Auxiliary jig for bonding crystal bars

Abstract

The invention provides an auxiliary jig for crystal bar bonding, and relates to the technical field of silicon carbide wafer processing. The auxiliary jig for crystal bar bonding comprises a base and a back plate, the base extends in the first direction, and the back plate is perpendicularly arranged on the first edge, extending in the first direction, of the upper surface of the base; the first positioning plate is arranged on the upper surface of the base, the surface, away from the back plate, of the first positioning plate is a first positioning face used for positioning a workpiece plate, the first positioning face is perpendicular to the upper surface of the base and is parallel to a second positioning face, located on the same side as the base, of the back plate, and the second positioning face is used for positioning the side portion of a crystal bar; and the second positioning plate is movably arranged on the back plate and can move in a reciprocating mode relative to the back plate in the first direction, a third positioning face of the second positioning plate is perpendicular to the upper surface of the base and the second positioning face, and the third positioning face is used for positioning the end face of the crystal bar.

Description

Technical Field

[0001] The present disclosure relates to the technical field of silicon carbide wafer processing, and in particular to an auxiliary jig for crystal rod bonding. Background Art

[0002] In the process of manufacturing silicon carbide wafer substrates, the main processing processes include: crystal growth, crystal rod outer diameter rounding, flat grinding, bonding crystal rod and workpiece plate, crystal rod wire cutting, chamfering, double-sided grinding and polishing, cleaning, etc. In the process of bonding the crystal rod, it is necessary to use mixed glue to bond the crystal rod with the long strip of resin and the workpiece plate for subsequent multi-wire cutting processing.

[0003] Currently, the crystal rod is bonded to the workpiece plate manually. However, due to the manual operation, the bonding angle of the crystal rod is uncontrollable, which can easily cause a large error in the bonding angle and affect the bonding efficiency and the output rate of subsequent silicon carbide slices. Summary of the invention

[0004] A technical problem to be solved by the present disclosure is that the crystal rod is bonded to the workpiece plate manually, which results in an uncontrollable bonding angle of the crystal rod and easily causes a large error in the bonding angle.

[0005] In order to solve the above technical problems, the embodiment of the present disclosure provides an auxiliary fixture for bonding a crystal rod, the auxiliary fixture for bonding a crystal rod comprises: a base and a back plate, the base extends along a first direction, the back plate is vertically arranged on a first edge of an upper surface of the base extending along the first direction;

[0006] A first positioning plate is arranged on the upper surface of the base, the surface of the first positioning plate facing away from the back plate is a first positioning surface, which is used to position the workpiece plate, the first positioning surface is perpendicular to the upper surface of the base, and is parallel to a second positioning surface on the back plate which is located on the same side as the base, and the second positioning surface is used to position the side of the crystal rod; and

[0007] The second positioning plate is movably arranged on the back plate and can reciprocate relative to the back plate along the first direction. The third positioning surface of the second positioning plate is respectively perpendicular to the upper surface of the base and the second positioning surface. The third positioning surface is used to position the end face of the crystal rod.

[0008] In some embodiments, a sliding plate is fixed to one side of the second positioning plate close to the back plate. The sliding plate is perpendicular to the second positioning plate and is slidably connected to the back plate so that the second positioning plate can reciprocate relative to the back plate along the first direction.

[0009] In some embodiments, the second positioning surface of the back plate is provided with at least two slide grooves, the at least two slide grooves are arranged at intervals along the second direction, and each slide groove extends along the first direction;

[0010] The sliding plate is provided with sliding blocks corresponding to and matching at least two sliding grooves, and the sliding blocks are slidably connected with the corresponding sliding grooves;

[0011] The second direction is perpendicular to the upper surface of the base.

[0012] In some embodiments, the sliding plate is provided with locking screws corresponding to at least two sliding grooves, the locking screws are threadedly connected to the sliding plate and the ends of the locking screws are used to abut against the sliding grooves to position the sliding plate and the second positioning plate.

[0013] In some embodiments, a third positioning plate extending along the first direction is disposed on the second positioning surface of the back plate, the surface of the third positioning plate facing the base is parallel to the upper surface of the base, and is used to contact the upper surface of the sliding plate to position the sliding track of the sliding plate.

[0014] In some embodiments, a fourth positioning plate extending along the first direction is also provided on the second positioning surface of the back plate, and the surface of the third positioning plate facing the base is parallel to the upper surface of the base and is used to contact the upper surface of the sliding plate to position the sliding trajectory of the sliding plate.

[0015] In some embodiments, reinforcing ribs are provided at the joints between the sliding plate and the second positioning plate, and the reinforcing ribs form preset angles with the sliding plate and the second positioning plate respectively.

[0016] In some embodiments, scale lines are arranged on the second positioning surface of the back plate along the first direction.

[0017] In some embodiments, a positioning member is provided on the base or the first positioning plate, and the position of the positioning member facing the surface of the workpiece plate in the first direction is aligned with the zero line of the scale line.

[0018] In some embodiments, the scale lines are located on the bottom side of the sliding plate;

[0019] A scale control portion is arranged at the bottom of the second positioning plate and at one side close to the back plate. The scale control portion has a tip facing the side where the scale line is located, and the tip is coplanar with the third positioning surface.

[0020] Through the above technical scheme, the auxiliary jig for crystal rod bonding provided by the present invention can reliably position the workpiece plate through the first positioning surface 301 of the first positioning plate. After the bonding of the crystal rod and the resin strip is completed, the crystal rod and the resin strip are bonded to the workpiece plate as a whole. During the bonding process with the workpiece plate, the side of the crystal rod is fitted with the second positioning surface of the back plate, the end face of the crystal rod is fitted with the third positioning surface of the second positioning plate, and the bottom of the crystal rod is tightly bonded to the workpiece plate, so as to achieve reliable determination of the crystal direction and angle of the crystal rod, and is convenient for manual operation, which can improve the bonding efficiency and the output rate of subsequent cutting of silicon carbide crystal rods, thereby increasing production. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present disclosure. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0022] Figure 1 It is a schematic diagram of the structure of the auxiliary fixture for bonding the crystal rod disclosed in the embodiment of the present disclosure.

[0023] Description of reference numerals:

[0024] 1. Base; 2. Back plate; 201. Second positioning surface; 202. Slide groove; 3. First positioning plate; 301. First positioning surface; 4. Second positioning plate; 5. Sliding plate; 6. Locking screw; 7. Third positioning plate; 8. Crystal rod; 9. Workpiece plate; x, first direction; y, second direction. DETAILED DESCRIPTION

[0025] The following is a further detailed description of the embodiments of the present disclosure in conjunction with the accompanying drawings and examples. The detailed description of the following embodiments and the accompanying drawings are used to exemplarily illustrate the principles of the present disclosure, but cannot be used to limit the scope of the present disclosure. The present disclosure can be implemented in many different forms and is not limited to the specific embodiments disclosed herein, but includes all technical solutions that fall within the scope of the claims.

[0026] The present disclosure provides these embodiments to make the present disclosure thorough and complete, and to fully express the scope of the present disclosure to those skilled in the art. It should be noted that unless otherwise specifically stated, the relative arrangement of the parts and steps, the composition of the materials, the numerical expressions and the numerical values ​​set forth in these embodiments should be interpreted as being merely exemplary, and not as limiting.

[0027] It should be noted that, in the description of the present disclosure, unless otherwise specified, the meaning of "multiple" is greater than or equal to two; the terms "upper", "lower", "left", "right", "inner", "outer", etc., indicating the orientation or positional relationship, are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present disclosure. When the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0028] In addition, the words "first", "second" and similar words used in the present disclosure do not indicate any order, quantity or importance, but are only used to distinguish different parts. "Vertical" does not mean vertical in the strict sense, but is within the tolerance range. "Parallel" does not mean parallel in the strict sense, but is within the tolerance range. "Include" or "comprising" and similar words mean that the elements before the word include the elements listed after the word, and do not exclude the possibility of including other elements.

[0029] It should also be noted that in the description of the present disclosure, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present disclosure can be understood according to the specific circumstances. When a specific device is described as being located between a first device and a second device, there may or may not be an intermediate device between the specific device and the first device or the second device.

[0030] All terms used in the present disclosure have the same meanings as those understood by those of ordinary skill in the art to which the present disclosure belongs, unless otherwise specifically defined. It should also be understood that terms defined in general dictionaries, for example, should be interpreted as having meanings consistent with their meanings in the context of the relevant technology, and should not be interpreted in an idealized or extremely formal sense, unless explicitly defined as such herein.

[0031] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered part of the specification.

[0032] Embodiment 1

[0033] Reference Figure 1 , Embodiment 1 of the present invention proposes an auxiliary fixture for bonding a crystal rod, the auxiliary fixture for bonding a crystal rod 8) comprises: a base 1 and a back plate 2, the base 1 extends along a first direction x, the back plate 2 is perpendicularly arranged on the first edge of the upper surface of the base 1 extending along the first direction x; a first positioning plate 3, arranged on the upper surface of the base 1, the surface of the first positioning plate 3 away from the back plate 2 is a first positioning surface 301), used for positioning a workpiece plate 9, the first positioning surface 301 is perpendicular to the upper surface of the base 1, and is parallel to a second positioning surface 201 on the back plate 2 located on the same side as the base 1, the second positioning surface 201 is used to position the side of the crystal rod 8; and a second positioning plate 4, movably arranged on the back plate 2, and can reciprocate relative to the back plate 2 along the first direction x, the third positioning surface of the second positioning plate 4 is perpendicular to the upper surface of the base 1 and the second positioning surface 201, respectively, and the third positioning surface is used to position the end face of the crystal rod 8.

[0034] Specifically, the auxiliary fixture for bonding the crystal rod provided in this embodiment is applied to the bonding process of the crystal rod 8 and the workpiece plate 9 in the process of manufacturing and processing the silicon carbide wafer substrate, and is used to assist in manually accurately controlling the bonding angle of the crystal rod 8. The auxiliary fixture specifically includes: a base 1 and a back plate 2, a first positioning plate 3 and a second positioning plate 4. In the bonding process of the crystal rod 8 and the workpiece plate 9, the workpiece plate 9 and the crystal rod 8 can be positioned separately to ensure that the crystal rod 8 maintains an accurate angle and crystal orientation to bond with the workpiece plate 9, and avoids errors in the bonding angle, so as to improve the bonding efficiency and the subsequent silicon carbide slice output rate.

[0035] The base 1 and the back plate 2 constitute the main structure of the auxiliary fixture. The base 1 and the back plate 2 can be respectively set as rectangular flat plate structures with a certain thickness. The first direction x is the length direction of the base 1 and the back plate 2. The back plate 2 is set on the first edge of the upper surface of the base 1 extending along the first direction x. The back plate 2 is fixed to the base 1 at an angle perpendicular to the upper surface of the base 1 to form an "L"-shaped main structure. The surface on the back plate 2 located on the same side as the base 1 is the second positioning surface 201, which is used to position the side of the crystal rod 8 when the crystal rod 8 is bonded to the workpiece plate 9.

[0036] The first positioning plate 3 can be set as a long rectangular plate extending along the first direction x. The first positioning plate 3 is fixed to the upper surface of the base 1 and can be positioned at a position where the upper surface of the base 1 abuts against the base 1. The surface of the first positioning plate 3 facing away from the back plate 2 is a first positioning surface 301. The first positioning surface 301 is perpendicular to the upper surface of the base 1 and parallel to the second positioning surface 201 of the back plate 2, so that the first positioning surface 301 can be used to position the workpiece plate 9, so that the workpiece plate 9 abuts against the first positioning surface 301 of the first positioning plate 3, thereby realizing reliable positioning of the workpiece plate 9 on the base 1.

[0037] The second positioning plate 4 is movably arranged on the back plate 2. The movable connection here can be but is not limited to a detachable connection, a sliding connection, a plug-in connection or the like that can produce relative movement, so that the second positioning plate 4 can reciprocate relative to the back plate 2 along the first direction x. The third positioning surface of the second positioning plate 4 is respectively perpendicular to the upper surface of the base 1 and the second positioning surface 201 of the back plate 2. In this way, when the crystal rod 8 is bonded, the end face of the crystal rod 8 can be positioned by the third positioning surface of the second positioning plate 4.

[0038] During the bonding process of the crystal rod 8 and the workpiece plate 9 in the process of manufacturing the silicon carbide wafer substrate, the wire mesh position is first measured before bonding the rod, so as to determine the bonding position of the crystal rod 8 on the workpiece plate 9. After the determination is made, the position of the second positioning plate 4 is adjusted along the first direction x so that the position of the third positioning surface of the second positioning plate 4 corresponds to the bonding position of the crystal rod 8. In this way, the state of the auxiliary fixture for bonding the crystal rod 8 is adjusted; then the workpiece plate 9 is taken out, wiped clean, and aligned with the first positioning plate 3. A positioning surface 301 locates the position of the workpiece plate 9 so that the workpiece plate 9 can be reliably positioned on the base 1; then wipe clean the surface where the crystal rod 8 and the resin strip are bonded, and after wiping clean, bond the crystal rod 8 to the resin strip. After the glue is cured, continue to apply bonding glue, place the crystal rod 8 on the workpiece plate 9, and fit the side of the crystal rod 8 with the second positioning surface 201, fit the end face of the crystal rod 8 with the third positioning surface, and make the bottom of the crystal rod 8 tightly bonded to the workpiece plate 9. After the glue is completely cured, subsequent processing can be arranged.

[0039] According to the above, an embodiment of the present invention proposes an auxiliary jig for crystal rod bonding, which reliably positions the workpiece plate 9 through the first positioning surface 301 of the first positioning plate 3. After the crystal rod 8 and the resin strip are bonded, the crystal rod 8 and the resin strip are bonded to the workpiece plate 9 as a whole. During the bonding process with the workpiece plate 9, the side of the crystal rod 8 is fitted with the second positioning surface 201 of the back plate 2, the end face of the crystal rod 8 is fitted with the third positioning surface of the second positioning plate 4, and the bottom of the crystal rod 8 is tightly bonded to the workpiece plate 9, so as to achieve reliable determination of the crystal direction and angle of the crystal rod 8, and is convenient for manual operation, which can improve the bonding efficiency and the output rate of the subsequent cutting of the silicon carbide crystal rod 8, thereby improving the yield.

[0040] Reference Figure 1 In a specific implementation, a sliding plate 5 is fixed to one side of the second positioning plate 4 close to the back plate 2. The sliding plate 5 is perpendicular to the second positioning plate 4 and is slidably connected to the back plate 2 so that the second positioning plate 4 can reciprocate relative to the back plate 2 along the first direction x.

[0041] Specifically, in order to maintain the vertical state of the second positioning plate 4 and the back plate 2 and facilitate the reliable adjustment of the second positioning plate 4, in the technical solution adopted by the present invention, a sliding plate 5 can be arranged on the side of the second positioning plate 4 close to the back plate 2. The sliding plate 5 can be a rectangular plate structure and is perpendicular to the second positioning plate 4. The sliding plate 5 can be integrally formed with the second positioning plate 4; the sliding plate 5 is slidably connected to the back plate 2, and can drive the second positioning plate 4 to reciprocate relative to the back plate 2 along the first direction x, and can improve the stability of the movement of the second positioning plate 4 and the reliability of the movement trajectory.

[0042] In order to improve the accuracy of the sliding track of the sliding plate 5, the technical solution adopted by the present invention is as follows: Figure 1At least two slide grooves 202 can be opened on the second positioning surface 201 of the back plate 2, and the slide grooves 202 are recessed relative to the second positioning surface 201. Taking the setting of two slide grooves 202 as an example, the two slide grooves 202 are spaced apart along the second direction y on the second positioning surface 201 of the back plate 2, and each slide groove 202 extends along the first direction x. Correspondingly, sliding blocks with the same number and corresponding positions on the slide grooves 202 can be set on the surface of the sliding plate 5 facing the back plate 2. The sliding blocks are adapted to the slide grooves 202 and can slide back and forth in the slide grooves 202 along the first direction x, so that the sliding block is matched with the slide grooves 202, and can slide back and forth in the slide grooves 202 along the first direction x, so that the reliable and stable connection between the sliding plate 5 and the back plate 2 is realized through the cooperation between the sliding block and the slide groove 202, and the sliding trajectory of the sliding plate 5 can be reliably limited, thereby improving the accuracy of positioning the crystal rod 8 by the third positioning surface.

[0043] Reference Figure 1 In a specific implementation, a third positioning plate 7 extending along the first direction x can be further provided on the second positioning surface 201 of the back plate 2, the surface of the third positioning plate 7 facing the base 1 is parallel to the upper surface of the base 1, and is used to contact with the upper surface of the sliding plate 5 to position the sliding trajectory of the sliding plate 5; and / or, a fourth positioning plate extending along the first direction x is further provided on the second positioning surface 201 of the back plate 2, the surface of the third positioning plate 7 facing the base 1 is parallel to the upper surface of the base 1, and is used to contact with the upper surface of the sliding plate 5 to position the sliding trajectory of the sliding plate 5; both can further limit the sliding trajectory of the sliding plate 5 on the back plate 2.

[0044] Reference Figure 1 In a specific implementation, the sliding plate 5 is provided with locking screws 6 corresponding to at least two slide grooves 202 . The locking screws 6 are screwed to the sliding plate 5 and the ends thereof are used to abut against the slide grooves 202 to position the sliding plate 5 and the second positioning plate 4 .

[0045] Specifically, in order to achieve reliable positioning of the second positioning plate 4 after adjusting the position of the second positioning plate 4, in the technical solution adopted by the present invention, at least two threaded holes equal in number to the slide groove 202 and corresponding in position in the second direction y can be opened on the sliding plate 5, and a locking screw 6 is threaded in each threaded hole. When adjusting the position of the second positioning plate 4, the end of the locking screw 6 does not contact the bottom surface of the slide groove 202, thereby not restricting the sliding of the sliding plate 5. When the position of the second positioning plate 4 is determined, the locking screw 6 can be further tightened so that the end of the locking screw 6 abuts against and presses the bottom surface of the slide groove 202, thereby locking the position of the sliding plate 5, thereby achieving reliable positioning of the second positioning plate 4 and avoiding the position of the second positioning plate 4 from being offset during the bonding process of the crystal rod 8.

[0046] In a specific implementation, reinforcing ribs (not shown in the figure) are provided at the joints of the sliding plate 5 and the second positioning plate 4 , and the reinforcing ribs and the sliding plate 5 and the second positioning plate 4 form preset angles respectively.

[0047] Specifically, in order to improve the strength of the second positioning plate 4 and the positioning reliability of the first positioning surface 301, in the technical solution adopted by the present invention, reinforcing ribs can be provided at the joints of the sliding plate 5 and the second positioning plate 4. The reinforcing ribs are obliquely connected between the sliding plate 5 and the second positioning plate 4, which can reduce the possibility of deformation of the second positioning plate 4, thereby improving the reliability of the first positioning surface 301 in positioning the end face of the crystal rod 8.

[0048] In a specific implementation, scale lines (not shown in the figure) are arranged on the second positioning surface 201 of the back plate 2 along the first direction x.

[0049] Specifically, in order to achieve accurate position adjustment of the second positioning plate 4, in the technical solution adopted by the present invention, scale lines can be set along the first direction x on the second positioning surface 201 of the back plate 2, and the scale lines can be located at a position exposed relative to the sliding plate 5, for example: the bottom side of the sliding plate 5, or the scale lines can also be set at a non-exposed position relative to the sliding plate 5. In this case, a hollow groove corresponding to the scale lines and extending along the first direction x can be opened on the sliding plate 5; by setting the scale lines, it is convenient to determine and adjust the position of the second positioning plate 4 after determining the position where the crystal rod 8 is bonded to the workpiece plate 9 and the position of the workpiece plate 9.

[0050] Among them, in order to facilitate the alignment of the second positioning plate 4 relative to the scale line, the scale line can be located on the bottom side of the sliding plate 5 on the first positioning surface 301, and a scale control part is provided at the bottom of the second positioning plate 4 and on the side close to the back plate 2. The scale control part has a tip facing the side where the scale line is located, and the tip is coplanar with the third positioning surface. In the process of the sliding plate 5 driving the second positioning plate 4 to move, the tip of the scale control part always points to the corresponding scale, so that the position of the second positioning plate 4 can be adjusted more accurately.

[0051] In order to adjust the position of the second positioning plate 4 with the position of the workpiece plate 9 as a reference, in a specific implementation, a positioning piece can be set on the base 1 or the first positioning plate 3. The positioning piece can be a plate structure or a block structure. The position of the surface of the positioning piece facing the workpiece plate 9 in the first direction x is aligned with the zero line of the scale line. When the workpiece plate 9 is placed, the end face of the workpiece plate 9 fits with the surface of the positioning piece, which can more conveniently determine the bonding position of the crystal rod 8 on the workpiece plate 9.

[0052] So far, various embodiments of the present disclosure have been described in detail. In order to avoid obscuring the concept of the present disclosure, some details known in the art are not described. Based on the above description, those skilled in the art can fully understand how to implement the technical solution disclosed here.

[0053] Although some specific embodiments of the present disclosure have been described in detail by way of examples, it should be understood by those skilled in the art that the above examples are for illustration only and are not intended to limit the scope of the present disclosure. It should be understood by those skilled in the art that the above embodiments may be modified or some technical features may be replaced by equivalents without departing from the scope and spirit of the present disclosure. In particular, the various technical features mentioned in the various embodiments may be combined in any manner as long as there is no structural conflict.

Claims

1. An auxiliary fixture for bonding a crystal rod, characterized in that: include: A base (1) and a back plate (2), wherein the base (1) extends along a first direction (x), and the back plate (2) is vertically arranged on a first edge of an upper surface of the base (1) extending along the first direction (x); A first positioning plate (3) is arranged on the upper surface of the base (1); the surface of the first positioning plate (3) facing away from the back plate (2) is a first positioning surface (301) used for positioning the workpiece plate (9); the first positioning surface (301) is perpendicular to the upper surface of the base (1) and is parallel to a second positioning surface (201) on the back plate (2) located on the same side as the base (1); the second positioning surface (201) is used for positioning the side of the crystal rod (8); and A second positioning plate (4) is movably arranged on the back plate (2) and can reciprocate relative to the back plate (2) along the first direction (x); a third positioning surface of the second positioning plate (4) is respectively perpendicular to the upper surface of the base (1) and the second positioning surface (201); and the third positioning surface is used to position the end face of the crystal rod (8).

2. The auxiliary fixture for bonding the crystal rod according to claim 1, characterized in that: A sliding plate (5) is fixed to one side of the second positioning plate (4) close to the back plate (2); the sliding plate (5) is perpendicular to the second positioning plate (4) and is slidably connected to the back plate (2), so that the second positioning plate (4) can reciprocate relative to the back plate (2) along the first direction (x).

3. The auxiliary fixture for bonding the crystal rod according to claim 2, characterized in that: The second positioning surface (201) of the back plate (2) is provided with at least two slide grooves (202), the at least two slide grooves (202) are arranged at intervals along the second direction (y), and each of the slide grooves (202) extends along the first direction (x); The sliding plate (5) is provided with a sliding block corresponding to and matching the at least two sliding grooves (202), and the sliding block is slidably connected to the corresponding sliding groove (202); Wherein, the second direction (y) is perpendicular to the upper surface of the base (1).

4. The auxiliary fixture for bonding the crystal rod according to claim 3, characterized in that: The sliding plate (5) is provided with a locking screw (6) corresponding to the at least two sliding grooves (202); the locking screw (6) is threadedly connected to the sliding plate (5) and the end portion is used to abut against the sliding groove (202) to position the sliding plate (5) and the second positioning plate (4).

5. The auxiliary fixture for bonding the crystal rod according to claim 2, characterized in that: A third positioning plate (7) extending along the first direction (x) is arranged on the second positioning surface (201) of the back plate (2); the surface of the third positioning plate (7) facing the base (1) is parallel to the upper surface of the base (1), and is used to contact the upper surface of the sliding plate (5) to position the sliding track of the sliding plate (5).

6. The auxiliary fixture for bonding the crystal rod according to claim 2 or 5, characterized in that: A fourth positioning plate extending along the first direction (x) is also provided on the second positioning surface (201) of the back plate (2); the surface of the third positioning plate (7) facing the base (1) is parallel to the upper surface of the base (1) and is used to contact the upper surface of the sliding plate (5) to position the sliding track of the sliding plate (5).

7. The auxiliary fixture for bonding the crystal rod according to claim 2, characterized in that: A reinforcing rib is provided at the junction of the sliding plate (5) and the second positioning plate (4), and the reinforcing rib forms a preset angle with the sliding plate (5) and the second positioning plate (4) respectively.

8. The auxiliary fixture for bonding the crystal rod according to claim 2, characterized in that: The second positioning surface (201) of the back plate (2) is provided with scale lines along the first direction (x).

9. The auxiliary fixture for bonding the crystal rod according to claim 8, characterized in that: A positioning member is provided on the base (1) or the first positioning plate (3), and the position of the positioning member facing the surface of the workpiece plate (9) in the first direction (x) is aligned with the zero line of the scale line.

10. The auxiliary fixture for bonding the crystal rod according to claim 8, characterized in that: The scale line is located on the bottom side of the sliding plate (5); A scale reference portion is provided at the bottom of the second positioning plate (4) and on one side close to the back plate (2), the scale reference portion having a tip facing the side where the scale line is located, and the tip is coplanar with the third positioning surface.

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