Object appearance inspection method

Abstract

The present disclosure pertains to a method for inspecting the appearance of an article in which the appearance of an object to be inspected is inspected using an appearance inspection device, the appearance inspection device being provided with: a planar tray (1) having a plurality of colorless and transparent grooves (2) on the surface thereof, the plurality of object to be inspected being separately placed on the plurality of colorless and transparent grooves (2); first cameras (4, 5) provided separately on the front surface side and the rear surface side of the tray (1) and capable of simultaneously capturing a plurality of objects to be inspected from the front surface side and the rear surface side of the tray (1); and a second camera (9) capable of shooting from four side surfaces other than the front surface and the back surface, each of the grooves having a support member (3) that supports the object to be inspected by contacting the object to be inspected so as to follow the outer periphery of the object to be inspected when the object to be inspected is placed thereon. A space is formed in a region not in contact with the object to be inspected, and the object to be inspected is imaged from four side surfaces by a second camera (9) after a plurality of objects to be inspected are simultaneously imaged from the front surface side and the back surface side of the tray by first cameras (4, 5).

Description

Technical Field

[0001] The present application relates to a method for inspecting the appearance of an object. Background Art

[0002] In the existing appearance inspection method of items such as semiconductor packages, the following method is used for the inspected object transported from a supply unit: a light-transmitting component is arranged on a transport path, two cameras are arranged above and below, and the two side surfaces of the light-transmitting component are mirror-processed, so that the entire circumference of the inspected object except for the two end portions in the transport direction can be photographed and inspected using the two cameras arranged above and below (for example, refer to patent document 1).

[0003] In addition, the following method is disclosed: four mirrors are arranged obliquely upward in a manner to surround an object to be inspected, and a camera captures the upper surface of the object to be inspected and the side images of the object to be inspected captured by the four mirrors as inspection images, thereby simultaneously inspecting the upper surface and side surfaces of the appearance of the object to be inspected (for example, refer to patent document 2).

[0004] Patent Document 1: Japanese Patent Application Publication No. 2014-139525

[0005] Patent Document 2: Japanese Patent Application Publication No. 2000-018927

[0006] In patent document 1, since the structure is to transport the inspected object from the supply part and photograph the inspected object in the middle of sliding down the transport path, it is effective if the structure of the inspected object is relatively simple, such as the front and back of the inspected object are the same and the inspection items are also the same, and there is no limited contact area. However, in the case of a shape and inspection items that are different on the front and back and the contact area is limited, such as an infrared sensor module, there is a need to fix the shooting, inspection direction or inspection position, and the part of the inspected object needs to be kept in a contactable part.

[0007] In addition, in Patent Document 2, four mirrors are provided to surround the inspected object, so that the upper surface and four side surfaces can be inspected at the same time. However, the inspected object needs to be placed on an inspection workbench dedicated to the inspected object, and multiple identical environments need to be set up in order to inspect more efficiently and to inspect multiple objects at the same time. At this time, there is a problem that a dedicated device for the product needs to be set up to deal with products of different shapes. Summary of the invention

[0008] The present application discloses a technology for solving the above-mentioned problems, and its purpose is to provide a method for inspecting the appearance of an object, which can be maintained only in a limited area of ​​the inspected object even if the shape and inspection items are different on the front and back and the contact area is limited, and can photograph and inspect multiple objects at the same time while the shooting and inspection direction or position is fixed.

[0009] The appearance inspection method of an article disclosed in the present application uses an appearance inspection device to perform appearance inspection of an object to be inspected.

[0010] The above-mentioned appearance inspection device comprises:

[0011] A flat tray having a plurality of transparent grooves for separately placing the plurality of the inspection objects;

[0012] A plurality of first cameras are separately disposed on the front side and the back side of the planar tray, and are capable of simultaneously photographing the plurality of inspection objects from the front side and the back side of the tray; and

[0013] The second camera can capture images from the side surfaces of the planar tray other than the front surface and the back surface.

[0014] Each groove has a support member that contacts the inspection object along the outer circumference of the inspection object when the inspection object is placed thereon, and supports the inspection object.

[0015] The appearance inspection method of the above-mentioned article is characterized in that:

[0016] The plurality of inspection objects are photographed from the front side and the back side of the tray by the first camera, and the inspection objects are photographed from the side side by the second camera.

[0017] According to the appearance inspection method of the article disclosed in the present application, it is possible to provide an appearance inspection method for articles that can be photographed and inspected at the same time, even if the shapes and inspection items are different on the front and back and the contact area is limited, by only keeping the inspected object in a limited area and in a state where the shooting and inspection direction or position is fixed. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a diagram for explaining an example of a visual inspection device used in the visual inspection method of an article according to the first embodiment.

[0019] Figure 2A This is a plan view for explaining an example of an inspection target object used in the appearance inspection method of an article according to the first embodiment. Figure 2BThis is a front view for explaining an example of an inspection target object used in the appearance inspection method of an article according to the first embodiment. Figure 2C This is a bottom view for explaining an example of an inspection target object used in the appearance inspection method of an article according to the first embodiment.

[0020] Figure 3 This is a diagram for explaining another example of the appearance inspection device used in the appearance inspection method of the article according to the first embodiment.

[0021] Figure 4A This is a side view showing an example of a visual inspection device used in the visual inspection method of an article according to the second embodiment. Figure 4B This is a plan view showing an example of a visual inspection device used in the visual inspection method of an article according to the second embodiment.

[0022] Figure 5A This is a side view showing another example of the appearance inspection device used in the appearance inspection method of the article according to the second embodiment. Figure 5B This is a plan view showing another example of the appearance inspection device used in the appearance inspection method of the article according to the second embodiment.

[0023] Fig. 6A This is a plan view showing an example of a visual inspection device used in the visual inspection method of an article according to the third embodiment. Figure 6B This is a side view showing an example of a visual inspection device used in the visual inspection method of an article according to the third embodiment.

[0024] Fig. 7A This is a plan view showing another example of the appearance inspection device used in the appearance inspection method of the article according to the third embodiment. Figure 7B This is a side view showing another example of the appearance inspection device used in the appearance inspection method of the article according to the third embodiment.

[0025] Fig. 8A This is a plan view showing an example of a visual inspection device used in the visual inspection method of an article according to the fourth embodiment. Figure 8B This is a side view showing an example of a visual inspection device used in the visual inspection method of an article according to the fourth embodiment.

[0026] Fig. 9A This is a plan view showing another example of the appearance inspection device used in the appearance inspection method of an article according to the fourth embodiment. Fig. 9B This is a side view showing another example of the appearance inspection device used in the appearance inspection method of an article according to the fourth embodiment. DETAILED DESCRIPTION

[0027] The present application relates to a visual inspection method for, for example, collectively photographing and inspecting the front and back surfaces of a plurality of semiconductor packages mounted on a colorless and transparent tray.

[0028] Implementation Method 1

[0029] The appearance inspection device used in the appearance inspection method of an article according to the first embodiment will be described using the following drawings.

[0030] Figure 1 FIG. 1 is a side view showing an example of a visual inspection apparatus used in the visual inspection method of a semiconductor package according to Embodiment 1. In the visual inspection apparatus, a product to be inspected is, for example, Figure 2A , Figure 2B , Figure 2C The semiconductor packages represented by the infrared sensor modules are shown respectively. Figure 2A is a top view showing an example of an infrared sensor module. Figure 2B is a front view showing an example of an infrared sensor module. Figure 2C It is a bottom view showing an example of the infrared sensor module.

[0031] If the Figure 2A and Figure 2B As shown, the infrared sensor module is configured to have the following two surfaces: a surface (surface) on which chip components 11 such as resistors or capacitors and external connection connectors 12 are connected to a printed wiring board 10 by soldering; and Figure 2B and Figure 2C As shown, the sensor chip and an ASIC (Application Specific Integrated Circuit) for controlling signals are connected by adhesive 14 and wires (not shown) and are covered by a lens cover 13 holding a lens 15 (back surface).

[0032] In the appearance inspection, it is necessary to confirm whether there are foreign objects, damages, notches, or cracks on the front and back surfaces (hereinafter, the plane parallel to these two surfaces is also referred to as the XY plane). In addition, when the infrared sensor module is actually used, the connector is connected for external connection, but during the characteristic inspection in the production process, the installation and removal of the connector takes time and is inefficient, so the characteristic inspection is carried out by making the probe contact with the terminal of the connector instead of connecting the connector.

[0033] Therefore, when the shape of the connector is deformed, even if the connector is deformed by the probe connection during the characteristic inspection, it can work normally. However, after the product is shipped, the connector may not be inserted during actual use and cannot be used normally. In addition, when airtightness is required in the lens cover 13, it is necessary to effectively apply the adhesive 14 between the printed wiring board 10 and the lens cover 13 over the entire circumference to fix the printed wiring board 10 and the lens cover 13.

[0034] As described above, for example, in an infrared sensor module, not only the front and back surfaces of the printed wiring board 10, but also the surfaces other than these two surfaces, namely, the four side surfaces (hereinafter, for simplification, also referred to as "four side surfaces"), need to be subjected to appearance inspection. In order not to damage the lens 15 that transmits only infrared rays and not to apply external force to the lens cover 13 or the chip component 11, etc., a limited area is set to avoid them (away from the set area in a manner that no external force is applied. Hereinafter, this area is referred to as a contactable area).

[0035] This appearance inspection device is suitable for inspecting products that require appearance inspection of six surfaces including the above four side surfaces and have a limited contact area. That is, for this appearance inspection device, as long as it is a product with the above characteristics, the product to be inspected is not limited to the infrared sensor module.

[0036] here, Figure 1 The tray 1 shown can carry a semiconductor package 50 represented by an infrared sensor module as a product to be inspected, as long as it can carry an object with different shapes on the front and back and a limited contact area. As such a tray 1, for example, a tray made of a colorless and transparent material such as A-PET (Amorphous PolyEthylene Terephthalate) and provided with a plurality of grooves 2 so as to accommodate the inspected object (specifically, for example, a plurality of semiconductor packages 50) can be used.

[0037] The groove 2 is a portion configured to fix the semiconductor package 50 as an inspection target object in the groove so as not to move during appearance inspection or the like, and the groove has a structure in which the contour shape follows the outer periphery of the semiconductor package.

[0038] In addition, in the area that contacts the semiconductor package and supports the semiconductor package at its peripheral portion, a support member 3 that supports the semiconductor package is provided in a part of the contactable area. Moreover, it is designed that a space that does not contact the tray 1 is provided in the area other than the contactable area, that is, the prohibited contact area. The number of columns of the tray 1, in other words, the number of grooves 2 is not particularly limited, and is specified according to the size of the appearance inspection device (or the tray itself) or the size of the object to be inspected. Such a tray 1 is provided at a specified position in the appearance inspection device.

[0039] A camera 4 for photographing the surface images of the plurality of objects to be inspected placed in the tray is disposed downwardly above the tray 1. On the other hand, a camera 5 for photographing the back images of the plurality of objects to be inspected is disposed upwardly below the tray 1. As these cameras, CCD (Charge Coupled Devices) cameras are generally used, and the number of pixels required for the CCD camera is determined according to the resolution or viewing angle required for the appearance inspection (here, it refers to the range in which a clear image can be obtained through the lens system of the camera).

[0040] An illumination device is provided between the tray 1 and the cameras provided above and below the tray 1, avoiding the camera's field of view (so as not to enter the camera's field of view), so as to make the color of the object to be inspected or the color of the part to be inspected appear white or black, thereby further emphasizing the part to be seen and photographing. The illumination device is selected according to the shape or size of the object to be inspected and the illumination method.

[0041] [Effects of Embodiment 1]

[0042] In order to perform appearance inspection using such an appearance inspection device, first, a tray 1 containing semiconductor packages is arranged on the inspection table 6. As a method of arrangement, one tray 1 can be automatically taken out from the stacked trays 1, or one tray can be manually loaded one by one. The inspection table 6 is provided with a hole in the area where the product is loaded, so that the back surface can be photographed by the camera 5 arranged below the tray 1, and the tray 1 is supported only in the peripheral part of the tray 1, which is the outer peripheral part of the tray 1 and is the part other than the above-mentioned hole, and is the area in contact with the tray 1, and no product to be inspected is loaded.

[0043] After the pallet 1 is arranged on the inspection workbench 6, the surface of the inspected object is photographed under the required lighting conditions and according to the required number of lighting conditions by using the camera 4 arranged downwardly above the pallet 1, and the inspection of the product to be inspected is carried out. As long as the viewing angle of the camera is set to cover the entire area of ​​the pallet and a camera with the required resolution can be obtained, all the inspected objects set on the surface can be photographed together according to each lighting condition, so they can be inspected together. In the case of limited viewing angle, the inspection area can also be subdivided for inspection according to the number of inspected objects that can be photographed together. At this time, the camera 4 can be moved along the XY plane, or the inspection workbench 6 can be moved.

[0044] In addition, for the back side of the inspected object, similarly to the front side, the camera 5 disposed upwardly below the tray 1 is used to photograph and inspect the inspected object under the required lighting conditions and the required number of lighting conditions. At this time, the portion 3 (substrate surface. Hereinafter, also referred to as the support member 3) of the tray 1 supporting the infrared sensor module and the bottom surface portion 7 of the groove of the tray are colorless and transparent, so even if the tray 1 is disposed between the inspected object and the camera 5, the inspection can be performed without moving the inspected object. During this inspection, as long as the viewing angle of the camera is set to cover the entire area of ​​the tray and the camera can obtain the required resolution, all the inspected objects set can be photographed and inspected at the same time according to each lighting condition. In the case of a limited viewing angle, the inspection area can also be subdivided and inspected according to the number that can be photographed at the same time. At this time, the camera 5 can be moved along the XY plane, or the inspection workbench 6 can be moved. Here, the above-mentioned camera 4 and camera 5 are also referred to as the first camera (the same below).

[0045] In addition, since the bottom surface portion 7 of the groove of the tray is not a portion that supports the inspected object, as long as only the required portion is cut out of the bottom surface portion 7 to form a space, a clearer shot can be taken without interfering with the tray 1 and the inspected object. After completing the shooting of the surface and back of the inspected object using the camera 4 and the camera 5, the infrared sensor modules are carried one by one to the side inspection workbench 8, and the side inspection is performed using the side camera 9 (hereinafter, the side camera is also referred to as the second camera). In this side inspection, since it is necessary to shoot the four sides, the side inspection workbench 8 is rotated 90 degrees each time as shown by the arrows in the figure, and shooting is performed each time it rotates. Of course, two or four side cameras can also be set up for side inspection.

[0046] In addition, if Figure 3As shown, by making a part of the bottom surface portion 7 of the groove of the tray into a lens shape 16 (including the premise of transparency. Here, the lens shape specifically refers to the shape of a convex lens. The same applies below), it is possible to magnify the details and detect smaller defective parts of the inspected object.

[0047] [Effects of Embodiment 1]

[0048] A tray 1 designed as follows is used, that is, a plurality of grooves 2 are provided on a tray made of a colorless transparent material, and an object to be inspected is supported in the grooves in a manner that the object to be inspected does not move, a support member 3 is provided only in a contactable area along the shape of the object to be inspected, and a space as described above is provided in a prohibited contact area so that the object does not contact, and cameras are provided above and below the tray 1. By setting such a structure, the surfaces of a plurality of objects to be inspected can be inspected simultaneously by the camera 4 above, and the back sides of a plurality of objects to be inspected can be inspected simultaneously by the camera 5 below, and the objects to be inspected do not need to be transported between the surface inspection and the back side inspection, and the objects to be inspected can be inspected at the same position without replacing the tray of the objects to be inspected, so that the cycle time can be shortened.

[0049] In addition, since the object to be inspected is carried on a pallet, even if the object to be inspected is another product of a different shape, it is sufficient to set a pallet corresponding to the other product, and the other product can be easily inspected. In addition, after the object to be inspected is set on the pallet, it is transported together with the pallet or set on a workbench, so that during inspection, it is no longer necessary to directly contact the object to be inspected, and the occurrence of damage caused by direct contact with the object to be inspected is reduced.

[0050] Implementation Method 2

[0051] The appearance inspection device used in the appearance inspection method of an article according to the second embodiment is described using the following figure.

[0052] Figure 4A , Figure 4B 1 and 2 are a side view and a top view respectively showing an example of a visual inspection device used in the visual inspection method of an article according to Embodiment 2. Figure 5A , Figure 5B They are a side view and a top view respectively showing another example of the appearance inspection device used in the appearance inspection method of the article according to the second embodiment.

[0053] like Figure 4AAs shown, in the tray 17 used, reflectors 18 are arranged in four directions of the side surfaces (orthogonal to the XY plane) of each groove to reflect (the image of) each side surface of the object to be inspected upward. Here, the number of rows of grooves is not particularly limited, and is determined according to the size of the appearance inspection device (or the tray itself) or the size of the object to be inspected. The features other than these are the same as those of the first embodiment.

[0054] in addition, Figure 4B Yes means Figure 4A FIG. 1 is a top view of one of the objects to be inspected (sensor module, etc.). It can be seen that by configuring the reflector 18, Figure 4B As shown, the camera 4 disposed on the surface side of the tray can capture not only the surface of the object to be inspected but also its four sides. The configuration or style of the camera and lighting device is the same as that of the first embodiment, so detailed description is omitted here.

[0055] [Effects of Embodiment 2]

[0056] When performing a visual inspection of an object to be inspected using such a visual inspection device, first, a tray 17 containing semiconductor packages is placed on the inspection table 6. As a method of placement, one can be automatically taken out from the stacked trays 17, or they can be manually loaded one by one. A hole is provided in the area of ​​the inspection table 6 where the inspected product is loaded so that the back side can be photographed by the camera 5 provided below the tray 17, and the tray 17 is supported only in the surrounding area of ​​the tray where no inspected product is loaded.

[0057] When the tray 17 is placed on the inspection table 6 , next, the camera 4 disposed downward above the tray 17 takes an image of the surface of the inspection object under a desired lighting condition and a desired number of lighting conditions to perform the inspection.

[0058] At this time, in the groove 19 carrying the object to be inspected, the side faces of the object to be inspected are reflected upward by the reflectors 18 arranged on the surfaces of the groove in four directions opposite to the side faces of the object to be inspected, so that the four side faces of the object to be inspected can also be photographed and inspected simultaneously by the camera 4.

[0059] Here, since the viewing angle of the camera covers the entire area of ​​the pallet, as long as the camera can obtain the required resolution, all the objects to be inspected in the entire area of ​​the pallet can be photographed and inspected at the same time according to each lighting condition. In the case where the viewing angle is not the entire area of ​​the pallet but is limited to a part of it, the inspection area can also be subdivided according to the number of objects to be inspected that can be photographed at the same time for inspection.

[0060] At this time, the camera 4 may be moved along the XY plane, or the inspection stage 6 may be moved.

[0061] Also, similarly to the front surface, the back side of the inspection object is photographed and inspected by the camera 5 disposed upward under the tray 17 under the required lighting conditions and the required number of lighting conditions.

[0062] Since the portion 20 of the tray 17 that supports the object to be inspected (the substrate surface, hereinafter also referred to as the support member 20) and the bottom portion 21 of the groove of the tray are colorless and transparent, even if a portion of the tray 17 is located between the object to be inspected and the camera 5 (within the field of view) and at a position where the two interfere with each other, the object to be inspected can be inspected without transporting the product.

[0063] When performing this inspection, as long as the viewing angle of the camera covers the entire area of ​​the tray 17 and the camera can obtain the required resolution, all the inspection objects can be photographed and inspected at once according to each lighting condition.

[0064] When the viewing angle of the camera is limited, the imaging area may be subdivided according to the number of the inspected objects that can be imaged at once. In this case, the camera 5 may be moved along the XY plane, or the inspection table 6 may be moved.

[0065] Furthermore, since the bottom surface portion 21 of the recessed portion of the tray does not support the object to be inspected, by cutting out a required portion of the bottom surface portion 21, interference between the tray and the object to be inspected disappears, allowing for clearer photography.

[0066] Or, if Figure 5A As shown, by setting a part of the bottom surface portion 21 of the groove of the tray to a lens shape 22 (including the case of transparency as a premise), the details of the inspected object can be magnified and smaller defective parts can be detected. In this case, Figure 5B With the above Figure 4B Similarly, it is a plan view showing one of the inspection objects (sensor modules, etc.).

[0067] In embodiment 1, after completing the inspection of the surface and back of the inspected object, the inspected objects are transported one by one to the side inspection workbench 8 and the side inspection of the inspected objects is performed. However, in embodiment 2, the four side inspections can be performed simultaneously with the surface of the inspected object, so there is no need for side inspection based on the side inspection workbench accompanying the transportation.

[0068] [Effects of Embodiment 2]

[0069] The tray 17 is designed as follows, i.e., a plurality of grooves 19 are provided by using a colorless and transparent material, and the shape is along the outer circumference of the inspected object in such a way that the inspected object does not move in the grooves, and a support member 20 (also referred to as a support portion 20) is provided only in the contactable area, and a space is provided for the prohibited contact area without contact, and further, a tray 17 is provided with a reflector 18 in four directions of each groove 19, and cameras are provided above and below the tray 17. Thus, the surfaces and four side surfaces of a plurality of inspected objects can be inspected at the same time by using the upper camera 4, and the back surfaces of a plurality of inspected objects can be inspected at the same time by using the lower camera 5. When inspecting the surfaces and four side surfaces and the back surface, the inspected objects can be inspected at the same position between these inspections without carrying the inspected objects, and therefore, the effect of shortening the takt time can be expected.

[0070] Since the work of transporting the inspection object to the side inspection workbench for further side inspection of the inspection object is eliminated, the occurrence of damage caused by direct contact with the inspection object that may occur when the pallet is replaced or transported can also be reduced.

[0071] In addition, similar to the first embodiment, in order to load the inspected object onto a pallet and perform an appearance inspection, with regard to dealing with other products with different shapes as the inspected object, it is also possible to easily perform an appearance inspection of other products by changing the pallet to one corresponding to the shape of the other product and using the changed pallet.

[0072] Implementation 3

[0073] The appearance inspection device used in the appearance inspection method of an article according to the third embodiment will be described using the following figure.

[0074] Fig. 6A , Figure 6B 1 and 2 are a top view and a side view respectively showing an example of a visual inspection device used in the visual inspection method of an article according to Embodiment 3. Fig. 7A , Figure 7B 1 and 2 are respectively a top view and a side view showing another example of a visual inspection device used in the visual inspection method of an article according to Embodiment 3. Here, the tray 1 used is a tray having a plurality of grooves formed on the surface, similarly to the tray shown in Embodiment 1. However, as Fig. 6A As shown, here, a plurality of grooves are arranged in a lattice shape.

[0075] In the first embodiment, cameras for photographing the surface images and the back images of the plurality of objects to be inspected are arranged above and below the tray 1. However, in the third embodiment, in addition to the above, four side images of the objects to be inspected are photographed from the four sides of the tray 1 to photograph the plurality of objects to be inspected at the same time. Fig. 6A As shown, side cameras 23 to 26 are provided corresponding to each side (i.e., Fig. 6A A side camera 23 is provided on the upper side, a side camera 24 is provided on the left side, a side camera 25 is provided on the lower side, and a side camera 26 is provided on the right side). Figure 6B The camera 4 provided on the front side of the tray and the camera 5 provided on the back side of the tray are provided together, so that a total of six cameras are provided to cope with the problem.

[0076] As in the first embodiment, these six cameras are also generally CCD cameras, and the number of pixels required for the cameras is determined according to the resolution or viewing angle required for the appearance inspection.

[0077] In addition, similar to the first and second embodiments, in order to change the color of the object to be inspected or the color of the part to be inspected to white or black so as to further emphasize the part to be seen and take a picture, lighting devices are respectively provided between the tray 1 and the six cameras to avoid the viewing angles of the cameras. The lighting devices are selected according to the shape, size or irradiation method of the object to be inspected.

[0078] [Effects of Embodiment 3]

[0079] In such an appearance inspection device, Figure 6B As shown in FIG. 1 , a tray 1 containing inspection objects such as semiconductor packages is arranged on the inspection workbench 6. The semiconductor packages are arranged in the tray 1 in such a way that one semiconductor package is arranged in each row and only one semiconductor package is arranged in the same row regardless of which direction is viewed from the four sides (see FIG. 1 ). Fig. 6A and Figure 6B ).

[0080] As a method of arranging the trays 1, one tray may be automatically taken out from the stacked trays 1, or the trays 1 may be manually taken out one by one. Here, in the inspection table 6, a hole is provided in the area where the inspected product is carried so that the inspected object can be photographed from the back by the camera 5 provided below the tray 1, and the tray 1 is supported only in the peripheral portion of the tray 1 where the inspected product is not carried, that is, the surrounding area.

[0081] When the tray 1 is set on the inspection workbench 6, the irradiation device is also used at the same time. Above the tray 1, the camera 4 set downward is used to photograph the surface of the inspected object under the required lighting conditions and the required number of lighting conditions, and the appearance inspection of the inspected object is carried out. As long as the viewing angle of the camera is set to cover the entire area of ​​the tray 1 and the camera can obtain the required resolution, all the inspected objects can be photographed and inspected at the same time according to each lighting condition. In the case of limited viewing angle, the shooting area can also be subdivided according to the number of inspected objects that can be photographed at the same time. At this time, the camera 4 can be moved along the XY plane, or the inspection workbench 6 can be moved.

[0082] In addition, for the back side of the inspected object, the camera 5 disposed upwardly below the tray 1 is used to inspect the inspected object by taking a desired number of pictures under the desired lighting conditions, in the same manner as the front side. Since the portion 3 (substrate surface, also referred to as the support member 3) of the tray 1 supporting the inspected object, i.e., the infrared sensor module, and the bottom surface portion 7 formed in the groove of the tray are colorless and transparent, even if the tray 1 is arranged between the inspected object and the camera 5 in such a manner that the two interfere with each other, the inspection can be performed without the transport of the inspected object.

[0083] At this time, as long as the viewing angle of the camera is set to cover the entire area of ​​the tray 1 and the camera can obtain the required resolution, all the inspected objects can be photographed and inspected at the same time according to each lighting condition. In the case of limited viewing angle, the photographed area can also be subdivided according to the number of inspected objects that can be photographed at the same time. At this time, the camera 5 can be moved along the XY plane, or the inspection table 6 can be moved.

[0084] Furthermore, since the bottom surface portion 7 of the tray's groove is not a portion that supports the object to be inspected, if it is cut away (in a manner that forms a space), anything that interferes with the tray 1 and the object to be inspected will disappear, allowing for clearer photography.

[0085] In addition, if Figure 7B As shown, by setting a part of the bottom surface portion 7 of the groove of the tray as a lens shape 16 (including the case of transparency as a premise), the details of the object to be inspected can be magnified for inspection, so that smaller defective parts can be detected. Fig. 6A The same situation as described in Fig. 7A As shown, by using the side cameras 23 to 26 provided for photographing the side surfaces, it is possible to photograph the side surfaces of the inspection object under the desired lighting conditions and the desired number of lighting conditions and perform inspection.

[0086] As long as the viewing angle of the camera is set to cover the entire area of ​​the pallet and the camera can obtain the required resolution, it is possible to take pictures and inspect all of them at once according to each lighting condition. In the case where the viewing angle of the camera is limited, the area can also be subdivided according to the number that can be photographed at once. In this case, the side cameras 23 to 26 can be moved along the XY plane, or the inspection table 6 can be moved.

[0087] [Effects of Embodiment 3]

[0088] A plurality of grooves 2 are provided on a tray made of a colorless transparent material, and the inspected object is supported in the grooves 2 in a manner that the inspected object does not move, and a support member 3 (also referred to as a support portion 3) is provided in a shape along the outer periphery of the inspected object only in the contactable area of ​​the inspected object. In addition, as for the prohibited contact area, one semiconductor package is arranged in each row, and no matter which direction is viewed from the four directions of the side, only one semiconductor package is arranged in the same row, and the inspected object such as a semiconductor package is placed on the tray 1 designed in a manner that a space is provided so as not to contact the inspected object (refer to Fig. 7A ), and cameras are set in all six directions of the tray 1 (a total of six directions: the top, bottom, and four directions of the above-mentioned sides of the tray 1).

[0089] By configuring the cameras as described above, the upper camera 4, the lower camera 5, and the side cameras 23 to 26 in each of the four side directions can be used to simultaneously inspect the surfaces of multiple inspected objects, the backs of the inspected objects, and each of the four side surfaces. The surfaces, backs, and four side surfaces of all inspected objects can be inspected without transporting the inspected objects or changing the setting position of the inspected objects from the initial setting position. Therefore, the cycle time of the appearance inspection can be shortened.

[0090] Furthermore, similarly to the first embodiment, since the inspection object is carried on a pallet, the appearance inspection of other products having different shapes of the inspection object can be easily performed by simply changing to another pallet corresponding to the other product.

[0091] Implementation 4

[0092] The appearance inspection device used in the appearance inspection method of an article according to the fourth embodiment is described using the following figure.

[0093] Fig. 8A , Figure 8B 1 and 2 are a top view and a side view showing an example of a visual inspection device used in the visual inspection method of an article according to Embodiment 4, respectively, as viewed from the side by a camera 25. Fig. 9A , Fig. 9B 1 and 2 are a plan view and a side view showing another example of the visual inspection device used in the visual inspection method of an article according to the fourth embodiment, respectively, as viewed from the side using the camera 25 .

[0094] Here, the tray 27 used is set as follows: Fig. 8A In order to prevent the inspected object (the reference position, such as the surface height position of a printed wiring board) from being at the same height in the same row when viewed from any direction, the shape of the groove 28 is set so that the depth dimensions of the groove 28 are different from each other. That is, a grid-like groove with different depths is formed in the same (or specific) longitudinal and lateral directions. Specifically, for example, Fig. 8A As shown in the figure, the semiconductor packages 50a, 50d, and 50g as the inspection objects placed in the left row are shown in FIG. Figure 8B (Although the products have the same size, in the figure, the product in the front is shown larger, and the product in the back is shown smaller), the semiconductor package 50a is arranged at the uppermost side of the left column, the semiconductor package 50g is arranged at the lowermost side, and the semiconductor package 50d is arranged at the height position in the middle. This arrangement relationship is also the same for the semiconductor package 50b, semiconductor package 50e, semiconductor package 50h placed in the middle column, and the semiconductor package 50c, semiconductor package 50f, semiconductor package 50i placed in the right column (see Fig. 8A and Figure 8B .exist Fig. 9A and Fig. 9B The same also applies to ).

[0095] The number of rows of the trays 27 is not particularly limited and is determined by the size of the visual inspection device (or the trays themselves) or the size of the inspected object, etc. Other features are the same as those of the first embodiment, and thus detailed descriptions are omitted here.

[0096] [Effects of Embodiment 4]

[0097] And, if Fig. 9B As shown, by setting a part of the bottom surface portion 30 of the tray groove to a lens shape 31 (including the case of transparency as a premise), the details of the object to be inspected can be magnified for inspection, so that smaller defective parts can be detected. Fig. 9AAs shown, the side cameras 23 to 26 provided for photographing the side surfaces are used to photograph the side surfaces of the object to be inspected under the required lighting conditions and the number of lighting conditions required, and the appearance inspection is performed. The other aspects are the same as those of the third embodiment, so the detailed description is omitted here.

[0098] [Effects of Embodiment 4]

[0099] like Figure 8B and Fig. 9B As shown, the tray 27 is formed of a colorless transparent material and is provided with a plurality of grooves 28. Each groove is provided with a support member 29, which supports only the contactable area of ​​the inspected object in a shape along the outer periphery of the inspected object so that the inspected object does not move in the groove 28. In the groove 28, a space is designed as a prohibited contact area that does not contact the inspected object. In addition, a tray 27 is used in which grooves 28 are not at the same height in the same row regardless of the direction from which they are viewed. Moreover, by arranging cameras in all six directions of the tray 27, it is possible to simultaneously perform inspections on the surface of the inspected object, the back of the inspected object, and each of the four side surfaces of the inspected object using the upper camera 4, the lower camera 5, and the side cameras 23 to 26 in each side direction (refer to Fig. 8A and Fig. 9A ), without transporting the inspected object and without changing the setting position for inspecting the inspected object from the initially set inspection position, all the inspected objects can be subjected to appearance inspection based on the inspection of the surface, back surface, and four sides, so that the cycle time for appearance inspection can be shortened.

[0100] Furthermore, similarly to the first embodiment, since the inspection target is placed on the tray and inspected, the appearance inspection of other products having different shapes of the inspection target can be easily handled simply by changing to a tray corresponding to the other product.

[0101] Various exemplary embodiments and examples are described in the present application, but various features, methods, and functions described in one or more embodiments are not limited to application in specific embodiments and can be applied to the embodiments alone or in various combinations.

[0102] Therefore, numerous modifications not shown in the examples are conceivable within the technical scope disclosed in the present specification, including, for example, deformation, addition, or omission of at least one component, and extraction of at least one component and combination with components of other embodiments.

[0103] Description of Reference Numerals

[0104] 1, 17, 27…tray; 2, 19, 28…groove; 3, 20, 29…support (supporting part); 4…camera (camera for taking images of the surface of the inspected object); 5…camera (camera for taking images of the back of the inspected object); 6…inspection table; 7, 21, 30…bottom surface portion of the groove of the tray; 8…side inspection table; 9, 23, 24, 25, 26…side camera; 10…printed wiring board; 11…chip component; 12…connector for external connection; 13…lens cover; 14…adhesive; 15…lens; 16, 22, 31…lens shape; 18…reflector; 50, 50a, 50b, 50c, 50d, 50e, 50f, 50g, 50h, 50i…semiconductor package (inspected object).

Claims

1. A method for inspecting the appearance of an object, using an appearance inspection device to inspect the appearance of the object to be inspected, The appearance inspection device comprises: A flat tray having a plurality of transparent grooves for separately placing a plurality of the inspection objects; a plurality of first cameras separately disposed on the front side and the back side of the planar tray, capable of simultaneously photographing the plurality of inspection objects from the front side and the back side of the tray; and The second camera is capable of photographing the flat tray from the side other than the front and back sides. Each groove has a support member that contacts the inspection object along the outer circumference of the inspection object when the inspection object is placed thereon and supports the inspection object. The method for inspecting the appearance of an article is characterized in that: The plurality of inspection objects are photographed from the front side and the back side of the tray using the first camera, and the inspection objects are photographed from the side side using the second camera.

2. A method for inspecting the appearance of an object, using an appearance inspection device to inspect the appearance of the object to be inspected, The appearance inspection device comprises: A flat tray having a plurality of transparent grooves for separately placing a plurality of the inspection objects; a plurality of first cameras separately disposed on the front side and the back side of the planar tray, capable of simultaneously photographing the plurality of inspection objects from the front side and the back side of the tray; and a reflector disposed on a surface of the groove facing a side surface of the object to be inspected, Each groove has a support member that contacts the inspection object along the outer circumference of the inspection object when the inspection object is placed thereon and supports the inspection object. The method for inspecting the appearance of an article is characterized in that: The first camera simultaneously captures the surface of the inspection object, the image of the side surface reflected by the reflector, and the back surface of the inspection object, thereby inspecting the inspection object.

3. The method for inspecting the appearance of an article according to claim 1, characterized in that: The tray forms a grid-like groove when viewed from the surface side, and the object to be inspected is arranged in a manner such that one object is placed in a specific longitudinal or lateral direction of the grid-like groove, and only one object is placed in the same direction no matter which side is viewed from, so that the object to be inspected can be inspected by photographing it simultaneously from the surface, back and side of the tray.

4. The method for inspecting the appearance of an article according to claim 3, characterized in that: The tray is formed with lattice-shaped grooves having different depths in the same longitudinal and lateral directions when viewed from any of the side surfaces, and the inspection objects are placed in the grooves to be inspected.

5. The method for inspecting the appearance of an article according to any one of claims 1 to 4, characterized in that: A portion of the bottom surface of the groove is formed into a lens shape.

6. The method for inspecting the appearance of an article according to any one of claims 1 to 5, characterized in that: The appearance inspection device is provided with an illumination device selected according to the shape or size of the object to be inspected, avoiding the viewing angle of the camera, and photographing each side surface of the object to be inspected under predetermined illumination conditions to perform appearance inspection.

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