Online adjustable magnetic steel

Abstract

The invention discloses on-line adjustable magnetic steel, which is applied to magnetron sputtering coating equipment and comprises a shell, a magnet assembly and an adjusting mechanism, the magnet assembly is arranged in the shell, and a plurality of adjusting positions are preset in the length direction of the magnet assembly. The adjusting mechanism comprises a plurality of driving assemblies and a controller. The driving assemblies are arranged in the shell and used for driving the adjusting positions of the magnet assembly to move in the first direction one by one, and the magnetic field positions of the adjusting positions of the magnet assembly are adjusted one by one. The first direction is the normal direction of the magnet assembly; the controller is in communication connection with the multiple driving assemblies and used for controlling operation of the multiple driving assemblies one by one so as to control operation of the multiple driving assemblies one by one outside the magnetic steel, in this way, online adjustment of the magnetic steel can be achieved, the magnetic steel can be adjusted at any time, vacuum does not need to be broken, the debugging time is greatly saved, and the efficiency is improved. The cost is saved.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum magnetron sputtering coating, and in particular to an online adjustable magnetic steel. Background Art

[0002] In the field of vacuum magnetron sputtering coating, the uniformity of the magnetic field is the focus of this technology. At present, traditional magnetic steel also has an adjustment function, but the vacuum can only be broken, the magnetic steel is removed, and the magnetic field uniformity can only be adjusted by manually adjusting the distance of the magnet offline. Moreover, it is often necessary to adjust and test at the same time to achieve a better state. In addition, with the consumption of the target material or the replacement of new target materials, repeated adjustments are required. In other words, the current adjustment method of magnetic steel is mainly offline adjustment, which takes a lot of time and wastes manpower, material and financial resources. Summary of the invention

[0003] In view of this, the present invention provides an online adjustable magnetic steel, which can help to achieve online adjustment of the magnetic steel, so that the magnetic steel can be adjusted at any time without breaking the vacuum, which greatly saves debugging time, improves efficiency and saves costs.

[0004] To achieve the above object, the present invention provides the following technical solutions:

[0005] An online adjustable magnetic steel, applied to magnetron sputtering coating equipment, comprises: a housing, a magnet assembly, and an adjustment mechanism;

[0006] The magnet assembly is disposed in the housing and has a plurality of adjustment positions preset along its length direction;

[0007] The regulating mechanism comprises: a plurality of driving components and a controller;

[0008] The plurality of driving assemblies are respectively disposed in the housing and are used to drive the plurality of adjustment positions of the magnet assembly to move along a first direction one by one; wherein the first direction is a normal direction of the magnet assembly;

[0009] The controller is communicatively connected to the plurality of driving components and is used to control the operation of the plurality of driving components one by one.

[0010] Preferably, the first shell wall between the two ends of the shell is a flat wall structure, and the first shell wall is provided with a plurality of openings along the length direction of the shell, and the openings correspond to the plurality of adjustment positions of the magnet assembly one by one;

[0011] The plurality of driving components are disposed one by one in the plurality of openings of the first shell wall, and the driving ends thereof are all capable of moving along the first direction and are connected one by one with the plurality of adjustment positions of the magnet component;

[0012] The online adjustable magnetic steel also includes a plurality of sealing covers;

[0013] The plurality of sealing covers are installed one by one outside the plurality of openings of the first shell wall.

[0014] Preferably, each of the driving components comprises: a housing, a lead screw assembly, a transmission assembly and a motor assembly;

[0015] The housing is disposed in the opening of the first housing wall;

[0016] The screw assembly is disposed in the housing; wherein the nut of the screw assembly is rotatable and can drive the screw to move along the first direction when rotating, and the first end of the screw away from the opening serves as the driving end;

[0017] The motor assembly is arranged outside the housing, and its output end is located inside the housing and drives the nut to rotate through the transmission assembly;

[0018] The controller is communicatively connected to the motor assembly and is used to control the operation of the motor assembly.

[0019] Preferably, the transmission assembly comprises: a first bevel gear and a second bevel gear;

[0020] The first bevel gear is sleeved on the output end of the motor assembly;

[0021] The second bevel gear is sleeved on the nut and is used for meshing with the first bevel gear.

[0022] Preferably, the driving assembly further comprises: a fixing block and a rotation-stopping rod;

[0023] The fixing block is arranged outside the opening of the first shell wall, and is provided with a through slot and two slide slots along the length direction of the lead screw, wherein the two slide slots are located at both sides of the through slot and communicate with the through slot;

[0024] The sealing cover can cover the fixing block;

[0025] The second end of the lead screw passes through the through slot of the fixing block;

[0026] The anti-rotation rod vertically penetrates the second end of the lead screw, and both ends of the anti-rotation rod are located in two slide grooves of the fixed block one by one, and can slide along the slide grooves.

[0027] Preferably, the adjustment mechanism further comprises a plurality of position detection components;

[0028] A plurality of position detection components are respectively arranged in the housing and are used to detect the positions of the first ends of the plurality of lead screws one by one; wherein the plurality of position detection components are also respectively connected to the controller for communication.

[0029] Preferably, the position detection component comprises: a lamp bead, a grating and a bracket;

[0030] The lamp bead is arranged at the first end of the lead screw;

[0031] The grating is arranged outside the housing through the bracket and is distributed opposite to the lamp beads; wherein the grating is communicatively connected with the controller.

[0032] Preferably, each of the motor assemblies comprises a motor;

[0033] Each of the motors is equipped with a control circuit board for controlling the operation of the motor, and each of the control circuit boards of the motors has a separate address;

[0034] The controller is communicatively connected to the control circuit board of each motor, and can identify the corresponding motor according to the address of the control circuit board, and send a control command to the control circuit board of the corresponding motor to control the operation of the corresponding motor.

[0035] Preferably, the control circuit board of each of the motors is also equipped with a temperature sensor and / or a humidity sensor, and is used to communicate with the control center of the magnetron sputtering coating equipment.

[0036] A magnetron sputtering coating device comprises a magnetic steel, wherein the magnetic steel is the online adjustable magnetic steel as described above.

[0037] It can be seen from the above technical solution that the online adjustable magnetic steel provided by the present invention has multiple driving components in the magnetic steel shell, which are used to drive the multiple adjustment positions of the magnet assembly to move in a specific direction one by one, so as to achieve one-to-one adjustment of the magnetic field positions of the multiple adjustment positions of the magnet assembly, and the multiple driving components are also communicated with the external controller so as to control the operation of the multiple driving components one by one outside the magnetic steel. In this way, it can help to achieve online adjustment of the magnetic steel, and make the magnetic steel adjustable at any time without breaking the vacuum, which greatly saves debugging time, improves efficiency and saves costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0039] Figure 1 A schematic diagram of the structure of an online adjustable magnetic steel provided in an embodiment of the present invention;

[0040] Figure 2A top view of the structure of the online adjustable magnetic steel provided in an embodiment of the present invention;

[0041] Figure 3 for Figure 2 AA section view;

[0042] Figure 4 for Figure 3 A partial enlarged view of B;

[0043] Figure 5 Another structural schematic diagram of an online adjustable magnetic steel provided in an embodiment of the present invention;

[0044] Figure 6 A schematic diagram of installing a fixing plate on a housing according to an embodiment of the present invention;

[0045] Figure 7 A schematic diagram of the installation of multiple drive components in a frame according to an embodiment of the present invention;

[0046] Figure 8 A schematic diagram of the cooperation between multiple drive assemblies and magnet assemblies provided in an embodiment of the present invention;

[0047] Fig. 9 for Figure 8 A partial enlarged view of C;

[0048] Fig.10 Another schematic diagram of the cooperation between the driving assembly and the magnet assembly provided by an embodiment of the present invention;

[0049] Fig.11 A schematic diagram of the structure of a drive assembly provided by an embodiment of the present invention;

[0050] Fig.12 Another schematic diagram of the structure of a drive assembly provided by an embodiment of the present invention;

[0051] Fig.13 Another structural cross-sectional view of the online adjustable magnetic steel provided by an embodiment of the present invention;

[0052] Fig.14 for Fig.13 A partial enlarged view of D;

[0053] Fig.15 A schematic diagram of the cooperation between a plurality of first lead screw assemblies and a magnet assembly provided in an embodiment of the present invention;

[0054] Fig.16 for Fig.15 A partial enlarged view of E;

[0055] Fig.17 A schematic diagram of the engagement of a first lead screw assembly and a rotating shaft assembly provided in an embodiment of the present invention;

[0056] Fig.18 A schematic diagram of the first lead screw assembly and the rotating shaft assembly being separated from each other according to an embodiment of the present invention;

[0057] Fig.19 A structural front view of a push block provided in an embodiment of the present invention;

[0058] Fig. 20 A top view of the structure of a push block provided in an embodiment of the present invention.

[0059] Among them, 1 is a shell, 1.1 is a first shell wall, 2 is a sealing cover, 3 is a housing, 4 is a nut, 5 is a screw, 6 is a first bevel gear, 7 is a second bevel gear, 8 is a fixed block, 8.1 is a through slot, 8.2 is a slide slot, 9 is a stop rod, 10 is a lamp bead, 11 is a grating, 12 is a bracket, 13 is a motor, 14 is a reducer, 15 is a fixing plate, 16 is a skeleton, 17 is a yoke iron, 18 is a magnet, 19 is a holder, 20 is a first shell, 21 is a second bevel gear, Two outer shells, 22 is the third bevel gear, 23 is the first lead screw, 24 is the first nut, 25 is the fourth bevel gear, 25.1 is the outer cone surface, 26 is the support, 27 is the electromagnet, 28 is the push block, 28.1 is the push inclined surface, 29 is the compression spring, 30 is the first drive motor, 31 is the rotating shaft, 32 is the first bearing, 33 is the second bearing, 34 is the third bearing, 35 is the first clamping seat, 36 is the support, 37 is the fourth bearing, and 38 is the grating fixing plate. DETAILED DESCRIPTION

[0060] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0061] The online adjustable magnetic steel provided in the embodiment of the present invention is applied to magnetron sputtering coating equipment, such as Figures 1 to 3 As shown, it includes: a housing 1, a magnet assembly, and an adjustment mechanism;

[0062] The magnet assembly is disposed in the housing 1 and has a plurality of adjustment positions preset along its length direction;

[0063] The regulating mechanism includes: a plurality of drive components and a controller;

[0064] A plurality of driving components are respectively disposed in the housing 1 and are used to drive a plurality of adjustment positions of the magnet component to move along a first direction one by one; wherein the first direction is a normal direction of the magnet component;

[0065] The controller is communicatively connected to the plurality of drive components and is used to control the operation of the plurality of drive components one by one.

[0066] It should be noted that if Figure 5 As shown, the magnet assembly can be close to the bottom wall of the shell 1 in the shell 1, and is also distributed along the length direction of the shell 1. The top of the magnet assembly can be preset with multiple adjustment positions (adjustment points) along the length direction, and the number of adjustment positions can be determined according to the length of the magnetic steel or customer needs, and the multiple adjustment positions are not necessarily evenly distributed along the length direction of the magnet assembly; wherein, Figure 5 and Fig.10 As shown, the magnet assembly includes: a yoke 17 and a magnet 18, the magnet 18 is arranged at the bottom of the yoke 17, and the normal direction of the magnet assembly is the normal direction of the yoke 17; of course, the magnet assembly can adopt a segmented structure;

[0067] A plurality of drive components are arranged along the second direction in the shell 1, and are distributed one-to-one with the plurality of adjustment positions of the magnet component, and are used to drive (drive) the plurality of adjustment positions of the magnet component to move along the first direction (such as up and down); wherein the second direction is parallel to the length direction of the magnet component; of course, the drive component is also equivalent to the adjustment component, and each drive component can be communicated with the controller outside the magnet through a lead wire, so that the controller can control the operation of the plurality of drive components one by one, so that the plurality of drive components can be externally controlled. In this way, after the magnet is loaded into the magnetron sputtering coating equipment, it can be driven by the controller to control the corresponding drive component to drive the corresponding adjustment position of the magnet component to perform corresponding movement (such as up or down) according to demand or feedback from the magnetron sputtering coating process, so as to adjust the magnetic field position of the adjustment position of the magnet component, thereby realizing online adjustment of the magnet, and making the magnet adjustable online at any time without breaking the vacuum, which can greatly save debugging time, improve efficiency and save costs. Of course, multiple driving components are sealed in the housing 1, and the online adjustable magnetic steel can be installed in the rotating target; wherein, the controller can be a single chip microcomputer or a PLC.

[0068] That is to say, the online adjustable magnet provided by the present invention has multiple drive components in the magnet housing, which are used to drive the multiple adjustment positions of the magnet assembly to move in a specific direction one by one, so as to achieve one-to-one adjustment of the magnetic field positions of the multiple adjustment positions of the magnet assembly, and the multiple drive components are also communicated with an external controller so as to control the operation of the multiple drive components one by one outside the magnet. This can help to achieve online adjustment of the magnet, and make the magnet adjustable at any time without breaking the vacuum, which greatly saves debugging time, improves efficiency and saves costs.

[0069] In this scheme, if Figure 5 As shown, the first shell wall 1.1 between the two ends of the shell 1 is a flat wall structure. Figure 6As shown, the first shell wall 1.1 is provided with a plurality of openings along the length direction of the shell 1, and the openings correspond to the plurality of adjustment positions of the magnet assembly one by one;

[0070] like Figure 5 As shown, a plurality of driving components are disposed one by one in a plurality of openings of the first shell wall 1.1, and the driving ends thereof are all capable of moving along the first direction and are connected one by one with a plurality of adjustment positions of the magnet component;

[0071] like Figure 5 As shown, the online adjustable magnetic steel also includes a plurality of sealing covers 2;

[0072] The plurality of sealing covers 2 are installed one by one outside the plurality of openings of the first shell wall 1.1.

[0073] It should be noted that if Figure 5 As shown, the first shell wall 1.1 of the shell 1 can be the top wall of the shell 1, and the magnet assembly can be close to the bottom wall of the shell 1. The first shell wall 1.1 of the shell 1 is a flat wall structure, which can facilitate the installation of multiple drive assemblies one by one on the inner end surfaces of multiple openings of the first shell wall 1.1 of the shell 1; wherein the shell 1 of the magnetic steel can be made of metal sealing materials such as stainless steel and aluminum; of course, the multiple openings of the first shell wall 1.1 of the shell 1 need to correspond one by one to the multiple adjustment positions of the magnet assembly, and the opening of the first shell wall 1.1 of the shell 1 is equivalent to the assembly port; the driving ends of the multiple drive assemblies are connected one by one to the multiple adjustment positions of the magnet assembly, so as to drive the multiple adjustment positions of the magnet assembly to move along the first direction one by one; as shown Figure 5 As shown, multiple sealing covers 2 are sealed and installed one by one on the outer end faces of multiple openings of the first shell wall 1.1 to ensure the sealing of the shell 1, and also cover multiple drive components one by one. In other words, the above scheme is designed in this way, so that multiple drive components are arranged in the shell 1, and they are also corresponding to and connected with multiple adjustment positions of the magnet assembly one by one, so as to facilitate the adjustment of multiple adjustment positions of the magnet assembly.

[0074] Specifically, Figure 8 and Fig. 9 As shown, each drive assembly includes: a housing 3, a lead screw assembly, a transmission assembly and a motor assembly;

[0075] The housing 3 is arranged in the opening of the first housing wall 1.1;

[0076] The lead screw assembly is arranged in the housing 3; wherein, Fig.11 As shown, the nut 4 of the screw assembly is rotatable, and can drive its screw 5 to move along a first direction when rotating, and the first end of the screw 5 away from the opening serves as a driving end;

[0077] like Fig. 9 As shown, the motor assembly is arranged outside the housing 3, and its output end is located inside the housing 3 and drives the nut 4 to rotate through the transmission assembly;

[0078] The controller is in communication connection with the motor assembly and is used to control the operation of the motor assembly.

[0079] It should be noted that if Figure 4 As shown, the housing 3 can be arranged in the opening of the first housing wall 1.1 through the fixing plate 15; Figure 6 As shown, the fixing plate 15 can be arranged on the outer end surface of the opening of the first shell wall 1.1, and the housing 3 can be arranged at the bottom of the fixing plate 15; the housing 3 has an inner cavity structure, such as Fig. 9 As shown, the screw assembly is installed in the inner cavity of the housing 3; wherein, as Fig.11 As shown, the screw assembly includes: a nut 4, a screw 5, a bearing and a holder 19; the nut 4 is installed in the housing 3 through the bearing, and the bearing can realize axial limitation of the nut 4, so that the nut 4 can only rotate, the middle part of the screw 5 is assembled with the nut 4, and its first end (such as the lower end) can be connected to the adjustment position of the magnet assembly through the holder 19; of course, the screw assembly is also provided with a rotation-stopping assembly for the screw 5, so that the screw 5 can only move (such as lifting and lowering); in this way, the nut 4 of the screw assembly can rotate, and can drive the screw 5 to move when rotating; as shown in FIG. Fig. 9 As shown, the motor assembly can be arranged on the outer wall of the housing 3, and its output end extends into the housing 3 and drives the nut 4 of the screw assembly to rotate through the transmission assembly, thereby driving the screw 5 of the screw assembly to move, and also driving the adjustment position of the magnet assembly to move accordingly, thereby realizing the adjustment of the magnetic field position of the adjustment position of the magnet assembly; of course, the controller is used to control the operation of the motor assembly, such as controlling the forward and reverse rotation of the motor assembly, thereby driving the screw 5 of the screw assembly to move up and down; wherein, as Fig. 9 As shown, the motor assembly may include: a motor 13 and a reducer 14; wherein, since the space of the magnetic steel shell is small and the size of the motor 13 is limited, a reducer 14 is provided to increase the output torque of the motor 13, and the output end of the motor 13 is transmission-connected to the input end of the reducer 14, and the output end of the reducer 14 serves as the output end of the motor assembly, and the controller is mainly used to control the operation of the motor 13, and the reducer 14 can be arranged on the outer wall of the casing 3.

[0080] That is to say, each drive assembly is a lead screw assembly driven by its own motor, which not only makes the adjustment of each adjustment position of the magnet assembly more independent and reliable, but also facilitates the controller to control each drive assembly. Of course, this solution can also use other drive assemblies, such as cylinder assemblies, hydraulic rod assemblies, etc., which will not be repeated here.

[0081] Furthermore, if Fig.11 As shown, the transmission assembly includes: a first bevel gear 6 and a second bevel gear 7;

[0082] The first bevel gear 6 is sleeved on the output end of the motor assembly;

[0083] The second bevel gear 7 is sleeved on the nut 4 and is used to mesh with the first bevel gear 6 .

[0084] It should be noted that if Figure 4 As shown, the first bevel gear 6 can be sleeved and fixed on the end of the output end of the motor assembly; wherein, Fig.11 As shown, the first bevel gear 6 can be sleeved and fixed on the end of the output end of the reducer 14; the second bevel gear 7 can be sleeved and fixed on the upper end of the nut 4, and the upper part of the second bevel gear 7 can be mounted in the fixing plate 15 through the first bearing 32, and the lower end of the nut 4 can be mounted in the casing 3 through the second bearing 33, and the fixing plate 15 is provided with an end surface for limiting the upper end surface of the first bearing 32, and the casing 3 is provided with an end surface for limiting the lower end surface of the second bearing 33, so as to realize axial limitation of the nut 4, that is, the nut 4 can only move.

[0085] That is to say, the transmission assembly between the output end of the motor assembly and the nut 4 of the screw assembly is a bevel gear assembly, and the output end of the motor assembly is perpendicular to the nut 4 of the screw assembly, so that the transmission between the output end of the motor assembly and the nut 4 of the screw assembly can be smoother and more reliable, and this transmission method can also make the drive assembly adaptable and arranged in the narrow space of the magnetic steel shell.

[0086] Furthermore, if Fig.12 As shown, the driving assembly further includes: a fixed block 8 and a stop rod 9;

[0087] The fixing block 8 is arranged outside the opening of the first shell wall 1.1. Fig.12 As shown, the fixed block 8 is provided with a through slot 8.1 and two slide slots 8.2 along the length direction of the lead screw 5, and the two slide slots 8.2 are located on both sides of the through slot 8.1 and are connected to the through slot 8.1;

[0088] like Figure 4 As shown, the sealing cover 2 can cover the fixing block 8;

[0089] like Fig.12 As shown, the second end of the lead screw 5 passes through the through slot 8.1 of the fixing block 8;

[0090] The anti-rotation rod 9 vertically penetrates the second end of the lead screw 5, and its two ends are located in the two slide grooves 8.2 of the fixed block 8 one by one, and can slide along the slide groove 8.1.

[0091] It should be noted that, as described above, the drive assembly further includes a fixing plate 15; Figure 4 As shown, the fixing block 8 is disposed on the top of the fixing plate 15 and is located above the nut 4; Fig.12As shown, the fixed block 8 is actually provided with a through slot 8.1 and two slide slots 8.2 located on both sides of the through slot 8.1 along the first direction (such as the vertical direction); the second end (such as the upper end) of the screw 5 passes through the through slot 8.1 of the fixed block 8, and the anti-rotation rod 9 vertically passes through the part of the second end of the screw 5 located in the through slot 8.1, and its two ends are located in the two slide slots 8.2 of the fixed block 8 one by one, and can slide along the slide slot 8.1, and at the same time, each end of the anti-rotation rod 9 contacts the side wall of the slide slot 8.2 to prevent the two ends of the anti-rotation rod 9 from shaking during the sliding process. Of course, this contact cannot affect the normal up and down sliding of the anti-rotation rod 9, and when the screw 5 is in the maximum ascending stroke, the anti-rotation rod 9 will not be exposed outside the through slot 8.1, and the fixed block 8 and the anti-rotation rod 9 are the anti-rotation components mentioned above. In other words, the present scheme is designed in this way to stop the screw 5 from rotating so that it can only move, and this anti-rotation method has a simple and convenient structure.

[0092] In this solution, the adjustment mechanism also includes a plurality of position detection components;

[0093] Multiple position detection components are respectively arranged in the housing 1, and are used to detect the positions of the first ends of the multiple lead screws 5 one by one; wherein, the multiple position detection components are also respectively connected to the controller for communication. In this way, the specific position of the driving end of each driving component can be known externally, and the adjustment position of the magnet component can be accurately adjusted according to the situation; of course, the position detection component can also detect the displacement of the first end of the lead screw 5, and feedback can be provided on the adjustment amount of the adjustment position of the magnet component.

[0094] Specifically, Fig.11 As shown, the position detection component includes: a lamp bead 10, a grating 11 and a bracket 12;

[0095] The lamp bead 10 is arranged at the first end of the lead screw 5;

[0096] The grating 11 is disposed outside the housing 3 through a bracket 12 and is distributed opposite to the lamp beads 10 ; wherein the grating 11 is communicatively connected with the controller.

[0097] It should be noted that the lamp bead 10 can be arranged at the lower end of the screw 5 and can move with the screw 5, and can also be located in the casing 3; the grating 11 can be arranged on the outside of the casing 3 through the bracket 12, and is distributed relative to the lamp bead 10, and to ensure that the light of the lamp bead 10 can irradiate the grating 11, the part of the casing 3 located between the lamp bead 10 and the grating 11 is a hollow structure, that is, an open structure, and the grating 11 is communicatively connected with the controller to facilitate the feedback of detection data to the controller; wherein, the lamp bead 10 emits light, and the grating 11 receives light, and the position of the lamp bead 10 is identified by the intensity of the light wave peak absorbed by the grating 11; of course, the displacement of the screw 5 can also be detected by the position detection component, and this position detection method is simple and reliable; in addition, the grating 16 can also be replaced by a magnetic grating positioning sensor.

[0098] Further, as described above, each motor assembly includes a motor 13;

[0099] Each motor 13 is equipped with a control circuit board for controlling the operation of the motor 13, and the control circuit board of each motor 13 has a separate address;

[0100] The controller is communicatively connected to the control circuit board of each motor 13 , and can identify the corresponding motor 13 according to the address of the control circuit board, and send a control command to the control circuit board of the corresponding motor 13 to control the operation of the corresponding motor 13 .

[0101] It should be noted that each motor 13 of the driving component is equipped with a control circuit board, which is responsible for receiving and processing external signals, and then controlling the motor 13 to perform corresponding actions, such as controlling the forward and reverse rotation of the motor 13, and each control circuit board has a separate address (IP), and the control circuit board is communicated with the controller through a lead wire; wherein, when a certain adjustment position of the magnet assembly needs to be adjusted, the controller can identify the corresponding motor 13 according to the address of each control circuit board, and then send a control command to the control circuit board of the corresponding motor 13, and then control the corresponding motor 13 to drive the lead screw 5 to drive the corresponding adjustment position of the magnet assembly to make corresponding movements, so that specified adjustments can be achieved for several adjustment positions of the magnet assembly, which makes the adjustment of the adjustment position of the magnet assembly more targeted.

[0102] In addition, multiple drive components can be connected to the outside through four cables; among them, there are two power lines and two signal lines in the four cables. The motors 13 of the multiple drive components are electrically connected to the external power supply through the two power lines, which is convenient for powering the motors 13 of the multiple drive components. The control circuit boards of the multiple motors 13 are connected in series in sequence through two signal lines to form a motor configuration network, and the controller is then communicated with the motor configuration network, so that the controller can first identify the corresponding motor 13 according to the address of the control circuit board, and then transmit the control command to the control circuit board of the corresponding motor 13; of course, the controller can also receive external control signals, and transmit them to the control circuit board of the corresponding motor 13 after processing, so as to control the drive component; and the controller can be wirelessly controlled (Bluetooth or Wi-Fi) or wired controlled through a computer or mobile phone.

[0103] Furthermore, the control circuit board of each motor 13 is also equipped with a temperature sensor and / or a humidity sensor, and is used to communicate with the control center of the magnetron sputtering coating device. Among them, the control circuit board of each motor 13 can be equipped with a temperature sensor and a humidity sensor, so that if the temperature of a certain driving component exceeds the standard, it can be fed back to the control center of the magnetron sputtering coating device to remind the user to check the cooling water system of the magnetron sputtering coating device; if the humidity of a certain driving component exceeds the standard, it can be fed back to the control center of the magnetron sputtering coating device to remind the user to check the sealing system of the magnetic steel, so as to better ensure the normal operation of the magnetron sputtering coating device.

[0104] In addition, the above-mentioned controller can be equipped with a control interface, wherein the control interface of the controller can display the position, temperature and humidity, and adjustment range of each driving component, and the user only needs to input the adjustment position or adjustment amount to adjust the magnetic steel.

[0105] In another embodiment of the adjustment mechanism of the present invention, as described above, the driving ends of the plurality of driving assemblies are all capable of moving in the first direction and are connected one by one with the plurality of adjustment positions of the magnet assembly. On this basis, the present invention can also drive the driving ends of the plurality of driving assemblies to move together through a driving mechanism. Of course, these driving assemblies do not have a driving part, as described below for details:

[0106] The regulating mechanism also includes: a driving mechanism and a plurality of clutch components;

[0107] The driving mechanism is disposed in the housing 1 along the second direction and is located on one side of the plurality of driving components;

[0108] A plurality of clutch components are arranged in the housing 1, and are used to cause a plurality of drive components to engage with the drive mechanism one by one, and to cause a plurality of drive components to disengage from the drive mechanism one by one; wherein, when a plurality of drive components are engaged with the drive mechanism, the drive mechanism can drive the drive ends of the plurality of drive components to move along a first direction together.

[0109] It should be noted that the driving assembly can be a first screw assembly driven by a motor, and the first screw 23 of the first screw assembly can only move, and one end (such as the lower end) of the first screw 23 can be used as a driving end and connected to the corresponding adjustment position of the magnet assembly;

[0110] The driving mechanism is actually distributed along the length direction of the housing 1 and can be located on the same side of multiple driving components, and in normal state, multiple driving components are disengaged from the driving mechanism;

[0111] Multiple clutch components correspond to multiple drive components one by one, and are used to cause the corresponding drive components to engage with the drive mechanism, and to cause the drive component to disengage from the drive mechanism. The clutch component is used to cause the drive component and the drive mechanism to achieve clutch; of course, the above-mentioned drive component does not have a drive part; that is, multiple drive components can be engaged with the drive mechanism under the action of the corresponding clutch component, and then the drive ends of the multiple drive components can be driven together by the drive mechanism to make corresponding movements, and the multiple drive components can be driven together to drive the multiple adjustment positions of the magnet component to be adjusted one by one; in this way, it can be avoided that multiple drive components are all provided with a drive part, but a drive mechanism is used to drive the drive ends of multiple drive components to make corresponding movements (such as lifting movements), which simplifies the internal structure of the online adjustable magnetic steel to a certain extent, and also facilitates the adjustment mechanism to better adapt to the installation in the narrow space of the magnetic steel shell. Of course, multiple clutch components and driving mechanisms can be connected to the external controller for communication via lead cables, and the operation of the driving mechanism and multiple clutch components can be controlled by the controller, so that multiple clutch components and can be externally controlled, and specific driving components among the multiple driving components can be engaged, while the remaining driving components can be disengaged, so as to more specifically adjust the partial adjustment position of the magnet component, that is, each adjustment position of the magnet component can be individually adjusted.

[0112] Specifically, the driving mechanism includes: a first motor assembly and a rotating shaft assembly;

[0113] like Fig.16 As shown, the shaft assembly is arranged in the housing 1 along the second direction, and a plurality of third bevel gears 22 are sleeved thereon;

[0114] like Fig.15 As shown, the output end of the first motor assembly is drivingly connected to one end of the rotating shaft assembly;

[0115] like Fig.16 As shown, each driving assembly includes a first screw assembly, and the end of the first screw 23 away from the opening (such as the lower end) serves as the driving end, and the first nut 24 is sleeved with a fourth bevel gear 25 and can slide along the axial direction of the first nut 24;

[0116] The plurality of clutch assemblies are used to cause the plurality of fourth bevel gears 25 to slide to mesh with the plurality of third bevel gears 22 one by one, and to cause the plurality of fourth bevel gears 25 to disengage from the plurality of third bevel gears 22 one by one.

[0117] It should be noted that if Figures 13 to 16 As shown, the first motor assembly includes: a rotating shaft 31, a first drive motor 30 and a plurality of third bevel gears 22; wherein the rotating shaft 31 is rotatably arranged in the housing 1 along the second direction. In view of the large span of the rotating shaft 31 in the housing 1, the rotating support can be realized by a plurality of third bearings 34; the first drive motor 30 is arranged at one side of the housing 1, and its output end is transmission-connected with one end of the rotating shaft 31; of course, due to the small space of the magnetic steel housing and the limited size of the motor, a micro reduction motor can be equipped to increase the output torque; the plurality of third bevel gears 22 are respectively sleeved on the rotating shaft 31, and correspond one by one to the fourth bevel gears 25 of the plurality of first lead screw assemblies;

[0118] The structure of each first screw assembly is as follows Fig.16 As shown, it includes: a first lead screw 23, a first nut 24, a fourth bevel gear 25 and a first holder 35; the driving assembly may also include a support 36; wherein the support 36 is fixed in the housing 1, one end of the first nut 24 is rotatably arranged on the support 36, and the axial direction of the first nut 24 is limited, the fourth bevel gear 25 is sleeved on the middle part of the first nut 24, and can slide along the middle part of the first nut 24, the first lead screw 23 is installed in the first nut 24, and its lower end is connected to the adjustment position corresponding to the magnet assembly through the first holder 35, that is, the first holder 3 5 is arranged at the adjustment position of the yoke 17, and the lower end of the first lead screw 23 is clamped in the first clamping seat 35 to prevent the first lead screw 23 from rotating, that is, by driving the first nut 24 to rotate, the first lead screw 23 is driven to move up and down, and then the adjustment position corresponding to the magnet assembly is driven to move up and down, that is, the magnetic field position of the adjustment position of the magnet assembly can be adjusted up and down; of course, the outer wall of the middle part of the first nut 24 is provided with a limiting structure for cooperating with the bottom end of the fourth bevel gear 25 to limit the downward movement of the fourth bevel gear 25, and the limiting structure can be a limiting step end face;

[0119] Each pair of fourth bevel gear 25 and third bevel gear 22 is equipped with a clutch assembly, which causes the fourth bevel gear 25 to slide (for example, slide up) to engage with the corresponding third bevel gear 22 through the clutch assembly, so as to receive the transmission of the third bevel gear 22, thereby driving the first nut 24 to rotate, thereby causing the first lead screw 23 to move up and down; the clutch assembly is also used to cause the fourth bevel gear 25 to disconnect from the corresponding third bevel gear 22, that is, to cause the fourth bevel gear 25 to disengage from the third bevel gear 22, thereby causing the first lead screw assembly to disengage.

[0120] That is to say, the online adjustable magnetic steel can be an online adjustable magnetic steel driven by a single motor; wherein, the rotating shaft 31 is driven by a single motor to rotate, and a plurality of third bevel gears 22 are provided on the rotating shaft 31, so that the third bevel gear 22 drives the fourth bevel gear 25 meshing therewith to rotate, and the fourth bevel gear 25 then drives the first nut 24 to rotate. Since the axial direction of the first nut 24 is limited, the first lead screw 23 is stopped from rotating, so that the first lead screw 23 can move up and down, that is, it can drive the adjustment position of the magnet assembly to realize the lifting movement, so that the magnetic field position of the adjustment position of the magnet assembly can be realized. Up and down adjustment; in this way, there is no need to equip each first screw assembly with a drive motor, but it is driven together by a drive motor at the end and a rotating shaft assembly (including a rotating shaft and multiple third bevel gears), which can simplify the structure of the online adjustable magnetic steel and greatly reduce the cost; of course, the drive mechanism adopts a drive shaft assembly, and the transmission part of the drive mechanism and the drive assembly adopts a bevel gear set, which not only facilitates the connection and disengagement of the drive mechanism and the drive assembly, but also facilitates the drive mechanism and multiple drive assemblies to be better adapted and installed in the narrow space of the magnetic steel shell.

[0121] Further, as mentioned above, Fig.16 As shown, each drive assembly further includes a support 36, and the first lead screw assembly is disposed on the support 36;

[0122] The clutch assembly includes: a push assembly and a compression spring assembly;

[0123] like Fig.16 As shown, the pushing assembly is disposed on the support 36 and is used to push the fourth bevel gear 25 to slide to engage with the third bevel gear 22;

[0124] The compression spring assembly is sleeved on the first nut 24 and is used to provide elastic restoring force for the sliding of the fourth bevel gear 25 so as to disconnect the fourth bevel gear 25 from the meshing with the third bevel gear 22 .

[0125] It should be noted that the online adjustable magnetic steel also includes a frame 16, the structure of which can be referred to Figure 7 As shown; wherein the skeleton 16 is disposed in the housing 1 and is used to enhance the structural strength of the housing 1; as Figure 7As shown, the frame 16 is provided with mounting positions for all driving components, that is, the driving components can be installed at the corresponding mounting positions of the frame 16; of course, the frame 16 also has the same in the above-mentioned multi-motor drive embodiment, that is, multiple driving components can be installed one by one at multiple mounting positions of the frame 16; the support 36 can be fixed in the corresponding mounting position of the frame 16; in addition, as Figure 5 As shown, the left and right sides of the housing 1 are respectively provided with a first housing 32 and a second housing 33, and both the first housing 32 and the second housing 33 have cavities, which are used as water channels for dissipating heat from the magnetic steel;

[0126] The pushing assembly can be arranged on the support 36 along the first direction, and is used to push the bottom end of the fourth bevel gear 25, so that the fourth bevel gear 25 slides upward to engage with the third bevel gear 22; of course, if Fig.16 As shown, the push assembly can also be arranged on the support 36 along the second direction, and is used to use the inclined surface to push the bottom end of the fourth bevel gear 25, so that the fourth bevel gear 25 slides upward to engage with the third bevel gear 22, so that the push assembly can be adapted to be installed in the narrow space of the magnetic steel housing, and details can be seen in the following description; of course, as mentioned above, the push assembly can be connected to the external controller through a wire, so that the push assembly can be externally controlled;

[0127] like Fig.16 As shown, the outer peripheral wall of the upper end of the first nut 24 may be provided with an annular limiting step, and the compression spring assembly is sleeved on the middle part of the first nut 24 and may abut between the limiting step of the first nut 24 and the upper end surface of the fourth bevel gear 25 to provide elastic restoring force for the sliding of the fourth bevel gear 25; wherein, as Fig.16 As shown, the compression spring assembly can use a single compression spring 29; of course, after the push assembly is withdrawn, the fourth bevel gear 25 can be pressed down by itself to break the meshing with the third bevel gear 22 without contact or interference based on the elastic restoring force of the compression spring assembly, so that the fourth bevel gear 25 is automatically disengaged. At this time, when the rotating shaft 31 rotates, the fourth bevel gear 25 is in idle rotation, that is, the first screw assembly is not driven, and the adjustment position of the magnet assembly is not adjusted. In other words, the clutch assembly adopts a push + rebound clutch mode, which can make the meshing and disengagement of the fourth bevel gear 25 and the third bevel gear 22 more convenient and reliable.

[0128] Furthermore, if Fig.16 As shown, the push assembly includes: an electromagnet 27 and a push block 28;

[0129] The push block 28 is provided with a push inclined surface 28.1, and is used to adapt to the outer cone surface 25.1 of the tooth portion of the fourth bevel gear 25;

[0130] The electromagnet 27 is disposed on the support 36 , and the end of the push rod of the electromagnet 27 is connected to the push block 28 , and the movement direction of the push rod of the electromagnet 27 is perpendicular to the sliding direction of the fourth bevel gear 25 .

[0131] It should be noted that the structure of the push block 28 can be referred to Fig.19 and Fig. 20 As shown, Fig.18 As shown, when the fourth bevel gear 22 is disengaged from the third bevel gear 22, the pushing inclined surface 28.1 of the pushing block 28 is in close contact with the outer conical surface 25.1 of the tooth portion of the fourth bevel gear 25. If the fourth bevel gear 25 needs to mesh with the third bevel gear 22, the electromagnet 27 is energized to push its push rod out, driving the pushing block 28 to translate (for example, move right) to push the fourth bevel gear 25 to slide upward to mesh with the third bevel gear 22 (for example, Fig.17 As shown), the fourth bevel gear 25 is fixed at this position, and the moving direction of the push rod of the electromagnet 27 is perpendicular to the sliding direction of the fourth bevel gear 25, as described above, so that the push assembly is installed in the narrow space of the magnetic steel housing; of course, when the electromagnet 27 is powered off, its push rod retracts, which also drives the push block 28 to translate back, and at this time the fourth bevel gear 25 can be disconnected from the meshing with the third bevel gear 22 based on the action of the compression spring assembly; of course, the electromagnet 27 can be connected to an external controller through a lead wire, so that the electromagnet 27 can be externally controlled; wherein, as Fig.17 As shown, when the pushing block 28 pushes the fourth bevel gear 25 into place, the fourth bevel gear 25 is meshed with the third bevel gear 22, and the upper end surface of the pushing block 28 is in contact with the lower end surface of the fourth bevel gear 25; of course, this solution can also use other pushing bodies, such as a cylinder.

[0132] That is to say, the pushing body of the pushing assembly is an electromagnet, which can make the fourth bevel gear 25 mesh with the third bevel gear 22 when energized, and then transmit the power of the driving mechanism to the first screw assembly to drive the first screw 23 to move up and down; when the electromagnet is powered off, the fourth bevel gear 25 is disconnected from the third bevel gear 22 based on the force of the compression spring 29, and the self-locking function of the first screw assembly (that is, the ball screw nut assembly) structure is utilized to keep the fourth bevel gear 25 in this position. In this way, it is more convenient to control the engagement and disconnection of the fourth bevel gear 25 with the third bevel gear 22.

[0133] Among them, Fig.18As shown, when the electromagnet 27 is powered off, due to the effect of magnetic force, the push rod magnetic plate of the electromagnet 27 is sucked to the left, and the spring thereon is tightened, thereby driving the push block 28 to move to the left. At this time, since the compression spring 29 on the first nut 24 needs to be reset and extended, the fourth bevel gear 25 can be pressed down, so that the fourth bevel gear 25 is disengaged from the third bevel gear 22 and does not contact or interfere with each other, and is fixed in this position. At this time, the rotating shaft 31 rotates the fourth bevel gear 25 to idle, that is, the first screw assembly is not driven.

[0134] In addition, since the driving ends of all driving components can be driven to move up and down at the same time through the rotating shaft 31, and an electromagnet is added to each driving component, the push block 28 drives the fourth bevel gear 25 to move up and down and slide, and engage and disengage with the third bevel gear 22 on the rotating shaft 31, so that any adjustment position of the designated adjustment magnet component can be achieved, and the effect of controlling the magnetic field position of the adjustment position can be achieved. Of course, the controller can be used to control the operation of each electromagnet 27 and the first drive motor 30, so that any adjustment position of the designated adjustment magnet component can be achieved, and the effect of controlling the magnetic field position of the adjustment position can be achieved.

[0135] The embodiment of the present invention further provides a magnetron sputtering coating device, including a magnetic steel, wherein the magnetic steel is the online adjustable magnetic steel as described above. Since the present solution adopts the online adjustable magnetic steel as described above, it also has corresponding beneficial effects, and the details can be referred to the above description, which will not be repeated here.

[0136] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0137] The above description of the disclosed embodiments enables one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An online adjustable magnetic steel, applied to magnetron sputtering coating equipment, characterized in that: include: Shell (1), magnet assembly, adjustment mechanism; The magnet assembly is arranged in the housing (1) and has a plurality of adjustment positions preset along its length direction; The regulating mechanism comprises: a plurality of driving components and a controller; The plurality of driving components are respectively arranged in the housing (1) and are used to drive the plurality of adjustment positions of the magnet component to move one by one along a first direction; wherein the first direction is the normal direction of the magnet component; The controller is communicatively connected to the plurality of driving components and is used to control the operation of the plurality of driving components one by one.

2. The online adjustable magnetic steel according to claim 1, characterized in that: The first shell wall (1.1) between the two ends of the shell (1) is a flat wall structure, and the first shell wall (1.1) is provided with a plurality of openings along the length direction of the shell (1), and the openings correspond one by one to the plurality of adjustment positions of the magnet assembly; The plurality of drive assemblies are arranged one by one in the plurality of openings of the first shell wall (1.1), and the drive ends thereof are all capable of moving along the first direction and are connected one by one with the plurality of adjustment positions of the magnet assembly; The online adjustable magnetic steel further comprises a plurality of sealing covers (2); The plurality of sealing covers (2) are installed one by one outside the plurality of openings of the first shell wall (1.1).

3. The online adjustable magnetic steel according to claim 2, characterized in that: Each of the driving components comprises: a housing (3), a lead screw component, a transmission component and a motor component; The housing (3) is arranged in the opening of the first housing wall (1.1); The screw assembly is arranged in the housing (3); wherein the nut (4) of the screw assembly is rotatable and can drive the screw (5) to move along the first direction when rotating, and the first end of the screw (5) away from the opening serves as the driving end; The motor assembly is arranged outside the housing (3), and its output end is located inside the housing (3) and drives the nut (4) to rotate through the transmission assembly; The controller is communicatively connected to the motor assembly and is used to control the operation of the motor assembly.

4. The online adjustable magnetic steel according to claim 3, characterized in that: The transmission assembly comprises: a first bevel gear (6) and a second bevel gear (7); The first bevel gear (6) is sleeved on the output end of the motor assembly; The second bevel gear (7) is sleeved on the nut (4) and is used to mesh with the first bevel gear (6).

5. The online adjustable magnetic steel according to claim 3, characterized in that: The driving assembly further comprises: a fixing block (8) and a rotation-stopping rod (9); The fixed block (8) is arranged outside the opening of the first shell wall (1.1), and is provided with a through groove (8.1) and two slide grooves (8.2) along the length direction of the lead screw (5), and the two slide grooves (8.2) are located on both sides of the through groove (8.1) and are connected to the through groove (8.1); The sealing cover (2) is capable of sealing the fixing block (8); The second end of the lead screw (5) passes through the through slot (8.1) of the fixing block (8); The anti-rotation rod (9) vertically penetrates the second end of the lead screw (5), and its two ends are located in two slide grooves (8.2) of the fixed block (8) one by one, and can slide along the slide grooves (8.1) where they are located.

6. The online adjustable magnetic steel according to claim 3, characterized in that: The adjustment mechanism also includes a plurality of position detection components; A plurality of position detection components are respectively arranged in the housing (1) and are used to detect the positions of the first ends of the plurality of lead screws (5) one by one; wherein the plurality of position detection components are also respectively connected to the controller for communication.

7. The online adjustable magnetic steel according to claim 6, characterized in that: The position detection component comprises: a lamp bead (10), a grating (11) and a bracket (12); The lamp bead (10) is arranged at the first end of the lead screw (5); The grating (11) is arranged outside the housing (3) through the bracket (12) and is distributed relative to the lamp bead (10); wherein the grating (11) is communicatively connected with the controller.

8. The online adjustable magnetic steel according to claim 3, characterized in that: Each of the motor assemblies comprises a motor (13); Each of the motors (13) is equipped with a control circuit board for controlling the operation of the motor (13), and each of the control circuit boards of the motors (13) has a separate address; The controller is communicatively connected to the control circuit board of each of the motors (13), and is capable of identifying the corresponding motor (13) according to the address of the control circuit board, and sending a control command to the control circuit board of the corresponding motor (13) for controlling the operation of the corresponding motor (13).

9. The online adjustable magnetic steel according to claim 8, characterized in that: The control circuit board of each motor (13) is also equipped with a temperature sensor and / or a humidity sensor, and is used for communication connection with the control center of the magnetron sputtering coating equipment.

10. A magnetron sputtering coating device, comprising a magnetic steel, characterized in that: The magnetic steel is an online adjustable magnetic steel as described in any one of claims 1-9.

Images