Processing method of high-density micropores of green tape and green tape

Abstract

The invention discloses a processing method for high-density micropores of a green tape and the green tape, relates to the technical field of green tape processing, and aims to solve the problems that the size of a punching needle of a mechanical punching machine is limited and micropore processing cannot be met in the prior art. The processing method comprises the following steps: pre-treating the green tape to obtain the pre-treated green tape; a raw ceramic tape punching pattern is preset, punching holes in the raw ceramic tape punching pattern are classified, and a plurality of punching hole categories are obtained; and a laser machine is used for sequentially conducting punching machining on the pretreated green tape according to the multiple punching types, and the machined green tape is obtained. When the high-density through holes are machined, the to-be-machined punching patterns are classified, local deformation of the green ceramic chip caused by overlarge stress during dense micropore machining can be effectively prevented, and higher density and smaller hole diameter of micropore machining of the green ceramic tape are achieved.

Description

Technical Field

[0001] The invention relates to a method for processing high-density micropores of a green porcelain tape and the green porcelain tape, belonging to the technical field of green porcelain tape processing. Background Art

[0002] Green ceramic tape (dielectric material) is the key basic material for manufacturing LTCC / HTCC devices or components. The preparation process of LTCC integrated devices is generally to use LTCC green ceramic tape and its supporting thick film electronic paste to make LTCC substrate, make an integrated packaging shell on the substrate, and precisely assemble micro-inertial device chips (micro-gyroscopes and micro-accelerometers), signal processing ASIC (Application Specific Integrated Circuit) chips and other components and finally hermetically seal them to form LTCC integrated devices. LTCC integrated devices can realize integrated processing functions such as guidance and control solution, navigation solution, and satellite positioning solution.

[0003] The raw porcelain tape needs to be punched during the preparation process. Punching is the process of using a mechanical punching machine or a laser punching machine to punch out through holes designed in the drawing on the raw porcelain tape. These holes are used for electrical interconnection, grounding, shielding, heat dissipation, etc. For example, to meet the high isolation requirements of the circuit, multiple circles of staggered shielding through holes are arranged around the RF line.

[0004] At present, the punching of raw porcelain tape is mostly done by mechanical punching, but mechanical punching is too complicated and inefficient, and the size of the punch needle of the mechanical punching machine is limited and cannot meet the requirements of micro-hole processing. Summary of the invention

[0005] The purpose of the present invention is to overcome the deficiencies in the prior art and provide a method for processing high-density micropores in a green porcelain tape and a green porcelain tape, which can effectively prevent local deformation of the green porcelain sheet caused by excessive stress during dense micropore processing, and achieve higher density and smaller pore size in the micropore processing of the green porcelain tape.

[0006] To achieve the above object, the present invention is implemented by adopting the following technical solutions: In one aspect, the present invention provides a method for processing high-density micropores in a green porcelain tape, comprising the following steps: Pre-treating the green porcelain tape to obtain a pre-treated green porcelain tape; Preset a green porcelain tape punching pattern, classify the punchings in the green porcelain tape punching pattern, and obtain multiple punching categories; The pre-treated green porcelain tape is punched in sequence according to a plurality of punching categories by using a laser machine to obtain a processed green porcelain tape.

[0007] Furthermore, the pre-treating the green porcelain tape to obtain the pre-treated green porcelain tape comprises: removing the cast carrier polyester film on the back of the green porcelain tape; The organic solvent in the green porcelain tape is volatilized to obtain a pretreated green porcelain tape.

[0008] Furthermore, the removal of the polyester film of the casting carrier on the back of the green porcelain tape comprises: placing the green porcelain tape with its front side facing downward on a vacuum adsorption table, and using a blade to lift up a corner of the polyester film of the casting carrier and then tearing it off.

[0009] Furthermore, the volatilizing the organic solvent in the green porcelain tape to obtain the pretreated green porcelain tape comprises: placing the green porcelain tape in an environment with a temperature range of 20-25° C. and a humidity range of RH35-60% for no less than 24 hours.

[0010] Furthermore, the punching classification includes classifying adjacent punchings into different categories.

[0011] Furthermore, the number of punching categories is 3.

[0012] Furthermore, the method of using a laser machine to perform punching processing on the pretreated green porcelain tape in sequence according to a plurality of punching categories to obtain a processed green porcelain tape includes: Transfer multiple punching categories into the subprograms of the laser machine; Set laser parameters; Place a pad of paper on the worktable area of ​​the laser machine and perform punching on the pad of paper; The green porcelain tape is placed on the pad paper, and the pre-treated green porcelain tape is punched in sequence by the laser machine according to the subprogram to obtain the processed green porcelain tape.

[0013] Furthermore, the micropore diameter of the pad paper is 1.1 to 1.2 times the micropore diameter of the green porcelain tape.

[0014] Furthermore, the laser parameters include a pulse width of 2~4μs, a laser frequency of 50~70KHz, a light-on delay of 60~80μs, a light-off delay of 150~170μs, a jump delay of 1500~1700μs, a jump speed of 1900~2100mm / s, a marking delay of 800~1000μs, a marking speed of 80~100 mm / s, a start displacement compensation of 7~10μm, an end displacement compensation of 13~15μm, an inner diameter of the spiral line of 20~40μm, an overlapping area of ​​the spiral line of 3~6μm, and 2~3 repeated processing times.

[0015] On the other hand, the present invention also provides a green porcelain tape, which is processed by any of the above-mentioned methods for processing high-density micropores in green porcelain tape, wherein a plurality of micropores are arranged on the green porcelain tape, the diameter of the micropores ranges from 50 to 100 μm, and the distance between adjacent micropores is 2 to 2.5 micropore diameters.

[0016] Compared with the prior art, the present invention has the following beneficial effects: The present invention classifies the punching patterns to be processed when processing high-density through holes, which can effectively prevent local deformation of the green porcelain tape caused by excessive stress during dense micro-hole processing; The present invention can control the diameter range of micropores to be 50-100 μm by laser machining and setting appropriate laser parameters, and at the same time realize high-density through holes, and the number of micropores distributed on a 200 mm×200 mm green porcelain belt can be greater than 50,000 holes; In this embodiment, adjacent micro-holes are arranged in different sub-routines to achieve staggered processing of adjacent micro-holes, thereby improving the stability of the green porcelain tape during the processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the staggered processing of adjacent micro-holes in a method for processing high-density micro-holes in a raw porcelain tape in an embodiment of the present invention; Figure 2 A schematic diagram of a processing graph of the first subroutine of Example 1 of the present invention; Figure 3 A schematic diagram of a processing graph of the second subroutine of Embodiment 1 of the present invention; Figure 4 It is a schematic diagram of the processing graphics of the third subroutine of Example 1 of the present invention. DETAILED DESCRIPTION

[0018] The present invention will be further described below in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present invention, and cannot be used to limit the protection scope of the present invention. Example 1

[0019] The embodiment of the present invention provides a method for processing high-density micropores in a green porcelain tape, comprising the following steps: The green porcelain tape is pretreated to obtain a pretreated green porcelain tape, and the pretreatment specifically includes: Place the green tape with its front side facing down on a vacuum adsorption table, use a blade to lift up one corner of the cast carrier polyester film and quickly tear it off. Then place the green tape in an environment with a temperature range of 20-25°C and a humidity range of RH35-60% for at least 24 hours to volatilize the volatile organic solvent in the green tape and ensure the dimensional stability of the green tape during subsequent processing.

[0020] like Figure 1 As shown, a green porcelain tape punching pattern is preset, the punchings in the green porcelain tape punching pattern are classified, and adjacent punchings are classified into different categories to obtain multiple punching categories. In this embodiment, the punching categories include 3 categories.

[0021] The three types of punching are transferred into the subroutines of the laser machine respectively. In this embodiment, a picosecond ultraviolet laser machine is used, combined with Figure 2~Figure 3 , the green micropores are set in the first subroutine, the rose-red micropores are set in the second subroutine, and the pink micropores are set in the third subroutine.

[0022] Set the laser parameters, including pulse width of 2~4μs, laser frequency of 50~70KHz, light-on delay of 60~80μs, light-off delay of 150~170μs, jump delay of 1500~1700μs, jump speed of 1900~2100mm / s, marking delay of 800~1000μs, marking speed of 80~100 mm / s, start displacement compensation of 7~10μm, end displacement compensation of 13~15μm, inner diameter of spiral line of 20~40μm, overlap area of ​​spiral line of 3~6μm, and repeat processing of 2~3 times.

[0023] Place pad paper on the workbench area of ​​the laser machine to isolate the raw porcelain tape and the honeycomb panel in the workbench area to prevent contamination on the back of the raw porcelain tape.

[0024] The pad paper is punched, and the diameter of the micropores of the pad paper is 1.1 to 1.2 times the diameter of the micropores of the raw porcelain tape. This is because the diameter of the micropores of the raw porcelain tape will be slightly smaller when the raw porcelain tape is punched later.

[0025] The pre-treated raw porcelain tape is placed on the pad paper, and the laser machine is used to perform punching processing on the raw porcelain tape in sequence according to the subroutine to obtain the processed raw porcelain tape. Example 2

[0026] This embodiment also provides a green porcelain tape, which is processed by the green porcelain tape high-density micropore processing method described in Example 1. The green porcelain tape high-density micropore processing method is processed, the diameter range of the micropores is 50~100μm, the distance between adjacent micropores is 2~2.5 micropore diameters, and the number of micropores distributed on the 200mm×200mm green porcelain tape is greater than 50,000 holes, and the hole density is high.

[0027] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A method for processing high-density micropores in a raw porcelain tape, characterized in that: The following steps are involved: Pre-treating the green porcelain tape to obtain a pre-treated green porcelain tape; Preset a green porcelain tape punching pattern, classify the punchings in the green porcelain tape punching pattern, and obtain multiple punching categories; The pre-treated green porcelain tape is punched in sequence according to a plurality of punching categories by using a laser machine to obtain a processed green porcelain tape.

2. The method for processing high-density micropores in a green porcelain tape according to claim 1, characterized in that: The pre-treating of the green porcelain tape to obtain the pre-treated green porcelain tape comprises: removing the cast carrier polyester film on the back of the green porcelain tape; The organic solvent in the green porcelain tape is volatilized to obtain a pretreated green porcelain tape.

3. The method for processing high-density micropores in green porcelain tape according to claim 2, characterized in that: The method for removing the polyester film of the casting carrier on the back of the green porcelain tape comprises: placing the green porcelain tape with its front side facing downward on a vacuum adsorption table, and using a blade to lift up a corner of the polyester film of the casting carrier and then tearing it off.

4. The method for processing high-density micropores in a green porcelain tape according to claim 2, characterized in that: The step of volatilizing the organic solvent in the green porcelain tape to obtain the pretreated green porcelain tape comprises: placing the green porcelain tape in an environment with a temperature range of 20-25° C. and a humidity range of RH35-60% for no less than 24 hours.

5. The method for processing high-density micropores in green porcelain tape according to claim 1, characterized in that: The punch hole classification includes classifying adjacent punch holes into different categories.

6. The method for processing high-density micropores in green porcelain tape according to claim 1, characterized in that: The number of punching categories is 3.

7. The method for processing high-density micropores in green porcelain tape according to claim 1, characterized in that: The method of using a laser machine to perform punching processing on the pre-treated green porcelain tape in sequence according to a plurality of punching categories to obtain a processed green porcelain tape comprises: Transfer multiple punching categories into the subprograms of the laser machine; Set laser parameters; Place a pad of paper on the worktable area of ​​the laser machine and perform punching on the pad of paper; The green porcelain tape is placed on the pad paper, and the pre-treated green porcelain tape is punched in sequence by the laser machine according to the subprogram to obtain the processed green porcelain tape.

8. The method for processing high-density micropores in green porcelain tape according to claim 7, characterized in that: The laser parameters include a pulse width of 2~4μs, a laser frequency of 50~70KHz, a light-on delay of 60~80μs, a light-off delay of 150~170μs, a jump delay of 1500~1700μs, a jump speed of 1900~2100mm / s, a marking delay of 800~1000μs, a marking speed of 80~100 mm / s, a start displacement compensation of 7~10μm, an end displacement compensation of 13~15μm, an inner diameter of the spiral line of 20~40μm, an overlapping area of ​​the spiral line of 3~6μm, and a number of repeated processing times of 2~3 times.

9. The method for processing high-density micropores in green porcelain tape according to claim 7, characterized in that: The micropore diameter of the pad paper is 1.1 to 1.2 times the micropore diameter of the green porcelain tape.

10. A green porcelain tape, characterized in that: It is obtained by the processing method of high-density micropores in a green porcelain tape as described in any one of claims 1 to 9, wherein a plurality of micropores are arranged on the green porcelain tape, the diameter of the micropores ranges from 50 to 100 μm, and the distance between adjacent micropores is 2 to 2.5 micropore diameters.

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