Developing mechanism

Abstract

The invention provides a developing mechanism which is used for developing a target substrate and comprises a transmission mechanism and a spraying structure which are arranged at an interval, the transmission mechanism is located on the side face of the spraying structure, the transmission mechanism is used for conveying the target substrate to a spraying area of the spraying mechanism, the developing face of the target substrate faces downwards, and the spraying area of the spraying mechanism faces downwards. The spraying mechanism comprises a plurality of spraying pipes and a plurality of nozzles, the spraying pipes are arranged in an array mode, each spraying pipe is connected with the nozzles arranged in the array mode, openings of the nozzles face upwards so that spraying liquid can be sprayed in the direction of the developing face, and the spraying pipes and the nozzles are located below a target substrate; therefore, the developing effect of the target substrate is uniform.

Description

Technical Field

[0001] The present application relates to the technical field of development, and in particular to a development mechanism. Background Art

[0002] At present, the yellow light process route for inductor production is printing, exposure and development. Printing refers to forming a uniform layer of photosensitive slurry on the substrate, and exposure refers to overlay exposure through a high-precision mask. Currently, both printing and exposure can achieve high-precision processes, but the development process is difficult because the spray mechanism of the current development mechanism is arranged above the conveying structure, and the direction of the liquid sprayed by the spray mechanism is vertically downward, resulting in the target substrate During the development process, the water mist condenses into water droplets and directly drips on the development surface of the target substrate, thereby causing a local over-development problem, that is, uneven development, resulting in the production of defective development products. Summary of the invention

[0003] In view of this, the present application provides a developing mechanism to improve developing uniformity.

[0004] The present application provides a developing mechanism for developing a target substrate, comprising a transmission mechanism and a spray structure arranged at intervals, wherein the transmission structure is located on the side of the spray structure, and the transmission mechanism is used to transfer the target substrate with the developing surface facing downward to the spray area of ​​the spray mechanism, wherein the spray mechanism comprises a plurality of spray pipes and a plurality of nozzles, wherein the plurality of spray pipes are arranged in an array, and each of the spray pipes is connected to a plurality of nozzles arranged in an array, and the openings of the nozzles are opened upward so that the spray liquid is sprayed in the direction of the developing surface, and the spray pipes and the nozzles are located below the target substrate.

[0005] In one embodiment, the shape of the liquid sprayed out by the nozzle is a fan shape.

[0006] In one embodiment, the angle at which the nozzle sprays the liquid is 60-70°.

[0007] In one embodiment, the conveying direction of the target substrate is the same as the extending direction of the spray pipe. When the developing mechanism is operating, the plurality of spray pipes rotate 13-16° left and right along the conveying direction to drive the plurality of nozzles to rotate 13-16° left and right along the conveying direction.

[0008] In one embodiment, the transmission mechanism includes a first transmission member and a second transmission member spaced apart on both sides of the spray mechanism, and the first transmission member and the second transmission member are used to clamp opposite sides of the target substrate respectively to transfer the target substrate to the spray area.

[0009] In one embodiment, the first transmission member and the second transmission member both include a support plate, a first transmission assembly and a second transmission assembly, the first transmission assembly and the second transmission assembly are both rotatably connected to the support plate and are located on the upper and lower sides of the support plate, and the first transmission assembly and the second transmission assembly are used to clamp the upper and lower sides of the target substrate to transfer the target substrate to the spray area.

[0010] In one embodiment, a guide bar protruding toward the target substrate is provided on one side of the support plate close to the target substrate, and the guide bar is located between the first transmission assembly and the second transmission assembly, and the guide bar is used to control the transmission direction of the target substrate.

[0011] In one embodiment, the first transmission assembly and the second transmission assembly both include an active member and a driven member connected to the active member, the driven member is rotatably connected to the support plate and extends to a side of the support plate close to the target substrate, and the active member is connected to a side of the driven member away from the target substrate.

[0012] In one embodiment, the orthographic projection of the nozzle is located within the orthographic projection of the target substrate, and the orthographic projection area of ​​the nozzle is 15% of the orthographic projection area of ​​the target substrate.

[0013] In one embodiment, the distance between every two adjacent spray pipes is 98-103 mm, and the distance between the nozzle and the target substrate is 85-95 mm.

[0014] The present application provides a developing mechanism for developing a target substrate, comprising a transmission mechanism and a spray structure arranged at intervals, wherein the transmission structure is located on the side of the spray structure, and the transmission mechanism is used to transfer the target substrate with the developing surface facing downward to the spray area of ​​the spray mechanism, wherein the spray mechanism comprises a plurality of spray pipes and a plurality of nozzles, wherein the plurality of spray pipes are arranged in an array, and each spray pipe is connected to a plurality of nozzles arranged in an array, and the opening of the nozzle is opened upward so that the spray liquid is sprayed in the direction of the developing surface, and the spray pipe and the nozzle are located below the target substrate so that the developing effect of the target substrate is uniform. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without creative work.

[0016] Figure 1 It is a three-dimensional structural schematic diagram of the development structure provided by the present application;

[0017] Figure 2 It is a schematic diagram of the planar structure of the development structure provided by the present application;

[0018] Figure 3 It is a three-dimensional structural schematic diagram of the spray mechanism of the developing structure provided by the present application;

[0019] Figure 4 It is a schematic diagram of the three-dimensional structure of the first transmission member of the developing structure provided in the present application.

[0020] Reference numerals:

[0021] 10. Developing mechanism; 20. Target substrate; 100. Transmission mechanism; 110. First transmission member; 111. Support plate; 112. First transmission assembly; 113. Second transmission assembly; 114. Carrier plate; 115. Partition plate; 116. Guide bar; 117. Conveying wheel; 120. Second transmission member; 200. Spraying mechanism; 210. Spraying pipe; 220. Nozzle; 300. Fixing mechanism. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the present application are clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application. In the absence of conflict, the following embodiments and their technical features can be combined with each other.

[0023] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "multiple" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined. In the description of the present application, the meaning of "several" is at least one, such as one, two, etc., unless otherwise clearly and specifically defined.

[0024] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by a person skilled in the art to which this application belongs. The terms used herein are for the purpose of describing specific embodiments only and are not intended to limit this application. The term "and / or" used herein includes any and all combinations of one or more related listed items. The terms "connection", "electrical connection", and "electrical connection" used herein include any direct and indirect electrical or structural connection means. Therefore, if the text describes a first device coupled / connected / electrically connected to a second device, it means that the first device can be directly electrically / structurally connected to the second device, or indirectly electrically / structurally connected to the second device through other devices or connection means.

[0025] The present application provides a developing mechanism for developing a target substrate, comprising a transmission mechanism and a spray structure arranged at intervals, wherein the transmission structure is located on the side of the spray structure, and the transmission mechanism is used to transfer the target substrate with the developing surface facing downward to the spray area of ​​the spray mechanism, wherein the spray mechanism comprises a plurality of spray pipes and a plurality of nozzles, wherein the plurality of spray pipes are arranged in an array, and each spray pipe is connected to a plurality of nozzles arranged in an array, and the openings of the nozzles are opened upward so that the spray liquid is sprayed in the direction of the developing surface, and the spray pipes and the nozzles are located below the target substrate.

[0026] In the present application, a transmission mechanism is arranged on the side of the spray mechanism, and the spray mechanism is composed of a plurality of spray pipes arranged in an array and a plurality of nozzles arranged in an array, and the opening of the nozzle is arranged upward, so that when the transmission mechanism transfers the target substrate with the developing surface facing downward to the spray area for development operation, the liquid sprayed upward by the nozzle directly falls into the circulation groove due to gravity after reacting on the surface of the target substrate, and will not gather in a certain area of ​​the target substrate, that is, the risk of a pool effect on the target substrate during the development process is reduced, thereby making the development effect uniform, thereby improving the reliability of the product.

[0027] See also Figure 1-Figure 4 , Figure 1 It is a three-dimensional structural schematic diagram of the development structure provided by the present application; Figure 2 It is a schematic diagram of the planar structure of the development structure provided by the present application; Figure 3 It is a three-dimensional structural schematic diagram of the spray mechanism of the developing structure provided by the present application; Figure 4: is a three-dimensional structural schematic diagram of the first transmission member of the developing structure provided by the present application. The present application provides a developing mechanism 10 for developing a target substrate 20, comprising a transmission mechanism 100 and a spray mechanism 200 arranged at intervals, wherein the transmission structure is located on the side of the spray mechanism 200, and the transmission mechanism 100 is used to transfer the target substrate 20 with the developing surface facing downward to the spray area of ​​the spray mechanism 200, wherein the spray mechanism 200 comprises a plurality of spray pipes 210 and a plurality of nozzles 220, wherein the plurality of spray pipes 210 are arranged in an array, and each spray pipe 210 is connected to a plurality of nozzles 220 arranged in an array, and the opening of the nozzle 220 is opened upward so that a liquid such as a spray liquid is sprayed in the direction of the developing surface, and the spray pipe 210 and the nozzle 220 are located below the target substrate 20. Specifically, the developing mechanism 10 includes a fixing mechanism 300, a transmission mechanism 100 and a spraying mechanism 200. The transmission mechanism 100 is fixedly connected to the fixing mechanism 300. The transmission mechanism 100 is used to transfer the target substrate 20 with the developing surface facing downward to the spraying area of ​​the spraying mechanism 200, that is, the developing surface is arranged in the direction of gravity; the spraying mechanism 200 includes a plurality of spray pipes 210 and a plurality of nozzles 220. The plurality of spray pipes 210 are parallel to each other and spaced apart. Each spray pipe 210 is connected to an external solvent storage box. The spray pipe 210 is connected to the fixing mechanism 300 and is located on the side of the transmission mechanism 100, that is, the spray pipe 210 and the transmission mechanism 100 do not overlap, and each spray pipe 210 is connected to a plurality of nozzles 220 arranged at intervals, and the plurality of spray pipes 210 are arranged along the extension direction of the spray pipe 210, and the opening of each nozzle 220 is opened upward so that the spray liquid or other liquid is sprayed toward the direction of the developing surface to form a spray area, and the spray pipe 210 and the nozzle 220 are located below the target substrate 20.

[0028] In the present application, a transmission mechanism 100 is arranged on the side of the spray mechanism 200, and the spray mechanism 200 is composed of a plurality of spray pipes 210 arranged in an array and a plurality of nozzles 220 arranged in an array, and the opening of the nozzle 220 is arranged upward, so that when the transmission mechanism 100 transfers the target substrate 20 with the developing surface facing downward to the spray area for the developing operation, the liquid sprayed upward by the nozzle 220 directly falls into the circulation tank due to gravity after reacting on the surface of the target substrate 20, and will not gather in a certain area of ​​the target substrate 20, that is, the risk of a pool effect on the target substrate 20 during the developing process is reduced, thereby making the developing effect uniform, thereby improving the reliability of the product.

[0029] In one embodiment, the conveying direction of the target substrate 20 is the same as the extending direction of the spray pipe 210. When the developing mechanism 10 is in operation, the multiple spray pipes 210 rotate left and right by 13-16° along the conveying direction to drive the multiple nozzles 220 to rotate left and right by 13-16° along the conveying direction. Specifically, the angle of rotation of the multiple spray pipes 210 left and right along the conveying direction can be 13°, 14°, 15° or 16°, etc. When the developing mechanism 10 is in operation, the multiple spray pipes 210 rotate toward one side at the same time, and then rotate toward the other side at the same time, that is, during the development process, the multiple spray pipes 210 rotate back and forth to drive the multiple nozzles 220 to rotate back and forth, so that the development surface of the target substrate 20 is more evenly developed.

[0030] In one embodiment, the transmission mechanism 100 includes a first transmission member 110 and a second transmission member 120 which are arranged at intervals on both sides of the spray mechanism 200. The first transmission member 110 and the second transmission member 120 are used to clamp the opposite sides of the target substrate 20 respectively, so as to transfer the target substrate 20 to the spray area. Specifically, the orthographic projections of the first transmission member 110 and the second transmission member 120 do not overlap with the orthographic projections of the spray pipe 210 and the nozzle 220. The first transmission member 110 and the second transmission member 120 are respectively located on both sides of the spray pipe 210 and the nozzle 220. The first transmission member 110 and the second transmission member 120 on both sides of the spray pipe 210 clamp the opposite sides of the target substrate 20 respectively, so as to transfer the target substrate 20 to the spray area. The present application sets a first transmission member 110 and a second transmission member 120 on both sides of the spray pipe 210 and the nozzle 220, so that the first transmission member 110 and the second transmission member 120 can respectively clamp the opposite sides of the target substrate 20 to ensure that the target substrate 20 with the developing surface facing downward is transported to the spray area along a set direction, avoiding the risk of the target substrate 20 being offset or tilted during the transportation process, and further preventing the developer from forming an uneven development effect on the surface of the target substrate 20, thereby ensuring the accuracy, clarity and uniformity of the developed image, thereby improving the reliability of the product.

[0031] In one embodiment, the first transmission member 110 and the second transmission member 120 both include a support plate 111, a first transmission assembly 112 and a second transmission assembly 113. The first transmission assembly 112 and the second transmission assembly 113 are both rotatably connected to the support plate 111 and are located on the upper and lower sides of the support plate 111. The first transmission assembly 112 and the second transmission assembly 113 are used to clamp the upper and lower sides of the target substrate 20 to transfer the target substrate 20 to the spray area. Specifically, the first transmission member 110 and the second transmission member 120 each include a support plate 111, a first transmission assembly 112, a second transmission assembly 113, a carrier plate 114 and a partition plate 115. The support plate 111 is spaced apart from the partition plate 115 and connected to the upper surface of the carrier plate 114. The support plate 111 is disposed on a side of the partition plate 115 close to the spray pipe 210. Ends of the support plate 111, the partition plate 115 and the carrier plate 114 are all connected to the fixing mechanism 300. The support plate 111 is provided with a plurality of first through holes and second through holes arranged along the conveying direction, the first through hole being located above the second through hole. The partition plate 115 is provided with a third through hole corresponding to the first through hole and a fourth through hole corresponding to the second through hole. The end of the first transmission assembly 112 sequentially passes through the third through hole and the first through hole until it is exposed on a side of the support plate 111 close to the target substrate 20. The second transmission assembly 11 The end of 3 passes through the fourth through hole and the second through hole in sequence until it is exposed on the side of the support plate 111 close to the target substrate 20, that is, the first transmission component 112 and the second transmission component 113 are both rotatably connected to the support plate 111 and are located on the upper and lower sides of the support plate 111, the first transmission component 112 and the second transmission component 113 of the first transmission member 110 are used to clamp the upper and lower sides of one side of the target substrate 20, and the first transmission component 112 and the second transmission component 113 of the second transmission member 120 are used to clamp the upper and lower sides of the other side of the target substrate 20, so as to further ensure that the target substrate 20 is stably transferred to the spraying area along the set direction, avoid the risk of deviation or tilt of the target substrate 20 during the transfer process, and further prevent the developer from forming an uneven development effect on the surface of the target substrate 20, thereby ensuring the accuracy, clarity and uniformity of the developed image, thereby improving the reliability of the product.

[0032] In one embodiment, a guide bar 116 protruding toward the target substrate 20 is provided on one side of the support plate 111 close to the target substrate 20, and the guide bar 116 is located between the first transmission assembly 112 and the second transmission assembly 113, and the guide bar 116 is used to control the conveying direction of the target substrate 20. Specifically, a guide bar 116 protruding away from the partition 115 is provided on one side of the support plate 111 away from the partition 115, and the extension direction of the guide bar 116 is the same as the extension direction of the spray pipe 210, that is, the extension direction of the guide bar 116 is the same as the conveying direction, and the gap between the first transmission assembly 112 and the second transmission assembly 113 is provided corresponding to the guide bar 116. A guide bar 116 is provided in the gap between the first transmission assembly 112 and the second transmission assembly 113 to further ensure that the target substrate 20 moves stably along the set direction, thereby avoiding the risk of the target substrate 20 being offset or tilted during the transmission process, thereby preventing the developer from forming an uneven development effect on the surface of the target substrate 20, thereby ensuring the accuracy, clarity and uniformity of the developed image, and at the same time, improving production efficiency and reducing the need for the development mechanism 10 to stop and adjust due to the offset of the target substrate 20.

[0033] In one embodiment, the distance between the guide bar 116 and the edge of the target substrate 20 is 0-2 mm. Specifically, the distance between the guide bar 116 and the edge of the target substrate 20 can be 0 mm, 0.5 mm, 1 mm, 1.7 mm or 2 mm, etc., to further ensure that the target substrate 20 moves stably along the set direction, avoid the risk of the target substrate 20 being offset or tilted during the transmission process, and then prevent the developer from forming an uneven development effect on the surface of the target substrate 20, thereby ensuring the accuracy, clarity and uniformity of the developed image, and at the same time, improving production efficiency and reducing the need for the development mechanism 10 to stop and adjust due to the offset of the target substrate 20.

[0034] In one embodiment, the first transmission assembly 112 and the second transmission assembly 113 each include an active member and a driven member connected to the active member, the driven member is rotatably connected to the support plate 111 and extends to the side of the support plate 111 close to the target substrate 20, and the active member is connected to the side of the driven member away from the target substrate 20. Specifically, there are multiple active members and multiple active members, the end of the driven member of the first transmission assembly 112 sequentially passes through the third through hole and the first through hole until it is exposed on the side of the support plate 111 close to the target substrate 20, and the end of the driven member of the second transmission assembly 113 sequentially passes through the fourth through hole and the second through hole until it is exposed on the side of the support plate 111 close to the target substrate 20, that is, the driven members of the first transmission assembly 112 and the second transmission assembly 113 are both rotatably connected to the support plate 111 and are located on the upper and lower sides of the support plate 111, and the first transmission assembly 112 of the first transmission member 110 is connected to the third through hole and the first through hole. The driven member in the second transmission component 113 is used to clamp the upper and lower sides of one side of the target substrate 20, and the first transmission component 112 of the second transmission component 120 and the driven member in the second transmission component 113 are used to clamp the upper and lower sides of the other side of the target substrate 20; the active member is located on the side of the partition 115 away from the support plate 111, and the active member is connected to the side of the driven member away from the support plate 111, and the active member is connected to the motor to provide power and control the transmission speed of the target substrate 20. The rotation of the active member will drive the rotation of the driven member, and the rotation of the driven member will drive the target substrate 20 to move.

[0035] In the present application, the first transmission assembly 112 and the second transmission assembly 113 are both composed of active parts and driven parts to ensure continuous and uninterrupted power transmission, and to ensure the continuity and efficiency of the development process. At the same time, the driven part can buffer the power impact of the active part to reduce the wear and fatigue of the conveying system, improve the life of the equipment, and ensure that the target substrate 20 with the developing surface facing downward is conveyed to the spray area along the set direction to avoid the risk of deviation or tilt of the target substrate 20 during the conveying process, thereby preventing the developer from forming an uneven development effect on the surface of the target substrate 20, thereby ensuring the accuracy, clarity and uniformity of the developed image, thereby improving the reliability of the product.

[0036] In one embodiment, the follower includes a driven shaft, a first gear and a transmission wheel 117; the end of one driven shaft passes through the third through hole and the first through hole in sequence until it is exposed on the side of the support plate 111 close to the target substrate 20, and the end of the other driven shaft passes through the fourth through hole and the second through hole in sequence until it is exposed on the side of the support plate 111 close to the target substrate 20, and the axial direction of the driven shaft is perpendicular to the transmission direction of the target substrate 20; a guide bar 116 protruding toward the target substrate 20 is provided between every two rows of driven shafts arranged along the extension direction of the spray pipe 210; the first gear and the transmission wheel 117 are fixedly connected to the driven shaft, and the transmission wheel 117 is fixedly connected to the end of the driven shaft away from the partition 115, and every two rows of transmission wheels 117 are used to clamp the upper and lower sides of the target substrate 20 to transmit the target to the spraying area, and the first gear is located between the partition 115 and the support plate 111 and on the side of the partition 115 away from the support plate 111, and the first gear is a bevel gear. In the present application, the driven member is composed of a driven shaft, a first gear and a transmission wheel 117, so as to maintain the stability of power transmission during long-term operation, reduce energy loss, and ensure that the target substrate 20 maintains a uniform speed during the transmission process.

[0037] In one embodiment, the diameter of the transmission wheel 117 is 4-8 mm. The diameter of the transmission wheel 117 can be 4 mm, 5.1 mm, 6 mm, 7 mm or 8 mm, etc., to ensure the transmission efficiency and transmission stability of the transmission mechanism 100 and optimize the spatial layout.

[0038] In one embodiment, the active member includes an active shaft and a second gear, and there are multiple active shafts and multiple second gears. Each active shaft is fixedly connected to multiple second gears. The axial direction of the active shaft is perpendicular to the axial direction of the driven shaft and is the same as the conveying direction of the target substrate 20. The second gear is a bevel gear. The active member is composed of the active shaft and the second gear, so that during the development process, the active member transmits a force to the driven member steadily and with high precision, thereby ensuring that the target substrate 20 maintains a uniform speed during the conveying process.

[0039] In one embodiment, the shape of the liquid sprayed by the nozzle 220 is a fan shape, that is, when the developing mechanism 10 is in the developing operation, the shape of the liquid sprayed by the nozzle 220 is a fan shape, so that there is an overlapping area of ​​the liquid sprayed by the nozzle 220, thereby avoiding the appearance of non-overlapping areas in the spraying area of ​​the nozzle 220, thereby further avoiding the uneven coverage of liquids such as the developer in the spraying area, thereby further improving the uniformity of development.

[0040] In one embodiment, the angle at which the nozzle 220 sprays the liquid is 60-70°, that is, the angle corresponding to the fan shape is 60-70°. Specifically, the angle at which the nozzle 220 sprays the liquid can be 60°, 62°, 65°, 68° or 70°, so that there is an overlapping area when the nozzle 220 sprays the liquid, thereby avoiding the occurrence of non-overlapping areas in the spraying area of ​​the nozzle 220, thereby further avoiding the situation where the developer or other liquids in the spraying area are unevenly covered, thereby further improving the uniformity of the development.

[0041] In one embodiment, the orthographic projection of the nozzle 220 is located within the orthographic projection of the target substrate 20, and the orthographic projection area of ​​the nozzle 220 is 15% of the orthographic projection area of ​​the target substrate 20, so that there are more overlapping areas when the liquid is sprayed from the nozzle 220, thereby avoiding non-overlapping areas in the spraying area of ​​the nozzle 220, thereby further avoiding uneven coverage of liquids such as developer in the spraying area, thereby further improving the uniformity of development.

[0042] In one embodiment, the distance between every two adjacent spray pipes 210 is 98-103 mm, and the distance between the nozzle 220 and the target substrate 20 is 85-95 mm. Specifically, the distance between every two adjacent spray pipes 210 can be 98 mm, 99 mm, 100 mm or 103 mm, and the distance between the nozzle 220 and the target substrate 20 can be 85 mm, 86 mm, 89 mm, 90 mm, 93 mm or 95 mm, so as to further avoid the uneven coverage of liquid such as developer in the spraying area, thereby further improving the uniformity of development.

[0043] The above are merely embodiments of the present application and are not intended to limit the patent scope of the present application. Any equivalent structural or equivalent process transformations made using the contents of the specification and drawings of the present application, such as the mutual combination of technical features between the embodiments, or direct or indirect application in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. A developing mechanism, characterized in that: Used to develop a target substrate, including a transmission mechanism and a spray structure arranged at intervals, the transmission structure is located on the side of the spray structure, the transmission mechanism is used to transfer the target substrate with the development surface facing downward to the spray area of ​​the spray mechanism, wherein the spray mechanism includes a plurality of spray pipes and a plurality of nozzles, the plurality of spray pipes are arranged in an array, each of the spray pipes is connected to a plurality of nozzles arranged in an array, the openings of the nozzles are opened upward so that the spray liquid is sprayed in the direction of the development surface, and the spray pipes and the nozzles are located below the target substrate.

2. The developing mechanism according to claim 1, characterized in that: The shape of the liquid sprayed from the nozzle is a fan shape.

3. The developing mechanism according to claim 2, characterized in that: The angle at which the nozzle sprays the liquid is 60-70°.

4. The developing mechanism according to claim 1, characterized in that: The conveying direction of the target substrate is the same as the extending direction of the spray pipe. When the developing mechanism is in operation, the plurality of spray pipes rotate 13-16° left and right along the conveying direction to drive the plurality of nozzles to rotate 13-16° left and right along the conveying direction.

5. The developing mechanism according to claim 1, characterized in that: The transmission mechanism includes a first transmission member and a second transmission member spaced apart at two sides of the spray mechanism, and the first transmission member and the second transmission member are used to clamp two opposite sides of the target substrate respectively to transfer the target substrate to the spray area.

6. The developing mechanism according to claim 5, characterized in that: The first transmission member and the second transmission member both include a support plate, a first transmission assembly and a second transmission assembly. The first transmission assembly and the second transmission assembly are both rotatably connected to the support plate and are located on the upper and lower sides of the support plate. The first transmission assembly and the second transmission assembly are used to clamp the upper and lower sides of the target substrate to transfer the target substrate to the spray area.

7. The developing mechanism according to claim 6, characterized in that: A guide bar protruding toward the target substrate is disposed on one side of the support plate close to the target substrate, and the guide bar is located between the first transmission assembly and the second transmission assembly, and is used to control the transmission direction of the target substrate.

8. The developing mechanism according to claim 7, characterized in that: The first transmission assembly and the second transmission assembly both include an active member and a driven member connected to the active member, the driven member is rotatably connected to the support plate and extends to a side of the support plate close to the target substrate, and the active member is connected to a side of the driven member away from the target substrate.

9. The developing mechanism according to claim 1, characterized in that: The orthographic projection of the nozzle is located within the orthographic projection of the target substrate, and the orthographic projection area of ​​the nozzle is 15% of the orthographic projection area of ​​the target substrate.

10. The developing mechanism according to claim 1, characterized in that: The distance between every two adjacent spray pipes is 98-103 mm, and the distance between the nozzle and the target substrate is 85-95 mm.

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