A high-energy ion implanter optical path alignment device

Abstract

This invention discloses an optical path alignment device for a high-energy ion implanter, comprising a planar transceiver module, an energy-transceiver module, an radio frequency (RF) module, an analyzer, an energy-transceiver laser mounting plate, a planar transceiver laser mounting plate, and a three-electrode alignment fixture. The planar transceiver module, energy-transceiver module, RF module, and analyzer are all mounted on a screen-printed floor. The energy-transceiver laser mounting plate is mounted on the magnetic yoke of the energy-transceiver module, and the planar transceiver laser mounting plate is mounted on the magnetic yoke of the planar transceiver module, used to hold the laser instrument. During optical path alignment, the laser instrument is first placed on the planar transceiver laser mounting plate. By adjusting the positions of the feet of the planar transceiver module and the energy-transceiver module, the laser exits from the planar transceiver outlet and then from the energy-transceiver inlet and the energy-transceiver side. The laser instrument is then moved to the energy-transceiver laser mounting plate, and the positions of the feet of the RF module and the analyzer are adjusted respectively, so that the laser exits sequentially from the energy-transceiver inlet, RF outlet, RF inlet, analyzer outlet, and analyzer inlet. This invention features a compact structure, convenient operation, and high stability.

Description

Technical Field

[0001] This invention relates to the field of ion implantation technology, and more specifically to an optical path alignment device for a high-energy ion implanter. Background Technology

[0002] Ion implantation is a technique that involves ionizing atoms of a certain element, accelerating them in an electric field to obtain high energy, and then injecting them into the surface of a solid material to alter the physical or chemical properties of the material. Ion implantation equipment is mainly divided into medium-current, high-current, and high-energy machines. High-energy machines, due to their high energy, point-beam transmission, and the difficulty in adjusting beam dosage and uniformity, have long been a gap in domestic products, with the domestic market entirely reliant on imports. With the development of semiconductor technology, the linewidth of devices is continuously shrinking, the gate oxide layer is becoming thinner, and the photoresist layer coverage on the wafer surface is increasing, placing increasingly higher demands on the uniformity, repeatability, safety, and production efficiency of the ion implantation process.

[0003] The existing high-energy generator equipment lacks optical path alignment tooling, relying on manual on-site measurement of dimensions and moving of modules, which cannot guarantee that ions move along the designed route, resulting in a reduction in the beam current reaching the target disk and failing to meet the requirements of the implantation process. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide a high-energy ion implanter optical path alignment device that is compact, easy to operate and highly stable, in response to the above-mentioned problems of the prior art.

[0005] To solve the above-mentioned technical problems, the technical solution adopted by the present invention is as follows:

[0006] A high-energy ion implanter optical path alignment device includes: a planar transparent module, an energy-transmitting module, an radio frequency module, an analyzer, an energy-transmitting laser mounting plate, a planar transparent laser mounting plate, and a three-electrode alignment fixture. The planar transparent module, energy-transmitting module, radio frequency module, and analyzer are sequentially mounted on a floor screen for position adjustment. The energy-transmitting laser mounting plate is mounted on the magnetic yoke of the energy-transmitting module for placing the laser instrument. The planar transparent laser mounting plate is also mounted on the magnetic yoke of the planar transparent module for placing the laser instrument. The three-electrode alignment fixture is located on the source cavity connected to the analyzer to realize the ion source. The optical path is aligned to the three electrodes. During optical path alignment, the laser instrument is first placed on the plano-transparent laser mounting plate. By adjusting the position of the feet of the plano-transparent module, the laser is made to pass through the plano-transparent outlet. The position of the feet of the power transmission module is adjusted so that the laser passes through the power transmission inlet and the power transmission side, thus completing the optical path alignment of the plano-transparent module and the power transmission module. Then, the laser instrument is moved to the power transmission laser mounting plate, and the positions of the feet of the RF module and the analyzer are adjusted respectively, so that the laser passes through the power transmission inlet, RF outlet, RF inlet, analyzer outlet, and analyzer inlet in sequence, thus completing the optical path alignment of the power transmission module, RF module, and analyzer.

[0007] As a further improvement of the present invention, the flat-panel module is provided with a flat-panel inlet fixture at its inlet and a flat-panel outlet fixture at its outlet; both the flat-panel outlet fixture and the flat-panel inlet fixture are provided with light-transmitting holes at their center positions to allow light beams to enter and exit the flat-panel module; the flat-panel outlet fixture and the flat-panel inlet fixture are provided with multiple threaded holes and pin holes to allow the flat-panel outlet fixture and the flat-panel inlet fixture to be detachably connected to the flat-panel module.

[0008] As a further improvement of the present invention, the entrance of the light-transmitting module is provided with a light-transmitting inlet fixture, the exit of the light-transmitting module is provided with a light-transmitting outlet fixture, and the side of the light-transmitting module is provided with a light-transmitting side fixture; the center of the light-transmitting outlet fixture and the light-transmitting inlet fixture are provided with light-transmitting holes, and the center of the light-transmitting side fixture is provided with inclined light-transmitting holes to realize the entry and exit of light beams into and out of the light-transmitting module; the light-transmitting outlet fixture, the light-transmitting inlet fixture, and the light-transmitting side fixture are all provided with multiple threaded holes and pin holes to realize the detachable connection between the light-transmitting outlet fixture, the light-transmitting inlet fixture, and the light-transmitting side fixture and the light-transmitting module.

[0009] As a further improvement of the present invention, the RF module is provided with an RF inlet fixture at its inlet and an RF outlet fixture at its outlet. The RF outlet fixture and the RF inlet fixture have the same structural configuration. The RF outlet fixture is provided with a light-transmitting hole at its center to allow light beams to enter and exit the RF module. The RF outlet fixture is provided with multiple threaded holes and pin holes evenly distributed on it to allow the RF outlet fixture and the RF module to be detachably connected.

[0010] As a further improvement of the present invention, the analyzer is provided with an analyzer outlet fixture at the outlet and an analyzer inlet fixture at the inlet. The analyzer outlet fixture has a light-transmitting hole at its center, and the analyzer inlet fixture has a ramp at its center with a through light-transmitting hole at its center to allow the light beam to enter and exit the analyzer. The analyzer outlet fixture and the analyzer inlet fixture are evenly distributed with multiple threaded holes and pin holes to allow the analyzer outlet fixture and the analyzer inlet fixture to be detachably connected to the analyzer.

[0011] As a further improvement of the present invention, the tilt angle β of the inclined platform is 20°±2°.

[0012] As a further improvement of the present invention, the diameter of the light-transmitting hole is 1mm ± 0.1mm.

[0013] As a further improvement of the present invention, the laser-transmitting mounting plate is L-shaped, and one side of the laser-transmitting mounting plate is provided with a plurality of first mounting holes to realize the laser-transmitting mounting plate being mounted on the magnetic yoke of the laser-transmitting module. The other side of the laser-transmitting mounting plate is provided with a plurality of second mounting holes to realize the laser device being mounted on the laser-transmitting mounting plate.

[0014] As a further improvement of the present invention, the planar laser mounting plate has an L-shaped structure. One side of the planar laser mounting plate is provided with a clamp to enable the planar laser mounting plate to be mounted on the magnetic yoke of the planar module. The other side of the planar laser mounting plate is provided with multiple third mounting holes to enable the laser instrument to be mounted on the planar laser mounting plate.

[0015] As a further improvement of the present invention, the three-electrode alignment fixture includes a positioning block, a pressure block, and a movable rod; the positioning block and the pressure block are both mounted on the source cavity, the source cavity is mounted on the analyzer, and the analyzer is provided with three electrodes; the movable rod passes through the positioning block and the pressure block in sequence, and the head of the movable rod moves and inserts into the slit of the head of the three electrodes to assist in the positioning of the three electrodes in the analyzer.

[0016] Compared with the prior art, the advantages of the present invention are as follows:

[0017] The optical path alignment device for a high-energy ion implanter of this invention facilitates position adjustment by sequentially mounting a planar transparent module, an energy-transmitting module, an RF module, and an analyzer onto a floor screen. This allows for coarse positioning of the modules without the need for dimensional measurements, improving optical path alignment efficiency. Furthermore, by mounting an energy-transmitting laser mounting plate onto the magnetic yoke of the energy-transmitting module and a planar transparent laser mounting plate onto the magnetic yoke of the planar transparent module, the laser instrument can be placed, preventing accidental human intervention that could affect the laser position. This also improves laser positioning accuracy and significantly shortens laser calibration time. During optical path alignment, the laser instrument is first placed on the planar transparent laser mounting plate. On the board, by adjusting the position of the feet of the planar transparent module, the laser is made to exit from the planar transparent outlet. The position of the feet of the energy-transmitting module is then adjusted, allowing the laser to exit from the energy-transmitting inlet and side, thus completing the optical path alignment of the planar transparent and energy-transmitting modules. Next, the laser instrument is moved to the energy-transmitting laser mounting plate, and the positions of the feet of the RF module and analyzer are adjusted respectively, allowing the laser to exit sequentially from the energy-transmitting inlet, RF outlet, RF inlet, analyzer outlet, and analyzer inlet, completing the optical path alignment of the energy-transmitting module, RF module, and analyzer. This convenient and quick process ensures that ions move along the designed path, resulting in a stable beam from the target disk and well meeting the implantation process requirements. Simultaneously, a three-electrode alignment fixture is installed on the source cavity, which is then mounted on the analyzer. This three-electrode alignment fixture achieves optical path alignment from the ion source to the three electrodes, ensuring beam accuracy from the analyzer to the ion source. This invention achieves optical path alignment from the ion source to the three electrodes, as well as optical path alignment between the analyzer, RF module, energy transmission module, and parallel lens module, eliminating cumulative errors that affect beam quality. Attached Figure Description

[0018] Figure 1 This is a schematic diagram illustrating the structural principle of the optical path alignment device for a high-energy ion implanter in a specific embodiment of the present invention;

[0019] Figure 2 This is a schematic diagram illustrating the structural principle of the analyzer outlet tooling in a specific embodiment of the present invention;

[0020] Figure 3 This is a schematic diagram of the structural principle of the analyzer inlet tooling in a specific embodiment of the present invention; wherein, Figure (a) is a cross-sectional view and Figure (b) is a bottom view of Figure (a);

[0021] Figure 4 This is a schematic diagram illustrating the structural principle of the RF output tooling in a specific embodiment of the present invention;

[0022] Figure 5 This is a schematic diagram illustrating the structural principle of the through-hole tooling in a specific embodiment of the present invention;

[0023] Figure 6 This is a schematic diagram illustrating the structural principle of the through-hole tooling in a specific embodiment of the present invention;

[0024] Figure 7 This is a schematic diagram of the structural principle of the transparent side tooling in a specific embodiment of the present invention; wherein, Figure (a) is a cross-sectional view and Figure (b) is a side view;

[0025] Figure 8 This is a schematic diagram illustrating the structural principle of the flat-panel outlet tooling in a specific embodiment of the present invention;

[0026] Figure 9 This is a schematic diagram illustrating the structural principle of the planar transparent inlet tooling in a specific embodiment of the present invention;

[0027] Figure 10 This is a schematic diagram illustrating the structural principle of the laser-transmitting mounting plate in a specific embodiment of the present invention;

[0028] Figure 11 This is a schematic diagram of the structure and principle of laser-transmitting installation in a specific embodiment of the present invention;

[0029] Figure 12 This is a schematic diagram illustrating the structural principle of the planar laser mounting plate in a specific embodiment of the present invention;

[0030] Figure 13 This is a schematic diagram illustrating the structural principle of the planar laser mounting system in a specific embodiment of the present invention;

[0031] Figure 14 This is a schematic diagram of the layout of the floor screen printing in a specific embodiment of the present invention;

[0032] Figure 15 This is a schematic diagram illustrating the structural principle of the three-electrode alignment tooling in a specific embodiment of the present invention;

[0033] Figure 16 This is a schematic diagram of the structural principle of the three-electrode alignment tooling from another perspective in a specific embodiment of the present invention;

[0034] Figure 17 for Figure 16 A schematic diagram of the structural principle in the CC direction;

[0035] Figure 18 This is a schematic diagram illustrating the structural principle of the three-electrode alignment tooling installed in the source cavity in a specific embodiment of the present invention;

[0036] Figure 19 for Figure 18 Schematic diagram of the structural principle in the AA direction;

[0037] Figure 20 for Figure 18 Schematic diagram of the structural principle of the middle BB direction;

[0038] Figure 21 for Figure 19 A schematic diagram of the structural principle at point D;

[0039] Legend: 1. Flat-screen module; 11. Flat-screen outlet fixture; 12. Flat-screen inlet fixture; 2. Transparent module; 21. Transparent outlet fixture; 22. Transparent inlet fixture; 23. Transparent side fixture; 231. Protrusion; 3. RF module; 31. RF outlet fixture; 32. RF inlet fixture; 4. Analyzer; 41. Analyzer outlet fixture; 42. Analyzer inlet fixture; 421. Inclined platform; 5. Light-transmitting hole; 61. Threaded hole; 62. Pin hole; 7. Transparent laser Mounting plate; 71, First mounting hole; 72, Second mounting hole; 8, Flat-view laser mounting plate; 81, Clamp; 82, Third mounting hole; 9, Three-electrode centering fixture; 91, Positioning block; 911, Protrusion; 92, Pressure block; 93, Movable rod; 931, Head; 100, Laser instrument; 200, Source cavity; 201, Fixing block; 202, Spring; 203, Bolt; 300, Three electrodes; 301, Electrode head; 302, X-axis motor; 303, Y-axis motor. Detailed Implementation

[0040] The present invention will be further described below with reference to the accompanying drawings and specific preferred embodiments, but this does not limit the scope of protection of the present invention.

[0041] In the description of this invention, it should be understood that the terms "side", "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0042] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more unless otherwise explicitly specified.

[0043] Example

[0044] like Figures 1 to 21As shown, the optical path alignment device for a high-energy ion implanter of the present invention includes a planar transparent module 1, an energy-transmitting module 2, an radio frequency module 3, an analyzer 4, an energy-transmitting laser mounting plate 7, a planar transparent laser mounting plate 8, and a three-electrode alignment fixture 9. The planar transparent module 1, energy-transmitting module 2, radio frequency module 3, and analyzer 4 are sequentially mounted on a floor screen for position adjustment. The energy-transmitting laser mounting plate 7 is mounted on the magnetic yoke of the energy-transmitting module 2 for placing the laser instrument 100. The planar transparent laser mounting plate 8 is mounted on the magnetic yoke of the planar transparent module 1 for placing the laser instrument 100. The three-electrode alignment fixture 9 is mounted on the analyzer 4 for achieving optical path alignment from the ion source to the three electrodes. During optical path alignment, the laser instrument 100 is first placed on the plano-transparent laser mounting plate 8. By adjusting the position of the feet of the plano-transparent module 1, the laser is made to exit from the plano-transparent outlet. The position of the feet of the energy-transparent module 2 is then adjusted, so that the laser exits from the energy-transparent inlet and the energy-transparent side, thus completing the optical path alignment of the plano-transparent module 1 and the energy-transparent module 2. Next, the laser instrument 100 is moved to the energy-transparent laser mounting plate 7, and the positions of the feet of the RF module 3 and the analyzer 4 are adjusted respectively, so that the laser exits sequentially from the energy-transparent inlet, RF outlet, RF inlet, analyzer outlet, and analyzer inlet, thus completing the optical path alignment of the energy-transparent module 2, RF module 3, and analyzer 4. It can be understood that the plano-transparent module 1, energy-transparent module 2, RF module 3, and analyzer 4 are conventional components in a high-energy ion implanter, and their specific structural configurations will not be described in detail here.

[0045] The floor screen printing is used for the rough positioning of the module. In the existing solution, the module positioning requires measuring the size, which is time-consuming and cumbersome. In this embodiment, the screen printing is added to the bottom, which makes it easier for the module to be placed and saves the module adjustment time.

[0046] In this embodiment, the planar transparent module 1, the light-transmitting module 2, the radio frequency module 3, and the analyzer 4 are sequentially mounted on the floor screen to facilitate position adjustment. Coarse positioning of the modules can be performed without measuring dimensions, thus improving the optical path alignment efficiency. By mounting the light-transmitting laser mounting plate 7 on the magnetic yoke of the light-transmitting module 2 and mounting the planar transparent laser mounting plate 8 on the magnetic yoke of the planar transparent module 1, the laser instrument 100 can be placed, avoiding the influence of accidental human touch on the laser position. This also helps to improve the laser positioning accuracy and significantly shorten the laser calibration time. During optical path alignment, the laser instrument 100 is first placed on the planar laser mounting plate 8. By adjusting the position of the feet of the planar laser module 1, the laser exits from the planar laser outlet. The position of the feet of the energy-transmitting module 2 is then adjusted, allowing the laser to exit from the energy-transmitting inlet and the energy-transmitting side, thus completing the optical path alignment of the planar laser module and the energy-transmitting module. Next, the laser instrument 100 is moved to the energy-transmitting laser mounting plate 7, and the positions of the feet of the RF module 3 and the analyzer 4 are adjusted respectively, allowing the laser to exit sequentially from the energy-transmitting inlet, RF outlet, RF inlet, analyzer outlet, and analyzer inlet, thus completing the optical path alignment of the energy-transmitting module, RF module, and analyzer. This convenient and quick process ensures that the ions move along the designed path, resulting in a stable beam from the target disk and effectively meeting the implantation process requirements. Simultaneously, the three-electrode alignment fixture 9 is installed on the source cavity 200 connected to the analyzer 4. The three-electrode alignment fixture 9 is used to achieve optical path alignment from the ion source to the three electrodes 300, ensuring the beam accuracy from the analyzer 4 to the ion source. In this embodiment, optical path alignment is achieved not only from the ion source to the three electrodes 300, but also between the analyzer 4, the radio frequency module 3, the energy transmission module 2, and the parallel lens module 1, thus eliminating the cumulative error that affects beam quality.

[0047] like Figure 8 and Figure 9 As shown, the flat-panel transparent module 1 has a flat-panel transparent inlet fixture 12 at its inlet and a flat-panel transparent outlet fixture 11 at its outlet. Both the flat-panel transparent outlet fixture 11 and the flat-panel transparent inlet fixture 12 have light-transmitting holes 5 at their centers to allow light beams to enter and exit the flat-panel transparent module 1. The flat-panel transparent outlet fixture 11 and the flat-panel transparent inlet fixture 12 are evenly distributed with multiple threaded holes 61 and pin holes 62 to allow for detachable connection between the flat-panel transparent outlet fixture 11 and the flat-panel transparent inlet fixture 12 and the flat-panel transparent module 1.

[0048] like Figure 5 , Figure 6 and Figure 7As shown, the entrance of the light-transmitting module 2 is provided with a light-transmitting inlet fixture 22, the exit of the light-transmitting module 2 is provided with a light-transmitting outlet fixture 21, and the side of the light-transmitting module 2 is provided with a light-transmitting side fixture 23. Both the light-transmitting outlet fixture 21 and the light-transmitting inlet fixture 22 have light-transmitting holes 5 at their centers, and the light-transmitting side fixture 23 has two symmetrically arranged inclined light-transmitting holes 5 in its center to allow light beams to enter and exit the light-transmitting module 2. Multiple threaded holes 61 and pin holes 62 are evenly distributed on the light-transmitting outlet fixture 21, the light-transmitting inlet fixture 22, and the light-transmitting side fixture 23 to allow for detachable connection between the light-transmitting outlet fixture 21, the light-transmitting inlet fixture 22, and the light-transmitting side fixture 23 and the light-transmitting module 2. One of the light-transmitting holes 5 in the light-transmitting side fixture 23 is used for optical path alignment of the light-transmitting module 2, the RF module 3, and the analyzer 4, and the other light-transmitting hole 5 is used for optical path alignment of the flat-panel light-transmitting module 1 and the light-transmitting module 2.

[0049] The side-mounted tool 23 utilizes the mounting plane and side for positioning, while the side is set with a 2° taper, ensuring precise positioning and convenient installation.

[0050] like Figure 4 As shown, the RF module 3 has an RF inlet fixture 32 at its inlet and an RF outlet fixture 31 at its outlet. The RF outlet fixture 31 and the RF inlet fixture 32 have the same structure. The RF outlet fixture 31 has a light-transmitting hole 5 at its center to allow the light beam to enter and exit the RF module 3. The RF outlet fixture 31 has multiple threaded holes 61 and pin holes 62 evenly distributed on it to allow the RF outlet fixture 31 to be detachably connected to the RF module 3.

[0051] like Figure 2 and Figure 3 As shown, the analyzer 4 has an analyzer outlet fixture 41 at its outlet and an analyzer inlet fixture 42 at its inlet. The analyzer outlet fixture 41 has a light-transmitting hole 5 at its center, and the analyzer inlet fixture 42 has a ramp 421 at its center, with a through light-transmitting hole 5 at its center, to allow the light beam to enter and exit the analyzer 4. Both the analyzer outlet fixture 41 and the analyzer inlet fixture 42 have multiple threaded holes 61 and pin holes 62 evenly distributed on them, allowing for detachable connection between the analyzer outlet fixture 41 and the analyzer inlet fixture 42 and the analyzer 4.

[0052] In this embodiment, the analyzer inlet fixture 42 is positioned by the cylindrical surface and the mounting plane, which ensures accurate positioning. The threaded hole 61 is set in the form of a conical threaded hole, which is installed by a conical screw and can find its own center, thus increasing the positioning accuracy.

[0053] Furthermore, the tilt angle β of the ramp 421 is 20°±2° to match the beam incident angle of the ion implanter.

[0054] In this embodiment, the diameter of the light-transmitting hole 5 is 1mm ± 0.1mm to allow the laser to pass through, thereby improving the alignment accuracy of the optical path.

[0055] like Figure 10 and Figure 11 As shown, the laser-transmitting mounting plate 7 has an L-shaped structure. One side of the laser-transmitting mounting plate 7 is provided with multiple first mounting holes 71 to enable the laser-transmitting mounting plate 7 to be mounted on the magnetic yoke of the laser-transmitting module 2. The other side of the laser-transmitting mounting plate 7 is provided with multiple second mounting holes 72 to enable the laser instrument 100 to be mounted on the laser-transmitting mounting plate 7.

[0056] Specifically, the existing mounting holes of the magnetic yoke are used to install the laser-transmitting mounting plate 7, avoiding the need for re-drilling holes. This method is convenient and quick, and the laser position is fixed. The laser-transmitting mounting plate 7 has laser mounting holes to ensure that the laser is in a locked state during optical path alignment, preventing accidental activation from affecting the laser. Existing optical path alignment requires placing the laser instrument 100 on the ground, which results in an excessively large adjustment range and a long laser positioning time. In this embodiment, the laser-transmitting mounting plate 7 enables more precise laser positioning and shortens the laser calibration time.

[0057] like Figure 12 and Figure 13 As shown, the planar laser mounting plate 8 has an L-shaped structure. One side of the planar laser mounting plate 8 is equipped with a clamp 81 to allow it to be mounted onto the magnetic yoke of the planar module 1. This allows for vertical adjustment of the laser height, increasing the adjustable range of the laser. The other side of the planar laser mounting plate 8 has multiple third mounting holes 82 to allow the laser instrument 100 to be mounted onto the planar laser mounting plate 8, ensuring that the laser is locked during optical path alignment and preventing accidental activation from affecting the laser.

[0058] Specifically, the planar laser mounting plate 8 is installed using the existing mounting holes of the magnetic yoke, which is convenient and quick. Existing optical path alignment requires placing the laser instrument 100 on the ground, resulting in an excessively large adjustment range and a long laser positioning time. In this embodiment, the planar laser mounting plate 8 enables more precise laser positioning and shortens the laser calibration time.

[0059] In this embodiment, the tooling plate is positioned by pins and mounting plane, resulting in a short dimensional chain, small cumulative error, and improved optical path alignment accuracy.

[0060] like Figure 15 , Figure 16 and Figure 17As shown, the three-electrode alignment fixture 9 includes a positioning block 91, a pressure block 92, and a movable rod 93. Both the positioning block 91 and the pressure block 92 are mounted on the source cavity 200, which is mounted on the analyzer 4. The analyzer 4 contains three electrodes 300, with the electrode heads 301 connected to an X-axis motor 302 and a Y-axis motor 303, respectively. The motors drive the adjustment of the electrode head 301's mounting position. The movable rod 93 passes through the positioning block 91 and the pressure block 92 sequentially. The thickness of the movable rod 93's head 931 is approximately equal to the thickness of the slit in the electrode head 301, and the head 931 can move and insert within the slit of the electrode head 301 to assist in the positioning of the three electrodes 300 within the analyzer 4.

[0061] Furthermore, such as Figure 17 As shown, a protrusion 911 is provided on the positioning block 91 to increase the positioning area of ​​the movable rod 93, making the positioning of the movable rod 93 more accurate.

[0062] like Figure 18 , Figure 19 and Figure 21 As shown, the positioning block 91 is installed at the pin of the source cavity 200, and the pressure block 92 is fixed by the fixing block 201 on the source cavity 200. The fixing block 201 is fixed to the source cavity 200 by bolts 203. A spring 202 is provided inside the fixing block 201. The spring 202 is in a compressed state to facilitate the installation and removal of the pressure block 92.

[0063] In this embodiment, the optical path alignment step is as follows:

[0064] Step 1: First, place the analyzer, RF module, transmit / transmitter module, and planar transmitter module on the floor silkscreen position. The round feet of the analyzer, RF module, transmit / transmitter module, and planar transmitter module should align with the floor silkscreen to complete the coarse positioning of the modules. Figure 14 In the diagram, A, D, E, F, and G indicate the positions of the round floor markers on the floor.

[0065] Step 2: After positioning, install the analyzer inlet fixture 42 to the inlet of the analyzer 4, install the analyzer outlet fixture 41 to the outlet of the analyzer, install the RF inlet / outlet fixture to the inlet / outlet of the RF module 3, install the transparent inlet fixture 22 to the inlet of the transparent module 2, install the transparent outlet fixture 21 to the outlet of the transparent module 2, install the transparent side fixture 23 to the side of the transparent module 2, install the flat transparent inlet fixture 12 to the inlet of the flat transparent module 1, and install the flat transparent outlet fixture 11 to the outlet of the flat transparent module 1.

[0066] Step 3: Install the laser-transmitting mounting plate 7 onto the magnetic yoke of the laser-transmitting module 2, and install the laser-transmitting mounting plate 8 onto the magnetic yoke of the flat-transmitting module 1.

[0067] Step 4: Place the laser instrument 100 on the flat-transparent laser mounting plate 8. Adjust the position of the feet of the flat-transparent module 1 so that the laser passes through the light-transmitting hole 5 of the flat-transparent outlet fixture 11. Adjust the position of the feet of the transparent module 2 so that the laser passes through the light-transmitting hole 5 of the transparent inlet fixture 22 and the light-transmitting hole 5 of the transparent side fixture 23, thus completing the alignment of the transparent and flat-transparent light paths.

[0068] Step 5: Move the laser instrument 100 to the laser-transmitting mounting plate 7, and adjust the positions of the feet of the RF module 3 and the analyzer 4 so that the laser passes through the light-transmitting hole 5 of the laser-transmitting inlet fixture 22, the light-transmitting hole 5 of the RF inlet / outlet fixture, the light-transmitting hole 5 of the analyzer outlet fixture 41, and the light-transmitting hole 5 of the analyzer inlet fixture 42, thus completing the optical path alignment of the laser-transmitting module 2, the RF module 3, and the analyzer 4.

[0069] Step 6: When aligning the three electrodes 300, first move the movable rod 93 towards the side away from the source cavity 200; then adjust the positions of the X-axis motor 302 and the Y-axis motor 303 so that the slit of the electrode head 301 is as close as possible to the center of the cavity; then move the movable rod 93 towards the slit of the electrode head 301 and observe whether the head 931 of the movable rod 93 can pass through the slit of the electrode head 301; if it cannot pass through, the position of the electrode head 301 needs to be readjusted using the motors; if it can pass through, the slit alignment is complete. Remove the three-electrode alignment fixture 9 from the source cavity 200 and install the ion source. Figure 19 and Figure 20 As shown.

[0070] The above description is merely a preferred embodiment of the present invention. The scope of protection of the present invention is not limited to the above embodiments. All technical solutions falling within the scope of the present invention's concept are within the scope of protection of the present invention. It should be noted that for those skilled in the art, any improvements and modifications made without departing from the principles of the present invention should also be considered within the scope of protection of the present invention.

Claims

1. A high-energy ion implanter optical path alignment device, characterized in that, include: A planar transparent module (1), a light-transmitting module (2), an RF module (3), an analyzer (4), a light-transmitting laser mounting plate (7), a planar transparent laser mounting plate (8), and a three-electrode alignment fixture (9) are arranged. The planar transparent module (1), the light-transmitting module (2), the RF module (3), and the analyzer (4) are sequentially mounted on a floor screen for easy position adjustment. The light-transmitting laser mounting plate (7) is mounted on the magnetic yoke of the light-transmitting module (2) for placing the laser instrument (100). The planar transparent laser mounting plate (8) is mounted on the magnetic yoke of the planar transparent module (1) for placing the laser instrument (100). The three-electrode alignment fixture (9) is mounted on the source cavity (200) connected to the analyzer (4) for realizing... The optical path from the ion source to the three electrodes is aligned. When aligning the optical path, the laser instrument (100) is first placed on the planar laser mounting plate (8). By adjusting the position of the feet of the planar module (1), the laser is made to pass through the planar exit. The position of the feet of the energy transmission module (2) is adjusted so that the laser passes through the energy transmission entrance and the energy transmission side, thereby completing the optical path alignment of the planar module (1) and the energy transmission module (2). Then, the laser instrument (100) is moved to the energy transmission laser mounting plate (7). The positions of the feet of the radio frequency module (3) and the analyzer (4) are adjusted respectively so that the laser passes through the energy transmission entrance, radio frequency exit, radio frequency entrance, analyzer exit and analyzer entrance in sequence, thereby completing the optical path alignment of the energy transmission module (2), the radio frequency module (3) and the analyzer (4).

2. The optical path alignment device for a high-energy ion implanter according to claim 1, characterized in that, The flat-panel module (1) is provided with a flat-panel inlet fixture (12) at its inlet and a flat-panel outlet fixture (11) at its outlet. Both the flat-panel outlet fixture (11) and the flat-panel inlet fixture (12) have light-transmitting holes (5) at their center to allow light beams to enter and exit the flat-panel module (1). The flat-panel outlet fixture (11) and the flat-panel inlet fixture (12) are provided with multiple threaded holes (61) and pin holes (62) to allow the flat-panel outlet fixture (11) and the flat-panel inlet fixture (12) to be detachably connected to the flat-panel module (1).

3. The optical path alignment device for a high-energy ion implanter according to claim 2, characterized in that, The light-transmitting module (2) has a light-transmitting inlet fixture (22) at its entrance, a light-transmitting outlet fixture (21) at its exit, and a light-transmitting side fixture (23) on its side. The light-transmitting outlet fixture (21) and the light-transmitting inlet fixture (22) each have a light-transmitting hole (5) at their center. The light-transmitting side fixture (23) has symmetrically inclined light-transmitting holes (5) in the middle to allow light beams to enter and exit the light-transmitting module (2). The light-transmitting outlet fixture (21), the light-transmitting inlet fixture (22), and the light-transmitting side fixture (23) are each provided with multiple threaded holes (61) and pin holes (62) to allow the light-transmitting outlet fixture (21), the light-transmitting inlet fixture (22), and the light-transmitting side fixture (23) to be detachably connected to the light-transmitting module (2).

4. The optical path alignment device for a high-energy ion implanter according to claim 3, characterized in that, The radio frequency module (3) has a radio frequency inlet fixture (32) at its inlet and a radio frequency outlet fixture (31) at its outlet. The radio frequency outlet fixture (31) and the radio frequency inlet fixture (32) have the same structure. The radio frequency outlet fixture (31) has a light-transmitting hole (5) at its center to allow light beams to enter and exit the radio frequency module (3). The radio frequency outlet fixture (31) has multiple threaded holes (61) and pin holes (62) evenly distributed on it to allow the radio frequency outlet fixture (31) and the radio frequency module (3) to be detachably connected.

5. The optical path alignment device for a high-energy ion implanter according to claim 4, characterized in that, The analyzer (4) has an analyzer outlet fixture (41) at its outlet and an analyzer inlet fixture (42) at its inlet. The analyzer outlet fixture (41) has a light-transmitting hole (5) at its center and the analyzer inlet fixture (42) has a ramp (421) at its center. The ramp (421) has a through light-transmitting hole (5) at its center to allow the light beam to enter and exit the analyzer (4). The analyzer outlet fixture (41) and the analyzer inlet fixture (42) are evenly distributed with multiple threaded holes (61) and pin holes (62) to allow the analyzer outlet fixture (41) and the analyzer inlet fixture (42) to be detachably connected to the analyzer (4).

6. The optical path alignment device for a high-energy ion implanter according to claim 5, characterized in that, The tilt angle β of the inclined platform (421) is 20°±2°.

7. The optical path alignment device for a high-energy ion implanter according to any one of claims 2 to 6, characterized in that, The diameter of the light-transmitting hole (5) is 1 mm ± 0.1 mm.

8. The optical path alignment device for a high-energy ion implanter according to any one of claims 1 to 6, characterized in that, The laser-transmitting mounting plate (7) has an L-shaped structure. One side of the laser-transmitting mounting plate (7) is provided with a plurality of first mounting holes (71) to enable the laser-transmitting mounting plate (7) to be mounted on the magnetic yoke of the laser-transmitting module (2). The other side of the laser-transmitting mounting plate (7) is provided with a plurality of second mounting holes (72) to enable the laser instrument (100) to be mounted on the laser-transmitting mounting plate (7).

9. The optical path alignment device for a high-energy ion implanter according to any one of claims 1 to 6, characterized in that, The planar laser mounting plate (8) has an L-shaped structure. One side of the planar laser mounting plate (8) is provided with a clamp (81) to enable the planar laser mounting plate (8) to be installed on the magnetic yoke of the planar module (1). The other side of the planar laser mounting plate (8) is provided with multiple third mounting holes (82) to enable the laser instrument (100) to be installed on the planar laser mounting plate (8).

10. The optical path alignment device for a high-energy ion implanter according to any one of claims 1 to 6, characterized in that, The three-electrode alignment fixture (9) includes a positioning block (91), a pressure block (92), and a movable rod (93); the positioning block (91) and the pressure block (92) are both mounted on the source cavity (200), the source cavity (200) is mounted on the analyzer (4), and the analyzer (4) is provided with three electrodes (300); the movable rod (93) passes through the positioning block (91) and the pressure block (92) in sequence, and the head (931) of the movable rod (93) moves and inserts into the slit of the head (301) of the three electrodes to assist in the positioning of the three electrodes (300) in the analyzer (4).

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