Feeding and discharging mechanism and scribing device

Abstract

The invention provides a feeding and discharging mechanism and a scribing device, the feeding and discharging mechanism comprises a first mounting base and a second mounting base which are arranged in a spaced mode in the first direction, the length direction of the first mounting base and the length direction of the second mounting base are parallel to the second direction, and the second direction is perpendicular to the first direction. The first lifting supporting part and the second lifting supporting part are installed on the first installation base in the second direction in a spaced mode, the first lifting supporting part and the second lifting supporting part are used for supporting or adsorbing the first side edge of a reel, a bearing film is tightened in the reel, and a workpiece is borne on the bearing film; the third lifting supporting part and the fourth lifting supporting part are mounted on the second mounting base in a spaced mode in the second direction and used for supporting or adsorbing the second side edge of the reel. The first lifting supporting part, the second lifting supporting part, the third lifting supporting part and the fourth lifting supporting part are further configured to ascend and descend synchronously. The workpiece feeding and discharging efficiency is improved, and finally the scribing efficiency is improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor device production, and specifically to a loading and unloading mechanism and a dicing device. Background Art

[0002] like Figure 1 to Figure 2 As shown, when the dicing machine is dicing a workpiece 400 (such as a wafer), the worktable suction cup 100 (simply referred to as the suction cup) absorbs the frame 200, and a carrier film 300 (a blue film or a UV film) is stretched on the frame 200, and the workpiece 400 is carried on the carrier film 300. The suction cup 100 provides a relatively flat dicing reference surface, and the suction cup 100 includes a magnetic adsorption area A and a vacuum adsorption area B. The frame 200 is adsorbed on the magnetic adsorption area A of the suction cup 100, and the workpiece 400 to be diced needs to be aligned with the vacuum adsorption area B of the suction cup.

[0003] Currently, before the scribing process is performed, the tenter frame 200 needs to be placed on the suction cup 100 manually, but the magnetic adsorption area A of the suction cup 100 is formed by a plurality of magnets 101 (eg Figure 1 8 of them provide magnetic attraction. When placing the tenter frame 200 manually, it is difficult to place the tenter frame 200 at a suitable position on the suction cup at one time, and the placement position needs to be adjusted multiple times, which is time-consuming and laborious. Summary of the invention

[0004] In order to solve the above technical problems, the present application provides a loading and unloading mechanism, which adopts the following technical solutions:

[0005] A loading and unloading mechanism, comprising:

[0006] A first mounting seat and a second mounting seat are spaced apart along a first direction, wherein the length directions of the first mounting seat and the second mounting seat are parallel to the second direction, wherein the second direction is perpendicular to the first direction;

[0007] A first lifting support part and a second lifting support part are installed on the first mounting seat at intervals along the second direction, the first lifting support part and the second lifting support part are used to cooperate with each other to support or adsorb the first side of the stretcher, a carrying film is stretched in the stretcher, and a workpiece is carried on the carrying film;

[0008] A third lifting support part and a fourth lifting support part are installed on the second mounting seat at intervals along the second direction, and the third lifting support part and the fourth lifting support part are used to cooperate with each other to support or absorb the second side of the stretcher frame, and the second side is opposite to the first side;

[0009] The first lifting support portion, the second lifting support portion, the third lifting support portion and the fourth lifting support portion are also configured to be lifted and lowered synchronously.

[0010] In some embodiments, the first lifting support part and the second lifting support part are mounted on the first mounting seat in an adjustable manner along the second direction; the third lifting support part and the fourth lifting support part are mounted on the second mounting seat in an adjustable manner along the second direction.

[0011] In some embodiments, the first lifting support part includes a first lifting drive member and a first supporting plate connected to the driving end of the first lifting drive member, the first supporting plate is used to support and absorb the first corner of one end of the first side of the stretcher frame; the second lifting support part includes a second lifting drive member and a second supporting plate connected to the driving end of the second lifting drive member, the second supporting plate is used to support and absorb the second corner of the other end of the first side of the stretcher frame; the third lifting support part includes a third lifting drive member and a third supporting plate connected to the driving end of the third lifting drive member, the third supporting plate is used to support and absorb the first corner of one end of the second side of the stretcher frame; the fourth lifting support part includes a fourth lifting drive member and a fourth supporting plate connected to the driving end of the fourth lifting drive member, the fourth supporting plate is used to support and absorb the second corner of the other end of the second side of the stretcher frame; the first lifting drive member, the second lifting drive member, the third lifting drive member and the fourth lifting drive member are configured to synchronously drive the first supporting plate, the second supporting plate, the third supporting plate and the fourth supporting plate to lift and lower.

[0012] In some embodiments, the first lifting drive member, the second lifting drive member, the third lifting drive member and the fourth lifting drive member are configured to be connected to the same PLC controller, and the PLC controller controls the synchronous driving of the first lifting drive member, the second lifting drive member, the third lifting drive member and the fourth lifting drive member.

[0013] In some embodiments, a first limiting groove is provided on the first supporting plate, a first adjustable positioning member is arranged in the first limiting groove, the first limiting groove is used to support the first corner of the stretch frame, and the first positioning member is used to abut the first corner of the stretch frame; a second limiting groove is provided on the second supporting plate, a second adjustable positioning member is arranged in the second limiting groove, the second limiting groove is used to support the second corner of the stretch frame, and the second positioning member is used to abut the second corner of the stretch frame; a third limiting groove is provided on the third supporting plate, the third limiting groove is used to support the third corner of the stretch frame, and the third corner of the stretch frame abuts against the inner wall of the third limiting groove; a fourth limiting groove is provided on the fourth supporting plate, the fourth limiting groove is used to support the fourth corner of the stretch frame, and the fourth corner of the stretch frame abuts against the inner wall of the fourth limiting groove.

[0014] In some embodiments, the first positioning member includes a first waist hole arranged in a first limiting groove, and a first positioning pin installed in the first waist hole and capable of sliding along the first waist hole, and when the first positioning pin slides into place, it abuts against the first corner of the stretch frame; the second positioning member includes a second waist hole arranged in a second limiting groove, and a second positioning pin installed in the second waist hole and capable of sliding along the second waist hole, and when the second positioning pin slides into place, it abuts against the second corner of the stretch frame.

[0015] In some embodiments, the first supporting plate, the second supporting plate, the third supporting plate and the fourth supporting plate are all provided with avoidance gaps at their inner edges for avoiding the suction cups.

[0016] In some embodiments, magnets for adsorbing the frame are disposed at the bottom of the first supporting plate, the second supporting plate, the third supporting plate, and the fourth supporting plate.

[0017] The loading and unloading mechanism provided in the present application can implement the support and positioning of the frame, so that the frame and the workpiece carried on the carrying film are kept in a suspended state above the predetermined loading and unloading station. When the suction cup is translated to the loading and unloading station, the loading and unloading mechanism can drive the frame to descend, so that the frame is accurately adsorbed to the magnetic adsorption area of ​​the suction cup, and the workpiece is accurately adsorbed to the vacuum adsorption area of ​​the suction cup. In addition, when the suction cup carries the frame and the workpiece that has been sliced ​​and translates back to the loading and unloading station, the loading and unloading mechanism can automatically suck the frame from the suction cup, thereby completing the automatic unloading of the frame and the workpiece that has been sliced ​​on it. The loading and unloading mechanism provided in the present application improves the loading and unloading efficiency of the workpiece, and ultimately improves the slicing efficiency.

[0018] The present application also provides a slicing device, which includes the loading and unloading mechanism, suction cup and slicing mechanism described in any one of the above items, wherein: the loading and unloading mechanism is configured to support a frame, a carrying film is stretched inside the frame, and a workpiece is carried on the carrying film; the suction cup is configured to translate to the bottom of the frame, and the loading and unloading mechanism is configured to drive the frame to descend, so that the frame is adsorbed by the magnetic adsorption area of ​​the suction cup, and the workpiece is adsorbed by the vacuum adsorption area of ​​the suction cup; the suction cup is also configured to translate to the bottom of the slicing mechanism, the slicing mechanism is configured to slicing the workpiece, the suction cup is also configured to translate back to the bottom of the frame, and the loading and unloading mechanism is also configured to suck the frame from the suction cup.

[0019] In some embodiments, the dicing device further includes a translation module, the suction cup is connected to a movable part of the translation module, and the translation module is used to drive the suction cup to translate and switch between the loading and unloading mechanism and the dicing mechanism.

[0020] Through the cooperation of the loading and unloading mechanism, the suction cup and the dicing mechanism, the dicing device of the present application realizes automatic dicing of the workpiece and realizes the loading and unloading efficiency of the workpiece. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A schematic diagram of a process of loading a workpiece-carrying frame onto a suction cup in the prior art;

[0022] Figure 2 is a schematic diagram of the structure of the suction cup;

[0023] Figure 3 It is a schematic diagram of the three-dimensional structure of the loading and unloading mechanism in an embodiment of the present application in a working state;

[0024] Figure 4 It is a side view structural diagram of the loading and unloading mechanism in an embodiment of the present application in a working state;

[0025] Figure 5 It is a schematic diagram of the top view of the loading and unloading mechanism in an embodiment of the present application in a working state;

[0026] Figure 6 It is a schematic diagram of the three-dimensional structure of the loading and unloading mechanism in the embodiment of the present application in another working state;

[0027] Figure 7 It is a side structural schematic diagram of the loading and unloading mechanism in the embodiment of the present application in another working state.

[0028] Figures 1 to 7 Included:

[0029] First mounting seat 1;

[0030] Second mounting seat 2;

[0031] The first lifting support part 3 includes a first lifting driving member 31 , a first carrying plate 32 , a first limiting groove 33 , a first positioning member 34 , an avoidance notch 35 , and a magnet 36 ;

[0032] The second lifting support part 4 includes a second lifting driving member 41 , a second carrying plate 42 , a second limiting groove 43 , and a second positioning member 44 ;

[0033] The third lifting support part 5: a third lifting driving member 51, a third carrying plate 52, and a third limiting groove 53;

[0034] The fourth lifting support part 6 includes a fourth lifting driving member 61, a fourth carrying plate 62, and a fourth limiting groove 63;

[0035] Suction cup 100 , magnet 101 , stretcher 200 , carrier film 300 , workpiece 400 . DETAILED DESCRIPTION

[0036] The technical solution of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present application.

[0037] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0038] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0039] In addition, the technical features involved in the different embodiments of the present application described below can be combined with each other as long as they do not conflict with each other.

[0040] like Figures 3 to 7 As shown, the loading and unloading structure in the embodiment of the present application includes:

[0041] The first mounting seat 1 and the second mounting seat 2 are spaced apart along a first direction (eg, X direction), and the length directions of the first mounting seat 1 and the second mounting seat 2 are parallel to a second direction (eg, Y direction), wherein the second direction is perpendicular to the first direction.

[0042] The first lifting support part 3 and the second lifting support part 4 are installed on the first mounting seat 1 at intervals along the second direction. The first lifting support part 3 and the second lifting support part 4 are used to cooperate in supporting or adsorbing the first side of the stretcher 200. A carrying film (not shown in the figure) is stretched inside the stretcher 200, and a workpiece (not shown in the figure) is carried on the carrying film.

[0043] The third lifting support part 5 and the fourth lifting support part 6 are installed on the second mounting seat 2 at intervals along the second direction. The third lifting support part 5 and the fourth lifting support part 6 are used to cooperate to support or absorb the second side of the tent frame 200, and the second side is opposite to the first side.

[0044] The first lifting support part 3 , the second lifting support part 4 , the third lifting support part 5 and the fourth lifting support part 6 are also configured to be lifted and lowered synchronously.

[0045] The working process of the loading and unloading mechanism in the embodiment of the present application is as follows:

[0046] According to the size of the stretcher 200 to be carried, adjust the distance between the first mounting seat 1 and the second mounting seat 2, the distance between the first lifting support part 3 and the second lifting support part 4, and the distance between the third lifting support part 5 and the fourth lifting support part 6 to ensure that the stretcher 200 subsequently placed on the first lifting support part 3, the second lifting support part 4, the third lifting support part 5 and the fourth lifting support part 6 is directly above the predetermined loading and unloading station.

[0047] The first lifting support part 3, the second lifting support part 4, the third lifting support part 5 and the fourth lifting support part 6 are all controlled to rise to a high position. Figures 3 to 5 As shown, the stretcher frame 200 is placed and fixed on the first lifting support part 3, the second lifting support part 4, the third lifting support part 5 and the fourth lifting support part 6.

[0048] The suction cup 100 is moved horizontally to the loading and unloading station. Figure 6 to Figure 7 As shown, the first lifting support part 3, the second lifting support part 4, the third lifting support part 5 and the fourth lifting support part 6 are controlled to descend synchronously until the frame 200 contacts and is adsorbed onto the magnetic adsorption area of ​​the suction cup 100, and the workpiece on the carrier film is adsorbed onto the vacuum adsorption area of ​​the suction cup 100. At this point, the automatic loading of the frame 200 is completed.

[0049] The suction cup 100 leaves the loading and unloading station and moves horizontally to the dicing station to perform dicing. At the same time, the first lifting support part 3, the second lifting support part 4, the third lifting support part 5 and the fourth lifting support part 6 are controlled to rise and return to their positions synchronously.

[0050] The suction cup 100 drives the frame 20 and the diced workpiece to move horizontally to the loading and unloading station. The first lifting support part 3, the second lifting support part 4, the third lifting support part 5 and the fourth lifting support part 6 are controlled to descend synchronously, and the frame 200 is sucked from the suction cup 100, so as to complete the automatic unloading of the frame 200.

[0051] It can be seen that the loading and unloading mechanism provided in the embodiment of the present application realizes the support and positioning of the frame 200, so that the frame 200 and the workpiece carried on the carrying film are kept in a suspended state directly above the loading and unloading station. When the suction cup 100 is translated to the loading and unloading station, the loading and unloading mechanism can drive the frame 200 to descend, so that the frame 200 is accurately adsorbed to the magnetic adsorption area of ​​the suction cup 100, and the workpiece is accurately adsorbed to the vacuum adsorption area of ​​the suction cup 100.

[0052] In addition, when the suction cup 100 drives the frame 200 and the workpiece after dicing to move back to the loading and unloading station, the loading and unloading mechanism sucks the frame 200 from the suction cup 100, thereby completing the automatic unloading of the frame 200 and the workpiece after dicing thereon.

[0053] The loading and unloading mechanism provided in the embodiment of the present application improves the loading and unloading efficiency of the workpiece, and ultimately improves the dicing efficiency.

[0054] Optionally, in order to adjust the distance between the first lifting support part 3 and the second lifting support part 4, the first lifting support part 3 and the second lifting support part 4 are both adjustably mounted on the first mounting seat 1 along the second direction. For example, the first mounting seat 1 is provided with a first strip hole and a second strip hole extending along the second direction, wherein the first lifting support part 3 is adjustably mounted on the first mounting seat 1 via a first bolt inserted into the first strip hole, and when the first lifting support part 3 slides into place along the second direction, the first lifting support part 3 can be fixed to the first mounting seat 1 via the first bolt. The second lifting support part 4 is adjustably mounted on the first mounting seat 1 via a second bolt inserted into the second strip hole, and when the second lifting support part 4 slides into place along the second direction, the second lifting support part 4 can be fixed to the first mounting seat 1 via the second bolt.

[0055] Similarly, in order to adjust the spacing between the third lifting support part 5 and the fourth lifting support part 6, the third lifting support part 5 and the fourth lifting support part 6 are installed on the second mounting seat 2 in an adjustable manner along the second direction. For example, the second mounting seat 2 is provided with a third strip hole and a fourth strip hole extending along the second direction, wherein the third lifting support part 5 is installed on the second mounting seat 2 in an adjustable manner via a third bolt inserted into the third strip hole, and when the third lifting support part 5 slides into place along the second direction, the third lifting support part 5 can be fixed to the second mounting seat 2 via the third bolt. The fourth lifting support part 6 is installed on the second mounting seat 2 in an adjustable manner via a fourth bolt inserted into the fourth strip hole, and when the fourth lifting support part 6 slides into place along the second direction, the sixth lifting support part 6 can be fixed to the second mounting seat 2 via the fourth bolt.

[0056] Optionally, the first lifting support part 3 includes a first lifting drive member 31 and a first supporting plate 32 connected to the driving end of the first lifting drive member 31, and the first supporting plate 32 is used to support and absorb the first corner of one end of the first side of the frame 200. The second lifting support part 4 includes a second lifting drive member 41 and a second supporting plate 42 connected to the driving end of the second lifting drive member 41, and the second supporting plate 42 is used to support and absorb the second corner of the other end of the first side of the frame 200. The third lifting support part 5 includes a third lifting drive member 51 and a third supporting plate 52 connected to the driving end of the third lifting drive member 51, and the third supporting plate 52 is used to support and absorb the first corner of one end of the second side of the frame 200. The fourth lifting support part 6 includes a fourth lifting drive member 61 and a fourth supporting plate 62 connected to the driving end of the fourth lifting drive member 61, and the fourth supporting plate 62 is used to support and absorb the second corner of the other end of the second side of the frame 200.

[0057] In this way, after adjusting the distance between the first mounting seat 1 and the second mounting seat 2, the distance between the first lifting support part 3 and the second lifting support part 4, and the distance between the third lifting support part 5 and the fourth lifting support part 6, the first supporting plate 32, the second supporting plate 42, the third supporting plate 52 and the fourth supporting plate 62 can cooperate to support the four corners of the frame 200, thereby ensuring the support stability of the frame 200. In addition, the first supporting plate 32, the second supporting plate 42, the third supporting plate 52 and the fourth supporting plate 62 can cooperate to suck the four corners of the frame 200 from the suction cup 100, thereby ensuring that the frame 200 can be stably unloaded from the suction cup 100.

[0058] Optionally, the first lifting drive member 31, the second lifting drive member 41, the third lifting drive member 51 and the fourth lifting drive member 61 are configured to synchronously drive the first supporting plate 32, the second supporting plate 42, the third supporting plate 52 and the fourth supporting plate 62 to rise and fall, thereby ensuring that the frame 200 can stably fall onto the suction cup 100 in a horizontal state and be adsorbed by the suction cup 100. In addition, the first supporting plate 32, the second supporting plate 42, the third supporting plate 52 and the fourth supporting plate 62 are ensured to descend synchronously, so as to implement synchronous absorption and unloading of the frame 200 on the suction cup 100.

[0059] Optionally, the first lifting drive member 31, the second lifting drive member 41, the third lifting drive member 51 and the fourth lifting drive member 61 are configured to be connected to the same PLC controller, and the PLC controller controls the synchronous driving of the first lifting drive member 31, the second lifting drive member 41, the third lifting drive member 51 and the fourth lifting drive member 61, thereby ensuring the lifting synchronization of the first supporting plate 32, the second supporting plate 42, the third supporting plate 52 and the fourth supporting plate 62.

[0060] like Figure 5 As shown, optionally, the first bearing plate 32 has a first limiting groove 33, in which a first adjustable positioning member 34 is disposed, the first limiting groove 33 is used to support the first corner of the frame 200, and the first positioning member 34 is used to abut against the first corner of the frame 200. The second bearing plate 42 has a second limiting groove 43, in which a second adjustable positioning member 44 is disposed, the second limiting groove 43 is used to support the second corner of the frame 200, and the second positioning member 44 is used to abut against the second corner of the frame 200. The third bearing plate 52 has a third limiting groove 53, the third limiting groove 53 is used to support the third corner of the frame 200, and the third corner of the frame 200 abuts against the inner wall of the third limiting groove 53. The fourth bearing plate 62 has a fourth limiting groove 63 , which is used to support the fourth corner of the frame 200 . The fourth corner of the frame 200 abuts against the inner wall of the fourth limiting groove 63 .

[0061] After placing the four corners of the frame 200 on the first limiting groove 33, the second limiting groove 43, the third limiting groove 53 and the fourth limiting groove 63 respectively, by pushing the frame 200, first ensure that the third corner of the frame 200 abuts against the inner wall of the third limiting groove 53, and the fourth corner of the frame 200 abuts against the inner wall of the fourth limiting groove 63. Then, the first positioning member 34 and the second positioning member 44 are used to abut and fix the first corner and the second corner of the frame 200 respectively. In this way, the fixed positioning of the frame 200 can be ensured, and the position deviation of the frame 200 can be prevented, and finally the frame 200 is accurately adsorbed to the magnetic adsorption area of ​​the suction cup 100, and the workpiece is accurately adsorbed to the vacuum adsorption area of ​​the suction cup 100.

[0062] Optionally, the first positioning member 34 includes a first waist hole disposed in the first limiting groove 33, and a first positioning pin installed in the first waist hole and capable of sliding along the first waist hole, and when the first positioning pin slides into place, it abuts against the first corner of the frame 200. Similarly, the second positioning member 44 includes a second waist hole disposed in the second limiting groove 43, and a second positioning pin installed in the second waist hole and capable of sliding along the second waist hole, and when the second positioning pin slides into place, it abuts against the second corner of the frame 200.

[0063] like Figure 5 As shown, optionally, an avoidance gap 35 for avoiding the suction cup 100 is formed at the inner edge of the first bearing plate 32 , the second bearing plate 42 , the third bearing plate 52 and the fourth bearing plate 62 .

[0064] like Figure 4 As shown, optionally, the bottoms of the first supporting plate 32 , the second supporting plate 42 , the third supporting plate 52 and the fourth supporting plate 62 are all provided with magnets 36 for adsorbing the tenter frame 200 .

[0065] When the suction cup 100 carrying the stretcher 20 and the slicing workpiece are translated back to the loading and unloading station again, the first carrier plate 32, the second carrier plate 42, the third carrier plate 52 and the fourth carrier plate 62 are driven by the corresponding lifting drive components to synchronously descend, and the first carrier plate 32, the second carrier plate 42, the third carrier plate 52 and the fourth carrier plate 62 respectively absorb the stretcher 200 from the suction cup 100 through the magnets 36 thereon, thereby completing the automatic unloading of the stretcher 200.

[0066] Based on the same inventive concept, an embodiment of the present application also provides a slicing device, which includes a loading and unloading mechanism, a suction cup and a slicing mechanism provided in any of the above embodiments, wherein: the loading and unloading mechanism is configured to support a frame, a carrying film is stretched inside the frame, and a workpiece is carried on the carrying film. The suction cup is configured to translate to the bottom of the frame, and the loading and unloading mechanism is configured to drive the frame to descend, so that the frame is adsorbed by the magnetic adsorption area of ​​the suction cup, and the workpiece is adsorbed by the vacuum adsorption area of ​​the suction cup. The suction cup is also configured to translate to the bottom of the slicing mechanism, the slicing mechanism is configured to slicing the workpiece, the suction cup is also configured to translate back to the bottom of the frame, and the loading and unloading mechanism is also configured to suck the frame from the suction cup.

[0067] It can be seen that, through the cooperation of the loading and unloading mechanism, the suction cup and the dicing mechanism, the dicing device in the embodiment of the present application realizes automatic dicing of the workpiece and realizes the loading and unloading efficiency of the workpiece.

[0068] Optionally, the dicing device in the embodiment of the present application further includes a translation module, the suction cup is connected to the movable part of the translation module, and the translation module is used to drive the suction cup to translate and switch between the loading and unloading mechanism and the dicing mechanism. The translation module can adopt various existing linear drive mechanisms that can drive the suction cup to translate, such as a screw module, a synchronous belt drive module, etc.

[0069] The present application is described in sufficient detail above with certain particularity. It should be understood by those skilled in the art that the description in the embodiments is merely exemplary, and all changes made without departing from the true spirit and scope of the present application should fall within the scope of protection of the present application. The scope of protection claimed in the present application is defined by the claims, rather than by the above description in the embodiments.

Claims

1. A loading and unloading mechanism, characterized in that: The loading and unloading mechanism comprises: A first mounting seat and a second mounting seat are spaced apart along a first direction, wherein the length directions of the first mounting seat and the second mounting seat are parallel to a second direction, wherein the second direction is perpendicular to the first direction; A first lifting support part and a second lifting support part are installed on the first mounting seat at intervals along the second direction, the first lifting support part and the second lifting support part are used to cooperate to support or adsorb a first side edge of a stretcher, a carrying film is stretched in the stretcher, and a workpiece is carried on the carrying film; A third lifting support part and a fourth lifting support part are installed on the second mounting seat at intervals along the second direction, the third lifting support part and the fourth lifting support part are used to cooperate with each other to support or absorb the second side edge of the stretcher frame, and the second side edge is opposite to the first side edge; The first lifting support portion, the second lifting support portion, the third lifting support portion and the fourth lifting support portion are also configured to be lifted and lowered synchronously.

2. The loading and unloading mechanism according to claim 1, characterized in that: The first lifting support part and the second lifting support part are mounted on the first mounting seat in an adjustable manner along the second direction; The third lifting support part and the fourth lifting support part are mounted on the second mounting seat in an adjustable manner along the second direction.

3. The loading and unloading mechanism according to claim 1, characterized in that: The first lifting support part includes a first lifting driving member and a first bearing plate connected to the driving end of the first lifting driving member, and the first bearing plate is used to support and absorb a first corner of one end of the first side of the stretcher frame; The second lifting support part includes a second lifting driving member and a second bearing plate connected to the driving end of the second lifting driving member, and the second bearing plate is used to support and absorb the second corner of the other end of the first side of the stretcher; The third lifting support part includes a third lifting driving member and a third bearing plate connected to the driving end of the third lifting driving member, and the third bearing plate is used to support and absorb the first corner of one end of the second side of the frame; The fourth lifting support part includes a fourth lifting driving member and a fourth bearing plate connected to the driving end of the fourth lifting driving member, and the fourth bearing plate is used to support and absorb the second corner of the other end of the second side of the frame; The first lifting drive member, the second lifting drive member, the third lifting drive member and the fourth lifting drive member are configured to synchronously drive the first supporting plate, the second supporting plate, the third supporting plate and the fourth supporting plate to lift and lower.

4. The loading and unloading mechanism according to claim 3, characterized in that: The first lifting drive member, the second lifting drive member, the third lifting drive member and the fourth lifting drive member are configured to be connected to the same PLC controller, and the PLC controller controls the first lifting drive member, the second lifting drive member, the third lifting drive member and the fourth lifting drive member to drive synchronously.

5. The loading and unloading mechanism according to claim 3, characterized in that: The first bearing plate has a first limiting groove, in which a first positioning member with adjustable position is arranged, the first limiting groove is used to support the first corner of the stretcher frame, and the first positioning member is used to abut against the first corner of the stretcher frame; The second bearing plate has a second limiting groove, in which a second positioning member with adjustable position is arranged, the second limiting groove is used to support the second corner of the stretcher frame, and the second positioning member is used to abut against the second corner of the stretcher frame; The third bearing plate has a third limiting groove, and the third limiting groove is used to support the third corner of the stretcher frame, and the third corner of the stretcher frame abuts against the inner wall of the third limiting groove; The fourth supporting plate has a fourth limiting groove, and the fourth limiting groove is used to support the fourth corner of the stretcher frame, and the fourth corner of the stretcher frame abuts against the inner wall of the fourth limiting groove.

6. The loading and unloading mechanism according to claim 5, characterized in that: The first positioning member includes a first waist hole arranged in the first limiting groove, and a first positioning pin installed in the first waist hole and capable of sliding along the first waist hole, and the first positioning pin abuts against the first corner of the stretcher frame when sliding into place; The second positioning member includes a second waist hole arranged in the second limiting groove, and a second positioning pin installed in the second waist hole and capable of sliding along the second waist hole, and the second positioning pin abuts against the second corner of the stretcher frame when sliding into place.

7. The loading and unloading mechanism according to claim 3, characterized in that: The first supporting plate, the second supporting plate, the third supporting plate and the fourth supporting plate are all provided with avoidance gaps at their inner edges for avoiding the suction cups.

8. The loading and unloading mechanism according to claim 3, characterized in that: The bottoms of the first supporting plate, the second supporting plate, the third supporting plate and the fourth supporting plate are all provided with magnets for adsorbing the stretcher.

9. A dicing device, characterized in that: The dicing device comprises a loading and unloading mechanism, a suction cup and a dicing mechanism as claimed in any one of claims 1 to 8, wherein: The loading and unloading mechanism is configured as a supporting frame, a carrying film is stretched inside the frame, and a workpiece is carried on the carrying film; The suction cup is configured to translate to the bottom of the frame, and the loading and unloading mechanism is configured to drive the frame to descend, so that the frame is adsorbed by the magnetic adsorption area of ​​the suction cup, and the workpiece is adsorbed by the vacuum adsorption area of ​​the suction cup; The suction cup is also configured to translate to the bottom of the dicing mechanism, the dicing mechanism is configured to scribe the workpiece, the suction cup is also configured to translate back to the bottom of the frame, and the loading and unloading mechanism is also configured to suck the frame from the suction cup.

10. The dicing device according to claim 9, wherein: The dicing device further comprises a translation module, the suction cup is connected to a movable part of the translation module, and the translation module is used to drive the suction cup to translate and switch between the loading and unloading mechanism and the dicing mechanism.

Images