Vacuum pump cleaning system for single crystal furnace and oxide anti-deposition screw pump

Abstract

The invention belongs to the technical field of vacuum pump cleaning, and particularly relates to a vacuum pump cleaning system for a single crystal furnace and an oxide deposition prevention screw pump.The vacuum pump cleaning system comprises the screw pump, the inlet end of the screw pump is communicated with the single crystal furnace, and an oxide deposition prevention device is arranged on a pump body of the screw pump; the oxide deposition prevention device is used for blowing compressed gas which does not react with doping in the single crystal furnace into a pump cavity of the screw pump during operation of the screw pump, the compressed gas is blown from the inlet end of the screw pump, the oxide deposition prevention device comprises a compressed gas generator and at least one gas blowing pipe, one end of the gas blowing pipe is connected to the compressed gas generator, and the other end of the gas blowing pipe is connected to the screw pump. The other end of the air blowing pipe is communicated with a pump body of the screw pump, the air blowing pipe blows compressed air to a rotor or an inner cavity in the vacuum pump and blows up oxide attached to the rotor or the inner cavity in the vacuum pump, the oxide is discharged from an outlet of the screw pump along with operation of the vacuum pump, and the situation that the oxide is deposited on the rotor, and consequently the pump is stuck is avoided.

Description

Technical Field

[0001] The invention belongs to the technical field of vacuum pump cleaning, and in particular relates to a vacuum pump cleaning system for a single crystal furnace and an oxide anti-deposition screw pump. Background Art

[0002] During the operation of the single crystal furnace, the vacuum pump plays a vital role. At present, the main vacuum pumps used in the industry are screw pumps and water ring pumps. Among them, screw pumps have been widely used in single crystal furnaces due to their energy saving and excellent vacuum performance. However, during the operation of the screw pump, the doping in the single crystal furnace, such as phosphorus, boron and other elements, will be oxidized into oxides. As the screw pump runs, the oxides will accumulate on the rotor or cavity in the screw pump. When there are too many accumulated oxides, it is easy to cause the pump rotor to get stuck, which will cause the single crystal furnace to return gas, causing serious economic losses. Summary of the invention

[0003] In view of this, the present invention provides a vacuum pump cleaning system for a single crystal furnace and an oxide anti-deposition screw pump to solve the technical problem in the prior art that as the screw pump runs, the oxides in the single crystal furnace will accumulate on the rotor or cavity in the screw pump. When the accumulated oxides are large, the pump rotor is easily stuck.

[0004] To achieve the above objectives, this application adopts the following scheme: A vacuum pump cleaning system for a single crystal furnace comprises a screw pump, wherein the inlet end of the screw pump is connected to the single crystal furnace, and an oxide anti-deposition device is arranged on the pump body of the screw pump, wherein the oxide anti-deposition device is used to blow compressed gas that does not react with doping in the single crystal furnace into the pump cavity of the screw pump during the operation of the screw pump, and the compressed gas is blown into the inlet end of the screw pump to remove oxides deposited on the pump rotor or cavity and blow the oxides out from the outlet of the screw pump, wherein the oxide anti-deposition device comprises a compressed gas generator and at least one blowing pipe, wherein one end of the blowing pipe is connected to the compressed gas generator, and the other end is connected to the pump body of the screw pump.

[0005] Preferably, at least one hole is opened on the outer shell of the pump body, one end of the blowing pipe is connected to the compressed gas generator, and the other end enters the pump cavity through the opening.

[0006] Preferably, it further comprises an oxide collecting device, which is connected to the outlet end of the screw pump and is used to collect oxides blown down from the pump chamber.

[0007] Preferably, the oxide collecting device is an oxide dissolving box, in which a dissolving liquid that dissolves the oxide is contained, and the oxide dissolving box is used to receive and dissolve or store the oxide purged from the pump chamber.

[0008] Preferably, a filtering device is further included, the inlet end of the filtering device is connected to the outlet end of the oxide dissolution tank, and is used to filter out solid oxide particles in the oxide dissolution tank, and the filtering device has a solid discharge port and a liquid discharge port.

[0009] Preferably, a liquid cooling device is also included, which includes a circulating pump and a liquid cooling shell arranged on the outer shell of the screw pump, a cavity is provided between the liquid cooling shell and the outer shell, a liquid cooling inlet and a liquid cooling outlet are provided on the liquid cooling shell, the inlet of the circulating pump is connected to the liquid discharge port, the outlet of the circulating pump is connected to the liquid cooling inlet, and the liquid cooling outlet is connected to the oxide dissolution tank.

[0010] Preferably, a flow control valve is provided on the air blowing pipe for adjusting the flow of the compressed gas blown into the pump chamber.

[0011] An oxide anti-deposition screw pump is applied to a single crystal furnace, comprising a screw pump and an oxide anti-deposition device; the oxide anti-deposition device is arranged on the pump body of the screw pump, the oxide anti-deposition device is used to blow compressed gas that does not react with doping in the single crystal furnace into the pump cavity of the screw pump, and the compressed gas is blown in from the inlet end of the screw pump to remove oxides deposited on the pump rotor or cavity, and blow the oxides out from the outlet of the screw pump, the oxide anti-deposition device comprises a compressed gas generator and at least one blowing pipe, one end of the blowing pipe is connected to the compressed gas generator, and the other end is connected to the pump body of the screw pump.

[0012] Preferably, at least one hole is opened on the outer shell of the pump body, one end of the blowing pipe is connected to the compressed gas generator, and the other end enters the pump cavity through the opening.

[0013] Preferably, it further comprises an oxide collecting device, which is connected to the outlet end of the screw pump and is used to collect oxides blown down from the pump chamber.

[0014] Preferably, the oxide collecting device is an oxide dissolving box, in which a dissolving liquid that dissolves the oxide is contained, and the oxide dissolving box is used to receive and dissolve or store the oxide purged from the pump chamber.

[0015] Preferably, a filtering device is further included, the inlet end of the filtering device is connected to the outlet end of the oxide dissolution tank, and is used to filter out solid oxide particles in the oxide dissolution tank, and the filtering device has a solid discharge port and a liquid discharge port.

[0016] Preferably, a liquid cooling device is also included, which includes a circulating pump and a liquid cooling shell arranged on the outer shell of the screw pump, a cavity is provided between the liquid cooling shell and the outer shell, a liquid cooling inlet and a liquid cooling outlet are provided on the liquid cooling shell, the inlet of the circulating pump is connected to the liquid discharge port, the outlet of the circulating pump is connected to the liquid cooling inlet, and the liquid cooling outlet is connected to the oxide dissolution tank.

[0017] Preferably, a flow control valve is provided on the air blowing pipe for adjusting the flow of the compressed gas blown into the pump chamber.

[0018] In the above-mentioned vacuum pump cleaning system for single crystal furnace and oxide anti-deposition screw pump, the inlet end of the screw pump is connected to the single crystal furnace, one end of the blowing pipe of the oxide anti-deposition device is connected to the compressed gas generator, and the other end is connected to the pump body of the screw pump. After the single crystal furnace is stopped, the screw pump and the oxide anti-deposition device are started. During the operation of the screw pump, the oxide anti-deposition device blows compressed gas that does not react with the doping in the single crystal furnace into the pump chamber through the inlet end of the screw pump, and uses the compressed gas to blow up the oxide attached to the rotor or inner cavity of the screw pump. The oxide is discharged from the outlet of the screw pump as the screw pump runs to prevent the oxide from being deposited on the rotor, thereby causing the pump to get stuck. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the overall structure of the vacuum pump cleaning system in the present invention.

[0020] Figure 2 It is an axonometric view of the vacuum pump cleaning system of the present invention.

[0021] Figure 3 It is a rear view of the vacuum pump cleaning system of the present invention.

[0022] Figure 4 It is a schematic diagram of the structure of the oxide anti-deposition device in the present invention.

[0023] In the figure, a screw pump 100, an oxide anti-deposition device 200, a compressed gas generator 210, an air blowing pipe 220, a flow control valve 221, an oxide dissolution box 300, a filtering device 400, a circulation pump 510, a liquid cooling shell 520, a liquid cooling inlet 521, and a liquid cooling outlet 522 are shown. DETAILED DESCRIPTION

[0024] In order to facilitate the understanding of the present application, the present application will be described more comprehensively below in conjunction with the accompanying drawings. And the preferred implementation of the present application is given. However, the present application can be implemented in many different forms and is not limited to the implementation described herein. On the contrary, the purpose of providing these implementations is to make the disclosure of the present application more thoroughly and comprehensively understood.

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0026] Please see Figures 1 to 4 In this embodiment, a vacuum pump cleaning system for a single crystal furnace includes a screw pump 100, the inlet end of the screw pump 100 is connected to the single crystal furnace, and an oxide anti-deposition device 200 is provided on the pump body of the screw pump 100. The oxide anti-deposition device 200 is used to blow compressed gas that does not react with the doping in the single crystal furnace into the pump cavity of the screw pump 100 during the operation of the screw pump 100, and the compressed gas is blown into the inlet end of the screw pump 100 to remove oxides deposited on the pump rotor or cavity, and blow the oxides out from the outlet of the screw pump 100. The oxide anti-deposition device 200 includes a compressed gas generator 210 and at least one blowing pipe 220, one end of the blowing pipe 220 is connected to the compressed gas generator 210, and the other end is connected to the pump body of the screw pump 100.

[0027] One end of the blowing pipe 220 can be detachably connected to the compressed gas generator 210, so that when different types of impurities are doped in the single crystal furnace, the compressed gas generator 210 that produces different compressed gases can be replaced. For example: when the single crystal furnace is doped with phosphorus, the compressed gas can be argon, which will not react with phosphorus, and avoid the introduction of other compressed gases, which react with the oxide in the screw pump 100. For example: when the single crystal furnace is doped with phosphorus, if the compressed gas introduced is air, it may cause an explosion.

[0028] During use, after the single crystal furnace is shut down, the screw pump 100 is started, and at the same time, the oxide anti-deposition device 200 is started. When the screw pump 100 extracts the gas in the single crystal furnace, the doping in the single crystal furnace forms oxides that remain on the rotor or inner cavity in the screw pump 100. When the oxide anti-deposition device 200 is enabled, the compressed gas in the compressed gas generator 210 passes through the blowing pipe 220 and enters the pump cavity at the inlet of the screw pump 100. The blowing pipe 220 blows the compressed gas onto the rotor or inner cavity in the screw pump 100 to blow up the oxide deposited on the rotor or inner cavity in the screw pump 100. The oxide is discharged from the outlet of the screw pump 100 as the screw pump 100 runs to prevent the oxide from being deposited on the rotor, thereby causing the pump to get stuck.

[0029] Among them, at least one hole is opened on the outer shell of the pump body of the screw pump 100, one end of the air blowing pipe 220 is connected to the compressed gas generator 210, and the other end enters the pump cavity through the opening. The number of the air blowing pipes 220 corresponds to the number, shape and size of the holes opened on the outer shell of the pump body. Specifically, the number of the air blowing pipes 220 can be determined by those skilled in the art according to actual conditions. In the embodiment provided by the present invention, the number of the air blowing pipes 220 is 6, which are symmetrically distributed on both sides of the rotor of the screw pump 100, so that the rotor of the screw pump 100 can be purged more fully, and the oxides deposited on the rotor of the screw pump 100 can be cleaned more thoroughly.

[0030] Since the doped oxides in the single crystal furnace are directly exposed to the air, spontaneous combustion may occur when in contact with the air. Furthermore, an oxide collection device is included, which is connected to the outlet end of the screw pump 100 and is used to collect the oxides swept from the pump cavity. After the oxide collection device is set at the outlet of the screw pump 100, when the oxides in the screw pump 100 are discharged from the outlet of the screw pump 100, they are directly collected in the oxide collection device to avoid being discharged into the outside, contacting with the air, spontaneously combusting, and causing harm.

[0031] Considering that the collected oxides are convenient for discharge after reprocessing and can be collected for reuse, preferably, the oxide collection device is an oxide dissolution box 300, and the oxide dissolution box 300 contains a solution that dissolves the oxides, and the oxide dissolution box 300 is used to receive and dissolve or store the oxides swept from the pump cavity. The solution can be water or other solutions. When the oxides in the screw pump 100 are discharged from the outlet of the screw pump 100, they are directly collected in the oxide dissolution box 300. The oxide dissolution box 300 collects and stores the oxides, and the solution in the oxide dissolution box 300 reacts with the oxides, which is convenient for discharge after the reaction.

[0032] Furthermore, considering that there are particulate matter in the oxide dissolution box 300, in a preferred embodiment, it also includes a filtering device 400, the inlet end of the filtering device 400 is connected to the outlet end of the oxide dissolution box 300, and is used to filter out the solid oxide particles in the oxide dissolution box 300, and the filtering device 400 has a solid discharge port and a liquid discharge port.

[0033] Further, considering that the screw pump 100 generates heat during operation, thereby affecting the life and efficiency of the screw pump 100, in a specific embodiment, a liquid cooling device is also included, the liquid cooling device includes a circulating pump 510 and a liquid cooling shell 520 arranged on the outer shell of the screw pump 100, the liquid cooling shell 520 and the outer shell have a cavity, the liquid cooling shell 520 is provided with a liquid cooling inlet 521 and a liquid cooling outlet 522, the inlet of the circulating pump 510 is connected to the liquid outlet, the outlet of the circulating pump 510 is connected to the liquid cooling inlet 521, and the liquid cooling outlet 522 is connected to the oxide dissolution tank 300. The liquid cooling device can cool the screw pump 100 by the circulating pump 510 through the filtered solution in the oxide dissolution tank 300. In this embodiment, the solution is preferably water, which can dissolve the oxide, reduce the harm after the oxide is discharged, and can also liquid-cool the screw pump 100 to achieve resource reuse.

[0034] Furthermore, in order to facilitate the control of the flow rate of the compressed gas, in a specific embodiment, a flow control valve 221 is provided on the air blowing pipe 220 for adjusting the flow rate of the compressed gas blown into the pump chamber.

[0035] Please see Figures 1 to 4 The present invention also provides an oxide anti-deposition screw pump, which is applied to a single crystal furnace, and includes a screw pump 100 and an oxide anti-deposition device 200; the oxide anti-deposition device 200 is arranged on the pump body of the screw pump 100, and the oxide anti-deposition device 200 is used to blow compressed gas that does not react with the doping in the single crystal furnace into the pump cavity of the screw pump 100, and the compressed gas is blown into the inlet end of the screw pump 100 to remove the oxide deposited on the pump rotor or cavity, and blow the oxide out from the outlet of the screw pump 100, the oxide anti-deposition device 200 includes a compressed gas generator 210 and at least one blowing pipe 220, one end of the blowing pipe 220 is connected to the compressed gas generator 210, and the other end is connected to the pump body of the screw pump 100.

[0036] One end of the blowing pipe 220 can be detachably connected to the compressed gas generator 210, so that when different types of impurities are doped in the single crystal furnace, the compressed gas generator 210 that produces different compressed gases can be replaced. For example: when the single crystal furnace is doped with phosphorus, the compressed gas can be argon, which will not react with phosphorus, and avoid the introduction of other compressed gases, which react with the oxide in the screw pump 100. For example: when the single crystal furnace is doped with phosphorus, if the compressed gas introduced is air, it may cause an explosion.

[0037] During use, after the single crystal furnace is shut down, the inlet of the oxide anti-deposition screw pump is connected to the single crystal furnace, the screw pump 100 is started, and at the same time, the oxide anti-deposition device 200 is started. When the screw pump 100 extracts the gas in the single crystal furnace, the doping in the single crystal furnace forms oxides that remain on the rotor or inner cavity in the screw pump 100. When the oxide anti-deposition device 200 is enabled, the compressed gas in the compressed gas generator 210 passes through the blowing pipe 220 and enters the pump cavity at the inlet of the screw pump 100. The blowing pipe 220 blows the compressed gas onto the rotor or inner cavity in the screw pump 100 to blow up the oxide deposited on the rotor or inner cavity in the screw pump 100. The oxide is discharged from the outlet of the screw pump 100 as the screw pump 100 runs to prevent the oxide from being deposited on the rotor, which in turn causes the pump to get stuck, thereby extending the service life of the screw pump 100.

[0038] Among them, at least one hole is opened on the outer shell of the pump body of the screw pump 100, one end of the air blowing pipe 220 is connected to the compressed gas generator 210, and the other end enters the pump cavity through the opening. The number of the air blowing pipes 220 corresponds to the number, shape and size of the holes opened on the outer shell of the pump body. Specifically, the number of the air blowing pipes 220 can be determined by those skilled in the art according to actual conditions. In the embodiment provided by the present invention, the number of the air blowing pipes 220 is 6, which are symmetrically distributed on both sides of the rotor of the screw pump 100, so that the rotor of the screw pump 100 can be purged more fully, and the oxides deposited on the rotor of the screw pump 100 can be cleaned more thoroughly.

[0039] Since the doped oxides in the single crystal furnace are directly exposed to the air, spontaneous combustion may occur when in contact with the air. Furthermore, an oxide collection device is included, which is connected to the outlet end of the screw pump 100 and is used to collect the oxides swept from the pump cavity. After the oxide collection device is set at the outlet of the screw pump 100, when the oxides in the screw pump 100 are discharged from the outlet of the screw pump 100, they are directly collected in the oxide collection device to avoid being discharged into the outside, contacting with the air, spontaneously combusting, and causing harm.

[0040] Considering that the collected oxides are convenient for discharge after reprocessing and can be collected for reuse, preferably, the oxide collection device is an oxide dissolution box 300, and the oxide dissolution box 300 contains a solution that dissolves the oxides, and the oxide dissolution box 300 is used to receive and dissolve or store the oxides swept from the pump cavity. The solution can be water or other solutions. When the oxides in the screw pump 100 are discharged from the outlet of the screw pump 100, they are directly collected in the oxide dissolution box 300. The oxide dissolution box 300 collects and stores the oxides, and the solution in the oxide dissolution box 300 reacts with the oxides, which is convenient for discharge after the reaction.

[0041] Furthermore, considering that there are particulate matter in the oxide dissolution box 300, in a preferred embodiment, it also includes a filtering device 400, the inlet end of the filtering device 400 is connected to the outlet end of the oxide dissolution box 300, and is used to filter out the solid oxide particles in the oxide dissolution box 300, and the filtering device 400 has a solid discharge port and a liquid discharge port.

[0042] Further, considering that the screw pump 100 generates heat during operation, thereby affecting the life and efficiency of the screw pump 100, in a specific embodiment, a liquid cooling device is also included, the liquid cooling device includes a circulating pump 510 and a liquid cooling shell 520 arranged on the outer shell of the screw pump 100, the liquid cooling shell 520 and the outer shell have a cavity, the liquid cooling shell 520 is provided with a liquid cooling inlet 521 and a liquid cooling outlet 522, the inlet of the circulating pump 510 is connected to the liquid outlet, the outlet of the circulating pump 510 is connected to the liquid cooling inlet 521, and the liquid cooling outlet 522 is connected to the oxide dissolution tank 300. The liquid cooling device can cool the screw pump 100 by the circulating pump 510 through the filtered solution in the oxide dissolution tank 300. In this embodiment, the solution is preferably water, which can dissolve the oxide, reduce the harm after the oxide is discharged, and can also liquid-cool the screw pump 100 to achieve resource reuse.

[0043] Furthermore, in order to facilitate the control of the flow rate of the compressed gas, in a specific embodiment, a flow control valve 221 is provided on the air blowing pipe 220 for adjusting the flow rate of the compressed gas blown into the pump chamber.

[0044] The above description is only a specific implementation mode of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can easily think of various equivalent modifications or substitutions within the technical scope disclosed by the present invention, and these modifications or substitutions should be included in the protection scope of the present invention.

Claims

1. A vacuum pump cleaning system for a single crystal furnace, characterized in that: It includes a screw pump, the inlet end of which is connected to a single crystal furnace, and an oxide anti-deposition device is arranged on the pump body of the screw pump, the oxide anti-deposition device is used to blow compressed gas that does not react with doping in the single crystal furnace into the pump chamber of the screw pump during the operation of the screw pump, and the compressed gas is blown in from the inlet end of the screw pump to remove oxides deposited on the pump rotor or cavity and blow the oxides out from the outlet of the screw pump, the oxide anti-deposition device includes a compressed gas generator and at least one blowing pipe, one end of the blowing pipe is connected to the compressed gas generator, and the other end is connected to the pump body of the screw pump.

2. The vacuum pump cleaning system for a single crystal furnace according to claim 1, characterized in that: At least one hole is opened on the outer shell of the pump body, one end of the blowing pipe is connected to the compressed gas generator, and the other end enters the pump cavity through the opening.

3. The vacuum pump cleaning system for a single crystal furnace according to claim 1, characterized in that: It also includes an oxide collecting device, which is connected to the outlet end of the screw pump and is used to collect the oxides blown down from the pump cavity.

4. The vacuum pump cleaning system for a single crystal furnace according to claim 3, characterized in that: The oxide collection device is an oxide dissolving box, in which a dissolving liquid that dissolves the oxide is contained. The oxide dissolving box is used to receive and dissolve or store the oxide swept from the pump chamber.

5. The vacuum pump cleaning system for a single crystal furnace according to claim 4, characterized in that: It also includes a filtering device, the inlet end of which is connected to the outlet end of the oxide dissolution box and is used to filter out solid oxide particles in the oxide dissolution box. The filtering device has a solid discharge port and a liquid discharge port.

6. The vacuum pump cleaning system for a single crystal furnace according to claim 5, characterized in that: It also includes a liquid cooling device, which includes a circulating pump and a liquid cooling shell arranged on the outer shell of the screw pump, a cavity is provided between the liquid cooling shell and the outer shell, a liquid cooling inlet and a liquid cooling outlet are provided on the liquid cooling shell, the inlet of the circulating pump is connected to the liquid discharge port, the outlet of the circulating pump is connected to the liquid cooling inlet, and the liquid cooling outlet is connected to the oxide dissolution tank.

7. The vacuum pump cleaning system for a single crystal furnace according to claim 1, characterized in that: The air blowing pipe is provided with a flow control valve for adjusting the flow of the compressed gas blown into the pump cavity.

8. An oxide anti-deposition screw pump, which is applied to a single crystal furnace, characterized in that: It includes a screw pump and an oxide anti-deposition device; the oxide anti-deposition device is arranged on the pump body of the screw pump, and the oxide anti-deposition device is used to blow compressed gas that does not react with the doping in the single crystal furnace into the pump cavity of the screw pump, and the compressed gas is blown in from the inlet end of the screw pump to remove the oxide deposited on the pump rotor or cavity, and blow the oxide out from the outlet of the screw pump, and the oxide anti-deposition device includes a compressed gas generator and at least one blowing pipe, one end of the blowing pipe is connected to the compressed gas generator, and the other end is connected to the pump body of the screw pump.

Images