Semiconductor equipment data collection method and system supporting standardized communication transformation

Abstract

The present invention provides a semiconductor equipment data acquisition method and system that supports standardized communication transformation, enabling data acquisition and process control for different types of semiconductor equipment. For equipment that already meets communication standards, corresponding communication rules are formulated, and the cluster system converts the equipment communication protocol to match the standard interface. For equipment that does not fully meet the standards but can achieve communication through programming, the cluster system will directly obtain the required data and convert it to meet the standard interface specifications. For equipment without communication capabilities, image recognition technology is used to collect data through the device interface, and data input and function operation are achieved through simulated keyboard and mouse operations. Finally, the cluster device control system completes the protocol conversion of the data to the standard interface. The device data is converted into a message data packet that meets the standard semiconductor equipment communication interface, thereby achieving docking with the semiconductor equipment data analysis and process control system, and improving the production efficiency and quality of semiconductor equipment.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor equipment data acquisition, and in particular to a semiconductor equipment data acquisition method and system supporting standardized communication transformation. Background Art

[0002] Semiconductor devices refer to various electronic components manufactured from semiconductor materials, such as transistors, diodes, and integrated circuits. They are widely used in computers, communications, consumer electronics, automobiles, aerospace, and other fields. The production of semiconductor devices involves multiple processes, such as photolithography, etching, diffusion, ion implantation, chemical vapor deposition, physical vapor deposition, and chemical mechanical polishing. Each process requires monitoring and control of device parameters, status, performance, and quality to ensure product yield and reliability.

[0003] To monitor and control semiconductor equipment, data acquisition is required. This involves acquiring device data, such as temperature, pressure, current, voltage, frequency, pulses, events, and alarms, from the device itself. This data is then transmitted to a host computer, such as an equipment control system, data analysis system, or process control system, enabling monitoring, management, optimization, and maintenance. Data acquisition is a crucial step in the semiconductor equipment production process, directly impacting production efficiency and quality.

[0004] At present, there are many types of semiconductor equipment on the market, such as photolithography machines, etchers, diffusion furnaces, ion implanters, chemical vapor deposition machines, physical vapor deposition machines, chemical mechanical polishing machines, etc. These devices have different manufacturers, models, specifications, functions, and performance. Therefore, their data collection methods, communication protocols, data formats, etc. are also different, which increases the complexity and difficulty of data collection. At the same time, it also brings difficulties and challenges to data conversion, storage, analysis and processing.

[0005] To address these issues, the industry has proposed standardized semiconductor equipment communication interfaces, such as SECS, GEM, GEM300, EDA, and Inteface-A. These interfaces define the communication protocols, data structures, message formats, and service logic between semiconductor devices and host computers, enabling device data acquisition, process control, condition monitoring, and performance tracking. These interfaces help improve the interoperability and compatibility of semiconductor devices, reduce the cost and risk of data acquisition, and enhance data quality and availability.

[0006] However, since the introduction and implementation of these standardized semiconductor device communication interfaces requires a certain amount of time and cost, there are still a large number of semiconductor devices on the market that do not adopt these interfaces, or only adopt some interfaces, or adopt different versions of interfaces. As a result, the standardization of data collection is still not high, the consistency and comparability of data are still not strong, and there are still obstacles and difficulties in data utilization and analysis.

[0007] Publication number CN113868484A discloses a semiconductor process equipment data acquisition method, device, and system. The main purpose is to collect and display data from semiconductor process equipment, as well as forward control instructions for semiconductor process equipment, through an equipment data acquisition server. The technical problems to be solved are how to obtain equipment data from semiconductor process equipment and forward it to the equipment control system, as well as how to receive control instructions from other control systems and send them to semiconductor process equipment. The drawback is that it fails to take into account the diversity and standardization requirements of semiconductor equipment. It can only be applied to semiconductor process equipment with specific communication interfaces and data formats, but not to different types of semiconductor equipment. It also cannot achieve docking with semiconductor equipment data analysis and process control systems, thereby failing to improve the production efficiency and quality of semiconductor equipment.

[0008] To this end, the present application provides a semiconductor equipment data collection method that can combine multiple semiconductor equipment data collection methods, support standardized communication transformation, and achieve docking with semiconductor equipment data analysis and process control systems. Summary of the Invention

[0009] The object of the present invention is to provide.

[0010] In order to achieve one of the above-mentioned objects, the present invention adopts the following technical solution:

[0011] A semiconductor equipment data collection method supporting standardized communication transformation,

[0012] Implementing a standard semiconductor equipment communication interface in the cluster equipment controller system, the interface being used to connect to semiconductor equipment data analysis and process control systems;

[0013] For different types of semiconductor equipment, data collection and process control of the equipment are realized, as well as the conversion of equipment data to internal system data, including:

[0014] For devices that have communication capabilities that meet semiconductor equipment communication standards and can be modified to communicate with the cluster equipment controller system, communication rules are formulated. The cluster equipment controller system completes the communication protocol conversion from the device communication to the standard semiconductor equipment communication interface.

[0015] For devices that do not have the communication capability that meets the semiconductor equipment communication standards, but can achieve communication with the device side through the cluster device controller system development program, the cluster device controller system device side obtains the preset collected data, and the cluster device controller system completes the communication protocol conversion from the device communication to the standard semiconductor equipment communication interface;

[0016] For devices that do not have any communication capabilities, the acquisition device program interface is used to identify the information on the screen to complete the preset data acquisition. The integrated device of keyboard, video and mouse is used to complete the mouse and keyboard operations to achieve switching screens, input data, and operate functional actions. The cluster device controller system completes the communication protocol conversion from the device communication to the standard semiconductor device communication interface.

[0017] Furthermore, the method for implementing a standard semiconductor device communication interface in a cluster device controller system is as follows:

[0018] Based on the device communication standard protocol set, a high-speed message service communication interface is implemented in the cluster device control system. Domain modeling is performed based on the detailed functional requirements of the general device model, and related entities and domain services are established to realize the secondary message sending and receiving function of device communication.

[0019] Based on the extended set of equipment communication standard protocols, domain modeling is performed in the cluster equipment control system according to the requirements of each standard, and relevant entities and domain services are established to implement pallet management, process operation or control operation management, substrate tracking, equipment availability and maintenance status, and equipment performance tracking functions;

[0020] According to the device data collection standard protocol set, a network service-based data collection interface is implemented in the cluster device control system to meet the requirements of the general device model, device self-description, client authentication and authorization, data collection management, and common metadata related standards.

[0021] Furthermore, after completing data collection of different types of equipment using the data acquisition system, the preset collected data is sent to the cluster device controller system according to the cluster device controller system interface definition, and the control command of the cluster device controller system is forwarded to the equipment, thereby completing the integration and docking of the equipment and the cluster device controller system. Ultimately, multiple devices are equipped with a standard semiconductor device communication interface and use the data acquisition system to collect data from different types of semiconductor equipment.

[0022] The data acquisition system obtains preset collected data and device function information from the device side through components such as the high-speed message service communication interface, the general device model domain service, the device communication extension domain service and the device data acquisition interface according to different device communication protocols and data formats;

[0023] According to the cluster equipment controller system interface definition, the collected data is sent to the cluster equipment controller system. The cluster equipment controller system is a system used to connect to the semiconductor equipment data analysis and process control system. It receives data from the data acquisition system through a standard semiconductor equipment communication interface and performs data conversion, storage, analysis and processing to realize equipment monitoring, management, optimization and maintenance functions;

[0024] The control commands issued by the cluster device controller system are forwarded to the corresponding semiconductor devices. The control commands are instructing the process control, parameter adjustment, state switching, and alarm clearing operations of the equipment based on the results of equipment data analysis and process control. Through the corresponding components of the data acquisition system, the control commands are converted into communication protocols and data formats that can be recognized by the equipment side, and sent to the equipment side through the high-speed message service communication interface to realize control and feedback of the equipment.

[0025] Furthermore, the communication rules are:

[0026] Four message types are defined: notification, report, command, and request. Each message type is represented by bit and word data and has a corresponding timing process.

[0027] According to the requirements of the standard semiconductor equipment communication interface, a PLC mapping file is developed as the basis for the communication protocol;

[0028] The device side develops a communication program based on the PLC mapping file, performs integration testing with the standardized data acquisition service, and exports a configuration file;

[0029] The standardized data collection service reads the configuration file, periodically scans for messages supported by the device, communicates with the device, and records the communication log.

[0030] The notification type is a message type that uses one bit to represent one event, and the timing process is:

[0031] When an event occurs, the device sets the bit to On.

[0032] When the event is completed, the device sets the bit to Off.

[0033] The report type uses a pair of bits: a report bit and a reply bit and a set of word data to represent the message type of an event. The timing process is:

[0034] When an event occurs, the device writes the details to the word data and then sets the report bit to On.

[0035] After the data acquisition program scans and finds that the report bit is On, it reads the word data.

[0036] The data acquisition program sets the reply bit to On, indicating that the reading is complete.

[0037] The device scans and sets the reply bit to On and the report bit to Off.

[0038] When the data acquisition program scans and finds that the report bit is Off, it sets the reply bit to Off.

[0039] Report message sending completed;

[0040] If the reading is not completed within the set time, it means that the data acquisition program has timed out. After the timeout, the device will set the report bit to Off to indicate that data transmission has stopped, and record the corresponding error log.

[0041] The command type is represented by a pair of bits: command bit and reply bit and a set of word data, which represent the command type sent by a data acquisition program to the device. The timing process is as follows:

[0042] The data acquisition program writes the details to the word data, and then sets the command bit to On.

[0043] After the device scans and finds the command bit is On, it reads the word data.

[0044] The device sets the reply bit to On, indicating that the reading is complete.

[0045] The data acquisition program scans until the reply bit is set to On and the command bit is set to Off.

[0046] When the device scans and finds the command bit is Off, it sets the reply bit to Off.

[0047] The command message is sent successfully.

[0048] If the reading is not completed within the set time, it means that the device has timed out from receiving the data. After the timeout, the data acquisition program will set the command bit to Off to indicate that the data transmission is terminated and record the corresponding error log.

[0049] The request type is represented by a pair of bits: a request bit and a reply bit and a set of word data. The request type can be sent in both directions. The timing process is:

[0050] The request side writes the details to the request area of the word data, and then sets the request bit to On. After the response side scans and sees that the request bit is On, it reads the data in the request area of the word data and writes the reply data to the response area of the word data.

[0051] The answering end sets the reply bit to On, indicating that the answer is complete.

[0052] The request end scans and sets the reply bit to On, reads the response area content of the word data, and sets the request bit to Off.

[0053] The responder scans and finds that the request bit is Off, and sets the reply bit to Off.

[0054] The request message is sent successfully;

[0055] If the response is not completed within the set time, it means that the responder has timed out. After the timeout, the requester will set the request bit to Off to indicate the termination of the request data and record the corresponding error log.

[0056] Furthermore, the method for the cluster device controller system device end to obtain the preset collected data is:

[0057] The cluster device controller system establishes a communication connection with the device end through the serial port, network port or wireless communication module, sends data acquisition instructions or reads the data buffer area of the device end according to the communication protocol and data format of the device end, and obtains the data of the device end;

[0058] The cluster device controller system device side parses, verifies, converts and encapsulates the acquired data, generates a message data packet that complies with the standard semiconductor device communication interface, and sends it to the cluster device controller system through the high-speed message service communication interface;

[0059] The cluster device controller system receives control commands from the cluster device controller system, parses, verifies, converts and encapsulates the control commands, generates control data packets that comply with the communication protocol and data format of the device, and sends them to the device through the serial port, network port or wireless communication module to achieve control and feedback of the device.

[0060] Furthermore, the method of completing the preset data collection by identifying the information on the screen through the acquisition device program interface is:

[0061] Connect the device's keyboard and mouse to a KVM-type data acquisition program through the keyboard, mouse, and video module, so that the data acquisition program can send keyboard and mouse commands to the device;

[0062] Through the video acquisition hardware module, the device program screen is connected to the KVM type data acquisition program, so that the data acquisition program can collect and analyze the program screen;

[0063] Analyze the device program interface, obtain device information through optical character recognition, pattern matching, and color judgment software algorithms, and organize this information into a collection list;

[0064] According to the collection list, set the screen switching steps required for each collection project and generate an operation configuration file; according to the collection list, set the type and parameters of the collection screen information required for each collection project, realize information collection through optical character recognition, pattern matching, and color judgment software algorithms, and generate a collection configuration file;

[0065] Based on the standard semiconductor equipment communication interface requirements and the device software screen functional capabilities, the functions that can be operated through the screen are organized into a control list;

[0066] According to the control list, set the steps for switching screens and operating screens required for each control item, and generate operation configuration files;

[0067] The KVM data collection service reads the operation configuration file and the collection configuration file, reads the device status regularly, and collects data from the device.

[0068] The KVM type data acquisition service reads the operation configuration file and completes the automatic operation of the device screen when the cluster device controller system sends a control command, thereby realizing automatic control of the device.

[0069] Furthermore, the standard semiconductor equipment communication interface complies with any one of the SECS, GEM, GEM300, EDA, and Inteface-A standard protocol sets, and is used to connect to the EAP or FDC business system of the semiconductor equipment.

[0070] A semiconductor equipment data acquisition system supporting standardized communication transformation, comprising:

[0071] A cluster equipment controller system for implementing a standard semiconductor equipment communication interface for interfacing with semiconductor equipment data analysis and process control systems;

[0072] One or more data acquisition systems for performing data acquisition and process control on different types of semiconductor equipment, and for converting equipment data into message data packets that comply with a standard semiconductor equipment communication interface and for communicating with a cluster equipment controller system;

[0073] The data acquisition system adopts different data acquisition methods according to the communication capabilities of the equipment, including: for equipment that has communication capabilities that comply with the standard communication rules of semiconductor equipment communication and can be modified to communicate with the cluster equipment controller system, using a high-speed message service communication interface to complete the communication protocol conversion from the equipment communication to the standard semiconductor equipment communication interface according to the equipment communication rules;

[0074] For devices that do not have the communication capability to comply with the standard communication rules of semiconductor equipment communication, but can achieve communication with the device side through the cluster equipment controller system development program, use the serial port, network port or wireless communication module to complete the communication protocol conversion from the device communication to the standard semiconductor equipment communication interface according to the communication protocol and data format of the device side;

[0075] For devices that do not have any communication capabilities, use the keyboard, mouse and video module to identify the information on the screen through the acquisition device program interface to complete the preset data acquisition. Through optical character recognition, pattern matching, and color judgment software algorithms, the communication protocol conversion from the device communication to the standard semiconductor device communication interface is completed.

[0076] Furthermore, the cluster device controller system includes:

[0077] A high-speed message service communication interface for sending and receiving message data packets with the data acquisition system;

[0078] A generic device model domain service, used to perform domain modeling based on the detailed functional requirements of the generic device model, establish related entities and domain services, and implement the secondary messaging function of device communication;

[0079] An equipment communication extension domain service, which is used to perform domain modeling based on the requirements of the equipment communication extension standard protocol set, establish related entities and domain services, and implement pallet management, process operation or control operation management, substrate tracking, equipment availability and maintenance status, and equipment performance tracking functions;

[0080] A data collection interface based on network services, used to implement data collection functions that meet the requirements of common device models, device self-description, client authentication and authorization, data collection management, and common metadata related standards.

[0081] Furthermore, the standard semiconductor equipment communication interface complies with any one of the SECS, GEM, GEM300, EDA, and Inteface-A standard protocol sets, and is used to connect to the EAP or FDC business system of the semiconductor equipment.

[0082] The present invention provides a semiconductor equipment data acquisition method and system that supports standardized communication transformation. Through the data acquisition system, data acquisition and process control of different types of semiconductor equipment are achieved, and the equipment data is converted into message data packets that comply with the standard semiconductor equipment communication interface, thereby achieving docking with semiconductor equipment data analysis and process control systems, and improving the production efficiency and quality of semiconductor equipment. Specifically, the beneficial effects of the present invention include:

[0083] By receiving the activated data collection plan and acquiring the equipment data from the semiconductor equipment according to the equipment data information required by the data collection plan, and forwarding the equipment data to the cluster equipment controller system, the equipment monitoring, management, optimization and maintenance functions are realized, thereby improving the production efficiency and quality of the semiconductor equipment. At the same time, it also supports data collection and process control of different types of semiconductor equipment, thereby improving the interoperability and compatibility of semiconductor equipment.

[0084] By forwarding the control commands issued by the cluster equipment controller system to the corresponding semiconductor equipment, the equipment's process control, parameter adjustment, state switching, alarm clearing and other operations are realized, thereby improving the controllability and reliability of the semiconductor equipment. At the same time, it also realizes the docking of semiconductor equipment data analysis and process control systems, improving the data utilization and analysis capabilities of semiconductor equipment and the degree of automation of semiconductor equipment.

[0085] By implementing a standard semiconductor equipment communication interface in the cluster equipment controller system and connecting it to the semiconductor equipment data analysis and process control system, the data quality and availability of the semiconductor equipment are improved. At the same time, support for standardized communication transformation is also achieved, which improves the uniformity and standardization of the communication protocol and data structure of the semiconductor equipment.

[0086] By using a high-speed message service communication interface for devices that have communication capabilities that meet semiconductor equipment communication standards and can be modified to communicate with the cluster equipment controller system, and according to the device communication rules, the communication protocol conversion from the device communication to the standard semiconductor equipment communication interface is completed, thereby improving the communication speed and efficiency of the semiconductor equipment. At the same time, it also realizes the full utilization and adaptation of the semiconductor equipment communication rules, and improves the communication flexibility and adaptability of the semiconductor equipment.

[0087] By developing programs for devices that do not have communication capabilities that meet semiconductor equipment communication standards but can communicate with the device side through the cluster device controller system, using serial ports, network ports or wireless communication modules, according to the communication protocols and data formats of the device side, the communication protocol conversion from the device communication to the standard semiconductor equipment communication interface is completed, thereby improving the communication compatibility and scalability of the semiconductor equipment. At the same time, it also achieves a full understanding and conversion of the semiconductor equipment communication protocol and data format, thereby improving the communication accuracy and reliability of the semiconductor equipment.

[0088] By using a data collector for devices that do not have any communication capabilities, the device data is collected and stored according to the data collection method on the device side. Then, the device data is converted into a message data packet that conforms to the standard semiconductor device communication interface through the data transmitter, and sent to the cluster device controller system through the serial port, network port or wireless communication module, thereby improving the data collection and storage capabilities of the semiconductor device. At the same time, it also realizes the effective acquisition and conversion of semiconductor device data, and improves the data integrity and consistency of the semiconductor device. BRIEF DESCRIPTION OF THE DRAWINGS

[0089] Figure 1 is a structural diagram of a cluster device controller system in an embodiment of the present invention;

[0090] Figure 2 is a system structure diagram of Example 1 in an embodiment of the present invention;

[0091] Figure 3 is a flow chart of Example 1 in an embodiment of the present invention;

[0092] Figure 4 It is the function of the test tool configuration message in the embodiment of the present invention;

[0093] Figure 5 This is a system structure diagram of Example 2 in an embodiment of the present invention;

[0094] Figure 6 is a flow chart of Example 2 in an embodiment of the present invention;

[0095] Figure 7 This is an example screen of the customized data acquisition module of Example 2 of the embodiment of the present invention;

[0096] Figure 8 is a system structure diagram of Example 3 in an embodiment of the present invention;

[0097] Figure 9 This is a flowchart of Example 3 in the implementation manner of the present invention. DETAILED DESCRIPTION

[0098] The present invention will be described in detail below with reference to the specific embodiments shown in the accompanying drawings. However, these embodiments do not limit the present invention, and any structural, methodological, or functional changes made by those skilled in the art based on these embodiments are all within the scope of protection of the present invention.

[0099] In this embodiment, we elaborate on the specific design and structure of a cluster device controller system (abbreviated as CTC), such as Figure 1As shown, the system is designed to efficiently integrate and manage equipment data acquisition and process control in the semiconductor manufacturing process. The core of the CTC system consists of the following two main modules:

[0100] Equipment Data Acquisition Module: In this embodiment, the equipment data acquisition module focuses on direct interaction with semiconductor production equipment. Its primary task is to collect equipment status data in real time and execute corresponding process control commands. Based on the equipment's communication capabilities and integration requirements, this module is further divided into three submodules:

[0101] Standardized equipment data acquisition module: Adapts to devices that comply with industry communication standards and enables seamless data interaction.

[0102] Customized device data acquisition module: Data acquisition solutions tailored for devices with special communication requirements or non-standard protocols, ensuring accurate data collection and effective control.

[0103] KVM type device data acquisition module: For those devices that cannot interact through traditional networks or standard communication ports, it realizes control and data acquisition by simulating human-computer interaction interfaces (keyboard, video, mouse).

[0104] Cluster Equipment Control Module: Serving as the nerve center of the CTC system, the cluster equipment control module in this embodiment is responsible for data exchange with upper-layer business systems (such as the EAP / FDC system) and unified management of subordinate data acquisition modules. This module not only ensures real-time and accurate data but also supports remote monitoring and process control of production equipment, significantly improving production efficiency and product quality.

[0105] The CTC system of this embodiment enables semiconductor manufacturers to efficiently monitor and manage production equipment, ensuring the accuracy of data collection while improving the automation and intelligence of production processes. Furthermore, the system's high flexibility and scalability provide a solid foundation for future technological development and capacity expansion.

[0106] Example 1: Data acquisition and control based on standard semiconductor equipment communication interface

[0107] This embodiment describes in detail a method for efficient data exchange, collection, and process control between a clustered device controller system (CTC) and semiconductor devices. Utilizing a high-speed message service communication interface, the CTC system ensures compatibility and communication efficiency with a variety of semiconductor devices.

[0108] In this embodiment, the system structure diagram is as follows: Figure 2The figure shows the interaction and hierarchical relationship between the modules in the cluster equipment controller system, thus revealing the system architecture design and how the components are integrated to support the data acquisition and control process of semiconductor equipment. Figure 3 As shown in the figure, this flowchart details the serialized steps from device capability confirmation to communication protocol formulation, and subsequent communication integration testing and data acquisition.

[0109] Step 101: Confirm semiconductor equipment capabilities

[0110] Before implementing efficient data exchange, collection, and process control between a clustered equipment controller (CTC) system and semiconductor equipment, in-depth communication with the equipment manufacturer is essential. This preliminary but critical step aims to ensure a detailed and accurate understanding of the semiconductor production equipment's structure, communication methods, operational plans, recipe management, equipment status, and alarm functions. This step not only involves understanding the equipment hardware but also includes in-depth discussions on multiple dimensions, including software functionality, user interface, and customizability, ensuring the accuracy and efficiency of subsequent system design and implementation.

[0111] Device Structure Confirmation: A detailed understanding of the semiconductor device's hardware structure, including its major components, auxiliary systems, and how they are interconnected, is required. This helps identify data acquisition points and control interfaces, providing a direct physical foundation for the design of data acquisition modules.

[0112] Communication method research: Discuss and confirm with the equipment manufacturer the communication protocols, interface types, and communication security measures supported by the equipment. During this process, ensure that the communication method used can be seamlessly integrated into the CTC system to ensure reliable and real-time data transmission.

[0113] Operational plan analysis: Understand the equipment's daily operating mode, efficiency optimization mechanism, and possible operation and maintenance challenges, so as to preset corresponding process control and optimization algorithms in the CTC system to support maximum efficiency of equipment operation.

[0114] Discussion on recipe management mechanisms: Gain a deep understanding of the equipment's recipe management capabilities, including recipe creation, storage, call, and modification mechanisms. This is crucial for achieving dynamic management and automated application of production recipes in the CTC system.

[0115] Verification of equipment status and alarm functions: Detailed discussion of equipment status monitoring and alarm system configuration, including status monitoring parameters, alarm levels, and alarm response mechanisms. This ensures that the CTC system can monitor equipment status in real time and quickly respond to equipment alarms to maintain production process stability and safety.

[0116] Step 102: Create a PLC Map file

[0117] Definition of the address range of each sub-device of semiconductor equipment:

[0118] In step 102 of cluster controller (CTC) system development, a SEMI-compliant PLC (Programmable Logic Controller) map file is developed based on detailed device capability information provided by the device manufacturer. This file is a crucial component in standardizing device communications, defining in detail the communication address ranges for each unit and module in the semiconductor device.

[0119] The main contents of the PLC Map file:

[0120] Address Range Definition: Each device unit is assigned a unique address range, covering the read and write operations of data and control signals. For example, in the uploaded machine PLC address mapping table, the CTC and each unit (Unit1, Unit2, Unit3) are assigned different control station and network numbers, and the address ranges of their master storage area (Master Area) and local area (Local Area) are specified. These areas are further subdivided into word and bit-level addresses to facilitate precise data access and the transmission of control instructions.

[0121] Device name and network information: The mapping table also lists in detail the name of each device and its location information in the network. This information is crucial for the CTC system to identify and locate specific units when communicating between devices.

[0122] Control station confirmation: identifies whether each equipment unit is a control station, ensuring that the CTC system can identify which equipment units are responsible for executing control commands.

[0123] By precisely developing PLC map files, the CTC system can accurately identify and communicate with the various units within semiconductor equipment, enabling efficient and synchronized data acquisition and control processes. This step provides the CTC system with the infrastructure for inter-device communication, a key step in achieving overall automation and optimization of the semiconductor manufacturing process.

[0124] Communication message definitions for semiconductor equipment. Based on SEMI standards, we have developed specific messages related to equipment communication. These message definitions play a vital role in information exchange between the CTC system and semiconductor equipment (EQP).

[0125] In this embodiment, we further integrate and detail the communication message definitions for semiconductor equipment. These messages are based on SEMI standards and define specific communication types and protocols for information exchange between the CTC system and semiconductor equipment (EQP). The following is an integration of the specific communication mechanisms for the four main message types, including notifications, reports, commands, and requests, as well as a detailed description of the corresponding high-level communication protocols.

[0126] Communication message types and processes

[0127] Commands

[0128] Terminal Text: Allows operators to interact with the device by sending text commands through command bits and data fields.

[0129] Date Time Set: Use command messages to set or synchronize the date and time of the device.

[0130] Recipe Request: This message type is used to request the device to provide the currently used recipe information.

[0131] Process Control Command: Send process control instructions, such as starting or stopping the production process, adjusting production parameters, etc.

[0132] Port Control Command: Perform operations such as opening or closing device ports.

[0133] Notifications

[0134] CIM Online Notification: When a device is online and ready, it sends a status update to the CTC system using the notification message type.

[0135] Auto Mode Notification: When the device's auto mode status changes, the current status is reported to the CTC system via a notification message type.

[0136] Reports

[0137] Machine Status Changed Report: Reports the change of a device from idle to running state, using the report message type.

[0138] Alarm Status Report: Reports the alarm status of a device, including new alarm activations or deactivations of existing alarms.

[0139] Recipe Change Report: When a recipe changes, the CTC system is notified via a report message type.

[0140] Sent Out Job Report: Status report of the workpiece when it leaves the warehouse.

[0141] Received Job Report: Status report of the workpiece when it is received into the warehouse.

[0142] Tracking Job Report: A report used to track the progress of a job.

[0143] Timing process and communication protocol

[0144] Each message type follows a well-defined timing process to ensure accurate data transmission and timely response:

[0145] Notification: When an event occurs, the device sets the notification bit to On and sets it to Off after the event is completed.

[0146] Report: When an event occurs, the device writes detailed information to the word data and sets the report bit to On. After the data acquisition program scans it, it reads the data and sets the reply bit to On. After completion, it clears the report bit and reply bit.

[0147] Command: The data acquisition program initiates a command, sets the command bit to On, and fills in the relevant word data. The device reads the data and sets the reply bit to On. After completing the command, the two bits are cleared.

[0148] Request: During the request and response process, the request bit and reply bit are set and cleared as needed to ensure the integrity and accuracy of bidirectional data transmission.

[0149] Timeout processing

[0150] Each message type has a timeout mechanism to ensure system stability and data integrity. If any message is not transmitted or acknowledged within the predetermined time, the corresponding bit will be cleared and an error log will be recorded, thus terminating the transmission process.

[0151] Through this detailed message definition and timing control, the CTC system can achieve fine control and optimization of the semiconductor manufacturing process, standardize the communication process, and optimize the efficiency of information transmission to ensure the real-time and accuracy of production control and management.

[0152] Step 103: The device side develops a communication program based on the PLC Map developed in the previous step;

[0153] This program is the basis for information exchange between the device and the Cluster Equipment Controller System (CTC). It enables the device to understand and execute commands from the CTC, while ensuring that the device status and reports are accurately fed back to the CTC.

[0154] Key elements of device-side communication program development:

[0155] Protocol compatibility: The communication program must be fully compatible with the established PLC Map file, ensuring that all device communication addresses and message definitions comply with SEMI standards and can be correctly identified and parsed by the CTC system.

[0156] Command execution: The program should be able to accurately receive and execute directive messages issued by the CTC, such as process control commands or recipe requests, and ensure high accuracy and responsiveness during execution.

[0157] Status feedback: The device must be able to monitor its own status in real time and report status changes and alarm information to the CTC through the communication program in accordance with the defined reporting message format.

[0158] Data Accuracy: Ensure the accuracy of procedures during data capture and transmission, especially when handling sensitive data such as recipe change reports or workpiece tracking reports.

[0159] Fault handling: The communication program should have a certain self-diagnosis and error reporting mechanism, which can promptly notify the CTC system when a communication failure occurs and take appropriate recovery measures.

[0160] Performance optimization: The program's operating efficiency and resource usage should be considered during the development process to ensure that the communication program does not adversely affect the normal production operation of the equipment.

[0161] Testing and Verification: At all stages of developing a communication program, rigorous testing should be performed to verify that the program functions as expected and ensures stable operation under various working conditions.

[0162] Through these comprehensive development elements, step 103 not only completes the development of the device-side communication program, but also lays the foundation for efficient and stable communication between the device and the CTC system, thereby providing important support for the automation and intelligence of the entire production process.

[0163] Step 104: Communication Integration Test

[0164] In the development of the CTC system, step 104 focuses on communication integration testing to ensure the correctness and stability of all communication protocols. The cluster device controller system provides a dedicated test tool that can establish a communication connection with the device's PLC and configure various messages defined in the PLC Map. The test operation is performed manually and covers the testing of all predefined messages to verify the accuracy of the communication connection and the correctness of the device response. The operation interface of this test tool is detailed in Figure 4 The interface of the PLC Message Configuration Tool is shown. This tool can be used to configure PLC messages based on a specified PLC Map and perform operations such as test export. It enables testers to verify each message in the PLC Map one by one, confirming that the transmission and reception of each message are executed as expected.

[0165] Step 105: Generate configuration file:

[0166] After successfully completing the communication integration test, the process proceeds to step 105, where all verified communication protocols and message formats are exported from the test tool and a comprehensive configuration file is generated. This file serves as a navigation map for the standardized device data acquisition module, detailing the specific structure and expected behavior of each message and command. It not only guides the subsequent data acquisition and device control processes but also provides the CTC system with accurate communication details, ensuring error-free information transfer with various semiconductor devices.

[0167] Step 106: Complete data collection and device control:

[0168] The core of step 106 is to enable and run the standardized equipment data acquisition module, which operates according to the configuration file generated in step 105. After loading the configuration file, the module automatically recognizes the specific protocols and instruction sets of different semiconductor devices, collecting data and issuing control commands without further human intervention. Key to this step is ensuring the real-time and accuracy of data and the timely response to control commands, which are crucial for maintaining optimal equipment operation and production efficiency. During this process, the module also needs to be able to handle anomalies and deviations to ensure robust system operation.

[0169] Step 107: Complete semiconductor communication standard interface integration:

[0170] Step 107 marks the completion of the integration and commissioning phase of the entire communication system. During this step, the cluster equipment control module and the standardized equipment data acquisition module undergo a series of rigorous integration tests to ensure the compatibility and performance of all modules in a real-world production environment. These tests not only cover the individual functions of each module, but also the interface integration and data exchange processes between them. The successful testing demonstrates that the semiconductor equipment has fully integrated the SEMI communication standard interface. The CTC system now enables efficient management and monitoring of the production line, improving automation and productivity throughout the manufacturing process, and ensuring equipment reliability and ease of maintenance.

[0171] Example 2: Data collection method for non-standard communication equipment

[0172] This embodiment details how to implement data collection and device control by developing customized data collection services for semiconductor devices that do not support standardized communication interface modification. Figure 5 The specific implementation steps are shown in Figure 6 Detailed explanation is given in .

[0173] Step 201: Confirm device communication capabilities and parameters

[0174] In step 201 of Example 2, the first task is to fully confirm and evaluate the existing communication capabilities of the semiconductor equipment. Close communication with the equipment manufacturer is the core of this process to ensure that all relevant communication methods and protocols are fully understood and documented.

[0175] Communication protocol verification: Carefully check all communication protocols supported by the device, including but not limited to serial communication, Ethernet protocols, or any device-specific custom protocols.

[0176] Communication method assessment: Evaluate the device's communication interfaces, such as RS232, RS485, TCP / IP, etc., as well as their configuration settings and network topology.

[0177] Device Structure Analysis: Detailed understanding of the device's hardware and software structure, including sensor layout, control units, actuators, and any associated user interfaces.

[0178] Operational plan discussion: Explore the standard operating modes and processes of the equipment, such as startup sequences, shutdown processes, operation and maintenance plans, and how to manage and optimize them through communication.

[0179] Recipe Management Mechanism Assessment: Evaluate the device's ability to manage recipes, understand the recipe storage, retrieval, editing, and deletion mechanisms, and how they can be remotely controlled through communication protocols.

[0180] Condition monitoring and alarm system confirmation: Confirm the monitoring parameters, alarm trigger conditions, alarm levels provided by the equipment, and communication responses when specific events occur.

[0181] Step 202: Develop customized data collection services

[0182] After gaining a thorough understanding of the semiconductor equipment's communication capabilities, step 202 involves developing a fully customized data acquisition service. The goal of this service is to ensure seamless data communication with existing equipment, even if these devices utilize non-standard communication methods and protocols. During this development process, the following key aspects need to be considered:

[0183] Communication interface adaptation: Based on the communication protocols and methods identified in step 201, the data acquisition module is designed to ensure that it is compatible with the existing communication interface of the device. This includes but is not limited to adjusting the module to support different physical connections and data transmission protocols.

[0184] Functional customization: Data collection service functionality can be customized based on the operational needs of the equipment, recipe management, and the characteristics of the condition monitoring and alarm systems. This involves precisely adjusting the data collection frequency, selecting key operating parameters, and setting triggers for specific events.

[0185] User Interface Design: Develop an intuitive and fully functional user interface to facilitate operators to monitor data collection processes, manage equipment recipes, and respond to equipment status changes. The interface design should take into account the user experience, making information easy to read and operations simple and clear.

[0186] Testing and Optimization: Continuously test the functionality and optimize the performance of modules during the development process to ensure the stability and efficiency of data collection services. Furthermore, verify the accuracy and real-time nature of the data to ensure smooth production.

[0187] Documentation and Support: Provide detailed development documentation and user manuals, including installation guides, operating instructions, and troubleshooting methods. Also, set up technical support channels to address any subsequent technical issues.

[0188] The development of customized data collection services is a comprehensive project that requires the development team to have not only profound technical knowledge but also a deep understanding of the actual operating environment and operating procedures of the equipment. Through careful design and development, this service will greatly improve the equipment's data management capabilities and production efficiency. Example screen of the customized module program, such as Figure 7 The display provides users with a clear reference view, showing the basic functions of the data collection service and the layout of the user interaction interface. Figure 7This is a data collection test program. The left side of the program is the operation area, and the right side is the log display area. The operation area is divided into four sections. The first section displays the connection status between the CTC service and the data collection program. The second section, "Normal Flow," is the process test operation area, which can simulate the device sending various event messages to the CTC to complete the process test operation. The third section, "Command," is for CTC data query settings. The fourth section, "Scenario Test," simulates the normal process operation.

[0189] Step 203: Perform communication integration testing

[0190] After completing the development of the customized data acquisition service, step 203 focuses on conducting comprehensive communication integration testing. The main tasks of this phase are to verify the communication capabilities between the newly developed customized data acquisition module and the target device, as well as to test the integrity and reliability of the data acquisition and device control functions. During the testing process, the following aspects are emphasized:

[0191] Communication protocol compatibility testing: Ensures that the customized data acquisition module can accurately parse and respond to the specific communication protocol used by the device, including adaptation of message format, data encoding, and transmission rate.

[0192] Functional integrity verification: By simulating various scenarios of equipment operation, test whether the data acquisition module can accurately capture changes in equipment status, collect key operating data, and execute control instructions.

[0193] Data Accuracy and Response Speed Assessment: Collect and analyze sample data during the data acquisition process to assess its accuracy and completeness. Also, measure the delay between sending control commands and device responses to ensure the system's response speed meets production requirements.

[0194] Abnormal situation handling test: simulate abnormal situations such as communication failures and equipment alarms to verify the processing logic and stability of the data acquisition module when encountering errors or abnormalities.

[0195] User interface and operation process testing: Ensure the friendliness of the user interface and the rationality of the operation process, so that operators can easily monitor data collection status, adjust collection parameters and handle abnormal events.

[0196] This series of integration tests not only ensures the technical performance and functional integrity of the customized data collection service, but also provides an understanding of its performance in actual production environments. The test results will directly guide subsequent tuning and improvement efforts, ensuring stable operation of the data collection service after deployment, improving production efficiency and product quality.

[0197] Step 204: Implement data collection and device control operations

[0198] After thorough communication integration testing and verification, step 204 marks the official deployment and operation of the customized data acquisition module. At this point, the module will begin real-time data exchange and device control operations with the target device. The key tasks at this stage are to ensure efficient data collection and precise device control, thereby optimizing production processes and improving product quality. To achieve these goals, the following aspects require special attention:

[0199] Automated Data Collection: The data collection module automatically executes pre-defined data collection tasks, including but not limited to monitoring equipment operating status, collecting production parameters, and recording key events during the production process. Continuous and real-time data collection is crucial in this process.

[0200] Precise equipment control execution: In addition to data collection, customized modules must automatically send control instructions to equipment based on real-time data and preset conditions, such as starting or stopping the production process and adjusting production parameters, to ensure accurate and timely equipment operation.

[0201] Data integration and analysis: The collected data will be integrated and analyzed to generate real-time production reports and trend analysis, which is of great value for timely identification of potential problems in production and guiding production adjustments and optimization.

[0202] Abnormal monitoring and response: The data acquisition module also has the function of monitoring abnormal equipment status and processing equipment alarms. It can respond in time when abnormalities are detected, take necessary control measures or notify relevant personnel to minimize production interruptions and losses.

[0203] User interaction and feedback: Through a friendly user interface, operators can monitor the status of data acquisition and equipment control in real time, adjust acquisition and control strategies, and make quick decisions based on system feedback.

[0204] Step 205: Implement comprehensive integration of communication interfaces

[0205] With the customized data acquisition module successfully deployed and operational, step 205 focuses on ensuring seamless integration and communication between the module and the cluster control module (CTC). This step centers on comprehensive integration testing, verifying that the interface between the two modules seamlessly connects, data flows unimpeded, and control commands are accurately transmitted, thereby ensuring the stability and efficiency of the entire system.

[0206] Integration test strategy: Design a comprehensive integration test plan, including the construction of test scenarios, development of test cases, and execution of test procedures, to simulate various situations that may be encountered in the actual production environment and ensure that the communication and data exchange between the customized data acquisition module and the CTC can operate stably under various conditions.

[0207] Interface compatibility verification: Focus on testing the data interface compatibility between the data acquisition module and the CTC system, including data format, transmission rate and protocol specifications, to ensure that both parties can accurately understand and process the data and instructions sent by the other party.

[0208] Data synchronization and consistency verification: By real-time monitoring of the data transmission process, the synchronization and consistency of data transmitted between the customized module and the CTC system are verified to ensure the integrity and accuracy of the data in the entire system.

[0209] Exception handling and stability testing: Simulate various abnormal situations to test the system's exception detection, alarm and handling mechanisms, as well as its stability and recovery capabilities under extreme conditions, to ensure that the system can respond to various exceptions in a timely manner and maintain continuous and stable operation.

[0210] User operation and feedback loop: Through the user-participated testing process, collect operator feedback on system usage, evaluate the system's user-friendliness and ease of operation, and optimize the user interface and operation process based on the feedback.

[0211] Completing this series of integration testing and verification ensures that the customized data acquisition module not only efficiently integrates with the CTC system but also seamlessly supports non-standard communication equipment. Through a unified monitoring and management platform, even non-standardized equipment can be seamlessly integrated into the CTC system, achieving efficient and stable operation, significantly improving the automation level and production efficiency of the semiconductor manufacturing process.

[0212] Example 3: Data collection method for semiconductor devices without communication capabilities

[0213] This embodiment describes in detail an innovative method for data acquisition and control of semiconductor devices without communication interfaces. The system architecture and specific operation procedures are respectively described in Figure 8 and Figure 9 The paper provides a graphic illustration to show the comprehensiveness and systematic nature of the method.

[0214] An overview of the system architecture is as follows Figure 8 As shown,

[0215] The core of the system is the Cluster Device Controller (CTC), which serves as the brains of the entire data acquisition and device control system, responsible for overall coordination and management. To enable interaction with devices without communication capabilities, the system uses a KVM hardware module that connects directly to the target device, capturing video output and simulating keyboard and mouse input to achieve remote device control.

[0216] The system also incorporates a video acquisition module, running in parallel with the KVM module, responsible for capturing device screen images in real time. This image data is then fed to the image processing unit. This unit applies advanced image processing technologies such as optical character recognition (OCR) and color recognition to extract key information from the device's GUI, such as its operating status and alarm information.

[0217] Furthermore, the configuration file manager, a key component of the system, maintains all configuration information, including device control instructions and data acquisition parameters. The data processing and analysis unit is responsible for further processing and analyzing the collected data, generating reports or triggering alarms as needed.

[0218] Specific implementation steps include Figure 9 As shown,

[0219] Device capability and interface analysis: First, conduct an in-depth analysis of the target device's program interface to determine the type of information that can be identified through image recognition technology, and develop a data collection and control operation list based on this analysis result.

[0220] KVM and Video Capture Module Integration: Demonstrates the process of integrating KVM and video capture modules into the CTC system and details how to configure these modules to match the requirements of specific equipment.

[0221] Configuration file creation: Based on the above analysis, create a data collection list and a control command list, and convert these lists into system-recognizable configuration files to provide guidance for automated operations.

[0222] Run data acquisition service: Start the data acquisition module and automatically perform data acquisition and device control tasks according to the configuration file without manual intervention.

[0223] Data processing and analysis and system integration testing: After data collection is completed, the data is processed and analyzed, necessary reports are generated, and system integration testing is performed to ensure system stability and data accuracy.

[0224] Step 301: Device interface and operation process analysis

[0225] This step involves a detailed analysis of the target semiconductor device's program interface, aiming to identify and record device status information that can be extracted using image processing technologies such as OCR (optical character recognition) and color recognition. This information, including machine status and alarm signals, is compiled into a detailed data collection checklist. Simultaneously, the device's interface operational functions, such as start, stop, and recipe selection, are analyzed to create an operational control checklist.

[0226] Step 302: Introducing KVM and video capture modules

[0227] To enable the Cluster Equipment Controller (CTC) system to access and control these devices without communication capabilities, this step introduces a KVM hardware module and a video capture module. These modules enable the CTC system to directly capture image information from the device screen and remotely control the device by simulating keyboard and mouse input.

[0228] Step 303: Prepare a data collection list and generate a configuration file

[0229] Based on an initial analysis of the device's interface and operational procedures, we meticulously developed a checklist of key data collection items and their corresponding collection technologies. This checklist serves as a blueprint for the automated data collection process, detailing how to capture critical information about device operations using image recognition technology. The resulting configuration file not only specifies the types of data to be collected but also the appropriate collection methods, ensuring accurate data capture and efficient processing.

[0230] The sample collection checklists illustrate several typical data collection items and how to implement them:

[0231] Machine State: Uses OCR technology combined with color recognition to identify the current machine operating status from the device interface, such as "Running", "Idle" or "Fault".

[0232] Alarm information (A1arm): Use OCR technology to identify alarm information on the device interface to facilitate timely response to abnormal device conditions.

[0233] Port State: Uses OCR technology to read the status of each port from the device interface, such as "occupied", "idle" or "faulty".

[0234] Recipe information: Use OCR technology to obtain the currently loaded recipe name and related parameters from the device's program interface to ensure the correctness of the recipe during the production process.

[0235] Job Data: The current job data of the equipment is collected through OCR technology, including job number, job status and related production parameters.

[0236] The generated configuration file lists these data collection items and their collection methods in detail, forming a structured guidance document. This not only provides a clear operational guide for data collection, but also optimizes the collection process settings, improving collection efficiency and data accuracy.

[0237] Step 304: Create a control instruction list and generate a configuration file

[0238] Following the compilation of the data collection checklist, we further developed a command control checklist for devices without communication capabilities. This checklist, based on the device interface and functionality analyzed in step 301, details automated control commands implemented using image processing technology. These control commands are then precisely translated into configuration files, enabling remote control of the devices via KVM-type device data collection services.

[0239] The control list example lists several key control commands and their descriptions in detail to guide the implementation of automated equipment control:

[0240] Job Control (Job Start / Stop / Abort): Contains commands to start, stop, or terminate the current product batch processing, allowing the production process to be flexibly adjusted according to real-time needs.

[0241] Port Control: involves opening, closing, or adjusting the material input or output ports of the equipment to ensure that the material flow enters or leaves the production line at the correct time.

[0242] Recipe Select: Allows remote modification or selection of new production recipes to configure the correct production parameters for different products or batches.

[0243] Alarm Reset: When an abnormal alarm occurs on the device, the alarm can be reset remotely to restore the normal operation of the device.

[0244] The generated configuration files precisely describe the implementation details of each control command, including the triggering conditions, execution steps, and expected results. By systematizing these control commands and incorporating them into configuration files, the KVM device data collection service can accurately execute these instructions, achieving precise control over the device.

[0245] Step 305: Run KVM type data collection service

[0246] With the help of the KVM hardware module, the data collection service is started. The service automatically performs data collection and device control tasks according to the previously generated configuration file without manual intervention, thus achieving efficient management of non-communication devices.

[0247] Step 306: Complete system integration and testing

[0248] Finally, integration testing ensures seamless integration between the data acquisition module, KVM hardware, and the CTC system, verifying the stability of the entire system and the accuracy of data acquisition and control. After successful testing, the semiconductor equipment achieves data communication interface integration through the CTC system, enabling effective monitoring and management even for equipment that initially lacks any communication capabilities.

[0249] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A semiconductor device data acquisition method supporting standardized communication transformation, characterized in that: Implementing a standard semiconductor equipment communication interface in the cluster equipment controller system, the interface being used to connect to semiconductor equipment data analysis and process control systems; For different types of semiconductor equipment, data collection and process control of the equipment are realized, as well as the conversion of equipment data to internal system data, including: For devices that have communication capabilities that meet semiconductor equipment communication standards and can be modified to communicate with the cluster equipment controller system, communication rules are formulated. The cluster equipment controller system completes the communication protocol conversion from the device communication to the standard semiconductor equipment communication interface. For devices that do not have the communication capability that meets the semiconductor equipment communication standards, but can achieve communication with the device side through the cluster device controller system development program, the cluster device controller system device side obtains the preset collected data, and the cluster device controller system completes the communication protocol conversion from the device communication to the standard semiconductor equipment communication interface; For devices without any communication capabilities, the program interface of the acquisition device is used to identify the information on the screen to complete the preset data acquisition. The integrated device of keyboard, mouse and video is used to complete the mouse and keyboard operations to achieve screen switching, data input, and operation functions. The cluster device controller system completes the communication protocol conversion from the device communication to the standard semiconductor device communication interface. After completing data collection for different types of equipment using the data acquisition system, the preset collected data is sent to the cluster device controller system according to the cluster device controller system interface definition, and the control commands of the cluster device controller system are forwarded to the equipment, thereby completing the integration and docking of the equipment and the cluster device controller system. Ultimately, multiple devices are equipped with standard semiconductor equipment communication interfaces, and data acquisition systems are used to collect data for different types of semiconductor equipment. The data acquisition system obtains preset collected data and device function information from the device side through the high-speed message service communication interface, general device model domain service, device communication extension domain service and device data acquisition interface component according to different device communication protocols and data formats; According to the cluster equipment controller system interface definition, the collected data is sent to the cluster equipment controller system. The cluster equipment controller system is a system used to connect to the semiconductor equipment data analysis and process control system. It receives data from the data acquisition system through a standard semiconductor equipment communication interface and performs data conversion, storage, analysis and processing to realize equipment monitoring, management, optimization and maintenance functions; The control commands issued by the cluster device controller system are forwarded to the corresponding semiconductor devices. The control commands are instructing the process control, parameter adjustment, state switching, and alarm clearing operations of the equipment based on the results of equipment data analysis and process control. Through the corresponding components of the data acquisition system, the control commands are converted into communication protocols and data formats that can be recognized by the equipment side, and sent to the equipment side through the equipment communication interface to realize control and feedback of the equipment.

2. The semiconductor device data acquisition method supporting standardized communication transformation according to claim 1, characterized in that: The method for implementing a standard semiconductor device communication interface in a cluster device controller system is as follows: Based on the semiconductor equipment communication standard protocol set, a high-speed message service communication interface is implemented in the cluster equipment control system. Domain modeling is performed based on the detailed functional requirements of the general equipment model, and related entities and domain services are established to realize the secondary message sending and receiving function of equipment communication. Based on the semiconductor equipment communication standard set, domain modeling is performed in the cluster equipment control system according to the requirements of each standard, and relevant entities and domain services are established to implement carrier management, process operation or control operation management, substrate tracking, equipment availability and maintenance status, and equipment performance tracking functions; According to the semiconductor equipment data collection standard set, a network service-based data collection interface is implemented in the cluster equipment control system to meet the requirements of the general equipment model, equipment self-description, client authentication and authorization, data collection management, and common metadata related standards.

3. The semiconductor device data acquisition method supporting standardized communication transformation according to claim 1, characterized in that: The communication rules are: Four message types are defined: notification, report, command, and request. Each message type is represented by bit and word data and has a corresponding timing process. According to the requirements of the standard semiconductor device communication interface, a PLC address specification document is developed as the basis for the communication protocol; The device side develops a communication program based on the PLC address specification file, performs integration testing with the standardized data acquisition service, and exports a configuration file; The standardized data collection service reads the configuration file, periodically scans for messages supported by the device, communicates with the device, and records the communication log. The notification type is a message type that uses one bit to represent one event, and the timing process is: When an event occurs, the device sets the bit to On. When the event is completed, the device sets the bit to Off. The report type is a message type that uses a pair of bits: a report bit and a reply bit and a group of word data to represent an event. The timing process is: When an event occurs, the device writes the details to the word data and then sets the report bit to On. After the data acquisition program scans and finds that the report bit is On, it reads the word data. The data acquisition program sets the reply bit to On, indicating that the reading is complete. The device scans and sets the reply bit to On and the report bit to Off. When the data acquisition program scans and finds that the report bit is Off, it sets the reply bit to Off. Report message sending completed; If the reading is not completed within the set time, it means that the data acquisition program has timed out. After the timeout, the device will set the report bit to Off to indicate that data transmission has stopped, and record the corresponding error log. The command type is represented by a pair of bits: command bit and reply bit and a set of word data, which represent the command type sent by a data acquisition program to the device. The timing process is as follows: The data acquisition program writes the details to the word data, and then sets the command bit to On. After the device scans and finds the command bit is On, it reads the word data. The device sets the reply bit to On, indicating that the reading is complete. The data acquisition program scans until the reply bit is set to On and the command bit is set to Off. When the device scans and finds the command bit is Off, it sets the reply bit to Off. The command message is sent successfully. If the reading is not completed within the set time, it means that the device has timed out from receiving the data. After the timeout, the data acquisition program will set the command bit to Off to indicate that the data transmission is terminated and record the corresponding error log. The request type is represented by a pair of bits: a request bit and a reply bit and a set of word data. The request type can be sent in both directions. The timing process is: The request side writes the details to the request area of the word data, and then sets the request bit to On. After the response end scans and finds that the request bit is On, it reads the data in the request area of the word data and writes the reply data to the response area of the word data. The answering end sets the reply bit to On, indicating that the answer is complete. The request end scans and sets the reply bit to On, reads the response area content of the word data, and sets the request bit to Off. When the responder scans and finds that the request bit is Off, it sets the reply bit to Off. The request message is sent successfully; If the response is not completed within the set time, it means that the responder has timed out. After the timeout, the requester will set the request bit to Off to indicate the termination of the request data and record the corresponding error log.

4. The semiconductor device data acquisition method supporting standardized communication transformation according to claim 1, characterized in that: The method for the cluster device controller system device end to obtain preset collected data is: The cluster device controller system establishes a communication connection with the device end through the serial port, network port or wireless communication module, sends data acquisition instructions or reads the data buffer area of the device end according to the communication protocol and data format of the device end, and obtains the data of the device end; The cluster equipment controller system device side parses, verifies, converts and encapsulates the acquired data to generate a message data packet that complies with the standard semiconductor equipment communication interface, and sends it to the semiconductor equipment data analysis and process control system through the high-speed message service communication interface; The cluster equipment controller system receives control commands from the semiconductor process control system, parses, verifies, converts and encapsulates the control commands, generates control data packets that comply with the communication protocol and data format of the equipment, and sends them to the equipment through the serial port, network port or wireless communication module to achieve control and feedback of the equipment.

5. The method for collecting data of semiconductor equipment supporting standardized communication transformation according to claim 1, characterized in that: The method of completing the preset data collection by identifying the information on the screen through the acquisition device program interface is as follows: Connect the device's keyboard and mouse to a KVM-type data acquisition program through the keyboard, mouse, and video module, so that the data acquisition program can send keyboard and mouse commands to the device; Through the video acquisition hardware module, the device program screen is connected to the KVM type data acquisition program, so that the data acquisition program can collect and analyze the program screen; Analyze the device program interface, obtain device information through optical character recognition, pattern matching, and color judgment software algorithms, and organize this information into a collection list; According to the collection list, set the screen switching steps required for each collection item and generate the operation configuration file; According to the collection list, set the type and parameters of the collected screen information required for each collection project, realize information collection through optical character recognition, pattern matching, and color judgment software algorithms, and generate a collection configuration file; Based on the standard semiconductor equipment communication interface requirements and the device software screen functional capabilities, the functions that can be operated through the screen are organized into a control list; According to the control list, set the steps for switching screens and operating screens required for each control item, and generate operation configuration files; The KVM data collection service reads the operation configuration file and the collection configuration file, reads the device status regularly, and collects data from the device. The KVM type data acquisition service reads the operation configuration file and completes the automatic operation of the device screen when the cluster device controller system sends a control command, thereby realizing automatic control of the device.

6. The semiconductor device data acquisition method supporting standardized communication transformation according to claim 1, characterized in that: The standard semiconductor equipment communication interface complies with any one of the SECS / GEM, GEM300, EDA, and Inteface-A standard protocol sets, and is used to connect to the EAP or FDC business system of the semiconductor equipment.

7. A semiconductor device data acquisition system supporting standardized communication transformation, applying any one of the semiconductor device data acquisition methods supporting standardized communication transformation according to claims 1-6, characterized in that: include: A cluster equipment controller system for implementing a standard semiconductor equipment communication interface for interfacing with semiconductor equipment data analysis and process control systems; One or more data acquisition systems for performing data acquisition and process control on different types of semiconductor equipment, and for converting equipment data into message data packets that comply with a standard semiconductor equipment communication interface and for communicating with a cluster equipment controller system; The data acquisition system adopts different data acquisition methods according to the communication capabilities of the equipment, including: for equipment that has communication capabilities that meet semiconductor equipment communication standards and can be modified to communicate with the cluster equipment controller system, using a high-speed message service communication interface to complete the communication protocol conversion from the equipment communication to the standard semiconductor equipment communication interface according to the equipment communication rules; For devices that do not have the communication capability that meets the semiconductor equipment communication standards, but can achieve communication with the device side through the cluster equipment controller system development program, use the serial port, network port or wireless communication module to complete the communication protocol conversion from the device communication to the standard semiconductor equipment communication interface according to the communication protocol and data format of the device side; For devices that do not have any communication capabilities, use the keyboard, mouse and video module to identify the information on the screen through the acquisition device program interface to complete the preset data acquisition. Through optical character recognition, pattern matching, and color judgment software algorithms, the communication protocol conversion from the device communication to the standard semiconductor device communication interface is completed.

8. The semiconductor equipment data acquisition system supporting standardized communication transformation according to claim 7, characterized in that: The cluster device controller system includes: A high-speed message service communication interface for sending and receiving message data packets with the data acquisition system; A generic device model domain service, used to perform domain modeling based on the detailed functional requirements of the generic device model, establish related entities and domain services, and implement the secondary messaging function of device communication; An equipment communication extension domain service, which is used to perform domain modeling based on the requirements of the semiconductor 300mm equipment communication extension standard protocol set, establish related entities and domain services, and implement carrier management, process operation or control operation management, substrate tracking, equipment availability and maintenance status, and equipment performance tracking functions; A data collection interface based on network services, used to implement data collection functions that meet the requirements of common device models, device self-description, client authentication and authorization, data collection management, and common metadata related standards.

9. A semiconductor equipment data acquisition system supporting standardized communication transformation according to claim 7 or 8, characterized in that: The standard semiconductor equipment communication interface complies with any one of the SECS / GEM, GEM300, EDA, and Inteface-A standard protocol sets, and is used to connect to the EAP or FDC business system of the semiconductor equipment.

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