Cleanness testing device and method

Abstract

The invention discloses a cleanliness testing device and method, and belongs to the technical field of cleanliness testing. The cleanliness testing device comprises a precision control mechanism, a pressure-sensitive sensor and a control display system; the precise control mechanism comprises a micrometer head fixing seat, a micrometer adjusting micrometer head fixed at one end of the micrometer head fixing seat and a movable plate sliding on one side of the micrometer head fixing seat, and the working end of the micrometer adjusting micrometer head abuts against one end of the movable plate; the pressure-sensitive sensor and control display system comprises a sensor connector, and one end of the sensor connector is connected with a magnet extension rod in a vertically downward magnetic attraction mode, the pollution conditions of organic pollutants, surfactants and chemical reagents on the surface of a solid can be accurately tested, meanwhile, the artificial intelligence data model analysis technology is combined, and the detection accuracy is improved. And judgment of the surface cleanliness of the material is realized. The technology can be widely applied to precision part processing, food industry, various laboratories and family daily life, and is simple to operate, accurate in measured value and high in popularization value.

Description

Technical Field

[0001] The invention relates to the technical field of cleanliness testing, and in particular to a cleanliness testing device and method. Background Art

[0002] The surface cleanliness of solid materials and experimental equipment is a routine test item after precision machining, semiconductors, and daily laboratory cleaning. The test content of cleanliness usually includes organic pollutants, surfactants, production chemical reagents, solid particles, organic solidified films, etc. At present, the detection technology for organic pollutants such as oil stains is UV or infrared detection technology, while solid particles use microscopy, and organic solidified films use water drop angle measurement method; However, for organic pollutants such as floating oil or for surfactants, chemical reagents used in production processes such as polishing fluids, stripping fluids, lubricating oils, cutting fluids, etc., the detection success rate of any of the above technologies is ineffective; An important application of cleanliness testing in the semiconductor industry and the printing industry is the surface cleanliness test of samples after plasma cleaning or treatment. The commonly used technologies at present are dyne pens or water drop angle measuring instruments. The basic principle of the test is that the surface free energy of solid materials is different when there is organic contamination on the surface and when there is no organic contamination. The surface free energy of organic pollutants is low, so relatively speaking, dyne pens with large dyne values ​​(such as above 50Dyne / cm) cannot spread on the solid surface, and the water contact angle value at this time is relatively large. On the clean surface, dyne values ​​above 50Dyne / cm can also be spread, and the water contact angle value is also relatively small. In practical applications, these two existing technologies ignore the situation that organic pollutants do not form a solid film, and completely ignore that the mechanism of action of chemical reagents and surfactants in the production process is different from that of solid films.

[0003] Therefore, these two technologies cannot accurately test organic pollutants, production chemical reagent residues and surfactant residues on solid surfaces.

[0004] Based on this, the present invention designs a cleanliness testing device and method to solve the above problems. Summary of the invention

[0005] The object of the present invention is to provide a cleanliness testing device and method to solve the above technical problems.

[0006] To achieve the above-mentioned object, the present invention provides the following technical solutions: a cleanliness testing device, comprising: a precision control mechanism, a pressure-sensitive sensor and a control display system; The precision control mechanism includes a micrometer head fixing seat, a micrometer adjustment micrometer head fixed to one end of the micrometer head fixing seat, and a movable plate sliding on one side of the micrometer head fixing seat, wherein the micrometer adjustment micrometer head operating end abuts against one end of the movable plate; The pressure-sensitive sensor and control display system include a sensor connector, and one end of the sensor connector is vertically downwardly magnetically connected to a magnet extension rod, and the other end of the magnet extension rod is magnetically connected to a probe fixing clamp, and one end of the probe fixing clamp clamps a probe; The pressure-sensitive sensor and the control display system are arranged on the outer wall of the fixed plate, and the fixed plate is fixed to the outer wall of the movable plate of the precision control mechanism.

[0007] Preferably, a support plate is fixed to the outer wall of the differential head fixing seat in the precision control mechanism, a C-shaped base plate is fixed to the other end of the support plate, a guide rail fixing plate is fixed to the outer wall of the support plate, the first guide rail and the second guide rail are respectively fixed to the outer wall of the guide rail fixing plate, and the movable plate is fixed to the sliding ends of the first guide rail and the second guide rail.

[0008] Preferably, the outer wall of the guide rail fixing plate is threadedly connected with a first tension spring fixing screw, the outer wall of the movable plate is threadedly connected with a second tension spring fixing screw, and a tension spring is arranged between the first tension spring fixing screw and the second tension spring fixing screw.

[0009] Preferably, an adjusting foot is threadedly connected to the outer wall of the C-shaped bottom plate, and one end of the adjusting foot is threadedly connected to a supporting foot.

[0010] A cleanliness testing method includes: a sample to be tested and water droplets disposed on the surface of the sample to be tested, and further includes the following steps: S1: To test the cleanliness of water, fill a sample dish with clean water and place the sample dish under the probe.

[0011] S2: Drop water onto the surface of the sample to be tested, and the diameter of the water drop is larger than the probe.

[0012] S3: Place the above cleanliness test device on the sample, place the probe of the cleanliness test device just above the water drop, adjust the micrometer adjustment differential head of the precision control mechanism, and stop rotating the differential head when the pressure-sensitive sensor display value changes after the probe contacts the water drop; S4: Read the values ​​and analyze the surface cleanliness based on the results of the AI ​​big data model.

[0013] Compared with the prior art, the present invention has the following beneficial effects: It provides a method based on the principle of molecular cohesion of water and using a pressure-sensitive sensor, combined with a high-precision micrometer adjustment mechanism and a bracket structure design, which can accurately test the pollution of organic pollutants, surfactants, and chemical reagents on the solid surface. At the same time, it combines artificial intelligence data model analysis technology to determine the cleanliness of the material surface. This technology can be widely used in precision parts processing, food industry, various laboratories, and daily household use. It is simple to operate, has accurate measurement values, and has high promotion value. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for describing the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying creative work.

[0015] Figure 1 This is a schematic diagram of the front view structure of the cleanliness testing device of this embodiment; Figure 2 It is a schematic diagram of the side view structure of the cleanliness testing device of this embodiment when it is not in contact with water droplets; Figure 3 It is a schematic diagram of the side view structure of the cleanliness testing device of this embodiment contacting water droplets; Figure 4 A schematic diagram of the precision control mechanism is shown in this embodiment; Figure 5 A schematic side view showing the precision control mechanism of this embodiment; Figure 6 This is a schematic diagram of the movable plate installed to highlight the precision control mechanism of this embodiment.

[0016] In the accompanying drawings, the reference numerals represent the following: 1. Precision control mechanism; 2. Fixed plate; 3. Support plate; 4. Pressure-sensitive sensor and control display system; 5. Adjustment foot; 6. C-shaped bottom plate; 7. Support foot; 8. Magnet extension rod; 9. Probe fixing clamp; 10. Probe; 20. Water drop; 21. Test sample; 11. Micrometer adjustment differential head; 12. Differential head fixing seat; 13. Movable plate; 14. Guide rail fixing plate; 15. First guide rail; 16. First tension spring fixing screw; 17. Tension spring; 18. Second tension spring fixing screw; 19. Second guide rail. DETAILED DESCRIPTION

[0017] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0018] See also Figure 1-6 ,The present invention provides a technical solution: a cleanliness testing device, comprising: a precision control mechanism 1, a pressure-sensitive sensor and a control display system 4; The precision control mechanism 1 includes a differential head fixing seat 12, a micrometer adjustment differential head 11 fixed to one end of the differential head fixing seat 12, and a movable plate 13 sliding on one side of the differential head fixing seat 12, and the working end of the micrometer adjustment differential head 11 abuts against one end of the movable plate 13; The pressure-sensitive sensor and control display system 4 includes a sensor connector, and one end of the sensor connector is vertically and downwardly magnetically connected to a magnet extension rod 8, and the other end of the magnet extension rod 8 is magnetically connected to a probe fixing clamp 9, and one end of the probe fixing clamp 9 clamps and fixes a probe 10; The pressure-sensitive sensor and control display system 4 are arranged on the outer wall of the fixed plate 2, and the fixed plate 2 is fixed to the outer wall of the movable plate 13 of the precision control mechanism 1; The cleanliness testing device mainly controls the up and down movement of the probe 10 in the pressure-sensitive sensor and control display system 4 by rotating the micrometer-adjusting differential head 11 in the precision control mechanism 1, so that the probe 10 enters and exits the water droplet 20 part on the surface of the tested sample 21. The pressure-sensitive sensor and control display system 4 is a device that combines a pressure-sensitive sensor, a control and a display system, and is used for auxiliary detection and control display. The sensor of the pressure-sensitive sensor and control display system 4 provides a connector, and the material of the connector can be stainless iron or a magnet.

[0019] Further preferably, the outer wall of the micrometer head fixing seat 12 in the precision control mechanism 1 is fixed with a support plate 3, the other end of the support plate 3 is fixed with a C-shaped bottom plate 6, the outer wall of the support plate 3 is fixed with a guide rail fixing plate 14, the outer wall of the guide rail fixing plate 14 is respectively fixed with a first guide rail 15 and a second guide rail 19, and the movable plate 13 is fixed to the sliding ends of the first guide rail 15 and the second guide rail 19; By twisting the rotating part of the micrometer adjustment differential head 11, the movable plate 13 can be moved relative to the guide rail fixed plate 14 through its working end. By pressing the movable plate 13 by hand, the movable plate 13 also moves relative to the guide rail fixed plate 14.

[0020] Further preferably, the outer wall of the guide rail fixing plate 14 is threadedly connected with a first tension spring fixing screw 16, the outer wall of the movable plate is threadedly connected with a second tension spring screw 18, and a tension spring 17 is arranged between the first tension spring fixing screw and the second tension spring fixing screw 18; Two ends of the tension spring 17 are fixed to the outer wall of the movable plate 13 and the guide rail fixing plate 14 through a first tension spring screw 16 and a second tension spring screw 18 to assist the movable plate 13 in moving.

[0021] Further preferably, the outer wall of the C-shaped bottom plate 6 is threadedly connected with an adjusting foot 5, and one end of the adjusting foot 5 is threadedly connected with a supporting foot 7; There are four adjusting feet 5 and four supporting feet 7 , which support the C-shaped bottom plate 6 so that the C-shaped bottom plate 6 can be better placed on the surface of the tested sample 21 .

[0022] Specifically, in this embodiment, when the cleanliness test is performed on the tested sample 21, the test method is: Step 1: Test the cleanliness of water. Fill a sample dish with clean water and place the sample dish under the probe 10.

[0023] Step 2: Drop a water drop 20 onto the surface of the sample 21 to be tested, and the diameter of the water drop 20 is larger than the probe 10 .

[0024] Step 3: Place the cleanliness test device on the sample, place the probe 10 of the cleanliness test device directly above the water drop 20, adjust the micrometer adjustment differential head 11 of the precision control mechanism 1, and stop rotating the differential head until the pressure sensor display value changes after the probe 10 contacts the water drop 20.

[0025] Step 4: Read the values ​​and analyze the surface cleanliness based on the results of the AI ​​big data model.

[0026] After analyzing the water molecule cohesion value read by the pressure-sensitive sensor control system, a mathematical model is established based on the changes in molecular cohesion caused by the pollution of surfactants, organic matter or chemical reagents in the artificial intelligence big data model. Different colors are used to display different pollution levels, and special colors are used to warn of serious pollution.

[0027] In the description of the present invention, it is necessary to understand that the terms "coaxial", "bottom", "one end", "top", "middle", "the other end", "upper", "one side", "top", "inside", "front", "center", "both ends" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0028] In the present invention, unless otherwise clearly stipulated and limited, the terms such as "installation", "setting", "connection", "fixation" and "screw-on" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements or the interaction relationship between two elements. Unless otherwise clearly defined, ordinary technicians in this field can understand the specific meanings of the above terms in the present invention according to the specific circumstances.

[0029] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A cleanliness testing device, characterized in that: include: Precision control mechanism (1), pressure-sensitive sensor and control display system (4); The precision control mechanism (1) comprises a micrometer head fixing seat (12), a micrometer adjustment micrometer head (11) fixed to one end of the micrometer head fixing seat (12), and a movable plate (13) sliding on one side of the micrometer head fixing seat (12), wherein the operating end of the micrometer adjustment micrometer head (11) abuts against one end of the movable plate (13); The pressure-sensitive sensor and control display system (4) comprises a sensor connector, wherein one end of the sensor connector is vertically downwardly magnetically connected to a magnet extension rod (8), the other end of the magnet extension rod (8) is magnetically connected to a probe fixing clamp (9), and one end of the probe fixing clamp (9) clamps and fixes a probe (10); The pressure-sensitive sensor and control display system (4) are arranged on the outer wall of the fixed plate (2), and the fixed plate (2) is fixed to the outer wall of the movable plate (13) of the precision control mechanism (1).

2. A cleanliness testing device according to claim 1, characterized in that: A support plate (3) is fixed to the outer wall of the micrometer head fixing seat (12) in the precision control mechanism (1), a C-shaped bottom plate (6) is fixed to the other end of the support plate (3), a guide rail fixing plate (14) is fixed to the outer wall of the support plate (3), a first guide rail (15) and a second guide rail (19) are respectively fixed to the outer wall of the guide rail fixing plate (14), and the movable plate (13) is fixed to the sliding ends of the first guide rail (15) and the second guide rail (19).

3. A cleanliness testing device according to claim 2, characterized in that: The outer wall of the guide rail fixing plate (14) is threadedly connected to a first tension spring fixing screw (16), the outer wall of the movable plate is threadedly connected to a second tension spring screw (18), and a tension spring (17) is provided between the first tension spring fixing screw and the second tension spring fixing screw (18).

4. A cleanliness testing device according to claim 2, characterized in that: An adjusting foot (5) is threadedly connected to the outer wall of the C-shaped bottom plate (6), and one end of the adjusting foot (5) is threadedly connected to a supporting foot (7).

5. A cleanliness testing method, characterized in that: include: The tested sample (21) and the water droplet (20) disposed on the surface of the tested sample (21) further include the following steps: S1: To test the cleanliness of water, fill a sample dish with clean water and place the sample dish under the probe (10); S2: Drop a water drop (20) onto the surface of the sample (21) to be tested, and the diameter of the water drop (20) is larger than the probe (10); S3: placing the cleanliness test device on the sample to be tested (21), placing the probe (10) of the cleanliness test device directly above the water drop (20), adjusting the micrometer adjustment differential head (11) of the precision control mechanism (1), and stopping the rotation of the differential head when the pressure-sensitive sensor display value changes after the probe (10) contacts the water drop (20); S4: Read the values ​​and analyze the surface cleanliness based on the results of the AI ​​big data model.

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