Glucose detection sensor based on MEMS mid-infrared technology

Abstract

The invention discloses a glucose detection sensor based on an MEMS mid-infrared technology, and belongs to the technical field of blood glucose monitoring sensors, the glucose detection sensor comprises a substrate, the substrate is provided with a shell, and the substrate is provided with a transmitting optical module, a receiving optical module, a data processing system and a self-calibration system; the emission optical module selectively excites glucose molecules and accurately focuses light beams on the skin surface through the optical focusing and guiding assembly; the receiving optical module can convert an optical signal into an electric signal, and the signal quality is improved through differential processing; the self-calibration system carries out signal amplification and analog-to-digital conversion and carries out signal conditioning in combination with data of the temperature sensor, and an electric signal output by the photodiode is further processed to ensure the detection precision; the data processing system is used for performing Raman spectrum analysis on the received spectrum data so as to improve the data quality; according to the design of the sensor, non-invasive glucose concentration detection can be realized, and the accuracy is high.

Description

Technical Field

[0001] The present application belongs to the technical field of blood glucose monitoring sensors, and in particular, relates to a glucose detection sensor based on MEMS mid-infrared technology. Background Art

[0002] Diabetes is a common chronic disease that seriously affects people's health and quality of life. Diabetic patients need to monitor their blood sugar levels regularly to adjust their diet, exercise and drug treatment. Currently, the commonly used method for blood sugar testing is to pierce the finger or earlobe to obtain a small amount of blood, which is then analyzed with a blood glucose meter. This method has the following disadvantages: piercing the skin can cause pain and the risk of infection, affecting patient compliance and comfort; blood glucose meters require regular calibration and replacement of test strips, increasing the cost and trouble of testing; the measurement results of blood glucose meters are affected by factors such as the quality and quantity of blood samples, ambient temperature and humidity, and the technical level of the operator, and may contain errors and instability.

[0003] Therefore, developing a non-invasive, painless, consumable-free, calibration-free, highly accurate, and highly stable blood glucose detection method is an urgent need for diabetic patients and medical workers.

[0004] Mid-infrared spectroscopy is a technology that uses the absorption characteristics of mid-infrared light to analyze substances. It has the following advantages: it has high sensitivity and selectivity, can distinguish different chemical bonds and functional groups, and thus identify different substances; it can directly measure the concentration of substances without complex data processing and correction; it can achieve non-contact, non-destructive measurement, and is suitable for the detection of organisms.

[0005] Glucose is an important biological molecule that exists in human blood, tissue fluid and cells. The molecular structure of glucose contains multiple hydroxyl groups (-OH) and aldehyde groups (-CHO). These functional groups have strong absorption of mid-infrared light, forming characteristic spectral peaks. Therefore, mid-infrared spectroscopy technology can be used to achieve qualitative and quantitative analysis of glucose.

[0006] MEMS (Micro-Electro-Mechanical Systems) is a technology that combines microelectronics and micromechanical technologies to realize miniaturized, integrated, intelligent and multifunctional sensors, actuators and systems. MEMS technology can achieve mass production and low cost, reduce the price and power consumption of sensors, integrate multiple functions, and improve the reliability and compatibility of sensors.

[0007] Glucose detection sensors based on mid-infrared technology and MEMS technology can overcome the defects of traditional blood sugar detection methods, realize non-contact, fast and accurate blood sugar detection, and provide convenient and safe services for diabetic patients. Summary of the invention

[0008] The purpose of the embodiments of the present application is to provide a glucose detection sensor based on MEMS mid-infrared technology that is miniaturized, high-performance, low-cost, and has high stability, high sensitivity, high resolution, strong anti-interference ability, and accurate data processing capabilities, so as to solve the problems that traditional blood glucose detection methods require piercing the skin, are inconvenient to use, have errors in detection, and have low detection efficiency.

[0009] To achieve the above objectives, the technical solution adopted in the present application is: to provide a glucose detection sensor, including a substrate, a shell is provided on the substrate, and a transmitting optical module, a receiving optical module, a data processing system and a self-calibration system are provided on the substrate.

[0010] In one embodiment,

[0011] The emission optical module comprises an infrared black body light source arranged in the middle of the substrate, and an optical focusing and guiding component is arranged above the infrared black body light source.

[0012] In one embodiment,

[0013] The number of the infrared blackbody light sources is two, and the wavelengths of the two infrared blackbody light sources are 9.65 μm and 9.25 μm respectively; the optical focusing and guiding component is a lens or a reflector.

[0014] In one embodiment,

[0015] The receiving optical module includes a diaphragm substrate arranged on the base, a filter diaphragm is provided on the diaphragm substrate, and a thermopile photoelectric detection assembly is provided below the filter diaphragm; the thermopile photoelectric detection assembly includes a thermopile element, the number of the thermopile elements is two, and the two thermopile elements are connected by a micron cross bridge; the material of the filter diaphragm is one of sapphire, silicon or germanium, and the thickness of the filter diaphragm is 12.5-50μm; the number of the filter diaphragms is at least 1; preferably, the material of the filter diaphragm is sapphire, the thickness of the filter diaphragm is 25μm, and the number of the filter diaphragms is two.

[0016] In one embodiment,

[0017] The micron cross bridge comprises a conductive layer, a contact hole is arranged on the top of the conductive layer, a metal electrode is arranged on the contact hole, and the conductive layer comprises a first metal layer and a second metal layer.

[0018] In one embodiment,

[0019] The contact hole material is silicon dioxide, silicon oxynitride, silicon nitride, silicon carbide doped with boron, phosphorus, carbon or fluorine. Preferably, the contact hole material is silicon nitride doped with carbon or fluorine; the first metal layer material is a combination layer of Ti and TiN, and the second metal layer material is a combination layer of Ta and TaN.

[0020] In one embodiment,

[0021] The data processing system uses Raman spectroscopy data analysis.

[0022] In one embodiment,

[0023] The self-calibration system includes a temperature compensation conditioning chip arranged on one side of the filter membrane, and the temperature compensation conditioning chip is connected to the thermopile element; the temperature compensation conditioning chip has a built-in gain amplifier, an analog-to-digital converter, a temperature sensor and a digital signal processor, and the digital signal processor is connected to a photodiode.

[0024] In one embodiment,

[0025] The material of the substrate is a mixture of inorganic silica and thermosetting epoxy polymer. A vent hole is provided in the middle of the shell. Electrode pins are provided on both sides of the substrate. The number of the electrode pins is at least 1, and preferably, the number of the electrode pins is 8.

[0026] In one embodiment,

[0027] The transmitting optical module and the receiving optical module are surface mounted on the substrate.

[0028] The present application provides a glucose detection sensor based on MEMS mid-infrared technology. The transmitting optical module uses a multi-band infrared blackbody light source with a specific wavelength (9.65μm and 9.25μm) to selectively excite glucose molecules, and accurately focuses the light beam on the skin surface through optical focusing and guiding components; the receiving optical module is composed of a filter membrane, a thermopile photoelectric detection module and a photodiode, which can convert optical signals into electrical signals and improve signal quality through differential processing; the self-calibration system uses an integrated temperature-compensated FIR sensor signal conditioning chip connected to the thermopile element to perform signal amplification and analog-to-digital conversion, and combines the temperature sensor data for signal conditioning. The electrical signal output by the photodiode is processed. The sensor is packaged using surface mount technology, directly coupling the chip to the substrate and packaging it through low melting point materials; the data processing system includes Raman spectroscopy analysis of the received spectral data, using algorithms such as multivariate linear regression to build a mathematical correlation model between blood glucose concentration and spectral data, and performing preprocessing such as smoothing, normalization and mean centering to improve data quality; the detection method includes placing the sample to be tested between the light source and the spectrometer, receiving the modulated spectral signal, and reconstructing the original spectrum through differential response, and finally calculating the glucose concentration through the data processing unit; the sensor design can realize non-invasive glucose concentration detection and is suitable for the field of blood glucose monitoring sensor technology. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0030] Figure 1 It is a structural schematic diagram of the present invention;

[0031] Figure 2 A top view of the present invention;

[0032] Figure 3 is a side sectional view of the present invention;

[0033] Figure 4 It is the work flow chart of the present invention.

[0034] Explanation of symbols in the figure:

[0035] 1. Base; 2. Shell; 3. Infrared blackbody light source; 4. Diaphragm substrate; 5. Filter membrane; 6. Thermopile element; 7. Micron cross bridge; 8. Temperature compensation conditioning chip; 9. Vent; 10. Electrode pin. DETAILED DESCRIPTION

[0036] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application more clear, the present application is further described in detail. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0037] In one embodiment, a glucose detection sensor based on MEMS mid-infrared technology, such as Figure 1 As shown, it includes a substrate 1, a housing 2 is provided on the substrate 1, and a transmitting optical module, a receiving optical module, a data processing system and a self-calibration system are provided on the substrate 1; Figure 2 As shown, the transmitting optical module includes an infrared blackbody light source 3 arranged in the middle of the substrate 1, an optical focusing and guiding component is arranged above the infrared blackbody light source 3, the number of the infrared blackbody light sources 3 is two, and the wavelengths of the two infrared blackbody light sources 3 are 9.65μm and 9.25μm respectively; the optical focusing and guiding component is a lens; the receiving optical module includes a diaphragm substrate 4 arranged on the substrate 1, a filter diaphragm 5 is arranged on the diaphragm substrate 4, and a thermopile photoelectric detection component is arranged below the filter diaphragm 5; as shown Figure 3 As shown, the thermopile photoelectric detection assembly includes a thermopile element 6, the number of the thermopile elements 6 is two, and the two thermopile elements 6 are connected by a micrometer cross bridge 7; the data processing system adopts Raman spectroscopy data analysis; the self-calibration system includes a temperature compensation conditioning chip 8 arranged on one side of the filter membrane 5, and the temperature compensation conditioning chip 8 is connected to the thermopile element 6; a vent 9 is provided in the middle of the shell 2, and electrode pins 10 are provided on both sides of the base 1, and the number of the electrode pins 10 is at least 1, and in this embodiment, it is 8.

[0038] Specifically, the substrate 1 is used to provide basic support. The material of the substrate 1 is a mixture of inorganic silica and thermosetting epoxy polymer. The mixture forms a composite low-melting-point material. The metal contacts are bonded to the substrate 1 to achieve electrical connection. The shell 2 adopts integrated nano-injection molding (NMT). The shell 2 and the substrate 1 are assembled and then secondary packaged, and only the electronic components for transmitting, receiving and contacting the human body to be tested are leaked; the transmitting optical module and the receiving optical module are surface-mounted packaged on the substrate 1, and the chips of the transmitting optical module and the receiving optical module are directly coupled to the substrate 1, and are packaged by epoxy resin or silicon-based materials;

[0039] The two infrared black body light sources 3 with wavelengths of 9.65 μm and 9.25 μm were selected based on their ability to selectively excite specific vibration modes in glucose molecules. The light sources 9.65 μm and 9.25 μm are designed to selectively excite and measure glucose. In addition, the lens precisely focuses and directs the light beam of a specific wavelength to the surface of the skin to be tested, stimulating the specific absorption characteristics of glucose.

[0040] The material of the filter membrane 5 is sapphire with a thickness of 25 μm; the number of the filter membrane 5 is at least one, and in this embodiment, there are two, and the filter membrane 5 can selectively transmit light of a specific wavelength; the two thermopile elements 6 form a combined thermopile through a bonding process, and the series connection makes the signal of the combined thermopile balanced, and can perform differential processing to convert the received optical signal into a voltage signal; the micron cross bridge 7 includes a conductive layer, a contact hole is provided on the top of the conductive layer, a metal electrode is provided on the contact hole, and the metal electrode is connected to the thermopile element 6; the conductive layer includes a first metal layer and a second metal layer; the contact hole material is silicon nitride doped with carbon and fluorine; the first metal layer material is a combined layer of Ti and TiN, and the second metal layer material is a combined layer of Ta and TaN;

[0041] The data processing system includes circuits for signal processing and data analysis, which can perform Raman spectral data analysis on the spectral data collected by the receiving optical system to obtain relative intensities at different wavelengths, and further perform data processing to determine the glucose concentration; perform Raman spectral data analysis on the spectral data collected by the receiving optical system to obtain relative intensities at different wavelengths; collect Raman scattering spectral data of biological samples through a multi-band spectral receiving and imaging common aperture optical system; calculate and analyze the relative intensities according to each wavelength component based on the collected spectral data; perform wavelength interpolation operations on Raman spectral data specific to blood glucose to enhance the continuity and integrity of data points; crop blood glucose Raman spectral data within a specific spectral range to remove irrelevant spectral regions; use corresponding algorithms to eliminate fluorescence background interference, cosmic ray effects, and noise signals originating from instrument hardware and experimental environment; based on the purified blood glucose Raman spectral data obtained, use a multivariate linear regression model to construct a mathematical correlation model between spectral data and actual blood glucose concentration, and calculate the predicted blood glucose concentration of the sample to be tested accordingly;

[0042] The temperature compensation conditioning chip 8 uses an integrated temperature compensated FIR sensor signal conditioning chip to compensate for signal drift caused by temperature changes. The integrated temperature compensated FIR sensor signal conditioning chip has a built-in gain amplifier, an analog-to-digital converter, a temperature sensor and a digital signal processor, and a photodiode is connected to the digital signal processor; the temperature compensation conditioning chip 8 is electrically connected to the two thermopile elements 6 through a dual-channel differential input, and the signal from the thermopile element 6 is amplified by the gain amplifier, and the amplified signal is input to the analog-to-digital converter for digital conversion, and the real-time temperature data of the temperature sensor is obtained and integrated through digital signal processing, and the above signal is temperature compensated and conditioned to generate a conditioned signal output after temperature compensation; the photodiode receives the light signal generated by the visible light and infrared light source, and converts it into an electrical signal. The electrical signal converted by the photodiode enters the digital signal processor for further conditioning signal processing, and the error of the glucose detection sensor is ensured by accurate calibration of the photoelectric signal;

[0043] like Figure 4 As shown, the detection method of the glucose detection sensor is as follows: the object to be tested is moved into the detection space connected to the light source and the spectrometer respectively, and the spectrum emitted by the light source passes through the object to be tested, thereby generating incident light that can enter the spectrometer; the incident light is optically modulated to obtain a modulated spectrum; the modulated spectrum is received, and a differential response is provided for the modulated spectrum; the differential response is reconstructed to obtain the original spectrum, which is further calculated and outputted by a data processing unit for body detection data.

[0044] In one embodiment, the filter film 5 is made of silicon and has a thickness of 12.5 μm.

[0045] In one embodiment, the filter film 5 is made of germanium and has a thickness of 50 μm.

[0046] In one embodiment, the contact hole material is boron-doped silicon dioxide.

[0047] In one embodiment, the contact hole material is silicon oxynitride doped with phosphorus.

[0048] In one embodiment, the contact hole material is silicon carbide doped with carbon.

[0049] In one embodiment, the optical focusing and steering assembly is a mirror.

[0050] The present application provides a glucose detection sensor based on MEMS mid-infrared technology, including a substrate, a shell provided on the substrate, and an emitting optical module, a receiving optical module, a data processing system and a self-calibration system provided on the substrate; the emitting optical module uses a multi-band infrared blackbody light source with a specific wavelength (9.65 μm and 9.25 μm) to selectively excite glucose molecules, and accurately focuses the light beam on the skin surface through an optical focusing and guiding component; the receiving optical module is composed of a filter membrane, a thermopile photoelectric detection module and a photodiode, and can convert optical signals into electrical signals, and improve signal quality through differential processing; the self-calibration system uses an integrated temperature-compensated FIR sensor signal conditioning chip connected to a thermopile element to perform signal amplification and analog-to-digital conversion, and combines temperature sensing to perform signal amplification and analog-to-digital conversion, and combines temperature sensing to perform signal processing. The sensor data is signal conditioned, and the electrical signal output by the photodiode is further processed to ensure the detection accuracy; the sensor is packaged using surface mount technology, the chip is directly coupled to the substrate and packaged through a low melting point material; the data processing system includes Raman spectroscopy analysis of the received spectral data, and a mathematical correlation model between blood glucose concentration and spectral data is constructed using algorithms such as multivariate linear regression, and preprocessing such as smoothing, normalization and mean centering is performed to improve data quality; the detection method includes placing the sample to be tested between the light source and the spectrometer, receiving the modulated spectral signal, and reconstructing the original spectrum through differential response, and finally calculating the glucose concentration through the data processing unit; the sensor design can realize non-invasive glucose concentration detection and is suitable for the field of blood glucose monitoring sensor technology.

[0051] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0052] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A glucose detection sensor based on MEMS mid-infrared technology, comprising a substrate, a housing is provided on the substrate, characterized in that: The substrate is provided with a transmitting optical module, a receiving optical module, a data processing system and a self-calibration system.

2. The glucose detection sensor based on MEMS mid-infrared technology according to claim 1 is characterized in that: The emission optical module comprises an infrared black body light source arranged in the middle of the substrate, and an optical focusing and guiding component is arranged above the infrared black body light source.

3. The glucose detection sensor based on MEMS mid-infrared technology according to claim 2 is characterized in that: The number of the infrared blackbody light sources is two, and the wavelengths of the two infrared blackbody light sources are 9.65 μm and 9.25 μm respectively; the optical focusing and guiding component is a lens or a reflector.

4. The glucose detection sensor based on MEMS mid-infrared technology according to claim 1 is characterized in that: The receiving optical module includes a diaphragm substrate arranged on the base, a filter membrane is provided on the diaphragm substrate, and a thermopile photoelectric detection assembly is provided below the filter membrane; the thermopile photoelectric detection assembly includes a thermopile element, the number of the thermopile elements is two, and the two thermopile elements are connected by a micron cross bridge; the material of the filter membrane is one of sapphire, silicon or germanium, the thickness of the filter membrane is 12.5-50μm; the number of the filter membrane is at least 1.

5. The glucose detection sensor based on MEMS mid-infrared technology according to claim 4 is characterized in that: The micron cross bridge comprises a conductive layer, a contact hole is arranged on the top of the conductive layer, a metal electrode is arranged on the contact hole, and the conductive layer comprises a first metal layer and a second metal layer.

6. The glucose detection sensor based on MEMS mid-infrared technology according to claim 5 is characterized in that: The contact hole material is silicon dioxide, silicon oxynitride, silicon nitride, or silicon carbide doped with boron, phosphorus, carbon, or fluorine; the first metal layer material is a combined layer of Ti and TiN, and the second metal layer material is a combined layer of Ta and TaN.

7. The glucose detection sensor based on MEMS mid-infrared technology according to claim 1 is characterized in that: The data processing system uses Raman spectroscopy data analysis.

8. The glucose detection sensor based on MEMS mid-infrared technology according to claim 4 is characterized in that: The self-calibration system includes a temperature compensation conditioning chip arranged on one side of the filter membrane, and the temperature compensation conditioning chip is connected to the thermopile element; the temperature compensation conditioning chip has a built-in gain amplifier, an analog-to-digital converter, a temperature sensor and a digital signal processor, and the digital signal processor is connected to a photodiode.

9. The glucose detection sensor based on MEMS mid-infrared technology according to claim 1, characterized in that: The material of the substrate is a mixture of inorganic silica and thermosetting epoxy polymer. A vent hole is provided in the middle of the shell. Electrode pins are provided on both sides of the substrate. The number of the electrode pins is at least one.

10. The glucose detection sensor based on MEMS mid-infrared technology according to claim 1, characterized in that: The transmitting optical module and the receiving optical module are surface mounted on the substrate.

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