Capacitor element

Abstract

A capacitor element (2) is provided with: a capacitor section (10) that includes an anode plate (11) having a porous section (11B) on at least one main surface of a core section (11A), a dielectric layer (13) provided on the surface of the porous section (11B), and a cathode layer (12) provided on the surface of the dielectric layer (13); a through conductor (20) that penetrates the dielectric layer (13) and the anode plate (11) in the thickness direction; a sealing layer (30) provided so as to cover the capacitor unit (10); conductor wiring layers (40A, 40B) provided on the surface of the sealing layer (30); and an outer insulating layer (50) provided so as to cover the sealing layer (30) and the conductor wiring layers (40A, 40B). The through conductor (20) includes cathode through conductors (20A, 20C) electrically connected to the cathode layer (12) and anode through conductors (20B, 20D) electrically connected to the anode plate (11). The conductor wiring layers (40A, 40B) are electrically connected to either the cathode through conductor (20A) or the anode through conductor (20B). The cathode through conductor (20A) includes a first cathode through conductor (20A1) and a second cathode through conductor (20A2). The anode through conductor (20B) includes a first anode through conductor (20B1). The distance between the centers of the first anode through conductor (20B1) and the first cathode through conductor (20A1) and the distance between the centers of the first anode through conductor (20B1) and the second cathode through conductor (20A2) are equal in plan view from the thickness direction of the anode plate (11). The first cathode through conductor (20A1), the second cathode through conductor (20A2), and the first anode through conductor (20B1) are direct through conductors that penetrate the sealing layer (30) and the capacitor unit (10) in the thickness direction and are connected to the conductor wiring layer (40A) or the conductor wiring layer (40B) at the ends. The cathode through conductor (20C) further comprises at least one fifth cathode through conductor (20C5). The fifth cathode through conductor (20C5) is an indirect through conductor that penetrates the outer insulating layer (50), the sealing layer (30), and the capacitor unit (10) in the thickness direction and is connected to the conductor wiring layer (40A) at the side surface. The distance between the center of the fifth cathode through conductor (20C5) and the center of the first cathode through conductor (20A1) and the distance between the center of the fifth cathode through conductor (20C5) and the center of the second cathode through conductor (20A2) are equal in plan view from the thickness direction of the anode plate (11).

Description

Technical Field

[0001] The present invention relates to capacitor elements. Background Art

[0002] Patent document 1 discloses a capacitor array, which includes: a plurality of solid electrolytic capacitor elements, which are divided from a solid electrolytic capacitor sheet; a sheet-shaped first sealing layer; and a sheet-shaped second sealing layer. The solid electrolytic capacitor sheet includes: an anode plate, which is formed of a valve-acting metal; a porous layer, which is provided on at least one main surface of the anode plate; a dielectric layer, which is provided on the surface of the porous layer; and a cathode layer, which includes a solid electrolyte layer provided on the surface of the dielectric layer, and the solid electrolytic capacitor sheet has a first main surface and a second main surface opposite to each other in the thickness direction. The first main surface side of each of the plurality of solid electrolytic capacitor elements is arranged on the first sealing layer. The second sealing layer is arranged in a manner that covers the plurality of solid electrolytic capacitor elements on the first sealing layer from the second main surface side. The solid electrolytic capacitor elements are divided by a slit-shaped sheet removal portion.

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Publication No. 2020-167361 Summary of the invention

[0006] Problem that the invention aims to solve

[0007] Patent document 1 states that: preferably, a through electrode is provided that penetrates the first sealing layer or the second sealing layer in the thickness direction, and the anode plate or the cathode layer is connected to the external electrode via the through electrode. Fig. 22 A and Fig. 22 B describes the following structure: the anode and cathode are arranged in a staggered grid pattern, and the anode plates are directly connected at the wall surface of the anode through-electrode.

[0008] However, in the capacitor array described in Patent Document 1, there is room for improvement in reducing the equivalent series resistance (ESR) and equivalent series inductance (ESL) of individual capacitor elements included in the capacitor array.

[0009] Furthermore, there is room for improvement in reducing equivalent series resistance and equivalent series inductance not limited to capacitor arrays including a plurality of capacitor elements but also in individual capacitor elements.

[0010] An object of the present invention is to provide a capacitor element capable of reducing equivalent series resistance and equivalent series inductance.

[0011] Solutions for solving problems

[0012] The capacitor element of the present invention includes: a capacitor part, which includes an anode plate, a dielectric layer and a cathode layer, the anode plate having a porous part on at least one main surface of the core, the dielectric layer being provided on the surface of the porous part, and the cathode layer being provided on the surface of the dielectric layer; a through conductor, which penetrates the dielectric layer and the anode plate in the thickness direction; a sealing layer, which is provided in a manner covering the capacitor part; a conductor wiring layer, which is provided on the surface of the sealing layer; and an outer insulating layer, which is provided in a manner covering the sealing layer and the conductor wiring layer. The through conductor includes a cathode through conductor electrically connected to the cathode layer and an anode through conductor electrically connected to the anode plate. The conductor wiring layer is electrically connected to any one of the cathode through conductor and the anode through conductor. The cathode through conductor includes a first cathode through conductor and a second cathode through conductor. The anode through conductor includes a first anode through conductor. When viewed from above in the thickness direction of the anode plate, the center-to-center distance between the first anode through-conductor and the first cathode through-conductor is equal to the center-to-center distance between the first anode through-conductor and the second cathode through-conductor. The first cathode through-conductor, the second cathode through-conductor, and the first anode through-conductor are direct through-conductors that penetrate the sealing layer and the capacitor portion in the thickness direction and are connected to the conductor wiring layer at the end. The cathode through-conductor further includes at least one fifth cathode through-conductor. The fifth cathode through-conductor is an indirect through-conductor that penetrates the outer insulating layer, the sealing layer, and the capacitor portion in the thickness direction and is connected to the conductor wiring layer at the side. When viewed from above in the thickness direction of the anode plate, the center-to-center distance between the fifth cathode through-conductor and the first cathode through-conductor is equal to the center-to-center distance between the fifth cathode through-conductor and the second cathode through-conductor.

[0013] Effects of the Invention

[0014] According to the present invention, it is possible to provide a capacitor element capable of reducing equivalent series resistance and equivalent series inductance. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a cross-sectional view schematically showing an example of the capacitor element according to the first embodiment of the present invention.

[0016] Figure 2A It is along Figure 1 Top view of line A and line A'.

[0017] Figure 2B It is along Figure 1 Top view of line B and line B'.

[0018] Figure 2C It is along Figure 1 Top view of the C line and C' line.

[0019] Figure 2D It is along Figure 1 Top view of line D and line D'.

[0020] Figure 2E It is along Figure 1 Top view of Line E.

[0021] Figure 3 It is a plan view schematically showing an example of arrangement of through conductors constituting the capacitor element according to the first embodiment of the present invention.

[0022] Figure 4 is Figure 3 The illustrated configuration is a top view for explaining the configuration of the cathode through conductor.

[0023] Figure 5 It is a plan view schematically showing another example of the arrangement of through conductors constituting the capacitor element according to the first embodiment of the present invention.

[0024] Figure 6 is Figure 3 The illustrated configuration is a top view for explaining the configuration of the anode through conductor.

[0025] Figure 7 is Figure 5 The illustrated configuration is a top view for explaining the configuration of the anode through conductor.

[0026] Figure 8 is Figure 4 The illustrated arrangement is a plan view for explaining the anode through conductor existing inside a circle centered on the center of the cathode through conductor.

[0027] Fig. 9 is Figure 6 The illustrated arrangement is a plan view for explaining the cathode through conductor existing inside a circle centered on the center of the anode through conductor.

[0028] Fig.10 It is a plan view schematically showing still another example of the arrangement of through conductors constituting the capacitor element according to the first embodiment of the present invention.

[0029] Fig.11 is Fig.10 The illustrated configuration is a top view for explaining the configuration of the anode through conductor.

[0030] Fig.12 It is a cross-sectional view schematically showing an example of a capacitor element according to a second embodiment of the present invention.

[0031] Fig.13 is with Fig.12 Cross-sectional views at different positions of the position.

[0032] Fig.14A It is along Fig.12 Top view of line A and line A'.

[0033] Fig. 14B It is along Fig.12 Top view of line B and line B'.

[0034] Fig. 14C It is along Fig.12 Top view of the C line and C' line.

[0035] Fig.14D It is along Fig.12 Top view of line D and line D'.

[0036] Fig.14E It is along Fig.12 Top view of line E and line E'.

[0037] Fig.14F It is along Fig.12 Top view of the F line and F' line.

[0038] Figure 14G It is along Fig.12 Top view of the G line.

[0039] Fig.15A It is a plan view schematically showing an example of arrangement of through conductors constituting a capacitor element according to a second embodiment of the present invention.

[0040] Fig. 15B It means from Fig.15A A plan view showing a state where the indirect through-conductor is removed.

[0041] Fig.16A It is a plan view schematically showing another example of the arrangement of through conductors constituting the capacitor element according to the second embodiment of the present invention.

[0042] Fig. 16B It means from Fig.16A A plan view showing a state where the indirect through-conductor is removed.

[0043] Fig.17 It is a plan view schematically showing still another example of the arrangement of through conductors constituting the capacitor element according to the second embodiment of the present invention.

[0044] Fig.18A is Fig.15A The illustrated configuration is a top view for explaining the configuration of the anode through conductor.

[0045] Fig.18B It means from Fig.18A A plan view showing a state where the indirect through-conductor is removed.

[0046] Fig.19A is Fig.16A The illustrated configuration is a top view for explaining the configuration of the anode through conductor.

[0047] Fig.19B It means from Fig.19A A plan view showing a state where the indirect through-conductor is removed.

[0048] Fig. 20 is Fig.17 The illustrated configuration is a top view for explaining the configuration of the anode through conductor.

[0049] Fig.21 It is a cross-sectional view schematically showing a modified example of the outer insulating layer.

[0050] Fig. 22 It is a cross-sectional view schematically showing an example of the position of a capacitor element including a plurality of capacitor portions. DETAILED DESCRIPTION

[0051] The capacitor element of the present invention is described below. In addition, the present invention is not limited to the following structure, and can be appropriately changed within the scope of the present invention. In addition, a structure formed by combining a plurality of the preferred structures described below is also the present invention.

[0052] The embodiments shown below are examples, and it is self-evident that parts of the structures shown in different embodiments can be replaced or combined. After the second embodiment, the description of matters common to the first embodiment is omitted, and only the differences are described. In particular, the same effects produced by the same structure are not mentioned in sequence in each embodiment.

[0053] In the following description, when there is no particular distinction between the embodiments, they are simply referred to as "capacitor elements of the present invention."

[0054] In this specification, terms indicating the relationship between elements (such as "vertical", "parallel", "orthogonal", etc.) and terms indicating the shape of an element do not express only strict meanings, but rather express substantially equivalent ranges, for example, also including differences of several percentages.

[0055] The drawings shown below are schematic diagrams, and their dimensions, aspect ratios, and other aspects may differ from those of actual products.

[0056] [First embodiment]

[0057] Figure 1 It is a cross-sectional view schematically showing an example of the capacitor element according to the first embodiment of the present invention. Figure 2A It is along Figure 1 Top view of line A and line A'. Figure 2B It is along Figure 1 Top view of line B and line B'. Figure 2C It is along Figure 1 Top view of the C line and C' line. Figure 2D It is along Figure 1 Top view of line D and line D'. Figure 2E It is along Figure 1 A top view of line E. In addition, Figure 1 It is along Figure 2A Cross-sectional view of line II.

[0058] Figure 1 The capacitor element 1 shown includes a capacitor portion 10 and a through conductor 20. Figure 1 In the illustrated example, the capacitor element 1 further includes a sealing layer 30 and conductor wiring layers 40A, 40B.

[0059] The capacitor unit 10 includes: an anode plate 11 having a porous portion 11B on at least one main surface of a core portion 11A; a dielectric layer 13 provided on the surface of the porous portion 11B; and a cathode layer 12 provided on the surface of the dielectric layer 13. Thus, the capacitor unit 10 constitutes an electrolytic capacitor. Figure 1 In the example shown, the anode plate 11 has the porous portion 11B on both main surfaces of the core portion 11A, but the porous portion 11B may be formed on only one main surface of the core portion 11A.

[0060] Cathode layer 12 includes, for example, a solid electrolyte layer provided on the surface of dielectric layer 13. Preferably, cathode layer 12 further includes a conductor layer provided on the surface of the solid electrolyte layer. When cathode layer 12 includes a solid electrolyte layer, capacitor unit 10 constitutes a solid electrolytic capacitor.

[0061] The through conductor 20 has a thickness direction (in Figure 1 The dielectric layer 13 and the anode plate 11 are penetrated in the vertical direction.

[0062] The through conductors 20 include a cathode through conductor 20A electrically connected to the cathode layer 12 and an anode through conductor 20B electrically connected to the anode plate 11 .

[0063] exist Figure 1 In the illustrated example, a plurality of cathode through conductors 20A are provided so as to penetrate the sealing layer 30 and the capacitor unit 10 in the thickness direction. Each cathode through conductor 20A is connected to a conductor wiring layer 40A provided on the surface of the sealing layer 30 at an end portion.

[0064] Preferably, if Figure 2C As shown, the cathode through conductor 20A exists in the cathode layer 12 when viewed in a plan view in the thickness direction of the anode plate 11 .

[0065] The cathode through conductor 20A only needs to be provided on at least the inner wall surface of the through hole that penetrates the sealing layer 30 and the capacitor unit 10 in the thickness direction. That is, the cathode through conductor 20A may be provided only on the inner wall surface of the through hole, or may be provided throughout the interior of the through hole. In the case where the cathode through conductor 20A is provided only on the inner wall surface of the through hole, the space surrounded by the cathode through conductor 20A in the through hole may be filled with a material containing resin. That is, a resin filling portion 25A may be provided inside the cathode through conductor 20A.

[0066] like Figure 1 As shown, an insulating material such as the sealing layer 30 is filled between the through hole penetrating the sealing layer 30 and the capacitor unit 10 in the thickness direction and the cathode through conductor 20A.

[0067] exist Figure 1 In the illustrated example, a plurality of anode through conductors 20B are provided so as to penetrate the sealing layer 30 and the capacitor unit 10 in the thickness direction. Each anode through conductor 20B is connected to a conductor wiring layer 40B provided on the surface of the sealing layer 30 at an end portion.

[0068] Preferably, if Figure 2C As shown, the anode through conductor 20B exists in the cathode layer 12 when viewed in a plan view in the thickness direction of the anode plate 11 .

[0069] The anode through conductor 20B only needs to be provided on at least the inner wall surface of the through hole that penetrates the sealing layer 30 and the capacitor unit 10 in the thickness direction. That is, the anode through conductor 20B may be provided only on the inner wall surface of the through hole, or may be provided throughout the interior of the through hole. In the case where the anode through conductor 20B is provided only on the inner wall surface of the through hole, the space surrounded by the anode through conductor 20B in the through hole may be filled with a material containing resin. That is, the resin filling portion 25B may be provided inside the anode through conductor 20B.

[0070] In this specification, the through conductors 20 that penetrate the sealing layer 30 and the capacitor unit 10 in the thickness direction and are connected to the conductor wiring layer 40A or the conductor wiring layer 40B at the end are referred to as “direct through conductors.” Therefore, the cathode through conductor 20A and the anode through conductor 20B are direct through conductors.

[0071] Preferably, if Figure 1As shown, the anode through conductor 20B is electrically connected to the anode plate 11 at the inner wall surface of the through hole that penetrates the sealing layer 30 and the capacitor unit 10 in the thickness direction. More specifically, it is preferable that the anode through conductor 20B is electrically connected to the end surface of the anode plate 11 that faces the inner wall surface of the through hole in the plane direction. In this case, the insulating material such as the sealing layer 30 is not filled between the through hole that penetrates the sealing layer 30 and the capacitor unit 10 in the thickness direction and the anode through conductor 20B.

[0072] Preferably, if Figure 1 As shown, core 11A and porous portion 11B are exposed on the end surface of anode plate 11 and electrically connected to anode through conductor 20B. In this case, in addition to core 11A, porous portion 11B is also electrically connected to anode through conductor 20B.

[0073] Preferably, when viewed from the thickness direction of the anode plate 11, Figure 2D and Figure 2E As shown, the anode through conductor 20B is electrically connected to the anode plate 11 over the entire circumference of the through hole that penetrates the sealing layer 30 and the capacitor unit 10 in the thickness direction.

[0074] The anode through conductor 20B may be electrically connected via the anode connecting layer, or may be directly connected to the end surface of the anode plate 11 .

[0075] The sealing layer 30 is provided so as to cover the capacitor unit 10. The capacitor unit 10 is protected by the sealing layer 30.

[0076] Preferably, if Figure 1 As shown, the sealing layer 30 is provided on two main surfaces of the capacitor portion 10 that are opposed to each other in the thickness direction.

[0077] The conductor wiring layers 40A and 40B are provided on the surface of the sealing layer 30 , and are electrically connected to either the cathode through conductor 20A or the anode through conductor 20B.

[0078] The conductor wiring layer 40A is electrically connected to the cathode through conductor 20A. Figure 1 In the illustrated example, the conductor wiring layer 40A is provided on the surface of the cathode through conductor 20A, and functions as a connection terminal of the capacitor element 1 .

[0079] Specifically, in Figure 1 In the illustrated example, the conductive wiring layer 40A is electrically connected to the cathode layer 12 via a via conductor 45 that penetrates the sealing layer 30 , and functions as a connection terminal for the cathode layer 12 .

[0080] The conductor wiring layer 40B is electrically connected to the anode through conductor 20B. Figure 1In the illustrated example, the conductive wiring layer 40B is provided on the surface of the anode through conductor 20B, and functions as a connection terminal of the capacitor element 1 .

[0081] Specifically, in Figure 1 In the illustrated example, the conductor wiring layer 40B is electrically connected to the anode plate 11 via the anode through conductor 20B, and functions as a connection terminal for the anode plate 11 .

[0082] Figure 3 It is a plan view schematically showing an example of arrangement of through conductors constituting the capacitor element according to the first embodiment of the present invention. Figure 3 The top view shown is Figure 2E The top views shown are identical.

[0083] exist Figure 3 In the example shown, the through conductors are arranged in a square configuration. In the square configuration, the through conductors are arranged at each vertex of the square shape. Figure 3 In the embodiment, the cathode through conductors and the anode through conductors are alternately arranged from the upper side to the lower side, and the cathode through conductors and the anode through conductors are alternately arranged from the left side to the right side.

[0084] exist Figure 3 In the embodiment, the cathode through conductor includes a first cathode through conductor 20A1 and a second cathode through conductor 20A2, and the anode through conductor includes a first anode through conductor 20B1. When viewed from the thickness direction of the anode plate 11, the center distance between the first anode through conductor 20B1 and the first cathode through conductor 20A1 is equal to the center distance between the first anode through conductor 20B1 and the second cathode through conductor 20A2.

[0085] In the capacitor element of the first embodiment of the present invention, a plurality of cathode through conductors are electrically connected to a cathode layer, thereby forming a current path in parallel for a capacitor element, thereby reducing the equivalent series resistance and equivalent series inductance. Moreover, the center-to-center distance between the anode through conductor and the cathode through conductor is uniform, thereby reducing the impedance difference between each current path. In addition, the heat generation of the capacitor element can be dispersed to increase the current capacity.

[0086] In this specification, the center of the through conductor refers to the center of the smallest circle that includes the through conductor when viewed from the thickness direction of the anode plate. Therefore, the center-to-center distance between the anode through conductor and the cathode through conductor refers to the length of the line segment connecting the center of the anode through conductor and the center of the cathode through conductor obtained by the above method. The same is true for the center-to-center distance between the cathode through conductors and the center-to-center distance between the anode through conductors.

[0087] In the present specification, “the distances between centers are equal” does not only refer to the case where the distances between centers are completely equal, but also refers to the case where the distances between centers are substantially equal, and includes, for example, a difference of several percentages.

[0088] The first cathode through conductor 20A1 , the second cathode through conductor 20A2 , and the first anode through conductor 20B1 are direct through conductors that penetrate the sealing layer 30 and the capacitor unit 10 in the thickness direction and are connected to the conductor wiring layer 40A or the conductor wiring layer 40B at their ends.

[0089] Figure 4 is Figure 3 The illustrated configuration is a top view for explaining the configuration of the cathode through conductor.

[0090] Preferably, if Figure 4 As shown, the cathode through conductors further include at least one third cathode through conductor 20A3. When viewed from the thickness direction of the anode plate 11, the center distance between the first cathode through conductor 20A1 and the second cathode through conductor 20A2 is equal to the center distance between the first cathode through conductor 20A1 and the third cathode through conductor 20A3. Figure 4 In the example shown, there are three third cathode through conductors 20A3.

[0091] When the cathode through conductor includes the third cathode through conductor 20A3, it is preferable that Figure 4 As shown, when viewed from above in the thickness direction of the anode plate 11, the third cathode through conductor 20A3 exists on a straight line obtained by rotating a line segment connecting the center of the first cathode through conductor 20A1 and the center of the second cathode through conductor 20A2 at an angle of 90 degrees or 180 degrees with the center of the first cathode through conductor 20A1 as a reference. In this case, when viewed from above in the thickness direction of the anode plate 11, it is sufficient that the smallest circle including the third cathode through conductor 20A3 exists on a straight line obtained by rotating a line segment connecting the center of the first cathode through conductor 20A1 and the center of the second cathode through conductor 20A2 at an angle of 90 degrees or 180 degrees with the center of the first cathode through conductor 20A1 as a reference.

[0092] Furthermore, the third cathode through conductor 20A3 is a direct through conductor that penetrates the sealing layer 30 and the capacitor portion 10 in the thickness direction and is connected to the conductor wiring layer 40A at the end portion.

[0093] Furthermore, it is preferred that Figure 4As shown, the cathode through conductors further include at least one fourth cathode through conductor 20A4. When viewed from the thickness direction of the anode plate 11, the center distance between the second cathode through conductor 20A2 and the first cathode through conductor 20A1 is equal to the center distance between the second cathode through conductor 20A2 and the fourth cathode through conductor 20A4. Figure 4 In the example shown, there are three fourth cathode through conductors 20A4.

[0094] When the cathode through conductor includes the fourth cathode through conductor 20A4, it is preferred that the fourth cathode through conductor 20A4 exists on a straight line obtained by rotating a line segment connecting the center of the first cathode through conductor 20A1 and the center of the second cathode through conductor 20A2 at an angle of 90 degrees or 180 degrees with respect to the center of the second cathode through conductor 20A2 when viewed from above in the thickness direction of the anode plate 11. In this case, it is sufficient that the smallest circle including the fourth cathode through conductor 20A4 exists on a straight line obtained by rotating a line segment connecting the center of the first cathode through conductor 20A1 and the center of the second cathode through conductor 20A2 at an angle of 90 degrees or 180 degrees with respect to the center of the second cathode through conductor 20A2 when viewed from above in the thickness direction of the anode plate 11.

[0095] Furthermore, the fourth cathode through conductor 20A4 is a direct through conductor that penetrates the sealing layer 30 and the capacitor portion 10 in the thickness direction and is connected to the conductor wiring layer 40A at the end portion.

[0096] Figure 5 It is a plan view schematically showing another example of the arrangement of through conductors constituting the capacitor element according to the first embodiment of the present invention.

[0097] exist Figure 5 In the example shown, the through conductors are arranged hexagonally. In the hexagonal arrangement, the through conductors are arranged at the vertices of a regular hexagon and at the center of the regular hexagon. Figure 5 In the embodiment, cathode through conductors and anode through conductors are alternately arranged from the upper side toward the lower side.

[0098] exist Figure 5 In the embodiment, the cathode through conductor includes a first cathode through conductor 20A1 and a second cathode through conductor 20A2, and the anode through conductor includes a first anode through conductor 20B1. When viewed from the thickness direction of the anode plate 11, the center distance between the first anode through conductor 20B1 and the first cathode through conductor 20A1 is equal to the center distance between the first anode through conductor 20B1 and the second cathode through conductor 20A2.

[0099] exist Figure 5 In the example shown, one third cathode through conductor 20A3 exists.

[0100] When the cathode through conductor includes the third cathode through conductor 20A3, it is preferable that Figure 5 As shown, when viewed from above in the thickness direction of the anode plate 11, the third cathode through conductor 20A3 exists on a straight line obtained by rotating a line segment connecting the center of the first cathode through conductor 20A1 and the center of the second cathode through conductor 20A2 at an angle of 60 degrees or 120 degrees with the center of the first cathode through conductor 20A1 as a reference. In this case, when viewed from above in the thickness direction of the anode plate 11, it is sufficient that the smallest circle including the third cathode through conductor 20A3 exists on a straight line obtained by rotating a line segment connecting the center of the first cathode through conductor 20A1 and the center of the second cathode through conductor 20A2 at an angle of 60 degrees or 120 degrees with the center of the first cathode through conductor 20A1 as a reference.

[0101] Moreover, in Figure 5 In the example shown, one fourth cathode through conductor 20A4 exists.

[0102] When the cathode through conductor includes the fourth cathode through conductor 20A4, it is preferred that the fourth cathode through conductor 20A4 exists on a straight line obtained by rotating a line segment connecting the center of the first cathode through conductor 20A1 and the center of the second cathode through conductor 20A2 at an angle of 60 degrees or 120 degrees with respect to the center of the second cathode through conductor 20A2 when viewed from above in the thickness direction of the anode plate 11. In this case, it is sufficient that the smallest circle including the fourth cathode through conductor 20A4 exists on a straight line obtained by rotating a line segment connecting the center of the first cathode through conductor 20A1 and the center of the second cathode through conductor 20A2 at an angle of 60 degrees or 120 degrees with respect to the center of the second cathode through conductor 20A2 when viewed from above in the thickness direction of the anode plate 11.

[0103] like Figure 4 or Figure 5 As shown, in the case where the cathode through-conductor includes a third cathode through-conductor 20A3, it is preferred that, when viewed from above in the thickness direction of the anode plate 11, the third cathode through-conductor 20A3 exists on a straight line obtained by rotating a line segment connecting the center of the first cathode through-conductor 20A1 and the center of the second cathode through-conductor 20A2 at an angle of 60 degrees, 90 degrees, 120 degrees or 180 degrees with the center of the first cathode through-conductor 20A1 as a reference.

[0104] In addition, in the case where the cathode through-conductor includes a fourth cathode through-conductor 20A4, it is preferred that, when viewed from above in the thickness direction of the anode plate 11, the fourth cathode through-conductor 20A4 exists on a straight line obtained by rotating a line segment connecting the center of the first cathode through-conductor 20A1 and the center of the second cathode through-conductor 20A2 at an angle of 60 degrees, 90 degrees, 120 degrees or 180 degrees with respect to the center of the second cathode through-conductor 20A2.

[0105] Figure 6 is Figure 3 The illustrated configuration is a top view for explaining the configuration of the anode through conductor.

[0106] Preferably, if Figure 6 When viewed from the thickness direction of the anode plate 11, the center distance between the first cathode through conductor 20A1 and the first anode through conductor 20B1 is equal to the center distance between the first cathode through conductor 20A1 and the second anode through conductor 20B2.

[0107] The second anode through conductor 20B2 is a direct through conductor that penetrates the sealing layer 30 and the capacitor portion 10 in the thickness direction and is connected to the conductor wiring layer 40B at the end portion.

[0108] Preferably, if Figure 6 As shown, the anode through conductors further include at least one third anode through conductor 20B3. When viewed from the thickness direction of the anode plate 11, the center distance between the first anode through conductor 20B1 and the second anode through conductor 20B2 is equal to the center distance between the first anode through conductor 20B1 and the third anode through conductor 20B3. Figure 6 In the example shown, there are three third anode through conductors 20B3 .

[0109] When the anode through conductor includes the third anode through conductor 20B3, it is preferable that Figure 6 As shown, the third anode through conductor 20B3 exists on a straight line obtained by rotating a line segment connecting the center of the first anode through conductor 20B1 and the center of the second anode through conductor 20B2 at an angle of 90 degrees or 180 degrees with the center of the first anode through conductor 20B1 as a reference when viewed from above in the thickness direction of the anode plate 11. In this case, it is sufficient that the smallest circle including the third anode through conductor 20B3 exists on a straight line obtained by rotating a line segment connecting the center of the first anode through conductor 20B1 and the center of the second anode through conductor 20B2 at an angle of 90 degrees or 180 degrees with the center of the first anode through conductor 20B1 as a reference when viewed from above in the thickness direction of the anode plate 11.

[0110] Furthermore, the third anode through conductor 20B3 is a direct through conductor that penetrates the sealing layer 30 and the capacitor portion 10 in the thickness direction and is connected to the conductor wiring layer 40B at the end portion.

[0111] Furthermore, it is preferred that Figure 6 As shown, the anode through conductors further include at least one fourth anode through conductor 20B4. When viewed from the thickness direction of the anode plate 11, the center distance between the second anode through conductor 20B2 and the first anode through conductor 20B1 is equal to the center distance between the second anode through conductor 20B2 and the fourth anode through conductor 20B4. Figure 6 In the example shown, there are three fourth anode through conductors 20B4.

[0112] When the anode through conductor includes the fourth anode through conductor 20B4, it is preferred that the fourth anode through conductor 20B4 exists on a straight line obtained by rotating a line segment connecting the center of the first anode through conductor 20B1 and the center of the second anode through conductor 20B2 at an angle of 90 degrees or 180 degrees with respect to the center of the second anode through conductor 20B2 when viewed from above in the thickness direction of the anode plate 11. In this case, it is sufficient that the smallest circle including the fourth anode through conductor 20B4 exists on a straight line obtained by rotating a line segment connecting the center of the first anode through conductor 20B1 and the center of the second anode through conductor 20B2 at an angle of 90 degrees or 180 degrees with respect to the center of the second anode through conductor 20B2 when viewed from above in the thickness direction of the anode plate 11.

[0113] Furthermore, the fourth anode through conductor 20B4 is a direct through conductor that penetrates the sealing layer 30 and the capacitor portion 10 in the thickness direction and is connected to the conductor wiring layer 40B at the end portion.

[0114] Figure 7 is Figure 5 The illustrated configuration is a top view for explaining the configuration of the anode through conductor.

[0115] exist Figure 7 Also in the embodiment, it is preferable that the anode through conductor further includes a second anode through conductor 20B2.

[0116] exist Figure 7 In the example shown, one third anode through conductor 20B3 exists.

[0117] When the anode through conductor includes the third anode through conductor 20B3, it is preferable that Figure 7As shown, the third anode through conductor 20B3 exists on a straight line obtained by rotating a line segment connecting the center of the first anode through conductor 20B1 and the center of the second anode through conductor 20B2 at an angle of 60 degrees or 120 degrees with respect to the center of the first anode through conductor 20B1 when viewed from above in the thickness direction of the anode plate 11. In this case, it is sufficient that the smallest circle including the third anode through conductor 20B3 exists on a straight line obtained by rotating a line segment connecting the center of the first anode through conductor 20B1 and the center of the second anode through conductor 20B2 at an angle of 60 degrees or 120 degrees with respect to the center of the first anode through conductor 20B1 when viewed from above in the thickness direction of the anode plate 11.

[0118] Moreover, in Figure 7 In the example shown, one fourth anode through conductor 20B4 exists.

[0119] When the anode through conductor includes the fourth anode through conductor 20B4, it is preferred that the fourth anode through conductor 20B4 exists on a straight line obtained by rotating a line segment connecting the center of the first anode through conductor 20B1 and the center of the second anode through conductor 20B2 at an angle of 60 degrees or 120 degrees with respect to the center of the second anode through conductor 20B2 when viewed from above in the thickness direction of the anode plate 11. In this case, it is sufficient that the smallest circle including the fourth anode through conductor 20B4 exists on a straight line obtained by rotating a line segment connecting the center of the first anode through conductor 20B1 and the center of the second anode through conductor 20B2 at an angle of 60 degrees or 120 degrees with respect to the center of the second anode through conductor 20B2 when viewed from above in the thickness direction of the anode plate 11.

[0120] like Figure 6 or Figure 7 As shown, in the case where the anode through conductor includes a third anode through conductor 20B3, it is preferred that, when viewed from above in the thickness direction of the anode plate 11, the third anode through conductor 20B3 exists on a straight line obtained by rotating a line segment connecting the center of the first anode through conductor 20B1 and the center of the second anode through conductor 20B2 at an angle of 60 degrees, 90 degrees, 120 degrees or 180 degrees with the center of the first anode through conductor 20B1 as a reference.

[0121] In addition, in the case where the anode through conductor includes a fourth anode through conductor 20B4, it is preferred that, when viewed from above in the thickness direction of the anode plate 11, the fourth anode through conductor 20B4 exists on a straight line obtained by rotating a line segment connecting the center of the first anode through conductor 20B1 and the center of the second anode through conductor 20B2 at an angle of 60 degrees, 90 degrees, 120 degrees or 180 degrees with the center of the second anode through conductor 20B2 as a reference.

[0122] Figure 8 is Figure 4 The illustrated arrangement is a plan view for explaining the anode through conductor existing inside a circle centered on the center of the cathode through conductor.

[0123] Preferably, if Figure 8 As shown, when viewed from the thickness direction of the anode plate, the number of anode through conductors 20B existing inside a circle having the center distance between the first cathode through conductor 20A1 and the second cathode through conductor 20A2 as a radius and the center of the first cathode through conductor 20A1 as a center is the same as the number of anode through conductors 20B existing inside a circle having the center distance between the first cathode through conductor 20A1 and the second cathode through conductor 20A2 as a radius and the center of the second cathode through conductor 20A2 as a center. Figure 8 In the example shown, four anode through conductors 20B exist inside each circle.

[0124] like Figure 8 As shown, by arranging capacitors equally and in parallel in evenly arranged current paths, the noise removal effect can be improved.

[0125] In particular, it is preferred that, when viewed from above in the thickness direction of the anode plate, the difference between the total area of ​​the anode through-conductor 20B overlapping with a circle having the center-to-center distance between the first cathode through-conductor 20A1 and the second cathode through-conductor 20A2 as a radius and the total area of ​​the anode through-conductor 20B existing inside the circle having the center-to-center distance between the first cathode through-conductor 20A1 and the second cathode through-conductor 20A2 as a radius and the center of the second cathode through-conductor 20A2 as a center is within ±5%.

[0126] Fig. 9 is Figure 6 The illustrated arrangement is a plan view for explaining the cathode through conductor existing inside a circle centered on the center of the anode through conductor.

[0127] Preferably, if Fig. 9 As shown, when viewed from the thickness direction of the anode plate, the number of cathode through conductors 20A existing inside a circle having the center distance between the first anode through conductor 20B1 and the second anode through conductor 20B2 as a radius and the center of the first anode through conductor 20B1 as a center is the same as the number of cathode through conductors 20A existing inside a circle having the center distance between the first anode through conductor 20B1 and the second anode through conductor 20B2 as a radius and the center of the second anode through conductor 20B2 as a center. Fig. 9 In the example shown, four cathode through conductors 20A exist inside each circle.

[0128] In particular, it is preferred that, when viewed from above in the thickness direction of the anode plate, the difference between the total area of ​​the cathode through-conductors 20A overlapping with a circle having the center-to-center distance between the first anode through-conductor 20B1 and the second anode through-conductor 20B2 as a radius and the total area of ​​the cathode through-conductors 20A existing inside the circle having the center-to-center distance between the first anode through-conductor 20B1 and the second anode through-conductor 20B2 as a radius and the center of the second anode through-conductor 20B2 as a center is within ±5%.

[0129] Fig.10 It is a plan view schematically showing still another example of the arrangement of through conductors constituting the capacitor element according to the first embodiment of the present invention.

[0130] exist Fig.10 In the example shown, the through conductors are arranged hexagonally. Fig.10 In the embodiment, cathode through conductors and anode through conductors are alternately arranged two by two from the upper side toward the lower side.

[0131] exist Fig.10 In the example shown, Figure 5 Unlike the illustrated example, there are two third cathode through conductors 20A3 and two fourth cathode through conductors 20A4.

[0132] like Figure 4 or Fig.10 As shown, when the cathode through conductor includes the third cathode through conductor 20A3 and the fourth cathode through conductor 20A4, it is preferred that there are two or more of each of the third cathode through conductor 20A3 and the fourth cathode through conductor 20A4. In this case, the effect of reducing the equivalent series resistance and the equivalent series inductance and the effect of reducing the impedance difference between each current path can be improved. In addition, the effect of dispersing the heat generation of the capacitor element and increasing the current capacity can also be improved.

[0133] Fig.11 is Fig.10 The illustrated configuration is a top view for explaining the configuration of the anode through conductor.

[0134] exist Fig.11 In the example shown, Figure 7 Unlike the illustrated example, there are two third anode through conductors 20B3 and two fourth anode through conductors 20B4 .

[0135] like Figure 6 or Fig.11As shown in FIG. 1 , when the anode through conductor includes the third anode through conductor 20B3 and the fourth anode through conductor 20B4 , it is preferable that there are two or more of each of the third anode through conductor 20B3 and the fourth anode through conductor 20B4 .

[0136] Hereinafter, the detailed structure of capacitor element 1 will be described.

[0137] As the plane shape of the capacitor element 1 when viewed from the thickness direction, for example, a rectangle (square or rectangular), a quadrilateral other than a rectangle, a triangle, a pentagon, a hexagon or other polygon, a circle, an ellipse, a shape formed by combining these shapes, etc. In addition, the plane shape of the capacitor element 1 may also be an L-shape, a C-shape (Japanese U-shape), a step shape, etc.

[0138] Preferably, the anode plate 11 is formed of a so-called valve metal that exhibits a valve action. Examples of the valve metal include metal monomers such as aluminum, tantalum, niobium, titanium, and zirconium, or alloys containing at least one of these metals. Among them, aluminum or an aluminum alloy is preferred.

[0139] The shape of the anode plate 11 is preferably a flat plate, and more preferably a foil. Thus, in this specification, "plate-like" also includes "foil-like".

[0140] The anode plate 11 only needs to have the porous portion 11B on at least one main surface of the core 11A. That is, the anode plate 11 may have the porous portion 11B on only one main surface of the core 11A, or may have the porous portion 11B on both main surfaces of the core 11A. The porous portion 11B is preferably a porous layer formed on the surface of the core 11A, and more preferably an etching layer.

[0141] The thickness of the anode plate 11 before etching is preferably 60 μm or more and 200 μm or less. The thickness of the core 11A that is not etched after etching is preferably 15 μm or more and 70 μm or less. The thickness of the porous portion 11B is designed to match the required withstand voltage and electrostatic capacitance, but preferably, the total thickness of the porous portions 11B on both sides of the core 11A is 10 μm or more and 180 μm or less.

[0142] The pore size of the porous portion 11B is preferably 10 nm or more and 600 nm or less. The pore size of the porous portion 11B refers to the median diameter D50 measured by a mercury porosimeter. The pore size of the porous portion 11B can be controlled by adjusting various conditions during etching, for example.

[0143] The dielectric layer 13 provided on the surface of the porous portion 11B is porous reflecting the surface state of the porous portion 11B and has a fine concavoconvex surface shape. Preferably, the dielectric layer 13 is composed of an oxide film of the above-mentioned valve-acting metal. For example, when an aluminum foil is used as the anode plate 11, the surface of the aluminum foil is subjected to an anodic oxidation treatment (also called chemical conversion treatment) in an aqueous solution containing ammonium adipate or the like, so that the dielectric layer 13 composed of an oxide film can be formed.

[0144] The thickness of the dielectric layer 13 is designed to match the required withstand voltage and electrostatic capacitance, but is preferably not less than 10 nm and not more than 100 nm.

[0145] In the case where the cathode layer 12 includes a solid electrolyte layer, as a material constituting the solid electrolyte layer, for example, conductive polymers such as polypyrroles, polythiophenes, and polyanilines can be cited. Among them, polythiophenes are preferred, and poly (3,4-ethylenedioxythiophene) called PEDOT is particularly preferred. In addition, the above-mentioned conductive polymer may also contain dopants such as polystyrene sulfonic acid (PSS). In addition, it is preferred that the solid electrolyte layer includes an inner layer filling the pores (recesses) of the dielectric layer 13 and an outer layer covering the dielectric layer 13.

[0146] The thickness of the solid electrolyte layer from the surface of porous portion 11B is preferably 2 μm or more and 20 μm or less.

[0147] The solid electrolyte layer is formed, for example, by a method of forming a polymer film of poly(3,4-ethylenedioxythiophene) or the like on the surface of the dielectric layer 13 using a treatment solution containing a monomer such as 3,4-ethylenedioxythiophene, or by a method of applying a dispersion of a polymer such as poly(3,4-ethylenedioxythiophene) or the like on the surface of the dielectric layer 13 and drying it.

[0148] The solid electrolyte layer can be formed in a predetermined region by applying the above-mentioned treatment solution or dispersion solution to the surface of the dielectric layer 13 by a method such as sponge transfer, screen printing, dispenser coating, or inkjet printing.

[0149] When the cathode layer 12 includes a conductor layer, the conductor layer includes at least one of a conductive resin layer and a metal layer. The conductor layer may be only a conductive resin layer or only a metal layer. Preferably, the conductor layer covers the entire surface of the solid electrolyte layer.

[0150] Examples of the conductive resin layer include a conductive adhesive layer containing at least one conductive filler selected from the group consisting of a silver filler, a copper filler, a nickel filler, and a carbon filler.

[0151] As the metal layer, for example, metal plating, metal foil, etc. can be cited. Preferably, the metal layer is formed of at least one metal selected from the group consisting of nickel, copper, silver, and alloys containing these metals as main components. In addition, the "main component" refers to the element component with the largest weight ratio.

[0152] The conductor layer includes, for example, a carbon layer provided on the surface of the solid electrolyte layer and a copper layer provided on the surface of the carbon layer.

[0153] The carbon layer is provided to electrically and mechanically connect the solid electrolyte layer to the copper layer. The carbon layer can be formed in a predetermined area by applying carbon paste to the surface of the solid electrolyte layer by sponge transfer, screen printing, dispenser coating, inkjet printing, etc. In addition, it is preferred that the carbon layer is laminated with the copper layer of the next process in a sticky state before drying. The thickness of the carbon layer is preferably greater than 2 μm and less than 20 μm.

[0154] The copper layer can be formed in a predetermined region by applying a copper paste to the surface of the carbon layer by sponge transfer, screen printing, spray coating, dispenser coating, inkjet printing, etc. The thickness of the copper layer is preferably 2 μm or more and 20 μm or less.

[0155] The cathode through conductor 20A as a direct through conductor in the through conductor 20 is formed, for example, as follows. First, a first through hole is formed that penetrates the capacitor portion 10 in the thickness direction by drilling, laser processing, or the like. Next, an insulating material such as a sealing layer 30 is filled in the first through hole. A second through hole is formed by drilling, laser processing, or the like on the portion filled with the insulating material. At this time, by making the diameter of the second through hole smaller than the diameter of the first through hole filled with the insulating material, a state is set in which the insulating material exists between the inner wall surface of the first through hole and the inner wall surface of the second through hole in the planar direction. Thereafter, the inner wall surface of the second through hole is metallized using a metal material containing a low-resistance metal such as copper, gold, or silver, thereby forming the cathode through conductor 20A as a direct through conductor. When forming the cathode through conductor 20A, for example, the inner wall surface of the second through hole is metalized by electroless copper plating, electrolytic copper plating, etc., so that processing becomes easy. In addition, as for the method of forming the cathode through conductor 20A, in addition to the method of metalizing the inner wall surface of the second through hole, a method of filling the second through hole with a metal material, a composite material of metal and resin, etc. may be used.

[0156] The anode through conductor 20B as a direct through conductor among the through conductors 20 is formed, for example, as follows. First, a third through hole is formed that penetrates the sealing layer 30 and the capacitor unit 10 in the thickness direction by drilling, laser processing, or the like. Then, the inner wall surface of the third through hole is metallized using a metal material containing a metal with low resistance such as copper, gold, or silver, thereby forming the anode through conductor 20B as a direct through conductor. When forming the anode through conductor 20B, for example, the inner wall surface of the third through hole is metallized using a process such as an electroless copper plating process or an electrolytic copper plating process, thereby facilitating the processing. In addition, as for the method of forming the anode through conductor 20B, in addition to the method of metallizing the inner wall surface of the third through hole, a method of filling the third through hole with a metal material, a composite material of metal and resin, or the like may also be used.

[0157] When the resin filling portion 25A is provided inside the cathode through conductor 20A, the thermal expansion coefficient of the material constituting the resin filling portion 25A may be larger, smaller, or the same as the thermal expansion coefficient of the material constituting the cathode through conductor 20A (eg, copper).

[0158] When the resin filling portion 25B is provided inside the anode through conductor 20B, the thermal expansion coefficient of the material constituting the resin filling portion 25B may be larger, smaller, or the same as the thermal expansion coefficient of the material constituting the anode through conductor 20B (eg, copper).

[0159] The sealing layer 30 is made of an insulating material. In this case, it is preferable that the sealing layer 30 is made of an insulating resin.

[0160] Examples of the insulating resin constituting the sealing layer 30 include epoxy resin and phenol resin.

[0161] Preferably, the sealing layer 30 further contains a filler.

[0162] Examples of the filler contained in the sealing layer 30 include inorganic fillers such as silica particles and alumina particles.

[0163] The sealing layer 30 may be composed of only one layer or may be composed of two or more layers. When the sealing layer 30 is composed of two or more layers, the materials constituting the respective layers may be the same or different.

[0164] The sealing layer 30 is formed so as to seal the capacitor unit 10 by, for example, a method of thermocompression bonding an insulating resin sheet, a method of applying an insulating resin paste and then thermally curing the paste, or the like.

[0165] A layer such as a stress relaxation layer or a moisture-proof film may be provided between the capacitor unit 10 and the sealing layer 30 .

[0166] As a constituent material of the conductive wiring layer 40A, for example, there can be mentioned a metal material containing a low-resistance metal such as silver, gold, copper, etc. In this case, the conductive wiring layer 40A is formed by plating the surface of the cathode through conductor 20A, for example.

[0167] In order to improve the close fit between the conductor wiring layer 40A and other components, here, in order to improve the close fit between the conductor wiring layer 40A and the cathode through conductor 20A, as the constituent material of the conductor wiring layer 40A, a mixed material of at least one conductive filler selected from the group consisting of silver filler, copper filler, nickel filler and carbon filler and resin can be used.

[0168] Examples of the constituent material of the conductive wiring layer 40B include metal materials containing low-resistance metals such as silver, gold, and copper. In this case, the conductive wiring layer 40B is formed by, for example, plating the surface of the anode through conductor 20B.

[0169] In order to improve the close fit between the conductor wiring layer 40B and other components, here, in order to improve the close fit between the conductor wiring layer 40B and the anode through conductor 20B, as the constituent material of the conductor wiring layer 40B, a mixed material of at least one conductive filler selected from the group consisting of silver filler, copper filler, nickel filler and carbon filler and resin can be used.

[0170] It is preferable that the constituent materials of the conductive wiring layers 40A and 40B are the same in at least the type, but they may be different from each other.

[0171] Examples of the constituent material of via conductor 45 include metal materials containing a low-resistance metal such as silver, gold, or copper.

[0172] Via conductor 45 is formed, for example, by plating the inner wall surface of a through hole penetrating sealing layer 30 in the thickness direction with the above-mentioned metal material or by filling the through hole with a conductive paste and then performing a heat treatment.

[0173] exist Figure 1 Although not shown, the capacitor unit 10 may further include an insulating layer provided around the through conductor 20 on at least one main surface of the anode plate 11 .

[0174] In addition, Figure 1 Although not shown, the capacitor unit 10 may further include an insulating layer provided on at least one main surface of the anode plate 11 so as to surround the cathode layer 12. By surrounding the cathode layer 12 with the insulating layer, insulation between the anode plate 11 and the cathode layer 12 is ensured, thereby preventing a short circuit therebetween.

[0175] The insulating layer is made of an insulating material. In this case, it is preferable that the insulating layer is made of an insulating resin.

[0176] Examples of the insulating resin constituting the insulating layer include polyphenylsulfone resin, polyethersulfone resin, cyanate resin, fluororesin (tetrafluoroethylene, tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer, etc.), polyimide resin, polyamideimide resin, epoxy resin, and derivatives or precursors thereof.

[0177] The insulating layer may be made of the same resin as the sealing layer 30. If the insulating layer contains an inorganic filler different from the sealing layer 30, the effective capacitance of the capacitor unit 10 may be adversely affected. Therefore, the insulating layer is preferably made of a single resin.

[0178] The insulating layer can be formed in a predetermined region by applying a masking material such as a composition containing an insulating resin to the surface of the porous portion 11B by a method such as sponge transfer, screen printing, dispenser coating, or inkjet printing.

[0179] The insulating layer may be formed in the porous portion 11B before or after the dielectric layer 13 is formed.

[0180] [Second embodiment]

[0181] In the capacitor element according to the second embodiment of the present invention, the through-conductor further includes an indirect through-conductor.

[0182] Fig.12 It is a cross-sectional view schematically showing an example of a capacitor element according to a second embodiment of the present invention. Fig.13 is with Fig.12 Cross-sectional views at different locations. Fig.14A It is along Fig.12 Top view of line A and line A'. Fig. 14B It is along Fig.12 Top view of line B and line B'. Fig. 14C It is along Fig.12 Top view of the C line and C' line. Fig.14D It is along Fig.12 Top view of line D and line D'. Fig.14E It is along Fig.12 Top view of line E and line E'. Fig.14F It is along Fig.12 Top view of the F line and F' line. Figure 14G It is along Fig.12 A top view of the G line. In addition, Fig.12 It is along Fig.14A The cross-sectional view of line II, Fig.13 It is along Fig.14A Cross-sectional view along line II-II.

[0183] Fig.12 and Fig.13 The capacitor element 2 shown includes a capacitor portion 10, a through conductor 20, a sealing layer 30, conductor wiring layers 40A and 40B, and an outer insulating layer 50. Fig.12 and Fig.13 In the example shown, the capacitor element 2 further includes conductor wiring layers 40C and 40D.

[0184] The capacitor unit 10 includes: an anode plate 11 having a porous portion 11B on at least one main surface of a core portion 11A; a dielectric layer 13 provided on the surface of the porous portion 11B; and a cathode layer 12 provided on the surface of the dielectric layer 13. Thus, the capacitor unit 10 constitutes an electrolytic capacitor. Fig.12 and Fig.13 In the example shown, the anode plate 11 has the porous portion 11B on both main surfaces of the core portion 11A, but the porous portion 11B may be formed on only one main surface of the core portion 11A.

[0185] Cathode layer 12 includes, for example, a solid electrolyte layer provided on the surface of dielectric layer 13. Preferably, cathode layer 12 further includes a conductor layer provided on the surface of the solid electrolyte layer. When cathode layer 12 includes a solid electrolyte layer, capacitor unit 10 constitutes a solid electrolytic capacitor.

[0186] The through conductor 20 has a thickness direction (in Fig.12 and Fig.13 The dielectric layer 13 and the anode plate 11 are penetrated in the vertical direction.

[0187] The through conductors 20 include cathode through conductors 20A and 20C electrically connected to the cathode layer 12 , and anode through conductors 20B and 20D electrically connected to the anode plate 11 .

[0188] exist Fig.13 In the illustrated example, a plurality of cathode through conductors 20A are provided so as to penetrate the sealing layer 30 and the capacitor unit 10 in the thickness direction. Each cathode through conductor 20A is connected to a conductor wiring layer 40A provided on the surface of the sealing layer 30 at an end portion.

[0189] Preferably, if Fig.14E As shown, the cathode through conductor 20A exists in the cathode layer 12 when viewed in a plan view in the thickness direction of the anode plate 11 .

[0190] exist Fig.12In the illustrated example, a plurality of anode through conductors 20B are provided so as to penetrate the sealing layer 30 and the capacitor unit 10 in the thickness direction. Each anode through conductor 20B is connected to a conductor wiring layer 40B provided on the surface of the sealing layer 30 at an end portion.

[0191] Preferably, if Fig.14E As shown, the anode through conductor 20B exists in the cathode layer 12 when viewed in a plan view in the thickness direction of the anode plate 11 .

[0192] Similar to the first embodiment, the cathode through conductor 20A and the anode through conductor 20B are direct through conductors.

[0193] exist Fig.13 In the example shown, a plurality of cathode through conductors 20C are provided so as to penetrate the outer insulating layer 50, the sealing layer 30, and the capacitor portion 10 in the thickness direction. Each cathode through conductor 20C is connected at the side surface to the conductor wiring layer 40A provided on the surface of the sealing layer 30. Furthermore, each cathode through conductor 20C is connected at the end portion to the conductor wiring layer 40C provided on the surface of the outer insulating layer 50.

[0194] Preferably, if Fig.14E As shown, the cathode through conductor 20C exists in the cathode layer 12 when viewed in a plan view in the thickness direction of the anode plate 11 .

[0195] The cathode through conductor 20C only needs to be provided on at least the inner wall surface of the through hole that penetrates the outer insulating layer 50, the sealing layer 30, and the capacitor unit 10 in the thickness direction. That is, the cathode through conductor 20C may be provided only on the inner wall surface of the through hole, or may be provided throughout the interior of the through hole. In the case where the cathode through conductor 20C is provided only on the inner wall surface of the through hole, the space surrounded by the cathode through conductor 20C in the through hole may be filled with a material containing resin. That is, a resin filling portion 25C may be provided inside the cathode through conductor 20C.

[0196] like Fig.13 As shown, an insulating material such as the sealing layer 30 is filled between the through hole penetrating the sealing layer 30 and the capacitor unit 10 in the thickness direction and the cathode through conductor 20C.

[0197] exist Fig.12 In the example shown, a plurality of anode through conductors 20D are provided so as to penetrate the outer insulating layer 50, the sealing layer 30, and the capacitor unit 10 in the thickness direction. Each anode through conductor 20D is connected at a side surface to a conductor wiring layer 40B provided on the surface of the sealing layer 30. Furthermore, each anode through conductor 20D is connected at an end portion to a conductor wiring layer 40D provided on the surface of the outer insulating layer 50.

[0198] Preferably, if Fig.14E As shown, the anode through conductor 20D exists in the cathode layer 12 when viewed in a plan view in the thickness direction of the anode plate 11 .

[0199] The anode through conductor 20D only needs to be provided on at least the inner wall surface of the through hole that penetrates the outer insulating layer 50, the sealing layer 30, and the capacitor unit 10 in the thickness direction. That is, the anode through conductor 20D may be provided only on the inner wall surface of the through hole, or may be provided throughout the interior of the through hole. In the case where the anode through conductor 20D is provided only on the inner wall surface of the through hole, the space surrounded by the anode through conductor 20D in the through hole may be filled with a material containing resin. That is, the resin filling portion 25D may be provided inside the anode through conductor 20D.

[0200] Preferably, if Fig.12 As shown, an insulating material such as the sealing layer 30 is filled between the through hole penetrating the sealing layer 30 and the capacitor unit 10 in the thickness direction and the anode through conductor 20D.

[0201] In this specification, the through conductor 20 that penetrates the outer insulating layer 50, the sealing layer 30, and the capacitor unit 10 in the thickness direction and is connected to the conductor wiring layer 40A or the conductor wiring layer 40B at the side is referred to as an "indirect through conductor". Therefore, the cathode through conductor 20C and the anode through conductor 20D are indirect through conductors. In addition, the indirect through conductor is not directly connected to the anode plate 11.

[0202] The sealing layer 30 is provided so as to cover the capacitor unit 10. The capacitor unit 10 is protected by the sealing layer 30.

[0203] Preferably, the sealing layer 30 is provided on two main surfaces of the capacitor unit 10 that are opposed to each other in the thickness direction.

[0204] The conductor wiring layers 40A and 40B are provided on the surface of the sealing layer 30 , and are electrically connected to either the cathode through conductor 20A or the anode through conductor 20B.

[0205] The conductor wiring layer 40A is electrically connected to the cathode through conductor 20A. Fig.13 In the illustrated example, the conductor wiring layer 40A is provided on the surface of the cathode through conductor 20A.

[0206] Specifically, in Fig.13 In the illustrated example, the conductive wiring layer 40A is electrically connected to the cathode layer 12 via a via conductor 45 that penetrates the sealing layer 30 .

[0207] The conductor wiring layer 40B is electrically connected to the anode through conductor 20B. Fig.12In the illustrated example, the conductor wiring layer 40B is provided on the surface of the anode through conductor 20B.

[0208] Specifically, in Fig.12 In the illustrated example, the conductor wiring layer 40B is electrically connected to the anode plate 11 via the anode through conductor 20B.

[0209] The conductor wiring layers 40C and 40D are provided on the surface of the outer insulating layer 50 , and are electrically connected to either the cathode through conductor 20C or the anode through conductor 20D.

[0210] The conductor wiring layer 40C is electrically connected to the cathode through conductor 20C. Fig.13 In the illustrated example, the conductor wiring layer 40C is provided on the surface of the cathode through conductor 20C.

[0211] Specifically, in Fig.13 In the illustrated example, the conductive wiring layer 40C is electrically connected to the cathode layer 12 via the cathode through conductor 20C, the conductive wiring layer 40A, and the via conductor 45 .

[0212] The conductor wiring layer 40D is electrically connected to the anode through conductor 20D. Fig.12 In the illustrated example, the conductor wiring layer 40D is provided on the surface of the anode through conductor 20D.

[0213] Specifically, in Fig.12 In the illustrated example, the conductor wiring layer 40D is electrically connected to the anode plate 11 via the anode through conductor 20D, the conductor wiring layer 40B, and the anode through conductor 20B.

[0214] Fig.15A It is a plan view schematically showing an example of arrangement of through conductors constituting a capacitor element according to a second embodiment of the present invention. Fig. 15B It means from Fig.15A A plan view showing a state where the indirect through-conductor is removed.

[0215] exist Fig.15A In the example shown, the through conductors are arranged in a square. Fig. 15B As shown in FIG. 1 , cathode through conductors as direct through conductors and anode through conductors as direct through conductors are alternately arranged from the upper side to the lower side. Fig.15A In the figure, direct through conductors and indirect through conductors are alternately arranged from left to right, cathode through conductors and anode through conductors are alternately arranged, and cathode through conductors as indirect through conductors and anode through conductors as indirect through conductors are alternately arranged from top to bottom.

[0216] exist Fig. 15BIn the embodiment, the cathode through conductor includes a first cathode through conductor 20A1 and a second cathode through conductor 20A2, and the anode through conductor includes a first anode through conductor 20B1. The first cathode through conductor 20A1, the second cathode through conductor 20A2, and the first anode through conductor 20B1 are direct through conductors that penetrate the sealing layer 30 and the capacitor unit 10 in the thickness direction and are connected to the conductor wiring layer 40A or the conductor wiring layer 40B at the end.

[0217] It can also be, Fig. 15B As shown, the cathode through conductor further includes at least one third cathode through conductor 20A3. The third cathode through conductor 20A3 is a direct through conductor that penetrates the sealing layer 30 and the capacitor portion 10 in the thickness direction and is connected to the conductor wiring layer 40A at the end.

[0218] Moreover, it can also be, Fig. 15B As shown, the cathode through conductor further includes at least one fourth cathode through conductor 20A4. The fourth cathode through conductor 20A4 is a direct through conductor that penetrates the sealing layer 30 and the capacitor portion 10 in the thickness direction and is connected to the conductor wiring layer 40A at the end.

[0219] like Fig.15A As shown, the cathode through conductors further include at least one fifth cathode through conductor 20C5. The fifth cathode through conductor 20C5 is an indirect through conductor that penetrates the outer insulating layer 50, the sealing layer 30, and the capacitor unit 10 in the thickness direction and is connected to the conductor wiring layer 40A at the side surface.

[0220] When viewed in plan from the thickness direction of the anode plate 11 , the center-to-center distance between the fifth cathode through conductor 20C5 and the first cathode through conductor 20A1 is equal to the center-to-center distance between the fifth cathode through conductor 20C5 and the second cathode through conductor 20A2 .

[0221] In the capacitor element of the second embodiment of the present invention, by increasing the current path by using an indirect through conductor, the effect described in the first embodiment of the present invention can be further improved. In addition, when the metal material of the anode plate is different from the metal material of the conductor wiring layer, it is difficult to plate both the anode plate and the conductor wiring layer and form a through conductor. On the other hand, the indirect through conductor that is not directly connected to the anode plate can be formed even if the anode plate is not plated, so it is not easily restricted by such a formation method. Therefore, by setting the capacitor element of the second embodiment of the present invention to include an indirect through conductor, it is possible to seek to improve the reliability of the conductor connection and the design freedom.

[0222] Preferably, if Fig.15AAs shown, the cathode through conductors further include at least one sixth cathode through conductor 20C6. The sixth cathode through conductor 20C6 is an indirect through conductor that penetrates the outer insulating layer 50, the sealing layer 30, and the capacitor unit 10 in the thickness direction and is connected to the conductor wiring layer 40A at the side surface.

[0223] When viewed from the thickness direction of the anode plate 11, the center distance between the first cathode through conductor 20A1 and the fifth cathode through conductor 20C5 is equal to the center distance between the first cathode through conductor 20A1 and the sixth cathode through conductor 20C6. Fig.15A In the illustrated example, the center-to-center distance between the first cathode through conductor 20A1 and the second cathode through conductor 20A2 is equal to the center-to-center distance between the fifth cathode through conductor 20C5 and the sixth cathode through conductor 20C6.

[0224] Fig.16A It is a plan view schematically showing another example of the arrangement of through conductors constituting the capacitor element according to the second embodiment of the present invention. Fig. 16B It means from Fig.16A A plan view showing a state where the indirect through-conductor is removed.

[0225] exist Fig.16A In the example shown, the through conductors are arranged hexagonally. Fig. 16B As shown, the rows of cathode through conductors as direct through conductors arranged from the left to the right and the rows of anode through conductors as direct through conductors arranged from the left to the right are arranged alternately from the top to the bottom. Fig.16A In the embodiment, a cathode through-conductor as an indirect through-conductor is arranged on the upper side of a cathode through-conductor as a direct through-conductor, and an anode through-conductor as an indirect through-conductor is arranged on the lower side of the cathode through-conductor as the direct through-conductor. In addition, a cathode through-conductor as an indirect through-conductor is arranged on the upper side of the anode through-conductor as the direct through-conductor, and an anode through-conductor as an indirect through-conductor is arranged on the lower side of the anode through-conductor as the direct through-conductor.

[0226] exist Fig.16A and Fig. 16B In the example shown, although the arrangement of the through conductors is different, the same Fig.15A and Fig. 15B Same effect.

[0227] Fig.17 It is a plan view schematically showing still another example of the arrangement of through conductors constituting the capacitor element according to the second embodiment of the present invention.

[0228] exist Fig.17In the example shown, when viewed from above in the thickness direction of the anode plate 11, the center distance between the first cathode through-conductor 20A1 and the fifth cathode through-conductor 20C5 is equal to the center distance between the first cathode through-conductor 20A1 and the sixth cathode through-conductor 20C6, and the center distance between the first cathode through-conductor 20A1 and the second cathode through-conductor 20A2 is different from the center distance between the fifth cathode through-conductor 20C5 and the sixth cathode through-conductor 20C6.

[0229] Fig.18A is Fig.15A The illustrated configuration is a top view for explaining the configuration of the anode through conductor. Fig.18B It means from Fig.18A A plan view showing a state where the indirect through-conductor is removed.

[0230] exist Fig.18B In the embodiment, the cathode through conductor includes a first cathode through conductor 20A1 and a second cathode through conductor 20A2, and the anode through conductor includes a first anode through conductor 20B1 and a second anode through conductor 20B2. The first cathode through conductor 20A1, the second cathode through conductor 20A2, the first anode through conductor 20B1, and the second anode through conductor 20B2 are direct through conductors that penetrate the sealing layer 30 and the capacitor portion 10 in the thickness direction and are connected to the conductor wiring layer 40A or the conductor wiring layer 40B at the end.

[0231] It can also be, Fig.18B As shown, the anode through conductor further includes at least one third anode through conductor 20B3. The third anode through conductor 20B3 is a direct through conductor that penetrates the sealing layer 30 and the capacitor unit 10 in the thickness direction and is connected to the conductor wiring layer 40A at the end.

[0232] Moreover, it can also be, Fig.18B As shown, the anode through conductor further includes at least one fourth anode through conductor 20B4. The fourth anode through conductor 20B4 is a direct through conductor that penetrates the sealing layer 30 and the capacitor unit 10 in the thickness direction and is connected to the conductor wiring layer 40A at the end.

[0233] like Fig.18A As shown, the anode through conductor further includes at least one fifth anode through conductor 20D5. The fifth anode through conductor 20D5 is an indirect through conductor that penetrates the outer insulating layer 50, the sealing layer 30, and the capacitor unit 10 in the thickness direction and is connected to the conductor wiring layer 40A at the side surface.

[0234] When viewed in plan from the thickness direction of the anode plate 11 , the center-to-center distance between the fifth anode through conductor 20D5 and the first anode through conductor 20B1 is equal to the center-to-center distance between the fifth anode through conductor 20D5 and the second anode through conductor 20B2 .

[0235] Preferably, if Fig.18A As shown, the anode through conductor further includes at least one sixth anode through conductor 20D6. The sixth anode through conductor 20D6 is an indirect through conductor that penetrates the outer insulating layer 50, the sealing layer 30, and the capacitor unit 10 in the thickness direction and is connected to the conductor wiring layer 40A at the side surface.

[0236] When viewed in plan from the thickness direction of the anode plate 11 , the center-to-center distance between the first anode through conductor 20B1 and the fifth anode through conductor 20D5 is equal to the center-to-center distance between the first anode through conductor 20B1 and the sixth anode through conductor 20D6 . Fig.18A In the illustrated example, the distance between the centers of the first anode through conductor 20B1 and the second anode through conductor 20B2 is equal to the distance between the centers of the fifth anode through conductor 20D5 and the sixth anode through conductor 20D6 .

[0237] Fig.19A is Fig.16A The illustrated configuration is a top view for explaining the configuration of the anode through conductor. Fig.19B It means from Fig.19A A plan view showing a state where the indirect through-conductor is removed.

[0238] exist Fig.19A and Fig.19B In the example shown, although the arrangement of the through conductors is different, the same Fig.18A and Fig.18B Same effect.

[0239] Fig. 20 is Fig.17 The illustrated configuration is a top view for explaining the configuration of the anode through conductor.

[0240] exist Fig. 20 In the example shown, when viewed from above in the thickness direction of the anode plate 11, the center distance between the first anode through-conductor 20B1 and the fifth anode through-conductor 20D5 is equal to the center distance between the first anode through-conductor 20B1 and the sixth anode through-conductor 20D6, and the center distance between the first anode through-conductor 20B1 and the second anode through-conductor 20B2 is different from the center distance between the fifth anode through-conductor 20D5 and the sixth anode through-conductor 20D6.

[0241] Hereinafter, the detailed structure of capacitor element 2 will be described. In addition, the description about the structure common to capacitor element 1 will be omitted.

[0242] The cathode through conductor 20C and the anode through conductor 20D as indirect through conductors in the through conductor 20 are formed, for example, as follows. First, a fourth through hole is formed that penetrates the outer insulating layer 50, the sealing layer 30, and the capacitor portion 10 in the thickness direction by drilling, laser processing, or the like. Then, the cathode through conductor 20C and the anode through conductor 20D as indirect through conductors are formed by metallizing the inner wall surface of the fourth through hole with a metal material containing a metal with low resistance such as copper, gold, or silver. When forming the cathode through conductor 20C and the anode through conductor 20D, for example, the inner wall surface of the fourth through hole is metallized by a process such as an electroless copper plating process or an electrolytic copper plating process, thereby facilitating the processing. In addition, as for the method of forming the cathode through conductor 20C and the anode through conductor 20D, in addition to the method of metallizing the inner wall surface of the fourth through hole, a method of filling the fourth through hole with a metal material, a composite material of metal and resin, or the like may be used.

[0243] When the resin filling portion 25C is provided inside the cathode through conductor 20C, the thermal expansion coefficient of the material constituting the resin filling portion 25C may be larger, smaller, or the same as the thermal expansion coefficient of the material constituting the cathode through conductor 20C (eg, copper).

[0244] When the resin filling portion 25D is provided inside the anode through conductor 20D, the thermal expansion coefficient of the material constituting the resin filling portion 25D may be larger, smaller, or the same as the thermal expansion coefficient of the material constituting the anode through conductor 20D (eg, copper).

[0245] As a constituent material of the conductive wiring layer 40C, for example, there can be mentioned a metal material containing a metal with low resistance such as silver, gold, copper, etc. In this case, the conductive wiring layer 40C is formed by plating the surface of the cathode through conductor 20C, for example.

[0246] In order to improve the close fit between the conductor wiring layer 40C and other components, here, in order to improve the close fit between the conductor wiring layer 40C and the cathode through conductor 20C, as the constituent material of the conductor wiring layer 40C, a mixed material of at least one conductive filler selected from the group consisting of silver filler, copper filler, nickel filler and carbon filler and resin can be used.

[0247] As a constituent material of the conductive wiring layer 40D, for example, there can be mentioned a metal material containing a low-resistance metal such as silver, gold, copper, etc. In this case, the conductive wiring layer 40D is formed by plating the surface of the anode through conductor 20D, for example.

[0248] In order to improve the close fit between the conductor wiring layer 40D and other components, here, in order to improve the close fit between the conductor wiring layer 40D and the anode through conductor 20D, as the constituent material of the conductor wiring layer 40D, a mixed material of at least one conductive filler selected from the group consisting of silver filler, copper filler, nickel filler and carbon filler and resin can be used.

[0249] It is preferable that the constituent materials of the conductive wiring layers 40C and 40D are the same in at least the type, but they may be different from each other.

[0250] The outer insulating layer 50 is made of an insulating material.

[0251] The outer insulating layer 50 is formed, for example, in a cavity previously provided in the substrate. Figure 1 The capacitor element 1 shown is formed by being embedded with an insulating resin.

[0252] Alternatively, the outer insulating layer 50 may also be provided by Figure 1 The capacitor element 1 shown is formed by attaching a cured prepreg via an adhesive layer.

[0253] The outer insulating layer 50 may be composed of only one layer or may be composed of two or more layers. When the outer insulating layer 50 is composed of two or more layers, the materials constituting the layers may be the same or different.

[0254] The outer insulating layer 50 may be provided on only one surface in the thickness direction, or may be provided on both surfaces.

[0255] Fig.21 It is a cross-sectional view schematically showing a modified example of the outer insulating layer.

[0256] It can also be, Fig.21 When the outer insulating layer 50 is provided on both surfaces in the thickness direction as in the capacitor element 3 shown in FIG. 1 , the thickness of the outer insulating layer 50 provided on each surface is different.

[0257] The capacitor element of the present invention is not limited to the above-described embodiment, and various applications and modifications can be made within the scope of the present invention regarding the structure of the capacitor element, the manufacturing conditions of the capacitor element, and the like.

[0258] For example, the capacitor element of the present invention may include a plurality of capacitor portions.

[0259] Fig. 22 It is a cross-sectional view schematically showing an example of the position of a capacitor element including a plurality of capacitor portions.

[0260] It can also be, Fig. 22As in the capacitor element 4 shown, a plurality of capacitor portions 10 are stacked in the thickness direction with outer insulating layers 50 interposed therebetween.

[0261] When the capacitor element of the present invention includes a plurality of capacitor portions, the plurality of capacitor portions may be arranged so as to be stacked in the thickness direction, may be arranged so as to be aligned on a plane, or may be arranged in combination of both.

[0262] When the capacitor element of the present invention includes a plurality of capacitor portions, the number of capacitor portions is not particularly limited as long as it is two or more. The sizes and shapes of the capacitor portions may be the same or may be partially or completely different.

[0263] When the capacitor element of the present invention includes a plurality of capacitor portions, the capacitor portions preferably have the same structure, but may include capacitor portions having different structures.

[0264] The capacitor element of the present invention can be appropriately used as a constituent material of a composite electronic component. Such a composite electronic component includes, for example: the capacitor element of the present invention; an external electrode (for example, a conductor wiring layer) disposed outside the sealing layer of the capacitor element and electrically connected to the anode plate and cathode layer of the capacitor element, respectively; and an electronic component connected to the external electrode.

[0265] In the composite electronic component, the electronic component connected to the external electrode may be either a passive element or an active element. Both the passive element and the active element may be connected to the external electrode, or either the passive element or the active element may be connected to the external electrode. In addition, a composite of the passive element and the active element may be connected to the external electrode.

[0266] Examples of passive components include inductors, etc. Examples of active components include memories, GPUs (Graphical Processing Units), CPUs (Central Processing Units), MPUs (Micro Processing Units), and PMICs (Power Management ICs).

[0267] The capacitor element of the present invention has a sheet-like shape as a whole. Therefore, in the composite electronic component, the capacitor element can be treated like a mounting substrate, and the electronic component can be mounted on the capacitor element. Moreover, by setting the shape of the electronic component mounted on the capacitor element to be sheet-like, the capacitor element and the electronic component can be connected in the thickness direction via a through-hole conductor that penetrates each electronic component in the thickness direction. As a result, active components and passive components can be configured as batch modules.

[0268] For example, the capacitor element of the present invention can be electrically connected between a voltage regulator including a semiconductor active element and a load to which the converted DC voltage is supplied, thereby forming a switching regulator.

[0269] In the composite electronic component, a circuit layer may be formed on any surface of a capacitor matrix sheet in which a plurality of capacitor elements of the present invention are further arranged, and a passive element or an active element may be connected thereto.

[0270] Alternatively, the capacitor element of the present invention may be placed in a cavity previously provided in a substrate, embedded in a resin, and then a circuit layer may be formed on the resin. Alternatively, other electronic components (passive or active) may be mounted in other cavities of the substrate.

[0271] Alternatively, the capacitor element of the present invention may be mounted on a smooth carrier such as a wafer or glass, and a circuit layer may be formed after the outer layer is formed with a resin, and then connected to a passive element or an active element.

[0272] The following contents are disclosed in this specification.

[0273] <1>

[0274] A capacitor element, wherein:

[0275] The capacitor element comprises:

[0276] A capacitor portion comprising an anode plate, a dielectric layer and a cathode layer, wherein the anode plate has a porous portion on at least one main surface of a core portion, the dielectric layer is provided on a surface of the porous portion, and the cathode layer is provided on a surface of the dielectric layer; and

[0277] a through conductor that penetrates the dielectric layer and the anode plate in a thickness direction,

[0278] The through conductors include a cathode through conductor electrically connected to the cathode layer and an anode through conductor electrically connected to the anode plate.

[0279] The cathode through conductor includes a first cathode through conductor and a second cathode through conductor.

[0280] The anode through conductor includes a first anode through conductor.

[0281] When viewed in plan from the thickness direction of the anode plate, a center-to-center distance between the first anode through conductor and the first cathode through conductor is equal to a center-to-center distance between the first anode through conductor and the second cathode through conductor.

[0282] <2>

[0283] The capacitor element according to <1>, wherein:

[0284] The cathode through conductor further includes at least one third cathode through conductor.

[0285] When viewed in plan from the thickness direction of the anode plate, a center-to-center distance between the first cathode through conductor and the second cathode through conductor is equal to a center-to-center distance between the first cathode through conductor and the third cathode through conductor.

[0286] <3>

[0287] The capacitor element according to <2>, wherein:

[0288] When viewed from above in the thickness direction of the anode plate, the third cathode through-conductor exists on a straight line obtained by rotating a line segment connecting the center of the first cathode through-conductor and the center of the second cathode through-conductor at an angle of 60 degrees, 90 degrees, 120 degrees or 180 degrees with respect to the center of the first cathode through-conductor.

[0289] <4>

[0290] The capacitor element according to <2>, wherein:

[0291] When viewed from above in the thickness direction of the anode plate, the third cathode through conductor exists on a straight line obtained by rotating a line segment connecting the center of the first cathode through conductor and the center of the second cathode through conductor by 90 degrees or 180 degrees with respect to the center of the first cathode through conductor.

[0292] <5>

[0293] The capacitor element according to <2>, wherein:

[0294] When viewed from above in the thickness direction of the anode plate, the third cathode through conductor exists on a straight line obtained by rotating a line segment connecting the center of the first cathode through conductor and the center of the second cathode through conductor at an angle of 60 degrees or 120 degrees with respect to the center of the first cathode through conductor.

[0295] <6>

[0296] The capacitor element according to any one of <1> to <5>, wherein:

[0297] The anode through conductor further includes a second anode through conductor.

[0298] When viewed in plan from the thickness direction of the anode plate, a center-to-center distance between the first cathode through conductor and the first anode through conductor is equal to a center-to-center distance between the first cathode through conductor and the second anode through conductor.

[0299] <7>

[0300] The capacitor element according to <6>, wherein:

[0301] The anode through conductor further includes at least one third anode through conductor.

[0302] When viewed in plan from the thickness direction of the anode plate, a center-to-center distance between the first anode through conductor and the second anode through conductor is equal to a center-to-center distance between the first anode through conductor and the third anode through conductor.

[0303] <8>

[0304] The capacitor element according to <7>, wherein:

[0305] When viewed from above in the thickness direction of the anode plate, the third anode through conductor exists on a straight line obtained by rotating a line segment connecting the center of the first anode through conductor and the center of the second anode through conductor at an angle of 60 degrees, 90 degrees, 120 degrees or 180 degrees with respect to the center of the first anode through conductor.

[0306] <9>

[0307] The capacitor element according to <7>, wherein:

[0308] When viewed in plan from the thickness direction of the anode plate, the third anode through conductor exists on a straight line obtained by rotating a line segment connecting the center of the first anode through conductor and the center of the second anode through conductor by 90 degrees or 180 degrees with respect to the center of the first anode through conductor.

[0309] <10>

[0310] The capacitor element according to <7>, wherein:

[0311] When viewed in plan from the thickness direction of the anode plate, the third anode through conductor exists on a straight line obtained by rotating a line segment connecting the center of the first anode through conductor and the center of the second anode through conductor at an angle of 60 degrees or 120 degrees with respect to the center of the first anode through conductor.

[0312] <11>

[0313] The capacitor element according to any one of <2> to <5>, wherein:

[0314] The cathode through conductor further includes at least one fourth cathode through conductor.

[0315] When viewed in plan from the thickness direction of the anode plate, a center-to-center distance between the second cathode through conductor and the first cathode through conductor is equal to a center-to-center distance between the second cathode through conductor and the fourth cathode through conductor.

[0316] <12>

[0317] The capacitor element according to <11>, wherein:

[0318] When looking down from the thickness direction of the anode plate, the number of the anode through-conductors existing inside a circle having the center-to-center distance between the first cathode through-conductor and the second cathode through-conductor as a radius and the center of the first cathode through-conductor as a center is the same as the number of the anode through-conductors existing inside a circle having the center-to-center distance between the first cathode through-conductor and the second cathode through-conductor as a radius and the center of the second cathode through-conductor as a center.

[0319] <13>

[0320] The capacitor element according to <12>, wherein:

[0321] When viewed from above in the thickness direction of the anode plate, the difference between the total area of ​​the anode through-conductors overlapping with a circle having the center-to-center distance between the first cathode through-conductor and the second cathode through-conductor as a radius and the total area of ​​the anode through-conductors existing inside the circle having the center-to-center distance between the first cathode through-conductor and the second cathode through-conductor as a radius and the center of the second cathode through-conductor as a center is within ±5%.

[0322] <14>

[0323] The capacitor element according to <12> or <13>, wherein:

[0324] There are two or more of each of the third cathode through conductor and the fourth cathode through conductor.

[0325] <15>

[0326] The capacitor element according to any one of <7> to <10>, wherein

[0327] The anode through conductor further includes at least one fourth anode through conductor.

[0328] When viewed in plan from the thickness direction of the anode plate, a center-to-center distance between the second anode through conductor and the first anode through conductor is equal to a center-to-center distance between the second anode through conductor and the fourth anode through conductor.

[0329] <16> The capacitor element according to <15>, wherein:

[0330] When looking down from the thickness direction of the above-mentioned anode plate, the number of the above-mentioned cathode through-conductors existing inside a circle with the center-to-center distance between the above-mentioned first anode through-conductor and the above-mentioned second anode through-conductor as a radius and with the center of the above-mentioned first anode through-conductor as the center is the same as the number of the above-mentioned cathode through-conductors existing inside a circle with the center-to-center distance between the above-mentioned first anode through-conductor and the above-mentioned second anode through-conductor as a radius and with the center of the above-mentioned second anode through-conductor as the center.

[0331] <17> The capacitor element according to <16>, wherein:

[0332] When viewed from above in the thickness direction of the anode plate, the difference between the total area of ​​the cathode through-conductors overlapping with a circle having the center-to-center distance between the first anode through-conductor and the second anode through-conductor as a radius and the total area of ​​the cathode through-conductors existing inside a circle having the center-to-center distance between the first anode through-conductor and the second anode through-conductor as a radius and the center of the second anode through-conductor as a center is within ±5%.

[0333] <18>

[0334] The capacitor element according to <16> or <17>, wherein:

[0335] There are two or more of each of the third anode through conductor and the fourth anode through conductor.

[0336] <19>

[0337] The capacitor element according to any one of <1> to <18>, wherein

[0338] The capacitor element further comprises:

[0339] a sealing layer provided so as to cover the capacitor portion; and

[0340] a conductor wiring layer provided on a surface of the sealing layer and electrically connected to any one of the cathode through conductor and the anode through conductor;

[0341] The first cathode through conductor, the second cathode through conductor, and the first anode through conductor are direct through conductors that penetrate the sealing layer and the capacitor portion in the thickness direction and are connected to the conductor wiring layer at their ends.

[0342] <20>

[0343] The capacitor element according to any one of <1> to <18>, wherein

[0344] The capacitor element further comprises:

[0345] A sealing layer provided so as to cover the capacitor portion;

[0346] a conductor wiring layer provided on a surface of the sealing layer and electrically connected to any one of the cathode through conductor and the anode through conductor; and

[0347] an outer insulating layer provided so as to cover the sealing layer and the conductor wiring layer,

[0348] The first cathode through conductor, the second cathode through conductor, and the first anode through conductor are direct through conductors that penetrate the sealing layer and the capacitor portion in the thickness direction and are connected to the conductor wiring layer at their ends.

[0349] The cathode through conductor further includes at least one fifth cathode through conductor.

[0350] The fifth cathode through conductor is an indirect through conductor that penetrates the outer insulating layer, the sealing layer, and the capacitor portion in the thickness direction and is connected to the conductor wiring layer at a side surface.

[0351] When viewed in plan from the thickness direction of the anode plate, a center-to-center distance between the fifth cathode through conductor and the first cathode through conductor is equal to a center-to-center distance between the fifth cathode through conductor and the second cathode through conductor.

[0352] <21>

[0353] The capacitor element according to <20>, wherein:

[0354] The cathode through conductor further includes at least one sixth cathode through conductor.

[0355] The sixth cathode through conductor is the indirect through conductor.

[0356] When viewed from above in the thickness direction of the anode plate, the center distance between the first cathode through-conductor and the fifth cathode through-conductor is equal to the center distance between the first cathode through-conductor and the sixth cathode through-conductor, and the center distance between the first cathode through-conductor and the second cathode through-conductor is different from the center distance between the fifth cathode through-conductor and the sixth cathode through-conductor.

[0357] <22>

[0358] The capacitor element according to any one of <6> to <10> and <15> to <18>, wherein

[0359] The capacitor element further comprises:

[0360] A sealing layer provided so as to cover the capacitor portion;

[0361] a conductor wiring layer provided on a surface of the sealing layer and electrically connected to any one of the cathode through conductor and the anode through conductor; and

[0362] an outer insulating layer provided so as to cover the sealing layer and the conductor wiring layer,

[0363] The first cathode through conductor, the second cathode through conductor, the first anode through conductor, and the second anode through conductor are direct through conductors that penetrate the sealing layer and the capacitor portion in the thickness direction and are connected to the conductor wiring layer at their ends.

[0364] The anode through conductor further includes at least one fifth anode through conductor.

[0365] The fifth anode through conductor is an indirect through conductor that penetrates the outer insulating layer, the sealing layer, and the capacitor portion in the thickness direction and is connected to the conductor wiring layer at a side surface.

[0366] When viewed in plan from the thickness direction of the anode plate, a center-to-center distance between the fifth anode through conductor and the first anode through conductor is equal to a center-to-center distance between the fifth anode through conductor and the second anode through conductor.

[0367] <23>

[0368] The capacitor element according to <22>, wherein:

[0369] The anode through conductor further includes at least one sixth anode through conductor.

[0370] The sixth anode through conductor is the indirect through conductor.

[0371] When viewed from above in the thickness direction of the anode plate, the center-to-center distance between the first anode through-conductor and the fifth anode through-conductor is equal to the center-to-center distance between the first anode through-conductor and the sixth anode through-conductor, and the center-to-center distance between the first anode through-conductor and the second anode through-conductor is different from the center-to-center distance between the fifth anode through-conductor and the sixth anode through-conductor.

[0372] Description of Reference Numerals

[0373] 1, 2, 3, 4, capacitor element; 10, capacitor portion; 11, anode plate; 11A, core portion; 11B, porous portion; 12, cathode layer; 13, dielectric layer; 20, through conductor; 20A, 20C, cathode through conductor; 20A1, first cathode through conductor; 20A2, second cathode through conductor; 20A3, third cathode through conductor; 20A4, fourth cathode through conductor; 20C5, fifth cathode through conductor; 20C6, sixth cathode through conductor; 20B, 20D, anode through conductor; 20B1, first anode through conductor; 20B2, second anode through conductor; 20B3, third anode through conductor; 20B4, fourth anode through conductor; 20D5, fifth anode through conductor; 20D6, sixth anode through conductor; 25A, 25B, 25C, 25D, resin filling portion; 30, sealing layer; 40A, 40B, 40C, 40D, conductor wiring layer; 45, via conductor; 50, outer insulating layer.

Claims

1. A capacitor element, wherein: The capacitor element comprises: A capacitor portion, comprising an anode plate, a dielectric layer and a cathode layer, wherein the anode plate has a porous portion on at least one main surface of a core portion, the dielectric layer is disposed on a surface of the porous portion, and the cathode layer is disposed on a surface of the dielectric layer; A through conductor that penetrates the dielectric layer and the anode plate in a thickness direction; a sealing layer provided in a manner covering the capacitor portion; a conductor wiring layer, which is provided on a surface of the sealing layer; and an outer insulating layer provided so as to cover the sealing layer and the conductor wiring layer, The through conductors include a cathode through conductor electrically connected to the cathode layer and an anode through conductor electrically connected to the anode plate. The conductor wiring layer is electrically connected to any one of the cathode through conductor and the anode through conductor, The cathode through conductor includes a first cathode through conductor and a second cathode through conductor. The anode through conductor includes a first anode through conductor, When viewed from above in the thickness direction of the anode plate, a center-to-center distance between the first anode through conductor and the first cathode through conductor is equal to a center-to-center distance between the first anode through conductor and the second cathode through conductor. The first cathode through conductor, the second cathode through conductor, and the first anode through conductor are direct through conductors that penetrate the sealing layer and the capacitor portion in the thickness direction and are connected to the conductor wiring layer at their ends. The cathode through conductor further includes at least one fifth cathode through conductor, The fifth cathode through conductor is an indirect through conductor that penetrates the outer insulating layer, the sealing layer, and the capacitor portion in the thickness direction and is connected to the conductor wiring layer at the side surface. When viewed in plan from the thickness direction of the anode plate, a center-to-center distance between the fifth cathode through conductor and the first cathode through conductor is equal to a center-to-center distance between the fifth cathode through conductor and the second cathode through conductor.

2. The capacitor element according to claim 1, wherein The cathode through conductor further includes at least one third cathode through conductor, When viewed in plan from the thickness direction of the anode plate, a center-to-center distance between the first cathode through conductor and the second cathode through conductor is equal to a center-to-center distance between the first cathode through conductor and the third cathode through conductor.

3. The capacitor element according to claim 2, wherein: When viewed from above in the thickness direction of the anode plate, the third cathode through-conductor exists on a straight line obtained by rotating a line segment connecting the center of the first cathode through-conductor and the center of the second cathode through-conductor at an angle of 60 degrees, 90 degrees, 120 degrees or 180 degrees with respect to the center of the first cathode through-conductor.

4. The capacitor element according to claim 2, wherein: When viewed from above in the thickness direction of the anode plate, the third cathode through conductor exists on a straight line obtained by rotating a line segment connecting the center of the first cathode through conductor and the center of the second cathode through conductor at an angle of 90 degrees or 180 degrees with respect to the center of the first cathode through conductor.

5. The capacitor element according to claim 2, wherein When viewed from above in the thickness direction of the anode plate, the third cathode through conductor exists on a straight line obtained by rotating a line segment connecting the center of the first cathode through conductor and the center of the second cathode through conductor at an angle of 60 degrees or 120 degrees with respect to the center of the first cathode through conductor.

6. The capacitor element according to any one of claims 1 to 5, wherein The anode through conductor further includes a second anode through conductor, When viewed in plan from the thickness direction of the anode plate, a center-to-center distance between the first cathode through conductor and the first anode through conductor is equal to a center-to-center distance between the first cathode through conductor and the second anode through conductor.

7. The capacitor element according to claim 6, wherein The anode through conductor further includes at least one third anode through conductor, When viewed in plan from the thickness direction of the anode plate, a center-to-center distance between the first anode through conductor and the second anode through conductor is equal to a center-to-center distance between the first anode through conductor and the third anode through conductor.

8. The capacitor element according to claim 7, wherein When viewed from above in the thickness direction of the anode plate, the third anode through conductor exists on a straight line obtained by rotating a line segment connecting the center of the first anode through conductor and the center of the second anode through conductor at an angle of 60 degrees, 90 degrees, 120 degrees or 180 degrees with respect to the center of the first anode through conductor.

9. The capacitor element according to claim 7, wherein: When viewed in plan from the thickness direction of the anode plate, the third anode through conductor exists on a straight line obtained by rotating a line segment connecting the center of the first anode through conductor and the center of the second anode through conductor by 90 degrees or 180 degrees with respect to the center of the first anode through conductor.

10. The capacitor element according to claim 7, wherein When viewed in plan from the thickness direction of the anode plate, the third anode through conductor exists on a straight line obtained by rotating a line segment connecting the center of the first anode through conductor and the center of the second anode through conductor at an angle of 60 degrees or 120 degrees with respect to the center of the first anode through conductor.

11. The capacitor element according to any one of claims 2 to 5, wherein The cathode through conductor further includes at least one fourth cathode through conductor, When viewed in plan from the thickness direction of the anode plate, a center-to-center distance between the second cathode through conductor and the first cathode through conductor is equal to a center-to-center distance between the second cathode through conductor and the fourth cathode through conductor.

12. The capacitor element according to claim 11, wherein When looking down from the thickness direction of the anode plate, the number of the anode through-conductors existing inside a circle with the center-to-center distance between the first cathode through-conductor and the second cathode through-conductor as a radius and the center of the first cathode through-conductor as a center is the same as the number of the anode through-conductors existing inside a circle with the center-to-center distance between the first cathode through-conductor and the second cathode through-conductor as a radius and the center of the second cathode through-conductor as a center.

13. The capacitor element according to claim 12, wherein When viewed from above in the thickness direction of the anode plate, the difference between the total area of ​​the anode through-conductors overlapping with a circle having the center-to-center distance between the first cathode through-conductor and the second cathode through-conductor as a radius and the center of the first cathode through-conductor as a center and the total area of ​​the anode through-conductors existing inside the circle having the center-to-center distance between the first cathode through-conductor and the second cathode through-conductor as a radius and the center of the second cathode through-conductor as a center is within ±5%.

14. The capacitor element according to claim 12 or 13, wherein: There are two or more of each of the third cathode through conductor and the fourth cathode through conductor.

15. The capacitor element according to any one of claims 7 to 10, wherein The anode through conductor further includes at least one fourth anode through conductor, When viewed in plan from the thickness direction of the anode plate, a center-to-center distance between the second anode through conductor and the first anode through conductor is equal to a center-to-center distance between the second anode through conductor and the fourth anode through conductor.

16. The capacitor element according to claim 15, wherein When looking down from the thickness direction of the anode plate, the number of cathode through-conductors existing inside a circle with a radius equal to the center-to-center distance between the first anode through-conductor and the second anode through-conductor and centered on the center of the first anode through-conductor is the same as the number of cathode through-conductors existing inside a circle with a radius equal to the center-to-center distance between the first anode through-conductor and the second anode through-conductor and centered on the center of the second anode through-conductor.

17. The capacitor element according to claim 16, wherein When viewed from above in the thickness direction of the anode plate, the difference between the total area of ​​the cathode through-conductors overlapping with a circle having the center-to-center distance between the first anode through-conductor and the second anode through-conductor as a radius and the center of the first anode through-conductor as a center and the total area of ​​the cathode through-conductors existing inside a circle having the center-to-center distance between the first anode through-conductor and the second anode through-conductor as a radius and the center of the second anode through-conductor as a center is within ±5%.

18. The capacitor element according to claim 16 or 17, wherein: There are two or more of each of the third anode through conductor and the fourth anode through conductor.

19. The capacitor element according to any one of claims 1 to 18, wherein The cathode through conductor further includes at least one sixth cathode through conductor, The sixth cathode through conductor is the indirect through conductor, When viewed from above in the thickness direction of the anode plate, the center-to-center distance between the first cathode through-conductor and the fifth cathode through-conductor is equal to the center-to-center distance between the first cathode through-conductor and the sixth cathode through-conductor, and the center-to-center distance between the first cathode through-conductor and the second cathode through-conductor is different from the center-to-center distance between the fifth cathode through-conductor and the sixth cathode through-conductor.

20. The capacitor element according to any one of claims 6 to 10 and 15 to 18, wherein The second anode through conductor is the direct through conductor. The anode through conductor further includes at least one fifth anode through conductor, The fifth anode through conductor is the indirect through conductor. When viewed in plan from the thickness direction of the anode plate, a center-to-center distance between the fifth anode through conductor and the first anode through conductor is equal to a center-to-center distance between the fifth anode through conductor and the second anode through conductor.

21. The capacitor element according to claim 20, wherein The anode through conductor further includes at least one sixth anode through conductor, The sixth anode through conductor is the indirect through conductor, When viewed from above in the thickness direction of the anode plate, the center-to-center distance between the first anode through-conductor and the fifth anode through-conductor is equal to the center-to-center distance between the first anode through-conductor and the sixth anode through-conductor, and the center-to-center distance between the first anode through-conductor and the second anode through-conductor is different from the center-to-center distance between the fifth anode through-conductor and the sixth anode through-conductor.

22. A capacitor element, wherein: The capacitor element comprises: A capacitor portion, comprising an anode plate, a dielectric layer and a cathode layer, wherein the anode plate has a porous portion on at least one main surface of a core portion, the dielectric layer is disposed on a surface of the porous portion, and the cathode layer is disposed on a surface of the dielectric layer; A through conductor that penetrates the dielectric layer and the anode plate in a thickness direction; a sealing layer provided in a manner covering the capacitor portion; a conductor wiring layer, which is provided on a surface of the sealing layer; and an outer insulating layer provided so as to cover the sealing layer and the conductor wiring layer, The through conductors include a cathode through conductor electrically connected to the cathode layer and an anode through conductor electrically connected to the anode plate. The conductor wiring layer is electrically connected to any one of the cathode through conductor and the anode through conductor, The cathode through conductor includes a first cathode through conductor and a second cathode through conductor. The anode through conductor includes a first anode through conductor, When viewed from above in the thickness direction of the anode plate, a center-to-center distance between the first anode through conductor and the first cathode through conductor is equal to a center-to-center distance between the first anode through conductor and the second cathode through conductor. The anode through conductor further includes a second anode through conductor, When viewed from above in the thickness direction of the anode plate, a center-to-center distance between the first cathode through conductor and the first anode through conductor is equal to a center-to-center distance between the first cathode through conductor and the second anode through conductor. The first cathode through conductor, the second cathode through conductor, the first anode through conductor, and the second anode through conductor are direct through conductors that penetrate the sealing layer and the capacitor portion in the thickness direction and are connected to the conductor wiring layer at their ends. The anode through conductor further includes at least one fifth anode through conductor, The fifth anode through conductor is an indirect through conductor that penetrates the outer insulating layer, the sealing layer, and the capacitor portion in the thickness direction and is connected to the conductor wiring layer at a side surface. When viewed in plan from the thickness direction of the anode plate, a center-to-center distance between the fifth anode through conductor and the first anode through conductor is equal to a center-to-center distance between the fifth anode through conductor and the second anode through conductor.

23. The capacitor element according to claim 22, wherein: The anode through conductor further includes at least one sixth anode through conductor, The sixth anode through conductor is the indirect through conductor, When viewed from above in the thickness direction of the anode plate, the center-to-center distance between the first anode through-conductor and the fifth anode through-conductor is equal to the center-to-center distance between the first anode through-conductor and the sixth anode through-conductor, and the center-to-center distance between the first anode through-conductor and the second anode through-conductor is different from the center-to-center distance between the fifth anode through-conductor and the sixth anode through-conductor.

24. A capacitor element, wherein: The capacitor element comprises: A capacitor portion, comprising an anode plate, a dielectric layer and a cathode layer, wherein the anode plate has a porous portion on at least one main surface of a core portion, the dielectric layer is disposed on a surface of the porous portion, and the cathode layer is disposed on a surface of the dielectric layer; A through conductor that penetrates the dielectric layer and the anode plate in a thickness direction; a sealing layer provided in a manner covering the capacitor portion; a conductor wiring layer, which is provided on a surface of the sealing layer; and an outer insulating layer provided so as to cover the sealing layer and the conductor wiring layer, The through conductors include a cathode through conductor electrically connected to the cathode layer and an anode through conductor electrically connected to the anode plate. The conductor wiring layer is electrically connected to any one of the cathode through conductor and the anode through conductor, The cathode through conductor includes a first cathode through conductor, The anode through conductor includes a first anode through conductor, The first cathode through conductor and the first anode through conductor are direct through conductors that penetrate the sealing layer and the capacitor portion in the thickness direction and are connected to the conductor wiring layer at their ends. The cathode through conductor further includes at least one fifth cathode through conductor, The fifth cathode through conductor is an indirect through conductor that penetrates the outer insulating layer, the sealing layer, and the capacitor portion in the thickness direction and is connected to the conductor wiring layer at a side surface.

25. A capacitor element, wherein: The capacitor element comprises: A capacitor portion, comprising an anode plate, a dielectric layer and a cathode layer, wherein the anode plate has a porous portion on at least one main surface of a core portion, the dielectric layer is disposed on a surface of the porous portion, and the cathode layer is disposed on a surface of the dielectric layer; A through conductor that penetrates the dielectric layer and the anode plate in a thickness direction; a sealing layer provided in a manner covering the capacitor portion; a conductor wiring layer, which is provided on a surface of the sealing layer; and an outer insulating layer provided so as to cover the sealing layer and the conductor wiring layer, The through conductors include a cathode through conductor electrically connected to the cathode layer and an anode through conductor electrically connected to the anode plate. The conductor wiring layer is electrically connected to any one of the cathode through conductor and the anode through conductor, The cathode through conductor includes a first cathode through conductor, The anode through conductor includes a first anode through conductor, The first cathode through conductor and the first anode through conductor are direct through conductors that penetrate the sealing layer and the capacitor portion in the thickness direction and are connected to the conductor wiring layer at their ends. The anode through conductor further includes at least one fifth anode through conductor, The fifth anode through conductor is an indirect through conductor that penetrates the outer insulating layer, the sealing layer, and the capacitor portion in the thickness direction and is connected to the conductor wiring layer at a side surface.

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