Signal transmission circuit applied to multi-cavity semiconductor equipment

Abstract

The invention discloses a signal transmission circuit applied to multi-cavity semiconductor equipment, belongs to the technical field of semiconductor manufacturing, and particularly relates to a signal circuit which is applied to single-point signal transmission and multi-point receiving of the multi-cavity semiconductor equipment and is not influenced by other equipment in a loop. A power supply positive end is connected with a relay A1 end, and a power supply negative end is connected with a relay A2 end, so that a control loop of a signal loop in the power distribution cabinet is formed, closing of a normally-open dry node is controlled through whether a relay coil is electrified or not, and signal transmission in the power distribution cabinet is formed. The problem that single-point signal sending and multi-point receiving are affected by other devices in a loop is solved, and under the condition that only one tail gas treatment device is arranged and faces a plurality of power distribution cabinets, signals of normal operation of the tail gas treatment device are sequentially distributed to a plurality of signal receiving ends; and deviation of signal transmission caused by abnormity of any equipment which transmits signals in the middle is avoided.

Description

Technical Field

[0001] The present invention belongs to the technical field of semiconductor manufacturing, and in particular relates to a signal transmission circuit applied to a multi-chamber semiconductor device. Background Art

[0002] For multi-chamber semiconductor equipment, the process modules configured on the semiconductor equipment can be single-chamber, dual-chamber or multi-chamber according to different customer needs. For example, semiconductor HDP (High-density plasma) equipment, since each chamber of the HDP equipment contains multiple electrical devices such as RPS, RFG, Pump, etc., each chamber has a separate power distribution cabinet; and in the case of multiple power distribution cabinets, there is only one exhaust gas treatment equipment, which faces the problem of how to distribute a signal representing whether the exhaust gas treatment equipment is operating normally to multiple signal receiving ends in turn, and not to cause deviation in signal transmission due to abnormality of any device in the middle of transmitting the signal.

[0003] At present, multi-chamber semiconductor equipment uses the signal loop relay coil in each cabinet to determine the signal transmission. For HDP equipment, if the exhaust gas treatment equipment does not alarm, but when the first power distribution cabinet is powered off, the next power distribution cabinet will not receive the signal of normal operation of the exhaust gas treatment equipment. At this time, the overall system will generate or receive an alarm signal, but in fact, the exhaust gas treatment equipment has not alarmed. If the alarm signal is configured as Error, the HDP equipment will stop working immediately, the cavity will be cut to Error, the wafer will remain in the cavity and the wafer will stop being transferred. The wafer needs to be manually transferred to mark the wafer. If the alarm signal is configured as Alarm, the established process will be completed and the cavity will automatically cut to Error.

[0004] The above-mentioned false alarm situation between signal transmissions of the existing multi-chamber semiconductor equipment will cause great trouble to the process and cause the machine to fail to work normally. Summary of the invention

[0005] Based on the technical problems existing in the prior art, the present invention provides a signal transmission circuit applied to multi-chamber semiconductor equipment to solve the problem of being affected by other devices in the loop due to single-point signal sending and multi-point reception, and realizes that when there are multiple distribution cabinets and only one exhaust gas treatment device, the signal of normal operation of the exhaust gas treatment device is distributed to multiple signal receiving ends in turn, and the signal transmission will not be deviated due to the abnormality of any device in the intermediate signal transmission, which reduces the failure rate, improves the machine use efficiency and ensures the safety of the equipment.

[0006] According to the technical solution of the present invention, the present invention provides a signal transmission circuit applied to multi-chamber semiconductor equipment, which is a signal circuit applied to multi-chamber semiconductor equipment for single-point signal sending and multi-point reception without being affected by other devices in the loop. The positive end of the power supply is connected to the relay A1 end, and the negative end of the power supply is connected to the relay A2 end. The connection constitutes a control loop of the signal loop in the distribution cabinet, and then controls the closing of the normally open dry node by whether the relay coil is energized, thereby constituting the transmission of the signal in the distribution cabinet.

[0007] Preferably, the signal transmission circuit is applied to two process chambers, and the signal transmission circuit comprises a first power distribution cabinet and a second power distribution cabinet, and the power sources of the two process chambers are provided by the first power distribution cabinet and the second power distribution cabinet.

[0008] Preferably, the front end of the first power distribution cabinet is connected to the dry node of the first signal generator through a first connector, the rear end of the first power distribution cabinet is equipped with a second connector, the second connector is connected to the fourth connector via a first interconnection cable, and the fourth connector is connected to the second power distribution cabinet. Furthermore, all the above connectors meet the flame retardant certification UL94V-0.

[0009] Preferably, the positive end of the first switch power supply is connected to the first relay coil A1 end, and the first relay coil A2 end is connected to the negative end of the first switch power supply, and the above connection constitutes a control loop of the signal loop in the first power distribution cabinet. The thirteenth terminal is connected to the second normally open dry node, the second normally open dry node is connected to the third terminal, the first terminal is connected to the first end of the first connector, and the first end of the first connector is connected to the first end of the dry node of the first signal generator.

[0010] Preferably, the second end of the first signal generator dry node is connected to the second end of the first connector, the second end of the first connector is connected to the seventh terminal, the ninth terminal is connected to the first normally open dry node, the first normally open dry node is connected to the third relay coil A1 end, the third relay coil A2 end is connected to the fourteenth terminal, and the closing of the fifth normally open dry node is controlled by whether the third relay coil is energized, thereby constituting the transmission of signals in the first distribution cabinet.

[0011] Preferably, the positive end of the second switch power supply is connected to the second relay coil A1 end, and the second relay coil A2 end is connected to the negative end of the second switch power supply, and the above connection constitutes a control loop of the signal loop in the second power distribution cabinet. The fifteenth terminal is connected to the fourth normally open dry node, the fourth normally open dry node is connected to the sixth terminal, the fourth terminal is connected to the first end of the fourth connector, the first end of the fourth connector is connected to the first end of the second connector, the first end of the second connector is connected to the second terminal, and the eighth terminal is connected to the second end of the second connector.

[0012] In addition, the second end of the second connector is connected to the second end of the fourth connector, the second end of the fourth connector is connected to the tenth terminal, the twelfth terminal is connected to the third normally open dry node, the third normally open dry node is connected to the A1 end of the fourth relay coil, and the A2 end of the fourth relay coil is connected to the sixteenth terminal. The closing of the sixth normally open dry node is controlled by whether the fourth relay coil is energized, thereby constituting the transmission of signals within the second distribution cabinet.

[0013] Compared with the prior art, the beneficial technical effects of the present invention applied to the signal transmission circuit of the multi-chamber semiconductor device are as follows: 1. The present invention adopts a method in which the positive end of the power supply is connected to the relay A1 end, and the negative end of the power supply is connected to the relay A2 end. The connection constitutes a control loop of the signal loop in the distribution cabinet, and then controls the closing of the normally open dry node by whether the relay coil is energized, thereby constituting a technical means for transmitting signals in the distribution cabinet, solving the problem of single-point signal sending and multi-point reception being affected by other devices in the loop, so that the machine can receive correct feedback signals, improve the use efficiency of the machine, and ensure safety.

[0014] 2. The present invention is not only applicable to dual-process chamber semiconductor equipment, but also to triple-process chamber semiconductor equipment or multi-cavity semiconductor equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of a signal transmission circuit applied to a multi-chamber semiconductor device according to the present invention.

[0016] Description of reference numerals in the accompanying drawings: 1. First connector; 2. Second connector; 2a. Fifth connector; 3. Third connector; 3a. Sixth connector; 4. Fourth connector; 5. First switch power supply; 5a. Second switch power supply; 6. First distribution cabinet; 6a. Second distribution cabinet; 7. First relay; 7a. Second relay; 8. Third relay; 8a. Fourth relay; 9. First normally open dry node; 9a. Third normally open dry node; 10. Second normally open dry node; 10a. Fourth normally open dry node; 11. Fifth normally open dry node; 11a. Sixth normally open dry node; 12. First Terminal; 13, second terminal; 14, third terminal; 12a, fourth terminal; 13a, fifth terminal; 14a, sixth terminal; 15, seventh terminal; 16, eighth terminal; 17, ninth terminal; 15a, tenth terminal; 16a, eleventh terminal; 17a, twelfth terminal; 18, thirteenth terminal; 19, fourteenth terminal; 18a, fifteenth terminal; 19a, sixteenth terminal; 20, first interconnection cable; 21, first signal generator dry node. DETAILED DESCRIPTION

[0017] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the drawings of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0018] It should also be noted that, for ease of description, only the parts related to the invention are shown in the drawings. In the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

[0019] It should be noted that the concepts such as "first" and "second" mentioned in the present invention are only used to distinguish different devices, modules or units, and are not used to limit the order or interdependence of the functions performed by these devices, modules or units.

[0020] It should be noted that the modifications of "one" and "plurality" mentioned in the present invention are illustrative rather than restrictive, and those skilled in the art should understand that, unless otherwise clearly indicated in the context, it should be understood as "one or more".

[0021] The present invention provides a signal transmission circuit applied to multi-chamber semiconductor equipment, which solves the problem of single-point signal transmission and multi-point reception while the machine is affected by other equipment in the loop, and realizes that in the case of facing multiple distribution cabinets, there is only one exhaust gas treatment equipment, and the signal of normal operation of the exhaust gas treatment equipment is distributed to multiple signal receiving ends in turn, and there will be no deviation in the transmission of the signal due to an abnormality of any device in the middle transmitting the signal, thereby improving the efficiency of the machine and ensuring safety. The present invention connects the positive end of the power supply to the relay A1 end and the negative end of the power supply to the relay A2 end, and the connection constitutes a control loop of the signal loop in the distribution cabinet, and then controls the closing of the normally open dry node by whether the relay coil is energized, thereby constituting the transmission of the signal in the distribution cabinet.

[0022] See also Figure 1 The present invention provides a signal transmission circuit applied to multi-chamber semiconductor equipment, which is a signal circuit for single-point signal sending and multi-point receiving applied to dual-process chamber semiconductor equipment without the machine being affected by other equipment in the loop. The signal transmission circuit is applied to two process chambers, and the signal transmission circuit includes a first power distribution cabinet 6 and a second power distribution cabinet 6a. The power sources of the two process chambers are provided by the first power distribution cabinet 6 and the second power distribution cabinet 6a.

[0023] The front end of the first distribution cabinet 6 is connected to the first signal generator dry node 21 through the first connector 1, and the rear end of the first distribution cabinet 6 is installed with a second connector 2, the second connector 2 is connected to the fourth connector 4 via the first interconnection cable 20, and the fourth connector 4 is connected to the second distribution cabinet 6a.

[0024] The first distribution cabinet 6 is mainly composed of a main power supply circuit and a control circuit. The main circuit mainly includes circuit breakers, contactors, surge protectors, fuses, busbars and power cables, etc., which mainly play the role of distributing electric energy; the control circuit mainly includes transformers, circuit breakers, relays, contactors, switching power supplies, buttons, indicator lights and control cables, etc., which mainly play the role of control, protection and sending and feedback signals.

[0025] In the first power distribution cabinet 6, the positive end of the first switch power supply 5 is connected to the A1 end of the coil of the first relay 7, and the A2 end of the coil of the first relay 7 is connected to the negative end of the first switch power supply 5, and the above connection constitutes a control loop of the signal loop in the first power distribution cabinet 6. The thirteenth terminal 18 is connected to the second normally open dry node 10, the second normally open dry node 10 is connected to the third terminal 14, the first terminal 12 is connected to the first end of the first connector 1, the first end of the first connector 1 is connected to the first end of the first signal generator dry node 21, the second end of the first signal generator dry node 21 is connected to the second end of the first connector 1, the second end of the first connector 1 is connected to the seventh terminal 15, the ninth terminal 17 is connected to the first normally open dry node 9, the first normally open dry node 9 is connected to the A1 end of the coil of the third relay 8, and the A2 end of the coil of the third relay 8 is connected to the fourteenth terminal 19. The closing of the fifth normally open dry node 11 is controlled by whether the coil of the third relay 8 is energized, thereby constituting the transmission of the signal in the first power distribution cabinet 6.

[0026] The second distribution cabinet 6a is mainly composed of a main power supply circuit and a control circuit. The main circuit mainly includes circuit breakers, contactors, surge protectors, fuses, busbars and power cables, etc., which mainly play the role of distributing electric energy; the control circuit mainly includes transformers, circuit breakers, relays, contactors, switching power supplies, buttons, indicator lights and control cables, etc., which mainly play the role of control, protection and sending and feedback signals.

[0027] In the second distribution cabinet 6a, the positive end of the second switch power supply 5a is connected to the coil A1 end of the second relay 7a, and the coil A2 end of the second relay 7a is connected to the negative end of the second switch power supply 5a. The above connection constitutes the control loop of the signal loop in the second distribution cabinet 6a. The fifteenth terminal 18a is connected to the fourth normally open dry node 10a, the fourth normally open dry node 10a is connected to the sixth terminal 14a, the fourth terminal 12a is connected to the first end of the fourth connector 4, the first end of the fourth connector 4 is connected to the first end of the second connector 2, the first end of the second connector 2 is connected to the second terminal 13, the eighth terminal 16 is connected to the second end of the second connector 2, the second end of the second connector 2 is connected to the second end of the fourth connector 4, the second end of the fourth connector 4 is connected to the tenth terminal 15a, the twelfth terminal 17a is connected to the third normally open dry node 9a, the third normally open dry node 9a is connected to the fourth relay 8a coil A1 end, the fourth relay 8a coil A2 end is connected to the sixteenth terminal 19a, and the closing of the sixth normally open dry node 11a is controlled by whether the fourth relay 8a coil is energized, thereby constituting the transmission of signals in the second distribution cabinet 6a.

[0028] In the above signal circuit, the first connector 1 is used for DC power transmission, meets the flame retardant requirements, and the number of pins is greater than 2; the second connector 2 is used for DC power transmission, meets the flame retardant requirements, and the number of pins is greater than 2; the third connector 3 is used for DC power transmission, meets the flame retardant requirements, and the number of pins is greater than 2; the fourth connector 4 is used for DC power transmission, meets the flame retardant requirements, and the number of pins is greater than 2; the fifth connector 2a is used for DC power transmission, meets the flame retardant requirements, and the number of pins is greater than 2; the sixth connector 3a is used for DC power transmission, meets the flame retardant requirements, and the number of pins is greater than 2; the first switching power supply 5 provides DC power to the relay 7 alone, the input power is 220VAC, and the output power is 24VDC; all the above connectors need to meet the flame retardant certification UL94V-0.

[0029] The second switching power supply 5a provides DC power to the relay 7a alone, the input power is 220VAC, and the output power is 24VDC; The first power distribution cabinet 6 provides power to all electrical equipment in the semiconductor chamber, and the output power is three-phase four-wire 208VAC; the second power distribution cabinet 6a provides power to all electrical equipment in the semiconductor chamber, and the output power is three-phase four-wire 208VAC; The first relay 7 has four pairs of switch contacts, and the coil input voltage is 24VDC; if the coil is energized, the signal is normally fed back to the controller; it is an important component of the signal loop.

[0030] The second relay 7a has four pairs of switch contacts, and the coil input voltage is 24VDC; if the coil is energized, the signal is fed back to the controller normally; the coil input voltage of the third relay 8 is 24VDC, and it has four pairs of switch contacts; if the coil is energized, the signal is fed back to the controller normally; the coil input voltage of the fourth relay 8a is 24VDC, and it has four pairs of switch contacts; if the coil is energized, the signal is fed back to the controller normally.

[0031] The first normally open dry node 9 and the second normally open dry node 10 are both dry nodes of relay 7, and when the relay is energized, they change from normally open contacts to closed contacts; the third normally open dry node 9a and the fourth normally open dry node 10a are both dry nodes of relay 7a, and when the relay is energized, they change from normally open contacts to closed contacts; the fifth normally open dry node 11 is the dry node of relay 8, and when the relay is energized, it changes from normally open contacts to closed contacts; the sixth normally open dry node 11a is the dry node of relay 8a, and when the relay is energized, it changes from normally open contacts to closed contacts.

[0032] The first terminal 12, the second terminal 13 and the third terminal 14 turn one end of the signal dry node into three equal points; the fourth terminal 12a, the fifth terminal 13a and the sixth terminal 14a turn one end of the signal dry node into three equal points; the seventh terminal 15, the eighth terminal 16 and the ninth terminal 17 turn the other end of the signal dry node into three equal points; the tenth terminal 15a, the eleventh terminal 16a and the twelfth terminal 17a turn the other end of the signal dry node into three equal points; the thirteenth terminal 18 and the fourteenth terminal 19 provide a voltage source for the signal dry node; the fifteenth terminal 18a and the sixteenth terminal 19a provide a voltage source for the signal dry node; the first interconnection cable 20 is an electrical conductor, and its function is to transmit DC power.

[0033] When the signal is sent, the first signal generator dry node 21 changes from a normally open contact to a closed contact.

[0034] Furthermore, a signal transmission circuit applied to multi-chamber semiconductor equipment of the present invention belongs to the field of semiconductor manufacturing technology. Specifically, it is a signal circuit applied to multi-chamber semiconductor equipment for single-point signal transmission and multi-point reception without being affected by other devices in the loop. It is connected to the relay A1 end through the positive end of the power supply and the relay A2 end through the negative end of the power supply. The above connection constitutes a control loop of the signal loop in the power distribution cabinet, and then controls the closing of the normally open dry node by whether the relay coil is energized, thereby constituting the transmission of the signal in the power distribution cabinet. The present invention solves the problem of being affected by other devices in the loop due to single-point signal transmission and multi-point reception, and realizes that when there is only one exhaust gas treatment device and facing multiple distribution cabinets, the signal of the normal operation of the exhaust gas treatment device is distributed to multiple signal receiving ends in turn, and the signal transmission will not be deviated due to the abnormality of any device that transmits the signal in the middle, thereby improving the efficiency of machine use and ensuring safety.

[0035] Through the description of the above implementation methods, those skilled in the art can clearly understand that each implementation method can be implemented by means of software plus a necessary general hardware platform, and of course, it can also be implemented by hardware. Based on this understanding, the above technical solution is essentially or the part that contributes to the prior art can be embodied in the form of a software product, and the computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, a disk, an optical disk, etc., including a number of instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to execute the above methods of each embodiment or some parts of the embodiments.

[0036] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A signal transmission circuit for a multi-chamber semiconductor device, characterized in that: It is a signal circuit used for single-point signal sending and multi-point reception of multi-chamber semiconductor equipment without being affected by other devices in the loop. It is connected to the relay A1 end through the positive end of the power supply and the relay A2 end through the negative end of the power supply. The connection constitutes a control loop of the signal loop in the distribution cabinet, and then controls the closing of the normally open dry node by whether the relay coil is energized, thereby constituting the transmission of signals in the distribution cabinet.

2. The signal transmission circuit for multi-chamber semiconductor equipment according to claim 1, characterized in that: The signal transmission circuit is applied to two process chambers. The signal transmission circuit comprises a first power distribution cabinet (6) and a second power distribution cabinet (6a). The power sources of the two process chambers are provided by the first power distribution cabinet (6) and the second power distribution cabinet (6a).

3. The signal transmission circuit for multi-chamber semiconductor equipment according to claim 2, characterized in that: The front end of the first power distribution cabinet (6) is connected to the first signal generator dry node (21) via a first connector (1), the rear end of the first power distribution cabinet (6) is provided with a second connector (2), the second connector (2) is connected to a fourth connector (4) via a first interconnection cable (20), and the fourth connector (4) is connected to the second power distribution cabinet (6a).

4. The signal transmission circuit for multi-chamber semiconductor equipment according to claim 3, characterized in that: The connector needs to meet the flame retardant certification UL94V-0.

5. The signal transmission circuit for multi-chamber semiconductor equipment according to claim 3, characterized in that: The positive end of the first switch power supply (5) is connected to the coil A1 end of the first relay (7), and the coil A2 end of the first relay (7) is connected to the negative end of the first switch power supply (5), and the above connection constitutes a control circuit of the signal circuit in the first distribution cabinet (6).

6. The signal transmission circuit for multi-chamber semiconductor equipment according to claim 5, characterized in that: The thirteenth wiring terminal (18) is connected to the second normally open dry node (10), the second normally open dry node (10) is connected to the third wiring terminal 14, the first wiring terminal (12) is connected to the first end of the first connector (1), and the first end of the first connector (1) is connected to the first end of the first signal generator dry node (21).

7. The signal transmission circuit for multi-chamber semiconductor equipment according to claim 6, characterized in that: The second end of the dry node (21) of the first signal generator is connected to the second end of the first connector (1), the second end of the first connector (1) is connected to the seventh wiring terminal (15), the ninth wiring terminal (17) is connected to the first normally open dry node (9), the first normally open dry node (9) is connected to the coil A1 end of the third relay (8), the coil A2 end of the third relay (8) is connected to the fourteenth wiring terminal (19), and the closing of the fifth normally open dry node (11) is controlled by whether the coil of the third relay (8) is energized, thereby forming the transmission of signals in the first power distribution cabinet (6).

8. The signal transmission circuit for multi-chamber semiconductor equipment according to claim 3, characterized in that: The positive end of the second switch power supply (5a) is connected to the coil A1 end of the second relay (7a), and the coil A2 end of the second relay (7a) is connected to the negative end of the second switch power supply (5a), and the above connection constitutes a control circuit of the signal circuit in the fourteenth terminal (6a) of the second distribution cabinet.

9. The signal transmission circuit for multi-chamber semiconductor equipment according to claim 3, characterized in that: The fifteenth wiring terminal (18a) is connected to the fourth normally open dry node (10a), the fourth normally open dry node (10a) is connected to the sixth wiring terminal (14a), the fourth wiring terminal (12a) is connected to the first end of the fourth connector (4), the first end of the fourth connector (4) is connected to the first end of the second connector (2), the first end of the second connector (2) is connected to the second wiring terminal (13), and the eighth wiring terminal (16) is connected to the second end of the second connector (2).

10. The signal transmission circuit for multi-chamber semiconductor equipment according to claim 3, characterized in that: The second end of the second connector (2) is connected to the second end of the fourth connector (4), the second end of the fourth connector (4) is connected to the tenth wiring terminal (15a), the twelfth wiring terminal (17a) is connected to the third normally open dry node (9a), the third normally open dry node (9a) is connected to the coil A1 end of the fourth relay (8a), the coil A2 end of the fourth relay (8a) is connected to the sixteenth wiring terminal (19a), and the closing of the sixth normally open dry node (11a) is controlled by whether the coil of the fourth relay (8a) is energized, thereby forming the transmission of signals in the second power distribution cabinet (6a).

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