Sealing mechanism for a load port door

Abstract

The present disclosure describes devices and systems for a seal, and methods for using the same. The seal includes a base portion configured to couple to a groove formed by an edge surface of a first component. The seal further includes a sealing portion extending from the base portion. The sealing portion is configured to create an air-tight seal between the first component and a sealing surface of a second component in response to a threshold sealing force applied against the sealing portion. The seal further includes a retention portion substantially perpendicular to the base portion. A surface of the retention portion is configured to press against the edge surface of the first component in response to the threshold sealing force applied against the sealing portion.

Description

TECHNICAL FIELD

[0001] Embodiments of the present disclosure generally relate to a sealing mechanism for a load port door. BACKGROUND

[0002] Electronic device manufacturing systems can include one or more tools or components for transporting and manufacturing substrates. Such tools or components can include a factory interface (e.g., an equipment front end module (EFEM)) connected to a load lock and / or a transfer chamber. In some cases, a front face of the factory interface can include one or more load ports. A load port is a station for inputting and outputting substrate carriers. A load port can include a frame adapted to connect the load port to the factory interface. The frame can include a transport opening via which one or more substrates can be transported between a substrate carrier and the factory interface.

[0003] Current load ports generally do not include a seal between the frame of the load port and the load port door. However, such a configuration can be inefficient because current systems do not maintain a controlled atmosphere between the frame and the door. SUMMARY

[0004] Some embodiments described herein encompass a seal including a base portion configured to couple to a groove formed by an edge surface of a first component. The seal further includes a sealing portion extending from the base portion. The sealing portion is configured to create an air-tight seal between a sealing surface of the first component and a second component in response to a threshold sealing force applied against the sealing portion. The seal further includes a retention portion substantially perpendicular to the base portion. A surface of the retention portion is configured to press against the edge surface of the first component in response to the threshold sealing force applied against the sealing portion.

[0005] Some embodiments described encompass a load port door. The load port door includes an inner surface and an outer surface. The load port door further includes an edge surface including a groove formed in the edge surface. The load port further includes a seal coupled to the groove. The seal includes a base portion configured to couple to the groove and a sealing portion extending from the base portion. The sealing portion is configured to create an air-tight seal between a sealing surface of the load port door and a frame of the load port in response to a threshold sealing force applied against the sealing portion. The seal further includes a retention portion substantially perpendicular to the base portion. A surface of the retention portion is configured to press against the edge surface in response to the threshold force applied against the sealing portion.

[0006] Some implementations described encompass a load port for receiving a substrate carrier. The load port includes a frame adapted for connecting the load port to a factory interface. The frame includes a transfer opening through which one or more substrates can be transferred between the substrate carrier and the factory interface. The load port further includes a load port door configured to substantially fill the transfer opening. The load port door includes an edge surface forming a groove. The load port further includes a seal coupled to the groove formed in the edge surface of the load port door. The seal includes a base portion and a sealing portion extending from the base portion. The seal is coupled to the groove of the load port door via the base portion. The sealing portion is configured to create an air-tight seal between the load port door and a sealing surface of the frame in response to a threshold sealing force applied against the sealing portion. The seal further includes a retention portion substantially perpendicular to the base portion. A surface of the retention portion is configured to press against the edge surface of the load port door in response to the threshold sealing force applied against the sealing portion. BRIEF DESCRIPTION OF DRAWINGS

[0007] The disclosure is illustrated by way of example and not by way of limitation in the figures of the accompanying drawings in which like references indicate similar elements. It should be noted that different references to "an" or "one" implementation throughout this disclosure are not necessarily to the same implementation, and such references mean at least one.

[0008] FIG. 1A is a top view schematic of an example electronic device manufacturing system according to aspects of the present disclosure.

[0009] FIG. 1B is a side view schematic of an example electronic device manufacturing system according to aspects of the present disclosure.

[0010] FIG. 1C is a front view schematic of an example electronic device manufacturing system according to aspects of the present disclosure.

[0011] FIG. 2A is a front view schematic of an example load port frame and seal assembly according to aspects of the present disclosure.

[0012] FIG. 2B is a perspective view of an example load port frame and seal assembly according to aspects of the present disclosure.

[0013] FIG. 2C is a cross-sectional view of an example seal assembly according to aspects of the present disclosure.

[0014] FIG. 3A is a cross-sectional view of an example load port frame and seal assembly according to aspects of the present disclosure.

[0015] FIG. 3Bis a perspective cross-sectional view of an example load port frame and seal assembly according to aspects of the present disclosure.

[0016] FIG. 4A to FIG. 4B is a cross-sectional view of an example load port door according to aspects of the present disclosure.

[0017] FIG. 4C to FIG. 4D is a perspective view of an example load port door according to aspects of the present disclosure.

[0018] FIG. 5 is a flowchart of a method for transferring a substrate from a substrate carrier to a factory interface according to embodiments of the present disclosure. DETAILED DESCRIPTION

[0019] Embodiments described herein encompass systems and methods related to seals for load ports. Some embodiments relate to a seal configured to couple to a load port door. Some embodiments relate to a load port door having a seal. Some embodiments relate to a load port comprising a door having a seal. Other embodiments relate to seals that can be used for other components of a processing system, such as seals for side storage pods (SSPs), front opening unified pods (FOUPs), etc. It should be understood that embodiments described herein with respect to seals for load port doors are also applicable to seals for any other component, chamber, or device used in a manufacturing system, for example, in a semiconductor manufacturing system.

[0020] Many conventional load ports do not include a seal between the interface of the load port door and the load port frame. As a result, conventional systems often have leaks around the load port door. A positive pressure can be maintained within a factory interface (e.g., EFEM) chamber coupled with the load port such that contaminants are not introduced through the interface between the load port door and the load port frame. However, if such a positive pressure is maintained, the leaking gas increases the cost of use of the factory interface. Furthermore, the leaking gas through the conventional unsealed interface with the load port door can cause corrosion at the interface, which can result in particle generation. The generated particles can be introduced into the substrate carriers (e.g., FOUPs) and the factory interface, thereby contaminating the conventional system.

[0021] Some conventional load ports can include traditional O-ring seals (e.g., having a generally circular cross-section) between the load port door and the load port frame. However, these traditional O-ring seals typically rely on large forces to form an air-tight seal. Typically, load port door actuators are not capable of providing the large forces relied upon by traditional O-ring seals. As an example, in cases where a traditional O-ring seal is used, the load port door actuator pushes the load port door against the load port frame such that the O-ring seal disposed between the load port door and the load port frame is sufficiently compressed to form an air-tight seal. Load port door actuators that include can provide sufficient force to seal using traditional O-ring seals can add additional cost and weight to the system. Additionally, conventional load port doors typically have complex shapes (e.g., such as having a rabbet around the edges of the door) that increase the manufacturing cost of the load port door due to additional use of material and additional machining performed. Furthermore, due to space constraints, it is typically not possible to include traditional O-ring seals. However, conventional load port doors that employ traditional O-ring seals typically have a thicker profile to accommodate the machined grooves to secure the O-ring seals, increasing the weight and cost of the door.

[0022] In some embodiments of the disclosure, a load port includes a frame adapted to connect the load port to a factory interface. The frame includes a transfer opening through which one or more substrates can be transferred between a substrate carrier and the factory interface. The load port includes a load port door on a factory interface side of the frame to substantially fill the transfer opening when the door is in a closed position. The load port door is coupled to a door mechanism (e.g., an actuator operated by a load port controller). The door mechanism can position the load port door from the closed position to an open position, and vice versa.

[0023] The load port door includes a seal having a base portion, a sealing portion, and / or a retaining portion. The seal is configured to be coupled to a groove of the load port door via the base portion. The groove can be formed by an edge surface of the load port door and can extend around a perimeter of the load port door. The sealing portion of the seal can extend from the base portion. The sealing portion can form an air-tight seal against a sealing surface of the load port frame when the door is closed (e.g., closed by the door mechanism). The sealing portion can create a seal in response to a force applied against the sealing portion. The retaining portion of the seal can be substantially perpendicular to the base portion. A surface of the retaining portion can press against the edge surface of the load port door in response to the force applied against the sealing portion. The retaining portion can cause the base portion of the seal to be retained in the groove of the load port door when the force is applied against the sealing portion.

[0024] Many advances can be realized by providing the seal of the present disclosure. For example, the seal of the present disclosure can result in a lower sealing force to form an air-tight seal between a load port door and a load port frame compared to the sealing force for a conventional O-ring seal, reducing the force requirement on the door actuator and allowing the load port frame to be constructed from less expensive materials (e.g., sheet metal). Additionally, the seal of the present disclosure reduces leaks that are present in conventional systems by sealing the interface between the load port door and the load port frame, thus reducing material consumption (e.g., gas, etc.) and reducing the amount of contaminants leaked around the load port door compared to conventional systems. Contaminants can be left in the system and can be properly vented. Furthermore, by including the seal on the load port door, a sensing system (e.g., a laser beam, etc.) can detect wafers present in the transfer opening of the load port frame without any obstruction from the seal (e.g., the seal moves away with the door when the door is opened). Also, as an additional improvement over conventional seals and systems, the retention portion of the seal helps to keep the seal in the receiving groove on the load port door when force is applied against the sealing portion of the seal, rather than causing the seal to "roll" out of the groove. Additionally, the retention portion allows the seal to sit more loosely in the groove compared to conventional seals, thus improving the installation properties of the seal so that the seal is easier to install while still retaining the seal itself in the groove of the load port door.

[0025] FIG. 1A to FIG. 1C An electronic device manufacturing system 100 is described in which one or more load ports are coupled to a factory interface 106. FIG. 1A is a top view schematic of an example electronic device manufacturing system 100 according to aspects of the present disclosure. FIG. 1B is a side view schematic of an example electronic device manufacturing system 100 according to aspects of the present disclosure. FIG. 1C is a front view schematic of an example electronic device manufacturing system 100 according to aspects of the present disclosure. Note that FIG. 1A to 1C is for illustration purposes and different components can be positioned in different locations relative to each view.

[0026] The electronic device manufacturing system 100 (also referred to as an electronic processing system) is configured to perform one or more processes on a substrate 102. The substrate 102 can be any suitable rigid, fixed size planar article suitable for manufacturing electronic devices or circuit components on the substrate 102, such as a silicon-containing disc or wafer, a patterned wafer, a glass sheet, or the like.

[0027] The electronic device manufacturing system 100 includes a process tool (e.g., a mainframe) 104 and a factory interface 106 (e.g., an EFEM) coupled to the process tool 104. The process tool 104 includes a housing 108 having a transfer chamber 110 in the housing 108. The transfer chamber 110 includes one or more processing chambers (also referred to as process chambers) 114, 116, 118 disposed about and coupled to the transfer chamber 110. The processing chambers 114, 116, 118 can be coupled to the transfer chamber 110 through respective ports such as slit valves or the like.

[0028] The processing chambers 114, 116, 118 can be adapted to perform any number of processes on the substrate 102. The same or different substrate processes can occur in each of the processing chambers 114, 116, 118. Examples of substrate processes include atomic layer deposition (ALD), physical vapor deposition (PVD), chemical vapor deposition (CVD), etching, annealing, curing, pre-cleaning, removal of metal or metal oxide, or the like. In one example, a PVD process is performed in one or both of the process chambers 114, an etching process is performed in one or both of the process chambers 116, and an annealing process is performed in one or both of the process chambers 118. Other processes can be performed on the substrate in the process chambers. The processing chambers 114, 116, 118 can each include a substrate support assembly. The substrate support assembly can be configured to hold a substrate in place while the substrate process is performed.

[0029] The transfer chamber 110 also includes a transfer chamber robot 112. The transfer chamber robot 112 can include one or more arms, where each arm includes one or more end effectors at an end of each arm. The end effectors can be configured to handle a particular object such as a wafer. Alternatively or additionally, the end effectors can be configured to handle objects such as process kit rings. In some implementations, the transfer chamber robot 112 can be a selective compliance assembly robot (SCARA) robot such as a 2-link SCARA robot, a 3-link SCARA robot, a 4-link SCARA robot, and so forth.

[0030] The load lock 120 can also be coupled to the housing 108 and the transfer chamber 110. The load lock 120 can be configured to interface and couple to the transfer chamber 110 on one side and the factory interface 106 on the other side. In some embodiments, the load lock 120 can have an environmentally controlled atmosphere that changes from a vacuum environment, in which substrates can be transferred to and from the transfer chamber 110, to an inert gas environment at or near atmospheric pressure, in which substrates can be transferred to and from the factory interface 106. In some embodiments, the load lock 120 is a stacked load lock having a pair of upper inner chambers and a pair of lower inner chambers located at different vertical levels (e.g., one above the other). In some embodiments, the pair of upper inner chambers can be configured to receive processed substrates from the transfer chamber 110 for removal from the process tool 104, while the pair of lower inner chambers can be configured to receive substrates from the factory interface 106 for processing in the process tool 104. In some embodiments, the load lock 120 can be configured to perform a substrate process (e.g., etching or pre-cleaning) on one or more substrates 102 housed in the load lock 120.

[0031] The factory interface 106 can be any suitable enclosure, such as an equipment front end module (EFEM). The factory interface 106 can be configured to receive substrates 102 from substrate carriers 122 (e.g., front opening unified pods (FOUPs)) docked at various load ports 124 of the factory interface 106. A factory interface robot 126 (shown in dashed lines) can be configured to transfer substrates 102 between the substrate carriers (also referred to as containers) 122 and the load lock 120. In other and / or similar embodiments, the factory interface 106 is configured to receive replacement parts from a replacement parts storage container. The factory interface robot 126 can include one or more robotic arms and can be or include a SCARA robot. In some embodiments, the factory interface robot 126 has more links and / or more degrees of freedom than the transfer chamber robot 112. The factory interface robot 126 can include an end effector on the end of each robotic arm. The end effector can be configured to pick up and handle a particular object, such as a wafer. Alternatively or additionally, the end effector can be configured to handle objects such as process kit rings. Any conventional robot type can be used for the factory interface robot 126. The transfer can be in any order or direction. In some embodiments, the factory interface 106 can be maintained in a non-reactive gas environment (using, for example, nitrogen, other inert gas, or air with controlled sub-ingredient parameters) at, for example, slightly positive pressure.

[0032] The factory interface 106 can be configured with any number of load ports 124, which can be located at one or more sides of the factory interface 106 and at the same or different heights. One or more load ports 124 can include a load port door designed with a seal having a base portion, a sealing portion, and / or a retaining portion, as described herein. Such a designed seal and load port will be discussed in more detail with reference to FIG. 2A to FIG. 2C , FIG. 3A to FIG. 3B and FIG. 4A to FIG. 4D .

[0033] The factory interface 106 can include one or more auxiliary components (not shown). The auxiliary components can include substrate storage containers, metrology equipment, servers, air conditioning units, etc. For example, the substrate storage containers can store substrates and / or substrate carriers (e.g., FOUPs). The metrology equipment can be used to determine property data of products produced by the electronic device manufacturing system 100. In some implementations, the factory interface 106 can include an upper compartment 160, as seen in FIG. 1B to FIG. 1C . The upper compartment 160 can house electronic systems (e.g., servers, air conditioning units, etc.), utility cables, system controllers 128, or other components.

[0034] In some implementations, the transfer chamber 110, process chambers 114, 116, and 118, and / or load locks 120 are maintained at a vacuum level. The electronic processing system 100 can include one or more vacuum ports coupled to one or more stations of the electronic device manufacturing system 100. For example, a first vacuum port 130a can couple the factory interface 106 to the load lock 120. A second vacuum port 130b can couple to the load lock 120 and be disposed between the load lock 120 and the transfer chamber 110.

[0035] The electronic device manufacturing system 100 can also include a system controller 128. The system controller 128 can be and / or include a computing device such as a personal computer, a server computer, a programmable logic controller (PLC), a microcontroller, or the like. The system controller 128 can include one or more processing devices, which can be general purpose processing devices such as microprocessors, central processing units (CPUs), or the like. More particularly, the processing devices can be complex instruction set computing (CISC) microprocessors, reduced instruction set computing (RISC) microprocessors, very long instruction word (VLIW) microprocessors, processors implementing other instruction sets, or processors implementing a combination of instruction sets. The processing devices can also be one or more special-purpose processing devices such as application specific integrated circuits (ASICs), field programmable gate arrays (FPGAs), digital signal processors (DSPs), network processors, or the like. The system controller 128 can include data storage devices (e.g., one or more disk drives and / or solid state drives), main memory, static memory, network interfaces, and / or other components. The system controller 128 can execute instructions to perform any one or more of the methods and / or implementations described herein. The instructions can be stored on a computer-readable storage medium, which can include the main memory, static memory, auxiliary storage, and / or the processing devices (during instruction execution). The system controller 128 can include an environment controller configured to control the environment (e.g., pressure, humidity level, vacuum level, etc.) within the factory interface 106. In implementations, the execution of instructions by the system controller 128 causes the system controller to perform one or more methods of FIG. 5 The system controller 128 can also be configured to allow human operators to input and display data, operational commands, and the like.

[0036] FIG. 2A to FIG. 2C FIG. 1 is a perspective view of a load port and seal assembly 200 according to implementations of the present disclosure. FIG. 2A is a front view schematic of a load port and seal assembly 200 according to implementations of the present disclosure. FIG. 2B is a perspective view of a load port and seal assembly 200 according to implementations of the present disclosure. FIG. 2C is a cross-sectional view of a seal 220 as indicated by section A-A 230. In some implementations, the exterior of the load port frame 224 (or any other load port frame discussed herein) can comply with SEMI (International Semiconductor Equipment and Materials) standards and requirements.

[0037] The load port door 210 can be positioned in a closed position to secure to the transfer opening to maintain the controlled atmosphere environment in the factory interface 106. A door mechanism can be used to position the load port door in an open position. When in the open position, the transfer opening in the assembly 200 enables the factory interface robot 126 to transfer a substrate (e.g., wafer) between a substrate carrier 122 coupled to the load port 124 and the factory interface 106.

[0038] The seal 220 can be positioned around the load port door 210. In some implementations, the geometry of the seal is such that a base portion 222 of the seal is coupled to the load port door 210 and a surface of a seal portion 223 extending from the base portion 222 contacts a surface (e.g., a sealing surface) of the load port frame 224 (in response to the load port door being in the closed position). In some implementations, the seal portion 223 can cantilever from the base portion 222. The seal 220 can create an air-tight seal when the load port door 210 is in the closed position. In some examples, a surface of the seal portion 223 proximate to a distal end of the seal 220 engages the sealing surface of the load port frame 224 to form the air-tight seal. The base portion 222 can form a seal against the load port door 210. The load port door 210 can exert a force (e.g., a threshold sealing force) on the seal 220 when the load port door 210 is in the closed position, and the load port frame 224 can exert a counter force 227 on the seal portion 223 of the seal 220. In some implementations, the load port door 210 moves to the closed position when a force is applied (e.g., by a door actuator). In some implementations, the force (e.g., load) applied to the seal 220 during sealing (e.g., when the door is closed) is perpendicular to the surface at which the seal connects to the load port door (e.g., as shown in FIG. 3B). Such a perpendicular force can cause the seal to disengage from the load port door. In some implementations, the seal 220 is configured to remain engaged with the load port door even in sealing conditions in which the sealing force is perpendicular to the connection between the load port door and the seal. FIG. 2C

[0039] ​In some embodiments, the seal 220 is a single piece of material, such as vulcanized rubber or any other type of elastomer. The seal 220 can be composed of a flexible elastomeric material. Those skilled in the art will appreciate that other suitable materials can be used, such as natural rubber, silicone, plastic, other synthetic rubbers, polymers, expanded foam, etc. In some embodiments, the seal 220 can be composed of multiple components coupled together. In some examples, the base portion 222 can be composed of a first material, and the sealing portion 223 and the retaining portion 226 can be composed of a second material and can be bonded and / or coupled to the base portion 222. In some embodiments, at least a portion of the seal 220 is composed of a plastic material. In some embodiments, the seal 220 is extruded or molded.

[0040] The retaining portion 226 of the seal 220 can be disposed proximate to the base portion 222. In some embodiments, the retaining portion 226 is a protrusion that protrudes generally perpendicularly relative to the base portion 222. The retaining portion 226 can be disposed toward the distal end of the seal but proximate to the base portion 222. The retaining portion 226 can include a radiused corner. In some embodiments, the seal 220 includes a radiused corner between the retaining portion 226 and the base portion 222. In some embodiments, the seal 220 includes a radiused corner from which the sealing portion 223 extends from the retaining portion 226. The retaining portion 226 can cause the seal to remain connected to the load port door under sealing conditions (e.g., a sealing force is applied to create an air-tight seal). Further details regarding the function of the retaining portion 226 will be discussed with reference to FIG. 3A

[0041] ​In some embodiments, the seal 220 can have an overall height of between about 10 mm and 15 mm. The base portion 222 can have a height of between about 1.5 mm and 2.5 mm. In some embodiments, the seal 220 can have an un-flexed width (e.g., width in a natural state) of between about 6 mm and 10 mm. When a sealing force is applied (e.g., to the sealing portion 223), the seal 220 can flex to a narrower width. In some embodiments, the sealing portion 223 can have a width of between about 1 mm and 2 mm. In some embodiments, the sealing portion 223 is wider near the base portion 222 and narrower near the distal end. The sealing portion 223 can taper in width at a distance away from the base portion 222. In many embodiments, the base portion 222 is configured to fit into a conventional groove (e.g., dovetail groove, slotted groove, square groove, etc.). The surface of the base portion 222 can have a radius that fits into a dovetail groove. In some embodiments, the base portion 222 can be configured to substantially fill a groove, but not completely fill a groove (see, e.g., FIG. 3A ). The base portion 222 can include rounded corners. The base portion 222 can have a width of between about 2.5 and 4 mm. In some embodiments, the neck of the base portion 222 (e.g., the narrow section of the base portion 222) can have a width of between about 2 mm and 3.5 mm. Those skilled in the art will appreciate that the seal 220 can have different dimensions than described herein to suit certain applications.

[0042] FIG. 3A and FIG. 3B FIG. 1 1 is a perspective view of an example load port frame and seal assembly 300, in accordance with aspects of the present disclosure. FIG. 3A FIG. 12 is a cross-sectional view of the example load port frame and seal assembly 300. FIG. 3B FIG. 13 is a perspective view of the assembly 300. The assembly 300 includes a first component (e.g., a load port door 210), a seal 220, and a second component (e.g., a load port frame 224). As shown, the load port door 210 is in a closed position, and the seal 220 forms an air-tight seal between a sealing surface 224A of the load port frame 224 and an edge surface 210A of the load port door 210.

[0043] In some implementations, the edge surface 210A can be angled relative to the sealing surface 224A. As shown, the edge surface 210A is generally perpendicular to the sealing surface 224A. The load port door 210 can be movable relative to the load port frame 224. A door actuator (not shown) can move the load port door 210 between a closed position and an open position. The load port door 210 can be shown in the closed position. To move to the open position, the load port door 210 can be moved to the left (as shown) away from the load port frame 224 and then downward (as shown) to expose the transfer opening. The door actuator can exert a force on the load port door 210 to move the load port door 210 to the closed position. In response to the load port door 210 moving to the closed position, the sealing portion 223 of the seal 220 can be urged against the load port frame 224. The seal 220 can create an air-tight seal in response to a threshold sealing force (e.g., by the door actuator, by the load port frame 224, etc.) being exerted against the sealing portion 223.

[0044] The sealing surface 224A of the load port frame 224 can exert a reaction force 227 against the surface of the sealing member 223. The reaction force 227 can be normal to the plane of the sealing surface 224A and can be generally equal to the threshold sealing force. The threshold sealing force can be exerted generally parallel to the plane of the edge surface 210A. In some implementations, to form an air-tight seal, the sealing force exerted is a force between approximately 50 and 210 Newtons. In some implementations, the sealing force exerted is between approximately 70 and 130 Newtons. In some implementations, the sealing force exerted is less than a maximum force that can be exerted by a door actuator (not shown) to the load port door 210. To form an air-tight seal, a sealing force greater than the threshold sealing force can be exerted. In some implementations, at least a portion of the seal 220 can flex when the sealing force is exerted. The air-tight seal can inhibit the flow of fluids (e.g., gases, air, nitrogen, etc.) and contaminants (e.g., particles, etc.) between the interface of the load port door 210 and the load port frame 224.

[0045] In some embodiments, a portion of the edge surface 210A exerts a reaction force 228 against a surface of the retaining portion 226 of the seal 220. The reaction force 228 can be normal to the edge surface 210A. The reaction force 228 can be exerted in response to a moment about the axis of the seal 220 that is generated by the reaction force 227. The reaction force 228, in turn, can cause a reaction force 229 to be exerted against a surface of the base portion 222 of the seal 220. In some embodiments, the reaction force 229 can cause the base portion 222 to be retained in the groove 214 of the load port door 210. In some embodiments, the base portion 222 can be retained in the groove 214 of the load port door 210 by the elastic properties of the seal 220. In some instances, the seal 220 is elastically stretched to fit around the load port door 210 and seat the base portion 222 in the groove 214. The elastic properties of the seal 220 can cause the base portion 222 to be retained in the groove 214. The groove 214 can be a dovetail groove, a half dovetail groove, or a square groove. A downward vertical component (as shown) of the reaction force 229 on the base portion 222 can help retain the base portion 222 within the groove 214, thereby causing the seal 220 to remain coupled to the load port door 210 when a sealing force is exerted against the sealing portion 223. In some embodiments, a deeper groove can help retain the seal 220 in the groove 214. In many embodiments, the sum of the reaction forces 227, 228, 229, the sealing force exerted against the sealing portion 223, and any moments about the axis of the seal 220 generated by these forces is a net zero force and moment.

[0046] FIG. 4A to FIG. 4B is a cross-sectional view of an example load port door 210 according to aspects of the present disclosure. FIG. 4C and FIG. 4D is a perspective view of an example load port door 210 according to aspects of the present disclosure. FIG. 4A shows a cross-section of the groove 214A. FIG. 4B shows a cross-section of the groove 214B.

[0047] In some embodiments, the groove 214A is a dovetail groove formed in the edge surface 210A. The groove 214A can be configured to accept the base portion 222 of the seal 220. In some embodiments, the groove 214A can be an interface that couples the seal 220 to the load port door 210. The groove 214A can include two sidewalls 217 and a bottom wall.

[0048] In some embodiments, the groove 214A can be cut (e.g., by a machining tool such as a milling cutter) along a straight section (e.g., a straight portion, a non-curved portion, etc.) of the perimeter of the load port door 210 (seeFIG. 4C and FIG. 4D ). The groove 214A can be cut by a dovetail cutter. Due to the nature of the dovetail cutter (e.g., wider at the bottom than at the top), the dovetail cannot be cut on a circular profile (e.g., along a curved surface). Thus, in some embodiments, a rectangular groove 214B (e.g., generally rectangular, square, non-dovetail, etc.) can be cut along the curved sections (e.g., curved portions, fillets, etc.) of the perimeter of the load port door 210 (e.g., see FIG. 4C and FIG. 4D ). In some examples, the groove 214B can be cut on a curved (e.g., rounded) section of the edge surface 210A of the load port door 210. The groove 214B can be cut by a conventional milling cutter. In some embodiments, the groove 214B is configured to accept the base portion 222 of the seal 220. In some embodiments, the groove 214A and the groove 214B are configured to receive O-rings of standard sizes common in the industry. A transition zone 216 can be included in the edge surface 210A where the groove 214A intersects the groove 214B. The transition zone 216 can be a milling plunge zone where the dovetail cutter begins and / or ends cutting the dovetail groove 214A.

[0049] In some embodiments, the groove 214A and the groove 214B have substantially the same depth. In some examples, the groove 214A and 214B have a depth of between about 1.5 mm and 2.5 mm. In some embodiments, the throat 213 of the groove 214A can have a width of between about 2.2 mm and 3.5 mm. In some embodiments, the throat 215 of the groove 214B can have a width of between about 3 mm and 4 mm. In some embodiments, the width of the throat 215 is wider than the width of the throat 213. In some embodiments, the maximum width of the groove 214A is greater than the depth of the groove 214A. In some embodiments, the sidewalls 217 of the dovetail groove 214A form an angle with the edge surface 210A. In some examples, the sidewalls 217 and the edge surface 210A form an angle of between about 45 degrees and 80 degrees. In some examples, at least one sidewall forms an angle with respect to the edge surface 210A. In some embodiments, the sidewalls of the groove 214B are generally perpendicular to the edge surface 210A. It will be understood by those skilled in the art that the groove 214A and the groove 214B can have different dimensions than described herein to suit certain applications.

[0050] FIG. 5is a flowchart of a method 500 for transferring a substrate from a substrate carrier to a factory interface according to embodiments of the present disclosure. In some embodiments, the method 500 is performed by and / or caused for performance by processing logic that includes hardware (e.g., circuitry, dedicated logic, programmable logic, microcode, processing device, etc.), software (such as instructions run on a processing device, general purpose computer system, or a special purpose machine), firmware, microcode, or a combination of items. In some embodiments, the method 500 is performed at least in part by an electronic device manufacturing system, such as the electronic device manufacturing system 100 of FIG. 1A to FIG. 1C FIG. 1.

[0051] For simplicity of explanation, the method 500 is depicted and described as a series of operations. However, operations in accordance with this disclosure can occur in various orders and / or concurrently with other operations not presented and described herein. Furthermore, not all illustrated operations can be performed in accordance with the methods 500 in implementation of the disclosed subject matter. In addition, those skilled in the art will understand and appreciate the methodology 500 could alternatively be represented as a series of interrelated states via a state diagram or events.

[0052] At block 510, the load port receives a substrate carrier. In some examples, the substrate carrier is a FOUP. In some embodiments, the load port includes a frame adapted to connect the load port to the factory interface. The frame includes a transfer opening through which one or more substrates can be transferred between the substrate carrier and the factory interface. The load port also includes an actuator coupled to the frame and a load port door coupled to the actuator. The load port door can be configured to seal the transfer opening. The actuator can position the load port door from a closed position to an open position and from the open position to the closed position.

[0053] The load port door can include one or more seals coupled to an edge surface of the load port door. The seal can include a base portion, a sealing portion extending from the base portion, and a retention portion protruding substantially perpendicular to the base portion. The sealing portion can be configured to engage a sealing surface of the load port frame when the load port door is in the closed position in response to a threshold sealing force applied against the sealing portion to form an air-tight seal between the load port door and the load port frame. The base portion can be configured to be coupled to the load port door via a groove formed in an edge surface of the load port door.

[0054] At block 520, the substrate carrier can be positioned such that a front portion of the substrate carrier is aligned with an opening (e.g., a transfer opening) of the load port frame.

[0055] At block 530, the load port door disposed in the opening can be opened (e.g., via the door actuator). The load port door can be moved (e.g., by the door actuator) away from the opening such that the seal coupled to the load port door disengages the sealing surface of the load port frame. The door can then be lowered away from the opening.

[0056] At block 540, a factory interface robot disposed within the factory interface can retrieve the substrate from the substrate carrier.

[0057] At block 550, once the substrate is retrieved, the load port door can be positioned from the open position to the closed position using the actuator such that the seal coupled to the load port door engages the sealing surface of the load port frame to form an air-tight seal. The actuator can exert a sealing force on the load port door having a magnitude greater than a threshold sealing force such that the seal can create an air-tight seal between the load port door and the load port frame.

[0058] The foregoing description has provided a number of specific details for the purpose of providing a thorough understanding of several implementations of the present disclosure as described in the specification and illustrated in the figures. However, it will be apparent to those skilled in the art that the specific details need not be implemented to practice at least some implementations of the present disclosure. The specific details can, therefore, be subsumed by other specific details in order to illustrate some implementations. Thus, one specific implementation can be different from another specific implementation concerning a detail or an implementation.

[0059] Reference throughout this specification to “one implementation” or “an implementation” means that a particular feature, structure, or characteristic described in connection with the implementation is included in at least one implementation. Thus, the appearances of the phrase “in one implementation” or “in an implementation” in various places throughout the specification are not necessarily referring to the same implementation. Furthermore, the term “or” is intended to mean an inclusive “or” rather than an exclusive “or.” When the term “about” or “approximately” is used herein, this is intended to mean that the nominal value provided is accurate within ±10%.

[0060] Although the operations of the methods herein are illustrated and described in a particular order, the order of the operations can be changed so that certain operations can be performed in an inverse order, so that some operations can be performed, at least in part, concurrently with other operations, and so that some operations can be performed, at least in part, in parallel with other operations. In another implementation, instructions or sub-operations of distinct operations can be in an intermittent and / or alternating manner.

[0061] It is to be understood that the above description is intended to be illustrative and not restrictive. Many other embodiments will be apparent to those of skill in the art upon reading and understanding the above description. The scope of the disclosure should, therefore, be determined with reference to the appended claims, along with the full scope of equivalents to which such claims are entitled.

Claims

1. A seal, comprising: a base portion configured to couple to a groove formed by an edge surface of a first component; a sealing portion extending from the base portion, wherein the sealing portion is configured to create an air-tight seal between the first component and a sealing surface of a second component in response to a threshold sealing force applied against the sealing portion; and a retention portion perpendicular to the base portion, wherein a surface of the retention portion is configured to press against the edge surface of the first component in response to the threshold sealing force applied against the sealing portion.

2. The seal of claim 1, wherein the edge surface of the first component is perpendicular with respect to the sealing surface of the second component, and wherein the first component is movable with respect to the second component.

3. The seal of claim 1, wherein at least the sealing portion of the seal comprises a flexible elastomeric material.

4. The seal of claim 1, wherein the first component is a load port door of a factory interface, and the second component is a frame of a load port, the frame comprising an opening for receiving the load port door, wherein the load port door moves to a closed position in response to the threshold sealing force applied against the sealing portion, and wherein the threshold sealing force is applied parallel to a plane of the edge surface of the first component.

5. The seal of claim 1, wherein the threshold sealing force is 50 to 210 Newtons.

6. The seal of claim 1, wherein the retention portion is configured to create a moment about an axis of the seal in response to the threshold sealing force applied against the sealing portion, wherein the base portion is configured such that a reaction force on a surface of the base portion causes the base portion to be retained in the groove.

7. The seal of claim 1, wherein at least a portion of the groove formed by the edge surface of the first component is a dovetail slot having two sidewalls and a bottom wall, wherein a maximum width between the two sidewalls is greater than a depth of the dovetail slot, and wherein at least one sidewall forms an angle of 45 to 80 degrees with respect to the bottom wall.

8. A load port door, comprising: an inner surface; an outer surface; an edge surface comprising a groove formed in the edge surface; and a seal coupled to the groove, wherein the seal comprises: a base portion configured to couple to the groove; a sealing portion extending from the base portion, wherein the sealing portion is configured to create an air-tight seal between the load port door and a sealing surface of a frame of a load port in response to a threshold sealing force applied against the sealing portion; and a retention portion perpendicular to the base portion, wherein a surface of the retention portion is configured to press against the edge surface in response to the threshold sealing force applied against the sealing portion.

9. The load port door of claim 8, wherein the edge surface of the load port door is configured to be perpendicular with respect to the sealing surface of the frame of the load port, and wherein the load port door is configured to be movable with respect to the frame of the load port.

10. The load port door of claim 8, wherein at least the sealing portion of the seal comprises a flexible elastomeric material.

11. The load port door of claim 8, wherein the threshold sealing force is 50 to 210 Newtons, and wherein the threshold sealing force is applied parallel to a plane of the edge surface.

12. The load port door of claim 8, wherein the retaining portion of the seal is configured to generate a moment about an axis of the seal in response to the threshold sealing force applied against the sealing portion of the seal, wherein the base portion of the seal is configured such that a reaction force on a surface of the base portion causes the base portion to be retained in the groove.

13. The load port door of claim 8, wherein at least a portion of the groove is a dovetail groove having two sidewalls and a floor, wherein a maximum width between the two sidewalls is greater than a depth of the dovetail groove, and wherein at least one sidewall forms an angle of 45 to 80 degrees with respect to the floor.

14. The load port door of claim 8, wherein the groove is formed in the edge surface along a perimeter of the load port door, wherein the groove is a dovetail groove along at least a straight portion of the edge surface, and wherein the groove is a rectangular groove along at least a curved portion of the edge surface.

15. A load port for receiving a substrate carrier, comprising: a frame adapted for connecting the load port to a factory interface, the frame comprising a transfer opening through which one or more substrates can be transferred between the substrate carrier and the factory interface; a load port door configured to fill the transfer opening, wherein the load port door includes an edge surface that forms a groove; and a seal coupled to the groove formed in the edge surface of the load port door, wherein the seal comprises: a base portion, wherein the seal is coupled to the groove of the load port door via the base portion; a sealing portion extending from the base portion, wherein the sealing portion is configured to create an air-tight seal between the load port door and a sealing surface of the frame in response to a threshold sealing force applied against the sealing portion; and a retaining portion perpendicular to the base portion, wherein a surface of the retaining portion is configured to press against the edge surface of the load port door in response to the threshold sealing force applied against the sealing portion.

16. The load port of claim 15, wherein the edge surface of the load port door is configured to be perpendicular with respect to the sealing surface of the frame, wherein the load port door is configured to be movable with respect to the frame of the load port, and wherein the seal is configured to engage with the sealing surface of the frame when the load port door is in a closed position.

17. The load port of claim 15, wherein the retaining portion of the seal is configured to generate a moment about an axis of the seal in response to the threshold sealing force applied against the sealing portion of the seal, wherein the base portion of the seal is configured such that a reaction force on a surface of the base portion causes the base portion to be retained in the groove of the load port door.

18. The load port of claim 15, wherein at least a portion of the groove of the load port door is a dovetail slot having two sidewalls and a bottom wall, wherein a maximum width between the two sidewalls is greater than a depth of the dovetail slot, and wherein at least one sidewall forms an angle of 45 to 80 degrees with respect to the bottom wall.

19. The load port of claim 15, wherein the groove of the load port door is formed in the edge surface of the load port door along a perimeter of the load port door, wherein the groove is a dovetail slot along at least a straight portion of the edge surface of the load port door, and wherein the groove is a rectangular groove along at least a curved portion of the edge surface of the load port door.

20. The load port of claim 15, wherein the threshold sealing force is 50 to 210 Newtons, and wherein the threshold sealing force is applied parallel to a plane of the edge surface of the load port door.

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