A semiconductor packaging quality visual inspection device
By designing a multi-color LED light source system for rotating discs and rotating plates in semiconductor packaging quality visual detection devices, the problem of low color switching efficiency in the prior art is solved, fast and accurate light source switching is achieved, and the detection efficiency and accuracy are improved.
Patent Information
- Application Number
- CN202510123056.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-26
- Publication Date
- 2025-05-23
- Estimated Expiration
- 2045-01-26
AI Technical Summary
In the existing semiconductor package quality visual detection device, the color switching efficiency of the light source is low, and the filter needs to be replaced frequently, resulting in a decrease in detection efficiency and image quality.
A multi-color LED light source system including a rotary disc and a rotary plate is designed. Through the combination of a rotary disc and a rotary plate, the light source of multiple colors can be switched. Through the coordination of the sliding frame and the groove, it is ensured that the lamp cover can be accurately fixed to the outside of the light source when it is opened and aligned with the lamp head of the lamp to avoid light leakage.
The rapid switching of light source color is achieved, the accuracy and efficiency of detection is improved, manual intervention is reduced, the background of the detected image is clear, and the visibility of specific features is enhanced.
Smart Images

Figure CN119555604B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of semiconductor packaging inspection, and in particular to a semiconductor packaging quality visual inspection device. Background Art
[0002] Semiconductor packaging refers to the process of encapsulating semiconductor chips in microelectronic devices with a protective shell. The main purpose of packaging is to protect semiconductor chips from mechanical, chemical or environmental damage and provide electrical connections for the chips.
[0003] Visual inspection of packaging quality is crucial in the semiconductor manufacturing process. It can effectively ensure product quality, reduce defective rates, and improve production efficiency. During visual inspection, the light source can ensure that the surface of the inspected object is evenly illuminated, thereby improving the brightness and clarity of the image. Selecting the appropriate light source color based on the inspected object and the required information can enhance or weaken the visibility of specific features.
[0004] Optical filters are a simple and direct method that can be placed in front of a light source to selectively filter out unnecessary light and allow only light of a specific wavelength to pass, thereby changing the color of the light source. In the prior art, since the optical filter in front of the light source is single, during the detection process, workers need to frequently replace the optical filter to adapt to different detection needs. However, each time the filter is replaced, the detection process needs to be stopped, which reduces the detection efficiency.
[0005] And because the light source is located close to the detection target, the operating space is narrow. The user needs to lift the light source away from the target before replacing it. After each filter replacement, the brightness and position of the light source need to be readjusted, which will cause the stability of the light source to decrease, affecting the image quality and further affecting the accuracy of the detection results.
[0006] In view of the above-mentioned defects, a semiconductor packaging quality visual inspection device is provided. Summary of the invention
[0007] The purpose of the present invention is to provide a semiconductor packaging quality visual inspection device in order to solve the above problems.
[0008] In order to achieve the above-mentioned purpose, the present invention adopts the following technical scheme: a semiconductor packaging quality visual inspection device, comprising a body, a conveying mechanism installed on the body and an industrial camera, the side end of the industrial camera is rotatably installed with a lamp tube through an equipment frame, a rotating disk is rotatably connected in the lamp tube, a side tube is coaxially fixed on the rotating disk, a plurality of rotating plates distributed in an annular shape are movably arranged on the outer side of the rotating disk, and a lamp cover is rotatably connected to the rotating plate;
[0009] The lamp tube is provided with a sliding frame and a telescopic rod for controlling the movement of the sliding frame. A groove for fitting the sliding frame is formed in the rotating plate. A transmission member corresponding to the rotating plate is provided on the outer side of the rotating disk. When the sliding frame slides toward the side tube, the rotating plate first rotates away from the side tube under the action of the transmission member, and the lampshade rotates and unfolds relative to the rotating plate under the action of gravity. When the lampshade is aligned with the lamp head of the lamp tube, the sliding frame presses the inner wall of the groove to sleeve the lamp tube on the outer side of the lamp head.
[0010] The side end of the lamp tube is fixedly provided with a rack penetrating the turntable and the side tube, the rack is provided with an electric control component for controlling the rotation of the side tube, the side of the rack is provided with a limiting structure for limiting the random rotation of the turntable, and the side of the side tube is provided with a compression structure for limiting the expansion of the lampshade relative to the turntable.
[0011] Preferably, the sliding frame is a bent structure, the transmission member includes a toothed plate slidably connected to the inside of the side tube, and a component that drives the toothed plate to slide, the outer end of the rotating disk is fixed with a bracket corresponding to the rotating plate, and a gear that engages with the toothed plate is rotatably connected in the bracket.
[0012] Preferably, a bar block coaxially fixed with the gear is rotatably connected to the bracket, a notch for cooperating with the gear movement and a groove for cooperating with the bar block sliding are formed in the rotary plate, and a magnetic sheet with repelling magnetic poles is installed on the inner wall of the groove at one end opposite to the bar block.
[0013] Preferably, the component that drives the tooth plate to slide includes a sliding arm slidably connected to the turntable, and a docking structure, the side end of the sliding arm is fixed with a protrusion, and the inside of the tooth plate is formed with a sliding groove that cooperates with the sliding of the protrusion, and the sliding groove consists of a transverse groove and an oblique groove.
[0014] Preferably, the docking structure comprises a round block fixedly mounted on the bottom of the sliding frame, and an open groove for the round block to be slidably embedded is formed in the sliding arm.
[0015] Preferably, the electric control component comprises a motor mounted on a frame rod, a support arm is mounted on the inner wall of the side tube, and an output end of the motor is fixed to the support arm.
[0016] Preferably, the limiting structure comprises a guide rod fixed to the inner end of the tooth plate, and the side wall of the frame rod is formed with a guide groove cooperating with the guide rod for sliding, and the guide groove consists of an annular groove and a branch groove.
[0017] Preferably, the compression structure includes a swing arm rotatably connected to the outside of the stopper and coaxially fixed with the lampshade, a cross bar is fixed on the inner side of the swing arm, a side extension frame that acts on the cross bar is fixed on the side end of the side tube, and a stopper that limits the rotation range of the swing arm is fixed on the outer end of the swing plate.
[0018] Preferably, a shielding plate cooperating with the inner cavity of the lampshade for sealing is fixedly provided on the rotating plate, and an air blowing mechanism for cleaning the surface of the lampshade is installed at the outer end of the lampshade.
[0019] In summary, due to the adoption of the above technical solution, the beneficial effects of the present invention are:
[0020] 1. In this application, through the design of the rotary disk and the rotary plate, a multi-color LED light source can be easily integrated to realize the switching of light sources of multiple colors. Filters of different colors can enhance the visibility of specific features and improve the accuracy of detection. The matching design of the sliding frame and the groove ensures that the lampshade can be accurately fixed on the outside of the light source when it is opened to align the lamp head of the lamp tube, avoiding light leakage, ensuring a clear background of the detection image, and enhancing the visibility of specific features.
[0021] 2. In this application, the automatic rotation of the side cylinder reduces manual intervention and improves detection efficiency and accuracy. The motor can quickly drive the side cylinder to rotate through the support arm to achieve fast switching of filters of different colors. The coordination of the limit structure and the compression structure can limit the idle lampshade from randomly unfolding relative to the rotating plate, ensure the stability of the lampshade when idle, and avoid the unfolding of the lampshade due to accidental collision or vibration, which affects the detection results.
[0022] 3. In this application, when the side tube rotates to switch the position of the lampshade, the rotating plate and the lampshade are folded, which reduces the space occupied by the equipment and makes the equipment more compact. This design facilitates the free switching of lampshades with different filter colors in a small space. The air blowing mechanism can automatically remove dust and impurities on the surface of the lampshade, ensure the uniformity and stability of the light source, reduce light scattering and reflection caused by dust and impurities, and improve the accuracy and reliability of detection. BRIEF DESCRIPTION OF THE DRAWINGS
[0023] Figure 1 A schematic diagram of the three-dimensional structure of a machine body provided in an embodiment of the present invention is shown;
[0024] Figure 2 A schematic diagram of the three-dimensional structure of a lamp tube provided according to an embodiment of the present invention is shown;
[0025] Figure 3 A schematic cross-sectional structure diagram of a rotating plate provided according to an embodiment of the present invention is shown;
[0026] Figure 4 A schematic cross-sectional view of a side tube provided in an embodiment of the present invention is shown;
[0027] Figure 5 A schematic diagram of an exploded structure of a rotating plate and a gear according to an embodiment of the present invention is shown;
[0028] Figure 6A schematic diagram of the side structure of a rack rod provided according to an embodiment of the present invention is shown.
[0029] Legend:
[0030] 1. Machine body; 2. Conveying mechanism; 3. Industrial camera; 4. Equipment rack; 5. Lamp tube; 6. Turntable; 7. Side tube; 8. Bracket; 9. Gear; 10. Bar block; 11. Turntable; 1101. Shield; 12. Notch; 13. Groove; 14. Magnetic sheet; 15. Abutment groove; 16. Sliding frame; 17. Telescopic rod; 18. Round block; 19. Sliding arm; 20. Opening groove; 21. Bump; 22. Tooth plate; 23. Slide groove; 24. Guide rod; 25. Lamp cover; 26. Rotary arm; 27. Block; 28. Crossbar; 29. Side extension frame; 30. Frame rod; 31. Guide groove; 32. Motor; 33. Support arm; 34. Blowing mechanism. DETAILED DESCRIPTION
[0031] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0032] See also Figure 1-Figure 6 The present invention provides a technical solution: a semiconductor packaging quality visual inspection device, comprising a body 1, a conveying mechanism 2 installed on the body 1 and an industrial camera 3, a lamp tube 5 is rotatably installed on the side end of the industrial camera 3 through an equipment frame 4, a turntable 6 is rotatably connected in the lamp tube 5, a side tube 7 is coaxially fixed on the turntable 6, a plurality of rotating plates 11 distributed in an annular shape are movably arranged on the outer side of the turntable 6, and a lamp cover 25 is rotatably connected to the rotating plate 11.
[0033] The conveying mechanism 2 adopts the existing conveyor belt conveying method, is installed on the machine body 1, and is used to convey the semiconductor packaged products to be inspected, and convey the semiconductor packaged products to the inspection area of the industrial camera 3. The industrial camera 3 is an existing technology, and is used to capture the image of the product to be inspected for visual inspection. The lamp tube 5 is rotatably installed on the equipment frame 4 to ensure that the position of the lamp tube 5 can be flexibly adjusted.
[0034] The filters installed on the multiple lampshades 25 are of different colors. Through the design of the rotary disk 6 and the rotary plate 11, a multi-color LED light source can be conveniently integrated. Thus, the switching of light sources of multiple colors can be realized, thereby enhancing the visibility of specific features and improving the accuracy of detection. In addition, through the combination of the automatic conveying mechanism 2 and the multi-color LED light source, the automation of the detection process can be realized, manual intervention can be reduced, and the detection efficiency and accuracy can be improved.
[0035] A sliding frame 16 and a telescopic rod 17 for controlling the movement of the sliding frame 16 are provided on the lamp tube 5. A retaining groove 15 for the sliding frame 16 to be embedded is formed in the rotary plate 11. A transmission member corresponding to the rotary plate 11 is provided on the outer side of the rotary disk 6. When the sliding frame 16 slides toward the side tube 7, the rotary plate 11 first rotates away from the side tube 7 under the action of the transmission member, and the lampshade 25 rotates and unfolds relative to the rotary plate 11 under the action of gravity. When the lampshade 25 is aligned with the lamp holder of the lamp tube 5, the sliding frame 16 presses the inner wall of the retaining groove 15 to sleeve the lamp tube 5 on the outer side of the lamp holder.
[0036] The telescopic rod 17 is a conventional hydraulic or pneumatic telescopic method, which controls the movement of the sliding frame 16 so that it can be flexibly moved close to or away from the side tube 7, thereby realizing the unfolding and folding of the lampshade 25. When the side tube 7 rotates to switch the position of the lampshade 25, the rotating plate 11 and the lampshade 25 are in a folded state, which reduces the space occupied by the device and makes the device more compact, thereby facilitating the free switching of the lampshade 25 with different filter colors in a small space.
[0037] When the lampshade 25 is opened and aimed at the lamp head of the lamp tube 5, the sliding frame 16 is embedded in the groove 15. As the sliding frame 16 continues to move, it will push the inner wall of the groove 15 so that the opened lampshade 25 is fixed on the outside of the light source to avoid light leakage, thereby ensuring the background of the detection image is clear, enhancing the visibility of specific features, and improving the accuracy of detection.
[0038] A rod 30 penetrating the turntable 6 and the side tube 7 is fixedly provided at the side end of the lamp tube 5. An electric control component for controlling the rotation of the side tube 7 is provided on the rod 30. A limiting structure for limiting the free rotation of the turn plate 11 is provided on the side of the rod 30. A compression structure for limiting the expansion of the lampshade 25 relative to the turn plate 11 is provided on the side of the side tube 7.
[0039] The design of the support rod 30 makes the structure of the rotating disk 6 and the side tube 7 more stable, ensuring that there will be no loosening or deviation during the rotation process, thereby improving the reliability and stability of the equipment. The support rod 30 is provided with an electric control component for controlling the rotation of the side tube 7, realizing automatic control and reducing manual intervention. The coordinated setting of the limit structure and the compression structure can limit the idle lampshade 25 from freely unfolding relative to the rotating plate 11. This design ensures the stability of the lampshade 25 when idle, and avoids the lampshade 25 unfolding due to accidental collision or vibration, which affects the detection.
[0040] Specifically, Figure 3-Figure 5 As shown, the sliding frame 16 is a bent structure, and the transmission part includes a tooth plate 22 slidably connected to the inside of the side tube 7, and a component that drives the tooth plate 22 to slide. The outer end of the rotary disk 6 is fixed with a bracket 8 corresponding to the rotary plate 11, and the bracket 8 is rotatably connected with a gear 9 that engages with the tooth plate 22.
[0041] When the sliding frame 16 moves under the action of the telescopic rod 17 , the corresponding tooth plate 22 will slide along the side tube 7 under the action of the transmission member, and the gear 9 will rotate under the meshing action of the tooth plate 22 .
[0042] A bar block 10 coaxially fixed with the gear 9 is rotatably connected to the bracket 8, a notch 12 for cooperating with the gear 9 and a groove 13 for cooperating with the sliding of the bar block 10 are formed in the rotary plate 11, and a magnetic sheet 14 with repelling magnetic poles is installed on the inner wall of the groove 13 at one end opposite to the bar block 10.
[0043] When the gear 9 rotates, the strip block 10 coaxially fixed with the gear 9 will drive the rotary plate 11 to rotate by acting on the inner wall of the groove 13. Before the inner wall of the abutment groove 15 in the rotary plate 11 is not pressed by the sliding frame 16, the sliding frame 16 will remain in an extended state under the action of the repelling magnetic sheet 14 until the lampshade 25 is rotated and unfolded to align with the lamp holder of the lamp tube 5. At this time, the sliding frame 16 will be embedded in the abutment groove 15. As the sliding frame 16 continues to lean against the side tube 7, the sliding frame 16 will act on the inner wall of the abutment groove 15, so that the rotary plate 11 overcomes the repulsive force of the magnetic sheet 14 and drives the unfolded lampshade 25 to be sleeved on the outside of the lamp holder.
[0044] The component that drives the tooth plate 22 to slide includes a slide arm 19 slidably connected to the turntable 6, and a docking structure. A protrusion 21 is fixed to the side end of the slide arm 19, and a slide groove 23 is formed inside the tooth plate 22 to cooperate with the sliding of the protrusion 21. The slide groove 23 consists of a transverse groove and an oblique groove.
[0045] When the protrusion 21 slides along the oblique groove of the slide groove 23, the protrusion 21 presses the inner wall of the oblique groove to drive the tooth plate 22 to slide along the side tube 7, and the rotary plate 11 is in a rotating state. When the protrusion 21 slides to the horizontal groove of the tooth plate 22, the sliding frame 16 will act on the inner wall of the groove 15 to push the rotary plate 11 to move. During this process, the tooth plate 22 will remain stationary relative to the side tube 7, and the rotary plate 11 will remain in the same horizontal state with the side tube 7, which is conducive to the docking of the unfolded lampshade 25 with the lamp head of the lamp tube 5.
[0046] The docking structure includes a round block 18 fixedly mounted on the bottom of the sliding frame 16 , and an open groove 20 is formed in the sliding arm 19 for the round block 18 to slide and embed.
[0047] When the sliding arm 19 rotates with the rotary disk 6, the round block 18 at the bottom of the sliding frame 16 is circumferentially embedded in the open groove 20 thereof, and at this time, by controlling the movement of the sliding frame 16, the sliding arm 19 can be driven to move synchronously by the pressure of the round block 18 on the inner wall of the open groove 20. Through the cooperation of the round block 18 and the open groove 20, the sliding frame 16 can correspondingly control the rotary plate 11 switched to a position, thereby conveniently switching the color of the light source.
[0048] Specifically, Figure 4As shown, the electric control component includes a motor 32 mounted on the frame rod 30, and a support arm 33 is installed on the inner wall of the side tube 7, and the output end of the motor 32 is fixed to the support arm 33. The use of the motor 32 can realize the automatic rotation of the side tube 7, reduce manual intervention, and improve the detection efficiency and accuracy. By controlling the rotation of the motor 32, accurate light source switching and position adjustment can be achieved. The design of the support arm 33 can ensure that the connection between the output end of the motor 32 and the side tube 7 is stable, so that the motor 32 can quickly drive the side tube 7 to rotate through the support arm 33, and realize the rapid switching of different color filters.
[0049] Specifically, Figure 4 As shown, the limiting structure includes a guide rod 24 fixed to the inner end of the tooth plate 22, and a guide groove 31 is formed on the side wall of the frame rod 30 to cooperate with the sliding of the guide rod 24, and the guide groove 31 is composed of an annular groove and a branch groove.
[0050] When the switched rotary plate 11 rotates to the position along with the side tube 7, the guide rod 24 fixed on the tooth plate 22 slides to the intersection of the annular groove and the branch groove. At this time, due to the existence of the branch groove, the movement of the tooth plate 22 relative to the side tube 7 will not be restricted. The movement of the tooth plate 22 controls the retraction and extension state of the rotary plate 11. When the rotary plate 11 is in the folded state, the guide rod 24 is located in the annular groove. When the side tube 7 rotates, the guide rod 24 will slide along the annular groove. The annular groove restricts the random sliding of the tooth plate 22 relative to the side tube 7, thereby ensuring that the rotary plate 11 maintains a stable folded state.
[0051] Specifically, Figure 2-Figure 4 As shown, the compression structure includes a swing arm 26 which is rotatably connected to the outside of the stopper 27 and coaxially fixed with the lampshade 25. A cross bar 28 is fixedly provided on the inner side of the swing arm 26. A side extension frame 29 for acting on the cross bar 28 is fixedly provided on the side end of the side tube 7. A stopper 27 for limiting the rotation range of the swing arm 26 is fixedly provided on the outer end of the swing plate 11.
[0052] When the rotary plate 11 rotates and rotates away from the side tube 7, the cross bar 28 is also separated from the side extension frame 29. At this time, the state of the lampshade 25 relative to the rotary plate 11 will not be restricted. During the downward rotation of the rotary plate 11, the lampshade 25 will also rotate and unfold relative to the rotary plate 11 under the action of gravity until the rotary arm 26 abuts against the stopper 27, which will limit the continued unfolding of the lampshade 25. At this time, the lampshade 25 and the rotary plate 11 are vertically distributed.
[0053] When the rotary plate 11 rotates toward the side tube 7, the side extension frame 29 fixed on the side tube 7 will contact the side wall of the cross bar 28. The side wall of the side extension frame 29 pushes the cross bar 28, driving the rotary arm 26 fixed to the cross bar 28 to drive the lampshade 25 to rotate and fold.
[0054] Specifically, Figure 2-Figure 4As shown, a shielding plate 1101 is fixedly provided on the rotating plate 11 to seal the inner cavity of the lampshade 25 , and a blowing mechanism 34 for cleaning the surface of the lampshade 25 is installed at the outer end of the lampshade 25 .
[0055] The blowing mechanism 34 provides high-pressure airflow through a compressed air source (air compressor) in the prior art. When the compressed air passes through the nozzle of the air blowing hanger, the airflow speed is accelerated and the pressure is reduced, forming a strong airflow impact force, thereby cleaning the surface of the lampshade 25.
[0056] When the lampshade 25 is rotated and folded relative to the rotating plate 11, the baffle 1101 fixed on the rotating plate 11 will block the inner cavity of the lampshade 25, thereby preventing dust or impurities from entering the inner cavity of the lampshade 25. The blocking of the baffle 1101 can reduce the accumulation of dust and impurities, making the maintenance of the inner cavity of the lampshade 25 more convenient, reducing maintenance time and cost. When the lampshade 25 is rotated toward the blowing mechanism 34 as the rotating disk 6 rotates, the blowing mechanism 34 will blow and clean the outer surface of the lampshade 25. This design can automatically remove dust and impurities on the surface of the lampshade 25, ensure the uniformity and stability of the light source, reduce light scattering and reflection caused by dust and impurities, and improve the accuracy and reliability of detection.
[0057] The design of this folding structure allows the staff to directly cover the outer side of the side tube 7 with the cylindrical cover when the equipment is idle, and the cylindrical cover can cover multiple lampshades 25 at one time, reducing the operation steps and improving the maintenance efficiency. This design makes the equipment tidier when idle and reduces the accumulation of dust and impurities.
[0058] The above description of the embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.
Claims
1. A semiconductor packaging quality visual inspection device, comprising a body (1), a conveying mechanism (2) mounted on the body (1), and an industrial camera (3), characterized in that: A lamp tube (5) is rotatably mounted on the side end of the industrial camera (3) through an equipment frame (4), a rotary disk (6) is rotatably connected to the lamp tube (5), a side tube (7) is coaxially fixed to the rotary disk (6), a plurality of rotating plates (11) distributed in an annular shape are movably arranged on the outer side of the rotary disk (6), and a lampshade (25) is rotatably connected to the rotating plate (11); The lamp tube (5) is provided with a sliding frame (16) and a telescopic rod (17) for controlling the movement of the sliding frame (16); a groove (15) for fitting the sliding frame (16) is formed in the rotary plate (11); a transmission member corresponding to the rotary plate (11) is provided on the outer side of the rotary disk (6); when the sliding frame (16) slides toward the side tube (7), the rotary plate (11) first rotates away from the side tube (7) under the action of the transmission member, and the lampshade (25) rotates and unfolds relative to the rotary plate (11) under the action of gravity; when the lampshade (25) is aligned with the lamp head of the lamp tube (5), the sliding frame (16) presses the inner wall of the groove (15) to sleeve the lamp tube (5) on the outer side of the lamp head; A support rod (30) penetrating the rotating disk (6) and the side tube (7) is fixedly provided at the side end of the lamp tube (5); an electric control component for controlling the rotation of the side tube (7) is provided on the support rod (30); a limiting structure for limiting the random rotation of the rotating plate (11) is provided on the side of the support rod (30); and a compression structure for limiting the expansion of the lampshade (25) relative to the rotating plate (11) is provided on the side of the side tube (7).
2. A semiconductor packaging quality visual inspection device according to claim 1, characterized in that: The sliding frame (16) is of a bent structure, the transmission member comprises a toothed plate (22) slidably connected to the inside of the side tube (7), and a component driving the toothed plate (22) to slide, the outer end of the rotary disk (6) is fixedly provided with a bracket (8) corresponding to the rotary plate (11), and a gear (9) meshing with the matching toothed plate (22) is rotatably connected in the bracket (8).
3. A semiconductor packaging quality visual inspection device according to claim 2, characterized in that: The bracket (8) is rotatably connected to a bar block (10) coaxially fixed with the gear (9), the rotary plate (11) is formed with a notch (12) for cooperating with the gear (9) for movement, and a groove (13) for cooperating with the bar block (10) for sliding, and a magnetic sheet (14) with magnetic poles that repel each other is installed on the inner wall of the groove (13) at one end opposite to the bar block (10).
4. A semiconductor packaging quality visual inspection device according to claim 2, characterized in that: The component driving the tooth plate (22) to slide comprises a sliding arm (19) slidably connected to the rotating disk (6), and a docking structure, the side end of the sliding arm (19) is fixedly provided with a protrusion (21), and the tooth plate (22) is internally formed with a sliding groove (23) for matching the sliding of the protrusion (21), and the sliding groove (23) is composed of a transverse groove and an oblique groove.
5. A semiconductor packaging quality visual inspection device according to claim 4, characterized in that: The docking structure comprises a round block (18) fixedly mounted on the bottom of the sliding frame (16), and an open groove (20) is formed in the sliding arm (19) for the matching round block (18) to be slidably embedded.
6. A semiconductor packaging quality visual inspection device according to claim 1, characterized in that: The electric control component comprises a motor (32) mounted on a frame rod (30), a support arm (33) is mounted on the inner wall of the side tube (7), and an output end of the motor (32) is fixed to the support arm (33).
7. A semiconductor packaging quality visual inspection device according to claim 2, characterized in that: The limiting structure comprises a guide rod (24) fixed to the inner end of the tooth plate (22), and a guide groove (31) cooperating with the guide rod (24) for sliding is formed on the side wall of the frame rod (30), and the guide groove (31) is composed of an annular groove and a branch groove.
8. The semiconductor packaging quality visual inspection device according to claim 1, characterized in that: The compression structure comprises a rotary arm (26) rotatably connected to the outside of a stopper (27) and coaxially fixed to the lampshade (25); a crossbar (28) is fixedly provided on the inner side of the rotary arm (26); a side extension frame (29) for acting on the crossbar (28) is fixedly provided on the side end of the side tube (7); and a stopper (27) for limiting the rotation range of the rotary arm (26) is fixedly provided on the outer end of the rotary plate (11).
9. The semiconductor packaging quality visual inspection device according to claim 1, characterized in that: The rotating plate (11) is fixedly provided with a shielding plate (1101) that cooperates with the inner cavity of the lampshade (25) to seal the inner cavity, and the outer end of the lampshade (25) is installed with a blowing mechanism (34) for cleaning the surface of the lampshade (25).
Citation Information
Patent Citations
Visual inspection equipment for semiconductor module packaging
CN118299292A
Semiconductor inspection apparatus and semiconductor manufacturing apparatus
US20240071795A1