Cavity lifting system for mounting visual cover plate and semiconductor process equipment

Abstract

The invention discloses a cavity lifting system for mounting a visual cover plate and semiconductor process equipment. The cavity lifting system used for installing the visual cover plate comprises an upper cover and a lifting driving system used for lifting the upper cover. The lifting driving system comprises a plurality of guide columns and a plurality of lifting mechanisms; the lower end of each guide column is installed on the outer side of the cavity, and the upper end of each guide column penetrates through an outer side guide structure of the upper cover to be coaxially connected with one lifting mechanism. At least one of the plurality of guide columns is a detachable guide column, and the detachable guide column allows a space for installing a visual cover plate to be created between the upper cover and the cavity after the upper cover is lifted upwards. The use safety of the visual cover plate is ensured by installing a safety tool and double safety interlocking; after the visual cover plate is installed, the interior of the cavity can be vacuumized, a wafer transfer conveying test is carried out, and the debugging precision and efficiency of wafer transfer are greatly improved.

Description

Technical Field

[0001] The invention relates to semiconductor process equipment, in particular to a cavity lifting system for installing a visualization cover plate. Background Art

[0002] In the prior art, the reaction chamber cover components in high-capacity semiconductor process equipment such as CVD equipment are subject to many limitations such as heavy weight, center of gravity offset caused by many components, and hexagonal geometry. The lifting and lowering of the reaction chamber cover components is achieved through a fixed lifting system. After the cover is raised, the tooling needs to be installed between the chamber and the cover to play the role of a safety hard limit to avoid the safety hazard of the upper cover accidentally falling. In the event of failure of all mechanical safety structures, the effective safety space between the chamber and the cover can still be guaranteed to avoid safety accidents such as squeezing and smashing.

[0003] However, a common problem in the above lifting system is that it is impossible to install a visual wafer transfer tooling cover due to the fixed lifting mechanism and geometric structure. Therefore, during the debugging and maintenance process, it is impossible to observe and adjust the wafer transfer effect under the vacuum state in the cavity. The transmission accuracy and stability of the wafer in the cavity can only be inferred by observing the position of the wafer in and out. The wafer transfer in the cavity becomes a blind box operation, which cannot effectively guarantee the spatial accuracy and consistency of wafer transfer.

[0004] In addition, there is another problem. The currently used lifting safety tooling does not have an intelligent signal linkage function. When the tooling is not removed, there is a situation where personnel mistakenly lower the upper cover, causing the lifting system to get stuck and components to be damaged. This increases the risk of equipment damage and reduces the utilization rate of equipment production, affecting equipment production capacity. Summary of the invention

[0005] In order to overcome the defects of the prior art, the present invention provides a cavity lifting system and semiconductor process equipment for installing a visualization cover.

[0006] The cavity lifting system for installing a visualization cover provided by the present invention comprises a cavity, an upper cover and a lifting drive system.

[0007] The lifting drive system includes a plurality of guide pillars and a plurality of lifting mechanisms; the lifting drive system is used to lift the upper cover to separate or close the upper cover from the cavity.

[0008] The multiple lifting mechanisms drive the upper cover to rise and fall.

[0009] The lower end of each guide post of the plurality of guide posts is mounted on the outside of the cavity, and the upper end passes through the outer guide structure of the upper cover and is coaxially connected to one of the lifting mechanisms.

[0010] At least one of the plurality of guide posts is a detachable guide post, and the detachable guide post allows a space for installing the visualization cover plate to be created between the upper cover and the cavity after the upper cover is lifted upward.

[0011] In one embodiment, the detachable guide column is hollow, and the hollow space can accommodate the radial width of the lifting mechanism; the lower end of the detachable guide column is fixed to the fixed block on the outside of the cavity by a radial fastener, and when the visualization cover needs to be installed, the fastener is removed, and the detachable guide column is lifted upward and slides along the lifting mechanism. When the detachable guide column is lifted to the position of the outer guide structure, the lower end of the detachable guide column is fixed to the outer guide structure by the radial fastener.

[0012] In one embodiment, the cavity lifting system for installing the visualization cover plate further comprises a safety tooling, and the safety tooling is arranged on at least two of the guide pillars except the detachable guide pillars.

[0013] In one embodiment, the safety tooling includes: a main body, a hinge, a toggle clamp, a safety lock, a flange, and a detection switch.

[0014] The main body is composed of two semicircular parts, the two semicircular parts are attached to the outer circumference of the guide column, and the lower part of the main body is fixed on the flange.

[0015] The hinge is installed at a joint on one side of the two semicircular parts.

[0016] The toggle clamp is installed at the joint on the other side of the two semicircular parts. After being pressed, the toggle clamp exposes the lock hole of the safety lock and is used for locking the safety lock.

[0017] The detection switch is installed on the outside of the fixed block. The position of the detection switch ensures that the upper cover descends normally without triggering the detection switch, and ensures that the detection switch can be triggered after the safety tooling is installed on the guide column.

[0018] In one embodiment, the upper end of the detection switch is a trigger part; the highest position of the trigger part is higher than the upper surface of the fixed block and lower than the upper surface of the side wall of the cavity, and a height difference is formed between the trigger part and the upper surface of the side wall of the cavity.

[0019] In one embodiment, the cross-section of the flange is a special-shaped structure, which enables the flange to match and position the side wall of the cavity and ensures that the installation surface of the safety tooling is separated from the sealing joint surface of the upper cover.

[0020] In one embodiment, the heterogeneous structure is in the shape of a major arc.

[0021] In one embodiment, after the safety tooling is installed on the guide column, the safety tooling falls to the upper surface of the fixed block by its own weight, so that the flange presses down the detection switch, thereby triggering a prohibition signal. The prohibition signal indicates the presence of the safety tooling, thereby triggering the locking action of the power system of the lifting drive system.

[0022] In one embodiment, the plurality of lifting mechanisms include at least two active lifting mechanisms and at least two driven lifting guide shafts.

[0023] The detachable guide post is one of the guide posts connected to the driven lifting guide shaft.

[0024] The safety tooling is installed on a guide column connected to the active lifting mechanism.

[0025] The present invention also provides a semiconductor process equipment, including the cavity lifting system for installing the visualization cover as described above.

[0026] The present invention has the following technical effects:

[0027] Firstly, by disassembling and moving upward the guide pillar connected to the driven lifting guide shaft, necessary space is provided for the installation of the visualization cover. Meanwhile, the remaining three leads can realize a stable support function to ensure the structural stability of the visualization cover during the disassembly and assembly process. After the visualization cover is disassembled and assembled, the upward guide pillar can quickly return to the initial state connected to the cavity, realizing a more stable and reliable four-point support structure. Subsequently, quartz glass can be used to observe the transfer of the wafer in the chamber under the vacuum state, and the transfer accuracy and repeatability of the wafer can be quickly judged. Rapid adjustment of the wafer transfer process can be realized, maintenance time can be reduced, and equipment utilization efficiency can be improved.

[0028] Secondly, the detection switch of the safety tooling realizes closed-loop detection of the control system, which can effectively monitor the existence status of the installation tooling. By connecting in series with the system safety hard loop, it can achieve the highest level of safety control, effectively avoiding equipment damage caused by human error and significantly increased additional maintenance time.

[0029] Thirdly, the two-in-one design of the quick-disassembly toggle clamp and the safety lock can prevent the power-on operation of the lifting drive system from the installation and construction procedures. Only after the safety lock is released can the permission to unlock the main power of the lifting drive system be disconnected or closed, realizing the second layer of safety protection from the safety procedure. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] The above invention content and the following specific embodiments of the present invention will be better understood when read in conjunction with the accompanying drawings. It should be noted that the accompanying drawings are only examples of the claimed invention. In the accompanying drawings, the same reference numerals represent the same or similar elements.

[0031] Figure 1 A schematic diagram of a cavity lifting system according to an embodiment of the present invention is shown;

[0032] Figure 2 A schematic diagram showing the connection between the lower end of the guide post and the fixing block according to an embodiment of the present invention is shown;

[0033] Figure 3 A schematic diagram showing the installation of a visualization cover according to an embodiment of the present invention is shown;

[0034] Figure 4A A front schematic diagram of a safety workwear according to an embodiment of the present invention is shown;

[0035] Figure 4B A schematic diagram of the back side of a safety workwear according to an embodiment of the present invention is shown;

[0036] Figure 5 A schematic diagram showing the installation position of a detection switch of a safety tooling according to an embodiment of the present invention;

[0037] Figure 6 A top view of a safety tool according to an embodiment of the present invention is shown. DETAILED DESCRIPTION

[0038] The detailed features and advantages of the present invention are described in detail in the specific embodiments below, and the content is sufficient to enable any person skilled in the art to understand the technical content of the present invention and implement it accordingly, and according to the description, claims and drawings disclosed in this specification, those skilled in the art can easily understand the relevant purposes and advantages of the present invention. Although the description of the present invention will be introduced in conjunction with the preferred embodiment, this does not mean that the features of this invention are limited to this embodiment. On the contrary, the purpose of introducing the invention in conjunction with the embodiment is to cover other options or modifications that may be extended based on the claims of the present invention. In order to provide a deep understanding of the present invention, many specific details will be included in the following description. The present invention can also be implemented without using these details. In addition, in order to avoid confusion or blurring the focus of the present invention, some specific details will be omitted in the description.

[0039] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0040] In addition, the terms "upper", "lower", "left", "right", "top", "bottom", "horizontal" and "vertical" used in the following description should be understood as the directions shown in the paragraph and the related drawings. Such relative terms are only used for the convenience of description and do not mean that the device described therein must be manufactured or operated in a specific direction, and therefore should not be understood as limiting the present invention.

[0041] It is understood that although the terms "first", "second", "third", etc. may be used herein to describe various components, channels, components, regions, layers and / or parts, these components, channels, components, regions, layers and / or parts should not be limited by these terms, and these terms are only used to distinguish different components, channels, components, regions, layers and / or parts. In addition, the terms "first", "second", "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0042] As shown in this application and claims, unless the context clearly indicates an exception, the words "a", "an", "an" and / or "the" do not refer to the singular and may also include the plural. Generally speaking, the terms "include" and "comprise" only indicate the inclusion of the steps and elements that have been clearly identified, and these steps and elements do not constitute an exclusive list. The method or device may also include other steps or elements.

[0043] In some embodiments, numbers describing the number of components and attributes are used. It should be understood that such numbers used in the description of the embodiments are modified by the modifiers "about", "approximately" or "substantially" in some examples. Unless otherwise specified, "about", "approximately" or "substantially" indicate that the numbers are allowed to vary by ±20%. Accordingly, in some embodiments, the numerical parameters used in the specification and claims are approximate values, which may change according to the required features of individual embodiments. In some embodiments, the numerical parameters should take into account the specified significant digits and adopt the general method of retaining digits. Although the numerical domains and parameters used to confirm the breadth of their range in some embodiments of the present application are approximate values, in specific embodiments, the setting of such numerical values ​​is as accurate as possible within the feasible range.

[0044] At the same time, the present application uses specific words to describe the embodiments of the present application. For example, "one embodiment", "an embodiment", and / or "some embodiments" refer to a certain feature, structure or characteristic related to at least one embodiment of the present application. Therefore, it should be emphasized and noted that "one embodiment" or "an embodiment" or "an alternative embodiment" mentioned twice or more in different positions in this specification does not necessarily refer to the same embodiment. In addition, some features, structures or characteristics in one or more embodiments of the present application can be appropriately combined.

[0045] Figure 1 A schematic diagram of a cavity lifting system for installing a visualization cover according to an embodiment of the present invention is shown. The cavity lifting system for installing a visualization cover comprises: a cavity 103 , an upper cover 101 , an upper frame 102 , a lifting drive system, and a safety tooling 115 .

[0046] The lifting drive system includes a driving mechanism, a plurality of guide pillars 106, at least two symmetrically distributed active lifting mechanisms, and at least two symmetrically distributed driven lifting guide shafts 105. The lifting drive system is used to lift the upper cover 101 to separate or close the upper cover 101 from the cavity 103. After the cavity 103 and the upper cover 101 are sealed and evacuated, the wafer completes the thin film deposition process inside the cavity.

[0047] In one embodiment, each active lifting mechanism is coaxially connected to the corresponding guide column 106 , and each driven lifting guide shaft 105 is coaxially connected to the corresponding guide column 106 . The driving mechanism is mounted on the lower surface of the upper frame 102 .

[0048] In one embodiment, the driving mechanism distributes a power source to multiple transmission routes with equal force energy to ensure that the at least two active lifting mechanisms perform lifting movements synchronously, wherein each transmission route drives a corresponding active lifting mechanism to perform lifting movements, and the at least two driven lifting guide shafts perform synchronous lifting movements together with the at least two active lifting mechanisms under the drive of the at least two active lifting mechanisms.

[0049] In one embodiment, the lifting drive system further includes a fixing plate 107 and a plurality of columns 113. The fixing plate 107 is located between the upper cover 101 and the upper frame 102, and serves as a lower mounting base for the driving motor in the driving mechanism. The columns 113 pass through the fixing plate 107, the upper ends of the columns 113 are fixed to the upper frame 102, and the lower ends of the columns 113 are fixed to the upper cover 101.

[0050] The outer side of the cavity 103 has a plurality of fixing blocks 110. The upper cover 101 has a plurality of outer guide structures 111. The position of each outer guide structure 111 corresponds to the position of each fixing block 110. The lower end of the guide post 106 is installed in the fixing block 110 outside the cavity, and the guide post 106 passes through the outer guide structure 111 of the upper cover 101 and is coaxially connected to the active lifting mechanism or the driven lifting guide shaft 105.

[0051] The upper end of the guide column 106 connected to the active lifting mechanism is provided with a limit mechanism 108. The upper cover 101 can move up and down along the guide column 106, and the position of the limit mechanism 108 determines the maximum stroke that the upper cover 101 can rise. In addition, the upper frame 102 also performs a lifting action under the restriction of the limit mechanism 108 of the guide column 106.

[0052] At least one of the guide posts 106 connected to the active lifting mechanism is provided with a safety device 115 installed on its outer side. The description of the safety device 115 can be found in FIG. 4 and the related text introduction.

[0053] The cavity lifting system for installing a visualization cover of the present invention allows a visualization cover to be installed between the upper cover 101 and the cavity 103 after the upper cover 101 is lifted up and opened, so that the film transmission effect can be observed in the vacuum state of the cavity and corresponding adjustments can be made. In order to achieve this function, in the cavity lifting system for installing a visualization cover of the present invention, at least one of the guide columns connected to the driven lifting guide shaft is a detachable guide column. The fasteners (such as screws) between the detachable guide column and the cavity can be removed in the raised state, and the lower end of the detachable guide column moves upward and is fixed to the upper cover, thereby creating a space for installing a visualization cover.

[0054] In one embodiment, the fastener is a screw 116. The lower end of the detachable guide column is a radial fixing structure of the screw 116, and the lower end of the detachable guide column is fixed to the fixing block 110 by the screw 116. After removing the screw, the hollow guide column can slide along the shaft fixed to the upper end of the frame and be lifted to the position of the outer guide structure 111 of the upper cover 101. The lower end of the guide column can be fixed to the position of the outer guide structure 111 by the screw using the same fixing method. In this way, in the raised state, the lifting of the detachable guide column provides the necessary access space for the installation of the visualization cover.

[0055] Figure 2 FIG. 2 is a schematic diagram showing the connection between the lower end of the guide post and the fixing block according to an embodiment of the present invention. Figure 2 As shown, a positioning and mounting hole 201 is provided on the side of the fixing block, and bolts are passed through the positioning and mounting hole 201 to fix or remove the guide column and the fixing block.

[0056] Figure 3 FIG. 2 shows a schematic diagram of installing a visualization cover according to an embodiment of the present invention. Figure 3 As shown, the visualization cover plate 301 has one or more transparent quartz windows 302. When the visualization cover plate 301 needs to be installed, the lower end of the detachable guide column moves upward and is fixed to the outer guide structure 111 of the upper cover, providing the necessary access space for the visualization cover plate to be installed. After the visualization cover plate 301 is installed along the direction 304 shown in the figure, the lifted detachable guide column can be reset to restore the stable four-column support structure.

[0057] After the visualization cover 301 is installed and tightly fitted to the cavity 103, the cavity is vacuumed and the wafer transfer action test is performed. The wafer transfer channel 303 is observed through a transparent quartz window and the wafer transfer effect is measured. The phenomenon and data are analyzed and the wafer transfer process and parameters are adjusted. A secondary retest is performed through the transparent tooling to efficiently and directly improve and perfect the wafer transfer accuracy and repeatability.

[0058] Figure 4A A front schematic diagram of a safety workwear according to an embodiment of the present invention is shown. Figure 4B The back side schematic diagram of the safety tooling according to one embodiment of the present invention is shown. The safety tooling 401 is installed outside the guide column connected to the active lifting mechanism.

[0059] refer to Figure 4A and Figure 4B The safety tool 401 is a two-piece safety tool. The safety tool 401 includes a main body composed of two semicircular parts, a hinge 402, a toggle clamp 403, a safety lock 404, a lower flange 405 and a detection switch 406.

[0060] The two semicircular parts are fitted on the outer periphery of the guide column and fixed on the lower flange 405. The joints of the two semicircular parts are on both sides, and the hinge 402 is installed at the joint on one side, and the toggle clamp 403 (for example, a quick-release toggle clamp) is installed at the joint on the other side. After the toggle clamp 403 is pressed, the lock hole of the safety lock 404 is exposed, and the safety lock 404 can be locked at this time.

[0061] The detection switch 406 of the safety tool 401 is installed on the cavity. Specifically, the detection switch 406 of the safety tool 401 is installed on the outer wall of the fixing block 110 on the outer side of the cavity 103, wherein the upper surface of the fixing block 110 needs to be lower than the upper surface height of the side wall of the cavity, forming a step shape. The position of the detection switch 406 needs to ensure that the upper cover descends normally without triggering the detection switch 406, and ensure that the detection switch 406 can be triggered after the safety tool is installed on the guide column.

[0062] Figure 5 A schematic diagram showing the installation position of a detection switch of a safety tooling according to an embodiment of the present invention is shown.

[0063] The upper end of the detection switch 406 is a trigger part 501. The highest position of the trigger part 501 is slightly higher than the upper surface of the fixing block 110, but must be lower than the upper surface 502 of the side wall of the cavity. That is, the trigger part and the upper surface 502 of the side wall of the cavity form a safety space, and the maximum spacing of the safety space is less than the distance 503 (that is, the drop between the upper surface of the side wall of the cavity and the upper surface of the fixing block) to ensure that the upper cover descends normally without triggering the detection switch 406, but to ensure that after the safety tooling is installed, its lower flange 405 can trigger the detection switch 406.

[0064] Figure 6 FIG. 2 shows a top view of a safety tool according to an embodiment of the present invention. Figure 6 As shown, the lower flange surface 405 of the safety fixture is a special-shaped structure, for example, an arc shape 601, so that one side thereof can match with the side wall surface of the cavity to form a positioning, and ensure that the installation surface of the safety fixture is separated from the sealing joint surface of the upper cover to avoid scratches and damage to the sealing surface during the use of the fixture.

[0065] Combination Figure 5 and Figure 6 As shown, after the safety fixture is installed, the safety fixture will fall to the upper surface of the fixed block by its own weight and press down the detection switch 406, thereby triggering a prohibition signal. The prohibition signal indicates the existence of the safety fixture, thereby triggering the safety system to disconnect the safety enable of the lifting motor. The locking of the safety lock is associated with the shutdown of the power system of the lifting drive system, and the unlocking of the safety lock is associated with the enabling of the power system of the lifting drive system. Specifically, the safety lock key of the safety fixture and the safety lock key of the power system are placed in the lock box at the same time, and then all operators padlock the lock box. The power-on of the safety fixture and the power system is synchronized from the perspective of the personnel safety operation process.

[0066] The detection switch of the safety tooling can detect in real time whether the safety tooling has been removed, thereby forming a closed-loop control with the automation system to avoid human error.

[0067] In addition, one or more safety fixtures may be provided. When more than two safety fixtures are provided, each detection switch works independently, and even if a single set of detection signals is abnormal, it will not affect the safety interlock. That is, when the safety fixture exists, even if one detection switch is not successfully triggered, since another independent detection switch is working normally, the prohibition signal will still be triggered.

[0068] The present invention has the following technical effects:

[0069] Firstly, by disassembling and moving upward the guide pillar connected to the driven lifting guide shaft, necessary space is provided for the installation of the visualization cover. Meanwhile, the remaining three leads can realize a stable support function to ensure the structural stability of the visualization cover during the disassembly and assembly process. After the visualization cover is disassembled and assembled, the upward guide pillar can quickly return to the initial state connected to the cavity, realizing a more stable and reliable four-point support structure. Subsequently, quartz glass can be used to observe the transfer of the wafer in the chamber under the vacuum state, and the transfer accuracy and repeatability of the wafer can be quickly judged. Rapid adjustment of the wafer transfer process can be realized, maintenance time can be reduced, and equipment utilization efficiency can be improved.

[0070] Secondly, the detection switch of the safety tooling realizes closed-loop detection of the control system, which can effectively monitor the existence status of the installation tooling. By connecting in series with the system safety hard loop, it can achieve the highest level of safety control, effectively avoiding equipment damage caused by human error and significantly increased additional maintenance time.

[0071] Thirdly, the two-in-one design of the quick-disassembly toggle clamp and the safety lock can prevent the power-on operation of the lifting drive system from the installation and construction procedures. Only after the safety lock is released can the permission to unlock the main power of the lifting drive system be disconnected or closed, realizing the second layer of safety protection from the safety procedure.

[0072] Those skilled in the art will appreciate that the various illustrative components, modules, blocks, units, circuits, systems, and steps described in conjunction with the embodiments disclosed herein may be implemented by hardware, software (including firmware, resident software, microcode, etc.), or a combination of the two. To clearly illustrate this interchangeability of hardware and software, various illustrative components, modules, blocks, units, circuits, systems, and steps are described above in general terms in terms of their functionality. Whether such functionality is implemented as hardware or software depends on the specific application and the design constraints imposed on the overall system. The technician may implement the described functionality in different ways for each specific application, but such implementation decisions should not be interpreted as resulting in a departure from the scope of the present invention.

[0073] Flowcharts are used in the present application to illustrate the operations or steps performed by the system according to the embodiments of the present application. It should be understood that the preceding or following operations or steps are not necessarily performed accurately in order. On the contrary, various operations or steps may be processed in reverse order or simultaneously. At the same time, other operations or steps may be added to these processes, or one or more operations or steps may be removed from these processes.

[0074] Unless explicitly stated in the claims, the order of the processing elements and sequences, the use of alphanumeric characters, or the use of other names described in the present application are not intended to limit the order of the processes and methods of the present application.

[0075] The terms and expressions used above are for descriptive purposes only, and the present invention should not be limited to these terms and expressions. The use of these terms and expressions does not mean to exclude any equivalent features of the illustrations and descriptions (or parts thereof), and it should be recognized that various modifications that may exist should also be included in the scope of the claims. Other modifications, changes and substitutions may also exist. Accordingly, the claims should be deemed to cover all such equivalents.

[0076] Similarly, it should be noted that in order to simplify the description of the disclosure of this application and thus facilitate the understanding of one or more embodiments of the invention, in the foregoing description of the embodiments of this application, multiple features are sometimes combined into one embodiment, drawing or description thereof. However, this disclosure method does not mean that the features required by the object of this application are more than the features mentioned in the claims.

[0077] Similarly, it should be pointed out that although the present invention has been described with reference to the current specific embodiments, ordinary technicians in this technical field should realize that the above embodiments are only used to illustrate the present invention, and various equivalent changes or substitutions may be made without departing from the spirit of the present invention. Therefore, as long as the changes and modifications to the above embodiments are within the scope of the essential spirit of the present invention, they will fall within the scope of the claims of this application.

Claims

1. A cavity lifting system for installing a visualization cover, characterized in that: include: Cavity, upper cover and lifting drive system; The lifting drive system includes a plurality of guide columns and a plurality of lifting mechanisms; The lower end of each guide post of the plurality of guide posts is mounted on the outside of the cavity, and the upper end passes through the outer guide structure of the upper cover and is coaxially connected to one of the lifting mechanisms; At least one of the plurality of guide posts is a detachable guide post, and the detachable guide post allows a space for installing the visualization cover plate to be created between the upper cover and the cavity after the upper cover is lifted upward.

2. The cavity lifting system for installing a visualization cover plate according to claim 1, characterized in that: The detachable guide column is hollow, and the hollow space can accommodate the radial width of the lifting mechanism; the lower end of the detachable guide column is fixed to the fixed block on the outside of the cavity by a radial fastener, and when the visualization cover needs to be installed, the fastener is removed, and the detachable guide column is lifted upward and slides along the lifting mechanism. When the detachable guide column is lifted to the position of the outer guide structure, the lower end of the detachable guide column is fixed to the outer guide structure by the radial fastener.

3. The cavity lifting system for installing a visualization cover plate according to claim 1, characterized in that: Also included is a safety tool, which is arranged on at least two of the guide pillars except the detachable guide pillar.

4. The cavity lifting system for installing a visualization cover plate according to claim 3, characterized in that: The safety equipment includes: Main body, hinge, toggle clamp, safety lock, flange and detection switch; The main body is composed of two semicircular parts, the two semicircular parts are attached to the outer circumference of the guide column, and the lower part of the main body is fixed on the flange; The hinge is installed at a joint on one side of the two semicircular parts; The toggle clamp is installed at the joint of the other side of the two semicircular parts, and the toggle clamp exposes the lock hole of the safety lock after being pressed, so as to be used for locking the safety lock; The detection switch is installed on the outside of the fixed block, and the position of the detection switch ensures the normal descent of the upper cover without triggering the detection switch, and ensures that the detection switch can be triggered after the safety tooling is installed on the guide column.

5. The cavity lifting system for installing a visualization cover plate according to claim 4, characterized in that: The upper end of the detection switch is a trigger part; the highest position of the trigger part is higher than the upper surface of the fixing block and lower than the upper surface of the side wall of the cavity, and a height difference is formed between the trigger part and the upper surface of the side wall of the cavity.

6. The cavity lifting system for installing a visualization cover plate according to claim 4, characterized in that: The cross section of the flange is a special-shaped structure, and the special-shaped structure enables the flange to match and position the side wall of the cavity, and ensures that the installation surface of the safety tooling is separated from the sealing joint surface of the upper cover.

7. The cavity lifting system for installing a visualization cover plate according to claim 4, characterized in that: The special-shaped structure is in the shape of a major arc.

8. The cavity lifting system for installing a visualization cover plate according to claim 4, characterized in that: After the safety tooling is installed on the guide column, the safety tooling falls to the upper surface of the fixed block by its own weight, so that the flange presses down the detection switch, thereby triggering a prohibition signal. The prohibition signal indicates the presence of the safety tooling, thereby triggering the locking action of the power system of the lifting drive system.

9. The cavity lifting system for installing a visualization cover plate according to claim 8, characterized in that: The multiple lifting mechanisms include at least two active lifting mechanisms and at least two driven lifting guide shafts; The detachable guide post is one of the guide posts connected to the driven lifting guide shaft; The safety tooling is installed on a guide column connected to the active lifting mechanism.

10. A semiconductor process equipment, characterized in that: include: A cavity lifting system for installing a visualization cover as described in any one of claims 1-9.

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