is connected to the DC power supply module as the first signal connection port of the interlocking control module, the other end of the second contact in the fifth relay is connected to the DC power supply module as the second input signal connection port of the interlocking control module, the other end of the first contact and the other end of the second contact in the fifth relay are also connected to the intermediate frequency power supply module as the third input signal connection port of the interlocking control module, and the fifth relay is used to control the process equipment to provide the target DC enable signal to the DC power supply module, or control the process equipment to provide the target intermediate frequency enable signal to the intermediate frequency power supply module.

[0032] In combination with the first aspect, in certain implementations of the first aspect, the process equipment is a PVD equipment, the PVD equipment having a first cathode target, a second cathode target and a ready driver, the first connection port and the second connection port are respectively connected to the first cathode target and the second cathode target, and the ready driver is connected to the signal connection port.

[0033] In a second aspect, an embodiment of the present application provides a control method for an interlock circuit, which is applied to an interlock circuit of a process device as described in any one of the first aspects, wherein the control method for the interlock circuit includes:

[0034] Determine the target power supply type corresponding to the power supply requirements of process equipment;

[0035] Determine a target connection mode based on the target power supply type, wherein the target connection mode includes a mode in which the intermediate frequency power supply module is connected to the process equipment or a mode in which the direct current power supply module is connected to the process equipment;

[0036] When a preset interlock condition is satisfied, interlock control is performed on the interlock circuit based on the target connection mode.

[0037] In conjunction with the second aspect, in some implementations of the second aspect, determining the target power supply type corresponding to the power supply requirement of the process equipment includes:

[0038] Obtaining power supply requirements of the process equipment;

[0039] When the power supply requirement is a DC power supply requirement, determining that the target power supply type is a DC power supply type;

[0040] When the power supply requirement is a medium frequency power supply requirement, the target power supply type is determined to be a medium frequency power supply type.

[0041] In combination with the second aspect, in some implementations of the second aspect, determining the target connection mode based on the target power supply type includes:

[0042] When the target power supply type is a DC power supply type, determining that the target connection mode is a DC connection mode;

[0043] Based on the DC connection mode, controlling a first DC cable in the DC power module to be connected to a first connection port of the process equipment, and controlling a second DC cable in the DC power module to be connected to a second connection port of the process equipment;

[0044] When the target power supply type is a medium frequency power supply type, determining that the target connection mode is a medium frequency connection mode;

[0045] Based on the intermediate frequency connection mode, the first intermediate frequency cable in the intermediate frequency power module is controlled to be connected to the first connection port of the process equipment, and the second intermediate frequency cable in the intermediate frequency power module is controlled to be connected to the second connection port of the process equipment.

[0046] In conjunction with the second aspect, in certain implementations of the second aspect, the interlocking condition is determined by the following method, including:

[0047] Determine whether the emergency stop button in the interlock control module is triggered, whether the process equipment is cathode ready, and whether the target connection mode is correctly connected to obtain corresponding judgment results;

[0048] Based on the judgment result, it is determined whether the interlock control module meets the interlock condition.

[0049] In conjunction with the second aspect, in certain implementations of the second aspect, determining whether the interlock control module satisfies an interlock condition based on the judgment result includes:

[0050] When the emergency stop button is not triggered, the cathode of the process equipment is ready, and the target connection mode is correctly connected to the DC connection mode, determining that the interlock control module meets the DC interlock condition;

[0051] When the emergency stop button is not triggered, the cathode of the process equipment is ready, and the target connection mode is correctly connected to the intermediate frequency connection mode, determining that the interlock control module meets the intermediate frequency interlock condition;

[0052] When the emergency stop button is triggered, determining that the interlock control module meets the emergency stop interlock condition;

[0053] When the cathode of the process equipment is not ready, determining that the interlock control module meets the equipment interlock condition;

[0054] When the emergency stop button is not triggered, the cathode of the process equipment is not ready, and the target connection mode is not correctly connected, it is determined that the interlock control module meets the power interlock condition.

[0055] In combination with the second aspect, in some implementations of the second aspect, when a preset interlocking condition is met, performing interlocking control on the interlocking circuit based on the target connection mode includes:

[0056] When the interlocking condition is a DC interlocking condition, controlling the DC power supply module to release locking control based on a DC connection mode, so that the DC power supply module provides DC power to the process equipment;

[0057] When the interlocking condition is an intermediate frequency interlocking condition, the intermediate frequency power supply module is controlled to release the locking control based on the intermediate frequency connection mode, so that the intermediate frequency power supply module provides intermediate frequency power to the process equipment;

[0058] When the interlock condition is an emergency stop interlock condition, the process equipment is controlled to be emergency stopped and restarted by pressing a reset button;

[0059] When the interlock condition is an equipment interlock condition, controlling the signal connection port of the process equipment to output a disconnection signal;

[0060] controlling the fifth relay to be in an off state based on the off signal;

[0061] When the interlock condition is a power interlock condition, controlling the interlock control of the first relay and the second relay based on the DC connection mode, and controlling the process equipment to block the DC power supply module from providing DC power;

[0062] When the interlocking condition is a power interlocking condition, the process equipment is controlled based on the intermediate frequency connection mode to block the intermediate frequency power supply module from providing intermediate frequency power.

[0063] In a third aspect, an embodiment of the present application provides a control device, comprising: a processor and a memory, wherein the processor is used to execute a control program of an interlocking circuit stored in the memory to implement the control method of the interlocking circuit described in any one of the second aspects.

[0064] The interlocking circuit of the process equipment provided in the embodiment of the present application is provided with a DC power supply module, including a first plug-in port and a second plug-in port, the first plug-in port and the second plug-in port are pluggably connected to the first connection port and the second connection port of the process equipment respectively, and are used to provide DC power to the process equipment when the first connection port is only connected to the first plug-in port, and the second connection port is only connected to the second plug-in port; the intermediate frequency power supply module includes a third plug-in port and a fourth plug-in port, the third plug-in port and the fourth plug-in port are pluggably connected to the first connection port and the second connection port of the process equipment respectively, and are used to provide intermediate frequency power to the process equipment when the first connection port is only connected to the third plug-in port, and the second connection port is only connected to the fourth plug-in port; the DC power supply module is also connected to The signal connection port of the process equipment is connected to receive an initial DC enable signal only when the first connection port and the second connection port of the process equipment are respectively connected to the first plug-in port and the second plug-in port; the intermediate frequency power supply module is also connected to the signal connection port of the process equipment to receive an initial intermediate frequency enable signal only when the first connection port and the second connection port of the process equipment are respectively connected to the third plug-in port and the fourth plug-in port, and a DC power supply or an intermediate frequency power supply is selected to be connected to the process equipment by plugging and unplugging, so as to realize multiple power supply options on the same hardware. At the same time, the purpose of power interlock control is achieved by checking whether the plug-in connection is correct. Therefore, the process equipment can realize the switching of DC power supply and intermediate frequency power supply through hardware, and improve the technical effect of interlock control safety by plugging and unplugging hardware. BRIEF DESCRIPTION OF THE DRAWINGS

[0065] By describing the embodiments of the present application in more detail in conjunction with the accompanying drawings, the above and other purposes, features and advantages of the present application will become more apparent. The accompanying drawings are used to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application. In the accompanying drawings, the same reference numerals generally represent the same components or steps.

[0066] Figure 1 The figure shows a schematic diagram of the structure of an interlocking circuit of a process equipment provided in Example 1 of the present application;

[0067] Figure 2 A schematic diagram of the structure of the interlocking circuit of the process equipment provided in Example 2 of the present application;

[0068] Figure 3 A schematic diagram of the structure of an interlocking circuit of a process equipment provided in Example 3 of the present application;

[0069] Figure 4A schematic diagram of the structure of an interlocking circuit of another process equipment provided in Example 3 of the present application;

[0070] Figure 5 A schematic diagram of the structure of an interlocking control module provided in Embodiment 4 of the present application;

[0071] Figure 6 A flowchart of a control method for an interlocking circuit provided in Embodiment 5 of the present application;

[0072] Figure 7 A flowchart of another interlock circuit control method provided in Embodiment 5 of the present application;

[0073] Figure 8 A flowchart of another interlock circuit control method provided in Embodiment 5 of the present application;

[0074] Fig. 9 A schematic diagram of a flow chart of a DC power supply interlocking control method provided in Embodiment 5 of the present application;

[0075] Fig.10 A flowchart of a medium frequency power supply interlocking control method provided in Embodiment 5 of the present application;

[0076] Fig.11 A flowchart of an emergency stop interlock control method provided in Embodiment 5 of the present application;

[0077] Fig.12 A schematic diagram of the structure of a control device provided in Example 6 of the present application.

[0078] Reference numerals:

[0079] 1. Process equipment; 10. DC power supply module; 20. Intermediate frequency power supply module; 30. Interlock control module; 11. First plug port; 12. Second plug port; 21. Third plug port; 22. Fourth plug port; 2. First connection port; 3. Second connection port; 4. Signal connection port; 5. First DC power connector; 6. Second DC power connector; 7. First DC signal connector; 8. Second DC signal connector; 9. Intermediate frequency power supply; 10. Intermediate frequency power connector; 11. Intermediate frequency signal connector; 12. First DC cable; 13. Second DC cable; 14. Fifth plug port; 15. First intermediate frequency cable; 16. Second intermediate frequency cable; 18. Emergency stop button; 19. Reset button; K1. First relay; K2. Second relay; K3. Third relay; K4. Fourth relay; K5. Fifth relay; A. First cathode target; B. Second cathode target; C. Ready drive. DETAILED DESCRIPTION

[0080] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0081] Safety interlock circuit is a safety control system that ensures that specific operations can be performed only when safety conditions are met through logical combination and physical connection. This circuit system realizes multi-faceted control through mutual constraints, and makes two actions have a mutual constraint relationship through mechanical or electrical mechanisms, thereby ensuring normal operation, realizing automatic control and preventing accidents.

[0082] At present, PVD technology requires the selection of matching power supplies for different processes, such as medium frequency power supplies and DC power supplies. For conductive targets, DC power supplies are generally configured, and for insulating targets or targets with poor conductivity, medium frequency power supplies are generally configured. However, the power supply of the existing PVD technology only sets one power supply in terms of hardware, and cannot achieve a fast switching method between medium frequency power supplies and DC power supplies. At the same time, PVD technology has no hardware interlocking, or interlocking control is achieved through communication and software. This increases the process flow and complexity of the process in the manufacturing process of the process equipment, and reduces the safety of hardware interlocking control.

[0083] The present application is proposed to solve the problem of switching between different power supplies and the interlock protection problem in the power supply circuit during the manufacturing process of the above-mentioned PVD process equipment. The film preparation device is described in detail below in conjunction with the accompanying drawings.

[0084] Embodiment 1

[0085] Figure 1 The figure shows a schematic diagram of the structure of the interlocking circuit of the process equipment provided in the first embodiment of the present application. Figure 1 As shown, the structure of the interlocking circuit specifically includes:

[0086] The DC power supply module 10 includes a first plug-in port 01 and a second plug-in port 02. The first plug-in port 11 and the second plug-in port 12 are respectively pluggably connected to the first connection port 2 and the second connection port 3 of the process equipment 1, and are used to provide DC power to the process equipment 1 when the first connection port 2 is only connected to the first plug-in port 01 and the second connection port 3 is only connected to the second plug-in port 02.

[0087] The intermediate frequency power supply module 20 includes a third plug-in port 21 and a fourth plug-in port 22, which are respectively pluggable with the first connection port 2 and the second connection port 3 of the process equipment 1, and are used to provide intermediate frequency power to the process equipment 1 when the first connection port 2 is only connected to the third plug-in port 21 and the second connection port 3 is only connected to the fourth plug-in port 22.

[0088] The DC power supply module 10 is also connected to the signal connection port 4 of the process equipment 1 , and is used to receive an initial DC enable signal only when the first plug port 01 of the process equipment 1 is connected to the first connection port 2 .

[0089] The intermediate frequency power supply module 20 is also connected to the signal connection port of the process equipment 1 , and is used to receive the initial intermediate frequency enable signal only when the third plug port 21 of the process equipment 1 is connected to the fourth connection port 3 .

[0090] Exemplarily, the hardware parts corresponding to the medium frequency power supply module and the direct current power supply module are embedded in a power supply cabinet that provides power supply options for process equipment. The process equipment mentioned here can be understood as PCV process equipment, and can also be other equipment such as CVD process equipment that requires medium frequency power supply or direct current power supply. The first connection port of the process equipment mentioned here can be understood as the first target material connection port inside the PVD process equipment, and the second connection port of the process equipment mentioned here can be understood as the connection port for the second type of target material inside the PVD process equipment. Power supply for different target materials is provided to the PVD process equipment through the first connection port and the second connection port. The medium frequency electricity mentioned here can be understood as electric energy with a limited medium frequency range. For example, the range of [1kHz, 100kHz] is set as medium frequency electricity, and adjusted according to the working voltage of the process equipment.

[0091] The intermediate frequency power supply module and the direct current power supply module are selectively connected to the process equipment through a pluggable interface. Through the first connection port and the second connection port set on the process equipment, when the direct current power supply module is selected, they are respectively connected to the first plug-in port and the second plug-in port of the direct current power supply module. While realizing the selection of the direct current power supply, since the process equipment only uses two connection ports, the process equipment is prevented from being connected to the intermediate frequency power supply module in hardware, and the process equipment will not be connected to the intermediate frequency power supply and the direct current power supply at the same time, thereby achieving the purpose of interlocking control. Even if the two connection ports of the process equipment are connected to a plug-in port of a direct current power supply module and a plug-in port of an intermediate frequency power supply module at the same time, the software control detects that both power modules are not successfully connected, and the role of safety protection can be achieved. Since it is detected that the connection is not safe, the process equipment cannot be powered, thereby improving the safety of the power supply of the equipment.

[0092] In some embodiments, according to the situation that the PVD process equipment adopts a conductive target material, a DC power supply needs to be selected for power supply. By connecting the first plug-in port 11 of the DC power module 10 on the hardware device to the first connection port 2 in the PVD process equipment 1, and connecting the second plug-in port 02 in the DC power module 10 to the second connection port 3 of the PVD process equipment 1, it is ensured that the power supply interface in the DC power module 10 is correctly connected. At this time, after the successful port connection is detected inside the DC power module 10, an initial DC enable signal is sent after the cathode of the PVD process equipment 1 is ready, and the initial DC enable signal is received through the DC power module 10. After receiving the initial DC enable signal, the DC power module 10 controls the DC output, thereby providing a matching DC signal for the PVD process equipment 1, so that the PVD process equipment 1 can operate normally. Similarly, when the PVD process equipment 1 adopts an edge target or a target material with poor conductivity, it is determined that the power supply of the PVD process equipment 1 is a medium frequency power supply. (The means of determining whether to select the intermediate frequency power supply or the DC power supply here is not limited, and can be determined by hardware circuit feedback or obtained by software detection, which will not be repeated here.) The intermediate frequency power supply circuit is constructed by connecting the third plug-in port 21 in the intermediate frequency power supply module 20 to the first connection port 2 in the PVD process equipment 1, and connecting the fourth plug-in port 22 in the intermediate frequency power supply module 20 to the second connection port 3 in the PVD process equipment 1. When the PVD process equipment 1 detects that the intermediate frequency power supply module 20 is correctly connected, the initial intermediate frequency enable signal is output through the signal connection port 4. After the intermediate frequency power supply module 20 receives the initial intermediate frequency enable signal, the intermediate frequency electrical signal is provided to the PVD process equipment 1 through the intermediate frequency power supply module 20, so that the PVD process equipment 1 can switch between the DC power supply and the intermediate frequency power supply in the same hardware circuit according to different needs. At the same time, the plug-in connection method limits the misoperation of the connection port. When the DC power supply module is connected, the intermediate frequency power supply module will not be connected again, so as to achieve the purpose of interlocking control and improve the safety of the interlocking circuit.

[0093] The present application provides an interlocking circuit for a process equipment, which comprises a DC power supply module, including a first plug-in port and a second plug-in port, which are pluggable and connected to the first connection port and the second connection port of the process equipment respectively, and are used to provide DC power to the process equipment when the first connection port is only connected to the first plug-in port and the second connection port is only connected to the second plug-in port; an intermediate frequency power supply module, including a third plug-in port and a fourth plug-in port, which are pluggable and connected to the first connection port and the second connection port of the process equipment respectively, and are used to provide intermediate frequency power to the process equipment when the first connection port is only connected to the third plug-in port and the second connection port is only connected to the fourth plug-in port; the DC power supply module is also connected to the signal of the process equipment. The intermediate frequency power supply module is also connected to the signal connection port of the process equipment, and is used for receiving the initial DC enable signal only when the first connection port and the second connection port of the process equipment are respectively connected to the first plug-in port and the second plug-in port; the intermediate frequency power supply module is also connected to the signal connection port of the process equipment, and is used for receiving the initial intermediate frequency enable signal only when the first connection port and the second connection port of the process equipment are respectively connected to the third plug-in port and the fourth plug-in port, and the DC power supply or the intermediate frequency power supply is selected to be connected to the process equipment by plugging and unplugging, so as to realize multiple power supply options on the same hardware, and at the same time, the purpose of power interlock control is achieved by checking whether the plug-in situation is correctly connected. Therefore, the process equipment can realize the switching of DC power supply and intermediate frequency power supply through hardware, and improve the technical effect of interlock control safety by plugging and unplugging hardware.

[0094] Embodiment 2

[0095] Figure 2 A schematic diagram of the structure of the interlocking circuit of the process equipment provided in Example 2 of the present application. Figure 2 This is introduced based on the previous embodiment. Figure 2 As shown, the structure of the interlocking circuit specifically includes:

[0096] A direct current power supply module 10, an intermediate frequency power supply module 20 and a process equipment 1.

[0097] according to Figure 2 The diagram provided, the structure of the interlocking circuit also includes:

[0098] The interlock control module 30 includes a fifth plug-in port 14, a first signal connection port 31, a second signal connection port 32 and a third signal connection port 33. The fifth plug-in port 14 of the interlock control module 30 is pluggable with the signal connection port 4 of the process equipment 1, and is used to receive the initial enable signal provided by the process equipment 1. The first signal connection port 31 and the second signal connection port 32 are respectively connected to the DC power supply module 10, and when the first interlock condition is met, the target DC enable signal is output through the first signal connection port 31 and the second signal connection port 32.

[0099] The third signal connection port 33 of the interlock control module 30 is connected to the intermediate frequency power supply module 20. When the second interlock condition is met, the target intermediate frequency enable signal is output through the third signal connection port 33, wherein the first interlock condition includes the first signal connection port 31 and the second signal connection port 32 being connected to the inside of the DC power supply module 10, and the second interlock condition includes the third signal connection port 33 being connected to the inside of the intermediate frequency power supply module 20.

[0100] In some embodiments, the first interlock condition also includes at least one of the emergency stop signal of process equipment 1 not being triggered and the cathode preparation of process equipment 1 being continued, and the second interlock condition also includes at least one of the emergency stop signal of process equipment 1 not being triggered and the cathode preparation of process equipment 1 being continued.

[0101] Exemplarily, the interlock control module 30 is arranged between the PVD process equipment, the DC power supply module and the intermediate frequency power supply module, and serves as an emergency stop control switch to control whether the PVD process equipment provides an enable signal for the DC power supply module or the intermediate frequency power supply module.

[0102] In some embodiments, an interlock control module 30 is added between the PVD process equipment 1 and the DC power supply module 10 and the intermediate frequency power supply module 20, and an emergency stop control is provided in the interlock control module 30. After determining that the PVD process equipment 1 requires DC power supply, the first plug port 01 of the DC power supply module 10 is connected to the first connection port 2 of the PVD process equipment 1, and the second plug port 02 in the DC power supply module 10 is connected to the second connection port 3 of the PVD process equipment 1. After the DC power supply module 10 is correctly connected through software detection or the internal detection device of the PVD process equipment 1, it is determined whether the target material in the current PVD process equipment 1 is cathode ready, and the internal drive of the PVD process equipment 1 is used to drive the target material to the cathode ready state. , the control signal connection port 4 outputs the target DC enable signal to determine that the cathode in the PVD process equipment 1 is ready; and by determining that the emergency stop signal in the linkage control module 30 is not triggered, it is determined that it is ready. At this time, the linkage control module 30 is internally turned on, and the target DC enable signal output by the PVD process equipment 1 is sent to the DC power supply module 10 through the first signal connection port 31 and the second signal connection port 32. After the DC power supply module 10 receives the target DC enable signal, the DC signal is output to the PVD process equipment 1 through the first plug port 01 and the second plug port 02, providing a stable DC signal for the PVD process equipment 1, and completing the control of providing DC power to the PVD process equipment 1.

[0103] In other embodiments, after determining that the PVD process equipment 1 requires an intermediate frequency power supply, the third plug port 21 of the intermediate frequency power supply module 20 is connected to the first connection port 2 of the PVD process equipment 1, and the fourth plug port 22 in the intermediate frequency power supply module 20 is connected to the second connection port 3 of the PVD process equipment 1. After the intermediate frequency power supply module 20 is correctly connected through software detection or the internal detection device of the PVD process equipment 1 detects that the intermediate frequency power supply module 20 is correctly connected, it is determined whether the target material in the current PVD process equipment 1 is cathode ready, and the signal connection port 4 of the PVD process equipment 1 is controlled to output the target intermediate frequency enable signal through the internal drive of the PVD process equipment 1, and the PVD process equipment 1 is determined to be internally driven. The cathode in the D process equipment 1 is ready; and it is determined to be ready by judging that the emergency stop signal in the linkage control module 30 is not triggered. At this time, the linkage control module 30 is internally turned on, and the target intermediate frequency enable signal output by the PVD process equipment 1 is sent to the intermediate frequency power supply module 20 through the first signal connection port 31 and the second signal connection port 32. After the intermediate frequency power supply module 20 receives the target intermediate frequency enable signal, the intermediate frequency electrical signal is output to the PVD process equipment 1 through the third plug-in port 21 and the fourth plug-in port 22, so as to provide the PVD process equipment 1 with a stable intermediate frequency electrical signal, thereby completing the control of providing the intermediate frequency power supply to the PVD process equipment 1.

[0104] For example, after the intermediate frequency power supply module or the DC power supply module is correctly connected to the PVD process equipment, an emergency stop signal is detected inside the interlock control module, and it is determined that the current interlock control module is disconnected. At this time, regardless of whether the cathode of the PVD process equipment is ready, the generated target DC enable signal or target intermediate frequency enable signal cannot be transmitted to the DC power supply module or the intermediate frequency power supply module, resulting in the DC power supply module or the intermediate frequency power supply module being unable to provide a matching DC power supply or intermediate frequency power supply for the PVD process equipment. The connection between the PVD process equipment and the DC power supply module or the intermediate frequency power supply module is directly blocked by the interlock control module, thereby achieving the purpose of protecting the interlock circuit and improving the safety of the interlock circuit.

[0105] Embodiment 3

[0106] Figure 3 A schematic diagram of the structure of an interlocking circuit of a process equipment provided in Example 3 of the present application. Figure 3 This is introduced on the basis of the first embodiment. Figure 3 As shown, the structure of the interlocking circuit specifically includes:

[0107] A direct current power supply module 10, an intermediate frequency power supply module 20 and a process equipment 1.

[0108] according to Figure 3 The diagram provided shows that the DC power supply module 10 in the interlocking circuit includes:

[0109] A first DC cable 12, a second DC cable 13, a first DC power connector 5, a second DC power connector 6, a first DC signal connector 7, a second DC signal connector 8, a first relay K1 and a second relay K2.

[0110] The first output end of the first DC cable 12 serves as the first plug-in port 01 of the DC power module 10 and is pluggably connected to the first connection port 2 of the process equipment 1. The input end of the first DC cable 12 is connected to the first DC power connector 5. The second output end of the first DC cable 12 is connected to one end of the coil in the first relay K1, and is used to connect the process equipment 1 and the first DC power connector 5.

[0111] The other end of the coil in the first relay K1 is connected to the power output end of the equipment power cabinet where the DC power supply module 10 is located, one end of the contact in the first relay K1 is connected to the signal connection port 4 of the process equipment 1, and the other end of the contact in the first relay K1 is connected to the first DC signal connector 7, which is used to provide a first DC enable signal to the first DC signal connector 7.

[0112] The first output end of the second DC cable 13 serves as the second plug-in port 02 of the DC power module 10 and is pluggably connected to the second connection port 3 of the process equipment 1, the input end of the second DC cable 13 is connected to the second DC power connector 6, and the second output end of the second DC cable 13 is connected to one end of the coil in the second relay K2, and is used to connect the process equipment 1 and the second DC power connector 6.

[0113] The other end of the coil in the second relay K2 is connected to the power output end of the equipment power cabinet where the DC power supply module 10 is located, one end of the contact in the second relay K2 is connected to the signal connection port 4 of the process equipment 1, and the other end of the contact in the second relay K2 is connected to the second DC signal connector 8, which is used to provide a second DC enable signal to the second DC signal connector 8.

[0114] For example, the equipment power cabinet can be understood as a hardware device, which is a power cabinet that provides power to the process equipment. A DC power module and an intermediate frequency power module are embedded in the power cabinet.

[0115] The DC cable mentioned here is used as the connection line between the DC power module and the process equipment. The IF cable mentioned here is used as the connection line between the IF power module and the process equipment. The connection between the power module (DC power module or IF power module) and the process equipment is changed by plugging and unplugging the cable.

[0116] Exemplarily, the process equipment is a PVD equipment having a first cathode target A, a second cathode target B and a ready driver C, the first connection port 2 and the second connection port 3 are respectively connected to the first cathode target A and the second cathode target B, and the ready driver C is connected to the signal connection port 4.

[0117] In some embodiments, the first DC cable 12 is pre-connected to the first relay K1 and the first DC power connector 5 inside the DC power module 10, and the second DC cable 13 is connected to the second relay K2 and the second DC power connector 6. When the power supply requirement corresponding to the target material of the PVD process equipment 1 is a DC power supply, the first DC cable 12 is connected to the first connection port 2 by plugging and unplugging, and the second DC cable 13 is connected to the second connection port 3 by plugging and unplugging. After the PVD process equipment 1 is correctly connected to the DC power module 10 through software detection or detection of the PVD process equipment 1, the internal ready driver C is started (the purpose of starting is achieved by closing the switch in the equivalent result), the cathode ready preparation of the PVD process equipment 1 is completed, and an enable signal is outputted externally through the signal connection port 4. When it is detected that the DC power module 10 is correctly connected, an initial DC enable signal is output, and when it is detected that the intermediate frequency power module 20 is correctly connected, an initial intermediate frequency enable signal is output. When the first DC cable 12 is correctly connected to the first connection port 2, the first relay K1 detects that the coil is energized, and then drives the contact in the first relay K1 to close, so as to realize the connection between the PVD process equipment 1 and the first DC signal connector 7, and provides the first DC enable signal to the first DC signal connector 7 through the signal connection port 4. Similarly, when the second DC cable 13 is correctly connected to the second connection port 3, the second relay K2 detects that the coil is energized, and then drives the contact in the second relay K2 to close, so as to realize the connection between the PVD process equipment 1 and the second DC signal connector 8, and provides the second DC enable signal to the second DC signal connector 8 through the signal connection port 4. After receiving the first DC enable signal, the DC power supply module provides the first DC power signal to the PVD process equipment 1 through the first DC connector 5, and after receiving the second DC enable signal, provides the second DC power signal to the PVD process equipment 1 through the second DC connector 6, so as to realize the purpose of DC signal power supply. After the DC power supply module is connected to the PVD process equipment by plugging and unplugging, the PVD process equipment cannot provide a pluggable port for the medium frequency power supply module, which limits the connection between the medium frequency power supply module and the PVD process equipment, and achieves the purpose of interlocking control, ensuring that the PVD process equipment will not be connected to the medium frequency power supply module at the same time as the DC power supply module is connected. Compared with the prior art method of controlling the connection between the PVD process equipment and the medium frequency power supply module by software, even if the software sends a request for connection between the PVD process equipment and the medium frequency power supply module, the connection between the PVD process equipment and the medium frequency power supply module cannot be achieved due to the connection status of the hardware. The purpose of protecting the equipment is achieved by blocking the wrong connection through hardware.

[0118] according to Figure 3 The diagram provided shows that the medium frequency power supply module 20 in the interlocking circuit includes:

[0119] A first intermediate frequency cable 15, a second intermediate frequency cable 16, an intermediate frequency power supply 9 and a third relay K3.

[0120] The intermediate frequency power supply 9 is provided with an intermediate frequency power supply connector 10 and an intermediate frequency signal connector 11 .

[0121] The output end of the first intermediate frequency cable 15 serves as the third plug-in port 21 of the intermediate frequency power module 20 and is pluggable with the first connection port 2 of the process equipment 1. The input end of the first intermediate frequency cable 15 is connected to the negative output end of the intermediate frequency power connector 10 and is used to connect the process equipment 1 and the intermediate frequency power connector 10.

[0122] The first output end of the second intermediate frequency cable 16 serves as the fourth plug-in port 22 of the intermediate frequency power module 20 and is pluggably connected to the second connection port 3 of the process equipment 1. The input end of the second intermediate frequency cable 16 is connected to the forward output end of the intermediate frequency power connector 10. The second output end of the second intermediate frequency cable 16 is connected to one end of the coil in the third relay K3, and is used to connect the process equipment 1 and the intermediate frequency power connector 10.

[0123] The other end of the coil in the third relay K3 is connected to the power output end of the equipment power cabinet where the intermediate frequency power supply module 20 is located, one end of the contact in the third relay K3 is connected to the signal connection port 4 of the process equipment 1, and the other end of the contact in the third relay K3 is connected to the intermediate frequency signal connector 11, which is used to provide an intermediate frequency enable signal to the intermediate frequency signal connector 11.

[0124] Exemplarily, the first intermediate frequency cable and the second intermediate frequency cable are used as connecting lines connecting the PVD process equipment and the intermediate frequency power supply module. An intermediate frequency connector and an intermediate frequency signal connector are embedded in the intermediate frequency power supply, which are used to provide an intermediate frequency electrical signal to the PVD process equipment through the intermediate frequency connector and receive an intermediate frequency enable signal fed back by the PVD process equipment through the intermediate frequency signal connector.

[0125] In some embodiments, by analyzing the target material structure of the PVD process equipment and determining that the power demand of the PVD process equipment is a medium frequency power supply, the first medium frequency cable is connected to the first connection port of the PVD process equipment, and at the same time, the second medium frequency cable is connected to the second connection port of the PVD process equipment, thereby realizing the state of connection between the medium frequency power supply module and the PVD process equipment. (The implementation method of the pluggable connection mentioned here can be manually connected through machine voice prompts, or can be connected through a robotic arm or an automated instrument, which will not be repeated here.) After the first cathode target A in the PVD process equipment detects that it is correctly connected to the first connection port, and the second cathode target B detects that it is correctly connected to the second connection port, the ready driver C is driven to close the inside of the ready driver C, generate a medium frequency enable signal, and output the medium frequency enable signal through the signal connection port 4. At the same time, when the second intermediate frequency cable 16 is correctly connected to the second connection port 3, the inner coil of the third relay K3 is energized, and the internal contacts are controlled to close, so that the signal connection port 4 of the PVD process equipment is connected to the intermediate frequency signal connector 11 in the intermediate frequency power supply 9 through the third relay K3, and the intermediate frequency enable signal is input to the intermediate frequency signal connector 11 through the PVD process equipment 1. After receiving the intermediate frequency enable signal, the intermediate frequency power supply 9 controls the intermediate frequency power supply receiver 10 to output the intermediate frequency electrical signal, and provides the intermediate frequency point signal to the PVD process equipment 1 through the first intermediate frequency cable 15 and the second intermediate frequency cable 16, so as to achieve the purpose of selecting the intermediate frequency power supply for the PVD process equipment 1.

[0126] In some embodiments, Figure 4 A schematic diagram of the structure of an interlocking circuit of another process equipment provided in Example 3 of the present application. Figure 4 This is introduced on the basis of Embodiment 2 and Embodiment 3. Figure 4 The structure shown in the figure, the structure of the interlocking circuit specifically includes:

[0127] A direct current power supply module 10 , an intermediate frequency power supply module 20 , a process device 1 and an interlocking control module 30 .

[0128] according to Figure 4The diagram provided shows that when the power requirements of the first cathode target A and the second cathode target B of the PVD process equipment 1 are DC power, by connecting the first DC cable 12 in the DC power module 10 to the first connection port 2 of the PVD process equipment 1, and connecting the second DC cable to the second connection port 3, when the DC power module is detected to be correctly connected inside the PVD process equipment, it is determined whether the PVD process equipment 1 is cathode ready, and the cathode ready is realized by closing the ready driver C inside the PVD process equipment 1, and outputting the first DC enable signal and the second DC enable signal through the signal connection port. At the same time, when the first DC cable and the second DC cable are correctly connected to the first connection port and the second connection port respectively, the first relay coil is energized, driving the internal contact to close, thereby connecting the first DC signal connector to the interlocking control module; and the second relay coil is energized, driving the internal contact to close, so that the second DC signal connector is connected to the interlocking control module. At this time, under the control of the interlock control module 30, it is necessary to determine whether the emergency stop signal in the current interlock control module 30 is triggered. If the emergency stop signal has been triggered, the interlock control module 30 is disconnected internally, so that the first DC enable signal and the second DC enable signal cannot be input into the first DC signal connector 7 and the second DC signal connector 8, thereby blocking the transmission of the signal. The DC power supply module 10 will not output DC power to the PVD process equipment 1 when it cannot receive the DC enable signal, thereby achieving emergency stop control. When the emergency stop signal is not triggered, the interlock control module 30 is internally turned on, so that the first DC enable signal is input to the first DC signal connector 7 through the first relay K1, and the first DC enable signal is provided to the first DC signal connector 7; at the same time, the second DC enable signal is input to the second DC signal connector 8 after the second relay K2 is turned on through the signal connection port 4, and the second DC enable signal is provided to the second DC signal connector 8. After the DC power supply module receives the first DC enable signal, it controls the first DC power connector 5 to input the first DC signal to the first cathode target A. After receiving the second DC enable signal, the DC power supply module controls the second DC power supply connector 6 to input the second DC power signal to the second cathode target B, so that the DC power supply can supply power to the PVD process equipment.

[0129] For example, when the cathode ready state is not reached inside the PVD process equipment, or the emergency stop signal inside the interlock control module is not triggered, as the constraint conditions of the interlock circuit, when the DC power supply module or the medium frequency power supply module is correctly connected to the PVD process equipment, the three constraints are used as the constraint conditions for limiting the interlock control. When all three constraints are met, the DC power supply or the medium frequency power supply can be supplied to achieve the purpose of improving the safety of the interlock circuit. When the PVD process equipment requires a medium frequency power supply, the control process is the same as the DC power supply control process, which will not be repeated here.

[0130] The present application provides an interlocking circuit for a process equipment. An interlocking control module is added between the process equipment and the power module. When a DC power supply or a medium frequency power supply is selected by plugging and unplugging, it is necessary to detect that the cathode of the process equipment is ready and the emergency stop signal inside the interlocking control module is not triggered before the DC power supply or the medium frequency power supply can be supplied. That is, the purpose of hardware support for power switching is achieved. At the same time, the safety of the interlocking circuit is improved by adding safety control.

[0131] Embodiment 4

[0132] Figure 5 A structural schematic diagram of an interlocking control module provided in Example 4 of the present application. Figure 5 This is introduced based on the second embodiment. Figure 5 As shown, the structure of the interlocking control module specifically includes:

[0133] Emergency stop button 18 , fourth relay K4 , fifth relay K5 and reset button 19 .

[0134] One end of the emergency stop button 18 is connected to the power output end of the equipment power cabinet where the interlock control module 30 is located, and the other end of the emergency stop button 18 is connected to the first coil control end in the fourth relay K4 and one end of the reset button 19. The emergency stop button 18 is used to trigger the emergency stop operation of the interlock circuit.

[0135] The second coil control end of the fourth relay K4 is connected to the power output end of the equipment power cabinet where the interlocking control module 30 is located, the third coil control end of the fourth relay K4 is connected to the other end of the reset button 19, one end of the contact in the fourth relay K4 is connected to the power output end of the equipment power cabinet, and the other end of the contact in the fourth relay K4 is connected to one end of the coil in the fifth relay K5. The fourth relay K4 is used to protect the interlocking control module 30 when the emergency stop is triggered.

[0136] The other end of the coil in the fifth relay K5 is connected to the power output end of the equipment power cabinet where the interlocking control module 30 is located, one end of the first contact and one end of the second contact in the fifth relay K5 are both connected to the fifth plug-in port 14, the other end of the first contact in the fifth relay K5 is connected to the DC power supply module 10 as the first signal connection port of the interlocking control module 30, the other end of the second contact in the fifth relay K5 is connected to the DC power supply module 10 as the second input signal connection port of the interlocking control module 30, the other end of the first contact and the other end of the second contact in the fifth relay K5 are also connected to the intermediate frequency power supply module 20 as the third input signal connection port of the interlocking control module 30, and the fifth relay K5 is used to control the process equipment 1 to provide the target DC enable signal to the DC power supply module 10, or to control the process equipment 1 to provide the target intermediate frequency enable signal to the intermediate frequency power supply module 20.

[0137] Exemplarily, the fourth relay K4 can be understood as a safety relay, which includes multiple coils and multiple contacts, and is controlled by the emergency stop button and the reset button at the same time. When the emergency stop button is not triggered and the reset button is pressed, the internal contacts remain closed to achieve control to protect the safety of the interlock circuit. The emergency stop button is set to a normally closed state, which is equivalent to a normally closed switch device. When pressed, the internal switch is in an open state. The reset button is set to a normally open state, which is equivalent to a normally open switch. When reset is required, press the reset button to close the internal switch. The fifth relay is an intermediate safety relay, which ensures that the interlock circuit remains in an open state when an emergency stop trigger occurs, and indirectly protects the safety of the interlock circuit.

[0138] In some embodiments, when the PVD process equipment 1 selects to connect the DC power supply module and determines that the cathode of the PVD process equipment 1 is ready, the key factor for determining whether the DC power supply is realized at this time is whether the emergency stop signal in the interlock control module 30 is triggered, that is, whether the emergency stop button 18 in the interlock control module 30 is in a pressed state. When it is detected that the emergency stop button 18 is in a pressed state, it indicates that the emergency stop button 18 is in a disconnected state, so that the fourth relay K4 cannot receive the electrical signal, thereby causing the contact in the fourth relay K4 to be disconnected, so that the coil in the fifth relay K5 is not energized, and then the contact of the fifth relay K5 connected to the fifth plug-in port 14 is in a disconnected state. Even if the PVD process equipment 1 outputs the first DC enable signal and the second DC enable signal through the signal connection port 4, due to the disconnection of the contact in the fifth relay K5, the signal connection port 4 and the first relay K1 and the second relay K2 remain disconnected, the first DC signal connector 7 cannot receive the first DC enable signal, and the second DC signal connector 8 cannot receive the second DC enable signal, thereby controlling the DC power supply module 10 to be unable to provide DC power to the PVD process equipment 1, thereby achieving the purpose of interlock control. Similarly, when it is detected that the emergency stop button 18 is in an untriggered state, the contacts of the fourth relay K4 are closed, so that the coil of the fifth relay K5 is energized, thereby ensuring that the signal connection port 4 is connected to the first relay K1 and the second relay K2, providing a first DC enable signal to the first DC signal connector 7, and providing a first DC power signal to the PVD process equipment by driving the first DC power connector 5; at the same time, providing a second DC enable signal to the second DC signal connector 8, and providing a second DC power signal to the PVD process equipment by driving the second DC power connector 6.

[0139] In some embodiments, in combination Figure 4 and Figure 5The structure is such that when the PVD process equipment 1 selects the intermediate frequency power supply, the first connection port 2 and the second connection port 3 of the PVD process equipment 1 are connected respectively through the first intermediate frequency cable 15 and the second intermediate frequency cable 16. After the first cathode target A and the second cathode target B in the PVD process equipment 1 detect that the connection is correct, the internal ready driver C is controlled to be closed internally, and the target intermediate frequency enable signal is output through the signal connection port 4. When it is detected that the emergency stop button 18 in the interlock control module 30 is not pressed, it is determined that the emergency stop signal is not triggered, and then the internal contacts of the fourth relay K4 and the fifth relay K5 are controlled to be closed and turned on, and the target intermediate frequency enable signal is received through the intermediate frequency signal connector 11, and then the intermediate frequency electrical signal is provided to the PVD process equipment 1 through the intermediate frequency power connector 10. When an abnormal state is detected during the power supply process, the emergency stop button can be pressed to disconnect the fourth and fifth relays internally, and the intermediate frequency signal connector cannot receive the target intermediate frequency enable signal, thereby blocking the intermediate frequency electrical signal from continuing to provide intermediate frequency power to the PVD process equipment; when the interlock circuit returns to normal, by pressing the reset button 19, the emergency stop button 18 returns to the normally closed state, and the fourth and fifth relays resume the conductive state again, so that the intermediate frequency signal connector 11 can receive the target intermediate frequency enable signal again, and provide the intermediate frequency electrical signal to the PVD process equipment 1 again, thereby improving the safety of the interlock circuit.

[0140] The interlocking circuit of the process equipment provided in the present application selects a DC power supply or a medium frequency power supply on the same hardware device by plugging and unplugging to achieve the purpose of interlocking control; by detecting whether the internal cathode of the process equipment is ready as a constraint condition, and the emergency stop button in the interlocking control module triggers the emergency stop signal in an emergency, the safety of the interlocking circuit is improved. Only when the process equipment is correctly connected to the power module, the internal cathode is ready, and the emergency stop signal is not triggered, can the DC power supply or the medium frequency power supply be supplied to the process equipment, thereby achieving the purpose of high safety when the interlocking circuit is out of software control.

[0141] Embodiment 5

[0142] Figure 6 This is a flow chart of a control method of an interlocking circuit provided in Embodiment 5 of the present application. It is applied to the structure of the above embodiment. Figure 6 As shown, the steps of the control method of the interlocking circuit specifically include:

[0143] S601. Determine a target power supply type corresponding to a power supply requirement of a process equipment.

[0144] The present application is applied to the interlocking circuit of the power switching of the PVD process equipment. By judging the internal target material structure of the PVD process equipment, it is determined whether the category of the power demand is a DC power supply or an intermediate frequency power supply. The power module in the hardware circuit is connected to the PVD process equipment according to the demand. By detecting whether the hardware is connected correctly and judging whether the cathode inside the PVD process equipment is ready, these two conditions are used to determine whether the interlocking circuit meets the interlocking conditions. When the interlocking conditions are met, the PVD process equipment outputs an enable signal to the DC power module or the intermediate frequency power module connected thereto, and then the DC power module or the intermediate frequency power module connected to the PVD process equipment is started to output a DC signal or an intermediate frequency signal to the PVD process equipment, so as to achieve the purpose of power selection. At the same time, the safety of the interlocking circuit is improved by the plug-in method and the interlocking conditions.

[0145] Exemplarily, the target power supply type can be understood as the different power supply requirements of the PVD process equipment depending on the target material, including DC power supply type and medium frequency power supply type, or may also include AC power supply type, etc. The power supply type is determined according to the different requirements of the target material.

[0146] In a possible example scenario, the power supply requirements are first determined based on the different cathode target materials in the PVD process equipment. The type and performance of the PVD process equipment play a key role in the coating process results. Different processes require the selection of matching power supplies. For conductive cathode targets, DC power supplies are generally configured, and for insulating cathode targets or cathode targets with poor conductivity, medium-frequency power supplies are generally configured. Then, by analyzing the power supply requirements of the cathode target materials of the PVD process equipment, it is determined whether the target power supply type is DC power supply or medium-frequency power supply.

[0147] S602. Determine a target connection mode based on a target power supply type, where the target connection mode includes a mode in which a medium frequency power supply module is connected to a process device or a mode in which a direct current power supply module is connected to a process device.

[0148] The target connection mode mentioned here can be understood as the circuit connection method between the corresponding power module and the PVD process equipment after the target power supply type is determined.

[0149] For example, different circuit connection methods are selected according to different target power supply types. When the target power supply type is DC power supply, it is necessary to select a governance power supply module to connect with the PVD process equipment; when the target power supply type is medium frequency power supply, it is necessary to connect the medium frequency power supply module with the PVD process equipment in hardware, and then build an interlocking circuit by determining the target connection mode.

[0150] S603: When a preset interlocking condition is met, perform interlocking control on the interlocking circuit based on the target connection mode.

[0151] The interlocking conditions mentioned here can be understood as the constraints for realizing DC power supply or medium frequency power supply in the interlocking circuit. In the present application, the constraints are defined as including whether the DC power supply module or the medium frequency power supply module is correctly connected to the PVD process equipment. Since the connection is made by plugging and unplugging, there is a possibility of plugging and unplugging errors. It is necessary to determine whether the connection is correct through software detection or intuitive judgment by technicians.

[0152] Exemplarily, the present application defines a constraint condition including whether the cathode target material inside the PVD process equipment is ready. In the internal circuit and logic control of the PVD process equipment, based on the detection of the correct connection with the power module, the internal circuit detection of the PVD process equipment determines that the ready driver inside the PVD process equipment is closed, thereby determining that the cathode of the PVD process equipment is ready.

[0153] In one possible example scenario, Figure 7 A flow chart of another interlock circuit control method provided in Embodiment 5 of the present application. Figure 7 The diagram provided can realize the switching process between the intermediate frequency power supply and the direct current power supply. When the process equipment is interrupted or the target material is replaced, the current power supply is shut down, and the first connection port and the second connection port are changed according to the target material replacement or the required power supply type. When you choose to switch to direct current power supply, first remove the connection between the first intermediate frequency cable and the second intermediate frequency cable in the intermediate frequency power supply module and the process equipment, connect the first direct current cable to the first connection port, and connect the second direct current cable to the second connection port, and determine whether the direct current power supply interlocking condition is met. When the direct current power supply interlocking condition is met, direct current power is provided to the process equipment through the first direct current power supply and the second direct current, and a request for whether the power supply needs to be switched is received regularly. Similarly, when switching to medium frequency power supply, first remove the connections between the first DC cable and the second DC cable and the first connection port and the second connection port respectively when the DC power supply is used, connect the first medium frequency cable to the first connection port, and connect the second medium frequency cable to the second connection port, and determine whether the medium frequency power supply interlocking conditions are met; when the medium frequency interlocking conditions are met, provide a medium frequency electrical signal to the process equipment through the medium frequency power supply, and regularly receive a request for whether the power supply needs to be switched, thereby realizing the process of switching the process equipment between the DC power supply and the medium frequency power supply according to different needs.

[0154] Exemplarily, after determining that the power supply type and the interlock circuit are correctly connected, and after determining that the interlock circuit meets the interlock conditions, the PVD process equipment matches and generates a corresponding DC enable signal or an intermediate frequency enable signal according to the hardware connection relationship, and feeds it back to the DC power supply module or the intermediate frequency power supply module. The DC power supply module or the intermediate frequency power supply module provides DC power or intermediate frequency power to the PVD, and by limiting the connection between the PVD process equipment and the power supply module, the safety of the interlock control is improved.

[0155] Figure 8 A flowchart of another interlocking circuit control method provided in Embodiment 5 of the present application. Figure 8 This is introduced based on the previous embodiment. Figure 8 As shown, the steps of the control method of the interlocking circuit specifically include:

[0156] S801. Obtain power supply requirements of process equipment.

[0157] S802: When the power supply requirement is a DC power supply requirement, determine that the target power supply type is a DC power supply type.

[0158] S803: When the power supply requirement is a medium frequency power supply requirement, determine that the target power supply type is a medium frequency power supply type.

[0159] For example, before the power cabinet provides power to the PVD process equipment, the power supply requirements of the process equipment are first determined. When the target material in the PVD process equipment is a conductive target material, a DC power supply needs to be selected; when the target material in the PVD process equipment is an insulating target or a target material with poor conductivity, an intermediate frequency power supply needs to be configured. The range of the intermediate frequency power supply is generally limited to [1kHz, 100kHz].

[0160] S804: When the target power supply type is a DC power supply type, determine that the target connection mode is a DC connection mode.

[0161] S805 . Based on the DC connection mode, control the first DC cable in the DC power module to be connected to the first connection port of the process equipment, and control the second DC cable in the DC power module to be connected to the second connection port of the process equipment.

[0162] For example, when it is determined that the power supply type is DC, an interlock circuit is constructed by hardware, and the first DC cable and the second DC cable of the DC power supply module are connected to the first connection port and the second connection port of the PVD process equipment respectively, forming an interlock circuit control loop. The internal circuit of the PVD process equipment is used to detect whether the connection is correct, including whether the cable is connected incorrectly, whether there is a virtual connection, etc.

[0163] S806: When the target power supply type is the medium frequency power supply type, determine that the target connection mode is the medium frequency connection mode.

[0164] S807. Based on the intermediate frequency connection mode, control the first intermediate frequency cable in the intermediate frequency power module to be connected to the first connection port of the process equipment, and control the second intermediate frequency cable in the intermediate frequency power module to be connected to the second connection port of the process equipment.

[0165] For example, when the medium frequency power supply type is determined, an interlocking circuit is constructed by hardware, and the first medium frequency cable and the second medium frequency cable of the medium frequency power module are connected to the first connection port and the second connection port of the PVD process equipment respectively, forming an interlocking circuit control loop. The internal circuit of the PVD process equipment is used to detect whether the connection is correct, including whether the cable is connected incorrectly and whether there is a virtual connection.

[0166] S808. When a preset interlocking condition is met, perform interlocking control on the interlocking circuit based on the target connection mode.

[0167] In a possible example scenario, when the interlocking circuit is correctly connected, the cathode inside the PVD process equipment is ready, and then a DC enable signal or an intermediate frequency enable signal is provided to the DC power supply module or the intermediate frequency power supply module, so that the DC power supply module or the intermediate frequency power supply module provides a stable DC power signal or an intermediate frequency power signal to the PVD process equipment, thereby achieving the purpose of power supply selection. At the same time, by setting interlocking conditions, the interlocking control process is constrained to improve the safety of the interlocking circuit.

[0168] Exemplarily, the interlocking condition mentioned here is determined by the following steps:

[0169] Step 1: Determine whether the emergency stop button in the interlock control module is triggered, whether the process equipment is cathode ready, and whether the target connection mode is correctly connected to obtain the corresponding judgment result.

[0170] In a possible example scenario, multiple constraints are set as constraints for the interlocking control for the hardware-built interlocking circuit. Among them, whether the process equipment is correctly connected to the DC power supply module or the process equipment is correctly connected to the medium frequency power supply module can be used as a constraint, whether the cathode inside the process equipment is ready can be used as another constraint, and whether the emergency stop signal in the interlocking control module is triggered can be used as a constraint (other additional constraints can be added according to the different requirements of the process equipment). These three constraints protect the safe operation of the interlocking circuit.

[0171] Step 2: Determine whether the interlock control module meets the interlock condition based on the judgment result.

[0172] Exemplarily, the specific steps of determining whether the interlocking condition is met include:

[0173] Step 201: When the emergency stop button is not triggered, the cathode of the process equipment is ready, and the target connection mode is correctly connected to the DC connection mode, determine that the interlock control module meets the DC interlock condition.

[0174] Step 202: When the emergency stop button is not triggered, the cathode of the process equipment is ready, and the target connection mode is correctly connected to the intermediate frequency connection mode, determine that the interlock control module meets the intermediate frequency interlock condition.

[0175] Step 203: When the emergency stop button is triggered, determine whether the interlock control module meets the emergency stop interlock condition.

[0176] Step 204: When the cathode of the process equipment is not ready, determine whether the interlock control module meets the equipment interlock condition.

[0177] Step 205: When the emergency stop button is not triggered, the cathode of the process equipment is not ready, and the target connection mode is not correctly connected, it is determined that the interlock control module meets the power interlock condition.

[0178] In a possible example scenario, the interlocking state of the interlocking circuit is determined by judging whether the three constraints of the equipment are satisfied. By analyzing the satisfaction of the constraints, multiple interlocking conditions are divided; divided into DC interlocking conditions and medium frequency interlocking conditions according to the power type; divided into emergency stop interlocking conditions according to whether the emergency stop button is triggered; divided into equipment interlocking conditions according to whether the cathode inside the process equipment is ready; when the emergency stop button is not triggered, the cathode of the process equipment is not ready, and the target connection mode is not correctly connected, it is determined that the interlocking control module meets the power interlocking conditions. By analyzing the different interlocking conditions, different interlocking controls are executed.

[0179] S809. When the interlocking condition is a DC interlocking condition, control the DC power supply module to release the locking control based on the DC connection mode, so that the DC power supply module provides DC power to the process equipment.

[0180] For example, the DC power supply module and the medium frequency power supply module are switched in a two-or-one manner during the operation of the process equipment. According to the DC interlocking condition, the interlocking circuit performs the DC power supply interlocking logic control. The specific control logic is as follows:

[0181] In a possible example scenario, when a DC power supply is used, the first intermediate frequency cable 15 and the second intermediate frequency cable 16 in the intermediate frequency power supply module are respectively unplugged from the first connection port and the second connection port of the process equipment, the coil of the third relay connected to the second intermediate frequency cable 16 loses power, the internal contacts of the third relay are disconnected, and the intermediate frequency signal connector 11 is disconnected from the fifth relay. At this time, the intermediate frequency power supply module 20 cannot output an intermediate frequency electrical signal. At the same time, the first DC cable 12 and the second DC cable 13 are respectively inserted into the first connection port 2 and the second connection port 3 of the process equipment. When the first connection port 2 and the second connection port 3 are inserted in place and firmly, the corresponding internal coils of the first relay K1 and the second relay K2 are energized, and the corresponding internal contacts are closed. At this time, if the cathode inside the process equipment is ready (no fault and in standby state), the signal connection port 4 outputs two sets of closed enable signals. If the emergency stop signal in the interlock control module is not triggered (that is, the emergency stop button 18 is not pressed and the contact of the fourth relay K4 is closed), the first DC signal connector 7 and the second DC signal connector 8 receive the interlock enable signal respectively, thereby driving the first DC power connector 5 and the second DC power connector 6 to output DC signals according to process requirements. When all three interlock conditions are met, the DC power supply is unlocked to achieve DC interlock control.

[0182] In one possible example scenario, Fig. 9 A flow chart of a DC power supply interlocking control method provided in Example 5 of the present application. Fig. 9 The diagram provided shows that when the DC power supply is determined through the process equipment, it is first determined whether the first intelligent cable is connected to the first connection port. After the connection, the first relay coil is controlled to be energized so that the first relay contact is closed. When determining whether the second DC cable is connected to the second connection port, after the connection is successful, the second relay coil is controlled to be energized and the internal contacts are closed. At the same time, it is determined whether the first cathode target and the second cathode target in the process equipment are ready for connection. After the cathode of the process equipment is ready, it is determined whether the system emergency stop interlock meets the conditions. When the emergency stop signal is triggered, the fifth relay contact is controlled to be disconnected through the fourth relay, and the signal connection port is blocked to provide a DC enable signal to the DC power supply module. When the emergency stop signal is not triggered, after determining that the plug-in port between the DC power supply and the process equipment is correctly connected, the first DC power supply is controlled to provide the first DC power supply to the first cathode target through the first connection port; the second DC power supply is controlled to provide the second DC power supply to the second cathode target through the second connection port, so as to realize power supply for the process equipment through the DC power supply.

[0183] S810. When the interlocking condition is the intermediate frequency interlocking condition, the intermediate frequency power supply module is controlled to release the locking control based on the intermediate frequency connection mode, so that the intermediate frequency power supply module provides intermediate frequency power to the process equipment.

[0184] For example, according to the intermediate frequency interlocking condition, the interlocking circuit performs the intermediate frequency power supply interlocking logic control. The specific control logic is as follows:

[0185] In a possible example scenario, when the intermediate frequency power supply is used for power supply, the first DC cable 12 and the second DC cable 13 are unplugged from the first connection port and the second connection port of the process equipment, so that the coils of the first relay K1 and the second relay K2 lose power, and the contacts of the first relay K1 and the second relay K2 are disconnected, resulting in the first DC signal connector 7 and the second DC signal connector 8 being unable to receive the DC enable signal of the process equipment, and the first DC power connector 5 and the second DC power connector 6 being unable to output DC power signals to the process equipment. At the same time, the first intermediate frequency cable 15 and the second intermediate frequency cable 16 are respectively inserted into the first connection port and the second connection port of the process equipment. When inserted in place and securely, the corresponding coil of the third relay K3 is energized, and the contact of the third relay K3 is closed. At this time, if the cathode is ready (no fault and in standby state), the signal connection port 4 outputs two sets of closed intermediate frequency enable signals. At the same time, if the emergency stop signal in the interlocking control module is not triggered (that is, the emergency stop button 18 is not pressed and the output contact of the fourth relay K4 is closed), the intermediate frequency signal connector 11 interlocking enable signal is satisfied, and the intermediate frequency power supply 9 outputs the intermediate frequency electrical signal according to the process requirements. If all three interlocking conditions are met, the lock of the intermediate frequency power supply is released, and the intermediate frequency interlocking control is achieved.

[0186] In one possible example scenario, Fig.10 A flow chart of a medium frequency power supply interlocking control method provided in Example 5 of the present application. Fig.10 The diagram provided first determines whether the first intermediate frequency cable and the second intermediate frequency cable are connected to the first connection port and the second connection port in place. After the connection is correct, the third relay coil is energized and the internal contacts are closed; when the first cathode target and the second cathode target inside the process equipment are determined to be ready, after determining that the process equipment is ready, the ready driver inside the process equipment is controlled to close, and when the system emergency stop interlock meets the interlock control conditions, when the emergency stop signal is not triggered, the intermediate frequency power supply is controlled to supply power to the process equipment; after the emergency stop signal is triggered, the fourth relay contact is disconnected, causing the fifth relay contact to be disconnected. Then, the process equipment is blocked from providing the intermediate frequency enable signal to the intermediate goods power supply module, and the intermediate frequency power supply is blocked from supplying power to the process equipment.

[0187] S811. When the interlock condition is an emergency stop interlock condition, the process equipment is emergency stopped and restarted by pressing the reset button.

[0188] For example, according to the emergency stop interlocking condition, the interlocking circuit performs the emergency stop interlocking logic control. The specific control logic is as follows:

[0189] After the emergency stop button is pressed, an emergency stop signal is generated. A dual circuit is used to ensure reliability. When the emergency stop button 18 is triggered (pressed), the output contact of the fourth relay K4 is disconnected, and the coil of the fifth relay K5 loses power, causing the contact of the fifth relay K5 to be disconnected. At this time, whether it is a DC power supply module or an intermediate frequency power supply module, the corresponding interlock circuit will be disconnected and unable to output electrical energy. When the emergency stop button is pulled out, the output contact of the fourth relay K4 is still disconnected. Only when the reset button 19 is pressed again, the output of the fourth relay K4 can restore the circuit, the emergency stop interlock is released, and the emergency stop interlock control is achieved.

[0190] In one possible example scenario, Fig.11 A flow chart of a system emergency stop interlock control method provided in Example 5 of the present application. Fig.11 The diagram provided shows that when it is detected that the emergency stop button in the interlock control module is not pressed, the emergency stop button remains closed internally, and the fourth and fifth relay contacts are controlled to close, and the fourth relay works normally. It is judged whether the 24V voltage is normally supplied. When the power supply is normal, the fourth relay receives the 24V signal, and it is judged whether the fourth relay outputs normally. When it is detected that the fourth relay works normally, the fifth relay contact is controlled to close; when the fourth relay cannot work normally, the fourth relay contact is controlled to disconnect, and then the fifth relay contact is further controlled to disconnect, so as to achieve the purpose of emergency stop interlock control. At this time, if you want the process equipment to resume operation, you need to operate the reset button to close the fourth relay contact again to achieve the reset purpose.

[0191] S812. When the interlocking condition is the equipment interlocking condition, the signal connection port of the control process equipment outputs a disconnection signal.

[0192] S813: Control the fifth relay to be in an off state based on the off signal.

[0193] For example, according to the equipment interlocking condition, the interlocking circuit performs equipment interlocking logic control. The specific control logic is as follows:

[0194] When the cathode inside the process equipment is not ready (faulty or not powered on), the corresponding signal connector 4 output interlock contact is disconnected. Regardless of whether it is a DC power supply module or an intermediate frequency power supply module, the corresponding interlock circuit will be disconnected and power cannot be output, thus achieving equipment interlock logic control.

[0195] Optionally, when the interlock condition is an equipment interlock condition, when the cathode inside the process equipment is not ready, the enable signal is no longer output through the signal interlock port 4. At this time, no matter whether the fifth relay remains closed or open, the enable signal cannot be provided to the intermediate frequency signal connector or the first DC signal connector and the second DC signal connector, and thus the power supply cannot be started to supply power to the process equipment.

[0196] S814. When the interlocking condition is a power interlocking condition, the first relay and the second relay are controlled to interlock based on the DC connection mode, and the process equipment is controlled to block the DC power supply module from providing DC power.

[0197] S815. When the interlocking condition is a power interlocking condition, the process equipment is controlled based on the intermediate frequency connection mode to block the intermediate frequency power supply module from providing intermediate frequency power.

[0198] In a possible example scenario, when switching to DC power supply, the first intermediate frequency cable 15 and the second intermediate frequency cable 16 are unplugged from the first connection port 2 and the second connection port 3 of the process equipment, respectively, the coil of the third relay K3 loses power, the contact is disconnected, and the intermediate frequency power supply interlock is disconnected. When switching to intermediate frequency power supply, the first DC cable 12 and the second DC cable 13 are unplugged from the first connection port and the second connection port of the process equipment, respectively, so that the coils of the first relay K1 and the second relay K2 lose power, the contacts are disconnected, and the DC power supply interlock is disconnected.

[0199] For example, when the intermediate frequency power supply is selected, if one of the first intermediate frequency cable 15 and the second intermediate frequency cable 16 is not firmly connected, the intermediate frequency power supply interlock cannot be satisfied. When the DC power supply is selected, by adding the interlocking of the first relay K1 and the second relay K2, it can be achieved that if either the second DC cable 13 and the fifth plug port 14 are not firmly connected, the interlocking of the first DC power connector 5 and the second DC power connector 6 cannot meet the interlocking condition, so that the interlocking circuit is in an interlocking state, protecting the circuit while providing safety.

[0200] The control method of the interlocking circuit provided in the present application determines the target power supply type as a DC power supply type or a medium frequency power supply type after obtaining the power supply demand of the process equipment according to the structure of the interlocking circuit. And according to the DC power supply type or the medium frequency power supply type, the interlocking circuit is respectively set to a DC connection mode or a medium frequency connection mode, and then a connected interlocking circuit is built. When judging whether the interlocking circuit meets the interlocking conditions at one time, and limiting the cathode readiness inside the process equipment, while ensuring that the hardware connection is correct, and ensuring that the emergency stop signal in the interlocking control module is not triggered, it is determined that the interlocking conditions are met, and then the operation of starting the DC power supply or the medium frequency power supply to power the process equipment is started. By setting multiple interlocking conditions, the safety of the interlocking circuit is improved on the basis of quickly switching different power supplies.

[0201] Embodiment 6

[0202] Fig.12 This is a schematic diagram of the structure of a control device provided in Example 6 of the present application. Fig.12The control device 1200 shown includes: at least one processor 1201, a memory 1202, at least one network interface 1204 and other user interfaces 1203. The various components in the control device 1200 are coupled together via a bus system 1205. It is understood that the bus system 1205 is used to achieve connection and communication between these components. In addition to the data bus, the bus system 1205 also includes a power bus, a control bus and a status signal bus. However, for the sake of clarity, the bus system 1205 is not described in detail. Fig.12 Various buses are labeled as bus system 1205.

[0203] The user interface 1203 may include a display, a keyboard, or a pointing device (eg, a mouse, a trackball, a touch pad, or a touch screen).

[0204] It can be understood that the memory 1202 in the embodiment of the present application can be a volatile memory or a non-volatile memory, or can include both volatile and non-volatile memories. Among them, the non-volatile memory can be a read-only memory (ROM), a programmable read-only memory (PROM), an erasable programmable read-only memory (EPROM), an electrically erasable programmable read-only memory (EEPROM), or a flash memory. The volatile memory can be a random access memory (RAM), which is used as an external cache. By way of example and not limitation, many forms of RAM are available, such as static random access memory (SRAM), dynamic random access memory (DRAM), synchronous dynamic random access memory (SDRAM), double data rate synchronous dynamic random access memory (DDRSDRAM), enhanced synchronous dynamic random access memory (ESDRAM), synchronous link dynamic random access memory (SLDRAM), and direct memory bus random access memory (DRRAM). The memory 1202 described herein is intended to include, but is not limited to, these and any other suitable types of memory.

[0205] In some embodiments, the memory 1202 stores the following elements, executable units or data structures, or a subset thereof, or an extended set thereof: an operating system 12021 and an application program 12022 .

[0206] Among them, the operating system 12021 includes various system programs, such as a framework layer, a core library layer, a driver layer, etc., which are used to implement various basic services and process hardware-based tasks. The application 12022 includes various application programs, such as a media player (Media Player), a browser (Browser), etc., which are used to implement various application services. The program for implementing the method of the embodiment of the present application can be included in the application 12022.

[0207] In the embodiment of the present application, by calling the program or instruction stored in the memory 1202, specifically, the program or instruction stored in the application 12022, the processor 1201 is used to execute the method steps provided by each method embodiment, for example, including:

[0208] Determine the target power supply type corresponding to the power supply demand of the process equipment; determine the target connection mode based on the target power supply type, the target connection mode includes the mode of connecting the medium frequency power supply module to the process equipment or the mode of connecting the direct current power supply module to the process equipment; when the preset interlocking conditions are met, perform interlocking control on the interlocking circuit based on the target connection mode.

[0209] The method disclosed in the above embodiment of the present application can be applied to the processor 1201, or implemented by the processor 1201. The processor 1201 may be an integrated circuit chip with signal processing capabilities. In the implementation process, each step of the above method can be completed by the hardware integrated logic circuit or software instructions in the processor 1201. The above processor 1201 can be a general processor, a digital signal processor (Digital Signal Processor, DSP), an application specific integrated circuit (Application Specific Integrated Circuit, ASIC), a field programmable gate array (Field Programmable Gate Array, FPGA) or other programmable logic devices, discrete gates or transistor logic devices, discrete hardware components. The methods, steps and logic block diagrams disclosed in the embodiments of the present application can be implemented or executed. The general processor can be a microprocessor or the processor can also be any conventional processor, etc. The steps of the method disclosed in the embodiment of the present application can be directly embodied as a hardware decoding processor to execute, or the hardware and software units in the decoding processor can be executed. The software unit can be located in a mature storage medium in the field such as a random access memory, a flash memory, a read-only memory, a programmable read-only memory or an electrically erasable programmable memory, a register, etc. The storage medium is located in the memory 1202, and the processor 1201 reads the information in the memory 1202 and completes the steps of the above method in combination with its hardware.

[0210] It is understood that the embodiments described herein may be implemented in hardware, software, firmware, middleware, microcode, or a combination thereof. For hardware implementation, the processing unit may be implemented in one or more application specific integrated circuits (ASIC), digital signal processors (DSP), digital signal processing devices (DSPDevice, DSPD), programmable logic devices (PLD), field programmable gate arrays (FPGA), general purpose processors, controllers, microcontrollers, microprocessors, other electronic units for performing the functions described in the present application, or a combination thereof.

[0211] For software implementation, the technology described herein can be implemented by a unit that performs the functions described herein. The software code can be stored in a memory and executed by a processor. The memory can be implemented in the processor or outside the processor.

[0212] The control device provided in this embodiment can be as follows Fig.12 The control device shown in FIG. 1 can perform the following steps: Figure 6-11 All steps of the control method of the Zhongguang interlocking circuit are realized Figure 6-11 For details, please refer to the technical effect of the control method of the interlocking circuit shown in Figure 6-11 For the sake of brevity, the relevant description is not repeated here.

[0213] The basic principles of the present application are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present application. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, not for limitation, and the above details do not limit the present application to being implemented by adopting the above specific details.

[0214] The block diagrams of the devices, apparatuses, equipment, and systems involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagram. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "having", etc. are open words, referring to "including but not limited to", and can be used interchangeably with them. The words "or" and "and" used here refer to the words "and / or" and can be used interchangeably with them, unless the context clearly indicates otherwise. The words "such as" used here refer to the phrase "such as but not limited to", and can be used interchangeably with them.

[0215] It should also be noted that in the apparatus, device and method of the present application, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present application.

[0216] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

[0217] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. An interlocking circuit for a process equipment, characterized in that: Power switching for process equipment, including: A DC power supply module, comprising a first plug port and a second plug port, wherein the first plug port and the second plug port are pluggably connected to a first connection port and a second connection port of the process equipment, respectively, and is used to provide DC power to the process equipment when the first connection port is only connected to the first plug port and the second connection port is only connected to the second plug port; An intermediate frequency power supply module, comprising a third plug port and a fourth plug port, wherein the third plug port and the fourth plug port are pluggably connected to the first connection port and the second connection port of the process equipment, respectively, and is used to provide intermediate frequency power to the process equipment when the first connection port is only connected to the third plug port and the second connection port is only connected to the fourth plug port; The DC power supply module is also connected to the signal connection port of the process equipment, and is used to receive an initial DC enable signal only when the first connection port and the second connection port of the process equipment are connected to the first plug port and the second plug port respectively; The intermediate frequency power supply module is also connected to the signal connection port of the process equipment, and is used to receive an initial intermediate frequency enable signal only when the first connection port and the second connection port of the process equipment are respectively connected to the third plug port and the fourth plug port.

2. The interlock circuit according to claim 1, characterized in that: The interlock circuit also includes: An interlock control module, comprising a fifth plug-in port, a first signal connection port, a second signal connection port and a third signal connection port, wherein the fifth plug-in port of the interlock control module is pluggable and connected to the signal connection port of the process equipment, and is used to receive an initial enable signal provided by the process equipment, the first signal connection port and the second signal connection port are respectively connected to the DC power supply module, and when a first interlock condition is met, a target DC enable signal is output through the first signal connection port and the second signal connection port; The third signal connection port of the interlock control module is connected to the intermediate frequency power supply module, and when the second interlock condition is met, the target intermediate frequency enable signal is output through the third signal connection port, wherein the first interlock condition includes the first signal connection port and the second signal connection port being electrically connected to the inside of the DC power supply module, and the second interlock condition includes the third signal connection port being electrically connected to the inside of the intermediate frequency power supply module.

3. The interlock circuit according to claim 2, characterized in that: The first interlock condition also includes at least one of the emergency stop signal of the process equipment not being triggered and the cathode preparation of the process equipment being continued, and the second interlock condition also includes at least one of the emergency stop signal of the process equipment not being triggered and the cathode preparation of the process equipment being continued.

4. The interlock circuit according to claim 1, characterized in that: The DC power supply module comprises: A first DC cable, a second DC cable, a first DC power connector, a second DC power connector, a first DC signal connector, a second DC signal connector, a first relay, and a second relay; The first output end of the first DC cable is pluggably connected to the first connection port of the process equipment as the first plug-in port of the DC power module, the input end of the first DC cable is connected to the first DC power connector, and the second output end of the first DC cable is connected to one end of the coil in the first relay, so as to connect the process equipment to the first DC power connector; The other end of the coil in the first relay is connected to the power output end of the equipment power cabinet where the DC power module is located, one end of the contact in the first relay is connected to the signal connection port of the process equipment, and the other end of the contact in the first relay is connected to the first DC signal connector, for providing a first DC enable signal to the first DC signal connector; The first output end of the second DC cable is pluggably connected to the second connection port of the process equipment as the second plug-in port of the DC power module, the input end of the second DC cable is connected to the second DC power connector, and the second output end of the second DC cable is connected to one end of the coil in the second relay, so as to connect the process equipment to the second DC power connector; The other end of the coil in the second relay is connected to the power output end of the equipment power cabinet where the DC power module is located, one end of the contact in the second relay is connected to the signal connection port of the process equipment, and the other end of the contact in the second relay is connected to the second DC signal connector, which is used to provide a second DC enable signal to the second DC signal connector.

5. The interlock circuit according to claim 1, characterized in that: The intermediate frequency power supply module comprises: A first intermediate frequency cable, a second intermediate frequency cable, an intermediate frequency power supply and a third relay; Wherein, the intermediate frequency power supply is provided with an intermediate frequency power connector and an intermediate frequency signal connector; The output end of the first intermediate frequency cable is pluggably connected to the first connection port of the process equipment as the third plug-in port of the intermediate frequency power supply module, and the input end of the first intermediate frequency cable is connected to the negative output end of the intermediate frequency power supply connector, so as to connect the process equipment and the intermediate frequency power supply connector; The first output end of the second intermediate frequency cable is pluggably connected to the second connection port of the process equipment as the fourth plug-in port of the intermediate frequency power module, the input end of the second intermediate frequency cable is connected to the positive output end of the intermediate frequency power connector, and the second output end of the second intermediate frequency cable is connected to one end of the coil in the third relay, so as to connect the process equipment and the intermediate frequency power connector; The other end of the coil in the third relay is connected to the power output end of the equipment power cabinet where the intermediate frequency power supply module is located, one end of the contact in the third relay is connected to the signal connection port of the process equipment, and the other end of the contact in the third relay is connected to the intermediate frequency signal connector, for providing an intermediate frequency enable signal to the intermediate frequency signal connector.

6. The interlock circuit according to claim 2, characterized in that: The interlock control module further includes: Emergency stop button, fourth relay, fifth relay and reset button; One end of the emergency stop button is connected to the power output end of the equipment power cabinet where the interlock control module is located, and the other end of the emergency stop button is connected to the first coil control end in the fourth relay and one end of the reset button, and the emergency stop button is used to trigger the emergency stop operation of the interlock circuit; The second coil control end of the fourth relay is connected to the power output end of the equipment power cabinet where the interlock control module is located, the third coil control end of the fourth relay is connected to the other end of the reset button, one end of the contact in the fourth relay is connected to the power output end of the equipment power cabinet, and the other end of the contact in the fourth relay is connected to one end of the coil in the fifth relay. The fourth relay is used to protect the interlock control module when an emergency stop is triggered; The other end of the coil in the fifth relay is connected to the power output end of the equipment power cabinet where the interlocking control module is located, one end of the first contact and one end of the second contact in the fifth relay are both connected to the fifth plug-in port, the other end of the first contact in the fifth relay is connected to the DC power supply module as the first signal connection port of the interlocking control module, the other end of the second contact in the fifth relay is connected to the DC power supply module as the second input signal connection port of the interlocking control module, the other end of the first contact and the other end of the second contact in the fifth relay are also connected to the intermediate frequency power supply module as the third input signal connection port of the interlocking control module, and the fifth relay is used to control the process equipment to provide the target DC enable signal to the DC power supply module, or control the process equipment to provide the target intermediate frequency enable signal to the intermediate frequency power supply module.

7. The interlock circuit according to any one of claims 1 to 6, characterized in that: The process equipment is a PVD equipment having a first cathode target, a second cathode target and a ready driver, the first connection port and the second connection port are respectively connected to the first cathode target and the second cathode target, and the ready driver is connected to the signal connection port.

8. A method for controlling an interlocking circuit, characterized in that: An interlock circuit applied to a process device according to any one of claims 1 to 7, wherein a control method of the interlock circuit comprises: Determine the target power supply type corresponding to the power supply requirements of process equipment; Determine a target connection mode based on the target power supply type, wherein the target connection mode includes a mode in which the intermediate frequency power supply module is connected to the process equipment or a mode in which the direct current power supply module is connected to the process equipment; When a preset interlock condition is satisfied, interlock control is performed on the interlock circuit based on the target connection mode.

9. The method according to claim 8, characterized in that The determining of the target power supply type corresponding to the power supply demand of the process equipment includes: Obtaining power supply requirements of the process equipment; When the power supply requirement is a DC power supply requirement, determining that the target power supply type is a DC power supply type; When the power supply requirement is a medium frequency power supply requirement, the target power supply type is determined to be a medium frequency power supply type.

10. The method according to claim 9, characterized in that The determining a target connection mode based on the target power supply type includes: When the target power supply type is a DC power supply type, determining that the target connection mode is a DC connection mode; Based on the DC connection mode, controlling a first DC cable in the DC power module to be connected to a first connection port of the process equipment, and controlling a second DC cable in the DC power module to be connected to a second connection port of the process equipment; When the target power supply type is a medium frequency power supply type, determining that the target connection mode is a medium frequency connection mode; Based on the intermediate frequency connection mode, the first intermediate frequency cable in the intermediate frequency power module is controlled to be connected to the first connection port of the process equipment, and the second intermediate frequency cable in the intermediate frequency power module is controlled to be connected to the second connection port of the process equipment.

11. The method according to claim 8, characterized in that The interlocking condition is determined by the following methods, including: Determine whether the emergency stop button in the interlock control module is triggered, whether the process equipment is cathode ready, and whether the target connection mode is correctly connected to obtain corresponding judgment results; Based on the judgment result, it is determined whether the interlock control module meets the interlock condition.

12. The method according to claim 11, characterized in that The determining whether the interlocking control module satisfies the interlocking condition based on the judgment result includes: When the emergency stop button is not triggered, the cathode of the process equipment is ready, and the target connection mode is correctly connected to the DC connection mode, determining that the interlock control module meets the DC interlock condition; When the emergency stop button is not triggered, the cathode of the process equipment is ready, and the target connection mode is correctly connected to the intermediate frequency connection mode, determining that the interlock control module meets the intermediate frequency interlock condition; When the emergency stop button is triggered, determining that the interlock control module meets the emergency stop interlock condition; When the cathode of the process equipment is not ready, determining that the interlock control module meets the equipment interlock condition; When the emergency stop button is not triggered, the cathode of the process equipment is not ready, and the target connection mode is not correctly connected, it is determined that the interlock control module meets the power interlock condition.

13. The method according to claim 10 or 12, characterized in that: The performing interlocking control on the interlocking circuit based on the target connection mode when a preset interlocking condition is met includes: When the interlocking condition is a DC interlocking condition, controlling the DC power supply module to release locking control based on a DC connection mode, so that the DC power supply module provides DC power to the process equipment; When the interlocking condition is an intermediate frequency interlocking condition, the intermediate frequency power supply module is controlled to release the locking control based on the intermediate frequency connection mode, so that the intermediate frequency power supply module provides intermediate frequency power to the process equipment; When the interlock condition is an emergency stop interlock condition, the process equipment is controlled to be emergency stopped and restarted by pressing a reset button; When the interlock condition is an equipment interlock condition, controlling the signal connection port of the process equipment to output a disconnection signal; controlling the fifth relay to be in an off state based on the off signal; When the interlock condition is a power interlock condition, controlling the interlock control of the first relay and the second relay based on the DC connection mode, and controlling the process equipment to block the DC power supply module from providing DC power; When the interlocking condition is a power interlocking condition, the process equipment is controlled based on the intermediate frequency connection mode to block the intermediate frequency power supply module from providing intermediate frequency power.

14. A control device, characterized in that: include: A processor and a memory, wherein the processor is used to execute a control program of an interlocking circuit stored in the memory to implement the control method of the interlocking circuit according to any one of claims 8 to 13.

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