Display substrate bearing device, display substrate placing and releasing method and curing device

Abstract

A display substrate bearing device, a display substrate placing and releasing method and a curing device are used for manufacturing a display panel, and the display substrate bearing device comprises: an air floating platform configured to bear a display substrate in an air floating manner; the lifting rod bracket is parallel to the air floating platform; the lifting rod is arranged at the edge of the lifting rod support and is configured to support the edge of the display substrate and transfer the display substrate, and the lifting rod support is configured to move relative to the air floating platform in the direction perpendicular to the air floating platform so that the lifting rod can convey the display substrate to the air floating platform; or the display substrate is taken out from the air floating platform.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor equipment, and in particular, to a display substrate carrying device, a display substrate placement and release method, and a curing device. Background Art

[0002] In the preparation process of semiconductor devices such as OLED display panels, a pixel light-emitting layer, a liquid optical clear resin layer, etc. can be formed on an OLED display substrate by various methods such as inkjet printing and inkjet coating. The OLED display substrate then needs to be transferred to a curing device for curing to achieve a stable structure of the OLED display substrate layer. Summary of the invention

[0003] The present disclosure provides a display substrate carrying device for manufacturing a display panel, comprising:

[0004] An air floating platform configured to carry a display substrate in an air floating manner;

[0005] A lifting rod support is arranged parallel to the air floating platform; and

[0006] A lifting rod is disposed at an edge of the lifting rod bracket and is configured to support an edge of the display substrate and transport the display substrate.

[0007] The lifting rod support is configured to move relative to the air floating platform in a direction perpendicular to the air floating platform so that the lifting rod transfers the display substrate to the air floating platform or takes out the display substrate from the air floating platform.

[0008] In some embodiments, the lifting rod comprises:

[0009] A supporting lifting rod is arranged at the edge of the lifting rod bracket and is configured to support the display substrate. The supporting lifting rod includes:

[0010] A supporting lifting rod body, detachably disposed at an edge of the lifting rod bracket; and

[0011] A support rod is arranged on the supporting lifting rod body, is arranged perpendicular to the supporting lifting rod body, and is configured to support the edge of the display substrate.

[0012] Wherein, a notch is provided on the edge of the air floating platform, configured to allow the free end of the support rod away from the supporting lifting rod body to pass through.

[0013] In some embodiments, the support rod is in the shape of a cylindrical rod as a whole, and the free end of the support rod away from the supporting lifting rod body is spherical.

[0014] In some embodiments, there are multiple supporting lifting rods, which are evenly arranged along the edge of the lifting rod bracket.

[0015] In some embodiments, the lifting rod comprises:

[0016] A limiting lifting rod is arranged at a corner of the lifting rod bracket and is configured to limit the position of the display substrate. The limiting lifting rod includes:

[0017] A limiting lifting rod body is detachably arranged at a corner of the lifting rod bracket;

[0018] The limiting member is detachably mounted on the limiting lifting rod body and is configured to limit the corner position of the display substrate.

[0019] In some embodiments, the stopper comprises:

[0020] a right-angle bending member having two adjacent right-angle sides, used to define the positions of the adjacent right-angle sides at the corner of the display substrate; and

[0021] a support pad, disposed at the bending portion of the right-angle bending member, configured to support the corner of the display substrate,

[0022] Wherein, a notch is provided at a corner of the air floating platform, configured to allow the support pad to pass through.

[0023] In some embodiments, the number of the limiting lifting rods is four, which are respectively arranged at four corners of the lifting rod bracket.

[0024] In some embodiments, the air flotation platform comprises:

[0025] A supporting platform, on which a plurality of jetting areas are evenly arranged; and

[0026] The gas distribution device is arranged on one side of the support platform and is configured to provide gas to the multiple jetting areas so that the jetting pressures of the multiple jetting areas are balanced.

[0027] In some embodiments, the display substrate supporting device comprises:

[0028] a carrier, configured to carry the air-floating platform and the lifting rod bracket; and

[0029] A support column is disposed between the carrier and the air floating platform and is configured to support the air floating platform.

[0030] Wherein, the lifting rod bracket is arranged between the carrier and the air floating platform, the lifting rod bracket has a hollow area, and the support column passes through the hollow area.

[0031] Some embodiments of the present disclosure provide a method for placing a display substrate, using the display substrate carrying device described in the above embodiments, characterized in that the method for placing the display substrate comprises the following steps:

[0032] The robot arm transfers the display substrate to above the air floating platform;

[0033] The lifting rod bracket is close to the air floating platform so that the lifting rod passes through the edge of the air floating platform to support and position the display substrate;

[0034] The display substrate is separated from the mechanical arm, and the lifting rod support is away from the air floating platform so that the lifting rod carries the display substrate close to the air floating platform until the display substrate is separated from the lifting rod support and is air-floatingly supported by the air floating platform.

[0035] Some embodiments of the present disclosure provide a display substrate releasing method, using the display substrate carrying device described in the above embodiments, characterized in that the display substrate releasing method comprises the following steps:

[0036] The lifting rod bracket is close to the air floating platform so that the lifting rod passes through the edge of the air floating platform to support the display substrate and carry the display substrate away from the air floating platform;

[0037] The robot arm moves to the top of the air floating platform to grab the display substrate, and carries the display substrate to the next process;

[0038] The lifting rod bracket is away from the air floating platform so that the lifting rod is reset.

[0039] Some embodiments of the present disclosure provide a curing device, comprising the display substrate supporting device described in the aforementioned embodiments.

[0040] The above solution of the embodiment of the present disclosure can have the following beneficial effects:

[0041] The lifting rod is arranged at the edge of the lifting rod bracket, so that the lifting rod supports the edge of the display substrate and transfers it to the air floating platform, avoiding the through hole designed in the air floating platform for the lifting rod to pass through, and improving the defect of Pin Mura caused by the through hole in the related art. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] The drawings herein are incorporated into the specification and constitute a part of the specification, showing embodiments consistent with the present disclosure, and together with the specification, are used to explain the principles of the present disclosure. Obviously, the drawings described below are only some embodiments of the present disclosure, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work. In the drawings:

[0043] Figure 1It is a structural schematic diagram of a display substrate carrying device in the related art;

[0044] Figure 2 A structural schematic diagram of a carrier device in the related art from another perspective;

[0045] Figure 3 A schematic diagram of the structure of a display substrate carrying device provided in some embodiments of the present disclosure;

[0046] Figure 4 A schematic structural diagram of a display substrate carrying device from another perspective provided in some embodiments of the present disclosure;

[0047] Figure 5 for Figure 3 A magnified schematic diagram of the middle region M;

[0048] Figure 6 for Figure 3 An enlarged schematic diagram of the middle support lifting rod;

[0049] Figure 7 for Figure 3 An enlarged schematic diagram of the middle limit lifting rod;

[0050] Figure 8 for Figure 3 Schematic diagram of the structure of the support platform in the medium air floating platform. DETAILED DESCRIPTION

[0051] In order to make the purpose, technical solutions and advantages of the present disclosure clearer, the present disclosure will be further described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present disclosure, rather than all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0052] The terms used in the embodiments of the present disclosure are only for the purpose of describing specific embodiments, and are not intended to limit the present disclosure. The singular forms "a", "said" and "the" used in the embodiments of the present disclosure and the appended claims are also intended to include plural forms, unless the context clearly indicates other meanings, and "multiple" generally includes at least two.

[0053] It should be understood that the term "and / or" used in this article is only a description of the association relationship of associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship.

[0054] It should be understood that although the terms first, second, third, etc. may be used to describe the embodiments of the present disclosure, they should not be limited to these terms.

[0055] It should also be noted that the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a product or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such product or device. In the absence of more restrictions, the elements defined by the sentence "comprises a" do not exclude the presence of other identical elements in the product or device including the elements.

[0056] In the related art, Figure 1 is a schematic structural diagram of a display substrate carrying device in the related art, Figure 1 This is a top-down view. Figure 2 is a structural schematic diagram of a carrying device in the related art from another perspective, Figure 2 is a view from an upward angle. Figure 1 and Figure 2 As shown, the display substrate carrying device in the related art is used for a curing device. In the manufacturing process of a display panel, such as an OLED display panel, after a printed coating, such as a pixel light-emitting layer, a liquid optical clear resin layer, etc., is formed on the display substrate by using processes such as inkjet printing, the display substrate needs to be transferred to a curing device to cure the printed display substrate so that the properties of the printed coating are stable.

[0057] The display substrate after inkjet printing is transferred to the curing device by the robot arm. Specifically, the display substrate with the printed coating is transferred to the top of the display substrate carrying device 1 by the robot arm. The support lifting rod 3 rises relative to the air floating platform 2, passes through the through hole on the air floating platform 2, and receives the display substrate 4 transferred by the robot arm. The support lifting rod 3 is arranged in an array on the lifting rod bracket 6. When the support lifting rod 3 carries the display substrate 4, the display substrate 4 is carried in an array-arranged point support manner. Then the support lifting rod 3 descends with the display substrate 4, and the display substrate 4 is transferred to be supported by the air floating platform 2. The free end of the support lifting rod 3 is lower than the upper surface of the air floating platform 2.

[0058] In the related art, since the support lifting rod 3 needs to be inserted through the through hole on the air floating platform 2, in order to avoid the support lifting rod 3 directly contacting the inner wall of the through hole to produce fine particles and affect the process, a gas sleeve 5 is added on the ground of the air floating platform 2, which is connected to the gas pipeline 7. The support lifting rod 3 passes through the gas sleeve 5 and is aligned with the through hole on the air floating platform 2. The gas pipeline 7 supplies gas into the gas sleeve 5, so that the support lifting rod 3 does not have physical contact with the inner wall of the gas sleeve 5 and the inner wall of the through hole on the air floating platform 2 during movement.

[0059] In the OLED display panel preparation process, an inkjet printing device is usually arranged on the production line in sequence with a curing device and an automatic optical inspection device. The OLED display panel is transferred between the process equipment including the inkjet printing device, the curing device and the automatic optical inspection device through a robotic arm. It takes a long time for the robotic arm to pick up and place the OLED display panel, and each time it is transferred to the process equipment, an alignment step is required, resulting in low operating efficiency of the OLED display panel preparation process.

[0060] In the related technology, the supporting lifting rod 3 is detachably installed on the lifting rod bracket 6. In order to ensure that the supporting lifting rod 3 is always in a perpendicular state to the lifting rod bracket 6, a gas pipe 8 is arranged at the supporting lifting rod 3 for transmitting gas to the supporting lifting rod 3 and adjusting the supporting lifting rod 3 to always be perpendicular to the lifting rod bracket 6.

[0061] Due to the presence of the through holes on the air flotation platform 2, the gas supplied from the gas pipeline 7 to the gas sleeve 5 is blown to the bottom surface of the display substrate 4 supported by the air flotation platform 2 through the through holes on the air flotation platform 2. Since the display substrate 4 is at a relatively high curing temperature as a whole in the curing device, and the temperature of the gas blown from the through holes on the air flotation platform 2 to the bottom surface of the display substrate 4 supported by the air flotation platform 2 is relatively low, the display panel may have display defects during the curing process, such as Pin Mura.

[0062] In order to overcome the above-mentioned problems, the present disclosure provides a display substrate carrying device for use in the manufacture of display panels, the display substrate carrying device comprising: an air floating platform, configured to carry a display substrate in an air floating manner; a lifting rod bracket, arranged in parallel with the air floating platform; and a lifting rod, arranged at the edge of the lifting rod bracket, configured to support the edge of the display substrate and transport the display substrate, the lifting rod bracket being configured to move relative to the air floating platform in a direction perpendicular to the air floating platform so that the lifting rod transfers the display substrate to the air floating platform, or takes out the display substrate from the air floating platform.

[0063] In the present disclosure, the lifting rod is arranged at the edge of the lifting rod bracket, so that the lifting rod supports the edge of the display substrate and transfers it to the air floating platform, avoiding the through hole in the air floating platform design that allows the lifting rod to pass through, and improving the defect of Pin Mura caused by the through hole in the related art. At the same time, the gas sleeve and its supporting gas pipeline design, as well as the gas transmission pipe design supporting the supporting lifting rod are eliminated, simplifying the product structure and reducing the cost.

[0064] The optional embodiments of the present disclosure are described in detail below with reference to the accompanying drawings.

[0065] Figure 3A schematic diagram of the structure of a display substrate carrying device provided in some embodiments of the present disclosure, wherein Figure 3 This is a top-down perspective view. Figure 4 A schematic structural diagram of a display substrate carrying device from another perspective provided in some embodiments of the present disclosure, Figure 4 This is a picture from an upward perspective. Figure 5 for Figure 3 The enlarged schematic diagram of the middle area M, Figure 6 for Figure 3 An enlarged schematic diagram of the middle support lifting rod. Figure 7 for Figure 3 An enlarged schematic diagram of the middle limit lifting rod.

[0066] like Figures 3 to 7 As shown, some embodiments of the present disclosure provide a display substrate carrying device 100 for manufacturing a display panel. The display substrate carrying device 100 includes: an air floating platform 10 , a lifting rod support 20 and a lifting rod 30 .

[0067] The air flotation platform 10 is configured to carry the display substrate DS in an air flotation manner, for example, a porous ceramic air flotation platform. When the display substrate DS is carried on the air flotation platform 10, gas is uniformly sprayed from the upper surface of the air flotation platform 10 to support the display substrate DS in an air flotation manner. The display substrate DS does not contact the upper surface of the air flotation platform 10, and the air flotation interval is less than 0.4 mm.

[0068] The lifting rod support 20 is arranged in parallel with the air floating platform 10 , and the distance between the lifting rod support 20 and the air floating platform 10 is adjustable to achieve the movement of the lifting rod 30 relative to the air floating platform 10 .

[0069] The lifting rod 30 is arranged at the edge of the lifting rod support 20, and is configured to support the edge of the display substrate DS and transfer the display substrate DS. The lifting rod 30 is arranged along the peripheral edge of the lifting rod support 20, and can receive the display substrate DS from the robot arm in an edge support manner, and transfer the display substrate DS to the air floating platform 10.

[0070] The lifting rod support 20 is configured to move relative to the air floating platform 10 in a direction perpendicular to the air floating platform 10 so that the lifting rod 30 transfers the display substrate DS to the air floating platform 10, or takes out the display substrate 10 from the air floating platform 10. In some embodiments, the position of the air floating platform 10 is fixed, and the lifting rod support 20 can approach or move away from the air floating platform 10 in a direction perpendicular to the air floating platform 10 under the action of the driving device, thereby driving the lifting rod 30 to move in a direction perpendicular to the air floating platform 10 to realize the transportation of the display substrate DS.

[0071] In some embodiments, Figures 3 to 7As shown, the lifting rod 30 includes a supporting lifting rod 31, which is arranged at the edge of the lifting rod bracket 20, for example, at the four edges of the lifting rod bracket 20, and is configured to support the display substrate DS. The supporting lifting rod 31 includes a supporting lifting rod body 311 and a supporting rod 312.

[0072] The supporting lifting rod body 311 is detachably arranged at the edge of the lifting rod bracket 20, for example, it is detachably fastened and installed at the edge of the lifting rod bracket 20 by fastening components such as screws and nuts, so as to ensure that the supporting lifting rod body 311 is perpendicular to the lifting rod bracket 20 and the air floating platform 10. In this way, there is no need to set the air delivery pipe 8 matched with the lifting rod in the related art, the structure is simple, not easy to be damaged, and the manufacturing cost is low.

[0073] The support rod 312 is arranged on the support lifting rod body 311, is arranged perpendicular to the support lifting rod body 311, and is configured to support the edge of the display substrate DS. The support rod 312 supports the edge of the display substrate DS in a contact support manner. The support rod 312 is made of, for example, ESD PEEK material to avoid fine particles generated when the support rod 312 contacts the display substrate DS, causing clean pollution. ESD PEEK is a polyetheretherketone material containing carbon fiber reinforcement material, and has excellent flame retardancy and antistatic properties.

[0074] The air flotation platform 10 is provided with a notch 11 at its edge, configured to allow the free end of the support rod 312 away from the support lifting rod body 311 to pass through. The number of the notches 11 corresponds to the number of the support lifting rods 31, and the position of the notch 11 corresponds to the free end of the support rod 312 of the support lifting rod 31, ensuring that when the support lifting rod 31 moves relative to the air flotation platform 10, the free end of the support rod 312 can pass through the notch 11 without contacting the inner wall of the notch 11.

[0075] In some embodiments, the support rod 312 is in the shape of a cylindrical rod as a whole, and the free end of the support rod 312 away from the support lifting rod body is spherical. In this way, the support rod 312 supports the edge of the display substrate DS in a point support manner. The contact area between the support rod 312 and the display substrate DS is minimized. In addition, the support rod 312 is in a rotationally symmetrical structure as a whole, which increases its robustness when installed on the support lifting rod body 311.

[0076] In some embodiments, the support rod 312 is a cylindrical thin rod, and its contact with the display substrate DS is a line contact.

[0077] In some embodiments, the number of the supporting lifting rods 31 is multiple, and they are evenly arranged along the edge of the lifting rod bracket 20. Specifically, the supporting lifting rods 31 are evenly arranged on each of the four edges of the lifting rod bracket 20.

[0078] In some embodiments, Figure 3 to Figure 4 As shown, the lifting rod 30 includes a limiting lifting rod 32, which is arranged at the corners of the lifting rod bracket 20, for example, at the four corners of the lifting rod bracket 20, and is configured to limit the position of the display substrate DS. The limiting lifting rod 32 includes a limiting lifting rod body 321 and a limiting member 322.

[0079] The limiting lifting rod body 321 is detachably arranged at the corner of the lifting rod bracket 20, for example, it is detachably fastened and installed at the corner of the lifting rod bracket 20 by fastening components such as screws and nuts, so as to ensure that the limiting lifting rod body 321 is perpendicular to the lifting rod bracket 20 and the air floating platform 10. This method has a simple structure, is not easy to be damaged, and has a low manufacturing cost.

[0080] The limiting member 322 is detachably mounted on the limiting lifting rod body 321 and is configured to limit the corner position of the display substrate DS to prevent the display substrate DS from being offset and unable to align with the air floating platform.

[0081] In some embodiments, the limiting lifting rod body 321 can have the same structure as the supporting lifting rod body 311 , which can reduce component molds and reduce manufacturing costs.

[0082] In some embodiments, Figures 3 to 7 As shown, the limiting member 322 includes a right-angle bending member 3221 and a supporting pad 3222 .

[0083] The right-angle bending member 3221 has two adjacent right-angle sides, which are used to define the positions of the adjacent right-angle sides at the corners of the display substrate DS to prevent the display substrate DS from shifting in the horizontal direction.

[0084] The support pad 3222 is disposed at the bending portion of the right-angle bending member 3221 and is configured to support the corner of the display substrate DS. The support pad 3222 is, for example, a plane, and provides surface contact support for the corner of the display substrate DS. In some embodiments, the support pad 3222 is, for example, a convex arc surface, and provides point contact support for the corner of the display substrate DS. The contact area between the support pad 3222 and the display substrate DS is minimized. The support pad 3222 is, for example, made of ESD PEEK material to avoid fine particles generated when the support rod 312 contacts the display substrate DS, causing clean pollution.

[0085] The air flotation platform 10 is provided with a notch 12 at a corner thereof, configured to allow the support pad 3222 to pass through. The position of the notch 12 corresponds to the support pad 3222, ensuring that when the limit lifting rod 32 moves relative to the air flotation platform 10, the support pad 3222 can pass through the notch 12 without contacting the inner wall of the notch 12.

[0086] In some embodiments, there are four limit lifting rods 32, which are respectively disposed at four corners of the lifting rod bracket 20. Accordingly, the four corners of the air floating platform 10 are all provided with notches 12.

[0087] In other embodiments, the number of the limiting lifting rods 32 is two, which are respectively arranged at two diagonal corners of the lifting rod bracket 20 . Correspondingly, the two diagonal corners of the air floating platform 10 are both provided with notches 12 .

[0088] In the display substrate carrying device of the embodiment of the present disclosure, compared with the solution in the related art, the lifting rod is arranged at the edge of the lifting rod bracket, so that the lifting rod supports the edge of the display substrate and transfers it to the air floating platform, avoiding the through hole designed in the air floating platform to allow the lifting rod to pass through, and improving the defect of Pin Mura caused by the through hole in the related art. At the same time, the gas sleeve and its supporting gas pipeline design, as well as the gas transmission pipe design supporting the supporting lifting rod are eliminated, simplifying the product structure and reducing the cost.

[0089] Figure 8 for Figure 3 The structural diagram of the support platform in the medium air floating platform is as follows: Figure 8 As shown, in some embodiments, the air floating platform 10 includes a supporting platform 13 and a gas distribution device 14 .

[0090] The supporting platform 13 is in the shape of a flat plate as a whole, and a plurality of jetting areas are evenly arranged on the supporting platform 13, such as Figure 8 As shown, the top surface of the support platform 13 is divided into a plurality of jet regions, for example, 15 jet regions, which are arranged in a 3×5 layout. Each jet region is densely covered with a plurality of irregularly distributed micron-level jet holes, so that a stable and uniform airflow output can be formed on any jet region.

[0091] The gas distribution device 14 is disposed on one side of the support platform 13 and is connected to the support platform 13 through a gas pipe. The gas distribution device 14 is configured to provide gas to the multiple jet areas so that the jet pressures of the multiple jet areas are balanced, thereby making the entire support platform have a balanced and stable airflow output, and the gas is, for example, an inert gas, such as nitrogen.

[0092] In some embodiments, Figures 3 to 7As shown, the display substrate carrying device 100 includes a carrier and a supporting column 40 .

[0093] The carrier is configured to carry the air floating platform 10 and the lifting rod support 20. In some embodiments, the air floating platform 10 is fixed relative to the carrier, and the lifting rod support 20 can move relative to the carrier and the air floating platform 10 in a direction perpendicular to the air floating platform 10 under the action of the driving device.

[0094] The support column 40 is disposed between the carrier and the air floating platform 10 and is configured to support the air floating platform 10 , so that a predetermined distance is spaced between the carrier and the air floating platform 10 , which serves as a movable space for the lifting rod bracket 20 .

[0095] The lifting rod support 20 is disposed between the carrier and the air floating platform 10 , and the lifting rod support 20 has a hollow area, and the support column 40 passes through the hollow area.

[0096] Some embodiments of the present disclosure provide a method for placing a display substrate, using the display substrate carrying device 100 described in the above embodiments, and the method for placing a display substrate comprises the following steps:

[0097] S110: The robot arm transfers the display substrate to above the air floating platform.

[0098] Specifically, for example, after the inkjet printing process, the display substrate is transferred to the leveling and curing station by a robot arm for the next process. The display substrate after inkjet printing can be picked up by a robot arm and transferred to the top of the air floating platform.

[0099] S120: The lifting rod support is close to the air floating platform so that the lifting rod passes through the edge of the air floating platform to support and position the display substrate.

[0100] Specifically, the driving device drives the lifting rod bracket to move in a direction perpendicular to the air floating platform 10 and close to the air floating platform 10, so that the lifting rod 30 passes through the edge of the air floating platform to support and position the display substrate DS. Specifically, the free end of the support rod 312 of the supporting lifting rod 31 passes through the notch 11 set at the edge of the air floating platform 10, and contacts and supports the display substrate DS, the support pad 3222 of the limiting lifting rod 32 passes through the notch 12 set at the corner of the air floating platform 10, and contacts and supports the display substrate DS, and the right-angle bending piece 3221 of the limiting lifting rod 32 limits the position of the adjacent right-angle sides at the corner of the display substrate DS to avoid the display substrate DS from shifting in the horizontal direction.

[0101] S130: the display substrate is separated from the robot arm, and the lifting rod support is away from the air floating platform so that the lifting rod carries the display substrate close to the air floating platform until the display substrate is separated from the lifting rod support and is air-floatingly supported by the air floating platform.

[0102] Specifically, the robot arm releases the display substrate DS, and the display substrate DS is supported by the lifting rod 30. The driving device drives the lifting rod support to move away from the air floating platform 10 in a direction perpendicular to the air floating platform 10, and the lifting rod 30 carries the display substrate DS downward until the display substrate is supported by the air floating platform 10.

[0103] Some embodiments of the present disclosure provide a display substrate releasing method. The display substrate carrying device described in the above embodiments, the display substrate releasing method comprises the following steps:

[0104] S210: The lifting rod support is close to the air floating platform so that the lifting rod passes through the edge of the air floating platform to support the display substrate and carry the display substrate away from the air floating platform.

[0105] Specifically, the driving device drives the lifting rod bracket 20 to rise, and the lifting rod bracket 20 drives the lifting rod to pass through the edge of the air floating platform 10. Specifically, the free end of the support rod 312 supporting the lifting rod 31 passes through the notch 11 set at the edge of the air floating platform 10, and contacts the supported display substrate DS. The support pad 3222 of the limiting lifting rod 32 passes through the notch 12 set at the corner of the air floating platform 10, and contacts the supported display substrate DS. The further rise of the lifting rod bracket 20 causes the lifting rod 30 to lift the display substrate DS to a predetermined height and detach from the air floating platform 10. In the process of the lifting rod bracket 20 rising, the right-angle bending piece 3221 of the limiting lifting rod 32 always limits the position of the adjacent right-angle sides at the corner of the display substrate DS, so as to avoid the display substrate DS from shifting in the horizontal direction.

[0106] S220: The robot arm moves to the top of the air floating platform to grab the display substrate, and carries the display substrate to the next process.

[0107] Specifically, the robot arm is used to go above the air floating platform, and for example, grasps the display substrate DS by vacuum adsorption or contact lifting, so that the display substrate DS is separated from the lifting pin 30, and carries the display substrate to the next process.

[0108] S230: The lifting rod support moves away from the air floating platform so that the lifting rod is reset.

[0109] Specifically, the driving device drives the lifting rod bracket 20 to descend until the free end of the supporting lifting rod 31 in the lifting rod 30 is lower than the upper surface of the air floating platform 10, and the lifting rod bracket 20 drives the lifting rod 30 to complete the reset.

[0110] Some embodiments of the present disclosure provide a curing device, which includes the display substrate carrying device 100 described in the aforementioned embodiments, and a curing component located above the display substrate carrying device 100, such as a UV curing component or a thermal curing component.

[0111] Finally, it should be noted that the various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other. For the system or device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant parts can be referred to the method part description.

[0112] The above embodiments are only used to illustrate the technical solutions of the present disclosure, rather than to limit them. Although the present disclosure has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present disclosure.

Claims

1. A display substrate carrying device, used for manufacturing a display panel, characterized in that: include: An air floating platform configured to carry a display substrate in an air floating manner; A lifting rod bracket is arranged parallel to the air floating platform; as well as A lifting rod is disposed at an edge of the lifting rod bracket and is configured to support an edge of the display substrate and transport the display substrate. The lifting rod support is configured to move relative to the air floating platform in a direction perpendicular to the air floating platform so that the lifting rod transfers the display substrate to the air floating platform or takes out the display substrate from the air floating platform.

2. The display substrate carrying device according to claim 1, characterized in that: The lifting rod comprises: A supporting lifting rod is arranged at the edge of the lifting rod bracket and is configured to support the display substrate. The supporting lifting rod includes: A supporting lifting rod body, detachably disposed at an edge of the lifting rod bracket; and A support rod is arranged on the supporting lifting rod body, is arranged perpendicular to the supporting lifting rod body, and is configured to support the edge of the display substrate. Wherein, a notch is provided on the edge of the air floating platform, configured to allow the free end of the support rod away from the supporting lifting rod body to pass through.

3. The display substrate carrying device according to claim 2, characterized in that: The support rod is in the shape of a cylindrical rod as a whole, and the free end of the support rod away from the supporting lifting rod body is in a spherical shape.

4. The display substrate carrying device according to claim 2 or 3, characterized in that: The number of the supporting lifting rods is multiple and they are evenly arranged along the edge of the lifting rod bracket.

5. The display substrate carrying device according to claim 1, characterized in that: The lifting rod comprises: A limiting lifting rod is arranged at a corner of the lifting rod bracket and is configured to limit the position of the display substrate. The limiting lifting rod includes: A limiting lifting rod body is detachably arranged at a corner of the lifting rod bracket; The limiting member is detachably mounted on the limiting lifting rod body and is configured to limit the corner position of the display substrate.

6. The display substrate carrying device according to claim 5, characterized in that: The limiting member comprises: a right-angle bending member having two adjacent right-angle sides, used to define the positions of the adjacent right-angle sides at the corner of the display substrate; and a support pad, disposed at the bending portion of the right-angle bending member, configured to support the corner of the display substrate, Wherein, a notch is provided at a corner of the air floating platform, configured to allow the support pad to pass through.

7. The display substrate carrying device according to claim 5 or 6, characterized in that: There are four limit lifting rods, which are respectively arranged at four corners of the lifting rod bracket.

8. The display substrate carrying device according to any one of claims 1 to 3, 5 and 6, characterized in that: The air flotation platform comprises: A supporting platform, on which a plurality of jetting areas are evenly arranged; and The gas distribution device is arranged on one side of the support platform and is configured to provide gas to the multiple jetting areas so that the jetting pressures of the multiple jetting areas are balanced.

9. The display substrate carrying device according to any one of claims 1 to 3, 5 and 6, characterized in that: The display substrate carrying device comprises: a carrier, configured to carry the air-floating platform and the lifting rod bracket; and A support column is disposed between the carrier and the air floating platform and is configured to support the air floating platform. Wherein, the lifting rod bracket is arranged between the carrier and the air floating platform, the lifting rod bracket has a hollow area, and the support column passes through the hollow area.

10. A method for placing a display substrate, using the display substrate carrying device according to any one of claims 1 to 9, characterized in that: The display substrate placement method comprises the following steps: The robot arm transfers the display substrate to above the air floating platform; The lifting rod bracket is close to the air floating platform so that the lifting rod passes through the edge of the air floating platform to support and position the display substrate; The display substrate is separated from the mechanical arm, and the lifting rod support is away from the air floating platform so that the lifting rod carries the display substrate close to the air floating platform until the display substrate is separated from the lifting rod support and is air-floatingly supported by the air floating platform.

11. A display substrate releasing method, using the display substrate carrying device according to any one of claims 1 to 9, characterized in that: The display substrate releasing method comprises the following steps: The lifting rod bracket is close to the air floating platform so that the lifting rod passes through the edge of the air floating platform to support the display substrate and carry the display substrate away from the air floating platform; The robot arm moves to the top of the air floating platform to grab the display substrate, and carries the display substrate to the next process; The lifting rod bracket is away from the air floating platform so that the lifting rod is reset.

12. A curing device, characterized in that: A display substrate supporting device comprising the display substrate supporting device according to any one of claims 1 to 9.

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