Processing apparatus, substrate processing apparatus, display method, substrate processing method, method of manufacturing semiconductor device, and recording medium

Abstract

The invention provides a processing apparatus, a substrate processing apparatus, a display method, a substrate processing method, a method of manufacturing a semiconductor device, and a recording medium which can easily determine a specific recipe in the processing apparatus and combination information associated with the recipe. The present invention is provided with a control unit capable of performing control so as to display, on a screen, a recipe selection screen having a plurality of recipe selection regions for displaying a plurality of indicia indicating a recipe including a sub-recipe or a main recipe, and a recipe editing screen. The recipe editing screen is provided with a management information display area which can display the management information of the recipe corresponding to the selected identifier when one of the identifiers is selected on the recipe selection screen. And a combination information editing area for displaying combination information associated with the recipe displayed on the management information display area.

Description

Technical Field

[0001] The present invention relates to a processing device, a substrate processing device, a display method, a substrate processing method, a method for manufacturing a semiconductor device, and a recording medium. Background Art

[0002] Conventionally, a technique for displaying a recipe and its combination information as described in Patent Document 1 is known.

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: International Publication No. 2019 / 186649 Summary of the invention

[0006] The present invention provides a technology capable of easily identifying a specific recipe in a processing device and combination information corresponding to the recipe.

[0007] According to one scheme of the present invention, a technology is provided, comprising a control unit capable of controlling a recipe selection screen and a recipe editing screen in a manner of displaying the screen on the screen, wherein the recipe selection screen has a recipe selection area for displaying a plurality of identifiers showing recipes including sub-recipes or main recipes, and the recipe editing screen has a management information display area capable of displaying management information of the recipe corresponding to the selected identifier when one of the identifiers is selected in the recipe selection screen, and a combination information editing area capable of displaying combination information associated with the recipe displayed on the management information display area.

[0008] Effects of the Invention

[0009] According to the present invention, a specific recipe in a processing device and combination information associated with the recipe can be easily identified. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 It is a perspective view schematically showing an example of a substrate processing apparatus.

[0011] Figure 2 yes Figure 1 A schematic structural diagram of a processing furnace in a substrate processing device.

[0012] Figure 3 Yes means Figure 1 A block diagram showing an overview of a control device in a substrate processing device.

[0013] Figure 4 This is a diagram showing an example of a recipe selection screen having a recipe selection area and a recipe edit area on the screen of the control unit.

[0014] Figure 5 This is a diagram showing an example of a recipe selection screen having a recipe selection area and a second recipe selection area on the screen of the control unit.

[0015] Figure 6 This is a diagram showing an example in which a recipe editing screen having a management information display area and a combination information editing area is displayed on the screen of the control unit.

[0016] Description of Reference Numerals

[0017] 62 Recipe selection area

[0018] 60 recipe selection screen

[0019] 68 Management information display area

[0020] 70Combination information editing area

[0021] 72 logo

[0022] 80 recipe editing screen

[0023] 101 Control Department DETAILED DESCRIPTION

[0024] The following is a reference to the attached Figure 1 The embodiments of the present invention are described in detail. It should be noted that the drawings are schematic diagrams in principle, and the sizes of the parts shown in the drawings and the size ratios between the parts do not necessarily reflect the actual device. In addition, the reference numerals that appear in common in the drawings indicate common structures even if they are not mentioned in the description of the drawings.

[0025] In the following description, an operator refers to a person who uses a substrate processing apparatus or a person who performs substrate processing using a substrate processing apparatus.

[0026] (structure)

[0027] One side reference Figures 1 to 3 The structure of the substrate processing apparatus 10 of this embodiment will be described. Figure 1 As shown, the substrate processing apparatus 10 of the present invention includes a housing 12. The substrate processing apparatus 10 uses a wafer cassette 107 storing a plurality of substrates 200 made of silicon or the like, and a wafer cassette rack 109 is provided inside the housing 12. The wafer cassette 107 is carried in and out of the wafer cassette rack 109 by an intra-process transport device (not shown).

[0028] A wafer cassette rack 109 is provided at a substantially central portion in the front-back direction of the housing 12. The wafer cassette rack 109 is configured to store a plurality of wafer cassettes 107 in multiple layers and multiple rows. The wafer cassette rack 109 is provided with a transfer rack 123 for storing the wafer cassettes 107. In addition, a reserve wafer cassette rack 110 is provided inside the housing 12 of the substrate processing apparatus 10. The reserve wafer cassette rack 110 is configured to store the wafer cassettes 107 in a reserve manner. In addition, a wafer cassette elevator 115 and a wafer cassette transfer machine 114 are provided inside the housing 12. The wafer cassettes 107 are transferred between the wafer cassette rack 109 and the reserve wafer cassette rack 110 by continuous operation of the wafer cassette elevator 115 and the wafer cassette transfer machine 114 controlled by the control unit 101 described later.

[0029] At the rear of the wafer cassette rack 109, there is a substrate transfer machine 112 capable of rotating or linearly moving the substrate 200 in the horizontal direction, and a transfer elevator 113 for lifting and lowering the substrate transfer machine 112. The transfer elevator 113 is provided at the right end of the housing 12. The transfer elevator 113 and the substrate transfer machine 112 are configured such that the tweezer 111 of the substrate transfer machine 112 is used as a substrate 200 loading and unloading portion to the boat 217 through the continuous operation of the transfer elevator 113 and the substrate transfer machine 112.

[0030] A processing furnace 202 is provided at the upper rear portion of the housing 12. The lower end of the processing furnace 202 is configured to be opened and closed by a furnace gate 116. A boat elevator 121 as a lifting mechanism for lifting a boat 217 in the processing furnace 202 is provided below the processing furnace 202. A sealing cover 219 as a cover is horizontally mounted on a lifting member 122 as a connecting member connected to the lifting platform of the boat elevator 121. The sealing cover 219 is configured to vertically support the boat 217 and can block the lower end of the processing furnace 202. The boat 217 as a substrate holding portion has a plurality of boat columns 221, and is configured to horizontally hold a plurality of substrates 200 (for example, about 50 to 150 substrates) in a state where the substrates 200 are aligned at their centers and arranged in a vertical direction.

[0031] like Figure 1 As shown, a cleaning unit 118 including a supply fan and a dust filter is provided on the upper portion of the housing 12 to supply clean air, which is an ambient gas obtained by purifying the external air flowing in from the duct 124. The cleaning unit 118 is configured to circulate the clean air inside the housing 12.

[0032] In addition, if Figure 1 As shown in FIG. 1 , a control device 100 described later is provided in the substrate processing apparatus 10. The control device 100 is electrically connected to each component in the substrate processing apparatus 10. Each component operates according to an instruction of the control device 100.

[0033] Next, based on Figure 2 The above-mentioned processing furnace 202 will be described in detail.

[0034] (Treatment furnace)

[0035] like Figure 2 As shown, the processing furnace 202 includes a reaction tube 203. The reaction tube 203 is made of a heat-resistant non-metal material such as quartz (SiO2) or silicon carbide (SiC), and has a cylindrical shape with a closed upper end and an open lower end.

[0036] Inside the reaction tube 203, as an example, a processing chamber 34 capable of processing a substrate 200 such as a wafer is formed. In other words, the substrate processing apparatus 10 includes a processing chamber 34. A boat 217 as a substrate holder is inserted from below into the processing chamber 34, and the substrates 200 held in a horizontal position by the boat 217 are accommodated in a state where they are arranged in multiple layers in a vertical direction. The boat 217 accommodated in the processing chamber 34 is configured to rotate a rotating shaft 44 by using a rotating mechanism 43, so that the boat 217 can rotate while carrying a plurality of substrates 200 in a state where the processing chamber 34 is kept airtight.

[0037] Below the reaction tube 203, a manifold 45 is provided concentrically with the reaction tube 203. The manifold 45 is made of a metal material such as stainless steel, and is in a cylindrical shape with an upper end and a lower end open. Through the manifold 45, the reaction tube 203 is supported longitudinally from the lower end side. In other words, the reaction tube 203 forming the treatment chamber 34 is erected in the vertical direction via the manifold 45 to form the treatment furnace 202. The lower end of the manifold 45 is configured to be sealed airtightly by the sealing cover 219 when the boat elevator 121 rises. Between the lower end of the manifold 45 and the sealing cover 219, a sealing member 46a such as an O-ring that seals the treatment chamber 34 airtightly is provided.

[0038] Furthermore, a gas introduction pipe 47 for introducing raw material gas and purge gas into the processing chamber 34 and an exhaust pipe 48 for exhausting gas from the processing chamber 34 are connected to the manifold 45. The pressure of the processing chamber 34 is controlled by adjusting the APC valve 35 based on the detection result of a pressure sensor (not shown).

[0039] A heater unit 49 as a heating portion (heating mechanism) is disposed concentrically with the reaction tube 203 on the outer periphery of the reaction tube 203. The heater unit 49 is configured to heat the processing chamber 34 so that the entire processing chamber 34 has a uniform or predetermined temperature distribution.

[0040] Figure 3 This is a block diagram showing an example of the functional configuration of the control device 100 included in the substrate processing apparatus 10 according to the present embodiment.

[0041] like Figure 3 As shown, the substrate processing apparatus 10 includes a control device 100 as a main controller, an external communication unit 201 , an external storage unit 210 , an operation unit 212 , a display unit 204 , a process control unit 205 , and a transport control unit 206 .

[0042] The control device 100 includes a control unit 101 , a storage unit 104 , and an I / O (also referred to as an I / O port) 105 . The control unit 101 includes a CPU (Central Processing Unit) 102 and a RAM (Random Access Memory) 103 .

[0043] The control device 100 is connected to the operation unit 212, and is connected to the process control unit 205 and the transport control unit 206 via the I / O 105. Since the control device 100 is electrically connected to the process control unit 205 and the transport control unit 206 via the I / O 105, it is configured to be able to transmit and receive various data and download and upload various files.

[0044] The control device 100 is connected to an external upper computer (not shown) via an external communication unit 201. Therefore, even if the substrate processing device 10 is installed in a clean room, the upper computer can be arranged in an office outside the clean room. In addition, the control device 100 is connected to an external storage unit 210 as a mounting unit for inserting and removing a USB (Universal Serial Bus) memory as an example of a recording medium.

[0045] The operation unit 212 is a so-called touch panel that is integrally provided with the display unit 204 or connected to the display unit 204 via a video cable or the like. The operation unit 212 is configured to display various operation screens for operating the substrate processing apparatus 10 on the display unit 204. The operation screen includes a screen for confirming the state of the substrate process system controlled by the process control unit 205 and the substrate conveying system controlled by the conveying control unit 206. In addition, the display unit 204 can also be provided with various operation buttons as input units for inputting operation instructions to the substrate process system and the substrate conveying system. The operation unit 212 displays information generated in the substrate processing apparatus 10 on the display unit 204 via the operation screen. In addition, the operation unit 212 outputs information displayed on the display unit 204 to a device such as a USB memory inserted in the external storage unit 210, for example. The operation unit 212 receives input data (input instructions) from the operation screen displayed on the display unit 204 and sends the input data to the control device 100. In addition, the operation unit 212 receives an instruction (control instruction) to execute any substrate processing recipe (also referred to as a process recipe) among the recipes expanded in the RAM 103 or the plurality of recipes stored in the storage unit 104, and transmits it to the control device 100. Here, although the operation unit 212 and the display unit 204 are provided separately from the control device 100, they may be provided as a structure integrally included in the control device 100.

[0046] Although the process control unit 205 is not shown in the figure, it has a temperature control unit, a gas flow control unit, and a pressure control unit. These temperature control units, gas flow control units, and pressure control units constitute sub-controllers, respectively, and since they are electrically connected to the process control unit 205, they can receive and send various data and download and upload various files. In addition, the process control unit 205 and each sub-controller (temperature control unit, gas flow control unit, and pressure control unit) can be separately constituted or integrally constituted.

[0047] Although the illustration of the transport control unit 206 is omitted here, it includes a mechanism control unit. The mechanism control unit is configured to control the drive system, the rotation system, and the lifting system of the substrate processing apparatus 10. The transport control unit 206 is configured to control the transport operations of the wafer box rack 109, the boat elevator 32, the wafer box transport mechanism 15, the substrate transfer mechanism 24, the boat 26, and the rotating mechanism (not shown), respectively.

[0048] The control device 100 is configured as a computer having a CPU 102, a RAM 103, a storage unit 104, and an I / O 105. The storage unit 104 stores various recipe files such as recipes defining processing conditions and processing sequences, control program files for executing these recipe files, and parameter data (setting value files) for setting processing conditions and processing sequences. In addition to error handling program files and error handling parameter data, various screen files including input screens for inputting process parameters, various icon files, etc. are also stored (none of which are shown in the figure). In addition, the control device 100 uses an external communication unit 201, which is connected to a network such as the Internet, a LAN (Local Area Network), or a WAN (Wide Area Network) as an example, so that it can communicate with external devices via the network.

[0049] In the present embodiment, when only a recipe is recorded, it is a general term for a main recipe and a sub-recipe, and in the following description, it refers to at least one of the main recipe and the sub-recipe.

[0050] The master recipe is a recipe that specifies a series of steps from the start of processing of the substrate 200 (loading the substrate 200 into the boat 217) to the end of processing of the substrate 200 (unloading the substrate 200 from the boat 217) in the processing sequence of the substrate 200 described later. Figure 4 As shown in the recipe selection area 62 of FIG. 1 , each master recipe is defined by referencing one sub-recipe and a plurality of parameter data.

[0051] The sub-recipe is a recipe that specifies a more detailed sequence of steps in the processing sequence in the processing sequence of the substrate 200 described later. Figure 6 As shown in the combination information editing area 70 of FIG. 1 , each sub-recipe can be referenced by a plurality of main recipes.

[0052] In addition, in the present embodiment, the maximum number of steps that can be defined in the sub-recipe is greater than the maximum number of steps that can be defined in the main recipe. In other words, the sub-recipe can define the steps more finely than the main recipe.

[0053] Furthermore, as described above, in this embodiment, since the sub-recipe is referenced by the main recipe, if the operator edits the sub-recipe referenced by the main recipe, the result of the editing may also affect the main recipe. In other words, the sub-recipe is associated with the main recipe.

[0054] As the storage unit 104 , for example, a HDD (Hard Disk Drive), an SSD (Solid State Drive), a flash memory, etc. The storage unit 104 stores a program for executing each procedure of the present embodiment.

[0055] The program may be pre-installed in the substrate processing apparatus 10, for example. The program may also be recorded in a non-volatile recording medium or distributed via a network and then appropriately installed in the substrate processing apparatus 10. In addition, as examples of non-volatile recording media, CD-ROM, magneto-optical disk, HDD, DVD-ROM, flash memory, memory card, USB, etc. are contemplated.

[0056] The CPU 102 of the substrate processing apparatus 10 of the present embodiment functions as the control unit 101 by writing a program stored in the storage unit 104 into the RAM 103 and executing the program.

[0057] Next, in the substrate processing method of the present embodiment, operations of the substrate processing apparatus 10 and the control unit 101 will be described.

[0058] (Transportation process)

[0059] like Figure 1 As shown, the control unit 101 carries in the wafer cassette 107 from the wafer cassette carrying port. Then, the control unit 101 transfers the wafer cassette 107 from the wafer cassette shelf 109 or the spare wafer cassette shelf 110 to the transfer rack 123, or directly transfers it to the transfer rack 123.

[0060] (Loading process)

[0061] After the control unit 101 transfers the wafer box 107 to the transfer rack 123, the tweezers 111 of the substrate transfer machine 112 pick up the substrate 200 from the wafer box 107 through the substrate loading and unloading port, and loads each substrate 200 into the boat 217. Thus, the boat 217 holds the plurality of substrates 200 in a stacked state with intervals formed between them in the vertical direction.

[0062] After loading the predetermined number of substrates 200 into the boat 217, the control unit 101 opens the lower end of the processing furnace 202 closed by the furnace gate 116 through the furnace gate 116. Next, the control unit 101 raises the sealing cap 219 by the boat elevator 121, and carries the boat 217 holding the substrate 200 group into the processing furnace 202. In other words, the control unit 101 operates the boat elevator 121 to carry the boat 217 holding the unprocessed substrates 200 from the transfer chamber to the processing chamber 34. As a result, the sealing cap 219 seals the lower end of the manifold 45 via the sealing member 46a.

[0063] (Processing process)

[0064] After the substrate 200 is loaded into the boat 217, the control unit 101 processes the unprocessed substrate 200 held in the boat 217 loaded into the processing chamber 34 according to the recipe defining the processing conditions of the substrate. Specifically, if, for example, a film forming process based on a thermal CVD reaction is performed, the control unit 101 exhausts the gas using the exhaust pipe 48 and adjusts the APC valve 35 so that the processing chamber 34 reaches a desired pressure (vacuum degree). In addition, the control unit 101 heats the processing chamber 34 using the heater unit 49 and maintains the desired temperature, while operating the rotation mechanism 43 to rotate the boat 217, in other words, the substrate 200. The control unit 101 continues the rotation of the substrate 200 until the substrate 200 is unloaded as described later. In addition, the control unit 101 supplies a raw material gas and a purge gas to the processing chamber 34 using the gas introduction pipe 47, so that a film using a decomposition reaction based on heat is formed on the surface of the substrate 200 held in the boat 217.

[0065] After forming a film on the surface of the substrate 200, the control unit 101 stops heating by the heater unit 49 and cools the temperature of the substrate 200 in the processed state to a predetermined temperature. Furthermore, when a preset time has passed since the time when the heating was stopped, the control unit 101 stops supplying gas to the processing chamber 34 and starts supplying an inactive gas to the processing chamber 34. Thus, the control unit 101 replaces the processing chamber 34 with the inactive gas and restores the pressure of the processing chamber 34 to normal pressure.

[0066] The control unit 101 executes the above-mentioned processing steps according to a recipe (more specifically, a main recipe and a sub-recipe). The recipe is determined by the operator who performs a film forming process on the substrate 200 appropriately selecting the main recipe to determine the processing steps.

[0067] In addition, the recipe is stored in the storage unit 104. The control unit 101 obtains the recipe in the processing step of the substrate and controls the processing of the substrate according to the processing conditions defined in the recipe. The recipe is not only stored in the storage unit 104, but can also be read from a USB memory, CD or DVD via the external storage unit 210, and can also be obtained from an external device via the external communication unit 201.

[0068] (Carrying out process)

[0069] After the processing step is executed, the control unit 101 controls the boat elevator 121 to move up and down, and lowers the sealing cover 219 to open the lower end of the manifold 45. The control unit 101 also carries out the boat 217 holding the processed substrates 200 from the lower end of the manifold 45 to the outside of the processing chamber 34 (boat unloading).

[0070] (Transfer process after unloading)

[0071] After the substrates 200 on the waiting boat 217 are cooled to a predetermined temperature (e.g., room temperature), the control unit 101 uses the substrate transfer machine 28 disposed in the transfer chamber to unload the substrates 200 from the boat 217. Then, the control unit 101 performs a substrate unloading operation of transferring the processed substrates 200 unloaded from the boat 217 to an empty wafer box and storing the substrates. Then, the control unit 101 transfers the wafer box 107 storing the processed substrates 200 to the outside of the housing 12 in the reverse order of the above. In addition, the substrates 200 transferred to the outside of the housing 12 are then transferred to a semiconductor device manufacturing apparatus and incorporated into a semiconductor device.

[0072] In addition, the processing method of the substrate 200 and the manufacturing method of the semiconductor device of the present embodiment include a step of processing the substrate 200 based on the recipe displayed on the recipe selection screen 60 described later. In other words, the processing method of the substrate 200 and the manufacturing method of the semiconductor device include a step of displaying a screen using a display method described later.

[0073] In other words, the program causes the computer to execute the step of displaying a plurality of labels showing recipes including sub-recipes or main recipes on a recipe selection screen. In addition, the program causes the computer to execute the step of displaying a recipe editing screen having a management information display area and a combination information editing area on the screen, wherein the management information display area is capable of displaying management information corresponding to a selected label when a certain label is selected on the recipe selection screen, and the combination information editing area displays combination information associated with the recipe displayed in the management information display area.

[0074] Next, refer to Figures 4 to 6 Next, a display method for a screen displayed on the display unit 204 according to the present embodiment will be described.

[0075] (Screen display and combination information)

[0076] Figures 4 to 6 1 is a diagram showing an example of screen display of the present invention, showing a recipe selection screen 60 having a recipe selection area 62 and a recipe editing area 64. More specifically, in the present embodiment, the recipe selection area 62 is displayed on the left side of the screen, and the recipe editing area 64 is displayed on the right side of the screen, and they are displayed close to each other.

[0077] The recipe selection area 62 displays a plurality of main recipes, sub recipes, and parameter data stored in the storage unit 104. More specifically, the names of the respective recipes and parameter data are displayed as character strings in the recipe selection area 62, and each mark 72 can be selected by the operator touching the screen. Figure 4 , as an example, a situation in which "MR3" is selected as the master recipe is shown.

[0078] In the recipe editing area 64, it is displayed that the recipe selected in the recipe selection area 62 can be edited. Figure 4 In the example, by selecting "MR3" in the master recipe, the steps of the recipe are displayed in the recipe editing area 64. More specifically, the sub-recipes and parameter data referenced by each step of the master recipe "MR3" are displayed in the recipe editing area 64. The identifier 72 of each displayed step can be selected by the operator touching the screen, and each step can be edited by the operator by separately displaying the content of the step when selected (not shown).

[0079] Right now, Figure 4 This is an example of a screen displayed by displaying a plurality of marks 72 indicating recipes including sub-recipes or main recipes on the recipe selection screen 60 in the process.

[0080] exist Figure 5 , a screen is shown in which the recipe selection area 62 is selected to display a list of sub-recipes. As an example, the list of sub-recipes is displayed by selecting "Sub-recipes" in the list of recipe selection area 62 (in Figure 5 The second recipe selection area 66 is displayed on the right side of the screen with a mark 72 of an item "Sub Recipe" in the image. The second recipe selection area 66 is another example of the recipe selection area 62 in the present embodiment.

[0081] like Figure 5 As shown in FIG. 1 , a list of sub-recipe names stored in the storage unit 104 is displayed in the second recipe selection area 66. In addition, in the second recipe selection area 66 of the present embodiment, there is a case where a related display icon 74 is attached to the name of each sub-recipe and displayed. For example, an icon indicating a relationship is displayed, such as the related display icon 74A.

[0082] In addition, when each sub-recipe is referenced by a main recipe, the associated display icon 74 may also change according to the number of referenced main recipes. More specifically, as the associated display character 74B, a character corresponding to the number of referenced main recipes is shown. In the present embodiment, seven main recipes are associated, and "(7)" is displayed as the associated display character. In addition, in the present embodiment, when the number of referenced main recipes is 0 for each sub-recipe (i.e., when it is not referenced in any main recipe), the associated display icon 74 is not attached and displayed. In addition, in the case where there is no referenced main recipe, the associated display character 74B may also display the number of referenced main recipes (i.e., displayed as "(0)").

[0083] Right now, Figure 5 This is another example of a screen displayed by displaying a plurality of marks 72 indicating recipes including sub-recipes or main recipes on the recipe selection screen 60 in the process.

[0084] exist Figure 6 , a recipe editing screen 80 is shown having a management information display area 68 and a combination information editing area 70. More specifically, in this embodiment, the management information display area 68 is displayed on the left side of the screen, and the combination information editing area 70 is displayed on the right side of the screen, and are displayed close to each other.

[0085] The management information display area 68 shows Figure 4 or Figure 5 The selected sub-recipe (in Figure 6 More specifically, the name of the sub-recipe, the referenced parameter data, and the combination information described later are shown in the management information display area 68. In other words, the control unit 101 displays the detailed information of the combination information in the combination information editing area 70.

[0086] In the present embodiment, the combination information refers to a list of master recipes that reference the sub-recipes. When the combination information is selected, the details of the corresponding combination information are displayed in the combination information editing area 70. In addition, in the combination information editing area 70, a list of master recipes that reference the sub-recipes and buttons for accepting the editing of each master recipe are displayed side by side as the combination information.

[0087] In the present embodiment, as an example, the buttons for accepting the editing of the master recipe include three buttons, namely, a first edit button 76A, a second edit button 76B, and a third edit button 76C, for each master recipe.

[0088] The first edit button 76A, when selected by the operator, causes the control unit 101 to display a screen for editing the steps in the master recipe (i.e., Figure 4 In other words, the first edit button 76A can also be said to be a button for transferring to a screen for editing a corresponding recipe when the operator selects it.

[0089] The second edit button 76B is a button that, when selected by the operator, causes the control unit 101 to execute a process (Delete) of deleting (removing from the storage unit 104 ) the master recipe.

[0090] In addition, the third edit button 76C is a button that causes the control unit 101 to execute the process of eliminating the reference relationship between the selected main recipe and the sub-recipe (disconnect) when the operator selects it. Here, eliminating the reference relationship of the sub-recipe means, as an example, directly writing the parameter data and steps of the sub-recipe in the main recipe, ignoring the process of referencing the sub-recipe in the main recipe, etc. In other words, the third edit button 76C can also be said to be a button that prevents the editing result of the sub-recipe from affecting the main recipe even if the sub-recipe is edited when the operator selects it.

[0091] In other words, Figure 6 This is an example of a screen displayed by displaying a recipe editing screen 80 having a management information display area 68 and a combination information editing area 70 on the screen, wherein the management information display area 68 is capable of displaying management information corresponding to a selected identifier 72 when a certain identifier 72 is selected in the recipe selection screen 60, and the combination information editing area 70 displays combination information associated with the recipe displayed on the management information display area 68.

[0092] In addition, in this embodiment, the combination information may be generated in any manner.

[0093] As an example, the combination information is data generated by the CPU 102 referring to the master recipes stored in the storage unit 104 and detecting the names of the sub-recipes referred to by each master recipe when the substrate processing apparatus 10 is started. In this case, the combination information is stored as data in the storage unit 104, such as Figure 5 and Figure 6 In this way, when the combination information is selected, the data of the combination information is read from the storage unit 104. In this case, since the CPU 102 automatically generates the combination information, it is less likely to cause a burden on the operator. In addition, in this case, the combination information is quickly updated when the master recipe is generated or edited.

[0094] As another example, the combination information is a part of the sub-recipe data recorded as meta information such as the header of the sub-recipe when the operator creates or edits the sub-recipe. Figure 6 In the case of the management information display area 68 shown in FIG. 1 , the combination information is read together with the management information of the sub-recipe. In this case, since the combination information is stored as the data of the sub-recipe, the size of the data stored in the storage unit 104 becomes smaller than when the CPU 102 automatically generates the combination information as data. In addition, in this case, the startup of the substrate processing apparatus 10 becomes faster than when the CPU 102 automatically generates the combination information as data when the substrate processing apparatus 10 is started.

[0095] Next, the operation of the substrate processing apparatus 10 according to the present embodiment and one or more effects obtained by the substrate processing apparatus 10 will be described.

[0096] (Function and Effect)

[0097] Regarding the substrate processing apparatus 10 of the present embodiment, the control unit 101 can control the recipe selection screen 60 and the recipe editing screen 80 to be displayed on the screen. Therefore, according to the substrate processing apparatus 10 of the present embodiment, the operator can easily identify a specific recipe and other corresponding recipes in the substrate processing apparatus 10 storing a plurality of master recipes.

[0098] In the substrate processing apparatus 10 of this embodiment, the control unit 101 displays a button for accepting editing of the combination information in the combination information editing area 70. Therefore, according to the substrate processing apparatus 10 of this embodiment, since a button for accepting editing of the combination information can be displayed, the operator can easily select an editing object.

[0099] In addition, regarding the substrate processing apparatus 10 of the present embodiment, the control unit 101 displays the association status between the sub-recipe and the main recipe in the recipe selection area 62. Therefore, according to the substrate processing apparatus 10 of the present embodiment, the operator can easily grasp the association status between the sub-recipe and the main recipe. More specifically, since the operator can easily grasp the recipe that is not associated with the sub-recipe, it is easy to determine whether the recipe displayed on the screen is an unnecessary recipe.

[0100] In addition, regarding the substrate processing apparatus 10 of the present embodiment, the control unit 101 displays an icon indicating whether there is a correlation between the sub-recipe and the main recipe. Therefore, according to the substrate processing apparatus 10 of the present embodiment, the operator can easily grasp the correlation status between the sub-recipe and the main recipe by confirming the icon displayed on the screen.

[0101] In addition, regarding the substrate processing apparatus 10 of the present embodiment, the control unit 101 displays the mark 72 indicating the plurality of sub-recipes and the icon indicating whether there is a correlation between the sub-recipes and the main recipe in the recipe selection area 62. Therefore, according to the substrate processing apparatus 10 of the present embodiment, the operator can easily understand the correlation between the sub-recipes and the main recipe.

[0102] In addition, regarding the substrate processing apparatus 10 of the present embodiment, the control unit 101 displays the mark 72 indicating the plurality of sub-recipes and the mark 72 indicating the number of main recipes associated with the sub-recipes in the recipe selection area 62. Therefore, according to the substrate processing apparatus 10 of the present embodiment, since the operator can easily grasp the number of main recipes associated with the sub-recipes, the operator can easily grasp the impact of editing the sub-recipes.

[0103] In addition, in the substrate processing apparatus 10 of the present embodiment, a sub-recipe is associated with a plurality of main recipes, and the maximum number of steps that can be handled by the main recipe is less than the number of steps that can be handled by the sub-recipe. Here, since the maximum number of steps that can be handled by the sub-recipe is large, the editing freedom of the device control in the recipe is higher for the sub-recipe than for the main recipe. Therefore, according to the substrate processing apparatus 10 of the present embodiment, when editing a recipe, the operator can keep the sub-recipe and delete the main recipe.

[0104] In addition, in the substrate processing apparatus 10 of the present embodiment, one of the buttons for accepting editing is a button for transferring to an editing screen of a recipe corresponding to each combination information. Therefore, according to the substrate processing apparatus 10 of the present embodiment, when editing a recipe, the operator can easily edit the main recipe quickly after confirming the combination information of the sub-recipe and the main recipe.

[0105] In addition, in the substrate processing apparatus 10 of the present embodiment, one of the buttons for accepting editing is a button for severing the association between the sub-recipe and the main recipe displayed in the accepting combination information editing area 70. Therefore, according to the substrate processing apparatus 10 of the present embodiment, when the operator edits a recipe, even if the operator edits a sub-recipe, it is possible to prevent the editing result of the sub-recipe from affecting the main recipe.

[0106] In addition, in the substrate processing apparatus 10 of the present embodiment, one of the buttons for accepting editing is a button for deleting the main recipe corresponding to the sub-recipe displayed in the combination information editing area 70. Therefore, according to the substrate processing apparatus 10 of the present embodiment, when editing a recipe, the operator can easily delete the main recipe quickly after confirming the combination information of the sub-recipe and the main recipe.

[0107] In the substrate processing apparatus 10 of this embodiment, the control unit 101 arranges the management information display area 68 and the combination information editing area 70 close to each other. Therefore, according to the substrate processing apparatus 10 of this embodiment, the operator can easily compare the management information display area 68 and the combination information editing area 70 of each recipe.

[0108] In addition, in the substrate processing apparatus 10 of the present embodiment, the control unit 101 displays at least information indicating a sub-recipe or a main recipe in the management information display area 68. In addition, the control unit 101 displays a plurality of combination information associated with the sub-recipe or the main recipe, and displays detailed information of the combination information selected in the management information display area 68 in the combination information editing area 70. Therefore, according to the substrate processing apparatus 10 of the present embodiment, since the operator can quickly select other combination information in the management information display area 68, the operator can edit the combination information while paying attention to other combination information.

[0109] In addition, in the substrate processing apparatus 10 of the present embodiment, the control unit 101 displays the combination information corresponding to the recipe selected in the recipe selection screen 60 in the management information display area 68. Therefore, according to the substrate processing apparatus 10 of the present embodiment, the operator can easily understand the combination information selected in the recipe selection screen 60 and the details of the combination information.

[0110] In addition, in the above description, although the combination information is described as a list of main recipes that reference sub-recipes, the technology of the present invention is not limited to this. For example, combination information can also be generated for parameter data referenced by a sub-recipe. For example, when a sub-recipe or a main recipe references parameter data, the combination information is generated as a list of sub-recipes or main recipes that reference the parameter data.

[0111] That is, the combination information of the present embodiment can also be said to be information showing the relationship between the secondary sequence information referenced by the primary sequence information and the primary sequence information. In the above description, it can be said that the relationship between the sub-recipe referenced by the main recipe and the main recipe is consistent with it. For example, in the above description, although the recipe includes the main recipe and the sub-recipe, the recipe may also include other types of recipes referenced by the sub-recipe. That is, for other types of recipes referenced only by the sub-recipe, the combination information can also be generated in the same manner as in the above description.

[0112] In the above description, the control unit 101 is described as a part of the structure of the substrate processing apparatus 10, but the technology of the present invention is not limited to this, and the control unit 101 may be separated from the substrate processing apparatus 10. That is, the technology of this embodiment is also applicable when a processing apparatus that does not have a processing chamber 34 controls another substrate processing apparatus 10 via a network or the like to process the substrate 200.

[0113] In the above scheme, an example of forming a film using a batch-type substrate processing device that processes multiple substrates at a time is described. The present invention is not limited to the above method, and can also be applied to the case where a film is formed using a cluster-type substrate processing device that processes one or more substrates at a time. In addition, in the above method, an example of forming a film using a substrate processing device with a hot-wall processing furnace is described. The present invention is not limited to the above method, and can also be applied to the case where a film is formed using a substrate processing device with a cold-wall processing furnace. In addition, it is not limited to this, and can be applied to all substrate processing devices such as diffusion devices, annealing devices, and oxidation devices.

[0114] Also when these substrate processing apparatuses are used, each process can be performed in the same process order and process conditions as those of the above-mentioned embodiment and modified examples, and the same effects as those of the above-mentioned embodiment and modified examples can be obtained.

[0115] The substrate is not limited to a wafer, and may be a photomask, a printed wiring board, a liquid crystal panel, an optical disk, a magnetic disk, or the like.

[0116] In addition, in the above-mentioned embodiments, the processing of CPU102 reading and executing software (program) can also be performed by various processors other than CPU102. As a processor in this case, a dedicated circuit as a processor is exemplified, and the dedicated circuit has a circuit structure specially designed for performing specific processing, such as PLD (Programmable Logic Device) and ASIC (Application Specific Integrated Circuit) that can change the circuit structure after manufacturing FPGA (Field-Programmable Gate Array) and the like. In addition, the processing can be performed by one of these various processors, or by a combination of two or more processors of the same or different types (for example, a combination of multiple FPGAs and CPU102 and FPGA, etc.). In addition, more specifically, the hardware structure of these various processors is a circuit composed of a combination of circuit elements such as semiconductor elements.

[0117] In addition, in the above-mentioned embodiments, although the processing program is pre-stored (installed) in a storage device, it is not limited to this. The program can also be provided in a non-transitory storage medium such as a CD-ROM (Compact Disk Read Only Memory), a DVD-ROM (Digital Versatile Disk Read Only Memory), and a USB (Universal Serial Bus) memory. In addition, the program can also be downloaded from an external device via a network.

[0118] The above, although referring to the attached Figure 1 While explaining the embodiments of the present invention, it is clear that anyone with common knowledge in the technical field to which the present invention belongs can think of various modification examples or application examples within the scope of the technical idea described in the claims, and it is understood that these modification examples or application examples naturally also belong to the technical scope of the present invention.

Claims

1. A processing device, characterized in that: A control unit is provided, which can control a recipe selection screen and a recipe editing screen in a manner of displaying them on the screen, wherein the recipe selection screen has a recipe selection area for displaying a plurality of identifiers showing recipes including sub-recipes or main recipes, and the recipe editing screen has a management information display area for displaying management information of the recipe corresponding to one of the identifiers selected on the recipe selection screen, and a combination information editing area for displaying combination information associated with the recipe displayed on the management information display area.

2. The processing device according to claim 1, characterized in that The control unit displays a button for accepting editing of the combination information in the combination information editing area.

3. The processing device according to claim 1, characterized in that The control unit displays a correlation state between the sub-recipe and the main recipe on the recipe selection area.

4. The processing device according to claim 1, characterized in that The control unit displays an icon indicating whether the sub-recipe is associated with the main recipe in the recipe selection area.

5. The processing device according to claim 1, characterized in that The control unit displays marks indicating the plurality of sub-recipes and an icon indicating whether the sub-recipes are associated with the main recipe in the recipe selection area.

6. The processing device according to claim 1, characterized in that The control unit displays, in the recipe selection area, a mark indicating a plurality of the sub-recipes and a mark indicating the number of the main recipes associated with the sub-recipes.

7. The processing device according to claim 1, characterized in that The sub-recipe is configured to be associated with a plurality of the main recipes.

8. The processing device according to claim 7, characterized in that The main recipe is configured to be associated with only one sub-recipe.

9. The processing device according to claim 1, characterized in that The sub-recipe is associated with a plurality of the main recipes, The maximum number of steps that the master recipe can handle is configured to be smaller than the maximum number of steps that the sub-recipe can handle.

10. The processing device according to claim 2, characterized in that The button for accepting the editing is a button for transitioning to an editing screen of a recipe corresponding to each of the combination information.

11. The processing device according to claim 2, characterized in that The button for accepting the editing is a button for accepting the disconnection of the association between the sub-recipe and the main recipe displayed in the combination information editing area.

12. The processing device according to claim 2, characterized in that The button for accepting the editing is a button for deleting the master recipe corresponding to the sub-recipe displayed in the combination information editing area.

13. The processing device according to claim 1, characterized in that The control unit arranges the management information display area and the combination information editing area in close proximity.

14. The processing device according to claim 1, characterized in that The control unit displays at least information showing the sub-recipe or the main recipe and a plurality of the combination information associated with the sub-recipe or the main recipe in the management information display area, and displays detailed information of the combination information selected in the management information display area in the combination information editing area.

15. The processing device according to claim 14, characterized in that The control unit displays combination information corresponding to the recipe selected on the recipe selection screen in the management information display area.

16. A substrate processing device, characterized in that: have: The processing device of claim 1; and A processing chamber capable of processing substrates.

17. A display method, characterized in that: The process is as follows: A step of displaying a plurality of marks indicating recipes including a sub-recipe or a main recipe on a recipe selection screen; and A process of displaying a recipe editing screen having a management information display area and a combination information editing area on a screen, wherein the management information display area is capable of displaying management information corresponding to the selected identifier when one of the identifiers is selected in the recipe selection screen, and the combination information editing area displays combination information associated with the recipe displayed on the management information display area.

18. A substrate processing method, characterized in that: The method further comprises the step of processing a substrate based on the recipe displayed on the recipe selection screen in the display method according to claim 17 .

19. A method for manufacturing a semiconductor device, characterized in that: The method further comprises the step of processing a substrate based on the recipe displayed on the recipe selection screen in the display method according to claim 17 .

20. A recording medium, which is a computer-readable recording medium and has a program recorded thereon, characterized in that: The program causes the computer to execute the following steps: The step of displaying a plurality of marks showing recipes including sub-recipes or main recipes on a recipe selection screen; and The step of displaying a recipe editing screen having a management information display area and a combination information editing area on a screen, wherein the management information display area is capable of displaying management information corresponding to the selected identifier when one of the identifiers is selected in the recipe selection screen, and the combination information editing area displays combination information associated with the recipe displayed on the management information display area.

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