Wafer conveying and collecting device

Abstract

According to the technical scheme, the wafer conveying and collecting device comprises a box body and a side plate, the inner side of the box body is fixedly connected with a supporting rod, a plurality of front sliding rails are installed on the supporting rod, side sliding rails are installed on the inner wall of the side plate, and telescopic assemblies are slidably connected to the side sliding rails and the front sliding rails on the same plane. A clamping frame is connected to the telescopic assembly, a moving strip is slidably connected to the box body, and a driving assembly used for driving the moving strip to slide up and down is connected to the box body; according to the invention, the telescopic strip rotates and deforms towards the middle to push the clamping frame to extend out, so that the wafers can be conveniently collected and placed, when the wafers need to be observed, the box body is horizontally placed, the first motor is started, the side plate is unfolded, the clamping frame is exposed, the wafers can be conveniently observed, the first electric push rod is contracted before the side plate is unfolded, and the first electric push rod is pushed to move back and forth. And the primary sliding rod is pulled to slide into the side sliding rail, so that the two adjacent clamping frames are separated, the distance between the wafers is increased, and the wafers can be taken out conveniently.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor wafer storage equipment, and in particular to a wafer conveying and collecting device. Background Art

[0002] Wafer refers to the silicon wafer used to make silicon semiconductor circuits. Its raw material is silicon. High-purity polysilicon is dissolved and doped with silicon crystal seeds, and then slowly pulled out to form cylindrical single crystal silicon. After grinding, polishing and slicing, the silicon crystal rod is formed into a silicon wafer, also known as a wafer.

[0003] Referring to the Chinese invention patent, the publication number is: CN116978844A, and the name is: A wafer storage device, through the cooperation of a support bar, a clamping plate and a resistance frame, as the support bar moves, the rollers on the clamping plate and the resistance frame can restrict wafers of different specifications in multiple directions, thereby ensuring stability during the storage process, and through the cooperation of a rotating sleeve, a flip block and a one-way bearing, when the staff takes out the wafer, the adjacent rotating sleeve can rotate, so that the support bar arranged above it can move a distance in the direction away from the mounting plate. At this time, the wafer on the support bar is higher than the neatly arranged wafers, which is convenient for the staff to continuously take the wafers.

[0004] However, in actual use, the above technical solution still has some problems:

[0005] 1. Since wafers are thin and brittle, they are currently mostly picked up and placed manually using a robotic arm with a suction cup. However, the manual operation of lifting and lowering the support bars one by one is cumbersome and inefficient. In addition, this manual operation easily introduces dust, which increases the difficulty and cost of subsequent wafer cleaning.

[0006] 2. The currently used "U"-shaped placement frame is an integrated design, and its two sides cannot be expanded, which limits the increase in the number of wafers placed. In order to accommodate more wafers, the placement of wafers in the frame becomes relatively dense. This layout requires the robot arm to have higher precision, and the suction cup also needs to be designed to be thinner to meet the compact placement space. These requirements not only increase the equipment cost, but also when errors occur during operation, wafers are prone to collision, increasing the risk of damage;

[0007] 3. The existing support bar design only allows the bars to extend outward a limited distance, which makes it impossible to stagger the two adjacent support bars, making it impossible to conduct intuitive observation and inspection. Adjacent wafers shield each other, so the wafers need to be taken out one by one during the inspection process, which not only reduces the inspection efficiency, but also increases the difficulty and time cost of operation. Summary of the invention

[0008] The purpose of the present invention is to solve the shortcomings existing in the prior art and to propose a wafer conveying and collecting device which is convenient for automatic placement of wafers, intuitive observation, and easy to take out.

[0009] In order to achieve the above object, the present invention adopts the following technical solutions:

[0010] A wafer conveying and collecting device comprises a box body and side plates, both sides of the box body are rotatably connected to the side plates, a staggering mechanism is connected to the box body, the staggering mechanism comprises a support rod, the inner side of the box body is fixedly connected to the support rod, a plurality of positive slide rails are installed on the support rod, two adjacent positive slide rails are in opposite directions, side slide rails are installed on the inner wall of the side plate, the side slide rails are used to dock and abut with the positive slide rails in the same direction, a telescopic component is slidably connected to the side slide rails and the positive slide rails in the same plane, a clamping frame is connected to the telescopic component, a wafer is placed on the clamping frame, and a pushing component for toggling the telescopic component to move is connected to the box body;

[0011] The box body is connected to an ejection mechanism, and the ejection mechanism includes a moving bar, the moving bar is slidably connected to the box body, and the box body is connected to a driving assembly for driving the moving bar to slide up and down, and the moving bar is provided with two pairs of telescopic bars, the two pairs of telescopic bars are arranged in a diamond shape, and the two pairs of telescopic bars are rotatably connected to each other, and the moving bar is connected to a concession assembly, and one of the rotating shafts in the middle position of the two pairs of telescopic bars is connected to the concession assembly, and a pair of second electric push rods are installed on the moving bar, and the telescopic ends of a pair of second electric push rods respectively conflict with the telescopic bars at both ends of the moving bar, and a push block is rotatably connected to the other rotating shaft in the middle position of the two pairs of telescopic bars, and the push block is used to be connected to the telescopic assembly, and a fifth spring is installed between a pair of rotating shafts in the middle position of the two pairs of telescopic bars.

[0012] Preferably, the telescopic assembly includes a primary slide bar, the side slide rails and the positive slide rails on the same plane are slidably connected with a primary slide bar, the primary slide bar is slidably connected with multiple secondary slide bars, the internal secondary slide bar is slidably connected with an inner slide bar, a fixed sleeve is fixedly connected to the clamping frame, the inner slide bar is fixed to the fixed sleeve, a second spring is installed between the inner slide bar and the primary slide bar, the side slide rails and the positive slide rails on the same plane are slidably connected with a first spring, and two ends of the first spring respectively contact the primary slide bar and the side slide rail.

[0013] Preferably, the pushing assembly includes a control bar, a pair of control bars are rotatably connected to the bottom of the box body, the control bar is provided with a control groove, a first electric push rod is installed on the box body, a control block is installed at the telescopic end of the first electric push rod, a control column is installed on the control block, the control column is slidably connected to the control bar through the control groove, a toggle bar is installed on the control bar, and the primary sliding rod on the same side is installed with the control column, and the toggle bar conflicts with the control column.

[0014] Preferably, the driving assembly includes a guide rod, the guide rod is installed on the box body, the movable bar is slidably connected to the guide rod, the box body is rotatably connected with a screw rod, the box body is installed with a third motor, one end of the screw rod is installed on the output shaft of the third motor, the screw rod is threadedly connected with a slider, and one end of the slider is fixed to the movable bar.

[0015] Preferably, the clamping frame is connected to a clamping mechanism, and the clamping mechanism includes a fixed wheel, a fixed wheel is rotatably connected to the clamping frame, a pair of symmetrical clamping rods are rotatably connected to the clamping frame, and a movable wheel is rotatably connected to the clamping rod, the fixed wheel and the movable wheel are both made of rubber material, and the rims of the fixed wheel and the movable wheel are in contact with the edge of the wafer, a fourth spring is installed between the pair of clamping rods, a card block is slidably connected inside the fixed sleeve, a tension spring is installed between the card block and the inner secondary sliding rod, one end of the card block is in contact with the clamping rod, and the end of the clamping rod that is in contact with the card block is in an inclined shape.

[0016] Preferably, the support rod is located between two adjacent positive slide rails and is also connected to a telescopic assembly, the telescopic assembly is also connected to a clamping frame, and the primary slide rod in the telescopic assembly is fixedly connected to the support rod.

[0017] Preferably, the box body is connected to an unfolding mechanism, the unfolding mechanism includes a transmission rod, the box body is rotatably connected to the transmission rod, a pair of coaxial worm gears are installed on the transmission rod, a first motor is installed on the box body, one end of the transmission rod is installed on the output shaft of the first motor, a worm gear segment is installed on the side panel, the threads of the pair of worm gears are opposite, and the pair of worm gear segments are respectively engaged with the worm gears on the same side.

[0018] Preferably, a protective mechanism is connected to the side panel, and the protective mechanism includes a protective plate, and the side panel is slidably connected to the protective plate, and the protective plate is provided with a toothed section, and the side panel is rotatably connected to a gear, and the gear is meshed with the toothed section, and a second motor is installed on the side panel, and the gear is installed on the output shaft of the second motor.

[0019] Preferably, a pair of abutment wheels are rotatably connected to the push block, the pair of abutment wheels abut against the telescopic strips on both sides respectively, and the abutment wheels are rubber wheels.

[0020] Preferably, the concession assembly includes a moving block, the moving bar is slidably connected with the moving block, a third spring is installed between the moving block and the moving bar, and one of the rotating shafts at the middle position of the two pairs of telescopic bars is rotatably connected to the moving block.

[0021] Compared with the prior art, the present invention provides a wafer conveying and collecting device, which has the following beneficial effects:

[0022] 1. The wafer conveying and collecting device, during the wafer conveying process, moves the moving bar to one of the clamping frames, starts a pair of second electric push rods, contracts the pair of second electric push rods, thereby pushing the two pairs of telescopic bars to rotate and deform toward the middle, pushing the push block to approach the clamping frame, and pushing the clamping frame to extend. When the clamping frame extends, the two moving wheels unfold, and the wafer can be placed on the clamping frame. The clamping frame is retracted, and the moving wheels cooperate with the fixed wheels to fix the wafer. By changing the position of the moving bar, it is convenient to push different clamping frames to extend, thereby facilitating the collection and placement of wafers.

[0023] 2. The wafer conveying and collecting device starts the second motor to drive the gear to rotate, thereby driving the protective plate to slide outward through the tooth groove section. A pair of protective plates contact each other, thereby facilitating the closure of the box body, thereby protecting the wafers and facilitating transportation and transfer. When the wafers need to be observed, the box body is placed horizontally and the first motor is started to drive the transmission rod to rotate, and a pair of worms rotate to drive the worm gear section to rotate, so that a pair of side panels are rotated outward, thereby exposing the clamping frame, which is convenient for observing the wafers.

[0024] 3. The wafer conveying and collecting device starts the first electric push rod before the side panel is unfolded. The first electric push rod contracts, thereby pulling the control block, sliding inside the control groove through the control column, pulling the control bar to unfold outward, thereby driving the toggle bar to slide outward, and the toggle bar moves away from the control column. The first spring contracts, pulling the primary slide bar to slide into the inside of the side slide rail, and the clamping frame rotates. When the side panel is unfolded, the side slide rail is separated from the positive slide rail, thereby driving the two adjacent clamping frames to separate, thereby increasing the distance between the wafers, which is convenient for removing the wafers. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 A three-dimensional view of a wafer conveying and collecting device proposed by the present invention;

[0026] Figure 2 A view of a worm connecting structure of the present invention;

[0027] Figure 3 A view of a first electric push rod connection structure of the present invention;

[0028] Figure 4A view of a gear connection structure of the present invention;

[0029] Figure 5 A view of a control strip connection structure of the present invention;

[0030] Figure 6 A view of a third motor connection structure of the present invention;

[0031] Figure 7 A view of a side panel connection structure of the present invention;

[0032] Figure 8 A view of the side slide rail connection structure of the present invention;

[0033] Fig. 9 A view of a screw rod connection structure of the present invention;

[0034] Fig.10 A view of a movable bar connection structure of the present invention;

[0035] Fig.11 A view of a moving block connection structure of the present invention;

[0036] Fig.12 A view of a control column connection structure of the present invention;

[0037] Fig.13 It is a view of the fixing sleeve connection structure of the present invention.

[0038] In the figure: 1, box body; 2, unfolding mechanism; 21, side plate; 22, first motor; 23, worm gear segment; 24, worm; 25, transmission rod; 3, staggering mechanism; 31, clamping frame; 32, side slide rail; 33, first spring; 34, positive slide rail; 35, pushing assembly; 351, first electric push rod; 352, control block; 353, control bar; 354, toggle bar; 355, control slot; 356, control column; 36, telescopic assembly; 361, fixing sleeve; 362, primary slide rod; 363, secondary slide rod; 364, second spring; 365, inner slide rod; 37. Support rod; 4. Protection mechanism; 41. Protection plate; 42. Gear; 43. Second motor; 44. Toothed section; 5. Wafer; 6. Ejection mechanism; 61. Guide rod; 62. Screw rod; 63. Slider; 64. Moving bar; 65. Third motor; 66. Telescopic bar; 67. Concession assembly; 671. Moving block; 672. Third spring; 68. Second electric push rod; 69. Push block; 7. Clamping mechanism; 71. Clamping rod; 72. Fixed wheel; 73. Moving wheel; 74. Block; 75. Tension spring; 76. Fourth spring; 8. Resistance wheel; 9. Fifth spring. DETAILED DESCRIPTION

[0039] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0040] In the description of the present invention, it is necessary to understand that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0041] Embodiment 1:

[0042] Reference Figure 2 , Figure 3 , Figure 4 and Figure 7 The cam 32 is a kind of wafer conveying and collecting device, comprising a box body 1 and a side plate 21, both sides of the box body 1 are rotatably connected with the side plates 21, and the box body 1 is connected with a staggered mechanism 3, and the staggered mechanism 3 includes a support rod 37, and the inner side of the box body 1 is fixedly connected with a support rod 37, and a plurality of positive slide rails 34 are installed on the support rod 37, and two adjacent positive slide rails 34 are in opposite directions. A side slide rail 32 is installed on the inner wall of the side plate 21, and the side slide rail 32 is used to dock and abut with the positive slide rail 34 in the same direction. A telescopic component 36 is slidably connected to the side slide rail 32 and the positive slide rail 34 in the same plane, and a clamping frame 31 is connected to the telescopic component 36, and a wafer 5 is placed on the clamping frame 31. A pushing component 35 for moving the telescopic component 36 is connected to the box body 1, so that the clamping frame 31 can be driven to slide onto the side slide rails 32 on both sides, so that it is convenient to drive the two adjacent clamping frames 31 to separate when the side plate 21 is unfolded, so as to facilitate the wafer 5.

[0043] In the present invention, the pushing component 35 includes a control bar 353, a pair of control bars 353 are rotatably connected to the bottom of the box body 1, and a control groove 355 is provided on the control bar 353. A first electric push rod 351 is installed on the box body 1, and a control block 352 is installed at the telescopic end of the first electric push rod 351. A control column 356 is installed on the control block 352. The control column 356 is slidably connected to the control bar 353 through the control groove 355. A toggle bar 354 is installed on the control bar 353, and the control column 356 is installed on the primary slide bar 362 on the same side. The toggle bar 354 conflicts with the control column 356, so as to facilitate pushing the clamping frame 31 to move to one side of the side panel 21 to facilitate its unfolding.

[0044] In the present invention, the support rod 37 is located between two adjacent positive slide rails 34 and is also connected to a telescopic component 36, and the telescopic component 36 is also connected to a clamping frame 31. The primary slide rod 362 in the telescopic component 36 is fixedly connected to the support rod 37, thereby facilitating increasing the spacing between the clamping frames 31 after expansion.

[0045] Embodiment 2:

[0046] Based on Example 1, Figure 1 , Figure 3 , Figure 5 , Figure 6 , Figure 8 , Fig. 9 , Fig.10 , Fig.11 , Fig.12 and Fig.13 A wafer conveying and collecting device, wherein a box body 1 is connected to an ejection mechanism 6, the ejection mechanism 6 comprises a moving bar 64, the moving bar 64 is slidably connected to the box body 1, a driving component for driving the moving bar 64 to slide up and down is connected to the box body 1, two pairs of telescopic bars 66 are arranged in a diamond shape, the two pairs of telescopic bars 66 are rotatably connected to each other, a concession component 67 is connected to the moving bar 64, one of the rotating shafts in the middle of the two pairs of telescopic bars 66 is connected to the concession component 67 A pair of second electric push rods 68 are installed on the moving bar 64, and the telescopic ends of the pair of second electric push rods 68 respectively contact the telescopic bars 66 at the two ends of the moving bar 64, and a push block 69 is rotatably connected to another rotating shaft in the middle of the two pairs of telescopic bars 66. The push block 69 is used to connect with the telescopic component 36. A fifth spring 9 is installed between a pair of rotating shafts in the middle of the two pairs of telescopic bars 66, so that it is convenient to push the clamping frame 31 to extend by pushing the telescopic bars 66 to deform. When the clamping frame 31 is extended, it is convenient to place the wafer 5.

[0047] In the present invention, the telescopic component 36 includes a primary slide bar 362, and the primary slide bar 362 is slidably connected to the side slide rail 32 and the positive slide rail 34 on the same plane. The primary slide bar 362 is slidably connected to multiple secondary slide bars 363, and the internal secondary slide bar 363 is slidably connected to the inner slide bar 365. The clamping frame 31 is fixedly connected to a fixed sleeve 361, and the inner slide bar 365 is fixed on the fixed sleeve 361. A second spring 364 is installed between the inner slide bar 365 and the primary slide bar 362, and the side slide rail 32 and the positive slide rail 34 on the same plane are slidably connected to the first spring 33. The two ends of the first spring 33 respectively contact the primary slide bar 362 and the side slide rail 32, and the telescopic component 36 can limit the clamping frame 31 from detaching.

[0048] In the present invention, the driving assembly includes a guide rod 61, the guide rod 61 is installed on the box body 1, the moving bar 64 is slidably connected to the guide rod 61, the box body 1 is rotatably connected with a screw rod 62, the box body 1 is installed with a third motor 65, one end of the screw rod 62 is installed on the output shaft of the third motor 65, the screw rod 62 is threadedly connected with a slider 63, and one end of the slider 63 is fixed on the moving bar 64, so as to facilitate the selection of pushing the appropriate clamping frame 31 to extend according to needs.

[0049] In the present invention, a clamping mechanism 7 is connected to the clamping frame 31, and the clamping mechanism 7 includes a fixed wheel 72, a fixed wheel 72 is rotatably connected to the clamping frame 31, a pair of symmetrical clamping rods 71 ​​are rotatably connected to the clamping frame 31, and a moving wheel 73 is rotatably connected to the clamping rod 71. The fixed wheel 72 and the moving wheel 73 are both made of rubber material, and the rims of the fixed wheel 72 and the moving wheel 73 are in contact with the edge of the wafer 5. A fourth spring 76 is installed between the pair of clamping rods 71, and a block 74 is slidably connected inside the fixed sleeve 361. A tension spring 75 is installed between the block 74 and the inner secondary slide bar 363, one end of the block 74 is in contact with the clamping rod 71, and the end of the clamping rod 71 that is in contact with the block 74 is in an inclined shape, so as to facilitate driving the moving wheel 73 to cooperate with the fixed wheel 72 to clamp and fix the wafer 5.

[0050] In the present invention, a pair of abutment wheels 8 are rotatably connected to the push block 69 , and the pair of abutment wheels 8 abut against the telescopic bars 66 on both sides respectively. The abutment wheels 8 are rubber wheels, thereby avoiding damage to the wafer 5 .

[0051] In the present invention, the concession component 67 includes a moving block 671, the moving block 671 is slidably connected to the moving bar 64, a third spring 672 is installed between the moving block 671 and the moving bar 64, and one of the rotating shafts in the middle position of the two pairs of telescopic bars 66 is rotatably connected to the moving block 671, thereby avoiding damage to the clamping frame 31 when it is hit.

[0052] Embodiment 3:

[0053] Based on Example 2, Figure 2 , Figure 3 and Figure 4 A wafer conveying and collecting device, a box body 1 is connected to an unfolding mechanism 2, the unfolding mechanism 2 includes a transmission rod 25, the box body 1 is rotatably connected to the transmission rod 25, a pair of coaxial worms 24 are installed on the transmission rod 25, a first motor 22 is installed on the box body 1, one end of the transmission rod 25 is installed on the output shaft of the first motor 22, a worm gear segment 23 is installed on the side plate 21, the threads of the pair of worms 24 are opposite, and the pair of worm gear segments 23 are respectively engaged with the worms 24 on the same side, so as to facilitate driving a pair of side plates 21 to unfold at the same time.

[0054] In the present invention, a protective mechanism 4 is connected to the side panel 21, and the protective mechanism 4 includes a protective plate 41. The protective plate 41 is slidably connected to the side panel 21, and a toothed section 44 is provided on the protective plate 41. A gear 42 is rotatably connected to the side panel 21, and the gear 42 is meshed with the toothed section 44. A second motor 43 is installed on the side panel 21, and the gear 42 is installed on the output shaft of the second motor 43. During the transfer process, the protective plate 41 is closed to effectively prevent dust from entering.

[0055] Working principle: During the conveying process of the wafer 5, the wafer 5 can be clamped by the clamping frame 31, so that the box 1 is connected to the power supply, and the third motor 65 is started. The third motor 65 rotates, thereby driving the screw rod 62 to rotate, and the screw rod 62 drives the slider 63 to slide up and down, thereby driving the moving bar 64 to slide up and down, and the guide rod 61 plays a guiding role, so that the moving bar 64 moves to one of the clamping frames 31, and a pair of second electric push rods 68 are started. The pair of second electric push rods 68 are contracted, thereby pushing the two pairs of telescopic bars 66 to rotate and deform toward the middle, pushing the push block 69 to approach the clamping frame 31, and the contact wheel 8 on the push block 69 contacts and deforms with the telescopic bar 66, thereby ensuring that the push block 69 points to the clamping frame 31, and the fifth spring 9 is stretched, and the push block 69 pushes the fixed sleeve 361 to drive the clamping frame 31 to slide outward. When the clamping frame 31 is pushed to slide, the telescopic bar 66 is driven to slide, thereby pushing the moving block 671 to slide When the second electric push rod 68 is retracted and the telescopic bar 66 and the secondary slide bar 363 are reset, the clamping frame 31 is retracted and the fourth spring 76 pushes the moving wheel 73 to clamp inwards, thereby cooperating with the fixed wheel 72 to fix the wafer 5. By changing the position of the moving bar 64, it is convenient to push different clamping frames 31 to extend, so as to facilitate the collection and placement of the wafer 5.

[0056] The second motor 43 is started to drive the gear 42 to rotate, thereby driving the protective plate 41 to slide outward through the tooth groove section 44, and the pair of protective plates 41 are in contact with each other, so that the box body 1 is conveniently closed, thereby protecting the wafer 5 and facilitating transportation and transfer. When the wafer 5 needs to be observed, the box body 1 is placed horizontally, and the first motor 22 is started to drive the transmission rod 25 to rotate, and the pair of worms 24 rotate, thereby driving the worm gear section 23 to rotate, so that the pair of side plates 21 are rotated outward, so that the clamping frame 31 is exposed, and it is convenient to observe the wafer 5;

[0057] Before the side panel 21 is unfolded, the first electric push rod 351 is started and the first electric push rod 351 contracts, thereby pulling the control block 352, sliding inside the control groove 355 through the control column 356, pulling the control bar 353 to unfold outward, thereby driving the toggle bar 354 to slide outward, and the toggle bar 354 moves away from the control column 356. The first spring 33 contracts and pulls the primary slide bar 362 to slide into the inside of the side slide rail 32, and the clamping frame 31 rotates. When the side panel 21 is unfolded, the side slide rail 32 is separated from the positive slide rail 34, thereby driving the two adjacent clamping frames 31 to separate, thereby increasing the distance between the wafers 5, which is convenient for taking out and observing the wafers 5.

[0058] The above are only preferred specific implementation modes of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical solutions and inventive concepts of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A wafer conveying and collecting device, comprising a box body (1) and a side plate (21), wherein both sides of the box body (1) are rotatably connected to the side plate (21), characterized in that: The box body (1) is connected to a staggered mechanism (3), the staggered mechanism (3) comprises a support rod (37), the inner side of the box body (1) is fixedly connected to the support rod (37), a plurality of positive slide rails (34) are installed on the support rod (37), two adjacent positive slide rails (34) are in opposite directions, a side slide rail (32) is installed on the inner wall of the side plate (21), the side slide rail (32) is used to dock and abut with the positive slide rail (34) in the same direction, a telescopic component (36) is slidably connected to the side slide rail (32) and the positive slide rail (34) in the same plane, the telescopic component (36) is connected to a clamping frame (31), a wafer (5) is placed on the clamping frame (31), and a pushing component (35) for moving the telescopic component (36) is connected to the box body (1); The box body (1) is connected to an ejection mechanism (6), the ejection mechanism (6) comprises a moving bar (64), the moving bar (64) is slidably connected to the box body (1), the box body (1) is connected to a driving component for driving the moving bar (64) to slide up and down, the moving bar (64) is provided with two pairs of telescopic bars (66), the two pairs of telescopic bars (66) are arranged in a diamond shape, the two pairs of telescopic bars (66) are rotatably connected to each other, the moving bar (64) is connected to a concession component (67), the two pairs of telescopic bars (66) are arranged in a diamond shape, and the two pairs of telescopic bars (66) are rotatably connected to each other. 6) One of the rotating shafts at the middle position is connected to the concession assembly (67), and a pair of second electric push rods (68) are installed on the moving bar (64). The telescopic ends of the pair of second electric push rods (68) respectively contact the telescopic bars (66) at both ends of the moving bar (64). A push block (69) is rotatably connected to the other rotating shaft at the middle position of the two pairs of telescopic bars (66). The push block (69) is used to connect with the telescopic assembly (36), and a fifth spring (9) is installed between the pair of rotating shafts at the middle position of the two pairs of telescopic bars (66).

2. The wafer conveying and collecting device according to claim 1, characterized in that: The telescopic assembly (36) includes a primary slide bar (362), the side slide rail (32) and the positive slide rail (34) on the same plane are slidably connected with the primary slide bar (362), the primary slide bar (362) is slidably connected with multiple secondary slide bars (363), the internal secondary slide bar (363) is slidably connected with an inner slide bar (365), the clamping frame (31) is fixedly connected with a fixed sleeve (361), the inner slide bar (365) is fixed on the fixed sleeve (361), a second spring (364) is installed between the inner slide bar (365) and the primary slide bar (362), the side slide rail (32) and the positive slide rail (34) on the same plane are slidably connected with the first spring (33), and the two ends of the first spring (33) are respectively in contact with the primary slide bar (362) and the side slide rail (32).

3. The wafer conveying and collecting device according to claim 2, characterized in that: The pushing assembly (35) comprises a control bar (353), a pair of control bars (353) are rotatably connected to the bottom of the box body (1), a control groove (355) is provided on the control bar (353), a first electric push rod (351) is installed on the box body (1), a control block (352) is installed at the telescopic end of the first electric push rod (351), a control column (356) is installed on the control block (352), the control column (356) is slidably connected to the control bar (353) through the control groove (355), a toggle bar (354) is installed on the control bar (353), and the control column (356) is installed on the primary slide bar (362) on the same side, and the toggle bar (354) conflicts with the control column (356).

4. The wafer conveying and collecting device according to claim 1, characterized in that: The driving assembly comprises a guide rod (61), the guide rod (61) is installed on the box body (1), the moving bar (64) is slidably connected to the guide rod (61), the box body (1) is rotatably connected with a screw rod (62), the box body (1) is installed with a third motor (65), one end of the screw rod (62) is installed on the output shaft of the third motor (65), the screw rod (62) is threadedly connected with a slider (63), and one end of the slider (63) is fixed on the moving bar (64).

5. The wafer conveying and collecting device according to claim 2, characterized in that: The clamping frame (31) is connected to a clamping mechanism (7), the clamping mechanism (7) comprises a fixed wheel (72), the clamping frame (31) is rotatably connected to the fixed wheel (72), the clamping frame (31) is rotatably connected to a pair of symmetrical clamping rods (71), the clamping rods (71) are rotatably connected to a moving wheel (73), the fixed wheel (72) and the moving wheel (73) are both made of rubber, and the fixed wheel (72) and the moving wheel (73) are rotatably connected to the fixed wheel (72). The rim of the moving wheel (73) contacts the edge of the wafer (5), a fourth spring (76) is installed between a pair of the clamping rods (71), a block (74) is slidably connected inside the fixed sleeve (361), a tension spring (75) is installed between the block (74) and the inner secondary slide rod (363), one end of the block (74) contacts the clamping rod (71), and the end of the clamping rod (71) that contacts the block (74) is in the shape of an inclined surface.

6. The wafer conveying and collecting device according to claim 2, characterized in that: The support rod (37) is located between two adjacent positive slide rails (34) and is also connected to a telescopic assembly (36). The telescopic assembly (36) is also connected to a clamping frame (31). The primary slide rod (362) in the telescopic assembly (36) is fixedly connected to the support rod (37).

7. The wafer conveying and collecting device according to claim 1, characterized in that: The box body (1) is connected to an unfolding mechanism (2), the unfolding mechanism (2) comprising a transmission rod (25), the box body (1) is rotatably connected to the transmission rod (25), a pair of coaxial worms (24) are mounted on the transmission rod (25), a first motor (22) is mounted on the box body (1), one end of the transmission rod (25) is mounted on the output shaft of the first motor (22), a worm gear section (23) is mounted on the side plate (21), the threads of the pair of worms (24) are opposite, and the pair of worm gear sections (23) are respectively meshed with the worms (24) on the same side.

8. The wafer conveying and collecting device according to claim 1, characterized in that: The side plate (21) is connected to a protection mechanism (4), the protection mechanism (4) comprising a protection plate (41), the side plate (21) is slidably connected to the protection plate (41), the protection plate (41) is provided with a tooth groove section (44), the side plate (21) is rotatably connected to a gear (42), the gear (42) is meshed with the tooth groove section (44), a second motor (43) is mounted on the side plate (21), and the gear (42) is mounted on an output shaft of the second motor (43).

9. The wafer conveying and collecting device according to claim 1, characterized in that: A pair of abutment wheels (8) are rotatably connected to the push block (69), and the pair of abutment wheels (8) respectively abut against the telescopic strips (66) on both sides, and the abutment wheels (8) are rubber wheels.

10. The wafer conveying and collecting device according to claim 1, characterized in that: The concession assembly (67) comprises a moving block (671), the moving bar (64) is slidably connected with the moving block (671), a third spring (672) is installed between the moving block (671) and the moving bar (64), and one of the rotating shafts at the middle position of the two pairs of telescopic bars (66) is rotatably connected to the moving block (671).

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