Semiconductor liquid supply equipment capable of detecting PH in real time

Abstract

Semiconductor liquid supply equipment capable of detecting PH in real time comprises a box body, a pesticide barrel, a pump body, a liquid supply detection device and a signal processing device, the pesticide barrel is located in the box body, and pesticide liquid is input into the pesticide barrel; the pump body is arranged in the box body and connected with the liquid supply detection device so as to extract the liquid medicine through the liquid supply detection device. After the pump body works, liquid medicine in the medicine cylinder is extracted through the liquid supply detection device and the three-way connector and conveyed to semiconductor equipment for follow-up process treatment. The liquid supply detection device is provided with a sensor, a probe of the sensor is immersed in liquid medicine of the medicine cylinder, the ph value of the liquid medicine can be detected in real time while the liquid medicine is extracted through the body, the sensor transmits collected ph value information to the signal processing device, the signal processing device receives and analyzes the ph value information, and the signal processing device sends the analyzed ph value information to the liquid supply detection device. When the ph value information changes and the change value exceeds a preset range, the liquid medicine in the medicine barrel is invalid, and an alarm device on the signal processing device gives an alarm, so that an operator is reminded to replace the invalid liquid medicine.

Description

Technical Field

[0001] The present invention relates to the field of liquid supply equipment, and in particular to a semiconductor liquid supply equipment for real-time pH detection. Background Art

[0002] A lot of acidic or alkaline liquids are needed in the semiconductor processing process. Usually, the liquid in the barrel is added to the semiconductor equipment through a pump. As time goes by, the liquid in the barrel will come into contact with the air, causing the pH value of the liquid to change significantly. When the pH value of the liquid changes beyond the allowable range, the liquid becomes ineffective and cannot be used. The operator cannot know whether the current pH value of the liquid has changed. If the liquid in the barrel has already expired, the pump will still transport the ineffective liquid to the semiconductor equipment, thus affecting the processing quality of the semiconductor equipment. Summary of the invention

[0003] The object of the present invention is to provide a semiconductor liquid supply device for real-time detection of pH, which can detect the pH of the liquid in real time while extracting the liquid, so as to know the change of the pH value of the liquid in real time and replace the invalid liquid in time.

[0004] The embodiment of the present invention is achieved as follows: The semiconductor liquid supply device for real-time detection of pH in the embodiment of the present application comprises: a box body, a cartridge, a pump body, a liquid supply detection device and a signal processing device, wherein the cartridge is located in the box body and has liquid medicine input therein; the pump body is arranged in the box body and connected to the liquid supply detection device to extract the liquid medicine through the liquid supply detection device; the liquid supply detection device comprises: a first tube body component, a second tube body component, a three-way joint, a sensor and a cable, wherein the first tube body component is connected to the second tube body component, the bottom end of the first tube body component extends into the cartridge, and the second tube body component is connected to the pump body through the three-way joint; The first tube assembly comprises: an inner tube and an outer tube, the inner tube is located inside the outer tube, the bottoms of the inner tube and the outer tube are both located inside the cartridge, and a first set gap is provided between the outer circumferential side surface of the inner tube and the inner circumferential side surface of the outer tube, the sensor is arranged inside the inner tube, the bottom of the sensor extends into the drug solution of the cartridge to detect the pH value of the drug solution, and the top of the sensor is electrically connected to the signal processing device through the cable; The second tube body assembly includes: a first connecting tube, a first connecting joint and a second connecting joint; the first connecting tube and the outer tube are arranged in the up-down direction respectively, and the bottom end of the first connecting tube is connected to the top end of the outer tube through the first connecting joint; the cable is also located inside the first connecting tube, and there is a second set gap between the cable and the inner side wall of the first connecting tube; a first connecting hole is provided on the side wall of the first connecting joint to connect the first set gap and the second set gap; the second connecting joint is connected to the side wall of the top of the first connecting tube, and the second connecting joint is connected to the three-way joint; After the pump body is started, the medicine liquid inside the cartridge flows toward the pump body along the first set gap, the second set gap and the three-way joint in sequence; when the signal processing device receives and processes the pH value information and controls its alarm device to alarm when the pH value change of the medicine liquid exceeds a preset value.

[0005] In a possible embodiment, the first tube body assembly also includes a first fixed plug, a first sealing ring and a second sealing ring; the first fixed plug is arranged at the bottom end of the inner tube, and the sensor is located inside the first fixed plug; the first sealing ring is sleeved on the first fixed plug to be sealed and connected to the inner circumferential side of the inner tube through the second sealing ring; the second sealing ring is sleeved on the sensor body of the sensor to be sealed and connected to the inner circumferential side of the first fixed plug through the second sealing ring; the probe of the sensor is located below the second sealing ring for contacting with the medicine inside the cartridge.

[0006] In a possible embodiment, the outer cylinder includes a first cylinder body and a second cylinder body, and the first cylinder body and the second cylinder body are respectively arranged opposite to each other and connected in the up and down directions; the first fixed plug includes a first plug body and a first convex ring portion, and the first convex ring portion is arranged in the middle of the outer circumferential side surface of the first plug body, and there is a gap between the outer circumferential side surface of the first convex ring portion and the inner circumferential side surface of the first cylinder body; the top end of the second cylinder body also extends into the interior of the first cylinder body and abuts against the bottom of the first convex ring portion, and there is a gap between the outer circumferential side surface of the top end of the second cylinder body and the inner circumferential side surface of the first cylinder body.

[0007] In a possible implementation manner, the second cylinder is provided with upper and lower openings, the probe extends into the interior of the second cylinder, the second cylinder is immersed in the liquid medicine, and a second connecting hole is provided on the side wall of the top end of the second cylinder.

[0008] In a possible embodiment, a first step is provided at the bottom of the first cylinder, and the inner diameter of the first step gradually decreases in a bottom-up direction; a second step is provided at the top of the second cylinder, and the inner diameter of the second step gradually increases in a bottom-up direction, and the bottom of the first cylinder and the top of the second cylinder are connected and cooperated with each other through the first step and the second step respectively; an abutment portion is also provided at the top of the second step of the second cylinder, and the abutment portion extends into the interior of the first cylinder and abuts against the bottom of the first convex ring portion; the side wall of the abutment portion is provided with the second connecting hole, and the gap is left between the outer circumferential side surface of the abutment portion and the inner circumferential side surface of the first cylinder.

[0009] In a possible implementation manner, the first tube assembly further includes a protective cover, and the protective cover is connected to the bottom of the second cylinder to seal and protect the probe located inside the second cylinder.

[0010] In a possible embodiment, a first threaded portion is provided on the outer circumferential side surface of the top end of the protective cover, a second threaded portion is provided on the inner circumferential side surface of the second cylinder, the top end of the protective cover extends into the interior of the second cylinder and the two are threadedly connected; a second shoulder portion is provided on the outer circumferential side surface of the middle portion of the protective cover, the second shoulder portion is arranged opposite to the bottom of the second cylinder, and the bottom of the second cylinder abuts against the second shoulder portion.

[0011] In a possible embodiment, the first tube body assembly also includes a third sealing ring, which is sleeved on the outer circumferential side of the bottom of the first plug body, the bottom of the first plug body and the probe extend into the protective cover, and the outer circumferential side of the bottom of the first plug body is sealed and connected to the inner circumferential side of the top of the protective cover through the third sealing ring.

[0012] In a possible embodiment, the second tube body assembly also includes a cable protective sleeve, which is sleeved on the outside of the cable, and the bottom of the cable protective sleeve is abutted against the top of the sensor body; the first connecting joint is threadedly connected to the top of the second cylinder; the outer circumferential side surface of the top of the inner cylinder is provided with a first shoulder portion, and the bottom of the first connecting joint is arranged opposite to the first shoulder portion up and down, and when the first connecting joint and the second cylinder are tightened downward, the bottom of the first connecting joint is pressed against the top of the first shoulder portion and a downward pre-tightening force is applied to the inner cylinder through the first shoulder portion, so that the bottom of the inner cylinder is pressed against the top of the first convex ring portion; the outer diameter of the top of the inner cylinder increases from top to bottom, and the bottom of the cable protective sleeve is sleeved on the top of the inner cylinder, and when the first connecting joint and the second cylinder are tightened downward, the inner circumferential side surface of the first connecting joint presses the cable protective sleeve against the top of the inner cylinder in the direction toward the cable.

[0013] In a possible implementation manner, the multiple sets of equipment connections of the semiconductor liquid supply equipment have a sealing and fixing structure; the multiple sets of equipment connections at least include a connection between the outer cylinder and the first connecting pipe, a connection between the three-way joint and the first connecting pipe, a connection between the three-way joint and the pump body, and a connection between the inner cylinder and the cable protective sleeve; Each set of connections is provided with a first fixed connection joint and a first connection nut; the first fixed connection joint is sleeved on the corresponding connection portion, the first connection nut is sleeved on the first fixed connection joint or respectively sleeved on the outer circumferential side of the first fixed connection joint and the cable protective cover, and the first fixed connection joint is threadedly connected to the first connection nut; the outer diameter of the top end of the first fixed connection joint gradually decreases from bottom to top, and the cable protective cover is sleeved on the top end of the first fixed connection joint; when the first connection nut and the first fixed connection joint are tightened downward, the cable protective cover is pressed against the top end of the first fixed connection joint.

[0014] In a possible embodiment, the first fixed connection joint includes a first fixed connection joint body and a second convex ring portion; the second convex ring portion is arranged on the outer circumferential side of the first fixed connection joint body, the bottom end of the first fixed connection joint extends into the top end of the first connection joint, and the bottom of the second convex ring portion is fixedly connected to the top end of the first connection joint; when the first connecting nut and the first fixed connection joint are tightened downward, the first connection joint and the second cylinder are tightened downward synchronously.

[0015] In a possible implementation manner, the method for determining the first set gap is as follows: determine the head of the pump body according to the power and efficiency of the pump body, the flow rate and density of the medicinal liquid, and the gravitational acceleration; select the flow rate of the medicinal liquid according to the head of the pump body, and determine a first influence relationship between the flow rate of the medicinal liquid and the cross-sectional area of ​​the pipeline composed of the inner cylinder and the outer cylinder, determine the outer diameter of the inner cylinder according to the first influence relationship, the second influence relationship between the cross-sectional area of ​​the pipeline and the outer diameter of the inner cylinder and the inner diameter of the outer cylinder respectively, and the preset inner diameter of the outer cylinder, and determine the first set gap according to the outer diameter of the inner cylinder.

[0016] In a possible implementation, the first connecting pipe is connected to the first connector of the three-way connector, the cable extends through the second connector of the three-way connector to be electrically connected to the signal processing device, and the pump body is connected to the third connector of the three-way connector through the second connecting pipe.

[0017] The beneficial effect of the embodiment of the present invention is that the external liquid medicine is injected into the cartridge through the pipeline to supplement the liquid medicine inside the cartridge. After the pump body works, the liquid medicine inside the cartridge is extracted through the liquid supply detection device and the three-way joint in turn, and transported to the semiconductor equipment for subsequent process processing. At the same time, a sensor is arranged on the liquid supply detection device, and the probe of the sensor is immersed in the liquid medicine in the cartridge. While the liquid medicine is extracted through the body, the real-time detection of the pH value of the liquid medicine can be realized. The sensor transmits the collected pH value information to the signal processing device, and the signal processing device receives and analyzes the pH value information. When the pH value information changes and the change value exceeds the preset range, it indicates that the liquid medicine inside the cartridge is invalid. The alarm device on the signal processing device sounds an alarm, thereby reminding the operator to replace the invalid liquid medicine, thereby avoiding the invalid liquid medicine from being transported to the semiconductor equipment, and improving the quality of the subsequent processing process.

[0018] In addition, the pump head is determined by the power and efficiency of the pump body, the density of the liquid medicine, and the acceleration of gravity. The liquid medicine flow rate can be selected by the pump head. The cross-sectional area of ​​the first set gap can be further determined by the liquid flow rate. The cross-sectional area of ​​the first set gap can determine the outer diameter of the inner tube. Since the inner diameter of the outer tube can be selected according to demand, the size of the first set gap can be determined. That is, the liquid medicine flow rate selected by the head of different types of pump bodies is adapted, and the liquid medicine flow rate is also adapted to the first set gap. The liquid medicine flow rate has a good influence relationship with the respective parameters of the pump body (the power and head of the pump body) and the first set gap, ensuring that the selected liquid medicine flow rate will not be too slow to cause the problem of low extraction efficiency, and also ensuring that the selected liquid medicine flow rate will not be too fast to cause a significant impact on the internal structure of the liquid supply detection device.

[0019] The overall structure of the liquid supply detection device is assembled before leaving the factory. When installing it in the box, you only need to insert the bottom of the liquid supply detection device into the cartridge and connect the top of the liquid supply detection device to the three-way connector. The overall installation is more convenient and quick. In addition, before the liquid supply detection device is used, the outside air cannot contact the sensor probe. The protective cover at the bottom can reduce the contact between the probe and the air, thereby extending the service life of the probe. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0021] Figure 1 This is an overall structural diagram of a semiconductor liquid supply device for real-time pH detection according to an embodiment of the present invention; Figure 2 A diagram showing the connection relationship between a liquid supply detection device and a pump body of a semiconductor liquid supply device for real-time detection of pH according to an embodiment of the present invention; Figure 3 For the embodiment of the present invention Figure 2 The main view; Figure 4 For the embodiment of the present invention Figure 2 Side view of Figure 5 For the embodiment of the present invention Figure 4 Cross-section of the middle AA; Figure 6 For the embodiment of the present invention Figure 5 The enlarged view of point A in the middle; Figure 7 For the embodiment of the present invention Figure 5 Enlarged view of point B in the middle.

[0022] Reference numerals: 1, box body; 2, pump body; 3, liquid supply detection device; 31. first tube assembly; 311. inner tube; 312. outer tube; 3121. first tube; 3122. second tube; 313. first set gap; 314. first fixed plug; 3141. first convex ring; 3151. first sealing ring; 3152. second sealing ring; 3153. third sealing ring; 316. abutment; 317. second connecting hole; 318. protective cover; 32. second tube assembly; 321. first connecting tube; 322. first connecting joint; 3221. first connecting hole; 323. second connecting joint; 324. second set gap; 325. cable protective cover; 33. Three-way connector; 331. First connector; 332. Second connector; 333. Third connector; 34. Sensor; 341. Probe; 35. Cable; 4. Signal processing device; 5. Sealing and fixing structure; 51. First fixed connection connector; 511. Second convex ring portion; 52. First connecting nut; 6. Second connecting pipe. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0024] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0025] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0026] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the product of the invention is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0027] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0028] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0029] The amount of solution required in the semiconductor industry is very small, and the flow unit is almost always in SCCM (ml / minute), but the quality requirements for the solution are indeed very high. The stability of the pH value of acids and bases is related to the ambient temperature, humidity, and air contact time. The supply of acid and alkali solutions is generally provided by the liquid supplier directly in plastic barrels. There is no pH detection device on the plastic barrel, and in actual use, it is impossible to use up the solution in the barrel at one time. As time goes by, the pH value will change. If it is not possible to detect in time whether the change in pH value exceeds the specified range, it may cause losses to the entire process production line. Therefore, a liquid supply device is designed. When there is no pH detection device in the stock liquid bottle (almost none), the pH change of the stock liquid can be monitored in real time to achieve the function of detecting the pH change of the stock liquid over time.

[0030] like Figures 1 to 7 As shown, a semiconductor liquid supply device for real-time detection of pH in an embodiment of the present application comprises: a box body 1, a cartridge, a pump body 2, a liquid supply detection device 3 and a signal processing device 4, the cartridge is located in the box body 1 and has liquid medicine input therein; the pump body 2 is arranged in the box body 1 and connected to the liquid supply detection device 3 to extract liquid medicine through the liquid supply detection device 3; the liquid supply detection device 3 comprises: a first tube body component 31, a second tube body component 32, a three-way joint 33, a sensor 34 and a cable 35, the first tube body component 31 is connected to the second tube body component 32, the bottom end of the first tube body component 31 extends into the cartridge, and the second tube body component 32 is connected to the pump body 2 through the three-way joint 33; The first tube assembly 31 includes: an inner tube 311 and an outer tube 312, the inner tube 311 is located inside the outer tube 312, the bottoms of the inner tube 311 and the outer tube 312 are both located inside the cartridge, and there is a first set gap 313 between the outer circumferential side of the inner tube 311 and the inner circumferential side of the outer tube 312, the sensor 34 is arranged inside the inner tube 311, the bottom of the sensor 34 extends into the drug solution in the cartridge to detect the pH value of the drug solution, and the top of the sensor 34 is electrically connected to the signal processing device 4 through the cable 35; wherein, the first set gap 313 is indeed The determination method is as follows: the lift of the pump body 2 is determined according to the power and efficiency of the pump body 2, the flow rate and density of the liquid medicine, and the gravitational acceleration; the flow rate of the liquid medicine is selected according to the lift of the pump body 2, and the first influence relationship between the flow rate of the liquid medicine and the cross-sectional area of ​​the pipeline formed by the inner cylinder 311 and the outer cylinder 312 is determined, and the outer diameter of the inner cylinder 311 is determined according to the first influence relationship, the second influence relationship between the cross-sectional area of ​​the pipeline and the outer diameter of the inner cylinder 311 and the inner diameter of the outer cylinder 312, and the preset inner diameter of the outer cylinder 312, and the first set gap 313 is determined according to the outer diameter of the inner cylinder 311; The first set gap 313 is determined in the following manner: the head of the pump body 2 is determined by the power, flow rate, efficiency of the pump body 2 and the density of the liquid medicine, the cross-sectional area of ​​the liquid medicine passing through the first set gap 313 is determined according to the head and flow rate of the pump body 2, the inner diameter of the inner cylinder 311 is determined according to the cross-sectional area and the inner diameter of the outer cylinder 312, and the first set gap 313 is determined according to the inner diameter of the outer cylinder 312 and the outer diameter of the inner cylinder 311; The second tube body assembly 32 includes: a first connecting tube 321, a first connecting joint 322, and a second connecting joint 323; the first connecting tube 321 and the outer tube 312 are arranged in the up-down direction respectively, and the bottom end of the first connecting tube 321 is connected to the top end of the outer tube 312 through the first connecting joint 322; the cable 35 is also located inside the first connecting tube 321, and there is a second set gap 324 between the cable 35 and the inner side wall of the first connecting tube 321; a first connecting hole 3221 is provided on the side wall of the first connecting joint 322 to connect the first set gap 313 and the second set gap 324; the second connecting joint 323 is connected to the side wall of the top of the first connecting tube 321, and the second connecting joint 323 is connected to the three-way joint 33; After the pump body 2 is started, the medicine liquid inside the cartridge flows to the pump body 2 along the first set gap 313, the second set gap 324 and the three-way joint 33 in sequence; the signal processing device 4 receives and processes the pH value information, and controls its alarm device to alarm when the pH value of the medicine liquid changes beyond the preset value.

[0031] In combination with the above embodiment, the first setting gap 313 is formed by the gap between the inner tube 311 and the outer tube 312, and its cross section is annular as a whole. The second setting gap 324 is formed by the gap between the first connecting tube 321 and the cable protective sleeve 325 (the cable 35 is provided with a cable protective sleeve 325 outside, mainly to prevent the liquid from contacting the cable 35 and the sensor body), and its cross section is annular as a whole. The top of the inner tube 311 and the outer tube 312 is provided with a first fixed connection joint 51, and the first fixed connection joint 51 plays the role of connecting the inner tube 311, the outer tube 312 and the first connecting tube 321, and the bottom end of the second setting gap 324 and the top end of the first setting gap 313 are respectively located on the inner and outer sides of the first fixed connection joint 51, and at the same time, a plurality of first connection holes 3221 are provided on the outer circumference of the first fixed connection joint 51, so as to connect the first setting gap 313 and the second setting gap 324.

[0032] The external liquid medicine is injected into the cartridge through the pipeline to supplement the liquid medicine inside the cartridge. After the pump body 2 works, the liquid medicine inside the cartridge is extracted through the liquid supply detection device 3 and the three-way connector 33 in turn, and transported to the semiconductor equipment for subsequent process processing. At the same time, a sensor 34 is provided on the liquid supply detection device 3, and the probe 341 of the sensor 34 is immersed in the liquid medicine in the cartridge. While the liquid medicine is extracted through the pump body 2, the real-time detection of the pH value of the liquid medicine can be achieved. The sensor 34 transmits the collected pH value information to the signal processing device 4, and the signal processing device 4 receives and analyzes the pH value information. When the pH value information changes and the change value exceeds the preset range, it indicates that the liquid medicine inside the cartridge has failed, and the alarm device on the signal processing device 4 sounds an alarm, thereby reminding the operator to replace the failed liquid medicine.

[0033] Furthermore, the size of the first set gap 313 and the flow rate of the liquid medicine determine the speed of the liquid delivery of the liquid supply detection device 3, which affects the cross-sectional area of ​​the pipe composed of the inner tube 311 and the outer tube 312, and the flow rate (Q) = flow rate (v). The flow rate (v) in the embodiment of the present application is pre-selected, specifically selected according to the head of the pump body 2. After the flow rate is selected, the outer diameter of the inner tube 311 can be calculated based on the relationship between the flow rate (Q) and the flow rate (v) and the pre-set inner diameter of the outer tube 312 (that is, the inner diameter of the outer tube 312 is a constant value), and then the first set gap 313 can be calculated. The above-mentioned head can also be obtained by calculation. The specific calculation is as follows: First, determine the head of pump body 2. The head of pump body 2 can be determined by the following formula: Pump body 2 power (P) = flow rate (Q) × head (H) × density (the density of the liquid medicine can be the density of water) × gravity acceleration (g) ÷ efficiency (pump loss, pipeline loss η).

[0034] Take the pump body 2 power P = 20 watts, flow rate Q = 1 liter / minute = 1 / 60 cubic meter / second, density ρ = 1000kg / m³, gravitational acceleration g = 9.8m / s², and efficiency η = 75% = 0.75 as an example.

[0035] 20=(1 / 60)×H×1000×9.8÷0.75, the solution is H≈9.18mm.

[0036] Then, the outer diameter of the inner cylinder 311 is determined: the outer diameter of the inner cylinder 311 can be determined by the flow rate of the pump body 2 .

[0037] Flow rate (Q) = flow velocity (v) × pipe cross-sectional area (A), A = π × (d / 2)^2 (d is the pipe diameter).

[0038] The flow rate is 0.5m / s, 1 / 60000=0.5×A.

[0039] Solving the equation, we can get A≈0.000333m^2=333mm^2.

[0040] The inner diameter of the outer cylinder 312 is set to 50 mm according to the size requirements, so A=(D / 2)^2-(d / 2)^2; 333=(50 / 2)^2-(d / 2)^2, r≈45. Taking the pressure loss into consideration, the outer diameter of the inner tube 311 is 40 mm.

[0041] The second set gap 324 is formed by the gap between the first connecting tube 321 and the cable protective cover 325. The outer diameters of the cable 35 and the cable protective cover 325 are basically determined. The second set gap 324 is mainly determined by the inner diameter of the first connecting tube 321. Therefore, you only need to select the inner diameter of the first connecting tube 321 according to your needs.

[0042] In the semiconductor liquid supply device for real-time detection of pH in the embodiment of the present application, the first tube body assembly 31 also includes a first fixed plug 314, a first sealing ring 3151 and a second sealing ring 3152; the first fixed plug 314 is arranged at the bottom end of the inner cylinder 311, and the sensor 34 is located inside the first fixed plug 314; the first fixed plug 314 is sleeved with a first sealing ring 3151 to be sealed and connected to the inner circumferential side of the inner cylinder 311 through the first sealing ring 3151; the sensor body of the sensor 34 is sleeved with a second sealing ring 3152 to be sealed and connected to the inner circumferential side of the first fixed plug 314 through the second sealing ring 3152; the probe 341 of the sensor 34 is located below the second sealing ring 3152 for contacting with the medicine inside the medicine cartridge.

[0043] In combination with the above embodiment, the first fixed plug 314 is arranged at the bottom of the inner cylinder 311 to realize the fixed installation of the sensor 34. For example, an internal threaded portion is arranged at the top of the first fixed plug 314, and an external threaded portion is arranged at the corresponding position of the sensor 34, so as to realize the threaded connection between the two, and realize the installation and fixation of the sensor 34. The first sealing ring 3151 can effectively seal the gap between the inner cylinder 311 and the first fixed plug 314, so as to prevent the liquid medicine from contacting the upper part of the sensor through the gap and then corroding the sensor. Similarly, the second sealing ring 3152 can effectively seal the gap between the sensor 34 and the first fixed plug 314, so as to prevent the liquid medicine from contacting the upper part of the sensor 34 through the gap and then corroding the sensor 34.

[0044] In the semiconductor liquid supply device for real-time detection of pH in the embodiment of the present application, the outer cylinder 312 includes a first cylinder 3121 and a second cylinder 3122, and the first cylinder 3121 and the second cylinder 3122 are arranged opposite to each other and connected in the up and down directions respectively; the first fixed plug 314 includes a first plug body and a first convex ring portion 3141, and the first convex ring portion 3141 is arranged in the middle of the outer circumferential side surface of the first plug body, and there is a gap between the outer circumferential side surface of the first convex ring portion 3141 and the inner circumferential side surface of the first cylinder 3121; the top end of the second cylinder 3122 also extends into the interior of the first cylinder 3121, and abuts against the bottom of the first convex ring portion 3141, and there is a gap between the outer circumferential side surface of the top end of the second cylinder 3122 and the inner circumferential side surface of the first cylinder 3121.

[0045] In combination with the above embodiment, the first cylinder 3121 and the second cylinder 3122 are coaxially arranged and have the same outer diameter. The length of the second cylinder 3122 is much smaller than that of the first cylinder 3121. The second cylinder 3122 is fixedly connected to the first cylinder 3121, such as by bonding or welding. Considering that all components of the liquid supply detection device 3 are made of corrosion-resistant PVC material, the second cylinder 3122 and the first cylinder 3121 are preferably connected by bonding. The second cylinder 3122 is in surface contact with the first convex ring portion 3141 of the first fixed plug 314, and is used to provide an installation position for the first fixed plug 314. The gap between the outer circumferential side of the first convex ring portion 3141 and the inner circumferential side of the first cylinder 3121, the gap between the outer circumferential side of the top end of the second cylinder 3122 and the inner circumferential side of the first cylinder 3121, and the gap between the second cylinder 3122 and the inner cylinder 311 together constitute the first set gap 313, through which the medicine liquid flows from bottom to top.

[0046] In the semiconductor liquid supply device for real-time detection of pH in the embodiment of the present application, the second cylinder 3122 is provided with upper and lower openings, the probe 341 extends into the interior of the second cylinder 3122, the second cylinder 3122 is immersed in the medicine liquid, and a second connecting hole 317 is provided on the side wall of the top end of the second cylinder 3122, through which the medicine liquid flows into the first set gap 313.

[0047] In the semiconductor liquid supply device for real-time detection of pH in the embodiment of the present application, a first step is provided at the bottom of the first cylinder 3121, and the inner diameter of the first step gradually decreases in a bottom-up direction; a second step is provided at the top of the second cylinder 3122, and the inner diameter of the second step gradually increases in a bottom-up direction, and the bottom of the first cylinder 3121 and the top of the second cylinder 3122 are connected and cooperated with each other through the first step and the second step respectively; an abutment portion 316 is also provided at the top of the second step of the second cylinder 3122, and the abutment portion 316 extends into the interior of the first cylinder 3121 and abuts against the bottom of the first convex ring portion 3141; a second connecting hole 317 is provided on the side wall of the abutment portion 316, and a gap is provided between the outer circumferential side surface of the abutment portion 316 and the inner circumferential side surface of the first cylinder 3121.

[0048] In the semiconductor liquid supply device for real-time detection of pH in the embodiment of the present application, the first tube body assembly 31 also includes a protective cover 318, which is connected to the bottom of the second cylinder 3122 to seal and protect the probe 341 located inside the second cylinder 3122.

[0049] In combination with the above embodiment, when the entire liquid supply device is not in use, the protective cover 318 is installed on the second cylinder 3122 to isolate the probe 341 from the external environment, so as to prevent the probe 341 from being ineffective due to long-term contact with air, thereby extending the service life of the probe 341. When the entire liquid supply device is in use, the protective cover 318 can be removed from the second cylinder 3122.

[0050] In the semiconductor liquid supply equipment for real-time detection of pH in the embodiment of the present application, the outer circumferential side surface of the top end of the protective cover 318 is provided with a first threaded portion, the inner circumferential side surface of the second cylinder 3122 is provided with a second threaded portion, the top end of the protective cover 318 extends into the interior of the second cylinder 3122 and the two are threadedly connected; the outer circumferential side surface of the middle part of the protective cover 318 is provided with a second shoulder portion, the second shoulder portion is arranged opposite to the bottom of the second cylinder 3122, and the bottom of the second cylinder 3122 abuts against the second shoulder portion.

[0051] In the semiconductor liquid supply device for real-time detection of pH in the embodiment of the present application, the first tube body assembly 31 also includes a third sealing ring 3153, and the third sealing ring 3153 is sleeved on the outer circumferential side of the bottom of the first plug body, the bottom of the first plug body and the probe 341 extend into the protective cover 318, and the outer circumferential side of the bottom of the first plug body is sealed and connected with the inner circumferential side of the top of the protective cover 318 through the third sealing ring 3153.

[0052] In the semiconductor liquid supply device for real-time detection of pH in the embodiment of the present application, the second tube body assembly 32 also includes a cable protection sleeve 325, which is sleeved on the outside of the cable 35, and the bottom of the cable protection sleeve 325 is in contact with the top of the sensor body; the first connecting joint 322 is threadedly connected to the top of the second cylinder 3122; the outer circumferential side surface of the top of the inner cylinder 311 is provided with a first shoulder portion, and the bottom of the first connecting joint 322 is arranged opposite to the first shoulder portion up and down, and when the first connecting joint 322 and the second cylinder 3122 are screwed down, the first connecting joint 322 is screwed down to the second cylinder 3122. The bottom of a connecting joint 322 is pressed against the top of the first shoulder portion and a downward pre-tightening force is applied to the inner cylinder 311 through the first shoulder portion, so that the bottom of the inner cylinder 311 is pressed against the top of the first convex ring portion 3141; the outer diameter of the top of the inner cylinder 311 increases from top to bottom, and the bottom of the cable protective sleeve 325 is sleeved on the top of the inner cylinder 311. When the first connecting joint 322 and the second cylinder 3122 are tightened downward, the inner circumferential side surface of the first connecting joint 322 presses the cable protective sleeve 325 against the top of the inner cylinder 311 in the direction toward the cable 35.

[0053] The semiconductor liquid supply device for real-time detection of pH in the embodiment of the present application has a sealing fixing structure 5 at multiple device connections of the semiconductor liquid supply device; the multiple device connections at least include a connection between the outer cylinder 312 and the first connecting tube 321, a connection between the three-way joint 33 and the first connecting tube 321, a connection between the three-way joint 33 and the pump body 2, and a connection between the inner cylinder 311 and the cable protective cover 325; Each set of connections is provided with a first fixed connection joint 51 and a first connection nut 52; the first fixed connection joint 51 is sleeved on the corresponding connection part, the first connection nut 52 is sleeved on the first fixed connection joint 51 or respectively sleeved on the outer circumferential side of the first fixed connection joint 51 and the cable protective cover 325, and the first fixed connection joint 51 is threadedly connected with the first connection nut 52; the outer diameter of the top end of the first fixed connection joint 51 gradually decreases from bottom to top, and the cable protective cover 325 is sleeved on the top end of the first fixed connection joint 51; when the first connection nut 52 and the first fixed connection joint 51 are tightened downward, the cable protective cover 325 is pressed against the top end of the first fixed connection joint 51.

[0054] In the semiconductor liquid supply equipment for real-time pH detection in the embodiment of the present application, the first fixed connection joint 51 includes a first fixed connection joint body and a second convex ring portion 511; the second convex ring portion 511 is arranged on the outer circumferential side of the first fixed connection joint body, the bottom end of the first fixed connection joint 51 extends into the top end of the first connection joint 322, and the bottom of the second convex ring portion 511 is fixedly connected to the top end of the first connection joint 322; when the first connecting nut 52 and the first fixed connection joint 51 are tightened downward, the first connection joint 322 and the second cylinder 3122 are tightened downward synchronously.

[0055] In the semiconductor liquid supply device for real-time detection of pH in the embodiment of the present application, the first connecting tube 321 is connected to the first connector 331 of the three-way connector 33, the cable 35 extends out of the second connector 332 of the three-way connector 33 to be electrically connected to the signal processing device 4, and the pump body 2 is connected to the third connector 333 of the three-way connector 33 through the second connecting tube 6.

[0056] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A semiconductor liquid supply device for real-time detection of pH, characterized in that: include: A box body, a medicine cartridge, a pump body, a liquid supply detection device and a signal processing device, wherein the medicine cartridge is located in the box body and has liquid medicine input therein; The pump body is disposed in the box body and connected to the liquid supply detection device to extract the liquid medicine through the liquid supply detection device; The liquid supply detection device comprises: a first tube assembly, a second tube assembly, a three-way joint, a sensor and a cable, the first tube assembly is connected to the second tube assembly, the bottom end of the first tube assembly extends into the cartridge, and the second tube assembly is connected to the pump body through the three-way joint; The first tube assembly comprises: an inner tube and an outer tube, the inner tube is located inside the outer tube, the bottoms of the inner tube and the outer tube are both located inside the cartridge, and a first set gap is provided between the outer circumferential side surface of the inner tube and the inner circumferential side surface of the outer tube, the sensor is arranged inside the inner tube, the bottom of the sensor extends into the drug solution of the cartridge to detect the pH value of the drug solution, and the top of the sensor is electrically connected to the signal processing device through the cable; The second tube body assembly includes: a first connecting tube, a first connecting joint and a second connecting joint; the first connecting tube and the outer tube are arranged in the up-down direction respectively, and the bottom end of the first connecting tube is connected to the top end of the outer tube through the first connecting joint; the cable is also located inside the first connecting tube, and there is a second set gap between the cable and the inner side wall of the first connecting tube; a first connecting hole is provided on the side wall of the first connecting joint to connect the first set gap and the second set gap; the second connecting joint is connected to the side wall of the top of the first connecting tube, and the second connecting joint is connected to the three-way joint; After the pump body is started, the medicine liquid inside the cartridge flows toward the pump body along the first set gap, the second set gap and the three-way joint in sequence; when the signal processing device receives and processes the pH value information and controls its alarm device to alarm when the pH value change of the medicine liquid exceeds a preset value.

2. The semiconductor liquid supply device for real-time detection of pH according to claim 1, characterized in that: The first tube body assembly also includes a first fixed plug, a first sealing ring and a second sealing ring; the first fixed plug is arranged at the bottom end of the inner tube, and the sensor is located inside the first fixed plug; the first sealing ring is sleeved on the first fixed plug to be sealed and connected to the inner circumferential side of the inner tube through the second sealing ring; the second sealing ring is sleeved on the sensor body of the sensor to be sealed and connected to the inner circumferential side of the first fixed plug through the second sealing ring; the probe of the sensor is located below the second sealing ring for contacting with the medicine inside the cartridge.

3. The semiconductor liquid supply device for real-time detection of pH according to claim 2, characterized in that: The outer cylinder includes a first cylinder body and a second cylinder body, and the first cylinder body and the second cylinder body are respectively arranged opposite to each other and connected in the up and down directions; the first fixed plug includes a first plug body and a first convex ring portion, and the first convex ring portion is arranged in the middle of the outer circumferential side surface of the first plug body, and there is a gap between the outer circumferential side surface of the first convex ring portion and the inner circumferential side surface of the first cylinder body; the top end of the second cylinder body also extends into the interior of the first cylinder body, and abuts against the bottom of the first convex ring portion, and there is a gap between the outer circumferential side surface of the top end of the second cylinder body and the inner circumferential side surface of the first cylinder body.

4. The semiconductor liquid supply device for real-time detection of pH according to claim 3, characterized in that: The second cylinder is provided with upper and lower openings, the probe extends into the interior of the second cylinder, the second cylinder is immersed in the medicine solution, and a second connecting hole is provided on the side wall of the top end of the second cylinder.

5. The semiconductor liquid supply device for real-time detection of pH according to claim 3, characterized in that: A first step is provided at the bottom of the first cylinder, and the inner diameter of the first step gradually decreases in a bottom-up direction; a second step is provided at the top of the second cylinder, and the inner diameter of the second step gradually increases in a bottom-up direction, and the bottom of the first cylinder and the top of the second cylinder are connected and cooperated with each other through the first step and the second step respectively; an abutment portion is also provided at the top of the second step of the second cylinder, and the abutment portion extends into the interior of the first cylinder and abuts against the bottom of the first convex ring portion; a second connecting hole is provided on the side wall of the abutment portion, and a gap is left between the outer circumferential side surface of the abutment portion and the inner circumferential side surface of the first cylinder.

6. The semiconductor liquid supply device for real-time detection of pH according to claim 3, characterized in that: The first tube assembly also includes a protective cover, which is connected to the bottom of the second cylinder to seal and protect the probe located inside the second cylinder.

7. The semiconductor liquid supply device for real-time detection of pH according to claim 6, characterized in that: The outer circumferential side surface of the top end of the protective cover is provided with a first threaded portion, and the inner circumferential side surface of the second cylinder is provided with a second threaded portion, the top end of the protective cover extends into the interior of the second cylinder and the two are threadedly connected; the outer circumferential side surface of the middle part of the protective cover is provided with a second shoulder portion, the second shoulder portion is arranged opposite to the bottom of the second cylinder, and the bottom of the second cylinder abuts against the second shoulder portion.

8. The semiconductor liquid supply device for real-time detection of pH according to claim 7, characterized in that: The first tube body assembly also includes a third sealing ring, which is sleeved on the outer circumferential side of the bottom of the first plug body, the bottom of the first plug body and the probe extend into the protective cover, and the outer circumferential side of the bottom of the first plug body is sealed and connected to the inner circumferential side of the top of the protective cover through the third sealing ring.

9. The semiconductor liquid supply device for real-time detection of pH according to claim 3, characterized in that: The second tube body assembly also includes a cable protective sleeve, which is sleeved on the outside of the cable, and the bottom of the cable protective sleeve is abutted against the top of the sensor body; the first connecting joint is threadedly connected to the top of the second cylinder; the outer circumferential side surface of the top of the inner cylinder is provided with a first shoulder portion, and the bottom of the first connecting joint is arranged opposite to the first shoulder portion up and down, and when the first connecting joint and the second cylinder are tightened downward, the bottom of the first connecting joint is pressed against the top of the first shoulder portion and a downward pre-tightening force is applied to the inner cylinder through the first shoulder portion, so that the bottom of the inner cylinder is pressed against the top of the first convex ring portion; the outer diameter of the top of the inner cylinder increases from top to bottom, and the bottom of the cable protective sleeve is sleeved on the top of the inner cylinder, and when the first connecting joint and the second cylinder are tightened downward, the inner circumferential side surface of the first connecting joint presses the cable protective sleeve against the top of the inner cylinder in the direction toward the cable.

10. The semiconductor liquid supply device for real-time detection of pH according to claim 9, characterized in that: The multiple equipment connection parts of the semiconductor liquid supply equipment have a sealing and fixing structure; the multiple equipment connection parts at least include the connection part between the outer cylinder and the first connecting pipe, the connection part between the three-way joint and the first connecting pipe, the connection part between the three-way joint and the pump body, and the connection part between the inner cylinder and the cable protective cover; Each set of connections is provided with a first fixed connection joint and a first connection nut; the first fixed connection joint is sleeved on the corresponding connection portion, the first connection nut is sleeved on the first fixed connection joint or respectively sleeved on the outer circumferential side of the first fixed connection joint and the cable protective cover, and the first fixed connection joint is threadedly connected to the first connection nut; the outer diameter of the top end of the first fixed connection joint gradually decreases from bottom to top, and the cable protective cover is sleeved on the top end of the first fixed connection joint; when the first connection nut and the first fixed connection joint are tightened downward, the cable protective cover is pressed against the top end of the first fixed connection joint.

11. The semiconductor liquid supply device for real-time detection of pH according to claim 10, characterized in that: The first fixed connection joint includes a first fixed connection joint body and a second convex ring portion; the second convex ring portion is arranged on the outer circumferential side of the first fixed connection joint body, the bottom end of the first fixed connection joint extends into the top end of the first connection joint, and the bottom of the second convex ring portion is fixedly connected to the top end of the first connection joint; when the first connecting nut and the first fixed connection joint are tightened downward, the first connection joint and the second cylinder are tightened downward synchronously.

12. The semiconductor liquid supply device for real-time detection of pH according to any one of claims 1 to 11, characterized in that: The method for determining the first set gap is as follows: determine the head of the pump body according to the power and efficiency of the pump body, the flow rate and density of the medicine liquid, and the acceleration of gravity; select the flow rate of the medicine liquid according to the head of the pump body, and determine the first influence relationship between the flow rate of the medicine liquid and the cross-sectional area of ​​the pipeline composed of the inner cylinder and the outer cylinder, determine the outer diameter of the inner cylinder according to the first influence relationship, the second influence relationship between the cross-sectional area of ​​the pipeline and the outer diameter of the inner cylinder and the inner diameter of the outer cylinder respectively, and the preset inner diameter of the outer cylinder, and determine the first set gap according to the outer diameter of the inner cylinder.

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