Gas supply system and method of controlling the same
By setting up connecting pipelines and pressure regulating valve groups between the CDA air compressor station and the nitrogen generation system, the linkage control between the two is realized, which solves the air compressor venting problem, optimizes equipment configuration, reduces energy consumption, and ensures gas supply quality.
Patent Information
- Application Number
- CN202411671274.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-21
- Publication Date
- 2025-12-12
- Estimated Expiration
- 2044-11-21
AI Technical Summary
The existing CDA air compressor station and nitrogen generation system operate independently, which leads to air compressor venting during the capacity ramp-up phase, resulting in energy waste and noise pollution. The nitrogen generation system also has venting issues during the gas consumption phase.
By setting up connecting pipelines and pressure regulating valve groups between the CDA air compressor station and the nitrogen generation system, the linkage control between the two can be realized. The gas flow can be adjusted in real time according to the gas consumption and dew point analysis, the air compressor configuration can be optimized, energy consumption can be reduced, and in abnormal situations, the nitrogen generation system can provide treated process air to ensure the quality of gas supply.
This has enabled stable operation of the air compressor, reduced venting waste, lowered energy consumption, optimized equipment configuration, ensured air supply quality, and reduced investment costs.
Smart Images
Figure CN119572955B_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application belongs to the technical field of industrial gas equipment, and particularly relates to a gas supply system for supplying industrial production gas and a control method thereof. BACKGROUND
[0002] Compressed dry air (CDA: Clean Dry Air), as a power gas of factory equipment, is the most important driving source, and especially some core processing equipment has strict requirements on the quality (including purity and pressure) and supply stability of compressed dry air. For example, in a semiconductor processing factory, a large amount of compressed dry air is needed in many process links, so such a factory will build its own air compression station to supply CDA.
[0003] Such an air compression station generally includes a compressor, a heat exchanger, an air-water separator, a dryer, a filter and the like. Among them, the air compressor compresses the air taken from the atmosphere to obtain pressurized constant-temperature wet air. The constant-temperature wet air exchanges heat with chilled water after passing through the cooler to remove part of the water and water-soluble impurities in the wet air. The low-temperature wet air passes through the dryer to adsorb and remove water, thereby obtaining cold dry air with extremely low dew point. The filter is arranged before and after the dryer. The cold dry air passes through the coarse filter before entering the dryer to remove particulate impurities. The cold dry air discharged from the dryer passes through the post-installed fine filter to obtain the standard required CDA which is then supplied to the production workshop.
[0004] As known, the production capacity of a factory is often gradually put into use. Taking a semiconductor factory workshop as an example, the corresponding equipment is gradually moved in and put into use as the production capacity gradually increases. Correspondingly, the gas consumption also gradually increases from a small amount at the beginning to the designed gas consumption. This process takes 3-5 years at the least and 8-10 years at the most. However, when the air compression station is built, it generally needs to be configured according to the maximum designed consumption, and even if the air compressor has a certain load adjustment range, it cannot 100% match the gas consumption at different stages. Especially in the production capacity climbing stage, the air compressor of the air compression station will have air venting, which is obviously a waste, and the sound of air venting is very loud, which will cause noise pollution to the environment.
[0005] In addition, nitrogen, as a protective gas, is also widely used in industrial production. For example, most semiconductor factories are often configured with a nitrogen making system. The nitrogen making system generally includes an air compressor, a pre-cooling unit, a pre-purification unit and the like. Its working principle is roughly as follows: the raw air is compressed by the air compressor to obtain constant-temperature wet air. The constant-temperature wet air is cooled to about 10℃ by the pre-cooling unit, and the cooled air enters the molecular sieve purification unit to reach the temperature required for entering the purification unit, thereby reducing the water content in the air and removing the chemical impurities dissolved in the water in the air, such as SO2 / NH3 / HCl The NO2 and part of the fine dust are flushed out by the descending cooling water; the low-temperature and wet air is purified by the purification unit to remove H2O and CO2 in the air, and the process air mainly composed of nitrogen is obtained.
[0006] The applicant found through detection and analysis that the dew point of the process air obtained by the nitrogen making system meets the quality requirements of CDA. However, the existing CDA air compression station and the existing nitrogen making system are independently operated, and the air compressor of the nitrogen making system also has the phenomenon of air release in different gas use stages, causing a large amount of energy waste. SUMMARY
[0007] The purpose of the present application is to provide a gas supply system and a control method thereof, aiming to improve the linkage efficiency of the CDA air compression station and the nitrogen making system, and reduce the air release phenomenon of the air compressor. The present application is realized through the following scheme:
[0008] A gas supply system comprising a CDA air compression station and a nitrogen making system, characterized in that: a first communication pipeline is arranged between the output end of the nitrogen making air compressor of the nitrogen making system and the output end of the CDA air compressor of the CDA air compression station, and a first pressure regulating valve group is arranged on the first communication pipeline; a second communication pipeline is arranged between the output end of the molecular sieve purification unit of the nitrogen making system and the output end of the dryer of the CDA air compression station, and a second pressure regulating valve group is arranged on the second communication pipeline; and a dew point analyzer is arranged on the output end of the dryer.
[0009] As a preferred scheme of the above-mentioned gas supply system, a first pressure sensor is arranged on the first communication pipeline, and a second pressure sensor is arranged on the output end of the dryer.
[0010] As a preferred scheme of the above-mentioned gas supply system, the CDA air compressor comprises a first CDA air compressor and a second CDA air compressor; the design flow of the first CDA air compressor is the CDA gas consumption corresponding to the maximum production capacity of the production workshop, and the design flow of the second CDA air compressor is the minimum CDA gas consumption for ensuring uninterrupted gas supply of the key equipment of the production workshop.
[0011] As a preferred scheme of the above-mentioned gas supply system, the nitrogen making air compressor comprises a first nitrogen making air compressor and a second nitrogen making air compressor; the design flow of the first nitrogen making air compressor is greater than the required air volume corresponding to the maximum production capacity of the nitrogen making system, and the design flow of the second nitrogen making air compressor is less than or equal to 50% of the design flow of the first nitrogen making air compressor.
[0012] As a preferred scheme of the above-mentioned gas supply system, the gas supply system further comprises a pressure boosting and gas buffering assembly, which is connected in parallel to the second communication pipeline downstream of the second pressure regulating valve group.
[0013] As the preferred scheme of the above-mentioned gas supply system, the pressure boosting and gas buffering assembly comprises a booster, a high-pressure buffer tank, a third pressure regulating valve group, a first three-way valve and a second three-way valve; the inlet of the booster is connected to the second communication pipeline through the first three-way valve, the inlet of the high-pressure buffer tank is connected to the outlet of the booster, the inlet of the third pressure regulating valve group is connected to the outlet of the high-pressure buffer tank, and the outlet of the third pressure regulating valve group is connected to the second communication pipeline through the second three-way valve.
[0014] Based on the above-mentioned gas supply system, the present application further provides a control method of the gas supply system, comprising:
[0015] According to the current CDA gas consumption, it is judged whether the CDA air compression station needs the nitrogen generation system to supplement gas and whether the nitrogen generation system supplement gas condition is met, if yes, the first pressure regulating valve group is opened and the nitrogen generation system supplements gas to the CDA air compression station through the first communication pipeline, otherwise, the CDA air compression station supplies gas by itself;
[0016] When the nitrogen generation system supplements gas to the CDA air compression station through the first communication pipeline, it is monitored in real time whether the dew point data of the outlet of the dryer meets the standard, if not, the second pressure regulating valve group is opened and the first pressure regulating valve group is closed, and the nitrogen generation system supplements gas to the CDA air compression station through the second communication pipeline.
[0017] As the preferred scheme of the above-mentioned control method of the gas supply system, the specific control method of the nitrogen generation system supplementing gas to the CDA air compression station through the first communication pipeline or the CDA air compression station supplying gas by itself comprises:
[0018] S1: the CDA air compressor is configured as a first CDA air compressor and a second CDA air compressor; the design flow W1 of the first CDA air compressor is the CDA gas consumption corresponding to the maximum production capacity of the production workshop, and the design flow W2 of the second CDA air compressor is the minimum CDA gas consumption for ensuring uninterrupted gas supply of the key equipment of the production workshop;
[0019] S2: it is judged whether the current CDA gas consumption V is in an interval, if V≧W1*70%, step S3A is entered, if W1*70%>V≧W2, step S3B is entered, and if W2>V, step S3C is entered;
[0020] S3A: the first CDA air compressor is started to supply CDA gas;
[0021] S3B: the second CDA air compressor is started to supply CDA gas, the first pressure regulating valve group is opened, and the gas output by the nitrogen generation air compressor is used as a supplement of the CDA gas supply through the first communication pipeline;
[0022] S3C: the second CDA air compressor is started to supply CDA gas.
[0023] As a preferred solution of the control method of the above-mentioned air supply system, the air supply system satisfies the air supply condition of the nitrogen production system and the specific control method of the nitrogen production system comprises:
[0024] S10: the nitrogen production air compressor is configured as a first nitrogen production air compressor and a second nitrogen production air compressor; the design flow rate Q1 of the first nitrogen production air compressor is greater than the air amount S required by the maximum production capacity of the nitrogen production system, and the design flow rate Q2 of the second nitrogen production air compressor is less than or equal to 50% of the design flow rate of the first nitrogen production air compressor;
[0025] S20: it is judged that the current CDA air consumption V is in an interval, if V+S≤Q1, then step S30A is entered; if Q1+Q2≥V+S≥Q1, then step S30B is entered; if V+S≥Q1+Q2, then step S30C is entered;
[0026] S30A: the first nitrogen production air compressor is started, the first pressure regulating valve group is opened for air supply of the nitrogen production system, and the gas output by the first nitrogen production air compressor is used as a supplement for CDA air supply through the first communication pipeline;
[0027] S30B: the first nitrogen production air compressor and the second nitrogen production air compressor are started, the first pressure regulating valve group is opened for air supply of the nitrogen production system, and the gas output by the first nitrogen production air compressor is used as a supplement for CDA air supply through the first communication pipeline;
[0028] S30C: only the first nitrogen production air compressor and the second nitrogen production air compressor supply air for the nitrogen production system.
[0029] As a preferred solution of the control method of the above-mentioned air supply system, the CDA air compression station is further configured with a pressure boosting and gas caching assembly, the pressure boosting and gas caching assembly is controlled to boost and cache the excess gas at the output end of the CDA air compression station, and the pressure boosting and gas caching assembly is controlled to release the cached gas to the output end of the CDA air compression station.
[0030] The air supply system and the control method thereof have the following beneficial effects: through the linkage air supply of the nitrogen production system to the CDA air compression station and the matching pressure regulating valve group, the interconnection and automatic adjustment can be realized under the premise of stable operation of each air compressor, the air compressor configuration is maximally optimized, the energy consumption is reduced, and the waste caused by the inconsistency between the design flow rate of the air compressor and the actual consumption is prevented; moreover, the design flow rate of each of the CDA air compressor and the nitrogen production air compressor can be appropriately reduced, and the investment cost is reduced; in addition, under the normal air supply condition, the CDA air compression station selects the first communication pipeline to obtain the compressed air from the nitrogen production system, when the CDA air compression station abnormally fluctuates and the CDA dew point does not meet the standard, the CDA air compression station can obtain the process air treated by the nitrogen production system through the second communication pipeline to be used as the CDA, and the air supply quality is ensured. Attached Figure Description
[0031] Figure 1 A structural diagram of the gas supply system provided for a specific embodiment of the present invention.
[0032] Figure 2 The main flowchart of the control method for the gas supply system provided in a specific embodiment of the present invention is shown.
[0033] Figure 3 The following is a sub-flowchart of the specific control method for the nitrogen generation system to replenish gas to the CDA air compressor station through the first connecting pipeline or for the CDA air compressor station to supply gas itself, provided in the control method of the gas supply system of the present invention.
[0034] Figure 4 The following is a sub-flowchart of the control method for the gas supply system provided in a specific embodiment of the present invention, which satisfies the gas replenishment conditions of the nitrogen generation system and the specific control method of the nitrogen generation system.
[0035] Figure 5 The hardware architecture on which the control method for the gas supply system provided in a specific embodiment of the present invention is based. Detailed Implementation
[0036] The technical solutions of the embodiments of the present invention will be explained and described below with reference to the accompanying drawings. However, the following embodiments are only preferred embodiments of the present invention and not all of them. In the description of the present invention, the terms "first" and "second" are used only for distinguishing purposes in the description and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, unless otherwise stated, "a plurality of" means two or more, unless otherwise expressly defined.
[0037] The specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. Under the premise that they do not conflict with each other, the technical features in the various specific embodiments can be used interchangeably.
[0038] like Figure 1 As shown, the gas supply system provided in this embodiment includes a CDA air compressor station and a nitrogen generation system. The CDA air compressor station includes a CDA air compressor 11, a low-pressure buffer tank 12, a precooler 13, a steam-water separator 14, a coarse filter 15, a dryer 16, and a fine filter 17 connected in sequence; the nitrogen generation system includes a nitrogen generation air compressor 21, a precooling unit 22, and a molecular sieve purification unit 23 connected in sequence.
[0039] As a basic embodiment, the gas supply system provided by the embodiment further comprises a first communication pipeline 311, a first pressure regulating valve group 312, a second communication pipeline 321, a second pressure regulating valve group 322, and a dew point analyzer 33. The output end of the nitrogen generating air compressor 21 of the nitrogen generating system to the output end of the CDA air compressor 11 of the CDA air compression station is provided with the first communication pipeline 311, and the first pressure regulating valve group 312 is arranged on the first communication pipeline 311 and used to control the opening and closing and air pressure when the gas flows from the output end of the nitrogen generating air compressor 21 to the output end of the CDA air compressor 11. The output end of the molecular sieve purification unit 23 of the nitrogen generating system to the output end of the dryer 16 of the CDA air compression station is provided with the second communication pipeline 321, and the second pressure regulating valve group 322 is arranged on the second communication pipeline 321 and used to control the opening and closing and air pressure when the gas flows from the output end of the molecular sieve purification unit 23 to the output end of the dryer 16. The dew point analyzer 33 is arranged at the output end of the dryer 16 and used to monitor the dew point of the gas output by the dryer 16. The control module of the gas supply system provided by the embodiment controls the first pressure regulating valve group 312 and the second pressure regulating valve group 322 according to the CDA gas consumption, the design flow of each air compressor, and the data of the dew point analyzer 33.
[0040] In combination Figure 2 Based on the gas supply system provided by the above basic embodiment, the embodiment further provides a control method of the gas supply system, which comprises the following steps.
[0041] According to the current CDA gas consumption V, it is judged whether the CDA air compression station needs to be supplemented by the nitrogen generating system and whether the nitrogen generating system meets the supplement condition. If yes, the first pressure regulating valve group 312 is opened, and the nitrogen generating system supplements the CDA air compression station through the first communication pipeline 311. If not, the CDA air compression station is self-supplied. When the nitrogen generating system supplements the CDA air compression station through the first communication pipeline 311, it is monitored in real time whether the dew point data of the output end of the dryer 16 meets the standard. If not, the second pressure regulating valve group 322 is opened, and the first pressure regulating valve group 312 is closed. The nitrogen generating system supplements the CDA air compression station through the second communication pipeline 321.
[0042] The gas supply system and the control method thereof provided by the above embodiment can realize the linkage of the nitrogen generating system and the CDA air compression station under different conditions, realize interconnection and automatic regulation under the premise of stable operation of each air compressor, maximize the optimization of the configuration of each air compressor, reduce energy consumption, and prevent waste caused by the inconsistency between the design flow of the air compressor and the actual consumption. Moreover, the design flow of each of the CDA air compressor and the nitrogen generating air compressor can be appropriately reduced, and the investment cost is reduced.
[0043] Specifically, in the normal gas supplementing condition, the CDA air compression station selects the first communication pipeline 311 to obtain compressed air from the nitrogen production system, and the compressed air provided by the CDA air compressor 11 and the compressed air supplemented by the nitrogen production air compressor 21 are uniformly supplied to the required CDA after subsequent processing of the CDA air compression station; when the CDA air compression station has abnormal fluctuations and the CDA dew point does not meet the standard, the CDA air compression station can obtain the process air (compressed dry gas mainly containing nitrogen) processed by the nitrogen production system from the nitrogen production system through the second communication pipeline 321 to be used as CDA.
[0044] Continuing to refer to Figure 1 , in order to monitor and assist in control in real time, the first communication pipeline 311 is provided with a first pressure sensor 351 for sensing the air pressure of the first communication pipeline 311; in addition, the output end of the dryer 16 is provided with a second pressure sensor 352 for sensing the air pressure of the output end of the dryer 16.
[0045] Continuing to refer to Figure 1 , as a preferred embodiment, the CDA air compressor 11 includes a first CDA air compressor 111 and a second CDA air compressor 112; wherein the design flow rate W1 of the first CDA air compressor is the CDA gas consumption corresponding to the maximum production capacity of the production workshop, and the design flow rate W2 of the second CDA air compressor is the minimum CDA gas consumption for ensuring uninterrupted gas supply of the key equipment of the production workshop. As an example: the first CDA air compressor 111 is a centrifugal air compressor with a design flow rate W1 = 6000 Nm 3 / h; the second CDA air compressor 112 is a screw air compressor with a design flow rate W2 = 3000 Nm 3 / h.
[0046] The above preferred embodiment configures the CDA air compressor to two, when the CDA gas consumption is small, the second CDA air compressor 112 with a smaller design flow rate can be mainly used for gas supply, and the insufficient part can be supplemented by the nitrogen production system; in this way, the start-up rate and start-up time of the first CDA air compressor 111 with a larger design flow rate can be effectively reduced, achieving the effect of further energy saving and consumption reduction, and the overall coverage of different stages of gas consumption can be ensured.
[0047] In combination with Figure 3 , the specific control method of the above-mentioned gas supply system includes:
[0048] S1: configuring the CDA air compressor to the first CDA air compressor 111 and the second CDA air compressor 112;
[0049] S2: judging the interval of current CDA gas consumption V, if V≧W1*70%, then entering step S3A; if W1*70%>V≧W2, then entering step S3B; if W2>V, then entering step S3C;
[0050] S3A: starting the first CDA air compressor 111 to supply CDA gas;
[0051] S3B: starting the second CDA air compressor 112 to supply CDA gas, and opening the first pressure regulating valve group 312 to use the first connecting pipeline 311 to supply the gas output by the nitrogen making air compressor 12 as the supplement of CDA gas supply;
[0052] S3C: starting the second CDA air compressor 112 to supply CDA gas.
[0053] As a preferred embodiment, in step S3A, the second CDA air compressor 112 is used as a backup, and the output gas pressure of the dryer 16 output end is detected in real time; if the output gas pressure is lower than the first preset threshold, the second CDA air compressor 112 is started to supply CDA gas synchronously; if the output gas pressure is further lower than the second preset threshold, the first pressure regulating valve group 312 is opened to use the first connecting pipeline 311 to supply the gas output by the nitrogen making air compressor as the supplement of CDA gas supply; wherein the first preset threshold is greater than the second preset threshold. In addition, in step S3B and step S3C, the first CDA air compressor 111 is used as a backup, and the output gas pressure of the dryer 16 output end is detected in real time; if the output gas pressure is lower than the first preset threshold, the first CDA air compressor 111 is started to supply CDA gas synchronously.
[0054] The above preferred embodiment mainly considers that although the current CDA gas consumption V can be predicted according to the current production capacity, there are a few cases of sudden large gas consumption, such as instantaneous sudden supply shortage caused by failure or other reasons, which can be solved by the above backup scheme.
[0055] Continuing to refer to Figure 1 As a preferred embodiment, the nitrogen making air compressor 21 includes a first nitrogen making air compressor 211 and a second nitrogen making air compressor 212; wherein the design flow rate Q1 of the first nitrogen making air compressor 211 is greater than the air amount S required by the maximum production capacity of the nitrogen making system, and the air amount S is a dynamic variable, which is the volume of air passing through the nitrogen making machine per unit time; preferably, the first nitrogen making air compressor 211 is composed of two sub-air compressors; the design flow rate Q2 of the second nitrogen making air compressor 212 is less than or equal to 50% of the design flow rate Q1 of the first nitrogen making air compressor. As an example: the first nitrogen making air compressor 211 is a centrifugal air compressor, and the design flow rate Q1=6600 Nm 3 / h; the second nitrogen production air compressor 212 is a screw air compressor, and the design flow Q2=2500Nm 3 / h.
[0056] The preferred embodiment described above further configures the nitrogen production air compressor as two or more. Conventionally, the first nitrogen production air compressor 211 with larger design flow can supply nitrogen production air and supplement air for the CDA air compression station. When the demand for nitrogen production air and air supplement for the CDA air compression station is large, the second nitrogen production air compressor 212 is opened to assist, so as to realize more refined energy-saving control and ensure comprehensive coverage of gas consumption in different stages.
[0057] In combination Figure 4 As shown in the control method of the gas supply system, the nitrogen production system air supplement condition and the specific control method of the nitrogen production system are met, which includes:
[0058] S10: configuring the nitrogen production air compressor as the first nitrogen production air compressor 211 and the second nitrogen production air compressor 212;
[0059] S20: determining the interval in which the current CDA gas consumption V is located. If V+S≤Q1, step S30A is entered; if Q1+Q2≥V+S≥Q1, step S30B is entered; and if V+S≥Q1+Q2, step S30C is entered;
[0060] S30A: starting the first nitrogen production air compressor to supply gas for the nitrogen production system, and opening the first pressure regulating valve group to use the first communication pipeline to supplement the gas output by the first nitrogen production air compressor as CDA gas supply;
[0061] S30B: starting the first nitrogen production air compressor and the second nitrogen production air compressor to supply gas for the nitrogen production system, and opening the first pressure regulating valve group to use the first communication pipeline to supplement the gas output by the first nitrogen production air compressor as CDA gas supply;
[0062] S30C: the first nitrogen production air compressor and the second nitrogen production air compressor only supply gas for the nitrogen production system.
[0063] Continuing to refer to Figure 1 As a preferred embodiment, the gas supply system further includes a pressure boosting and gas caching assembly connected in parallel to the second communication pipeline 321 downstream of the second pressure regulating valve group 322, for boosting and caching the excess gas output by the CDA air compression station. Moreover, connecting the pressure boosting and gas caching assembly in parallel to the second communication pipeline can boost and cache the excess gas output by the dryer 16 itself, and can also boost and cache the excess gas output by the nitrogen production system and transported to the output end of the dryer 16 through the second communication pipeline 321.
[0064] Specifically, the pressure boosting and gas buffering assembly comprises a booster 41, a high-pressure buffer tank 42, a third pressure regulating valve group 43, a first three-way valve 91 and a second three-way valve 92; the inlet of the booster 41 is connected to the second communication pipeline 321 through the first three-way valve 91, the outlet of the booster 41 is connected to the inlet of the high-pressure buffer tank 42, the outlet of the high-pressure buffer tank 42 is connected to the inlet of the third pressure regulating valve group 43, and the outlet of the third pressure regulating valve group 43 is connected to the second communication pipeline 321 through the second three-way valve 92.
[0065] The working principle of the pressure boosting and gas buffering assembly is as follows: the booster 41 boosts the excess gas at the output end of the CDA air compression station, and then buffers the gas in the high-pressure buffer tank 42; when the CDA air compression station output end is insufficient, the high-pressure gas buffered in the high-pressure buffer tank 42 is released to the CDA air compression station output end through the third pressure regulating valve group 43, so as to further balance the fluctuation of the CDA air compression station output end. At the same time, the pressure boosting and gas buffering assembly can play a temporary supplement role of the CDA when the dryer or air compressor fails.
[0066] Based on the pressure boosting and gas buffering assembly described above, the control method of the gas supply system further comprises: controlling the pressure boosting and gas buffering assembly to boost and buffer the excess gas at the output end of the CDA air compression station, and controlling the pressure boosting and gas buffering assembly to release the buffered gas to the CDA air compression station output end.
[0067] In the embodiment, the second pressure sensor 352 is arranged on the pipeline between the third pressure regulating valve group 43 and the second three-way valve; of course, the second pressure sensor 352 can also be arranged on the pipeline between the second three-way valve and the output end of the dryer 16, or arranged upstream or downstream of the dew point analyzer 33, as long as the corresponding gas pressure of the output end of the dryer 16 can be detected.
[0068] Continuing to refer to Figure 1 The gas supply system provided by the embodiment further comprises an emergency pipeline 51 directly connecting the CDA air compressor 11 and the nitrogen making air compressor 21, and an emergency on-off valve 52 is arranged on the emergency pipeline 51. In addition, a first flow meter 61 is arranged at the rear end (downstream) of the precision filter 17 of the CDA air compression station; a second flow meter 62 is arranged on the second communication pipeline 321; a third flow meter 63 is arranged at the output end of the nitrogen making system; and a CO2 analyzer 64 is arranged at the rear end (downstream) of the molecular sieve purification unit 23 of the nitrogen making system.
[0069] Figure 5The hardware architecture based on which the control method of the air supply system provided by the embodiment is shown. In addition, the pressure sensor in the embodiment is provided with two transmitters, and the average of the measured values is used for adjustment. If one of them fails, the remaining transmitter can be directly referred to. If the deviation between any two transmitters is too large, all the equipment units of the affected air pipe network will be switched to local control in order to protect the actual pressure in the air pipe network.
[0070] The above only describes the preferred embodiments of the present application, and of course cannot limit the scope of the rights of the present application, so the equivalent changes made according to the claims of the present application still fall within the scope covered by the present application.
Claims
1. A control method for a gas supply system, wherein the gas supply system comprises a CDA air compression station and a nitrogen generation system, an output end of a nitrogen generation air compressor of the nitrogen generation system is connected to an output end of a CDA air compressor of the CDA air compression station through a first communication pipeline, a first pressure regulating valve group is arranged on the first communication pipeline; an output end of a molecular sieve purification unit of the nitrogen generation system is connected to an output end of a dryer of the CDA air compression station through a second communication pipeline, a second pressure regulating valve group is arranged on the second communication pipeline; a dew point analyzer is arranged on the output end of the dryer; the CDA air compressor comprises a first CDA air compressor and a second CDA air compressor; characterized in that the control method comprises: determining whether the CDA air compression station needs to be supplemented by the nitrogen generation system and whether the nitrogen generation system supplement condition is met according to a current CDA gas consumption, if yes, opening the first pressure regulating valve group and supplementing the CDA air compression station by the nitrogen generation system through the first communication pipeline, otherwise, the CDA air compression station supplies gas by itself; the specific control method for supplementing the CDA air compression station by the nitrogen generation system through the first communication pipeline or for the CDA air compression station to supply gas by itself comprises: S1: configuring a design flow rate W1 of the first CDA air compressor as a CDA gas consumption corresponding to a maximum production capacity of a production workshop, and configuring a design flow rate W2 of the second CDA air compressor as a minimum CDA gas consumption for ensuring uninterrupted gas supply of key equipment of the production workshop; S2: determining an interval in which a current CDA gas consumption V is located, if V >= W1*70%, proceeding to step S3A, if W1*70% > V >= W2, proceeding to step S3B, and if W2 > V, proceeding to step S3C; S3A: starting the first CDA air compressor to supply CDA gas; S3B: starting the second CDA air compressor to supply CDA gas, opening the first pressure regulating valve group, and using the first communication pipeline to supplement the CDA gas supply with the gas output by the nitrogen generation air compressor; S3C: starting the second CDA air compressor to supply CDA gas.
2. The control method of a gas supply system according to claim 1, characterized by: a first pressure sensor is arranged on the first communication pipeline, and a second pressure sensor is arranged on the output end of the dryer.
3. The control method of a gas supply system according to claim 1, characterized by: the design flow rate of the first CDA air compressor is a CDA gas consumption corresponding to a maximum production capacity of a production workshop, and the design flow rate of the second CDA air compressor is a minimum CDA gas consumption for ensuring uninterrupted gas supply of key equipment of the production workshop.
4. The control method of a gas supply system according to claim 1, characterized by: the nitrogen generation air compressor comprises a first nitrogen generation air compressor and a second nitrogen generation air compressor; a design flow rate of the first nitrogen generation air compressor is greater than an air amount required by a maximum production capacity of the nitrogen generation system, and a design flow rate of the second nitrogen generation air compressor is less than or equal to 50% of the design flow rate of the first nitrogen generation air compressor.
5. The control method of a gas supply system according to any one of claims 1 to 4, characterized in that: the gas supply system further comprises a pressure boosting and gas buffering assembly, which is connected in parallel to the second communication pipeline downstream of the second pressure regulating valve group.
6. The control method of a gas supply system according to claim 5, characterized by: The booster and gas buffer assembly comprises a booster, a high-pressure buffer tank, a third pressure regulating valve group, a first three-way valve and a second three-way valve; the inlet of the booster is connected to the second communication pipeline through the first three-way valve, the inlet of the high-pressure buffer tank is connected to the outlet of the booster, the inlet of the third pressure regulating valve group is connected to the outlet of the high-pressure buffer tank, and the outlet of the third pressure regulating valve group is connected to the second communication pipeline through the second three-way valve.
7. The control method of a gas supply system according to claim 1, characterized by, The control method further comprises: When the nitrogen production system supplies air to the CDA air compression station through the first communication pipeline, the dew point data of the output end of the dryer is monitored in real time, and if the dew point data does not meet the standard, the second pressure regulating valve group is opened and the first pressure regulating valve group is closed, and the nitrogen production system supplies air to the CDA air compression station through the second communication pipeline.
8. The control method of a gas supply system according to claim 1, characterized by, The air supply condition of the nitrogen production system and the specific control method of the nitrogen production system comprise: S10: The nitrogen air compressor is configured as a first nitrogen air compressor and a second nitrogen air compressor; the design flow rate Q1 of the first nitrogen air compressor is greater than the required air amount S corresponding to the maximum production capacity of the nitrogen production system, and the design flow rate Q2 of the second nitrogen air compressor is less than or equal to 50% of the design flow rate of the first nitrogen air compressor; S20: Determine the interval in which the current CDA air consumption V is located, if V+S≤Q1, then enter step S30A; if Q1+ Q2≥V+S≥Q1, then enter step S30B; if V+S≥Q1+ Q2, then enter step S30C; S30A: Start the first nitrogen air compressor, open the first pressure regulating valve group while supplying air to the nitrogen production system, and use the first communication pipeline to supply the gas output by the first nitrogen air compressor as a supplement to the CDA air supply; S30B: Start the first nitrogen air compressor and the second nitrogen air compressor, open the first pressure regulating valve group while supplying air to the nitrogen production system, and use the first communication pipeline to supply the gas output by the first nitrogen air compressor as a supplement to the CDA air supply; S30C: The first nitrogen air compressor and the second nitrogen air compressor only supply air to the nitrogen production system.
9. The control method of a gas supply system according to any one of claims 7 to 8, characterized by Further comprising: A booster and gas buffer assembly is configured for the CDA air compression station, which boosts and buffers the excess gas at the output end of the CDA air compression station, and releases the buffered gas to the output end of the CDA air compression station.
Citation Information
Patent Citations
Nitrogen generation system
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