Laser assembly with detection function and detection method of laser protection lens

Abstract

The present invention provides a laser component with a detection function and a detection method for a laser protective mirror, belonging to the technical field of laser processing. The laser component with a detection function of the present invention adopts a dual optical path detection method, namely a temperature detection optical path and a focus drift detection optical path detection method, not only can real-time focus drift detection be performed on one of the protective mirrors to be detected, but also can control the focus drift conditions of other groups of protective mirrors based on the relationship between focus drift and temperature. The focus drift detection of the protective mirror is not affected by the thermal lens effect of other lenses and has good single reliability. By detecting the mirror temperature field condition in the laser irradiation area of ​​the protective mirror, it can also be judged whether there is a finish defect and whether the lens is qualified. The detection method is simple and easy to operate, the cost is reasonable and controllable, and it is capable of carrying out batch detection operations.

Description

Technical Field

[0001] The present invention relates to the field of laser processing technology, and in particular to a laser component with detection function and a method thereof. Background Art

[0002] In fiber-optic output continuous laser processing applications, the laser processing head is composed of at least an optical lens group and multiple protective lenses. The purpose of the protective lenses is to better protect the optical lens group from contamination during use, such as environmental pollution, manual operation pollution, and processing pollution. The protective lens is much cheaper than the core optical lens group inside the laser processing head, which is also the reason for its existence.

[0003] In high-power continuous laser processing applications, the focus drift under the thermal lens effect is directly related to the process stability of laser processing. Due to the necessity of protection measures inside the laser processing head, many protective mirrors are added, which undoubtedly exacerbates the thermal lens effect. At the same time, due to the different processing capabilities of different suppliers, the thermal lens effect of the protective mirror itself will also be different. Therefore, the control of the focus drift of the protective mirror is extremely important.

[0004] The strength of the thermal lens effect of optical lenses mainly depends on the absorption of laser by the material and coating layer. In comparison, the effect of surface finish such as pitting and scratches is much smaller. The surface finish of optical lenses mainly affects the damage threshold of the lens itself, that is, the ability to withstand laser. Although poor surface finish will not burn the lens in a short period of time in high-power continuous laser processing applications, it will cause the optical lens to partially deteriorate as the light output time increases, thereby shortening its service life. Therefore, the surface finish control of optical lenses is also very important, and protective lenses are no exception.

[0005] At present, the indicators related to the thermal lens effect of the lens are tested, such as weak absorption detectors based on the weak absorption characteristics of the lens itself, and beam quality analyzers that detect by detecting the spot size of the beam cross section or the profile of the beam segment. The smoothness of the lens is tested by surface defect analyzers, high-power microscopes, etc., which detect the size of the smoothness such as pits and scratches. However, most optical testing instruments are single-target tests and cannot perform multi-factor simultaneous control. For example, weak absorption detectors, beam quality analyzers, etc. can indirectly or directly detect focal drift under the thermal lens effect, but cannot evaluate the mirror smoothness. Surface defect analyzers, high-power microscopes, etc. are suitable for judging the smoothness of optical lenses, but they are powerless against the thermal lens effect.

[0006] Therefore, in order to achieve multi-factor control, the aforementioned optical testing instruments need to use multiple sets of instruments with different focuses, but each instrument is extremely expensive and difficult to popularize and apply on a large scale at low cost. In addition, due to the problem of the detection method, usually only a single lens can be removed for detection and analysis, which is very time-consuming and not conducive to the detection of optical lenses such as protective lenses, which are large in quantity and low in cost. The detection efficiency is low and various costs are increased. Summary of the invention

[0007] The present invention provides a laser assembly with a detection function and a detection method for a laser protective lens, which are used to solve the defect of low detection efficiency of protective lenses in the prior art and achieve the effect of improving detection efficiency and reducing costs.

[0008] The present invention provides a laser assembly with a detection function, comprising:

[0009] A laser component, wherein the laser component comprises a high-power laser and a collimation module, wherein the high-power laser is a fiber laser that outputs a quasi-continuous laser, and the laser light output by the fiber laser through an optical fiber is input to a collimation lens module of the collimation module through a mother piece that matches the optical fiber interface of the fiber laser;

[0010] A protective mirror module, the protective mirror module comprising N protective mirrors to be inspected, a fixture and a mounting base, wherein N ≥ 2;

[0011] A temperature detection component, the temperature detection component includes an infrared temperature measurement module and a light absorption module, the light absorption module is fixed to a first mounting base, the light output point of the high-power laser, the central optical axis of the collimation module, the central optical axis of the protective mirror module and the central optical axis of the light absorption module are coaxial, and the infrared temperature measurement module corresponding to the protective mirror module deviates from the central optical axis target angle of the protective mirror module to align laterally with the protective mirror to be inspected;

[0012] A focus drift detection component, which includes a low-power optical module, a focusing lens module and an electric light spot analysis module. The parallel light beam output by the low-power optical module is incident on the protective lens module and is focused by the focusing lens module and then incident on the electric light spot analysis module. The electric light spot analysis module is used to collect and analyze the light spot characteristics of the parallel light beam after passing through the protective lens module.

[0013] According to a laser assembly with a detection function provided by the present invention, the infrared temperature measurement module includes an infrared temperature measurement sensor, a circuit part and a second mounting base connected to form a plurality of pixel array photoelectric sensors.

[0014] According to a laser component with a detection function provided by the present invention, each pixel point of the infrared temperature sensor is used to detect a first target area range covering the mirror surface of the protective mirror to be inspected, and the infrared temperature sensor is used to detect a second target area range covering the lens diameter area starting from the center of the mirror surface of the protective mirror to be inspected.

[0015] According to a laser component with detection function provided by the present invention, the light absorption module at least includes a diverging mirror and a light absorption module structural connection, the diverging mirror is a high-power negative focus lens, and the diverging mirror is used to diverge the incident light beam to reduce the power density.

[0016] According to a laser component with a detection function provided by the present invention, the low-power optical module includes a light source and an adjustment base, the light source includes a laser light source with parallel output, a laser light source with fiber coupling output and a laser light source with a collimator module output, and the spot ellipticity of the light source is greater than a target ellipticity value; the adjustment base is used to install and fix the light source, and is also used to adjust the angle and position of the light source.

[0017] According to a laser component with a detection function provided by the present invention, the electric spot analysis module includes a spot analysis module, a fine electric module and a third mounting base; the spot analysis module is used to detect and analyze the spot size and position of the point divergent light source, and the fine electric module includes a telescopic component, one end of the telescopic component is used to fix the spot analysis module and drive the spot analysis module to telescope with the telescopic component, and the other end of the telescopic component is used to be fixed to the third mounting base.

[0018] According to a laser assembly with a detection function provided by the present invention, the light spot analysis module includes a slit scanning analyzer or a camera-type light spot analyzer.

[0019] The present invention also provides a detection method for laser protective glasses based on the above-mentioned laser assembly with detection function, comprising:

[0020] The low-power optical module is started to output parallel light, and the optical focus data of the protective mirror module at room temperature is obtained by analyzing the electric spot analysis module; the temperature field of each protective mirror to be inspected in the protective mirror module at room temperature is obtained by the temperature detection component to adjust the emissivity of each protective mirror to be inspected so that the peak temperature of each protective mirror to be inspected is the same;

[0021] Start the high-power laser to output a laser beam that is consistent with the power requirement of the protective mirror to be inspected, and output a parallel beam through the collimation module;

[0022] The temperature field data of each protective mirror to be inspected is obtained in real time through the temperature detection component, and single pixel traversal is performed to determine whether each protective mirror to be inspected has a finish defect;

[0023] When the temperature of each protective mirror to be inspected is stable, the optical focus data of the protective mirror module is re-determined, and the focus drift temperature ratio of the protective mirror module is determined to obtain a focus drift detection result.

[0024] According to a method for detecting laser protective glasses provided by the present invention, the temperature field data of each protective glass to be inspected is obtained in real time by the temperature detection component, and single pixel traversal is performed to determine whether each protective glass to be inspected has a finish defect, including:

[0025] When the temperature field data of the protective lens to be inspected contains at least one local peak temperature value, the area and number of pixels containing the local peak temperature value greater than the target ratio are calculated, and the average temperature value of the surrounding pixels under the first target multiple area of ​​the pixel of the local peak temperature value is determined;

[0026] When the ratio of the local peak temperature value to the average temperature value of the surrounding pixel points is greater than the second target multiple, it is determined that the smoothness defect of the protective mirror to be inspected is a smoothness pitting defect; when the ratio of the local peak temperature value to the average temperature value of the surrounding pixel points is greater than the third target multiple, it is determined that the smoothness defect of the protective mirror to be inspected is unqualified.

[0027] According to a method for detecting laser protective glasses provided by the present invention, determining the focal drift temperature ratio of the protective glasses module to obtain a focal drift detection result includes:

[0028] Calculating the optical focus data of each protective mirror to be inspected in the protective mirror module and the temperature difference between adjacent protective mirrors to be inspected;

[0029] Based on the temperature difference between adjacent protective mirrors to be inspected, the focus drift temperature ratio of each protective mirror to be inspected is obtained, and the ratio of the focus drift temperature ratio of each protective mirror to be inspected to the corresponding temperature compensation coefficient is obtained;

[0030] The focus drift of each protective mirror to be inspected is obtained based on the ratio of the focus drift temperature ratio of each protective mirror to be inspected and the corresponding temperature compensation coefficient, and is compared with the preset focus drift allowable range to obtain the focus drift detection result of each protective mirror to be inspected.

[0031] The present invention also provides an electronic device, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein when the processor executes the program, a detection method for laser protective glasses as described in any one of the above-mentioned methods is implemented.

[0032] The present invention also provides a non-transitory computer-readable storage medium on which a computer program is stored. When the computer program is executed by a processor, the detection method of the laser protective glasses as described in any one of the above is implemented.

[0033] The present invention also provides a computer program product, comprising a computer program, wherein when the computer program is executed by a processor, the computer program implements any of the above-mentioned methods for detecting laser protective glasses.

[0034] The laser component with detection function and the detection method of laser protective mirror provided by the present invention adopt a dual optical path detection method, namely a temperature detection optical path and a focus drift detection optical path detection method, which can not only perform real-time focus drift detection on one of the protective mirrors to be detected, but also control the focus drift conditions of other groups of protective mirrors based on the relationship between focus drift and temperature. The focus drift detection of the protective mirror is not affected by the thermal lens effect of other lenses and has good single reliability. By detecting the mirror temperature field in the laser irradiation area of ​​the protective mirror, it can also be judged whether there is a finish defect and whether the lens is qualified. The detection method is simple and easy to operate, the cost is reasonable and controllable, and it is capable of carrying out batch detection operations. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0036] Figure 1 It is a structural schematic diagram of a laser assembly with a detection function provided by the present invention;

[0037] Figure 2 It is a schematic diagram of the flow of the detection method of the laser protective glasses provided by the present invention;

[0038] Figure 3 It is a structural schematic diagram of a detection device for laser protective glasses provided by the present invention;

[0039] Figure 4 It is a structural schematic diagram of the electronic device provided by the present invention.

[0040] Reference numerals:

[0041] 110: high-power laser; 120: collimation module; 210: protection mirror to be inspected; 310: infrared temperature measurement module; 320: light absorption module; 410: low-power optical module; 420: focusing lens module; 430: electric spot analysis module. DETAILED DESCRIPTION

[0042] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the drawings of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0043] Combine the following Figure 1-Figure 4 The invention describes a laser component with a detection function and a detection method of a laser protection mirror.

[0044] like Figure 1 As shown, the laser assembly with detection function according to the embodiment of the present invention mainly includes a laser component, a protective mirror module, a temperature detection component and a focus drift detection component. The dotted line in the figure indicates the propagation path of light.

[0045] The laser component includes a high-power laser 110 and a collimation module 120. The high-power laser 110 is a fiber laser that outputs quasi-continuous laser. The laser output by the fiber laser through the optical fiber is input to the collimation mirror module of the collimation module through a mother component that matches the optical fiber interface of the fiber laser.

[0046] The protective mirror module includes N protective mirrors 210 to be inspected, a clamping member and a mounting base, wherein N≥2. Figure 1 2 shows a scenario where N is 5, that is, five protective mirrors 210 to be inspected are provided.

[0047] The temperature detection component includes an infrared temperature measurement module 310 and a light absorption module 320 , and the light absorption module 320 is fixed to the first mounting base.

[0048] The focus drift detection component includes a low-power optical module 410, a focusing lens module 420 and an electric light spot analysis module 430. The parallel light beam output by the low-power optical module 410 is incident on the protective lens module and is focused by the focusing lens module 420 before being incident on the electric light spot analysis module 430. The electric light spot analysis module 430 is used to collect and analyze the light spot characteristics of the parallel light beam after passing through the protective lens module.

[0049] It should be noted that the temperature detection optical path is a high-power laser, a collimation module, a protective mirror module, and a one-to-one matching infrared temperature measurement module and light absorption module.

[0050] High-power lasers are fiber-coupled output continuous lasers, including blue light lasers, semiconductor lasers and fiber lasers. The wavelengths cover 400nm-1200nm. Typical wavelengths are 445nm, 532nm, 915nm, 970nm and 1070nm, etc. The power covers the actual power used by the protective mirror to be inspected.

[0051] The collimation module includes a mother component that matches the fiber interface of the high-power laser, a collimation lens module with XYZ adjustment, and a mounting base, wherein the mother component end is the light inlet, and the collimation lens module light outlet end is the light outlet. The mother component, the collimation lens module, and the mounting base are structurally connected to form a fixed module;

[0052] The protective mirror module is composed of N protective mirror modules, where N ≥ 2. Each protective mirror module is composed of a protective mirror to be inspected, a clamping structure, and a mounting base structure. The protective mirror to be inspected has extremely high transmittance to high-power lasers, at least meeting the transmittance T>99%, and the overall transmittance of the aforementioned N protective mirrors should be greater than 80%.

[0053] The infrared temperature measurement module includes an infrared temperature measurement sensor, a circuit part and a second mounting base connected together. The infrared temperature measurement sensor is a multi-pixel array photoelectric sensor.

[0054] Each pixel point of the infrared temperature sensor is used to detect a first target area range covering the surface of the protective mirror to be inspected, and the infrared temperature sensor is used to detect a second target area range covering the lens diameter area starting from the center of the surface of the protective mirror to be inspected.

[0055] For example, each pixel can detect an area of ​​100um on the surface of the protective mirror to be inspected. 2 -1mm 2 , and the overall detection of the protective mirror surface is 0.5-0.9 times the lens diameter area with the center as the reference.

[0056] Under normal circumstances, when the laser irradiates the protective mirror, the laser energy should be evenly distributed, so the temperature distribution should be uniform. If the temperature distribution is uneven, it may indicate that there are finish defects or surface defects on the mirror surface.

[0057] For example, if some areas are significantly hotter than others, it could be because the mirror is not flat, has stains, scratches, or other surface defects. These defects can cause uneven laser radiation and lead to local overheating.

[0058] The finish of the lens directly affects the transmittance and parallelism of the laser. If the mirror surface is uneven or has defects (such as scratches, dirt, etc.), it will cause the laser beam to scatter or focus inaccurately, resulting in uneven heat distribution.

[0059] The uneven temperature field detected by the infrared temperature sensor can be used to further analyze which areas may be caused by finish problems. For example, if the temperature of some local areas is too high, it means that there may be defects such as scratches and dust in the area, which can easily cause local overheating under laser irradiation.

[0060] Through the analysis of temperature distribution, combined with preset qualification standards such as temperature fluctuation range, uniformity requirements, etc., it is possible to determine whether the lens is qualified. When the temperature unevenness exceeds a certain threshold, the lens has large defects or unqualified finish and cannot meet the use requirements.

[0061] In actual operation, temperature data can be combined with other detection tools such as spot analysis and visual inspection to more comprehensively evaluate the finish and overall quality of the lens.

[0062] If the temperature field shows large inhomogeneities, the specific conditions of the area can be further analyzed to check for physical damage, material defects, stains, etc.

[0063] In other words, the infrared temperature measurement module can provide detailed information on the surface temperature distribution of the lens through high-precision detection of the mirror temperature field. This information can reflect the smoothness of the lens and whether there are defects. If the temperature distribution is abnormal, the mirror surface is uneven or has defects, it will help determine whether the lens meets the quality standards.

[0064] The light absorption module at least includes a diverging mirror and a light absorption module structure connection. The diverging mirror is a high-power negative focus lens, and the diverging mirror is used to diverge the incident light beam to reduce the power density.

[0065] The diverging mirror can be a high-power negative-focus lens, which is used to reduce the power density of the incident light beam and improve the laser bearing capacity of the light-absorbing structure. The light-absorbing module can efficiently absorb the received laser.

[0066] It can be understood that the light output point of the high-power laser, the central optical axis of the collimation module, the central optical axis of the protective mirror module and the central optical axis of the light absorption module are coaxial, and the infrared temperature measurement module corresponding to the protective mirror module deviates from the target angle of the central optical axis of the protective mirror module to laterally align with the protective mirror to be inspected.

[0067] The infrared temperature measurement module corresponding to the protective mirror module can be aligned with the mirror surface of the protective mirror to be inspected laterally, deviating from the optical axis. The target angle between the central axis of the protective mirror to be inspected and the incident light axis of the infrared temperature measurement sensor can be in the range of 5° to 60°. Each protective mirror module has at least one infrared temperature measurement.

[0068] Each protective mirror module and the corresponding infrared temperature measurement module can be set at the same temperature measurement distance and angle.

[0069] In terms of beam transmission, the high-power laser emits a divergent light source, which is collimated by a collimation module. The collimated light beam then passes through N inspection protective mirrors of the protective mirror module in sequence, and finally enters the light absorption module, which absorbs the laser.

[0070] In order to ensure the normal detection, at least one water cooler is required to cool the high-power laser and light absorption module.

[0071] The focus drift detection optical path is a low-power optical module, a protective lens module, a focusing lens module and an electric spot analysis module.

[0072] The low-power optical module includes a light source and an adjustment base. The light source includes a parallel output laser light source, a fiber coupled output and a laser light source output by a collimator module. The spot ellipticity of the light source is greater than the target ellipticity value. The adjustment base is used to install and fix the light source, and is also used to adjust the angle and position of the light source.

[0073] The low-power optical module outputs parallel light, and the light source includes a parallel output laser light source, a fiber-coupled output, and a laser light source output by a collimator module. The target ellipticity value can be 85%, that is, the spot ellipticity can be above 85%, the light output power is uW-mW level, and any monochromatic light in the range of 400nm-1100nm and the half-wave width is less than 100nm, with typical values ​​of 5nm and 10nm. The adjustment base has the functions of up and down telescopic and angle adjustment.

[0074] The protective mirror to be tested is a module in the temperature detection optical path protective mirror module, and the first protective mirror module through which the high-power laser passes is preferred. At the same time, the protective mirror to be tested has a transmittance of at least 80% for the parallel light output by the low-power optical module.

[0075] The focusing mirror module includes a focusing mirror, a clamping structure and a mounting base, all of which are structurally connected. The focusing mirror is an aplanatic lens or lens group for the aforementioned light source, and is coated with an anti-reflection film of the corresponding wavelength band.

[0076] The electric spot analysis module includes a spot analysis module, a fine electric module and a third mounting base; the spot analysis module is used to detect and analyze the spot size and position of the point divergent light source, and the fine electric module includes a telescopic component, one end of the telescopic component is used to fix the spot analysis module and drive the spot analysis module to telescope with the telescopic component, and the other end of the telescopic component is used to be fixed to the third mounting base.

[0077] The spot analysis module includes a slit scanning analyzer or a camera-type spot analyzer, etc., which can detect at least the spot size and position of the aforementioned point divergent light source. The motion stroke of the fine electric module includes 1mm-10mm, and the accuracy is in the order of 0.001mm-0.01mm; the spot analysis module mounting component is connected to the electric telescopic part of the fine electric module, and the spot analysis module can be extended and retracted with the electric telescopic part of the fine electric module; the fine electric module and the spot analysis module are assembled as a whole on the third mounting base.

[0078] The light output center axis of the above-mentioned low-power optical module, the focusing mirror center optical axis of the focusing mirror module and the light inlet center of the electric spot analysis module are coaxial. The light output center axis of the low-power optical module and the protective mirror center axis of the protective mirror module form a certain angle ranging from 5° to 60°, and the light output center of the low-power optical module passes through the center of the protective mirror.

[0079] In terms of installation, the mounting bases of the low-power optical module, the protective mirror module, the focusing mirror module and the electric spot analysis module are fixedly arranged, and the detection surface of the spot analyzer is located near the focal plane of the focusing mirror.

[0080] In terms of transmission method, after the low-power optical module emits light, the light beam is obliquely incident on the protective mirror module, and then is directly incident on the focusing mirror of the focusing mirror module to form a focused light beam. The focus of the focused light beam is incident on the spot analyzer of the electric spot analysis module to collect the spot characteristics.

[0081] In some embodiments, each infrared temperature measurement module is transferred by an all-in-one data processing and aggregation unit. The data processing and aggregation unit, the high-power laser, and the electric light spot analysis module are electrically connected to the computer and the host. The high-power laser can control the light emission through the computer. The detection data of each infrared temperature measurement module can be summarized on the computer for data analysis and judgment. The detection data of the electric light spot analysis module can be summarized on the computer. The computer can send instructions to the electric light spot analysis module for data interaction.

[0082] The laser assembly with detection function provided by the embodiment of the present invention adopts a dual optical path detection method, namely, a temperature detection optical path and a focus drift detection optical path, so that not only can real-time focus drift detection be performed on one of the protective mirrors to be detected, but also the focus drift conditions of other groups of protective mirrors can be controlled based on the relationship between focus drift and temperature. The focus drift detection of the protective mirror is not affected by the thermal lens effect of other lenses and has good single reliability. By detecting the mirror temperature field in the laser irradiation area of ​​the protective mirror, it can also be determined whether there are finish defects and whether the lens is qualified. The detection method is simple and easy to operate, the cost is reasonable and controllable, and it is capable of carrying out batch detection operations.

[0083] like Figure 2 As shown, the present invention also provides a detection method for laser protective glasses based on the above-mentioned laser assembly with detection function, which mainly includes step 510, step 520, step 530 and step 540.

[0084] Step 510, starting the low-power optical module to output parallel light, and analyzing the optical focus data of the protective mirror module at room temperature through the electric spot analysis module; obtaining the temperature field of each protective mirror to be tested in the protective mirror module at room temperature through the temperature detection component to adjust the emissivity of each protective mirror to be tested so that the peak temperature of each protective mirror to be tested is the same;

[0085] Step 520, starting a high-power laser to output a laser beam consistent with the power requirement of the protective mirror to be inspected and outputting a parallel beam through a collimation module;

[0086] Step 530, obtaining the temperature field data of each protective mirror to be inspected in real time through the temperature detection component, and performing single pixel traversal to determine whether each protective mirror to be inspected has a finish defect;

[0087] Step 540, when the temperature of each protective mirror to be inspected is stable, re-determine the optical focus data of the protective mirror module, and determine the focus drift temperature ratio of the protective mirror module to obtain the focus drift detection result.

[0088] First, the low-power optical module is started to output parallel light to irradiate the protective mirror. The electric spot analysis module analyzes the light focus data of the light source on the protective mirror to obtain the light focus position of the protective mirror at room temperature.

[0089] The temperature distribution (temperature field) of each protective mirror to be detected in the protective mirror module is obtained through the temperature detection component. Based on these data, the emissivity of each protective mirror is adjusted so that each protective mirror can reach the same peak temperature under the same conditions, which can ensure that different lenses can have consistent temperatures when irradiated by laser, avoiding errors caused by temperature differences.

[0090] According to the power requirement of the protective lens to be tested, a high-power laser is started to output laser beams. The intensity and characteristics of these laser beams are consistent with the use conditions of the lens to be tested, in order to simulate the radiation conditions during actual use.

[0091] The laser beam is adjusted to parallel light through the collimation module to ensure that the laser is evenly irradiated on the protective mirror to avoid the results being affected by laser beam divergence or focusing errors.

[0092] The temperature detection component is used to monitor the temperature field data of the protective mirror to be tested in real time. The temperature data is scanned pixel by pixel to check the distribution of the temperature field point by point. By analyzing the temperature information of each pixel point, it is determined whether the surface of the protective mirror is heated evenly.

[0093] By analyzing the distribution of the temperature field, it is determined whether there are finish defects such as scratches, stains, uneven surface, etc. Defects can cause local temperature anomalies, which manifest as excessively high or low temperatures.

[0094] When the lens temperature is stable, recalculate the optical focus data of the protective lens. After the temperature is stable, the optical performance of the protective lens tends to be consistent, and the change of the optical focus can be determined more accurately.

[0095] Focus drift refers to the focus shift caused by temperature changes. Under stable temperature conditions, the focus drift test result is obtained by comparing the focus position change (focus drift) of the lens and calculating the focus drift temperature ratio. This ratio can help determine the stability of the lens under temperature changes and then evaluate whether it meets the working conditions.

[0096] According to the detection method of laser protective glasses provided by the embodiment of the present invention, by adopting a dual optical path detection method, namely a temperature detection optical path and a focus drift detection optical path detection method, not only can real-time focus drift detection be performed on one of the protective glasses to be detected, but also the focus drift conditions of other groups of protective glasses can be controlled based on the relationship between focus drift and temperature. The focus drift detection of the protective glasses is not affected by the thermal lens effect of other lenses and has good single reliability. By detecting the mirror temperature field in the laser irradiation area of ​​the protective glasses, it can also be determined whether there are finish defects and whether the lenses are qualified. The detection method is simple and easy to operate, the cost is reasonable and controllable, and it is capable of carrying out batch detection operations.

[0097] In some embodiments, the temperature field data of each protective mirror to be inspected is acquired in real time by a temperature detection component, and a single pixel traversal is performed to determine whether each protective mirror to be inspected has a finish defect, including: when the temperature field data of the protective mirror to be inspected contains at least one local peak temperature value, the area and number of pixels containing a local peak temperature value greater than the target ratio are calculated, and the average temperature value of the surrounding pixels under the adjacent first target multiple area of ​​the pixel point with the local peak temperature value is determined; when the ratio of the local peak temperature value to the average temperature value of the surrounding pixels is greater than the second target multiple, it is determined that the finish defect of the protective mirror to be inspected is a finish pitting defect; when the ratio of the local peak temperature value to the average temperature value of the surrounding pixels is greater than the third target multiple, it is determined that the finish defect of the protective mirror to be inspected is unqualified.

[0098] The temperature distribution of the protective mirror can be monitored in real time through the temperature detection component. The temperature value of each pixel is recorded to form a complete temperature field. By traversing each pixel, the temperature of each pixel is calculated, and the presence of defects on the surface is detected based on the local temperature difference.

[0099] In the temperature field of the protective lens to be inspected, there may be some areas where the temperature value is significantly higher than the surrounding area. These high temperature areas are called local peak temperature values. They usually appear in defective places, such as areas with uneven finish.

[0100] These local peak temperature values ​​can be found and their occupied areas and quantities can be calculated. If the area proportion of these local peak temperature values ​​exceeds the set target proportion, further analysis is required.

[0101] In the area near the local peak temperature value, the temperature average of these adjacent pixel points is calculated. During the calculation, a target multiple, namely the first target multiple, is set, which represents the temperature average in a certain area around the local peak temperature value.

[0102] Compare the local peak temperature value with the average temperature of the surrounding pixels. The type and severity of the defect are determined by the ratio. If the ratio of the local peak temperature value to the average temperature of the surrounding pixels is greater than the second target multiple, it means that the temperature in this area is obviously abnormal, which usually means that there are small and prominent pitting defects on the surface of the protective lens. Pitting defects are usually caused by tiny uneven areas or contaminants.

[0103] If the ratio is greater than the third target multiple, it means that the temperature difference in this area is very large, which means that there are more serious finish defects, and it may even be that the overall finish is unqualified and cannot meet the standards of laser protective glasses.

[0104] It is understandable that by analyzing the temperature difference between the local temperature peak and the surrounding area through real-time temperature field data, the surface finish defects of the protective mirror can be effectively detected. According to the ratio of the local peak temperature value to the average of the surrounding temperature values, the type of defect (such as surface finish pitting defects) and the severity of the defect can be determined. If the ratio is too high, it may indicate that the finish is unqualified, which helps to ensure the quality of the laser protective mirror.

[0105] For example, if one or more local peak temperature values ​​appear, the area and number g of pixels whose temperature values, including the local peak, are above the peak temperature value with a target ratio of 90% are calculated, and the average temperature value of the surrounding pixels under the adjacent first target multiple area is solved simultaneously, where the first target multiple ranges from 0.5 to 2.

[0106] If the local peak temperature value is greater than the second target multiple of the mean of the surrounding temperature value, the local peak is judged to be caused by a roughness pit defect; if the local peak temperature value is greater than the third target multiple of the mean of the surrounding temperature value, the corresponding protective mirror to be inspected is judged to be unqualified. The second target multiple ranges from 1.05 to 1.2, and the third target multiple ranges from 1.3 to 2.

[0107] As the light emission time increases, there will be two situations in the temperature field data of each protective mirror to be inspected detected by the computer. One is that the temperature continues to rise and cannot be stabilized for a long time, and the corresponding protective mirror to be inspected is judged to be unqualified; the other is that it gradually tends to be stable, then j frames are intercepted for each temperature field of the protective mirror to be inspected, and for each frame of the temperature field, the peak temperature pixel point is taken as the center, and a total of q pixels including the peak temperature pixel point are sampled, and the adjacent surrounding temperatures are successively reduced, including the peak temperature pixel point, and the average is calculated once, and then the average is taken for j frames, and the peak temperatures of the protective mirrors to be inspected of 1, 2, ..., h protective mirror modules are obtained as B1, B2, ..., B h , where j ranges from 1 to 50, q ranges from 5 to 100 and q>g.

[0108] In some embodiments, determining the focal drift temperature ratio of the protective mirror module to obtain a focal drift detection result includes the following process.

[0109] The optical focus data of each protective mirror to be inspected in the protective mirror module and the temperature difference between adjacent protective mirrors to be inspected can be calculated first; based on the temperature difference between adjacent protective mirrors to be inspected, the focus drift temperature ratio of each protective mirror to be inspected is obtained, and the ratio of the focus drift temperature ratio of each protective mirror to be inspected to the corresponding temperature compensation coefficient is obtained; based on the ratio of the focus drift temperature ratio of each protective mirror to be inspected to the corresponding temperature compensation coefficient, the focus drift of each protective mirror to be inspected is obtained and compared with the preset focus drift allowable range, so as to obtain the focus drift detection result of each protective mirror to be inspected.

[0110] For each pair of adjacent protective mirrors to be inspected in the protective mirror module, the temperature difference between them can be measured. The temperature difference is caused by the heating effect of the surrounding environment or the mirror itself, and the temperature difference may affect the focal length of the mirror.

[0111] Based on the above temperature difference, the focal drift temperature ratio of each protective mirror to be inspected can be calculated. The focal drift temperature ratio is a ratio used to describe the relationship between the change in focal length of the mirror and the change in temperature. Specifically, it represents the ratio of the focal length offset caused by temperature change to the temperature difference, reflecting the stability of the protective mirror at different temperatures.

[0112] In practical applications, a compensation coefficient related to temperature change is usually set for each protective mirror to adjust the impact of focal drift. This coefficient can be set based on factors such as the material and structure of the mirror.

[0113] The calculated focal drift temperature ratio is calculated by comparing it with the corresponding temperature compensation coefficient. This ratio can help evaluate whether the temperature compensation of the current protective lens is effective enough to offset the focal drift caused by temperature.

[0114] The actual focus drift of the protective lens is calculated based on the ratio of the focus drift temperature ratio to the compensation coefficient. Then, this focus drift is compared with the preset focus drift allowable range to determine whether the protective lens meets the requirements. Usually, an allowable focus drift range is set. If the detected focus drift exceeds this range, it may affect the normal use of the protective lens. For example, too much focus drift may cause the laser system to be unable to focus accurately, affecting system performance.

[0115] If the focus drift of the protective lens is within the allowable range, it means that the protective lens is normal; if it exceeds the allowable range, it means that the protective lens has a focus drift problem and needs further adjustment or replacement.

[0116] It can be understood that by comparing the temperature difference between the protective lenses and the temperature response of their focal drift (focal drift temperature ratio), then calculating the ratio with the temperature compensation coefficient, and finally comparing the focal drift with the preset focal drift allowable range, the focal drift problem of the protective lens can be effectively detected.

[0117] Specifically, during the detection process, first connect the circuits and water channels, and clean the h (h≤N) protective mirrors to be inspected and place them on the protective mirror clamping structure. Power on all parts, supply water, start the computer host, and open the high-power laser light control interface, temperature field data analysis interface, and spot detection interface on the computer.

[0118] On the temperature detection optical path, the protective mirror modules are numbered 1, 2, ...h in sequence according to the laser transmission direction, and the protective mirror to be inspected in the focus drift detection optical path passing through the No. 1 protective mirror module is used as the basis.

[0119] The computer-side spot detection interface sets the fine-tuning spot size index parameter d to obtain the allowable spot change range [d*(1-k%), d*(1+k%)], where the k value range is 0.1-2.

[0120] Start the low-power optical module to output parallel light. If the light spot near the focus of the focusing mirror deviates too much from the center of the light spot analyzer, adjust the telescopic part and angle of the low-power optical module to ensure that the light spot is basically centered.

[0121] The spot analyzer obtains the spot size near the focus and uploads it to the computer, and sends process instructions to the fine electric module. The fine electric module moves unidirectionally to make the spot analyzer pause for s seconds after collecting the spot within the allowable spot change range. The computer calculates the spot sizes continuously collected during this period and obtains the average value. The average value is recorded as in place within the spot change range, otherwise it needs to be gradually compensated in place. The position data M0 is recorded and uploaded to the computer for storage, where the value range of s is 0.1s-2s.

[0122] Then move in the opposite direction to make the spot analyzer collect the spot at the other end of the focus of the focused beam segment within the allowable spot change range and pause for s seconds. The computer calculates the spot sizes continuously collected during this period and takes the average. If the average is within the spot change range, it is recorded as in place. Otherwise, gradual compensation is required to be in place. Record and upload the position data N0 to the computer for storage.

[0123] The computer automatically calculates the average values ​​of the position data M0 and the position data N0, obtains the relative position D0=(M0+N0) / 2 of the focus beam and saves it. The fine electric module moves to the relative position D0 to obtain the room temperature focus data.

[0124] At the same time, the temperature field data analysis interface records the temperature field of each protective mirror at room temperature, and adjusts the emissivity based on the temperature difference to ensure that the peak temperature of each protective mirror to be tested is consistent. The peak temperature difference is controlled within the range of ±0.05℃-±0.5℃, and the peak temperatures are recorded in sequence as A1, A2, ..., A h .

[0125] On this basis, start the high-power laser, set the laser power P consistent with the power requirement of the protective mirror to be inspected on the light output control interface on the computer, and continue to emit light.

[0126] If the light beam passing through the collimator module is a non-parallel light beam, it is necessary to adjust the Z-axis of the collimator module, that is, the light beam transmission direction, in advance to ensure the output of a parallel light beam.

[0127] If the output light beam of the collimator module is not centered when passing through the protective mirror to be inspected at the end of the temperature detection optical path, it is necessary to adjust the XY axis of the collimator module in advance to achieve centering.

[0128] The computer-side temperature field data analysis interface calculates the transmittance correlation coefficients of the corresponding 1, 2, ..., h protective mirror modules according to the laser transmittance T and the number h of the protective mirror to be tested, which are 1, T, ..., T h-1 , and the thermal lens effect correlation coefficients are 1, b1, ..., b h-1 , where b1, ..., b h-1 Between 0.9 and 1, and decreasing in sequence, the overall temperature compensation coefficient is 1, T / b1, ..., T h-1 / bh-1 .

[0129] When the aforementioned temperature tends to be stable, the computer repeats the above steps to obtain the relative position D1=(M1+N1) / 2 of the focus of the focused light beam in the focus drift detection optical path and save it. Then the focus drift difference of the corresponding protective mirror to be tested of protective mirror module No. 1 is D1-D0.

[0130] At the same time, the computer terminal summarizes the temperature differences of the protective mirrors to be inspected, that is, the protective mirrors to be inspected of the 1, 2, ..., h protective mirror modules are B1-A1, B2-A2, ..., B h -A h , and further calculate the ratio of the temperature difference of each protective mirror to be inspected to the corresponding temperature compensation coefficient as K1=B1-A1, K2=(B2-A2) / (T / b1), ..., K h =(B h -A h ) / (T h-1 / b h-1 ).

[0131] Then, the focus drift temperature ratio of the protective mirror to be tested of the protective mirror module No. 1 satisfies L= (D1-D0) / K1, and the corresponding 2, ..., h focus drift can be converted into L*K2, ..., L*K h The computer will compare the converted values ​​with the set focus drift allowable range one by one. If they are within the range, they are qualified, and if they are outside the range, they are unqualified.

[0132] It should be noted that when the temperature rise of the protective mirror to be tested of protective mirror module No. 1 is unstable, it should be replaced with a stable protective mirror to be tested of protective mirror modules 2, ..., h or a protective mirror sample with a known stability.

[0133] The detection device of the laser protective glasses provided by the present invention is described below. The detection device of the laser protective glasses described below and the detection method of the laser protective glasses described above can be referred to each other.

[0134] like Figure 3 As shown, the detection device of the laser protective glasses according to the embodiment of the present invention mainly includes a first processing module 610 , a second processing module 620 , a third processing module 630 and a fourth processing module 640 .

[0135] The first processing module 610 is used to start the low-power optical module to output parallel light, and obtain the light focus data of the protective mirror module at room temperature through the electric spot analysis module; obtain the temperature field of each protective mirror to be tested in the protective mirror module at room temperature through the temperature detection component to adjust the emissivity of each protective mirror to be tested so that the peak temperature of each protective mirror to be tested is the same;

[0136] The second processing module 620 is used to start a high-power laser to output a laser beam consistent with the power requirement of the protective mirror to be inspected and output a parallel beam through a collimation module;

[0137] The third processing module 630 is used to obtain the temperature field data of each protective mirror to be inspected in real time through the temperature detection component, and perform single pixel traversal to determine whether each protective mirror to be inspected has a finish defect;

[0138] The fourth processing module 640 is used to re-determine the optical focus data of the protective mirror module when the temperature of each protective mirror to be inspected is stable, and determine the focus drift temperature ratio of the protective mirror module to obtain a focus drift detection result.

[0139] According to the detection device of the laser protective mirror of the embodiment of the present invention, by adopting a dual optical path detection method, namely a temperature detection optical path and a focus drift detection optical path, not only can real-time focus drift detection be performed on one of the protective mirrors to be detected, but also the focus drift conditions of other groups of protective mirrors can be controlled based on the relationship between focus drift and temperature. The focus drift detection of the protective mirror is not affected by the thermal lens effect of other lenses and has good single reliability. By detecting the mirror temperature field in the laser irradiation area of ​​the protective mirror, it can also be determined whether there are finish defects and whether the lens is qualified. The detection method is simple and easy to operate, the cost is reasonable and controllable, and it is capable of carrying out batch detection operations.

[0140] Figure 4 An example of a physical structure diagram of an electronic device is shown in FIG. Figure 4 As shown, the electronic device may include: a processor (processor) 710 , a communications interface (CommunicationsInterface) 720 , a memory (memory) 730 and a communication bus 740 , wherein the processor 710 , the communications interface 720 , and the memory 730 communicate with each other through the communication bus 740 . The processor 710 can call the logic instructions in the memory 730 to execute a detection method for laser protective glasses, which includes: starting a low-power optical module to output parallel light, and obtaining the optical focus data of the protective mirror module at room temperature through an electric spot analysis module; obtaining the temperature field of each protective mirror to be inspected in the protective mirror module at room temperature through a temperature detection component to adjust the emissivity of each protective mirror to be inspected so that the peak temperature of each protective mirror to be inspected is the same; starting a high-power laser to output a laser beam consistent with the power requirement of the protective mirror to be inspected and outputting a parallel light beam through a collimation module; obtaining the temperature field data of each protective mirror to be inspected in real time through a temperature detection component, and performing a single pixel traversal to determine whether each protective mirror to be inspected has a smoothness defect; when the temperature of each protective mirror to be inspected is stable, re-determine the optical focus data of the protective mirror module, and determine the focus drift temperature ratio of the protective mirror module to obtain a focus drift detection result.

[0141] In addition, the logic instructions in the above-mentioned memory 730 can be implemented in the form of a software functional unit and can be stored in a computer-readable storage medium when it is sold or used as an independent product. Based on this understanding, the technical solution of the present invention is essentially or the part that contributes to the prior art or the part of the technical solution can be embodied in the form of a software product, and the computer software product is stored in a storage medium, including a number of instructions to enable a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present invention. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), disk or optical disk and other media that can store program codes.

[0142] On the other hand, the present invention also provides a computer program product, which includes a computer program, and the computer program can be stored on a non-transitory computer-readable storage medium. When the computer program is executed by a processor, the computer can execute the detection method of the laser protective mirror provided by the above-mentioned methods, and the method includes: starting a low-power optical module to output parallel light, and obtaining the light focus data of the protective mirror module at room temperature through an electric spot analysis module; obtaining the temperature field of each protective mirror to be inspected in the protective mirror module at room temperature through a temperature detection component to adjust the emissivity of each protective mirror to be inspected so that the peak temperature of each protective mirror to be inspected is the same; starting a high-power laser to output a laser beam consistent with the power requirement of the protective mirror to be inspected and outputting a parallel light beam through a collimation module; obtaining the temperature field data of each protective mirror to be inspected in real time through a temperature detection component, and performing a single pixel traversal to determine whether each protective mirror to be inspected has a smoothness defect; when the temperature of each protective mirror to be inspected is stable, re-determining the light focus data of the protective mirror module, and determining the focus drift temperature ratio of the protective mirror module to obtain a focus drift detection result.

[0143] On the other hand, the present invention also provides a non-transitory computer-readable storage medium having a computer program stored thereon, which is implemented when the processor executes the method for detecting laser protective mirrors provided by the above methods, the method comprising: starting a low-power optical module to output parallel light, and obtaining the optical focus data of the protective mirror module at room temperature through an electric spot analysis module; obtaining the temperature field of each protective mirror to be inspected in the protective mirror module at room temperature through a temperature detection component to adjust the emissivity of each protective mirror to be inspected so that the peak temperature of each protective mirror to be inspected is the same; starting a high-power laser to output a laser beam consistent with the power requirement of the protective mirror to be inspected and outputting a parallel light beam through a collimation module; obtaining the temperature field data of each protective mirror to be inspected in real time through a temperature detection component, and performing a single pixel traversal to determine whether each protective mirror to be inspected has a smoothness defect; when the temperature of each protective mirror to be inspected is stable, re-determining the optical focus data of the protective mirror module, and determining the focus drift temperature ratio of the protective mirror module to obtain a focus drift detection result.

[0144] The device embodiments described above are merely illustrative, wherein the units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they may be located in one place, or they may be distributed on multiple network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the scheme of this embodiment. Ordinary technicians in this field can understand and implement it without paying creative labor.

[0145] Through the description of the above implementation methods, those skilled in the art can clearly understand that each implementation method can be implemented by means of software plus a necessary general hardware platform, and of course, can also be implemented by hardware. Based on this understanding, the above technical solution is essentially or the part that contributes to the prior art can be embodied in the form of a software product, and the computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, a disk, an optical disk, etc., including a number of instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to execute the methods described in each embodiment or some parts of the embodiments.

[0146] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A laser component with detection function, characterized in that: include: A laser component, wherein the laser component comprises a high-power laser and a collimation module, wherein the high-power laser is a fiber laser that outputs continuous laser light, and the laser light output by the fiber laser through the optical fiber is input to the collimation lens module of the collimation module through a mother piece that matches the optical fiber interface of the fiber laser; A protective mirror module, the protective mirror module comprising N protective mirrors to be inspected, a fixture and a mounting base, wherein N ≥ 2; A temperature detection component, the temperature detection component includes an infrared temperature measurement module and a light absorption module, the light absorption module is fixed to a first mounting base, the light output point of the high-power laser, the central optical axis of the collimation module, the central optical axis of the protective mirror module and the central optical axis of the light absorption module are coaxial, and the infrared temperature measurement module corresponding to the protective mirror module deviates from the central optical axis target angle of the protective mirror module to align laterally with the protective mirror to be inspected; A focus drift detection component, which includes a low-power optical module, a focusing lens module and an electric light spot analysis module. The parallel light beam output by the low-power optical module is incident on the protective lens module and is focused by the focusing lens module and then incident on the electric light spot analysis module. The electric light spot analysis module is used to collect and analyze the light spot characteristics of the parallel light beam after passing through the protective lens module.

2. The laser assembly with detection function according to claim 1, characterized in that: The infrared temperature measurement module includes an infrared temperature measurement sensor, a circuit part and a second mounting base connected together, and the infrared temperature measurement sensor is a multi-pixel array photoelectric sensor.

3. The laser assembly with detection function according to claim 2, characterized in that: Each pixel point of the infrared temperature sensor is used to detect a first target area range covering the surface of the protective mirror to be inspected, and the infrared temperature sensor is used to detect a second target area range covering the lens diameter area starting from the center of the surface of the protective mirror to be inspected.

4. The laser assembly with detection function according to claim 1, characterized in that: The light absorption module at least includes a diverging mirror and a light absorption module structural connection, the diverging mirror is a high-power negative focus lens, and the diverging mirror is used to diverge the incident light beam to reduce the power density.

5. The laser assembly with detection function according to claim 1, characterized in that: The low-power optical module includes a light source and an adjustment base. The light source includes a laser light source with parallel output, a fiber-coupled output, and a laser light source with a collimator module output. The spot ellipticity of the light source is greater than the target ellipticity value. The adjustment base is used to install and fix the light source, and is also used to adjust the angle and position of the light source.

6. The laser assembly with detection function according to claim 1, characterized in that: The electric spot analysis module includes a spot analysis module, a fine electric module and a third mounting base; the spot analysis module is used to detect and analyze the spot size and position of the point divergent light source, and the fine electric module includes a telescopic component, one end of the telescopic component is used to fix the spot analysis module and drive the spot analysis module to telescope with the telescopic component, and the other end of the telescopic component is used to be fixed to the third mounting base.

7. The laser assembly with detection function according to claim 6, characterized in that: The light spot analysis module includes a slit scanning analyzer or a camera-type light spot analyzer.

8. A method for detecting laser protective glasses, applied to a laser assembly with detection function as claimed in any one of claims 1 to 7, characterized in that: include: The low-power optical module is started to output parallel light, and the optical focus data of the protective mirror module at room temperature is obtained by analyzing the electric spot analysis module; The temperature field of each protective mirror to be inspected in the protective mirror module at room temperature is obtained by the temperature detection component to adjust the emissivity of each protective mirror to be inspected so that the peak temperature of each protective mirror to be inspected is the same; Start the high-power laser to output a laser beam that is consistent with the power requirement of the protective mirror to be inspected, and output a parallel beam through the collimation module; The temperature field data of each protective mirror to be inspected is obtained in real time through the temperature detection component, and single pixel traversal is performed to determine whether each protective mirror to be inspected has a finish defect; When the temperature of each protective mirror to be inspected is stable, the optical focus data of the protective mirror module is re-determined, and the focus drift temperature ratio of the protective mirror module is determined to obtain a focus drift detection result.

9. The method for detecting laser protective glasses according to claim 8, characterized in that: The temperature field data of each protective mirror to be inspected is obtained in real time by the temperature detection component, and single pixel traversal is performed to determine whether each protective mirror to be inspected has a finish defect, including: When the temperature field data of the protective lens to be inspected contains at least one local peak temperature value, the area and number of pixels containing the local peak temperature value greater than the target ratio are calculated, and the average temperature value of the surrounding pixels under the first target multiple area of ​​the pixel of the local peak temperature value is determined; When the ratio of the local peak temperature value to the average temperature value of the surrounding pixel points is greater than the second target multiple, it is determined that the smoothness defect of the protective mirror to be inspected is a smoothness pitting defect; when the ratio of the local peak temperature value to the average temperature value of the surrounding pixel points is greater than the third target multiple, it is determined that the smoothness defect of the protective mirror to be inspected is unqualified.

10. The method for detecting laser protective glasses according to claim 9, characterized in that: The step of determining the focal drift temperature ratio of the protective mirror module to obtain a focal drift detection result includes: Calculating the optical focus data of each protective mirror to be inspected in the protective mirror module and the temperature difference between adjacent protective mirrors to be inspected; Based on the temperature difference between adjacent protective mirrors to be inspected, the focus drift temperature ratio of each protective mirror to be inspected is obtained, and the ratio of the focus drift temperature ratio of each protective mirror to be inspected to the corresponding temperature compensation coefficient is obtained; The focus drift of each protective mirror to be inspected is obtained based on the ratio of the focus drift temperature ratio of each protective mirror to be inspected and the corresponding temperature compensation coefficient, and is compared with the preset focus drift allowable range to obtain the focus drift detection result of each protective mirror to be inspected.

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